Including Capacitor Component Patents (Class 257/532)
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Patent number: 11594596Abstract: Embodiments of the present invention are directed to a back-end-of-line (BEOL) compatible metal-insulator-metal on-chip decoupling capacitor (MIMCAP). This BEOL compatible process includes a thermal treatment for inducing an amorphous-to-cubic phase change in the insulating layer of the MIM stack prior to forming the top electrode. In a non-limiting embodiment of the invention, a bottom electrode layer is formed, and an insulator layer is formed on a surface of the bottom electrode layer. The insulator layer can include an amorphous dielectric material. The insulator layer is thermally treated such that the amorphous dielectric material undergoes a cubic phase transition, thereby forming a cubic phase dielectric material. A top electrode layer is formed on a surface of the cubic phase dielectric material of the insulator layer.Type: GrantFiled: March 3, 2021Date of Patent: February 28, 2023Assignee: International Business Machines CorporationInventors: Paul Jamison, Takashi Ando, John Greg Massey, Eduard Cartier
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Patent number: 11594595Abstract: A capacitor structure includes a plurality of bottom electrodes horizontally spaced apart from each other, a support structure covering sidewalls of the bottom electrodes, a top electrode surrounding the support structure and the bottom electrodes, and a dielectric layer interposed between the support structure and the top electrode, and between the top electrode and each of the bottom electrodes. An uppermost surface of the support structure is positioned at a higher level than an uppermost surface of each of the bottom electrodes.Type: GrantFiled: January 25, 2021Date of Patent: February 28, 2023Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Jong-Min Lee, Hyongsoo Kim, Jongryul Jun
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Patent number: 11581254Abstract: Metal-insulator-metal (MIM) capacitor, an integrated semiconductor device having a MIM capacitor and methods of making. The MIM capacitor includes a first metal layer, a second metal layer and a dielectric layer located between the second metal layer and the first metal layer. The first metal layer, the second metal layer and the dielectric layer may be formed in a comb structure, wherein the comb structure include a first tine structure and at least a second tine structure.Type: GrantFiled: October 13, 2020Date of Patent: February 14, 2023Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Paul Yang, Tsun-Kai Tsao, Sheng-Chau Chen, Sheng-Chan Li, Cheng-Yuan Tsai
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Patent number: 11581250Abstract: A package includes a chip formed in a first area of the package and a molding compound formed in a second area of the package adjacent to the first area. A first polymer layer is formed on the chip and the molding compound, a second polymer layer is formed on the first polymer layer, and a plurality of interconnect structures is formed between the first polymer layer and the second polymer layer. A metal-insulator-metal (MIM) capacitor is formed on the second polymer layer and electrically coupled to at least one of the plurality of interconnect structures. A metal bump is formed over and electrically coupled to at least one of the plurality of interconnect structures.Type: GrantFiled: March 31, 2021Date of Patent: February 14, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Shuo-Mao Chen, Der-Chyang Yeh, Chiung-Han Yeh
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Patent number: 11575052Abstract: A method of forming a semiconductor device includes: depositing a first conductive plate and a second conductive plate adjacent to the first conductive plate; depositing a first insulating plate on the first conductive plate and the second conductive plate; depositing a third conductive plate on the first insulating plate; depositing a second insulating plate on the third conductive plate; forming a fourth conductive plate on the second insulating plate; forming a first conductive via penetrating the fourth conductive plate, the second insulating plate, the first insulating plate, and the first conductive plate; and forming a second conductive via penetrating the second insulating plate, the third conductive plate, the first insulating plate, and the second conductive plate.Type: GrantFiled: September 8, 2020Date of Patent: February 7, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Yu-Hsing Chang, Chern-Yow Hsu, Shih-Chang Liu
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Patent number: 11569146Abstract: Various embodiments may provide a semiconductor package. The semiconductor package may include a semiconductor chip, a first mold compound layer at least partially covering the semiconductor chip, and a redistribution layer over the first mold compound layer, the redistribution layer including one or more electrically conductive lines in electrical connection with the semiconductor chip. The semiconductor package may additionally include a second mold compound layer over the redistribution layer, and an antenna array over the second mold compound layer, the antenna array configured to be coupled to the one or more electrically conductive lines.Type: GrantFiled: June 8, 2017Date of Patent: January 31, 2023Assignee: AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCHInventors: Ka Fai Chang, Yong Han, David Soon Wee Ho, Ying Ying Lim
