Combined With Floating Pn Junction Guard Region Patents (Class 257/490)
  • Patent number: 11749622
    Abstract: A field effect transistor includes: a semiconductor region including a first inactive region, an active region, and a second inactive region arranged side by side in a first direction; a gate electrode, a source electrode, and a drain electrode on the active region; a gate pad on the first inactive region; a gate guard on and in contact with the semiconductor region, the gate guard being apart from the gate pad and located between an edge on the first inactive region side of the semiconductor region and the gate pad; a drain pad on the second inactive region; a drain guard on and in contact with the semiconductor region, the drain guard being apart from the drain pad and located between an edge on the second inactive region side of the semiconductor region and the drain pad; and a metal film electrically connected to the gate guard.
    Type: Grant
    Filed: June 30, 2021
    Date of Patent: September 5, 2023
    Assignee: SUMITOMO DEVICE INNOVATIONS, INC.
    Inventor: Chihoko Akiyama
  • Patent number: 11728386
    Abstract: A semiconductor device of embodiments includes a silicon carbide layer including an element region and a termination region around the element region, the termination region having first straight-line portions extending in a first direction, second straight-line portions extending in a second direction, and corner portions between the first straight-line portions and the second straight-line portions, the termination region including a second-conductivity-type second silicon carbide region having a dot-line shape with first dot portions and first space portions surrounding the element region, an occupation ratio of the first dot portions is larger in the corner portions than in the first straight-line portions, and a second-conductivity-type third silicon carbide region having a dot-line shape with second dot portions and second space portions surrounding the second silicon carbide region, an occupation ratio of the second dot portions is lager in the corner portions than in the first straight-line portions.
    Type: Grant
    Filed: July 14, 2021
    Date of Patent: August 15, 2023
    Assignees: Kabushiki Kaisha Toshiba, Toshiba Electronic Devices & Storage Corporation
    Inventors: Hiroshi Kono, Souzou Kanie, Shigeto Fukatsu, Takuma Suzuki
  • Patent number: 11621200
    Abstract: This application provides a process for making a circuit of a bipolar junction transistor (BJT). The switchable short in one implementation of the invention is formed in a semiconductor wafer. A collector region is formed in the semiconductor wafer and inside of the collector region, a first base region is formed. An emitter region is formed inside the base region to form the BJT. A drain region is also formed inside the base region adjacent to the emitter region. A gate is formed over a portion of the base region adjacent to the drain region and the emitter region. The gate is connected to the collection region.
    Type: Grant
    Filed: May 31, 2022
    Date of Patent: April 4, 2023
    Assignee: Diodes Incorporated
    Inventor: Peter Hugh Blair
  • Patent number: 11587842
    Abstract: A semiconductor die includes a substrate, a first passivation layer over the substrate, and a second passivation layer over the first passivation layer and the substrate. The substrate has boundaries defined by a substrate termination edge. The first passivation layer is over the substrate such that it terminates at a first passivation termination edge that is inset from the substrate termination edge by a first distance. The second passivation layer is over the first passivation layer and the substrate such that it terminates at a second passivation termination edge that is inset from the substrate termination edge by a second distance. The second distance is less than the first distance such that the second passivation layer overlaps the first passivation layer.
    Type: Grant
    Filed: October 29, 2020
    Date of Patent: February 21, 2023
    Assignee: Wolfspeed, Inc.
    Inventors: Chris Hardiman, Kyoung-Keun Lee, Fabian Radulescu, Daniel Namishia, Scott Thomas Sheppard
  • Patent number: 11393811
    Abstract: The invention solves the problem of depressed SOA of a bipolar junction transistor (BJT) when operated in an open base configuration by integrating in the same semiconductor chip a switchable short between the base and the emitter of the BJT. The switchable short switches between a high resistive value when the collector voltage of the BJT is lower than the base voltage. and a lower resistive value when the collector voltage is higher than the voltage base to effectively lower the BJT current gain (hFE). The switchable short in one implementation of the invention is in the form of a MOSFET with its gate connected to the BJT collector. The invention further teaches disposing in the integrated circuit chip a junction diode with a breakdown voltage lower than the BVCBO of the BJT. The addition of the junction diode provides a measure of maintaining the effectiveness of the MOSFET as switchable short at a reduced size.
    Type: Grant
    Filed: August 2, 2021
    Date of Patent: July 19, 2022
    Assignee: Diodes Incorporated
    Inventor: Peter Hugh Blair
  • Patent number: 11094786
    Abstract: A semiconductor device of embodiments includes a silicon carbide layer including an element region and a termination region around the element region, the termination region having first straight-line portions extending in a first direction, second straight-line portions extending in a second direction, and corner portions between the first straight-line portions and the second straight-line portions, the termination region including a second-conductivity-type second silicon carbide region having a dot-line shape with first dot portions and first space portions surrounding the element region, an occupation ratio of the first dot portions is larger in the corner portions than in the first straight-line portions, and a second-conductivity-type third silicon carbide region having a dot-line shape with second dot portions and second space portions surrounding the second silicon carbide region, an occupation ratio of the second dot portions is lager in the corner portions than in the first straight-line portions.
