Static Random Access Memory Structures (sram) (epo) Patents (Class 257/E21.661)
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Patent number: 11205616Abstract: Memory bit cells having internal node jumpers are described. In an example, an integrated circuit structure includes a memory bit cell on a substrate. The memory bit cell includes first and second gate lines parallel along a second direction of the substrate. The first and second gate lines have a first pitch along a first direction of the substrate, the first direction perpendicular to the second direction. First, second and third interconnect lines are over the first and second gate lines. The first, second and third interconnect lines are parallel along the second direction of the substrate. The first, second and third interconnect lines have a second pitch along the first direction, where the second pitch is less than the first pitch. One of the first, second and third interconnect lines is an internal node jumper for the memory bit cell.Type: GrantFiled: June 20, 2017Date of Patent: December 21, 2021Assignee: Intel CorporationInventors: Smita Shridharan, Zheng Guo, Eric A. Karl, George Shchupak, Tali Kosinovsky
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Patent number: 11183236Abstract: A memory device that includes at least one memory cell is introduced. Each of the at least one memory cell is coupled to a bit line and a word line. Each of the at least one memory cell includes a memory element and a selector element, in which the memory element is configured to store data of the at least one memory cell. The selector element is coupled to the memory element in series and is configured to select the memory element for a read operation and amplify the data stored in the memory element in the read operation.Type: GrantFiled: March 2, 2020Date of Patent: November 23, 2021Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hung-Li Chiang, Chao-Ching Cheng, Tzu-Chiang Chen, Yu-Sheng Chen, Hon-Sum Philip Wong
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Patent number: 10797135Abstract: An example apparatus includes a first transistor and a second transistor, each having asymmetric source/drain regions. A source/drain region of the first transistor is directly coupled to a source/drain region of the second transistor at a junction. A depth of the junction is greater than a depth of another source/drain region of the first transistor and a depth of another source/drain region of the second transistor.Type: GrantFiled: December 4, 2018Date of Patent: October 6, 2020Assignee: Micron Technology, Inc.Inventors: Si-Woo Lee, Yunfei Gao, Srinivas Pulugurtha
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Patent number: 10741566Abstract: Some embodiments include an integrated assembly having a first pull-down transistor, a second pull-down transistor, a first pull-up transistor and a second pull-up transistor. The first pull-down transistor has a first conductive-gate-body at a first level, and has an n-channel-device-active-region at a second level vertically offset from the first level. The first pull-up transistor has a second conductive-gate-body at the first level, and has a p-channel-device-active-region at the second level. The second pull-down transistor has a third conductive-gate-body at the second level, and has an n-channel-device-active-region at the first level. The second pull-up transistor has a fourth conductive-gate-body at the second level, and has a p-channel-device-active-region at the first level.Type: GrantFiled: May 30, 2019Date of Patent: August 11, 2020Assignee: Micron Technology, Inc.Inventor: Debra M. Bell
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Patent number: 10734382Abstract: After forming a plurality of semiconductor fins that are separated from one another by trenches on a substrate, the semiconductor fins are fully or partially oxidized to provide semiconductor oxide portions. The volume expansion caused by the oxidation of the semiconductor fins reduces widths of the trenches, thereby providing narrowed trenches for formation of epitaxial semiconductor fins using aspect ratio trapping techniques.Type: GrantFiled: July 30, 2019Date of Patent: August 4, 2020Assignee: International Business Machines CorporationInventors: Karthik Balakrishnan, Kangguo Cheng, Pouya Hashemi, Alexander Reznicek
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Patent number: 10636739Abstract: An integrated circuit (IC) chip having power and ground rails incorporated in the front end of line (FEOL) is disclosed. In one aspect, these power and ground rails are at the same level as the active devices and are therefore buried deep in the IC, as seen from the front of the chip. The connection from the buried interconnects to the source and drain areas is established by local interconnects. These local interconnects are not part of the back end of line, but they are for the most part embedded in a pre-metal dielectric layer onto which the BEOL is produced. In a further aspect, a power delivery network (PDN) of the IC is located in its entirety on the backside of the chip. The PDN is connected to the buried interconnects through suitable connections, for example metal-filled through-semiconductor vias or through silicon vias.Type: GrantFiled: November 13, 2017Date of Patent: April 28, 2020Assignee: IMEC vzwInventors: Eric Beyne, Julien Ryckaert
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Patent number: 10563319Abstract: A process for making at least one porous area (ZP) of a microelectronic structure in at least one part of an conducting active layer (6), the active layer (6) forming a front face of a stack, the stack comprising a back face (2) of conducting material and an insulating layer (4) interposed between the active layer (6) and the back face (2), said process comprising the steps of: a) making at least one contact pad (14) between the back face (2) and the active layer (6) through the insulation layer (2), b) placing the stack into an electrochemical bath, c) applying an electrical current between the back face (2) and the active layer (6) through the contact pad (14) causing porosification of an area (ZP) of the active layer (6) in the vicinity of the contact pad (14), d) forming the microelectronic structure.Type: GrantFiled: October 15, 2014Date of Patent: February 18, 2020Assignee: COMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Eric Ollier, Frederic-Xavier Gaillard, Carine Marcoux