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Patent number: 11569171Abstract: A semiconductor memory device includes a substrate including a cell area and a peripheral area, a plurality of capacitors including a plurality of lower electrodes arranged in the cell area, a plurality of capacitor dielectric layers covering the plurality of lower electrodes, and an upper electrode on the plurality of capacitor dielectric layers, an etch stop layer covering the upper electrode, a filling insulation layer covering the etch stop layer and arranged in the cell area and the peripheral area, a plurality of wiring lines on the filling insulation layer, and a first wiring contact plug electrically connecting at least one of the plurality of wiring lines to the upper electrode. The upper electrode includes a first upper electrode layer covering the plurality of capacitor dielectric layers and including a semiconductor material and a second upper electrode layer covering the first upper electrode layer and including a metallic material.Type: GrantFiled: May 26, 2021Date of Patent: January 31, 2023Assignee: Samsung Electronics Co., Ltd.Inventors: Yonghyeok Son, Junwoo Lee, Sungdong Cho
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Patent number: 11562987Abstract: Semiconductor devices having multiple substrates and die stacks, and associated systems and methods, are disclosed herein. In some embodiments, a semiconductor device includes a package substrate, and a first die stack mounted on the package substrate and including a plurality of first memory dies. The device can include a substrate mounted on the first die stack, the substrate including a plurality of routing elements. The device can also include a second die stack mounted on the substrate, the second die stack including a plurality of second memory dies. The device can further include a controller die mounted on the substrate. The controller die can be configured to communicate with the second die stack via the routing elements of the substrate. The device can include a mold material encapsulating the first die stack, the second die stack, the substrate, and the controller die.Type: GrantFiled: April 16, 2021Date of Patent: January 24, 2023Assignee: Micron Technology, Inc.Inventors: Chin Hui Chong, Hong Wan Ng, Hem P. Takiar, Seng Kim Ye, Kelvin Tan Aik Boo
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Patent number: 11563009Abstract: A semiconductor memory device includes a transistor having a gate, a source and a drain and a metal-insulator-semiconductor (MIS) structure. The transistor and the MIS structure are disposed on a common substrate. The MIS structure includes a dielectric layer disposed on a semiconductor region, and an electrode electrically disposed on the dielectric layer and coupled to the drain of the transistor. The electrode includes a bulk portion and a high-resistance portion, both disposed on the dielectric layer. The high-resistance portion has a resistance value in a range from 1.0×10?4 ?cm to 1.0×104 ?cm or a sheet resistance in a range from 1.0×102?/? to 1.0×1010?/?.Type: GrantFiled: December 28, 2020Date of Patent: January 24, 2023Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., NATIONAL TAIWAN UNIVERSITYInventors: Jenn-Gwo Hwu, Samuel C. Pan, Chien-Shun Liao, Kuan-Hao Tseng
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Patent number: 11562978Abstract: Electronic device package technology is disclosed. In one example, an electronic device comprises a die (18) having a bond pad (22); and a decoupling capacitor (14) mounted on the die (18) and electrically coupled to the die (18). A method for making an electronic device comprises mounting a decoupling capacitor (14) on a die (18); and electrically coupling the decoupling capacitor (14) to the die (18).Type: GrantFiled: December 31, 2016Date of Patent: January 24, 2023Assignee: Intel CorporationInventors: Florence R. Pon, Tyler Leuten, John K. Yap
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Patent number: 11562958Abstract: The present application discloses a method for fabricating a semiconductor device. The method includes providing a substrate comprising a central array area and a marginal array area surrounding the central array area; concurrently forming a first bit line above the central array area and a first dummy bit line above the marginal array area; and concurrently forming a second bit line above the central array area and a second dummy bit line above the marginal array area. The second bit line is higher than and offset from the first bit line and the second dummy bit line is directly above the first dummy bit line.Type: GrantFiled: November 1, 2021Date of Patent: January 24, 2023Assignee: NANYA TECHNOLOGY CORPORATIONInventor: Tse-Yao Huang
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Patent number: 11552027Abstract: Various embodiments of the present application are directed towards a semiconductor packaging device including a shield structure configured to block magnetic and/or electric fields from a first electronic component and a second electronic component. The first and second electronic components may, for example, be inductors or some other suitable electronic components. In some embodiments, a first IC chip overlies a second IC chip. The first IC chip includes a first substrate and a first interconnect structure overlying the first substrate. The second IC chip includes a second substrate and a second interconnect structure overlying the second substrate. The first and second electronic components are respectively in the first and second interconnect structures. The shield structure is directly between the first and second electronic components.Type: GrantFiled: June 7, 2021Date of Patent: January 10, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Wei-Yu Chien, Chien-Hsien Tseng, Dun-Nian Yaung, Nai-Wen Cheng, Pao-Tung Chen, Yi-Shin Chu, Yu-Yang Shen
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Patent number: 11552011Abstract: An integrated circuit structure includes a metal-insulator-metal (MIM) capacitor and a thin-film resistor (TFR) formed concurrently, using components of shared material layers. A first metal layer may be patterned to form lower components of an interconnect structure, MIM capacitor, and TFR, and a second metal layer may be patterned to form upper components of the interconnect structure, MIM capacitor, and TFR. A via layer may be deposited to form interconnect vias, a cup-shaped bottom electrode component of the MIM capacitor, and a pair of TFR contact vias for the TFR. An insulator layer may be patterned to form both an insulator for the MIM capacitor and an insulator cap over the TFR element.Type: GrantFiled: May 5, 2021Date of Patent: January 10, 2023Assignee: Microchip Technology IncorporatedInventor: Yaojian Leng
