Including Capacitor Component Patents (Class 257/532)
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Patent number: 10355121Abstract: A semiconductor device, the device including: a first stratum including memory periphery circuits; a second stratum including an array of first memory cells, where the first stratum is overlaid by the second stratum; a third stratum including an array of second memory cells, where the second stratum is overlaid by the third stratum, where the first memory cells include a plurality of first polysilicon structures and the second memory cells include a plurality of second polysilicon structures, and where at least one of the first memory cells is self-aligned to at least one of the second memory cells.Type: GrantFiled: October 7, 2017Date of Patent: July 16, 2019Assignee: MONOLITHIC 3D INC.Inventors: Zvi Or-Bach, Yuniarto Widjaja
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Patent number: 10340195Abstract: A method for co-integrating finFETs of two semiconductor material types, e.g., Si and SiGe, on a bulk substrate is described. Fins for finFETs may be formed in an epitaxial layer of a first semiconductor type, and covered with an insulator. A portion of the fins may be removed to form voids in the insulator, and the voids may be filled by epitaxially growing a semiconductor material of a second type in the voids. The co-integrated finFETs may be formed at a same device level.Type: GrantFiled: November 14, 2017Date of Patent: July 2, 2019Assignee: STMICROELECTRONICS, INC.Inventors: Nicolas Loubet, Prasanna Khare, Qing Liu
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Patent number: 10340243Abstract: A circuit substrate includes: a base material; and a capacitor layer. The capacitor layer includes a first metal layer that is provided on the base material, a dielectric layer that is provided on the first metal layer, and a second metal layer that is provided on the dielectric layer. The first metal layer includes a first electrode region which is provided on the base material and is exposed from the dielectric layer and to which a first terminal of a capacitor element for supplying current to a circuit part through the capacitor layer is connected. The second metal layer includes a second electrode region in which the second metal layer is exposed and to which a second terminal of the capacitor element is connected.Type: GrantFiled: June 11, 2018Date of Patent: July 2, 2019Assignees: FUJI XEROX CO., LTD., NODA SCREEN CO., LTD.Inventors: Daisuke Iguchi, Atsunori Hattori
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Patent number: 10340322Abstract: This application provides a display device and an OLED display panel. The display device comprises a storage capacitor. A part of a source and drain metal layer is a first electrode of a storage capacitor. A cathode layer is a second electrode of the storage capacitor. An electron transmitting functional layer, a passivation layer, and an inorganic pixel defining layer arranged between the first electrode and the second electrode are the dielectric materials of the storage capacitor.Type: GrantFiled: November 16, 2017Date of Patent: July 2, 2019Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.Inventors: Chunhsiung Fang, Yuanchun Wu
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Patent number: 10319683Abstract: A multi-stacked package-on-package structure includes a method. The method includes: adhering a first die and a plurality of second dies to a substrate, the first die having a different function from each of the plurality of second dies; attaching a passive device over the first die; encapsulating the first die, the plurality of second dies, and the passive device; and forming a first redistribution structure over the passive device, the first die, and the plurality of second dies, the passive device connecting the first die to the first redistribution structure.Type: GrantFiled: July 3, 2017Date of Patent: June 11, 2019Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chen-Hua Yu, An-Jhih Su, Chi-Hsi Wu, Der-Chyang Yeh, Ming Shih Yeh, Wei-Cheng Wu
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Patent number: 10312318Abstract: The disclosure is directed to semiconductor structures and, more particularly, to Metal-Insulator-Metal (MIM) capacitor structures and methods of manufacture. The method includes: forming at least one gate structure; removing material from the at least one gate structure to form a trench; depositing capacitor material within the trench and at an edge or outside of the trench; and forming a first contact in contact with a first conductive material of the capacitor material and a second contact in contact with a second conductive material of the capacitor material.Type: GrantFiled: September 22, 2015Date of Patent: June 4, 2019Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Veeraraghavan S. Basker, Kangguo Cheng, Theodorus E. Standaert, Junli Wang
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Patent number: 10312241Abstract: Some embodiments include an integrated assembly having a capacitor. The capacitor has a storage node configured as an upwardly-opening container shape. The container shape has a first side surface and a second side surface. The first and second side surfaces are along outer edges of the container shape and are in opposing relation to one another. The second side surface has a lower portion vertically overlapped by the first side surface, and has an upper portion which is not vertically overlapped by the first side surface. A middle-level lattice is adjacent to the first side surface and supports the first side surface. A higher-level lattice is adjacent to the second side surface and supports the second side surface. Some embodiments include integrated memory (e.g., DRAM).Type: GrantFiled: April 27, 2018Date of Patent: June 4, 2019Assignee: Micron Technology, Inc.Inventor: Yuichi Yokoyama