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Patent number: 10510761Abstract: In a region just below an access gate electrode in an SRAM memory cell, a second halo region is formed adjacent to a source-drain region and a first halo region is formed adjacent to a first source-drain region. In a region just below a drive gate electrode, a third halo region is formed adjacent to the third source-drain region and a fourth halo region is formed adjacent to a fourth source-drain region. The second halo region is set to have an impurity concentration higher than the impurity concentration of the first halo region. The third halo region is set to have an impurity concentration higher than the impurity concentration of the fourth halo region. The impurity concentration of the first halo region and the impurity concentration of the fourth halo region are different from each other.Type: GrantFiled: January 4, 2019Date of Patent: December 17, 2019Assignee: RENESAS ELECTRONICS CORPORATIONInventors: Koji Nii, Makoto Yabuuchi, Yasumasa Tsukamoto, Kengo Masuda
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Patent number: 10396157Abstract: A semiconductor device includes semiconductor layer having first device region and second device region. A shallow trench isolation (STI) structure is in the semiconductor layer and located at periphery of the first and second device regions. A first and second insulating layers are on the semiconductor layer and respectively located in the first and second device regions. A first gate structure is located on the first insulating layer. A source region and a drain region are in the semiconductor layer and are located at two sides of the first gate structure. A gate doped region is in a surface region of the semiconductor layer in the second device region to serve as a second gate structure. A channel layer is located on the second insulating layer. A source layer and a drain layer are on the STI structure and are located at two sides of the channel layer.Type: GrantFiled: March 6, 2018Date of Patent: August 27, 2019Assignee: United Microelectronics Corp.Inventors: Shin-Hung Li, Kuan-Chuan Chen, Nien-Chung Li, Wen-Fang Lee, Chih-Chung Wang
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Patent number: 10396075Abstract: After forming a plurality of semiconductor fins that are separated from one another by trenches on a substrate, the semiconductor fins are fully or partially oxidized to provide semiconductor oxide portions. The volume expansion caused by the oxidation of the semiconductor fins reduces widths of the trenches, thereby providing narrowed trenches for formation of epitaxial semiconductor fins using aspect ratio trapping techniques.Type: GrantFiled: May 1, 2017Date of Patent: August 27, 2019Assignee: International Business Machines CorporationInventors: Karthik Balakrishnan, Kangguo Cheng, Pouya Hashemi, Alexander Reznicek
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Patent number: 10283495Abstract: A semiconductor device includes two elongated active regions that include source/drain regions for multiple transistor devices, a first contact layer that includes an electrical connection between the two active regions, a second contact layer that includes a connection between two gate lines, and a gate contact layer that provides connections to the gate lines.Type: GrantFiled: April 1, 2016Date of Patent: May 7, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Ru-Gun Liu, Chun-Yi Lee, Jyh-Kang Ting, Juing-Yi Wu, Liang-Yao Lee, Tung-Heng Hsieh, Tsung-Chieh Tsai
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Patent number: 10217751Abstract: In a region just below an access gate electrode in an SRAM memory cell, a second halo region is formed adjacent to a source-drain region and a first halo region is formed adjacent to a first source-drain region. In a region just below a drive gate electrode, a third halo region is formed adjacent to the third source-drain region and a fourth halo region is formed adjacent to a fourth source-drain region. The second halo region is set to have an impurity concentration higher than the impurity concentration of the first halo region. The third halo region is set to have an impurity concentration higher than the impurity concentration of the fourth halo region. The impurity concentration of the first halo region and the impurity concentration of the fourth halo region are different from each other.Type: GrantFiled: June 21, 2018Date of Patent: February 26, 2019Assignee: RENESAS ELECTRONICS CORPORATIONInventors: Koji Nii, Makoto Yabuuchi, Yasumasa Tsukamoto, Kengo Masuda
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Patent number: 10211156Abstract: A semiconductor device includes a substrate including PMOSFET and NMOSFET regions, a first gate structure extending in a first direction and crossing the PMOSFET and NMOSFET regions, and a gate contact on and connected to the first gate structure, the gate contact being between the PMOSFET and NMOSFET regions, the gate contact including a first sub contact in contact with a top surface of the first gate structure, the first sub contact including a vertical extending portion extending vertically toward the substrate along one sidewall of the first gate structure, and a second sub contact spaced apart from the first gate structure, a top surface of the second sub contact being positioned at a same level as a top surface of the first sub contact.Type: GrantFiled: August 31, 2018Date of Patent: February 19, 2019Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Changseop Yoon, Kwangsub Yoon, Jongmil Youn, Hyung Jong Lee