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Patent number: 11552195Abstract: A semiconductor device in a first area includes first non-planar semiconductor structures separated with a first distance, and a first isolation region including a first layer and a second layer that collectively embed a lower portion of each of the first non-planar semiconductor structures. At least one of the first layer or second layer of the first isolation region is in a cured state. The semiconductor device in a second area includes second non-planar semiconductor structures separated with a second distance, and a second isolation region including a first layer and a second layer that collectively embed a lower portion of each of the second non-planar semiconductor structures. At least one of the first or second layer of the second isolation region is in a cured state.Type: GrantFiled: April 14, 2021Date of Patent: January 10, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Shih-Yao Lin, Hsiao Wen Lee, Li-Jung Kuo, Chen-Ping Chen, Ming-Ching Chang
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Patent number: 11538719Abstract: A microelectronic device includes a PNP transistor and NPN transistor arranged vertically in a P-type doped semiconductor substrate. The PNP and NPN transistors are manufactured by: forming an N+ doped isolating well for the PNP transistor in the semiconductor substrate; forming a P+ doped region in the N+ doped isolating well; epitaxially growing a first semiconductor layer on the semiconductor substrate; forming an N+ doped well for the NPN transistor, where at least part of the N+ doped well extends into the first semiconductor layer; then epitaxially growing a second semiconductor layer on the first semiconductor layer; forming a P doped region forming the collector of the PNP transistor in the second semiconductor layer and in electrical contact with the P+ doped region; and forming an N doped region forming the collector of the NPN transistor in the second semiconductor layer and in electrical contact with the N+ doped well.Type: GrantFiled: January 28, 2021Date of Patent: December 27, 2022Assignee: STMicroelectronics (Crolles 2) SASInventor: Jean Jimenez Martinez
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Patent number: 11538793Abstract: A semiconductor structure includes a first substrate, a first semiconductor die, a second semiconductor die, and a multi-terminal multi-capacitor structure. The first substrate includes a wiring structure. The first semiconductor die and the second semiconductor die are disposed on the first substrate. The multi-terminal multi-capacitor structure is disposed on the first substrate and includes a second substrate, an insulating layer, a first multi-terminal capacitor, and a second multi-terminal capacitor. The insulating layer is disposed over the second substrate. The first multi-terminal capacitor is disposed over the insulating layer and electrically coupled to the first semiconductor die through the wiring structure.Type: GrantFiled: August 11, 2021Date of Patent: December 27, 2022Assignee: MEDIATEK SINGAPORE PTE. LTD.Inventors: Zhigang Duan, Jinghao Chen
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Patent number: 11532545Abstract: A semiconductor device of an embodiment includes: a plurality of power lines extending in a first direction; and a plurality of cells arrayed along the first direction and a second direction intersecting the first direction and having a cell height of an integer multiple of a distance between the power lines adjacent to each other in the second direction, the cell height being a dimension in the second direction, wherein the plurality of cells include: a functional cell that contributes to a function of the semiconductor device; and a capacitance cell including a diffusion region of a first conductivity type and a gate electrode stacked above the diffusion region, and functioning as a decoupling capacitor, the capacitance cell is configured as a multi-height cell having a cell height of two or more times the distance, the capacitance cell includes a plurality of overlapping regions that are regions of the gate electrode overlapping the diffusion region in a stacking direction, the overlapping regions being alType: GrantFiled: March 8, 2021Date of Patent: December 20, 2022Assignees: KABUSHIKI KAISHA TOSHIBA, TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATIONInventors: Munenori Sakai, Akio Sakata
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Patent number: 11532627Abstract: A semiconductor device according to the present disclosure includes a first interconnect structure, a first transistor over the first interconnect structure, a second transistor over the first transistor, and a second interconnect structure over the second transistor. The first transistor includes first nanostructures and a first source region adjoining the first nanostructures. The second transistor includes second nanostructures and a second source region adjoining the second nanostructures. The first source region is coupled to a first power rail in the first interconnect structure, and the second source region is coupled to a second power rail in the second interconnect structure.Type: GrantFiled: November 9, 2020Date of Patent: December 20, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yi-Bo Liao, Yu-Xuan Huang, Wei Ju Lee, Hou-Yu Chen, Chun-Fu Cheng
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Patent number: 11525851Abstract: A digital integrated circuit includes first areas of a substrate which incorporate digital functions and second areas of the substrate which are filler between first areas. A capacitance is provided by interdigitated metal-insulator-metal structures formed from a metallization level above the substrate. The structures of the capacitance are vertically aligned with one or more of the second areas.Type: GrantFiled: June 10, 2020Date of Patent: December 13, 2022Assignee: STMicroelectronics (Grenoble 2) SASInventor: Sebastien Cliquennois