    Type: Grant
    Filed: March 4, 2020
    Date of Patent: August 17, 2021
    Assignees: Kabushiki Kaisha Toshiba, Toshiba Electronic Devices & Storage Corporation
    Inventors: Hiroshi Kono, Souzou Kanie, Shigeto Fukatsu, Takuma Suzuki
  • Patent number: 11049785
    Abstract: In a semiconductor device, it is preferable to suppress a variation in characteristics of a temperature sensor. The semiconductor device is provided that includes a semiconductor substrate having a first conductivity type drift region, a transistor section provided in the semiconductor substrate, a diode section provided in the semiconductor substrate, a second conductivity type well region exposed at an upper surface of the semiconductor substrate, a temperature sensing unit that is adjacent to the diode section in top view and is provided above the well region, and an upper lifetime control region that is provided in the diode section, at the upper surface side of the semiconductor substrate, and in a region not overlapping with the temperature sensing unit in top view.
    Type: Grant
    Filed: September 30, 2019
    Date of Patent: June 29, 2021
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventors: Motoyoshi Kubouchi, Soichi Yoshida
  • Patent number: 10629677
    Abstract: A high power semiconductor device with a floating field ring termination includes a wafer, wherein a plurality of floating field rings is formed in an edge termination region adjacent to a first main side surface of the wafer. At least in the termination region a drift layer, in which the floating field rings are formed, includes a surface layer and a bulk layer wherein the surface layer is formed adjacent to the first main side surface to separate the bulk layer from the first main side surface and has an average doping concentration which is less than 50% of the minimum doping concentration of the bulk layer. The drift layer includes a plurality of enhanced doping regions, wherein each one of the enhanced doping regions is in direct contact with a corresponding one of the floating field rings at least on a lateral side of this floating field ring, which faces towards the active region.
    Type: Grant
    Filed: May 29, 2018
    Date of Patent: April 21, 2020
    Assignee: ABB Schweiz AG
    Inventors: Friedhelm Bauer, Umamaheswara Vemulapati
  • Patent number: 10593759
    Abstract: Semiconductor devices includes a thin epitaxial layer (nanotube) formed on sidewalls of mesas formed in a semiconductor layer. In one embodiment, a semiconductor device includes a first epitaxial layer and a second epitaxial layer formed on mesas of the semiconductor layer. The thicknesses and doping concentrations of the first and second epitaxial layers and the mesa are selected to achieve charge balance in operation. In another embodiment, the semiconductor body is lightly doped and the thicknesses and doping concentrations of the first and second epitaxial layers are selected to achieve charge balance in operation.
    Type: Grant
    Filed: July 12, 2019
    Date of Patent: March 17, 2020
    Assignee: Alpha & Omega Semiconductor, Inc.
    Inventors: Hamza Yilmaz, Xiaobin Wang, Anup Bhalla, John Chen, Hong Chang
  • Patent number: 10396158
    Abstract: Semiconductor devices are formed using a pair of thin epitaxial layers (nanotubes) of opposite conductivity type formed on sidewalls of dielectric-filled trenches. In one embodiment, a termination structure is formed in the termination area and includes a first termination cell formed in the termination area at an interface to the active area, the termination cell being formed in a mesa of the first semiconductor layer and having a first width; and an end termination cell being formed next to the first termination cell in the termination area, the end termination cell being formed in an end mesa of the first semiconductor layer and having a second width greater than the first width.
    Type: Grant
    Filed: July 26, 2018
    Date of Patent: August 27, 2019
    Assignee: Alpha and Omega Semiconductor Incorporated
    Inventors: Hamza Yilmaz, Xiaobin Wang, Anup Bhalla, John Chen, Hong Chang
  • Patent number: 10388758
    Abstract: A method for fabricating a semiconductor structure includes providing a substrate. The method further includes implanting the substrate to form a high-voltage well region having a first conductivity type. The method further includes forming a pair of drain drift regions in the high-voltage well region. The pair of drain drift regions are on the front side of the substrate, and the pair of drain drift regions have a second conductivity type opposite to the first conductivity type. The method further includes forming a gate electrode embedded in the high-voltage well region. The gate electrode is positioned between the pair of drain drift regions and laterally spaced apart from the pair of drain drift regions.
    Type: Grant
    Filed: January 22, 2018
    Date of Patent: August 20, 2019
    Assignee: Vanguard International Semiconductor Corporation
    Inventors: Chih-Cherng Liao, Manoj Kumar, Chia-Hao Lee, Chung-Te Chou, Ya-Han Liang
  • Patent number: 10355084
    Abstract: A semiconductor device includes a semiconductor chip, a cell surface electrode portion, and a peripheral edge surface structure portion. The semiconductor chip has a cell portion and a peripheral edge portion provided around the cell portion in plan view. The cell surface electrode portion is provided on the cell portion. The peripheral edge surface structure portion is provided on the peripheral edge portion. The peripheral edge portion is made thinner than the cell portion so that a back surface of the peripheral edge portion is more concave than a back surface of the cell portion. When the thickness of the cell portion is represented by tc and the size of the step between the cell portion and the peripheral edge portion on the back surface is represented by dtb, 0%<dtb/tc?1.5% is satisfied.