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Patent number: 10211206Abstract: Methods of connecting a read driver transistor to a PD and PU inverter of a two-port vertical SRAM via a shared GAA or a vertical cross-couple contact between a GAA of the read driver transistor and the bottom source/drain region of the PD and PU inverter and the resulting devices are provided. Embodiments include forming a first PD transistor, a first PU transistor, a second PU transistor, and a second PD transistor over a substrate; forming a first PG transistor and a second PG transistor over the substrate; forming a read transistor and a read driver transistor laterally separated in the first direction over the substrate, the read transistor and the read driver transistor adjacent to the second PG transistor and the first PD transistor, respectively; and connecting the read driver transistor, the first PD transistor, and the first PU transistor.Type: GrantFiled: November 1, 2017Date of Patent: February 19, 2019Assignee: GLOBALFOUNDRIES INC.Inventors: Hui Zang, Jerome Ciavatti
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Patent number: 10181496Abstract: A memory device can include at least one plate structure formed over a semiconductor substrate; an active region formed within the semiconductor substrate without lateral isolation structures; a plurality of bit line contact groups, each including bit line contacts to the active region disposed in a first direction; a plurality of storage contact groups, each including storage contacts to the active region disposed in the first direction; a plurality of gate structures, each including a main section extending in the first direction, and disposed between one bit line contact group and an adjacent storage contact group; and a two-terminal storage element disposed between each bit line contact and the at least one plate structure.Type: GrantFiled: April 29, 2016Date of Patent: January 15, 2019Assignee: Adesto Technologies CorporationInventors: Ming Sang Kwan, Venkatesh P. Gopinath
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Patent number: 10103153Abstract: An integrated circuit with a SAR SRAM cell with power routed in metal-1. An integrated circuit with a SAR SRAM cell that has power routed in Metal-1 and has metal-1 and metal-2 integrated circuit and SAR SRAM cell patterns which are DPT compatible. A process of forming an integrated circuit with a SAR SRAM cell with DPT compatible integrated circuit and SAR SRAM cell metal-1 and metal-2 patterns.Type: GrantFiled: September 28, 2015Date of Patent: October 16, 2018Assignee: TEXAS INSTRUMENTS INCORPORATEDInventor: James Walter Blatchford
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Patent number: 10096546Abstract: A semiconductor device includes a substrate including PMOSFET and NMOSFET regions, a first gate structure extending in a first direction and crossing the PMOSFET and NMOSFET regions, and a gate contact on and connected to the first gate structure, the gate contact being between the PMOSFET and NMOSFET regions, the gate contact including a first sub contact in contact with a top surface of the first gate structure, the first sub contact including a vertical extending portion extending vertically toward the substrate along one sidewall of the first gate structure, and a second sub contact spaced apart from the first gate structure, a top surface of the second sub contact being positioned at a same level as a top surface of the first sub contact.Type: GrantFiled: September 14, 2017Date of Patent: October 9, 2018Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Changseop Yoon, Kwangsub Yoon, Jongmil Youn, Hyung Jong Lee
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Patent number: 9881810Abstract: Structures and methods are provided for nanosecond electrical pulse anneal processes. The method of forming an electrostatic discharge (ESD) N+/P+ structure includes forming an N+ diffusion on a substrate and a P+ diffusion on the substrate. The P+ diffusion is in electrical contact with the N+ diffusion. The method further includes forming a device between the N+ diffusion and the P+ diffusion. A method of annealing a structure or material includes applying an electrical pulse across an electrostatic discharge (ESD) N+/P+ structure for a plurality of nanoseconds.Type: GrantFiled: January 14, 2014Date of Patent: January 30, 2018Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Michel J. Abou-Khalil, Robert J. Gauthier, Jr., Tom C. Lee, Junjun Li, Souvick Mitra, Christopher S. Putnam, Robert R. Robison
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Patent number: 9881926Abstract: A method is presented for forming a semiconductor structure. The method includes forming gate contacts on a semiconductor substrate, forming trench silicide (TS) contacts on the semiconductor substrate, recessing the TS contacts to form a gap region, filling the gap region of the recessed TS contacts with a dielectric, selectively etching the gate contacts to form a first conducting layer, and selectively etching the TS contacts to form a second conducting layer.Type: GrantFiled: October 24, 2016Date of Patent: January 30, 2018Assignee: International Business Machines CorporationInventors: Veeraraghavan S. Basker, Kangguo Cheng, Sivananda K. Kanakasabapathy, Theodorus E. Standaert, Junli Wang
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Patent number: 9871047Abstract: A semiconductor structure includes a SRAM cell having transistors defined by fins and metal gate stack structures. A transistor and a corresponding pick up cell are disposed in an extension direction of the fins. The transistor and the corresponding pick up cell have metal gate stack structures of the same type.Type: GrantFiled: January 20, 2017Date of Patent: January 16, 2018Assignee: UNITED MICROELECTRONICS CORP.Inventors: Yu-Lin Wang, Wei-Chi Lee
