Body Region Structure Of Igfet's With Channel Containing Layer (dmosfet Or Igbt) (epo) Patents (Class 257/E29.066)
  • Patent number: 11978793
    Abstract: Provided is a semiconductor device in which a snubber-circuit is incorporated and can realize downsizing of a power conversion circuit into which the semiconductor device is assembled, and is flexibly applicable to various electric equipment. A semiconductor device includes a semiconductor substrate, a source electrode, a drain electrode, a plurality of trenches, a plurality of first electrodes disposed in a plurality of trenches by way of gate insulation films formed on side walls of the plurality of respective trenches, a plurality of second electrodes disposed above the plurality of first electrodes in a state where the second electrodes are spaced apart from the first electrodes, a plurality of first insulation regions, and a plurality of second insulation regions. The trenches, the first electrodes and the second electrodes are formed in stripes as viewed in a plan view. At least one of the plurality of second electrodes is connected to the drain electrode.
    Type: Grant
    Filed: July 8, 2021
    Date of Patent: May 7, 2024
    Assignee: SHINDENGEN ELECTRIC MANUFACTURING CO., LTD.
    Inventor: Kinya Ohtani
  • Patent number: 11973108
    Abstract: A semiconductor device includes: a drift region that is arranged on a main surface of a substrate, and has a higher impurity concentration than the substrate; a first well region that is connected to the drift region; and a second well region that is arranged adjacent to the first well region and faces the drift region. The second well region has a higher impurity concentration than the first well region. A distance between the source region that faces the drift region via the first well region and the drift region is greater than a distance between the second well region and the drift region, in a direction parallel to the main surface of the substrate. A depletion layer extending from the second well region reaches the drift region.
    Type: Grant
    Filed: December 1, 2020
    Date of Patent: April 30, 2024
    Assignees: NISSAN MOTOR CO., LTD., RENAULT S.A.S.
    Inventors: Wei Ni, Tetsuya Hayashi, Keiichiro Numakura, Toshiharu Marui, Ryouta Tanaka, Yuichi Iwasaki
  • Patent number: 11973114
    Abstract: A semiconductor device includes at least a first lateral MOSFET formed on a semiconductor substrate. The first lateral MOSFET has an interface defined by a plurality of trenches along which the current flow can be modulated by a perpendicular electric field. The portion of the interface lies on a plane substantially perpendicular to the plane of the substrate. The interface is configured such that at least a portion of the current flow along the portion of the interface that lies on a plane substantially perpendicular to the plane of the substrate is in a direction substantially parallel to the plane of the substrate.
    Type: Grant
    Filed: October 12, 2021
    Date of Patent: April 30, 2024
    Assignee: Purdue Research Foundation
    Inventor: James A. Cooper
  • Patent number: 11961903
    Abstract: A power semiconductor device includes a semiconductor layer of silicon carbide (SiC), at least one trench that extends in one direction, a gate insulating layer disposed on at least an inner wall of the at least one trench, at least one gate electrode layer disposed on the gate insulating layer, a drift region disposed in the semiconductor layer at least on one side of the at least one gate electrode layer, a well region disposed in the semiconductor layer to be deeper than the at least one gate electrode layer, a source region disposed in the well region, and at least one channel region disposed in the semiconductor layer of one side of the at least one gate electrode layer between the drift region and the source region.
    Type: Grant
    Filed: May 25, 2021
    Date of Patent: April 16, 2024
    Assignee: HYUNDAI MOBIS CO., LTD.
    Inventors: Jeong Mok Ha, Hyuk Woo, Sin A Kim, Tae Youp Kim, Ju Hwan Lee, Min Gi Kang, Tae Yang Kim
  • Patent number: 11949023
    Abstract: A device includes a diode. The anode of the diode includes first, second, and third areas. The first area partially covers the second area and has a first doping level greater than a second doping level of the second area. The second area partially covers the third area and has the second doping level greater than a third doping level of the third area. A first insulating layer partially overlaps the first and second areas.