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Patent number: 10304838Abstract: A semiconductor device and method of manufacturing are provided. The semiconductor device includes a substrate; first and second structures spaced apart from each other on the substrate in a first direction, the first structure including a first lower electrode and the second structure including a second lower electrode; a first supporter pattern disposed on the substrate to support the first and second structures, and including a first region that exposes portions of sidewalls of the first and second structures, and a second region that covers a second portion of the sidewalls; and a second supporter pattern disposed on the first supporter pattern to support the first and second structures, the second supporter pattern including a third region, the third region configured to expose portions of the first sidewall and the second sidewall, and a fourth region that covers a portion of the first and second sidewalls.Type: GrantFiled: October 2, 2017Date of Patent: May 28, 2019Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Ye Ram Kim, Won Chul Lee
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Patent number: 10306770Abstract: A method for manufacturing a thin-film capacitor in a circuit substrate includes: forming, on a dielectric film formed on a surface of a support member, a first electrode layer of the thin-film capacitor; forming, on the dielectric film and the first electrode layer, an insulating base material of the circuit substrate so as to bury the first electrode layer; removing the support member and exposing a surface of the dielectric film on a side opposite to the first electrode layer; patterning the dielectric film so as to leave a dielectric layer overlapping the first electrode layer; forming a first through hole in the dielectric layer so as to expose a part of a surface, on a dielectric layer side, of the first electrode layer; and forming a second electrode layer of the capacitor so as to overlap the dielectric layer including the inside of the first through hole.Type: GrantFiled: March 11, 2015Date of Patent: May 28, 2019Assignee: NODA SCREEN CO., LTD.Inventor: Atsunori Hattori
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Patent number: 10297467Abstract: Self-aligned via and plug patterning for back end of line (BEOL) interconnects is described. In an example, an interconnect structure for an integrated circuit includes a first layer of the interconnect structure disposed above a substrate. The first layer includes a grating of alternating metal lines and dielectric lines in a first direction. A second layer of the interconnect structure is disposed above the first layer. The second layer includes a grating of alternating metal lines and dielectric lines in a second direction, perpendicular to the first direction. Each metal line of the grating of the second layer is disposed on a recessed dielectric line having alternating distinct regions of a first dielectric material and a second dielectric material corresponding to the alternating metal lines and dielectric lines of the first layer of the interconnect structure.Type: GrantFiled: April 18, 2017Date of Patent: May 21, 2019Assignee: Intel CorporationInventors: Charles H. Wallace, Paul A. Nyhus
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Patent number: 10276542Abstract: A package structure has first and second dies, a molding compound, a first redistribution layer, at least one first through interlayer via (TIV), second through interlayer vias (TIVs), an electromagnetic interference shielding layer and conductive elements. The first die is molded in the molding compound. The second die is disposed on the molding compound. The first redistribution layer is located between the conductive elements and the molding compound and electrically connected to the first and second dies. The molding compound is located between the second die and the first redistribution layer. The first and second TIVs are molded in the molding compound and electrically connected to the first redistribution layer. The second TIVs are located between the first die and the first TIV. The electromagnetic interference shielding layer is in contact with the first TIV. The conductive elements are connected to the first redistribution layer.Type: GrantFiled: July 21, 2016Date of Patent: April 30, 2019Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Li-Hsien Huang, An-Jhih Su, Hsien-Wei Chen, Hua-Wei Tseng, Jo-Mei Wang, Tien-Chung Yang, Kuan-Chung Lu
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Patent number: 10276489Abstract: The present disclosure relates to an integrated circuit configured to mitigate damage to MIM decoupling capacitors. In some embodiments, the integrated chip has a lower interconnect layer vertically separated from a substrate by a first inter-level dielectric (ILD) layer. A conductive contact extends from a transistor device within the substrate to an uppermost surface of the first ILD layer. A plurality of MIM (metal-insulator-metal) structures are arranged over the lower interconnect layer. An upper interconnect layer is over the plurality of MIM structures. One or both of the lower interconnect layer and the upper interconnect layer are comprised within a conductive path that electrically couples the plurality of MIM structures in a series connection.Type: GrantFiled: April 2, 2018Date of Patent: April 30, 2019Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Kuo-Chi Tu, Chin-Chieh Yang, Wen-Ting Chu