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Patent number: 9824748Abstract: Static random access memory (SRAM) bitcell structures with improved minimum operation voltage (Vmin) and yield are provided. The structures may include a silicon substrate, a deep n-well (DNW) layer, p-well (PW) regions, doped back-plate (BP) regions, a buried oxide (BOX) layer, and/or active regions formed on the BOX layer and over portions of the BP regions. At least one BP region may extend below at least one shallow trench isolation (STI) region, at least one contact to back plate (CBP), at least one active region and at least one PC construct overlapping the at least one active region forming a channel of at least one of a first pull-up (PU1) transistor and a second pull-up (PU2) transistor. The at least one CBP facilitates biasing of at least one the PU1 and PU2 transistors during at least one of a read, write or standby operation of the structures.Type: GrantFiled: December 30, 2016Date of Patent: November 21, 2017Assignee: GLOBALFOUNDRIES Inc.Inventors: Hui Zang, Manfred Eller, Min-hwa Chi
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Patent number: 9697874Abstract: Providing for a monolithic memory device comprising a combination of a one-transistor, one-resistor (1T1R) memory array, and a one-transistor, multiple-resistor (1TnR, where n is a suitable integer greater than 1) memory array is described herein. By way of example, the monolithic memory device can be a stand-alone device, configured to perform functions in response to predetermined conditions and generate an output(s), or can be a removable device that can be connected to and operable with another device. In various embodiments, the 1TnR array having high memory density can serve as storage class memory (SCM) for the monolithic memory device, and the 1T1R array having high performance and efficacy can serve as code memory. In addition to the foregoing, the 1T1R array and the 1TnR array can be fabricated from at least one common layer or a common processing step, to simplify and lower cost of fabricating disclosed memory devices.Type: GrantFiled: June 9, 2016Date of Patent: July 4, 2017Assignee: CROSSBAR, INC.Inventors: Mehdi Asnaashari, Sundar Narayanan
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Patent number: 9601495Abstract: A three-dimensional semiconductor device includes a semiconductor substrate, fin(s) coupled to the substrate and surrounded at a bottom portion thereof by isolation material, each fin including a source region, a drain region and a channel region therebetween, a first gate and spacers over a portion of each fin, and a second gate and spacers, the second gate encompassing a common end portion of each fin. The first gate and corresponding source and drain regions act as an access transistor, and the second gate and common end portion(s) of the fin(s) act as a storage capacitor, and a top surface of the second gate acts as a plate for the storage capacitor, when multiple cells are arranged in an array.Type: GrantFiled: July 30, 2015Date of Patent: March 21, 2017Assignee: GLOBALFOUNDRIES INC.Inventors: Hui Zang, Min-hwa Chi
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Patent number: 9590074Abstract: The method for preventing epitaxial growth in a semiconductor device begins with patterning a photoresist layer over a semiconductor structure having a set of fin ends on a set of fins of a FinFET structure. The set of fins are isolated from one another by a first dielectric material. The photoresist is patterned over the set of fin ends so that it differs from the photoresist pattern over other areas of the FinFET structure. A set of dielectric blocks is formed on the set of fin ends using the photoresist pattern. The set of dielectric blocks prevents epitaxial growth at the set of fin ends in a subsequent epitaxial growth step. In another aspect of the invention, a semiconductor device includes a set of fin structures having a set of fin ends at a respective vertical surface of a fin structure and is separated by a set of trenches from other fin structures. Each of the fin structures has a top surface which is higher than a top surface of a dielectric material in the set of trenches.Type: GrantFiled: December 5, 2015Date of Patent: March 7, 2017Assignees: International Business Machines Corporation, GlobalFoundries Inc.Inventors: Balasubramanian Pranatharthiharan, Hui Zang
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Patent number: 9484068Abstract: An MTP (Many Times Programmable) memory cell for integrated circuit memory arrays is described. The cell includes an MTP device and a thyristor interconnected so that the MTP device triggers the thyristor to turn on during a Read or Verify operation. The difference in threshold voltages between a data memory cell and a reference memory cell is used to determine the information in the data memory cell. Different memory cell structures may be constructed for different memory array requirements.Type: GrantFiled: February 16, 2016Date of Patent: November 1, 2016Assignee: Kilopass Technology, Inc.Inventors: Colin Stewart Bill, Harry Luan
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Patent number: 9406607Abstract: A method includes forming a transistor at a surface of a semiconductor substrate, wherein the step of forming the transistor comprises forming a gate electrode, and forming a source/drain region adjacent the gate electrode. First metal features are formed to include at least portions at a same level as the gate electrode. Second metal features are formed simultaneously, and are over and contacting the first metal features. A first one of the second metal features is removed and replaced with a third metal feature, wherein a second one of the second metal features is not removed. A fourth metal feature is formed directly over and contacting the gate electrode, wherein the third and the fourth metal features are formed using a same metal-filling process.Type: GrantFiled: October 21, 2013Date of Patent: August 2, 2016Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Wei Yu Ma, Fang-Tsun Chu, Kvei-Feng Yen, Yao-Bin Wang