    Type: Grant
    Filed: December 20, 2021
    Date of Patent: April 2, 2024
    Assignee: STMicroelectronics (Tours) SAS
    Inventors: Arnaud Yvon, Lionel Jaouen
  • Patent number: 11923451
    Abstract: A semiconductor device includes an output-stage element and a detection element, each of the output-stage element and the detection element including: a channel-formation region deposited at an upper part of a drift region; a main electrode region deposited at an upper part of the channel-formation region; and a gate electrode buried via a gate insulating film in one or more first trenches in contact with the main electrode region, the channel-formation region, and the drift region, wherein the first trenches used in common with the detection element and the output-stage element extend in a planar pattern, and a plurality of second trenches extending in parallel to each other in a direction perpendicular to the first trenches interpose the detection element so as to separate the channel-formation region of the output-stage element and the channel-formation region of the detection element from each other.
    Type: Grant
    Filed: May 27, 2021
    Date of Patent: March 5, 2024
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventor: Yoshiaki Toyoda
  • Patent number: 11908912
    Abstract: A semiconductor device includes: a first electrode; a first semiconductor layer; a first insulating film extending downward from an upper surface of the first semiconductor layer, the first insulating film being columnar; a second electrode located in the first insulating film, the second electrode extending in a vertical direction, the second electrode being columnar; a second semiconductor layer partially provided in an upper layer portion of the first semiconductor layer, the second semiconductor layer being next to the first insulating film with the first semiconductor layer interposed; a third semiconductor layer partially provided in an upper layer portion of the second semiconductor layer; and a third electrode located higher than the upper surface of the first semiconductor layer, the third electrode overlapping a portion of the first insulating film, a portion of the first semiconductor layer, and a portion of the second semiconductor layer when viewed from above.
    Type: Grant
    Filed: February 17, 2022
    Date of Patent: February 20, 2024
    Assignees: KABUSHIKI KAISHA TOSHIBA, TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION
    Inventors: Tatsuya Nishiwaki, Tsuyoshi Kachi, Shuhei Tokuyama
  • Patent number: 11901444
    Abstract: Examples of a semiconductor device includes a transistor region formed in a semiconductor substrate having a first conductivity type drift layer, and a diode region formed to be adjacent to the transistor region in the semiconductor substrate, wherein the diode region has a second conductivity type anode layer formed on the drift layer and a first conductivity type cathode layer formed on the lower side of the drift layer, and the cathode layer has an adjacent region contacting the transistor region, the adjacent region having a depth, from a lower surface of the semiconductor substrate, which becomes shallower toward the transistor region and having first conductivity type impurity concentration which decreases toward the transistor region.
    Type: Grant
    Filed: May 3, 2022
    Date of Patent: February 13, 2024
    Assignee: Mitsubishi Electric Corporation
    Inventors: Ryu Kamibaba, Tetsuo Takahashi, Akihiko Furukawa
  • Patent number: 11869962
    Abstract: Examples of a semiconductor device includes a transistor region formed in a semiconductor substrate having a first conductivity type drift layer, and a diode region formed to be adjacent to the transistor region in the semiconductor substrate, wherein the diode region has a second conductivity type anode layer formed on the drift layer and a first conductivity type cathode layer formed on the lower side of the drift layer, and the cathode layer has an adjacent region contacting the transistor region, the adjacent region having a depth, from a lower surface of the semiconductor substrate, which becomes shallower toward the transistor region and having first conductivity type impurity concentration which decreases toward the transistor region.