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Patent number: 10269807Abstract: A semiconductor arrangement includes an active region including a semiconductor device. The semiconductor arrangement includes a capacitor having a first electrode layer, a second electrode layer, and an insulating layer between the first electrode layer and the second electrode layer. At least three dielectric layers are between a bottom surface of the capacitor and the active region.Type: GrantFiled: December 4, 2017Date of Patent: April 23, 2019Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Chern-Yow Hsu, Chen-Jong Wang, Chia-Shiung Tsai, Shih-Chang Liu, Xiaomeng Chen
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Patent number: 10269490Abstract: A capacitor may include a first set of conductive fingers interdigitated with a second set of conductive fingers at an interconnect layer in a preferred direction of the interconnect layer. The capacitor may also include the first set of conductive fingers interdigitated with the second set of conductive fingers at a next interconnect layer in the preferred direction of the next interconnect layer. The capacitor may further include a first set of through finger vias electrically coupling the first set of conductive fingers of the interconnect layer to the first set of conductive fingers of the next interconnect layer.Type: GrantFiled: August 25, 2017Date of Patent: April 23, 2019Assignee: QUALCOMM IncorporatedInventors: Kevin Jia-Nong Wang, Chao Song
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Patent number: 10256249Abstract: Some embodiments include an integrated structure having a conductive material, a select device gate material over the conductive material, and vertically-stacked conductive levels over the select device gate material. Vertically-extending monolithic channel material is adjacent the select device gate material and the conductive levels. The monolithic channel material contains a lower segment adjacent the select device gate material and an upper segment adjacent the conductive levels. A first vertically-extending region is between the lower segment of the monolithic channel material and the select device gate material. The first vertically-extending region contains a first material. A second vertically-extending region is between the upper segment of the monolithic channel material and the conductive levels. The second vertically-extending region contains a material which is different in composition from the first material.Type: GrantFiled: July 17, 2017Date of Patent: April 9, 2019Assignee: Micron Technology, Inc.Inventors: Justin B. Dorhout, David Daycock, Kunal R. Parekh, Martin C. Roberts, Yushi Hu
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Patent number: 10251272Abstract: Embodiments of the invention include a microelectronic device that includes a plurality of organic dielectric layers and a capacitor that is integrated with a first organic dielectric layer of the plurality of organic dielectric layers. The capacitor includes first and second conductive electrodes and an ultra-high-k dielectric layer that is positioned between the first and second conductive electrodes.Type: GrantFiled: June 30, 2017Date of Patent: April 2, 2019Assignee: Intel CorporationInventors: Aleksandar Aleksov, Feras Eid, Thomas L. Sounart, Georgios C. Dogiamis, Johanna M. Swan
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Patent number: 10242741Abstract: The present invention discloses a low voltage difference-operated EEPROM and an operating method thereof wherein at least one transistor structure is formed in a semiconductor substrate and each includes a first electric-conduction gate. An ion implantation is performed by masking partial regions to prevent the existence of the conventional lightly doped drain (LDD) structure. An undoped region is formed in the semiconductor substrate under the two sides of the first electric-conductive gate, to increase the intensity of electric field between the gate and the substrate or between the gate and the transistor, whereby to reduce the voltage differences required for writing and erasing. The present invention also discloses an operating method for the low voltage difference-operated EEPROM. The present invention applies to the EEPROM with a single gate transistor structure.Type: GrantFiled: September 19, 2017Date of Patent: March 26, 2019Assignee: Yield Microelectronics Corp.Inventors: Hsin-Chang Lin, Wen-Chien Huang, Chia-Hao Tai
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Patent number: 10236295Abstract: A method of fabricating a semiconductor device includes forming a material layer and a mask pattern on a substrate, mounting the substrate onto an electrostatic chuck, loading the substrate, including the material layer and the mask pattern, mounted on the electrostatic chuck, into an etching chamber, and forming a material pattern by dry etching the material layer using the mask pattern as an etching mask. The dry etching of the material layer includes adjusting a pressure of the etching chamber to adjust a lateral over-etch of the material pattern in a first direction, wherein the first direction is parallel to a surface of the substrate facing the material pattern, and adjusting a temperature of the electrostatic chuck to adjust an etching of the material pattern in a second direction, wherein the second direction crosses the first direction.Type: GrantFiled: April 13, 2017Date of Patent: March 19, 2019Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Chanmin Lee, Youngjae Kim
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Patent number: 10224309Abstract: Embodiments of the present disclosure are directed towards an integrated circuit (IC) die. In embodiments, the IC die may include a semiconductor substrate, a plurality of active components disposed on a first side of the semiconductor substrate, and a plurality of passive components disposed on a second side of the semiconductor substrate. In embodiments the second side may be disposed opposite the first side. The passive components may, in some embodiments, include capacitors and/or resistors while the active components may, in some embodiments, include transistors. Other embodiments may be described and/or claimed.Type: GrantFiled: September 26, 2014Date of Patent: March 5, 2019Assignee: Intel CorporationInventor: Kevin J. Lee