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Patent number: 9391080Abstract: An approach for providing SRAM bit cells with miniaturized bit cells, without local interconnection layers, with improved lithographic printability, and enabling methodology are disclosed. Embodiments include providing first color structures, in a M1 layer, including a first word line, a first bit line, a second bit line, a first ground line, a second ground line, a second latch line or a combination thereof, wherein the first color structures include side edges longer than tip edges; providing second color structures, in the M1 layer, including a second word line, a first power line, a second power line, a first latch line or a combination thereof, wherein the second color structures include side edges longer than tip edges; and forming a bit cell including the first color structures and the second color structures, wherein adjacent tip edges include a first color structure tip edge and a second color structure tip edge.Type: GrantFiled: April 28, 2015Date of Patent: July 12, 2016Assignee: GLOBALFOUNDRIES INC.Inventors: Juhan Kim, Mahbub Rashed
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Patent number: 9385716Abstract: A semiconductor device includes a first block coupled between a first latch node and a second latch node, a second block suitable for generating common-mode noise between the first latch node and the second latch node, wherein the second block includes a first MOS transistor having a gate coupled with the first latch node, and one between a source and a drain of the first MOS transistor is coupled with the second latch node while the other between the source and the drain is floating.Type: GrantFiled: December 12, 2014Date of Patent: July 5, 2016Assignee: SK Hynix Inc.Inventors: Seong-Jin Kim, Sung-Soo Chi
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Patent number: 9379014Abstract: A static random-access memory (SRAM) array includes a first metal layer and a second metal layer. The metal layer includes multiple first source lines spanning multiple columns of cells. The multiple first source lines include a first source line and a second source line. The second metal layer includes multiple second source lines spanning multiple rows of cells. The SRAM array further includes a set of vias coupled to the multiple first source lines and to the multiple second source lines. A first via of the set of vias is coupled to the first source line and multiple vias of the set of vias are coupled to the second source line. Two vias of the multiple vias that are closest to the first via are each substantially the same distance from the first via.Type: GrantFiled: July 18, 2015Date of Patent: June 28, 2016Assignee: QUALCOMM IncorporatedInventors: Niladri Narayan Mojumder, Stanley Seungchul Song, Choh Fei Yeap, Mosaddiq Saifuddin
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Patent number: 9041117Abstract: A Static Random Access Memory (SRAM) cell includes a first pull-up transistor and a second pull-up transistor, and a first pull-down transistor and a second pull-down transistor forming cross-latched inverters with the first pull-up transistor and the second pull-up transistor. A conductive feature includes a first leg having a first longitudinal direction, wherein the first leg interconnects a drain of the first pull-up transistor and a drain of the first pull-down transistor. The conductive feature further includes a second leg having a second extending direction. The first longitudinal direction and the second extending direction are un-perpendicular and un-parallel to each other. The second leg interconnects the drain of the first pull-up transistor and a gate of the second pull-up transistor.Type: GrantFiled: November 13, 2012Date of Patent: May 26, 2015Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventor: Jhon-Jhy Liaw
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Patent number: 9029951Abstract: A semiconductor device with an SRAM memory cell having improved characteristics. Below an active region in which a driver transistor including a SRAM is placed, an n type back gate region surrounded by an element isolation region is provided via an insulating layer. It is coupled to the gate electrode of the driver transistor. A p well region is provided below the n type back gate region and at least partially extends to a position deeper than the element isolation region. It is fixed at a grounding potential. Such a configuration makes it possible to control the threshold potential of the transistor to be high when the transistor is ON and to be low when the transistor is OFF; and control so as not to apply a forward bias to the PN junction between the p well region and the n type back gate region.Type: GrantFiled: July 22, 2012Date of Patent: May 12, 2015Assignee: Renesas Electronics CorporationInventors: Katsuyuki Horita, Toshiaki Iwamatsu, Hideki Makiyama
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Patent number: 9029956Abstract: A static random access memory cell is provided that includes first and second inverters formed on a substrate each having a pull-up and pull-down transistor configured to form a cell node. Each of the pull-down transistors of the first and second inverters resides over first regions below the buried oxide layer and having a first doping level and applied bias providing a first voltage threshold for the pull-down transistors. A pair of passgate transistors is coupled the cell nodes of the first and second inverters, and each is formed over second regions below the buried oxide layer and having a second doping level and applied bias providing a second voltage threshold for the passgate transistors. The first voltage threshold differs from the second voltage threshold providing electrical voltage threshold control between the pull-down transistors and the passgate transistors.Type: GrantFiled: October 26, 2011Date of Patent: May 12, 2015Assignee: Global Foundries, Inc.Inventors: Randy W. Mann, Scott D. Luning