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Patent number: 11521935Abstract: The present disclosure relates to methods and apparatus for forming a thin-form-factor semiconductor package. In one embodiment, a glass or silicon substrate is structured by micro-blasting or laser ablation to form structures for formation of interconnections therethrough. The substrate is thereafter utilized as a frame for forming a semiconductor package with embedded dies therein.Type: GrantFiled: April 12, 2021Date of Patent: December 6, 2022Assignee: Applied Materials, Inc.Inventors: Han-Wen Chen, Steven Verhaverbeke, Giback Park, Giorgio Cellere, Diego Tonini, Vincent Dicaprio, Kyuil Cho
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Patent number: 11508746Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatus includes a first conductive contact; a second conductive contact; levels of conductive materials stacked over one another and located over the first and second conductive contacts; levels of dielectric materials interleaved with the levels of the conductive materials, the levels of conductive materials and the levels of dielectric materials formed a stack of materials; a first conductive structure located on a first side of the stack of materials and contacting the first conductive contact and a first level of conductive material of the levels of conductive materials; and a second conductive structure located on a second side of the stack of materials and contacting the second conductive contact and a second level of conductive material of the levels of conductive materials.Type: GrantFiled: October 25, 2019Date of Patent: November 22, 2022Assignee: Micron Technology, Inc.Inventors: Darwin A. Clampitt, Roger W. Lindsay, Christopher R. Ritchie, Shawn D. Lyonsmith, Matthew J. King, Lisa M. Clampitt
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Patent number: 11502396Abstract: A MIMO communication system is provided. The system may include a first antenna comprising a first cavity, a first plurality of RF ports for generating a feed wave within the first cavity, and a first plurality of sub-wavelength artificially structured material elements as arranged on a surface of the first cavity as RF radiators. The first antenna is configured to generate a plurality of radiation patterns respectively corresponding to the first plurality of ports. The system may also include a second antenna comprising a second cavity and a second plurality of sub-wavelength artificially structured material elements arranged on a surface of the second cavity.Type: GrantFiled: February 19, 2021Date of Patent: November 15, 2022Inventors: Insang Yoo, Seyedmohammadreza Faghih Imani, Timothy Sleasman, David R. Smith
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Patent number: 11495410Abstract: A multilayer capacitor includes: a capacitor body including first and second internal electrodes alternately stacked with a dielectric layer interposed therebetween, and having first to six surfaces, the first internal electrode being exposed through the third, fifth, and sixth surfaces, the second internal electrode being exposed through the fourth, fifth, and sixth surfaces; first and second side portions disposed on the fifth and sixth surfaces of the capacitor body; and first and second external electrodes. The capacitor body includes upper and lower cover portions disposed on an upper surface of an uppermost internal electrode and a lower surfaces of a lowermost internal electrode, respectively, in a stacking direction of the first and second internal electrodes. The first and second side portions and the upper and lower cover portions include zirconium (Zr).Type: GrantFiled: April 22, 2020Date of Patent: November 8, 2022Assignee: SAMSUNG ELECTRO-MECHANICS CO., LTD.Inventors: Yong Park, Sim Chung Kang, Jong Ho Lee, Hyung Soon Kwon, Woo Chul Shin
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Patent number: 11480795Abstract: The disclosed waveguide display device may include a waveguide and one or more projector assemblies configured to project image light into the waveguide, where each of the one or more projector assemblies includes a first monochromatic emitter array having a plurality of emitters of a first color disposed in a two-dimensional configuration and a second monochromatic emitter array having a plurality of emitters of a second color disposed in a two-dimensional configuration. The display device may also include at least one application specific integrated circuit (ASIC) configured to drive the first and second monochromatic emitter arrays to emit images of the first and second color along a common axis, with the first color being different from the second color. Various other devices, systems, and methods are also disclosed.Type: GrantFiled: July 10, 2020Date of Patent: October 25, 2022Assignee: Meta Platforms Technologies, LLCInventors: James Ronald Bonar, Gareth Valentine
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Patent number: 11482508Abstract: A manufacturing method of a semiconductor package includes the following steps. A chip is provided. The chip has an active surface and a rear surface opposite to the active surface. The chip includes conductive pads disposed at the active surface. A first solder-containing alloy layer is formed on the rear surface of the chip. A second solder-containing alloy layer is formed on a surface and at a location where the chip is to be attached. The chip is mounted to the surface and the first solder-containing alloy layer is aligned with the second solder-containing alloy layer. A reflow step is performed on the first and second solder-containing alloy layers to form a joint alloy layer between the chip and the surface.Type: GrantFiled: July 21, 2020Date of Patent: October 25, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ying-Ching Shih, Chih-Wei Wu, Szu-Wei Lu
