With Lightly Doped Drain Selectively Formed At Side Of Gate (epo) Patents (Class 257/E21.437)
  • Publication number: 20080067587
    Abstract: In a method for producing an electronic component, a first doped connection region and a second doped connection region are formed on or above a substrate; a body region is formed between the first doped connection region and the second doped connection region; at least two gate regions separate from one another are formed on or above the body region; at least one partial region of the body region is doped by means of introducing dopant atoms, wherein the dopant atoms are introduced into the at least one partial region of the body region through at least one intermediate region formed between the at least two separate gate regions.
    Type: Application
    Filed: May 8, 2007
    Publication date: March 20, 2008
    Inventors: Harald Gossner, Thomas Schulz, Christian Russ, Gerhard Knoblinger
  • Publication number: 20080014700
    Abstract: Disclosed are a variety of methods for increasing the relative thickness in the peripheral or edge regions of gate dielectric patterns to suppress leakage through these regions. The methods provide alternatives to conventional GPOX processes and provide the improved leakage resistance without incurring the degree of increased gate electrode resistance associated with GPOX processes. Each of the methods includes forming a first opening to expose an active area region, forming an oxidation control region on the exposed portion and then forming a second opening whereby a peripheral region free of the oxidation control region is exposed for formation of a gate dielectric layer. The resulting gate dielectric layers are characterized by a thinner central region surrounded or bounded by a thicker peripheral region.
    Type: Application
    Filed: May 31, 2007
    Publication date: January 17, 2008
    Inventors: Woong-Hee Sohn, Gil-Heyun Choi, Byung-Hee Kim, Byung-hak Lee, Tae-Ho Cha, Hee-Sook Park, Jae-Hwa Park, Geum-Jung Seong
  • Publication number: 20080006887
    Abstract: A semiconductor device including an impurity doped region and a method of forming the same. The method includes implanting cluster-shaped dopant ions into a semiconductor substrate to form an impurity implantation region. An annealing process is performed on the impurity implantation region to form an impurity doped region.
    Type: Application
    Filed: January 30, 2007
    Publication date: January 10, 2008
    Inventors: Tetsuji Ueno, Hwa-Sung Rhee, Ho Lee
  • Publication number: 20070254420
    Abstract: Methods for source/drain implantation and strain transfer to a channel of a semiconductor device and a related semiconductor device are disclosed. In one embodiment, the method includes using a first size spacer for deep source/drain implantation adjacent a gate region of a semiconductor device; and using a second, smaller size spacer for silicide formation adjacent the gate region and transferring strain from a stress liner to a channel underlying the gate region. One embodiment of a semiconductor device may include a gate region atop a substrate; a spacer including a spacer core and an outer spacer member about the spacer core; a deep source/drain region within the substrate and distanced from the spacer; and a silicide region within the substrate and overlapping and extending beyond the deep source/drain region, the silicide region aligned to the spacer.
    Type: Application
    Filed: April 28, 2006
    Publication date: November 1, 2007
    Applicants: International Business Machines Corporation, Chartered Semiconductor Manufacturing LTD.
    Inventors: Atul Ajmera, Christopher Baiocco, Xiangdong Chen, Thomas Dyer, Sunfei Fang, Wenzhi Gao
  • Patent number: 7208384
    Abstract: Transistors and manufacturing methods thereof are disclosed. An example transistor includes a semiconductor substrate divided into device isolation regions and a device active region. The example transistor includes a gate insulating film formed in the active region of the semiconductor substrate, a gate formed on the gate insulating film, a channel region formed in the semiconductor substrate and overlapping the gate, and LDD regions formed in the semiconductor substrate and at both sides of the gate, centering the gate. In addition, the example transistor includes source and drain regions formed under the LDD regions, offset regions formed in the semiconductor substrate and between the channel region and LDD regions, and gate spacers formed at both sidewalls of the gate.
    Type: Grant
    Filed: December 30, 2004
    Date of Patent: April 24, 2007
    Assignee: Dongbu Electronics Co., Ltd.
    Inventor: Kwan-Ju Koh
  • Patent number: 7163868
    Abstract: In accordance with the present invention, a gate electrode structure with inclined planes is used as a mask when performing an ion implantation process. The inclined planes are used to define the lightly doped drain (LDD) region in the active area. Therefore, the width of the LDD can be defined by the geometry of the inclined planes.
    Type: Grant
    Filed: June 8, 2004
    Date of Patent: January 16, 2007
    Assignee: Chunghwa Picture Tubes, Ltd.
    Inventor: Te-Ming Chu
  • Patent number: 7135373
    Abstract: A transistor can be fabricated to exhibit reduced channel hot carrier effects. According to one aspect of the present invention, a method for fabricating a transistor structure includes implanting a first dopant into a lightly doped drain (LDD) region to form a shallow region therein. The first dopant penetrates the substrate to a depth that is less than the LDD junction depth. A second dopant is implanted into the substrate beyond the LDD junction depth to form a source/drain region. The implantation of the second dopant overpowers a substantial portion of the first dopant to define a floating ring in the LDD region that mitigates channel hot carrier effects.
    Type: Grant
    Filed: September 23, 2003
    Date of Patent: November 14, 2006
    Assignee: Texas Instruments Incorporated
    Inventors: Pinghai Hao, Shanjen Pan, Sameer Pendharkar
  • Patent number: 7095086
    Abstract: Semiconductor devices and methods of manufacturing the same are provided. A disclosed semiconductor device includes: a semiconductor substrate; a gate insulating layer on the active region of the semiconductor substrate; a gate on the gate insulating layer; LDD regions on opposite sides of the gate insulating layer and located in the semiconductor substrate; source/drain regions on the LDD regions; and silicide layers on the surfaces of the gate and the source/drain regions. The source/drain regions are formed by doping impurities in a silicon layer grown by a selective epitaxy.
    Type: Grant
    Filed: December 30, 2004
    Date of Patent: August 22, 2006
    Assignee: Dongbu Electronics Co., Ltd.
    Inventor: Kwan-Ju Koh