    Type: Grant
    Filed: May 3, 2022
    Date of Patent: January 9, 2024
    Assignee: Mitsubishi Electric Corporation
    Inventors: Ryu Kamibaba, Tetsuo Takahashi, Akihiko Furukawa
  • Patent number: 11869985
    Abstract: A diode is proposed. The diode includes a semiconductor body having a first main surface and a second main surface opposite to the first main surface. The diode further includes an anode region and a cathode region. The anode region is arranged between the first main surface and the cathode region. An anode pad area is electrically connected to the anode region. The diode further includes a plurality of trenches extending into the semiconductor body from the first main surface. A first group of the plurality of trenches includes a first trench electrode. A second group of the plurality of trenches includes a second trench electrode. The first trench electrode is electrically coupled to the anode pad area via an anode wiring line and the second trench electrode.
    Type: Grant
    Filed: July 30, 2021
    Date of Patent: January 9, 2024
    Assignee: Infineon Technologies Austria AG
    Inventors: Christian Philipp Sandow, Matteo Dainese, Viktoryia Lapidus
  • Patent number: 11855157
    Abstract: A semiconductor device includes a semiconductor part, a first electrode at a back surface of the semiconductor part; a second electrode at a front surface of the semiconductor part; third and fourth electrodes provided between the semiconductor part and the second electrode. The third and fourth electrodes are arranged in a first direction along the front surface of the semiconductor part. The third electrode is electrically insulated from the semiconductor part by a first insulating film. The third electrode is electrically insulated from the second electrode by a second insulating film. The fourth electrode is electrically insulated from the semiconductor part by a third insulating film. The fourth electrode is electrically isolated from the third electrode. the third and fourth electrodes extend into the semiconductor part. The fourth electrode includes a material having a larger thermal conductivity than a thermal conductivity of a material of the third electrode.
    Type: Grant
    Filed: December 14, 2022
    Date of Patent: December 26, 2023
    Assignees: KABUSHIKI KAISHA TOSHIBA, TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION
    Inventors: Takeshi Suwa, Tomoko Matsudai, Yoko Iwakaji
  • Patent number: 11830943
    Abstract: A Field Effect Transistor (FET) may include a semiconductor substrate having a first conductivity type, a semiconductor layer of the first conductivity type formed over the substrate, and a pair of doped bodies of a second conductivity type opposite the first conductivity type formed in the semiconductor layer. A trench filled with a trench dielectric is formed within a region between the doped bodies. The FET may be a Vertical Metal-Oxide-Semiconductor FET (VMOSFET) including a gate dielectric disposed over the region between the doped bodies and the trench, and a gate electrode disposed over the gate dielectric, wherein the trench operates to prevent breakdown of the gate dielectric, or the FET may be a Junction FET. The FET may be designed to operate at radio frequencies or under heavy-ion bombardment. The semiconductor substrate and the semiconductor layer may comprise a wide band-gap semiconductor such as silicon carbide.
    Type: Grant
    Filed: July 26, 2021
    Date of Patent: November 28, 2023
    Assignee: ANALOG POWER CONVERSION LLC
    Inventors: Dumitru Gheorge Sdrulla, Amaury Gendron-Hansen
  • Patent number: 11823905
    Abstract: Self-aligned FET devices and associated fabrication methods are disclosed herein. A disclosed process for forming a FET includes forming a first mask, implanting a deep well region in a drift region using the first mask, forming a spacer in contact with the first mask, and implanting a shallow well region in the drift region using the first mask and the spacer. A disclosed FET includes a drift region, a shallow well region, a deep well region located between the shallow well region and the drift region, and a junction field effect region: in contact with the shallow well region, the drift region, and the deep well region; and having a junction field effect doping concentration of the first conductivity type. The FETs can include a hybrid channel formed by a portion of the junction field effect region, as influenced by the deep well region, and the shallow well region.
    Type: Grant
    Filed: February 28, 2022
    Date of Patent: November 21, 2023
    Assignee: SCDevice LLC
    Inventors: Sudarsan Uppili, David Lee Snyder, Scott Joseph Alberhasky
  • Patent number: 11824113
    Abstract: A semiconductor device has an impurity region covering a bottom of a gate trench and a column region. A bottom of the column region is deeper than a bottom of the gate trench. The impurity region is arranged between the gate trench and the column region. This structure can improve the characteristics of the semiconductor device.