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Patent number: 10217720Abstract: Apparatuses and methods are described. This apparatus includes a bridge die having first contacts on a die surface being in a molding layer of a reconstituted wafer. The reconstituted wafer has a wafer surface including a layer surface of the molding layer and the die surface. A redistribution layer on the wafer surface includes electrically conductive and dielectric layers to provide conductive routing and conductors. The conductors extend away from the die surface and are respectively coupled to the first contacts at bottom ends thereof. At least second and third IC dies respectively having second contacts on corresponding die surfaces thereof are interconnected to the bridge die and the redistribution layer. A first portion of the second contacts are interconnected to top ends of the conductors opposite the bottom ends thereof in part for alignment of the at least second and third IC dies to the bridge die.Type: GrantFiled: June 15, 2017Date of Patent: February 26, 2019Assignee: Invensas CorporationInventors: Liang Wang, Rajesh Katkar
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Patent number: 10199214Abstract: Disclosed is a multilayer insulator, a metal-insulator-metal (MIM) capacitor with the same, and a fabricating method thereof. The capacitor includes: a first electrode; an insulator disposed on the first electrode, the insulator including: a laminate structure in which an aluminum oxide (Al2O3) layer and a hafnium oxide (HfO2) layer are laminated alternately in an iterative manner and a bottom layer and a top layer are formed of the same material; and a second electrode disposed on the insulator.Type: GrantFiled: June 26, 2015Date of Patent: February 5, 2019Assignee: MagnaChip Semiconductor, Ltd.Inventors: Kwan-Soo Kim, Soon-Wook Kim
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Patent number: 10199314Abstract: A flange on first open end of a tubular contact member is soldered to a conductive plate of an insulating substrate. An external electrode terminal is fitted into a main body tube portion of the tubular contact member. The tubular contact member includes a protrusion that protrudes inwardly from an inner wall of the main body tube portion. The protrusion is disposed along the entire perimeter of inner wall toward the first open end. The protrusion has a thickness deformation of the protrusion by a load applied thereto when the external electrode terminal is pressed into the main body tube portion. The protrusion is disposed at a height that can block solder that climbs the inner wall of the main body tube portion, to form a gap between the protrusion and a lower end of the external electrode terminal inserted to a predetermined depth of the main body tube portion.Type: GrantFiled: April 5, 2016Date of Patent: February 5, 2019Assignee: FUJI ELECTRIC CO., LTD.Inventors: Kenshi Kai, Rikihiro Maruyama, Makoto Isozaki
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Patent number: 10186479Abstract: A semiconductor device includes a metal plate capacitor that includes a heat-resistant metal plate and a capacitor unit including a sintered dielectric formed on at least one surface of the heat-resistant metal plate, a semiconductor chip disposed on the metal plate capacitor, a connector configured to electrically connect the semiconductor chip and the metal plate capacitor, and a protector configured to protect the semiconductor chip, the metal plate capacitor, and the connector.Type: GrantFiled: February 7, 2017Date of Patent: January 22, 2019Assignee: Panasonic Intellectual Property Management Co., Ltd.Inventors: Hidenori Katsumura, Shinya Tokunaga, Masaya Sumita, Hiroyoshi Yoshida, Yasuhiro Sugaya, Kazuhide Uriu, Osamu Shibata
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Patent number: 10170363Abstract: An interconnection structure of the semiconductor integrated circuit device may be provided. The interconnection structure may include a first conductive pattern, a second conductive pattern, a dielectric layer and a contact part. The first conductive pattern may have a first width and a first length. The second conductive pattern may be formed over the first conductive pattern. The second conductive pattern may have a second width and a second length. The dielectric layer may be interposed between the first conductive pattern and the second conductive pattern. The contact part may be configured to simultaneously make contact with the first conductive pattern and the second conductive pattern.Type: GrantFiled: July 17, 2017Date of Patent: January 1, 2019Assignee: SK hynix Inc.Inventor: Jong Su Kim
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Patent number: 10170397Abstract: A semiconductor device includes a via structure penetrating through a substrate, a top metal layer and an electronic component over the via structure, and a bottom metal layer and another electronic component below the via structure. The via structure includes a through hole penetrating from a first surface to an opposite second surface of a substrate, a filling insulating layer within the through hole, a first conductive layer, which is within the through hole and surrounds the filling insulating layer, wherein a portion of the first conductive layer is below the filling insulating layer and at the bottom of the through hole. The via structure further includes a first insulating layer, which is on the sidewalls of the through hole and surrounds the first conductive layer.Type: GrantFiled: July 7, 2016Date of Patent: January 1, 2019Assignee: VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATIONInventors: Li-Che Chen, Francois Hebert