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Patent number: 11476186Abstract: A cell on an IC includes a first set of Mx layer interconnects coupled to a first voltage, a second set of Mx layer interconnects coupled to a second voltage different than the first voltage, and a MIM capacitor structure below the Mx layer. The MIM capacitor structure includes a CTM, a CBM, and an insulator between portions of the CTM and the CBM. The first set of Mx layer interconnects is coupled to the CTM. The second set of Mx layer interconnects is coupled to the CBM. The MIM capacitor structure is between the Mx layer and an Mx-1 layer. The MIM capacitor structure includes a plurality of openings. The MIM capacitor structure is continuous within the cell and extends to at least two edges of the cell. In one configuration, the MIM capacitor structure extends to each edge of the cell.Type: GrantFiled: October 27, 2020Date of Patent: October 18, 2022Assignee: QUALCOMM INCORPORATEDInventors: Ramaprasath Vilangudipitchai, Gudoor Reddy, Samrat Sinharoy, Smeeta Heggond, Anil Kumar Koduru, Kamesh Medisetti, Seung Hyuk Kang
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Patent number: 11469235Abstract: The present application discloses a semiconductor device and a method for fabricating the semiconductor device. The semiconductor device includes a substrate; a dielectric structure disposed over the substrate; a bit line bottom contact disposed in the dielectric structure; a composite decoupling structure disposed between the dielectric structure and the bit line bottom contact, wherein the composite decoupling structure comprises an air gap and a dielectric spacer; a bit line top contact disposed over the bit line bottom contact; and a bit line to disposed over the bit line top contact.Type: GrantFiled: September 27, 2019Date of Patent: October 11, 2022Assignee: NANYA TECHNOLOGY CORPORATIONInventor: Tse-Yao Huang
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Patent number: 11469240Abstract: A semiconductor device includes a metal layer and a spacer arranged adjacent to the metal layer. The spacer includes a composite-dielectric layer including a composite-dielectric material. A composition of the composite-dielectric material is a mixture of a composition of a first dielectric material and a composition of a second dielectric material different from the first dielectric material.Type: GrantFiled: June 1, 2020Date of Patent: October 11, 2022Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.Inventors: Liheng Liu, Chuan Yang, Shuangshuang Peng
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Patent number: 11450484Abstract: In a multilayer ceramic capacitor includes, in a plane including a center portion in a length direction, and a stacking direction and a width direction of a first dielectric ceramic layer, where a thickness at a center portion in the stacking direction is T1, a thickness at an end of the first dielectric ceramic layer in the width direction is T2, and respective thicknesses between an end of a first internal electrode layer in the length direction not connected to a second external electrode, and the second external electrode, and between an end of the second internal electrode layer in the length direction not connected to the first external electrode, and the first external electrode is T3, a difference in thickness between T1 and T2 is within about 10% of T1, and a thickness of T3 is greater than T1 and T2 and a difference thereof is about 10% or more of T1 and T2.Type: GrantFiled: December 23, 2020Date of Patent: September 20, 2022Assignee: Murata Manufacturing Co., Ltd.Inventors: Masahiro Wakashima, Yuta Saito, Yuta Kurosu, Daiki Fukunaga, Yu Tsutsui
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Patent number: 11444092Abstract: The present technology includes a semiconductor memory device and a method of manufacturing the same. The semiconductor memory device includes a first semiconductor layer, a cell stack and a peripheral stack each disposed on the first semiconductor layer, a first slit structure extending in a first direction and penetrating the cell stack and the peripheral stack, a penetration structure penetrating the peripheral stack and being spaced apart from the first slit structure, and a support structure penetrating the peripheral stack. The support structure includes first sidewall portions spaced apart from each other and a second sidewall portion connecting the first sidewall portions to each other, and the penetration structure is disposed between the first sidewall portions.Type: GrantFiled: June 10, 2020Date of Patent: September 13, 2022Assignee: SK Hynix Inc.Inventor: Sang Bum Lee
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Patent number: 11437324Abstract: According to one embodiment, a semiconductor device includes a first semiconductor chip including a first metal pad and a second metal pad; and a second semiconductor chip including a third metal pad and a fourth metal pad, the third metal pad joined to the first metal pad, the fourth metal pad coupled to the second metal pad via a dielectric layer, wherein the second semiconductor chip is coupled to the first semiconductor chip via the first metal pad and the third metal pad.Type: GrantFiled: March 3, 2020Date of Patent: September 6, 2022Assignee: KIOXIA CORPORATIONInventors: Nobuyuki Momo, Keisuke Nakatsuka
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Patent number: 11437464Abstract: Embodiments of a three-dimensional capacitor for a memory device and fabrication methods are disclosed. The method includes forming, on a first side of a first substrate, a peripheral circuitry having a plurality of peripheral devices, a first interconnect layer, a deep well and a first capacitor electrode. The method also includes forming, on a second substrate, a memory array having a plurality of memory cells and a second interconnect layer, and bonding the first interconnect layer of the peripheral circuitry with the second interconnect layer of the memory array. The method further includes forming, on a second side of the first substrate, one or more trenches inside the deep well, disposing a capacitor dielectric layer on sidewalls of the one or more trenches, and forming capacitor contacts on sidewalls of the capacitor dielectric layer inside the one or more trenches.Type: GrantFiled: December 30, 2019Date of Patent: September 6, 2022Assignee: Yangtze Memory Technologies Co., Ltd.Inventors: Liang Chen, Cheng Gan, Wei Liu, Shunfu Chen