    Type: Grant
    Filed: August 29, 2018
    Date of Patent: July 16, 2019
    Assignee: Mitsubishi Electric Corporation
    Inventors: Koichi Nishi, Kenji Suzuki, Tetsuo Takahashi, Junichi Yamashita
  • Patent number: 10304948
    Abstract: To provide a semiconductor device in which an edge termination structure can be made smaller easily. A semiconductor device is provided, the semiconductor device including an active region and an edge termination structure formed on a front surface side of a semiconductor substrate, wherein an edge termination structure has a guard ring provided surrounding an active region on a front surface side of a semiconductor substrate, a first field plate provided on a front surface side of a guard ring, an electrode unit provided on a front surface side of a first field plate, a second field plate provided between a first field plate and a electrode unit, and a conductive connecting unit which mutually electrically connects a first field plate, an electrode unit, a second field plate, and a guard ring.
    Type: Grant
    Filed: December 26, 2016
    Date of Patent: May 28, 2019
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventors: Yoshiharu Kato, Hidenori Takahashi
  • Patent number: 10269959
    Abstract: A device comprises a buried layer over a substrate, a first well over the buried layer, a first high voltage region and a second high voltage region extending through the first well, a first drain/source region in the first high voltage region, a first gate electrode over the first well, a first spacer on a first side of the first gate electrode, wherein the first spacer is between the first drain/source region and the first gate electrode, a second spacer on a second side of the first gate electrode, a second drain/source region in the second high voltage region and a first isolation region in the second high voltage region and between the second drain/source region and the first gate electrode.
    Type: Grant
    Filed: October 10, 2017
    Date of Patent: April 23, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Po-Yu Chen, Wan-Hua Huang, Jing-Ying Chen, Kuo-Ming Wu
  • Patent number: 9923051
    Abstract: An example a semiconductor device includes a first circuit and a second circuit formed in a semiconductor substrate. The semiconductor device further includes a first guard structure formed in the semiconductor substrate and disposed between the first circuit and the second circuit, the first guard structure including first discontinuous pairs of n+ and p+ diffusions disposed along a first axis. The semiconductor device further includes a second guard structure formed in the semiconductor substrate and disposed between the first circuit and the second circuit, the second guard structure including second discontinuous pairs of n+ and p+ diffusions disposed along the first axis, the second discontinuous pairs of n+ and p+ diffusions being staggered with respect to the first discontinuous pairs of n+ and p+ diffusions.
    Type: Grant
    Filed: September 21, 2016
    Date of Patent: March 20, 2018
    Assignee: XILINX, INC.
    Inventors: Jing Jing, Shuxian Wu, Jane Sowards
  • Patent number: 9704947
    Abstract: A semiconductor device including a terminal region that can suppress a resist collapse in manufacturing and effectively relieve a concentration of electric fields and a method for manufacturing the semiconductor device. The semiconductor device includes a semiconductor element formed in a semiconductor substrate made of a silicon carbide semiconductor of a first conductivity type and a plurality of ring-shaped regions of a second conductivity type formed in the semiconductor substrate while surrounding the semiconductor element in plan view. At least one of the plurality of ring-shaped regions includes one or more separation regions of the first conductivity type that cause areas of the first conductivity type on an inner side and an outer side of one of the ring-shaped regions to communicate with each other in plan view.
    Type: Grant
    Filed: May 2, 2014
    Date of Patent: July 11, 2017
    Assignee: Mitsubishi Electric Corporation
    Inventors: Kohei Ebihara, Naruhisa Miura, Kenji Hamada, Koji Okuno
  • Patent number: 9577087
    Abstract: A semiconductor apparatus that has a first parallel pn-layer formed between an active region and an n+-drain region. A peripheral region is provided with a second parallel pn-layer, which has a repetition pitch narrower than the repetition pitch of the first parallel pn-layer. An n?-surface region is formed between the second parallel pn-layer and a first main surface. On the first main surface side of the n?-surface region, a plurality of p-guard ring regions are formed to be separated from each other. A field plate electrode is connected electrically to the outermost p-guard ring region among the p-guard ring regions. A channel stopper electrode is connected electrically to an outermost peripheral p-region of the peripheral region.
    Type: Grant
    Filed: December 7, 2011
    Date of Patent: February 21, 2017
    Assignee: FUI ELECTRIC CO., LTD.
    Inventors: Yasuhiko Onishi, Akio Sugi
  • Patent number: 9419092
    Abstract: A silicon carbide device has a termination region that includes a mesa region that links the termination region to an active area of the device and that includes one or more trenches.