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Patent number: 10163776Abstract: Disclosed herein is a capacitive element formed by multilayer wirings, wherein a total capacitance, intralayer capacitance and interlayer capacitance are calculated for a plurality of device structures by changing parameters relating to the multilayer wirings in an integrated circuit, a device structure is identified, from among the plurality of device structures, whose difference in the total capacitance between the device structures is equal to or less than a predetermined level and at least either of whose ratio of the intralayer capacitance to the total capacitance or ratio of the interlayer capacitance to the total capacitance satisfies a predetermined condition, and the parameters of the device structure satisfying the predetermined condition are determined as the parameters of the multilayer wirings.Type: GrantFiled: January 5, 2010Date of Patent: December 25, 2018Assignee: Sony CorporationInventors: Kyoko Izuha, Hiroaki Ammo, Yoshiyuki Enomoto
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Patent number: 10157976Abstract: A system-on-chip (SOC) device comprises a first capacitor in a first region, a second capacitor in a second region, and may further comprise a third capacitor in a third region, and any additional number of capacitors in additional regions. The capacitors may be of different shapes and sizes. A region may comprise more than one capacitor. Each capacitor in a region has a top electrode, a bottom electrode, and a capacitor insulator. The top electrodes of all the capacitors are formed in a common process, while the bottom electrodes of all the capacitors are formed in a common process. The capacitor insulator may have different number of sub-layers, formed with different materials or different thickness. The capacitors may be formed in an inter-layer dielectric layer or in an inter-metal dielectric layer. The regions may be a mixed signal region, an analog region, a radio frequency region, a dynamic random access memory region, and so forth.Type: GrantFiled: January 23, 2017Date of Patent: December 18, 2018Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Kuo-Chi Tu, Wen-Chuan Chiang, Chen-Jong Wang
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Patent number: 10151616Abstract: Level sensing designs and techniques that inherently compensate for physical variations in the flowable material. An illustrative container includes an electrode arrangement having two electrodes along a vertical span creating corresponding capacitances indicative of a level of the material within that vertical span. Differing electrode shapes or positions provide the capacitances with different dependences on the level. A level detection method includes: (i) measuring a first capacitance between a drive electrode and a first sensing electrode; (ii) measuring a second capacitance between the drive electrode and a second sensing electrode; and (iii) determining a ratio of variances in the first and second capacitances, the variances being relative to first and second capacitances for a container empty of the material. The ratio is indicative of said level and insensitive to temperature and permittivity of the material.Type: GrantFiled: November 28, 2017Date of Patent: December 11, 2018Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLCInventors: Takayasu Otagaki, Kazuyoshi Ishikawa
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Patent number: 10151722Abstract: A molecular sensor includes a substrate defining a substrate plane, and a plurality of pairs of electrode sheets above or below the substrate at an angle to the substrate plane. The molecular sensor further includes a plurality of inner dielectric sheets between each electrode sheet in each pair of electrode sheets of the plurality of pairs, and an outer dielectric sheet between each pair of electrode sheets of the plurality of pairs.Type: GrantFiled: October 27, 2017Date of Patent: December 11, 2018Assignee: Roswell Biotechnologies, Inc.Inventors: Sungho Jin, Barry L. Merriman, Tim Geiser, Chulmin Choi, Paul Mola
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Patent number: 10153218Abstract: A semiconductor structure includes a die including a surface, a lid disposed over the surface of the die, and a thermally conductive material disposed between the die and the lid, wherein the lid includes a protrusion protruded towards the surface of the die and the thermally conductive material surrounds the protrusion. Also, a method of manufacturing a semiconductor structure includes providing a die including a surface, providing a lid, removing a portion of the lid to form a protrusion, disposing a thermally conductive material between the surface of the die and the lid, wherein the protrusion of the lid is surrounded by the thermally conductive material. Further, an apparatus for manufacturing a semiconductor structure and a method of manufacturing a semiconductor structure by the apparatus are disclosed.Type: GrantFiled: February 16, 2017Date of Patent: December 11, 2018Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Tsung-Yu Chen, Wensen Hung, Hung-Chi Li, Cheng-Chieh Hsieh, Tung-Liang Shao, Chih-Hang Tung