    Type: Grant
    Filed: September 1, 2022
    Date of Patent: November 21, 2023
    Assignee: RENESAS ELECTRONICS CORPORATION
    Inventors: Machiko Sato, Akihiro Shimomura
  • Patent number: 11798938
    Abstract: A SiC integrated circuit structure which allows multiple power MOSFETs or LDMOSs to exist in the same piece of semiconductor substrate and still function as individual devices which form the components of a given circuit architecture, for example, and not by limitation, in a half-bridge module. In one example, a deep isolation trench is etched into the silicon carbide substrate surrounding each individual LDMOS device. The trench is filled with an insulating material. The depth of the trench may be deeper than the thickness of an epitaxial layer to ensure electrical isolation between the individual epitaxial layer regions housing the individual LDMOSs. The width of the trench may be selected to withstand the potential difference between the bias levels of the body regions of neighboring power LDMOS devices.
    Type: Grant
    Filed: November 23, 2021
    Date of Patent: October 24, 2023
    Assignee: CoolCAD Electronics, LLC
    Inventors: Neil Goldsman, Akin Akturk, Zeynep Dilli, Mitchell Adrian Gross, Usama Khalid, Christopher James Darmody
  • Patent number: 11776997
    Abstract: In a general aspect, a semiconductor device can include a semiconductor region of a first conductivity type and a well region of a second conductivity type. The well region can be disposed in the semiconductor region. An interface between the well region and the semiconductor region can define a diode junction at a depth below an upper surface of the semiconductor region. The semiconductor device can further include at least one dielectric region disposed in the semiconductor region. A dielectric region of the at least one dielectric region can have an upper surface that is disposed in the well region at a depth in the semiconductor region that is above the depth of the diode junction; and a lower surface that is disposed in the semiconductor region at a depth in the semiconductor region that is the same depth as the diode junction or below the depth of the diode junction.
    Type: Grant
    Filed: August 27, 2021
    Date of Patent: October 3, 2023
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Shengling Deng, Dean E. Probst, Zia Hossain
  • Patent number: 11777020
    Abstract: Provided is a semiconductor device including: a semiconductor substrate; an active portion provided on the semiconductor substrate; a first well region and a second well region arranged sandwiching the active portion in a top view, provided on the semiconductor substrate; an emitter electrode arranged above the active portion; and a pad arranged above the first well region, away from the emitter electrode, wherein the emitter electrode is provided above the second well region. The provided semiconductor device further includes a peripheral well region arranged enclosing the active portion in a top view, wherein the first well region and the second well region may protrude to the center side of the active portion rather than the peripheral well region.
    Type: Grant
    Filed: January 26, 2021
    Date of Patent: October 3, 2023
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventors: Atsushi Shoji, Soichi Yoshida
  • Patent number: 11776953
    Abstract: Provided is an n-channel BiMOS semiconductor device having a trench gate structure, the n-channel BiMOS semiconductor device including: an n+ drain layer; a parallel pn layer including n? drift and p pillar layers joined alternately; a composite layer including a p base layer and an n+ source layer, the n+ drain layer, the parallel pn layer, and the composite layer being provided in order; a high-resistance layer provided between a portion of the p base layer above the p pillar layer and the n+ source layer; and a high-resistance layer provided between the p pillar layer and the p base layer, the p pillar layer having an impurity concentration lower than that of the n? drift layer.
    Type: Grant
    Filed: February 14, 2022
    Date of Patent: October 3, 2023
    Assignee: HONDA MOTOR CO., LTD.