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Patent number: 9006826Abstract: The present disclosure relates to an SRAM memory cell. The SRAM memory cell has a semiconductor substrate with an active area and a gate region positioned above the active area. A butted contact extends along a length (i.e., the larger dimension of the butted contact) from a position above the active area to a position above the gate region. The butted contact contains a plurality of distinct regions having different widths (i.e., the smaller dimensions of the butted contact), such that a region spanning the active area and gate region has width less than the regions in contact with the active area or gate region. By making the width of the region spanning the active area and gate region smaller than the regions in contact with the active area or gate, the etch rate is reduced at a junction of the gate region with the active area, thereby preventing etch back of the gate material and leakage current.Type: GrantFiled: May 14, 2012Date of Patent: April 14, 2015Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventor: Tzyh-Cheang Lee
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Patent number: 9006841Abstract: A dual port SRAM has two data storage nodes, a true data and complementary data. A first pull down transistor has an active area that forms the drain region of the first transistor and the true data storage node that is physically isolated from all other transistor active areas of the memory cell. A second pull down transistor has an active area that forms the drain region of a second transistor that is the complementary data node that is physically isolated from all other transistor active areas of the memory cell.Type: GrantFiled: August 22, 2012Date of Patent: April 14, 2015Assignee: STMicroelectronics International N.V.Inventors: Shishir Kumar, Dibya Dipti, Pierre Malinge
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Patent number: 8975699Abstract: Improvements are achieved in the characteristics of a semiconductor device including SRAM memory cells. Under an active region in which an access transistor forming an SRAM is disposed, a p-type semiconductor region is disposed via an insulating layer such that the bottom portion and side portions thereof come in contact with an n-type semiconductor region. Thus, the p-type semiconductor region is pn-isolated from the n-type semiconductor region, and the gate electrode of the access transistor is coupled to the p-type semiconductor region. The coupling is achieved by a shared plug which is an indiscrete conductive film extending from over the gate electrode of the access transistor to over the p-type semiconductor region. As a result, when the access transistor is in an ON state, a potential in the p-type semiconductor region serving as a back gate simultaneously increases to allow an increase in an ON current for the transistor.Type: GrantFiled: September 24, 2014Date of Patent: March 10, 2015Assignee: Renesas Electronics CorporationInventors: Toshiaki Iwamatsu, Katsuyuki Horita, Hideki Makiyama
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Patent number: 8952418Abstract: Some embodiments include gated bipolar junction transistors. The transistors may include a base region between a collector region and an emitter region; with a B-C junction being at an interface of the base region and the collector region, and with a B-E junction being at an interface of the base region and the emitter region. The transistors may include material having a bandgap of at least 1.2 eV within one or more of the base, emitter and collector regions. The gated transistors may include a gate along the base region and spaced from the base region by dielectric material, with the gate not overlapping either the B-C junction or the B-E junction. Some embodiments include memory arrays containing gated bipolar junction transistors. Some embodiments include methods of forming gated bipolar junction transistors.Type: GrantFiled: March 1, 2011Date of Patent: February 10, 2015Assignee: Micron Technology, Inc.Inventors: Rajesh N. Gupta, Farid Nemati, Scott T. Robins
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Patent number: 8947912Abstract: Memory cells are described with cross-coupled inverters including unidirectional gate conductors. Gate conductors for access transistors may also be aligned with a long axis of the inverter gate conductor. Contacts of one inverter in a cross-coupled pair may be aligned with a long axis of the other inverter's gate conductor. Separately formed rectangular active regions may be orthogonal to the gate conductors across pull up, pull down and access transistors. Separate active regions may be formed such that active regions associated with an access transistor and/or a pull up transistor are noncontiguous with, and narrower than, an active region associated with a pull down transistor of the inverter. The major components of 6T SRAM, and similar, memory cell topologies may be formed essentially from an array of rectangular lines, including unidirectional gate conductors and contacts, and unidirectional rectangular active regions crossing gate conductors of the inverters and access transistors.Type: GrantFiled: July 20, 2011Date of Patent: February 3, 2015Assignee: University of Virginia Licensing & Ventures GroupInventors: Benton H. Calhoun, Randy W. Mann
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Patent number: 8934287Abstract: A method for providing a SRAM cell having a dedicated read port separated from a write port includes providing a first and a second bit-line placed in parallel forming a complementary bit-line pair for the dedicated read port, and providing a third and a fourth bit-line placed in parallel forming a complementary bit-line pair for the write port. The method further includes providing a positive voltage supply line disposed between a first and a second ground line placed in parallel, providing a first and a second metal line adjacently flanking and in parallel to the first bit-line, and providing a third and a fourth metal line adjacently flanking and in parallel to the second bit-line to provide a new SRAM cell structure having a balanced read and write operation speed and an improved noise margin.Type: GrantFiled: November 7, 2013Date of Patent: January 13, 2015Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventor: Jhon Jhy Liaw