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Patent number: 10139230Abstract: The invention relates to a detection circuit for reading out at least one position signal of a micromechanical capacitive sensor having at least one oscillating element that can be excited so as to move in an oscillating manner. In particular, the invention relates to a sensor that is operated in a closed control loop by using the detection circuit according to the invention. The invention further relates to a method for operating such a sensor. During operation, a first input connection of the detection circuit (100) is connected to an output connection of the capacitive sensor (106) and an output connection of the detection circuit (100) is connected to a loop filter of a control loop (102), wherein the control loop feeds back a feedback voltage for providing a restoring force in dependence on an output voltage of the control loop (102) to a second input connection of the detection circuit (100).Type: GrantFiled: March 21, 2016Date of Patent: November 27, 2018Assignee: Albert-Ludwigs-Universitat FreiburgInventors: Michael Maurer, Sebastian Nessler, Yiannos Manoli
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Patent number: 10125420Abstract: A molecular sensor includes a substrate defining a substrate plane, and a plurality of pairs of electrode sheets above or below the substrate at an angle to the substrate plane. The molecular sensor further includes a plurality of inner dielectric sheets between each electrode sheet in each pair of electrode sheets of the plurality of pairs, and an outer dielectric sheet between each pair of electrode sheets of the plurality of pairs.Type: GrantFiled: October 9, 2017Date of Patent: November 13, 2018Assignee: Roswell Biotechnologies, Inc.Inventors: Sungho Jin, Barry L. Merriman, Tim Geiser, Chulmin Choi, Paul Mola
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Patent number: 10121793Abstract: A semiconductor device includes storage electrodes on a substrate and one or more supporters configured to couple one or more portions of the storage electrodes. The semiconductor device may include multiple non-intersecting supporters extending in parallel to a surface of the substrate. At least one supporter may have an upper surface that is substantially coplanar with upper surfaces of the storage electrodes. The storage electrodes may include a capacitor dielectric layer that conformally covers one or more surfaces of the storage electrodes and one or more supporters. A storage electrode may include upper and lower storage electrodes coupled together. The upper and lower storage electrodes may have different horizontal widths.Type: GrantFiled: March 29, 2016Date of Patent: November 6, 2018Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Kyung-Eun Kim, Yongkwan Kim, Semyeong Jang, Jaehyoung Choi, Yoosang Hwang, Bong-Soo Kim
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Patent number: 10115784Abstract: The present disclosure provides a semiconductor device. The semiconductor device includes: a semiconductor substrate; a first dielectric layer over the semiconductor substrate; a second dielectric layer over the first dielectric layer; an via extending through the second dielectric layer; a bottom conductive layer conformably formed at a bottom and along side walls of the via; a third dielectric layer conformably formed over the bottom conductive layer; an upper conductive layer conformably formed over the third dielectric layer; and an upper contact formed over and coupled to the upper conductive layer and filling the via; wherein the upper conductive layer provide a diffusion barrier between the upper contact and the third dielectric layer. A metal-insulator-metal (MIM) capacitor and an associated manufacturing method are also disclosed.Type: GrantFiled: March 17, 2016Date of Patent: October 30, 2018Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Chung-Yen Chou, Shih-Chang Liu
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Patent number: 10103125Abstract: A chip package structure is provided. The chip package structure includes a chip structure. The chip package structure includes a first ground bump below the chip structure. The chip package structure includes a conductive shielding film disposed over the chip structure and extending onto the first ground bump. The conductive shielding film is electrically connected to the first ground bump.Type: GrantFiled: November 28, 2016Date of Patent: October 16, 2018Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chen-Hua Yu, Jing-Cheng Lin, Po-Hao Tsai, An-Jhih Su
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Patent number: 10102905Abstract: Resistance variable memory cells having a plurality of resistance variable materials and methods of operating and forming the same are described herein. As an example, a resistance variable memory cell can include a plurality of resistance variable materials located between a plug material and an electrode material. The resistance variable memory cell also includes a first conductive material that contacts the plug material and each of the plurality of resistance variable materials and a second conductive material that contacts the electrode material and each of the plurality of resistance variable materials.Type: GrantFiled: June 8, 2017Date of Patent: October 16, 2018Assignee: Micron Technology, Inc.Inventors: Ugo Russo, Andrea Redaelli, Fabio Pellizzer
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Patent number: 10083897Abstract: A semiconductor package includes a leadframe having an electrically conductive paddle, electrically conductive perimeter package leads, a first electrically conductive clip electrically connected to a first set of the package leads, and a second electrically conductive clip electrically connected to a second set of the package leads. The semiconductor package includes a single semiconductor die. The die includes a front-side active layer having an integrated power structure of two or more transistors. The die includes a backside portion having a backside contact electrically coupled to at least one of the two or more transistors and to the paddle. One or more first front-side contacts of the die are electrically coupled to at least one of the transistors and to the first clip, and one or more second front-side contacts of the die are electrically coupled to at least one of the transistors and to the second clip.Type: GrantFiled: June 30, 2017Date of Patent: September 25, 2018Assignee: SILANNA ASIA PTE LTDInventors: Shanghui Larry Tu, Michael A. Stuber, Befruz Tasbas, Stuart B. Molin, Raymond Jiang