    Inventors: Yasuhiro Maeda, Yoshinari Tsukada, Shinya Maita, Genki Nakamura, Yuki Negoro
  • Patent number: 11769828
    Abstract: A power semiconductor device comprises a semiconductor layer structure comprising a drift region that comprises a wide band-gap semiconductor material and has a first conductivity type, a first gate structure and an adjacent second gate structure in an upper portion of the semiconductor layer structure, a deep shielding region in the drift region, and a connection region protruding upwardly from the deep shielding region and separating the first gate structure and the second gate structure from each other. The deep shielding region extends from underneath the first gate structure to underneath the second gate structure, and the deep shielding region has a second conductivity type that is different from the first conductivity type.
    Type: Grant
    Filed: February 10, 2021
    Date of Patent: September 26, 2023
    Assignee: Wolfspeed, Inc.
    Inventors: Thomas E. Harrington, III, Sei-Hyung Ryu
  • Patent number: 11769665
    Abstract: Exemplary semiconductor processing methods may include forming a p-type silicon-containing material on a substrate including a first n-type silicon-containing material defining one or more features. The p-type silicon-containing material may extend along at least a portion of the one or more features defined in the first n-type silicon-containing material. The methods may include removing a portion of the p-type silicon-containing material. The portion of the p-type silicon-containing material may be removed from a bottom of the one or more features. The methods may include providing a silicon-containing material. The methods may include depositing a second n-type silicon-containing material on the substrate. The second n-type silicon-containing material may fill the one or more features formed in the first n-type silicon-containing material and may separate regions of remaining p-type silicon-containing material.
    Type: Grant
    Filed: January 11, 2022
    Date of Patent: September 26, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Amirhasan Nourbakhsh, Raman Gaire, Tyler Sherwood, Lan Yu, Roger Quon, Siddarth Krishnan
  • Patent number: 11756792
    Abstract: Transistors having a control gate isolated from a first region of semiconductor material having a first conductivity type, first and second source/drain regions having a second conductivity type different than the first conductivity type and formed in the first region of semiconductor material, and a second region of semiconductor material having the first conductivity type in contact with the first region of semiconductor material, wherein the first region of semiconductor material is between the control gate and the second region of semiconductor material, wherein the first region of semiconductor material has a first width, and wherein the second region of semiconductor material has a second width, less than or equal to the first width, as well as memory containing such transistors.
    Type: Grant
    Filed: June 12, 2020
    Date of Patent: September 12, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Michael Violette, Vladimir Mikhalev
  • Patent number: 11749675
    Abstract: Between a source electrode (25) of a main device (24) and a current sensing electrode (22) of a current detection device (21), a resistor for detecting current is connected. Dielectric withstand voltage of gate insulator (36) is larger than a product of the resistor and maximal current flowing through the current detection device (21) with reverse bias. A diffusion length of a p-body region (32) of the main device (24) is shorter than that of a p-body (31) of the current detection device (21). A curvature radius at an end portion of the p-body region (32) of the main device (24) is smaller than that of the p-body (31) of the current detection device (21). As a result, at the inverse bias, electric field at the end portion of the p-body region (32) of the main device (24) becomes stronger than that of the p-body region (31) of the current detection device (21). Consequently, avalanche breakdown tends to occur earlier in the main device 24 than the current detection device (21).
    Type: Grant
    Filed: January 7, 2021
    Date of Patent: September 5, 2023
    Assignees: FUJI ELECTRIC CO., LTD., DENSO CORPORATION
    Inventors: Seiji Momota, Hitoshi Abe, Takashi Shiigi, Takeshi Fujii, Koh Yoshikawa, Tetsutaro Imagawa, Masaki Koyama, Makoto Asai
  • Patent number: 11742206
    Abstract: A laterally diffused metal oxide semiconductor device can include: a well region having a second doping type; a reduced surface field effect layer of a first doping type formed by an implantation process in a predetermined region of the well region, where a length of the reduced surface field effect layer is less than a length of the well region; a body region of the first doping type extending from a top surface of the well region into the well region; a drain portion of the second doping type extending from the top surface of the well region into the well region; and an insulating structure located between the body region and the drain portion, at least a portion of the insulating structure is located on the top surface of the well region.