    Type: Grant
    Filed: March 1, 2006
    Date of Patent: August 16, 2016
    Assignee: Vishay-Siliconix
    Inventors: Rossano Carta, Laura Bellemo
  • Patent number: 9401314
    Abstract: A method of testing a semiconductor device having a substrate in and on which a cell structure and a termination structure are formed, the cell structure having a main current flowing therethrough, the termination structure surrounding the cell structure, the method includes a first test step of testing dielectric strength of the semiconductor device, a charge removal step of, after the first test step, removing charge from a top surface layer of the termination structure, the top surface layer being located on the substrate and formed of an insulating film or a semi-insulating film, and a second test step of, after the charge removal step, testing dielectric strength of the semiconductor device.
    Type: Grant
    Filed: April 1, 2014
    Date of Patent: July 26, 2016
    Assignee: MITSUBISHI ELECTRIC CORPORATION
    Inventors: Eiko Otsuki, Yasuhiro Yoshiura, Koji Sadamatsu
  • Patent number: 9293524
    Abstract: A semiconductor device has a semiconductor body with bottom and top sides and a lateral surface. An active semiconductor region is formed in the semiconductor body and an edge region surrounds the active semiconductor region. A first semiconductor zone of a first conduction type is formed in the edge region. An edge termination structure having at least N field limiting structures is formed in the edge region. Each of the field limiting structures has a field ring and a separation trench formed in the semiconductor body, where N is at least 1. Each of the field rings has a second conduction type, forms a pn-junction with the first semiconductor zone and surrounds the active semiconductor region. For each of the field limiting structures, the separation trench of that field limiting structure is arranged between the field ring of that field limiting structure and the active semiconductor region.
    Type: Grant
    Filed: May 2, 2014
    Date of Patent: March 22, 2016
    Assignee: Infineon Technologies AG
    Inventors: Elmar Falck, Wolfgang Roesener, Hans Peter Felsl, Andre Stegner
  • Patent number: 9287393
    Abstract: In a semiconductor device provided with a MOSFET part and a gate pad part, the gate pad part includes: a low resistance semiconductor layer; a drift layer; a poly-silicon layer constituting a conductor layer and a gate pad electrode formed above the drift layer over the whole area of the gate pad part with a field insulation layer interposed therebetween; and a gate oscillation suppressing structure, wherein the gate oscillation suppressing structure includes a p+-type diffusion region which is disposed along an outer peripheral portion of the gate pad part and is electrically connected with the a source electrode layer, and a p+-type diffusion region in a floating state and the p-type impurity non-diffusion regions which are alternately formed in the region surrounded by the p+-type diffusion region.
    Type: Grant
    Filed: March 31, 2014
    Date of Patent: March 15, 2016
    Assignee: SHINDENGEN ELECTRIC MANUFACTURING CO., LTD.
    Inventor: Nobuki Miyakoshi
  • Patent number: 9287354
    Abstract: A semiconductor component having differently structured cell regions, and a method for producing it. For this purpose, the semiconductor component includes a semiconductor body. A first electrode on the top side of the semiconductor body is electrically connected to a first zone near the surface of the semiconductor body. A second electrode is electrically connected to a second zone of the semiconductor body. Furthermore, the semiconductor body has a drift path region, which is arranged in the semiconductor body between the first electrode and the second electrode. A cell region of the semiconductor component is subdivided into a main cell region and an auxiliary cell region, wherein the breakdown voltage of the auxiliary cells is greater than the breakdown voltage of the main cells.
    Type: Grant
    Filed: June 13, 2013
    Date of Patent: March 15, 2016
    Assignee: Infineon Technologies Austria AG
    Inventor: Franz Hirler
  • Patent number: 9196692
    Abstract: A semiconductor device is formed with a stepped field plate over at least three sequential regions in which a total dielectric thickness under the stepped field plate is at least 10 percent thicker in each region compared to the preceding region. The total dielectric thickness in each region is uniform. The stepped field plate is formed over at least two dielectric layers, of which at least all but one dielectric layer is patterned so that at least a portion of a patterned dielectric layer is removed in one or more regions of the stepped field plate.
    Type: Grant
    Filed: May 7, 2015
    Date of Patent: November 24, 2015
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Sameer Pendharkar, Naveen Tipirneni
  • Patent number: 9159846
    Abstract: A SiC semiconductor device includes a SiC semiconductor layer having a first-conductivity-type impurity, a field insulation film formed on a front surface of the SiC semiconductor layer and provided with an opening for exposing therethrough the front surface of the SiC semiconductor layer, an electrode connected to the SiC semiconductor layer through the opening of the field insulation film, and a guard ring having a second-conductivity-type impurity and being formed in a surface layer portion of the SiC semiconductor layer to make contact with a terminal end portion of the electrode connected to the SiC semiconductor layer. A second-conductivity-type impurity concentration in a surface layer portion of the guard ring making contact with the electrode is smaller than a first-conductivity-type impurity concentration in the SiC semiconductor layer.
    Type: Grant
    Filed: December 8, 2011
    Date of Patent: October 13, 2015
    Assignee: ROHM CO., LTD.