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Patent number: 11439017Abstract: A voltage regulator module includes a first circuit board assembly, a second circuit board assembly and a magnetic core assembly. The first circuit board assembly includes a first printed circuit board. The second circuit board assembly includes a second printed circuit board, at least one output capacitor, a plurality of ball grid arrays and at least one bonding pad. The second printed circuit board includes a first surface and a second surface. The plurality of ball grid arrays are disposed on the second surface of the second printed circuit board. The at least one bonding pad is arranged beside the first surface of the second printed circuit board. The magnetic core assembly is arranged between the first circuit board assembly and the second circuit board assembly and electrically connected with the at least one bonding pad. The at least one output capacitor is embedded within the second circuit board assembly.Type: GrantFiled: March 11, 2021Date of Patent: September 6, 2022Assignee: DELTA ELECTRONICS, INC.Inventors: Yahong Xiong, Da Jin, Qinghua Su
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Patent number: 11430611Abstract: Disclosed herein a thin film capacitor that includes a lower electrode layer, an upper electrode layer, and a dielectric layer disposed between the lower electrode layer and the upper electrode layer. The dielectric layer has a through hole. The upper electrode layer has a connection part connected to the lower electrode layer through the through hole and an electrode part insulated from the connection part by a slit. A surface of the lower electrode layer that contacts the connection part through the through hole includes an annular area positioned along an inner wall surface of the through hole and a center area surrounded by the annular area. The annular area is lower in surface roughness than the center area.Type: GrantFiled: February 2, 2021Date of Patent: August 30, 2022Assignee: TDK CORPORATIONInventors: Yuuki Aburakawa, Tatsuo Namikawa, Akiyasu Iioka, Atsuo Matsutani, Hitoshi Saita, Kazuhiro Yoshikawa
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Patent number: 11428962Abstract: A MOS capacitor-type optical modulator and method of fabricating a MOS capacitor-type optical modulator, wherein the MOS capacitor-type optical modulator has a MOS capacitor region which comprises an insulator formed of an epitaxially grown crystalline rare earth oxide (REO).Type: GrantFiled: August 21, 2018Date of Patent: August 30, 2022Assignee: Rockley Photonics LimitedInventors: Yi Zhang, Aaron John Zilkie
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Patent number: 11417664Abstract: A semiconductor device includes a substrate including a first region having a first trench and a second region having a second trench. A first buried insulation layer pattern is disposed in the first trench. The second trench includes the first buried insulation layer pattern, a second buried insulation layer pattern, and a third buried insulation layer pattern sequentially stacked therein. A first buffer insulation layer is disposed on the substrate in the first and second regions and has a flat upper surface. A second buffer insulation layer is disposed on the first buffer insulation layer. A bit line structure is disposed on the first and second regions. A first portion of the bit line structure is disposed on the second buffer insulation layer and has a flat lower surface. A second portion of the bit line structure directly contacts a surface of the substrate in the first region.Type: GrantFiled: September 28, 2020Date of Patent: August 16, 2022Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventor: Jongin Kang
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Patent number: 11408073Abstract: A method of making an atomic layer nanoribbon that includes forming a double atomic layer ribbon having a first monolayer and a second monolayer on a surface of the first monolayer, wherein the first monolayer and the second monolayer each contains a transition metal dichalcogenide material, oxidizing at least a portion of the first monolayer to provide an oxidized portion, and removing the oxidized portion to provide an atomic layer nanoribbon of the transition metal dichalcogenide material. Also provided are double atomic layer ribbons, double atomic layer nanoribbons, and single atomic layer nanoribbons prepared according to the method.Type: GrantFiled: June 25, 2020Date of Patent: August 9, 2022Assignee: HONDA MOTOR CO., LTD.Inventors: Avetik R. Harutyunyan, Xufan Li
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Patent number: 11410922Abstract: A capacitor includes a case including a capacitor element, a first connection terminal, a second connection terminal, and a second insulating sheet formed between the first connection terminal and the second connection terminal, and the first connection terminal, the second insulating sheet, and the second connection terminal extend to the outside from the case. A semiconductor module includes a multi-layer terminal portion in which a first power terminal, a first insulating sheet, and a second power terminal are sequentially stacked. The first power terminal includes a first bonding area electrically connected to the first connection terminal, and the second power terminal includes a second bonding area electrically connected to the second connection terminal. The first insulating sheet includes a terrace portion that extends in a direction from the second bonding area towards the first bonding area in a planar view.Type: GrantFiled: November 30, 2020Date of Patent: August 9, 2022Assignee: FUJI ELECTRIC CO., LTD.Inventors: Ryoichi Kato, Yoshinari Ikeda, Yuma Murata