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Patent number: 8928062Abstract: A nonvolatile semiconductor memory device includes a plurality of nonvolatile memory cells formed on a semiconductor substrate, each memory cell including source and drain regions separately formed on a surface portion of the substrate, buried insulating films formed in portions of the substrate that lie under the source and drain regions and each having a dielectric constant smaller than that of the substrate, a tunnel insulating film formed on a channel region formed between the source and drain regions, a charge storage layer formed of a dielectric body on the tunnel insulating film, a block insulating film formed on the charge storage layer, and a control gate electrode formed on the block insulating film.Type: GrantFiled: March 23, 2009Date of Patent: January 6, 2015Assignee: Kabushiki Kaisha ToshibaInventor: Naoki Yasuda
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Patent number: 8929115Abstract: A ternary content addressable memory (TCAM) is formed by TCAM cells that are arranged in an array. Each TCAM cell includes a first and second SRAM cells and a comparator. The SRAM cells predominantly in use have a horizontal topology with a rectangular perimeter defined by longer and shorter side edges. The match lines for the TCAM extend across the array, and are coupled to TCAM cells along an array column. The bit lines extend across the array, and coupled to TCAM cells along an array row. Each match line is oriented in a first direction (the column direction) that is parallel to the shorter side edge of the horizontal topology layout for the SRAM cells in each CAM cell. Each bit line is oriented in a second direction (the row direction) that is parallel to the longer side edge of the horizontal topology layout for the SRAM cells in each CAM cell.Type: GrantFiled: November 30, 2011Date of Patent: January 6, 2015Assignee: STMicroelectronics International N.V.Inventor: Nishu Kohli
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Patent number: 8921179Abstract: Methodology enabling a reduction of edge and strap cell size, and the resulting device are disclosed. Embodiments include: providing first and second NW regions on a substrate; providing first and second RX regions on the first and second NW regions, respectively; providing a contact on the substrate connecting the first and second RX regions; and providing a dummy PC on the substrate connecting the first and second RX regions. Other embodiments include: determining an RX region of an IC design; determining a PPLUS mask region extending along a horizontal direction and being on an entire upper surface of the RX region; determining a NW region extending along a vertical direction and separated from the RX region; and comparing an area of an overlap of the NW region and PPLUS mask region to a threshold value.Type: GrantFiled: February 13, 2013Date of Patent: December 30, 2014Assignee: GlobalFoundries Inc.Inventors: Bipul C. Paul, Anurag Mittal, Pierre Malinge
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Patent number: 8908419Abstract: A semiconductor storage device includes a memory cell array, a plurality of word lines, a plurality of bit lines, a first gate wiring element 3a, 3b, a second gate wiring element 3c, 3d, a first connector 5a, 5b, and a second connector 5c, 5d. Each memory cell 10 has first and second sets having a driver transistor 11, a load transistor 12, and an access transistor 13. The word lines are arranged in parallel to each other along a first direction. The bit lines are arranged in parallel to each other along a second direction perpendicular to the first direction. The first gate wiring element comprises a gate electrode of the first driver transistor and the first load transistor, and has a rectangular shape having straight line on opposite sides. The second gate wiring element comprises a gate electrode of the access transistor and has a rectangular shape having straight line on opposite sides.Type: GrantFiled: March 18, 2013Date of Patent: December 9, 2014Assignee: Renesas Electronics CorporationInventors: Hidemoto Tomita, Shigeki Ohbayashi, Yoshiyuki Ishigaki
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Patent number: 8860096Abstract: An SRAM cell of a semiconductor device includes a load transistor, a driver transistor and an access transistor. First source/drains of the load, driver and access transistors are connected to a node. A power line, a ground line and a bit line are electrically connected to second source/drains of the load transistor, the driver transistor and the access transistor. The power line, the ground line and the bit line are disposed at substantially the same level to extend in a first direction. A word line is electrically connected to a gate of the access transistor to extend in a second direction perpendicular to the first direction. The word line is disposed at a different level from the level of the power line, the ground line and the bit line.Type: GrantFiled: January 19, 2011Date of Patent: October 14, 2014Assignee: Samsung Electronics Co., Ltd.Inventors: OhKyum Kwon, Byungsun Kim, Taejung Lee