    Inventors: Shuhei Mitani, Masatoshi Aketa
  • Patent number: 9129819
    Abstract: A breakdown voltage structure portion includes a field plate with an annular polysilicon field plate and a metal field plate. In the breakdown voltage structure portion, a plurality of annular guard rings are provided in a surface layer of the semiconductor substrate. The polysilicon field plates are separately arranged on the inner circumferential side and the outer circumferential side of the guard ring. Polysilicon bridges that connect the polysilicon field plates on the inner and outer circumferential sides are provided on at least one guard ring among the plurality of guard rings at a predetermined interval so as to be arranged over the entire circumference of the guard ring. The metal field plate is provided on the guard ring in a corner portion of the breakdown voltage structure portion and at least one guard ring in a straight portion of the breakdown voltage structure portion.
    Type: Grant
    Filed: June 14, 2012
    Date of Patent: September 8, 2015
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventor: Hitoshi Abe
  • Patent number: 9054039
    Abstract: A semiconductor device includes: a substrate; a lower wiring on the substrate; an inter-layer insulating film covering the lower wiring; first and second upper wirings on the inter-layer insulating film and separated from each other; and a semi-insulating protective film covering the first and second upper wirings, wherein the protective film is not provided in a region right above the lower wiring and between the first upper wiring and the second upper wiring.
    Type: Grant
    Filed: July 30, 2014
    Date of Patent: June 9, 2015
    Assignee: MITSUBISHI ELECTRIC CORPORATION
    Inventor: Hidenori Fujii
  • Publication number: 20150115391
    Abstract: A method for forming a semiconductor device includes providing a semiconductor substrate having a first area and a second area. A first metal layer structure is formed which includes at least a first metal portion in the first area and a second metal portion in the second area. A plating mask is formed on the first metal layer structure to cover the second metal portion, and a second metal layer structure is plated on and in ohmic contact with the first metal portion of the first metal layer structure.
    Type: Application
    Filed: October 31, 2013
    Publication date: April 30, 2015
    Inventors: Roman Roth, Frank Umbach
  • Patent number: 8994141
    Abstract: A semiconductor includes an N-type impurity region provided in a substrate. A P-type RESURF layer is provided at a top face of the substrate in the N-type impurity region. A P-well has an impurity concentration higher than that of the P-type RESURF layer, and makes contact with the P-type RESURF layer at the top face of the substrate in the N-type impurity region. A first high-voltage-side plate is electrically connected to the N-type impurity region, and a low-voltage-side plate is electrically connected to a P-type impurity region. A lower field plate is capable of generating a lower capacitive coupling with the substrate. An upper field plate is located at a position farther from the substrate than the lower field plate, and is capable of generating an upper capacitive coupling with the lower field plate whose capacitance is greater than the capacitance of the lower capacitive coupling.
    Type: Grant
    Filed: January 11, 2010
    Date of Patent: March 31, 2015
    Assignee: Mitsubishi Electric Corporation
    Inventors: Tetsuo Takahashi, Takami Otsuki
  • Publication number: 20150054118
    Abstract: A semiconductor device includes a semiconductor substrate, and a field plate portion formed on a front surface of a non-cell region. The non-cell region includes a plurality of FLR layers. The FLR layers extend in a first direction along a circumference of the cell region. The field plate portion includes: an insulating film; a plurality of first conducting layers each disposed along a corresponding FLR layer; and a plurality of second conducting layers. The second conducting layers are disposed on part of their corresponding FLR layers in an intermittent manner along the corresponding FLR layers. Each of the second conducting layers includes a front surface portion, a first contact portion, and a second contact portion. Any of the first contact portions and the second contact portions are not provided at positions adjacent to the first contact portion and the second contact portion in the second direction.
    Type: Application
    Filed: March 22, 2012
    Publication date: February 26, 2015
    Applicant: TOYOTA JIDOSHA KABUSHIKI KAISHA
    Inventor: Masaru Senoo
  • Patent number: 8952393
    Abstract: A first drift layer has a first surface facing a first electrode and electrically connected to a first electrode, and a second surface opposite to the first surface. The first drift layer has an impurity concentration NA. A relaxation region is provided in a portion of the second surface of the first drift layer. The first drift layer and the second drift layer form a drift region in which the relaxation region is buried. The second drift layer has an impurity concentration NB, NB>NA being satisfied. A body region, a source region, and a second electrode are provided on the second drift layer.
    Type: Grant
    Filed: February 10, 2014
    Date of Patent: February 10, 2015
    Assignee: Sumitomo Electric Industries, Ltd.
    Inventors: Keiji Wada, Takeyoshi Masuda, Toru Hiyoshi
  • Patent number: 8907414
    Abstract: Aspects of the present disclosure describe high voltage fast recovery trench diodes and methods for make the same. The device may have trenches that extend at least through a top P-layer and an N-barrier layer. A conductive material may be disposed in the trenches with a dielectric material lining the trenches between the conductive material and sidewalls of the trenches. A highly doped P-pocket may be formed in an upper portion of the top P-layer between the trenches. A floating N-pocket may be formed directly underneath the P-pocket. The floating N-pocket may be as wide as or wider than the P-pocket. It is emphasized that this abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.