    Type: Grant
    Filed: March 5, 2021
    Date of Patent: August 29, 2023
    Assignee: Silergy Semiconductor Technology (Hangzhou) LTD
    Inventors: Budong You, Hui Yu, Meng Wang, Yicheng Du, Chuan Peng, Xunyi Song
  • Patent number: 11728422
    Abstract: A power MOSFET device includes an active area accommodating a first body region and a second body region having a first and, respectively, a second conductivity value. The second value is higher than the first value. A first channel region is disposed in the first body region between a first source region and a drain region, and the first channel region has and having a first channel length. A second channel region is disposed in the second body region between a second source region and the drain region, and the second channel region has and having a second channel length smaller than the first channel length. A first device portion, having a first threshold voltage, includes the first channel region, and a second device portion, having a second threshold voltage higher than the first threshold voltage, includes the second channel region.
    Type: Grant
    Filed: November 12, 2020
    Date of Patent: August 15, 2023
    Assignee: STMicroelectronics S.r.l.
    Inventors: Angelo Magri', Stefania Fortuna
  • Patent number: 11699764
    Abstract: A semiconductor device includes: a semiconductor layer of a first conductivity-type; a well region of a second conductivity-type provided at an upper part of the semiconductor layer; a base region of the second conductivity-type provided at an upper part of the well region; a carrier supply region of the first conductivity-type provided at an upper part of the base region; a drift region of the first conductivity-type provided separately from the base region; a carrier reception region of the first conductivity-type provided at an upper part of the drift region; a gate electrode provided on a top surface of the well region interposed between the base region and the drift region via a gate insulating film; and a punch-through prevention region of the second conductivity-type provided at the upper part of the well region and having an impurity concentration different from the impurity concentration of the base region.
    Type: Grant
    Filed: January 31, 2022
    Date of Patent: July 11, 2023
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventors: Kazumi Takagiwa, Hitoshi Sumida
  • Patent number: 11688765
    Abstract: According to one embodiment, a semiconductor device includes first and second electrodes, first to fifth semiconductor regions, and a gate electrode. The first semiconductor region is provided on the first electrode, and electrically connected to the first electrode. The second semiconductor region is provided on a part of the first semiconductor region. The third semiconductor region is provided on another part of the first semiconductor region. The third semiconductor region includes first and second regions. The fourth semiconductor region is provided on the second semiconductor region. The fifth semiconductor region is provided on a part of the fourth semiconductor region. The gate electrode faces the fourth semiconductor region with a gate insulating layer interposed between the gate electrode and the fourth semiconductor region. The second electrode is provided on the fourth and fifth semiconductor regions. The second electrode is electrically connected to the fourth and fifth semiconductor regions.
    Type: Grant
    Filed: March 11, 2021
    Date of Patent: June 27, 2023
    Assignees: KABUSHIKI KAISHA TOSHIBA, TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION
    Inventor: Yuhki Fujino
  • Patent number: 11670634
    Abstract: There are provided a transistor including a first semiconductor layer of a first conductivity type, a second semiconductor layer thereabove, a first impurity region of a second conductivity type provided in an upper layer part of the second semiconductor layer, a second impurity region of a first conductivity type provided in an upper layer part of the first impurity region, a gate electrode facing the first impurity region and the second semiconductor layer with a gate insulating film interposed in between, and first and second main electrodes; a parasitic transistor with the second impurity region as a collector, the first and the second semiconductor layers as an emitter, and the first impurity region as a base; a parasitic diode with the first impurity region as an anode, and the first and the second semiconductor layers as a cathode; and a pn junction diode with the first impurity region as an anode, and the second impurity region as a cathode.