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Patent number: 11404266Abstract: Semiconductor devices are provided. A semiconductor device includes a first portion of a lower electrode structure on a substrate. The semiconductor device includes a first support pattern being in contact with a first portion of a sidewall of the first portion of the lower electrode structure. The semiconductor device includes a second portion of the lower electrode structure on a second portion of the sidewall of the first portion of the lower electrode structure. The semiconductor device includes an upper electrode on the second portion of the lower electrode structure and on the first support pattern. Moreover, the semiconductor device includes a dielectric layer between the upper electrode and the second portion of the lower electrode structure.Type: GrantFiled: April 21, 2020Date of Patent: August 2, 2022Inventors: Hyun-Suk Lee, Jungoo Kang, Gihee Cho, Sanghyuck Ahn
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Patent number: 11398426Abstract: An integrated-circuit device having a layered structure including a plurality of wiring layers with a via layer sandwiched between adjacent wiring layers, wherein: a capacitor having first and second terminals is formed from conductive structures implemented in first and second wiring layers, the conductive structures including arrangements of conductive strips; the strips formed in the first wiring layer are organized into a first-terminal comb arrangement connected to the first terminal and a second-terminal comb arrangement connected to the second terminal, each of comb arrangements having a base strip and a plurality of finger strips extending from the base strip; and the strips formed in the second wiring layer include a plurality of separate strips which constitute finger strips of a cross-layer comb arrangement whose base strip is a finger strip of the first-terminal comb arrangement of the first wiring layer to which those separate strips are conductively connected by vias.Type: GrantFiled: May 18, 2020Date of Patent: July 26, 2022Assignee: SOCIONEXT INC.Inventor: Prabir Kumar Datta
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Patent number: 11393896Abstract: A semiconductor device that includes a semiconductor substrate having a first main surface and a second main surface that face each other in a thickness direction, the first main surface containing a trench; an insulation layer on a surface of the trench; a first electrode layer on the insulation layer; a first dielectric layer on the first electrode layer; and a second electrode layer on the first dielectric layer, in which a thickness (L1) of the insulation layer, a thickness (L2) of the first electrode layer, and a thickness (L4) of the second electrode layer satisfy L1>L2>L4.Type: GrantFiled: November 5, 2020Date of Patent: July 19, 2022Assignee: MURATA MANUFACTURING CO., LTD.Inventors: Koichi Nishita, Masaki Takeuchi, Yutaka Takeshima, Kazuhiro Inoue
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Patent number: 11387316Abstract: Isolators having a back-to-back configuration for providing electrical isolation between two circuits are described, in which multiple isolators formed on a single monolithic substrate are connect in series to achieve a higher amount of electrical isolation for a single substrate than for one of the isolators alone. A pair of isolators in the back-to-back configuration have top and bottom isolator components where the top isolator components are connected together and electrically isolated from the underlying substrate, resulting in floating top isolator components. The back-to-back isolator may provide one or more communication channels for transfer of information and/or power between different circuits.Type: GrantFiled: December 2, 2019Date of Patent: July 12, 2022Assignee: Analog Devices International Unlimited CompanyInventors: Steven Tanghe, Patrick M. McGuinness
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Patent number: 11387748Abstract: In some embodiments, the present disclosure relates to a microelectromechanical system (MEMS) comb actuator including a comb structure. The comb structure includes a support layer having a first material and a plurality of protrusions extending away from a first surface of the support layer in a first direction. The plurality of protrusions are also made of the first material. The plurality of protrusions are separated along a second direction parallel to the first surface of the support layer. The MEMS comb actuator may further include a dielectric liner structure that continuously and completely covers the first surface of the support layer and outer surfaces of the plurality of protrusions. The dielectric liner structure includes a connective portion that continuously connects topmost surfaces of at least two of the plurality of protrusions.Type: GrantFiled: February 26, 2020Date of Patent: July 12, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chiao-Chun Hsu, Chih-Ming Chen, Chung-Yi Yu, Lung Yuan Pan
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Patent number: 11380755Abstract: Capacitors are disclosed. A capacitor includes a plate-to-plate capacitor and a finger-to-finger capacitor. The plate-to-plate capacitor includes at least a first plate and a second plate. The second plate is in proximity to the first plate. The finger to finger capacitor is in proximity to the first plate. The finger to finger capacitor includes a first plurality of finger elements and a second plurality of finger elements. The second plurality of finger elements is interleaved with the first plurality of finger elements. The first plurality of finger elements is electrically connected to the first plate and the second plurality of finger elements is electrically connected to the second plate. The second plurality of finger elements and the first plate form additional plate-to-plate capacitors.Type: GrantFiled: December 18, 2017Date of Patent: July 5, 2022Assignee: Intel CorporationInventors: Domagoj Siprak, Jonas Fritzin, Sundaravadanan Anantha Krishnan