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Patent number: 8853700Abstract: Cross-coupling between a gate conductor and an active region of a semiconductor substrate is provided by forming a gate dielectric layer on the semiconductor substrate and lithographically patterning the gate dielectric layer to form opening therein over a portion of the active region at which electrical contact with the gate conductor is desired. After implanting electrical dopants, a gate conductor layer is deposited and patterned. A remaining portion of the gate conductor layer includes an integral conductor structure, which includes a first portion overlying a gate dielectric over an active region and a second portion contacting the semiconductor material of the same active region or a different active region. The gate dielectric layer can be deposited within gate cavities in planarization dielectric material layer in a replacement gate scheme, or can be deposited on planar surfaces of active regions and/or shallow trench isolation structures in a gate first processing scheme.Type: GrantFiled: August 10, 2011Date of Patent: October 7, 2014Assignee: International Business Machines CorporationInventors: Viraj Y. Sardesai, Robert C. Wong
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Patent number: 8772841Abstract: Methods, devices, and systems associated with oxide based memory can include a method of forming an oxide based memory cell. Forming an oxide based memory cell can include forming a first conductive element, forming an oxide over the first conductive element, implanting a reactive metal into the oxide, and forming a second conductive element over the oxide.Type: GrantFiled: September 14, 2012Date of Patent: July 8, 2014Assignee: Micron Technology, Inc.Inventors: D.V. Nirmal Ramaswamy, Gurtej S. Sandhu
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Patent number: 8723181Abstract: Stacked transistors and electronic devices including the stacked transistors. An electronic device includes a substrate, a first transistor on the substrate and including a first active layer, a first gate, and a first gate insulating layer between the first active layer and the first gate, a first metal line spaced apart from the first gate on the substrate, a first insulating layer covering the first transistor and the first metal line, and a second transistor on the first insulating layer between the first transistor and the first metal line, and including a second active layer, a second gate, and a second gate insulating layer between the second active layer and the second gate.Type: GrantFiled: April 8, 2010Date of Patent: May 13, 2014Assignee: Samsung Electronics Co., Ltd.Inventors: Huaxiang Yin, Takashi Noguchi, Wenxu Xianyu, Kyung-bae Park
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Patent number: 8710592Abstract: An SRAM cell includes a first PMOS pass transistor comprising a first gate electrode disposed on a first PMOS active region, a first NMOS pass transistor comprising a second gate electrode disposed on a first NMOS active region, a first PMOS pull-up transistor and a first NMOS pull-down transistor sharing a third gate electrode disposed on the first PMOS active region and the first NMOS active region and extending therebetween, a second PMOS pass transistor comprising a fourth gate electrode disposed on a second PMOS active region, a second NMOS pass transistor comprising a fifth gate electrode disposed on a second NMOS active region and a second pull-up transistor and a second pull-down transistor sharing a sixth gate electrode disposed on the second PMOS active region and the second NMOS active region and extending therebetween.Type: GrantFiled: March 5, 2012Date of Patent: April 29, 2014Assignee: Samsung Electronics Co., Ltd.Inventors: Sunme Lim, Hanbyung Park, Ho-Kwon Cha
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Patent number: 8703566Abstract: A memory device includes an array of memory cells and peripheral devices. At least some of the individual memory cells include carbonated portions that contain SiC. At least some of the peripheral devices do not include any carbonated portions. A transistor includes a first source/drain, a second source/drain, a channel including a carbonated portion of a semiconductive substrate that contains SiC between the first and second sources/drains and a gate operationally associated with opposing sides of the channel.Type: GrantFiled: May 24, 2013Date of Patent: April 22, 2014Assignee: Micron Technology, Inc.Inventor: Chandra Mouli
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Patent number: 8691633Abstract: A semiconductor device is provided that includes a substrate, a static random access memory (SRAM) unit cell formed in the substrate, a first metal layer formed over the substrate the first metal layer providing local interconnection to the SRAM unit cell, a second metal layer formed over the first metal layer, the second metal layer including: a bit line and a complementary bit line each having a first thickness and a Vcc line disposed between the bit line and the complementary bit line, and a third metal layer formed over the second metal layer, the third metal layer including a word line having a second thickness greater than the first thickness.Type: GrantFiled: February 22, 2013Date of Patent: April 8, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventor: Jhon Jhy Liaw
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Patent number: 8692317Abstract: An SRAM cell using a vertical MISFET is provided, wherein underside source/drain areas of a first access transistor, a first driving transistor and a first load transistor are connected together, and further connected to gates of a second driving transistor and a second load transistor. Underside source/drain areas of a second access transistor, the second driving transistor and the second load transistor are connected together, and further connected to gates of the first driving transistor and the first load transistor. A first arrangement of the first access transistor, the first driving transistor and the first load transistor, and a second arrangement of the second access transistor, the second driving transistor and the second load transistor are symmetric to each other.Type: GrantFiled: April 14, 2009Date of Patent: April 8, 2014Assignee: NEC CorporationInventor: Kiyoshi Takeuchi