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Patent number: 10079213Abstract: Packaging devices and methods of manufacture thereof for semiconductor devices are disclosed. In some embodiments, a method of manufacturing a packaging device includes forming an interconnect wiring over a substrate, and forming conductive balls over portions of the interconnect wiring. A molding material is deposited over the conductive balls and the substrate, and a portion of the molding material is removed from over scribe line regions of the substrate.Type: GrantFiled: May 31, 2016Date of Patent: September 18, 2018Assignee: Taiwan Semiconductor Manufacturing CompanyInventors: Hsien-Wei Chen, Tsung-Yuan Yu, Ming-Da Cheng, Wen-Hsiung Lu
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Patent number: 10068907Abstract: A dynamic random access memory (DRAM) includes a substrate, two buried word lines and a bit line contact. The substrate includes a first active area, wherein the first active area extends along a first direction. The buried word lines are disposed in the substrate and across the first active area, wherein the buried word lines extend along a second direction. The bit line contact is disposed on the substrate and overlaps the first active area between the two buried word lines, wherein the bit line contact is enclosed by a first side, a second side, a third side and a fourth side, and the first side is parallel to the third side along a third direction while the second side is parallel to the fourth side along a fourth direction, wherein the third direction is parallel to the first direction and the fourth direction is parallel to the second direction.Type: GrantFiled: May 12, 2017Date of Patent: September 4, 2018Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.Inventors: Tsung-Ying Tsai, Chien-Ting Ho, Ming-Te Wei, Li-Wei Feng, Ying-Chiao Wang
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Patent number: 10056503Abstract: MIS capacitors are formed using a finned semiconductor structure. A highly doped region including the fins is formed within the structure and forms one plate of a MIS capacitor. A metal layer forms a second capacitor plate that is separated from the first plate by a high-k capacitor dielectric layer formed directly on the highly doped fins. Contacts are electrically connected to the capacitor plates. A highly doped implantation layer having a conductivity type opposite to that of the highly doped region provides electrical isolation within the structure.Type: GrantFiled: October 25, 2016Date of Patent: August 21, 2018Assignee: International Business Machines CorporationInventors: Keith E. Fogel, Pouya Hashemi, Shogo Mochizuki, Alexander Reznicek
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Patent number: 10056609Abstract: Solid state energy storage systems and devices are provided. A solid state energy storage devices can include an active layer disposed between conductive electrodes, the active layer having one or more quantum confinement species (QCS), such as quantum dots, quantum particles, quantum wells, nanoparticles, nanostructures, nanowires and nanofibers. The solid state energy storage device can have a charge rate of at least about 500 V/s and an energy storage density of at least about 150 Whr/kg.Type: GrantFiled: July 10, 2012Date of Patent: August 21, 2018Assignee: QuantumScape CorporationInventors: Timothy P. Holme, Rainer Fasching, Joseph Han, Weston Arthur Hermann, Friedrich B. Prinz, Phil Reilly, Jagdeep Singh
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Patent number: 10050351Abstract: Phased-array antenna systems can be constructed using transfer printed active components. Phased-array antenna systems benefit from a large number of radiating elements (e.g., more radiating elements can form sharper, narrower beams (higher gain)). As the number of radiating elements increases, the size of the part and the cost of assembly increases. High throughput micro assembly (e.g. by micro-transfer printing) mitigates costs associated with high part-count. Micro assembly is advantaged over monolithic approaches that form multiple radiating elements on a semiconductor wafer because micro assembly uses less semiconductor material to provide the active components that are necessary for the array. The density of active components on the phased-array antenna system is small. Micro assembly provides a way to efficiently use semiconductor material on a phased array, reducing the amount of non-active semiconductor area (e.g.Type: GrantFiled: June 18, 2015Date of Patent: August 14, 2018Assignee: X-Celeprint LimitedInventors: Christopher Bower, Matthew Meitl
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Patent number: 10043863Abstract: An on-chip metal-insulator-metal (MIM) capacitor with enhanced capacitance is provided by forming the MIM capacitor along sidewall surfaces and a bottom surface of each trench of a plurality of trenches formed in a back-end-of-the-line (BEOL) metallization stack to increase a surface area of the MIM capacitor.Type: GrantFiled: January 6, 2017Date of Patent: August 7, 2018Assignee: International Business Machines CorporationInventor: Effendi Leobandung