    Type: Grant
    Filed: January 7, 2020
    Date of Patent: June 6, 2023
    Assignee: Mitsubishi Electric Corporation
    Inventor: Tomohide Terashima
  • Patent number: 11652137
    Abstract: A semiconductor device includes transistor cells formed along a first surface at a front side of a semiconductor body and having body regions of a first conductivity type, a drift region of a second conductivity type that is opposite from the first conductivity type and is disposed between the body regions and a second surface of the semiconductor body that is opposite from the first surface, and an emitter layer of the second conductivity type that is disposed between the drift region and a second surface of the semiconductor body, the emitter layer having a higher dopant concentration than the drift region, a metal drain electrode directly adjoining the emitter layer. The metal drain electrode comprises spikes extending into the emitter layer.
    Type: Grant
    Filed: August 20, 2020
    Date of Patent: May 16, 2023
    Assignee: Infineon Technologies Austria AG
    Inventors: Enrique Vecino Vazquez, Franz Hirler, Manfred Pippan, Daniel Pobig, Patrick Schindler
  • Patent number: 11652167
    Abstract: A power semiconductor device may include a junction termination region, bounded by a side edge of a semiconductor substrate. The junction termination region may include a substrate layer of a first dopant type, a well layer of a second dopant type, a conductive trench assembly having a first set of conductive trenches, in the junction termination region, and extending from above the substrate layer through the well layer; and a metal layer, electrically connecting the conductive trench assembly to the well layer. The metal layer may include a set of inner metal contacts, electrically connecting a set of inner regions of the well layer to a first set of trenches of the conductive trench assembly; and an outer metal contact, electrically connecting an outer region of the well layer to a second set of conductive trenches of the conductive trench assembly, wherein the outer region borders the side edge.
    Type: Grant
    Filed: February 24, 2022
    Date of Patent: May 16, 2023
    Assignee: Littelfuse, Inc.
    Inventor: Kyoung Wook Seok
  • Patent number: 11652138
    Abstract: A method for producing a semiconductor device includes forming transistor cells in a semiconductor body, each cell including a drift region separated from a source region by a body region, a gate electrode dielectrically insulated from the body region, and a compensation region of a doping type complementary to the doping type of the drift region and extending from a respective body region into the drift region in a vertical direction. Forming the drift and compensation regions includes performing a first implantation step, thereby implanting first and second type dopant atoms into the semiconductor body, wherein an implantation dose of at least one of the first type dopant atoms and the second type dopant atoms for each of at least two sections of the semiconductor body differs from the implantation dose of the corresponding type of dopant atoms of at least one other section of the at least two sections.
    Type: Grant
    Filed: May 26, 2021
    Date of Patent: May 16, 2023
    Assignee: Infineon Technologies Austria AG
    Inventors: Ingo Muri, Felix Schubert, Daniel Tutuc, Hans Weber
  • Patent number: 11610779
    Abstract: An ion implanted region is formed by implanting Mg ions into a predetermined region of the surface of the first p-type layer. Subsequently, a second n-type layer is formed on the first p-type layer and the ion implanted region. A trench is formed by dry etching a predetermined region of the surface of the second n-type layer until reaching the first n-type layer. Next, heat treatment is performed to diffuse Mg. Thus, a p-type impurity region is formed in a region with a predetermined depth from the surface of the first n-type layer below the ion implanted region. Since the trench is formed before the heat treatment, Mg is not diffused laterally beyond the trench. Therefore, the width of the p-type impurity region is almost the same as the width of the first p-type layer divided by the trench.
    Type: Grant
    Filed: January 26, 2021
    Date of Patent: March 21, 2023
    Assignee: TOYODA GOSEI CO., LTD.