    Type: Grant
    Filed: March 26, 2014
    Date of Patent: December 9, 2014
    Assignee: Alpha and Omega Semiconductor Incorporated
    Inventors: Jun Hu, Karthik Padmanabhan, Madhur Bobde, Hamza Yilmaz
  • Publication number: 20140353793
    Abstract: The present invention provides a guarding ring structure of a semiconductor high voltage device and the manufacturing method thereof The guarding ring structure comprises a first N type monocrystalline silicon substrate (3), a second N type monocrystalline silicon substrate (8), a discontinuous oxide layer (2), a metal field plate (1), a device region (9), multiple P+ type diffusion rings (5) and an equipotential ring (4). The second N type monocrystalline silicon substrate (8) is a single N type crystalline layer epitaxially formed on the first N type monocrystalline silicon substrate (3) and has lower doping concentration than the first N type monocrystalline silicon substrate (3). N type diffusion rings (6) are embedded in the inner side of the P+ type diffusion rings (5) and are fully depleted at zero bias voltage. The guarding ring structure can achieve the same withstand voltage with less area and design time.
    Type: Application
    Filed: November 21, 2012
    Publication date: December 4, 2014
    Inventor: Deming Sun
  • Patent number: 8890293
    Abstract: A guard ring for a through via, and a method of manufacture thereof, is provided. The guard ring comprises one or more rings around a through via, wherein the rings may be, for example, circular, rectangular, octagon, elliptical, square, or the like. The guard ring may be formed from a contact through an inter-layer dielectric layer and interconnect structures (e.g., vias and lines) extending through the inter-metal dielectric layers. The guard ring may contact a well formed in the substrate.
    Type: Grant
    Filed: December 16, 2011
    Date of Patent: November 18, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Hung Lu, Song-Bor Lee, Ching-Chen Hao
  • Patent number: 8866222
    Abstract: A semiconductor device includes a semiconductor body and a source metallization arranged on a first surface of the body. The body includes: a first semiconductor layer including a compensation-structure; a second semiconductor layer adjoining the first layer, comprised of semiconductor material of a first conductivity type and having a doping charge per horizontal area lower than a breakdown charge per area of the semiconductor material; a third semiconductor layer of the first conductivity type adjoining the second layer and comprising at least one of a self-charging charge trap, a floating field plate and a semiconductor region of a second conductivity type forming a pn-junction with the third layer; and a fourth semiconductor layer of the first conductivity type adjoining the third layer and having a maximum doping concentration higher than that of the third layer. The first semiconductor layer is arranged between the first surface and the second semiconductor layer.
    Type: Grant
    Filed: February 28, 2013
    Date of Patent: October 21, 2014
    Assignee: Infineon Technologies Austria AG
    Inventors: Hans Weber, Stefan Gamerith, Franz Hirler
  • Patent number: 8841699
    Abstract: A semiconductor device includes an IGBT forming region and a diode forming region. The IGBT forming region includes an IGBT operating section that operates as an IGBT and a thinned-out section that does not operate as an IGBT. The IGBT operating section includes a channel region, and the thinned-out section includes a first anode region. The diode forming region includes a second anode region. When an area density is defined as a value calculated by integrating a concentration profile of second conductivity type impurities in each of the channel region, the first anode region, and the second anode region in a depth direction, an area density of the channel region is higher than an area density of the first anode region and an area density of the second anode region.
    Type: Grant
    Filed: June 13, 2012
    Date of Patent: September 23, 2014
    Assignee: DENSO CORPORATION
    Inventors: Yukio Tsuzuki, Hiromitsu Tanabe, Kenji Kouno
  • Patent number: 8809969
    Abstract: A semiconductor device using one or more guard rings includes a p-type guard ring region surrounding a pn junction region, an insulating film covering the p-type guard ring region, one or more conductive films electrically connected with the p-type guard ring region through one or more contact holes made in the insulating film, and a semi-insulating film covering the insulating film and the conductive films. Thus, a desired breakdown voltage characteristic can be ensured even if a foreign matter or the like adheres to a surface of the conductive films.
    Type: Grant
    Filed: December 31, 2009
    Date of Patent: August 19, 2014
    Assignee: Mitsubishi Electric Corporation
    Inventors: Yoichiro Tarui, Atsushi Narazaki, Ryoichi Fujii
  • Patent number: 8803252
    Abstract: A drift layer forms a first main surface of a silicon carbide layer and has a first conductivity type. A source region is provided to be spaced apart from the drift layer by a body region, forms a second main surface, and has the first conductivity type. A relaxing region is provided within the drift layer and has a distance Ld from the first main surface. The relaxing region has a second conductivity type and has an impurity dose amount Drx. The drift layer has an impurity concentration Nd between the first main surface and the relaxing region. Relation of Drx>Ld·Nd is satisfied. Thus, a silicon carbide semiconductor device having a high breakdown voltage is provided.