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Patent number: 11373809Abstract: The present invention is directed to a multilayer ceramic capacitor. The capacitor comprises a top surface, a bottom surface, and at least one side surface connecting the top surface and the bottom surface. The capacitor comprises a main body containing a plurality of alternating dielectric layers and internal electrode layers comprising a first plurality of internal electrode layers and a second plurality of internal electrode layers. A first through-hole conductive via electrically connects the first plurality of internal electrode layers to a first external terminal on the top surface and a first external terminal on the bottom surface of the capacitor. A second through-hole conductive via electrically connects the second plurality of internal electrode layers to a second external terminal on the top surface and a second external terminal on the bottom surface of the capacitor. The at least one side surface does not include an external terminal.Type: GrantFiled: February 12, 2020Date of Patent: June 28, 2022Assignee: KYOCERA AVX Components CorporationInventors: Marianne Berolini, Jeffrey Horn, Jeffrey Cain
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Patent number: 11370669Abstract: Amorphous silicon doped yttrium oxide films and methods of making same are described. Deposition of the amorphous silicon doped yttrium oxide film by thermal chemical vapor deposition or atomic layer deposition process are described.Type: GrantFiled: January 14, 2019Date of Patent: June 28, 2022Assignee: Applied Materials, Inc.Inventors: Tatsuya E. Sato, Li-Qun Xia, Sean M. Seutter
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Patent number: 11367727Abstract: Provided is a memory structure including first and second transistors, an isolation structure, a conductive layer and a capacitor. Each of the first and second transistors includes a gate disposed on the substrate and source/drain regions disposed in the substrate. The isolation structure is disposed in the substrate between the first and second transistors. The conductive layer is disposed above the first and second transistors and includes a circuit portion electrically connected to the first and second transistors and a dummy portion located above the isolation structure. The capacitor is disposed between the first and second transistors. The capacitor includes a body portion and first and second extension portions. The first and second extension portions extend from the body portion to the source/drain regions of the first and the second transistors, respectively. The first and second extension portions are disposed between the circuit portion and the dummy portion, respectively.Type: GrantFiled: October 21, 2020Date of Patent: June 21, 2022Assignee: Powerchip Semiconductor Manufacturing CorporationInventors: Shih-Ping Lee, Shyng-Yeuan Che, Hsiao-Pei Lin, Po-Yi Wu, Kuo-Fang Huang
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Patent number: 11362170Abstract: A metal-insulator-metal (MIM) capacitor structure and a method for forming the same are provided. The MIM capacitor structure includes a substrate, and the substrate includes a capacitor region and a non-capacitor region. The MIM capacitor structure includes a first electrode layer formed over the substrate, and a first spacer formed on a sidewall of the first electrode layer. The MIM capacitor structure includes a second electrode layer formed over the first electrode layer, and a second spacer formed on a sidewall of the second electrode layer. The second spacer is in direct contact with an interface between the second electrode layer and a first dielectric layer.Type: GrantFiled: September 28, 2020Date of Patent: June 14, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chih-Fan Huang, Chih-Yang Pai, Yuan-Yang Hsiao, Tsung-Chieh Hsiao, Hui-Chi Chen, Dian-Hau Chen, Yen-Ming Chen
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Patent number: 11362029Abstract: An integrated circuit structure includes a first conductive plate, a second conductive plate, a plurality of conductive lines, and a plurality of conductive vias. The first conductive plate is disposed in a first layer on a semiconductor substrate. The second conductive plate is disposed in a second layer on the semiconductor substrate. The plurality of conductive lines are disposed in the first layer for surrounding the first conductive plate. The plurality of conductive vias are arranged to couple the plurality of conductive lines to the second conductive plate. The second layer is different from the first layer, and the first conductive plate is physically separated from the second conductive plate, the plurality of conductive lines, and the plurality of conductive vias.Type: GrantFiled: December 8, 2020Date of Patent: June 14, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Tai-Yi Chen, Yung-Chow Peng, Chung-Chieh Yang
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Patent number: 11362171Abstract: A capacitor includes: a semiconductor substrate including at least one substrate trench group; at least one laminated structure, each laminated structure includes n conductive layers and m dielectric layers, the first conductive layer in the n conductive layers is disposed above the semiconductor substrate and in the substrate trench group, the i-th conductive layer in the n conductive layers is provided with the i-th conductive layer trench group, and the (i+1)th conductive layer in the n conductive layers is disposed above the i-th conductive layer and in the i-th conductive layer trench group, where m, n, and i are positive integers, and n?2, 1?i?n?1; a first external electrode connected to some conductive layers; and a second external electrode connected to other conductive layers.Type: GrantFiled: September 21, 2020Date of Patent: June 14, 2022Assignee: SHENZHEN GOODIX TECHNOLOGY CO., LTD.Inventors: Bin Lu, Jian Shen