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Patent number: 10032855Abstract: A pattern is defined in a dielectric layer. The dielectric layer includes a low-k dielectric region and a high-k dielectric region. The high-k dielectric region includes a phase change material which is an alloy of tantalum and nitrogen and is a high-k insulator in a deposited state. The pattern includes a first set of features in the low-k dielectric region and a second set of features in the high-k dielectric region. A surface treatment process is performed on the phase change layer to produce a top surface layer having electrically conductive properties. A metal layer is deposited in the first and second set of features. Thus, a set of conductive lines is formed in the low-k dielectric region and a metal insulator metal capacitor in the high-k dielectric region.Type: GrantFiled: January 5, 2017Date of Patent: July 24, 2018Assignee: International Business Machines CorporationInventor: Chih-Chao Yang
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Patent number: 10026427Abstract: An apparatus according to one embodiment includes a sensor having an active region, a magnetic shield adjacent the active region, and a spacer between the active region and the magnetic shield. The spacer includes an electrically conductive ceramic layer. An apparatus according to another embodiment includes a sensor having an active tunnel magnetoresistive region, a magnetic shield adjacent the tunnel magnetoresistive region, and a spacer between the tunnel magnetoresistive region and the magnetic shields. The spacer includes an electrically conductive ceramic layer.Type: GrantFiled: September 7, 2016Date of Patent: July 17, 2018Assignee: International Business Machines CorporationInventors: Robert G. Biskeborn, Calvin S. Lo, Philip M. Rice, Teya Topuria
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Patent number: 10020251Abstract: According to an exemplary embodiment, a semiconductor device is provided. The semiconductor device includes a first seal ring and a first circuit. The first circuit includes a first capacitor and a first inductor connected in series. The first circuit is connected between the first seal ring and a ground.Type: GrantFiled: September 8, 2017Date of Patent: July 10, 2018Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Hsiao-Chun Lee, Chi-Feng Huang, Victor Chiang Liang
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Patent number: 10020274Abstract: Disclosed is a solder particle including a plastic core; a copper-free metal layer which is formed on an external surface of the plastic core; and a solder layer which is formed on the copper-free metal layer and contains not less than 85 wt % tin. Thus, it is possible to provide a solder particle with a copper-free metal layer, which is excellent in strength and conductivity and prevents or minimizes generation of a void during a reflow process or the like.Type: GrantFiled: June 2, 2017Date of Patent: July 10, 2018Assignee: TETOS Co., Ltd.Inventors: Woo Young Ahn, Seong Wan Park
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Patent number: 10020360Abstract: Some embodiments include an integrated memory having an array of capacitors. The array has edges. The capacitors along the edges are edge capacitors, and the other capacitors are internal capacitors. The edge capacitors have inner edges facing toward the internal capacitors, and have outer edges in opposing relation to the inner edges. An insulative beam extends laterally between the capacitors. The insulative beam is along upper regions of the capacitors. First void regions are under the insulative beam, along lower regions of the internal capacitors, and along the inner edges of the edge capacitors. Peripheral extensions of the insulative beam extend laterally outward of the edge capacitors, and second void regions are under the peripheral extensions and along the outer edges of the edge capacitors. Some embodiments included integrated assemblies having two or more memory array decks stacked on atop another. Some embodiments include methods of forming memory arrays.Type: GrantFiled: January 6, 2017Date of Patent: July 10, 2018Assignee: Micron Technology, Inc.Inventor: Durai Vishak Nirmal Ramaswamy
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Patent number: 10002889Abstract: The present invention provides a low-temperature polysilicon thin film transistor array substrate and a method of fabricating the same, and a display device. The array substrate comprises: a substrate; a polysilicon active layer provided on the substrate; a first insulation layer provided on the active layer; a plurality of gates and a gate line provided on the first insulation layer; a second insulation layer provided on the gates; a source, a drain, a data line and a pixel electrode electrically connected with the drain, which are provided on the second insulation layer, the source covers the plurality of gates. The plurality of gates are provided directly below the source, so that the leakage current is reduced and the aperture ratio of panel is improved.Type: GrantFiled: October 28, 2014Date of Patent: June 19, 2018Assignees: BOE TECHNOLOGY GROUP CO., LTD., BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.Inventors: Jiaxiang Zhang, Xiaohui Jiang, Changjiang Yan
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Patent number: 9997456Abstract: Disclosed herein is an integrated circuit (IC) including a first metal layer running in a first direction, a second metal layer running in a second direction perpendicular to the first direction, the second metal layer above the first metal layer and a third metal layer running in the first direction above the second metal layer. A viabar electrically connects the first metal layer to the third metal layer, the viabar running in the first direction wherein the viabar vertically extends from the first metal layer to the third metal layer. A method of manufacturing the IC is provided.Type: GrantFiled: July 27, 2016Date of Patent: June 12, 2018Assignee: GLOBALFOUNDRIES INC.Inventors: Erdem Kaltalioglu, Atsushi Ogino