    Type: Grant
    Filed: June 19, 2013
    Date of Patent: August 12, 2014
    Assignee: Sumitomo Electric Industries, Ltd.
    Inventors: Keiji Wada, Takeyoshi Masuda, Toru Hiyoshi
  • Patent number: 8803251
    Abstract: This invention discloses a semiconductor power device disposed in a semiconductor substrate comprising a heavily doped region formed on a lightly doped region and having an active cell area and an edge termination area. The edge termination area comprises a plurality of termination trenches formed in the heavily doped region with the termination trenches lined with a dielectric layer and filled with a conductive material therein. The edge termination further includes a plurality of buried guard rings formed as doped regions in the lightly doped region of the semiconductor substrate immediately adjacent to the termination trenches.
    Type: Grant
    Filed: July 19, 2011
    Date of Patent: August 12, 2014
    Assignee: Alpha and Omega Semiconductor Incorporated
    Inventors: Yeeheng Lee, Madhur Bobde, Yongping Ding, Jongoh Kim, Anup Bhalla
  • Patent number: 8786045
    Abstract: In one general aspect, a termination structure can include a plurality of pillars of a first conductivity type formed inside a termination region of a second conductivity type opposite the first conductivity type where the plurality of pillars define a plurality of concentric rings surrounding an active area of a semiconductor device. The termination structure can include a conductive field plate where the plurality of pillars includes a first pillar coupled to the conductive field plate. The termination structure can include a dielectric layer where the plurality of pillars include a second pillar insulated by the dielectric layer from a portion of the conductive field plate disposed directly above the second pillar included in the plurality of pillars.
    Type: Grant
    Filed: September 9, 2010
    Date of Patent: July 22, 2014
    Assignee: Fairchild Semiconductor Corporation
    Inventors: Ashok Challa, Jaegil Lee, Jinyoung Jung, Hocheol Jang
  • Publication number: 20140167204
    Abstract: TSV devices with p-n junctions that are planar have superior performance in breakdown and current handling. Junction diode assembly formed in enclosed trenches occupies less chip area compared with junction-isolation diode assembly in the known art. Diode assembly fabricated with trenches formed after the junction formation reduces fabrication cost and masking steps increase process flexibility and enable asymmetrical TSV and uni-directional TSV functions.
    Type: Application
    Filed: December 13, 2012
    Publication date: June 19, 2014
    Applicant: DIODES INCORPORATED
    Inventors: John Earnshaw, Wofgang Kemper, Yen-Yi Lin, Steve Badcock, Mark French
  • Publication number: 20140145291
    Abstract: Disclosed herein is a power semiconductor device. The power semiconductor device includes a second conductive type first junction termination extension (JTE) layer that is formed so as to be in contact with one side of the second conductive type well layer, a second conductive type second JTE layer that is formed on the same line as the second conductive type first JTE layer, and is formed so as to be spaced apart from the second conductive type first JTE layer in a length direction of the substrate, and a poly silicon layer that is formed so as to be in contact with the second conductive type well layer and an upper portion of the second conductive type first JTE layer.
    Type: Application
    Filed: March 12, 2013
    Publication date: May 29, 2014
    Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
    Inventors: In Hyuk Song, Kee Ju Um, Chang Su Jang, Jae Hoon Park, Dong Soo Seo
  • Patent number: 8710585
    Abstract: Aspects of the present disclosure describe high voltage fast recovery trench diodes and methods for make the same. The device may have trenches that extend at least through a top P-layer and an N-barrier layer. A conductive material may be disposed in the trenches with a dielectric material lining the trenches between the conductive material and sidewalls of the trenches. A highly doped P-pocket may be formed in an upper portion of the top P-layer between the trenches. A floating N-pocket may be formed directly underneath the P-pocket. The floating N-pocket may be as wide as or wider than the P-pocket. It is emphasized that this abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.
    Type: Grant
    Filed: February 25, 2013
    Date of Patent: April 29, 2014
    Assignee: Alpha and Omega Semiconductor Incorporated
    Inventors: Jun Hu, Karthik Padmanabhan, Madhur Bobde, Hamza Yilmaz
  • Patent number: 8633543
    Abstract: An electro-static discharge protection circuit includes: a PNPN junction, a P-type side of the PNPN junction being coupled to a terminal, an N-type side of the PNPN junction being coupled to ground; and a P-type metal oxide semiconductor transistor, a source and a gate of the P-type metal oxide semiconductor transistor being coupled to an N-type side of a PN junction whose P-type side coupled to the ground, and a drain of the P-type metal oxide semiconductor transistor being coupled to the terminal.
    Type: Grant
    Filed: March 2, 2011
    Date of Patent: January 21, 2014
    Assignee: Fujitsu Semiconductor Limited
    Inventors: Kazutoshi Ohta, Kenji Hashimoto
  • Publication number: 20130341752
    Abstract: A semiconductor device comprises a piece of semiconductor material. On a surface of said piece of semiconductor material, a number of electrodes exist and are configured to assume different electric potentials. A guard structure comprises a two-dimensional array of conductive patches, at least some of which are left to assume an electric potential under the influence of electric potentials existing at said electrodes.
    Type: Application
    Filed: June 20, 2012
    Publication date: December 26, 2013
    Inventor: Pasi KOSTAMO
  • Patent number: 8558315
    Abstract: A trench isolation metal-oxide-semiconductor (MOS) P-N junction diode device and a manufacturing method thereof are provided. The trench isolation MOS P-N junction diode device is a combination of an N-channel MOS structure and a lateral P-N junction diode, wherein a polysilicon-filled trench oxide layer is buried in the P-type structure to replace the majority of the P-type structure. As a consequence, the trench isolation MOS P-N junction diode device of the present invention has the benefits of the Schottky diode and the P-N junction diode. That is, the trench isolation MOS P-N junction diode device has rapid switching speed, low forward voltage drop, low reverse leakage current and short reverse recovery time.
    Type: Grant
    Filed: July 26, 2011
    Date of Patent: October 15, 2013
    Assignee: PFC Device Corporation
    Inventors: Mei-Ling Chen, Hung-Hsin Kuo, Kou-Liang Chao
  • Patent number: 8492873
    Abstract: An integrated circuit is provided with guard rings that form ring-like reverse-biased p-n junctions around circuitry. Capacitors may be integrated into the guard rings. Power supply lines may be connected to the guard rings and the capacitors. The capacitors may stabilize power supply voltages on the power supply lines. The power supply lines may be arranged such that they are parallel to each other. The power supply lines can form one or more parallel plate capacitors that stabilize the power supply voltages on the power supply lines.
    Type: Grant
    Filed: March 4, 2010
    Date of Patent: July 23, 2013
    Assignee: Altera Corporation
    Inventor: Chee Hong Tan
  • Patent number: 8487372
    Abstract: A trench MOSFET layout with multiple trenched floating gates and at least one trenched channel stop gate in termination area shorted with drain region is disclosed to make it feasibly achieved after die sawing. The layout consisted of dual trench MOSFETs connected together with multiple sawing trenched gates across a space between the two trench MOSFETs having a width same as scribe line.
    Type: Grant
    Filed: October 12, 2012
    Date of Patent: July 16, 2013
    Assignee: Force Mos Technology Co., Ltd.
    Inventor: Fu-Yuan Hsieh
  • Publication number: 20130175656
    Abstract: Disclosed is a Zener diode having a scalable reverse-bias breakdown voltage (Vb) as a function of the position of a cathode contact region relative to the interface between adjacent cathode and anode well regions. Specifically, cathode and anode contact regions are positioned adjacent to corresponding cathode and anode well regions and are further separated by an isolation region. However, while the anode contact region is contained entirely within the anode well region, one end of the cathode contact region extends laterally into the anode well region. The length of this end can be predetermined in order to selectively adjust the Vb of the diode (e.g., increasing the length reduces Vb of the diode and vice versa). Also disclosed are an integrated circuit, incorporating multiple instances of the diode with different reverse-bias breakdown voltages, a method of forming the diode and a design structure for the diode.
    Type: Application
    Filed: January 9, 2012
    Publication date: July 11, 2013
    Applicant: International Business Machines Corporation
    Inventors: Frederick G. Anderson, Natalie B. Feilchenfeld, David L. Harmon, Richard A. Phelps, Yun Shi, Michael J. Zierak
  • Patent number: 8482066
    Abstract: A semiconductor device and a manufacturing method for the same are provided. The semiconductor device comprises a first doped region, a second doped region, a dielectric structure and a gate structure. The first doped region has a first type conductivity. The second doped region has a second type conductivity opposite to the first type conductivity and is adjacent to the first doped region. The dielectric structure comprises a first dielectric portion and a second dielectric portion separated from each other. The dielectric structure is formed on the first doped region. The gate structure is on a part of the first doped region or second doped region adjacent to the first dielectric portion.
    Type: Grant
    Filed: September 2, 2011
    Date of Patent: July 9, 2013
    Assignee: Macronix International Co., Ltd.
    Inventors: Chien-Wen Chu, Wing-Chor Chan, Shyi-Yuan Wu
  • Publication number: 20130105933
    Abstract: A semiconductor apparatus includes a semiconductor substrate. The semiconductor substrate includes an active region in which a semiconductor device is formed, and a peripheral region which is located between the active region and an edge surface of the semiconductor substrate. A first insulating layer including conductive particles is formed above at least a part of the peripheral region. By constructing the semiconductor apparatus in this manner, generation of a high electric field in the peripheral region can be suppressed. Therefore, voltage endurance characteristics of the semiconductor apparatus can be improved.
    Type: Application
    Filed: July 18, 2012
    Publication date: May 2, 2013
    Applicant: TOYOTA JIDOSHA KABUSHIKI KAIHSA
    Inventor: Keigo SATO