    Inventors: Kota Yasunishi, Yukihisa Ueno
  • Patent number: 11610991
    Abstract: A power semiconductor device comprises a semiconductor layer structure having a wide band-gap drift region having a first conductivity type, a gate trench having first and second opposed sidewalls that extend in a first direction in an upper portion of the semiconductor layer structure, first and second well regions having a second conductivity type in the upper portion of the semiconductor layer structure, the first well region comprising part of the first sidewall and the second well region comprising part of the second sidewall. A deep shielding region having the second conductivity type is provided underneath the gate trench, and a plurality of deep shielding connection patterns that have the second conductivity type are provided that electrically connect the deep shielding region to the first and second well regions. The deep shielding connection patterns are spaced apart from each other along the first direction.
    Type: Grant
    Filed: October 28, 2020
    Date of Patent: March 21, 2023
    Assignee: Wolfspeed, Inc.
    Inventors: Naeem Islam, Woongsun Kim, Daniel J. Lichtenwalner, Sei-Hyung Ryu
  • Patent number: 11600693
    Abstract: In one embodiment, a power semiconductor device may include a semiconductor substrate, wherein the semiconductor substrate comprises an active device region and a junction termination region. The power semiconductor device may also include a polysilicon layer, disposed over the semiconductor substrate. The polysilicon layer may include an active device portion, disposed over the active device region, and defining at least one semiconductor device; and a junction termination portion, disposed over the junction termination region, the junction termination portion defining a ring structure.
    Type: Grant
    Filed: February 11, 2021
    Date of Patent: March 7, 2023
    Assignee: Littelfuse, Inc.
    Inventor: Kyoung Wook Seok
  • Patent number: 11600723
    Abstract: In an embodiment, a transistor device includes a semiconductor substrate having a main surface, a cell field including a plurality of transistor cells, and an edge termination region laterally surrounding the cell field. The cell field includes a gate trench in the main surface of the semiconductor substrate, a gate dielectric lining the gate trench, a metal gate electrode arranged in the gate trench on the gate dielectric, and an electrically insulating cap arranged on the metal gate electrode and within the gate trench.
    Type: Grant
    Filed: February 1, 2021
    Date of Patent: March 7, 2023
    Assignee: Infineon Technologies Austria AG
    Inventors: Ingmar Neumann, Michael Hutzler, David Laforet, Roland Moennich, Ralf Siemieniec
  • Patent number: 11569345
    Abstract: A method for manufacturing and a Super Junction MOSFET are disclosed. The Super Junction MOSFET comprises a lightly doped epitaxial layer of a first conductivity type on a heavily doped substrate of the first conductivity type. A deep trench is formed in the epitaxial layer. The deep trench having an insulating layer with a thickness gradient formed on surfaces of the deep trench. One or more regions of the epitaxial layer proximate to sidewalls of the deep trench is doped of a second conductivity type, wherein the second conductivity type is opposite the first conductivity type. Finally, MOSFET device structures are formed in the epitaxial layer.
    Type: Grant
    Filed: November 23, 2020
    Date of Patent: January 31, 2023
    Assignee: Alpha and Omega Semiconductor (Cayman) Ltd.
    Inventors: Wenjun Li, Lingbing Chen, Lingpeng Guan, Jian Wang
  • Patent number: 11557588
    Abstract: A multi-transistor device includes first and second lateral double-diffused metal-oxide-semiconductor field effect (LDMOS) transistors sharing a first p-type reduced surface field (RESURF) layer and a first drain n+ region. In certain embodiments, the first LDMOS transistor includes a first drift region, the second LDMOS transistor includes a second drift region, and the first and second drift regions are at least partially separated by the first p-type RESURF layer in a thickness direction.
    Type: Grant
    Filed: March 29, 2021
    Date of Patent: January 17, 2023
    Assignee: MAXIM INTEGRATED PRODUCTS, INC.
    Inventors: Vipindas Pala, Vijay Parthasarathy, Badredin Fatemizadeh, Marco A. Zuniga, John Xia
  • Patent number: 11557647
    Abstract: A semiconductor device includes: a drift region of a first conductive type including a contact section and extension sections extending along the main surface of a substrate; column regions of a second conductive type which alternate with the extension sections in a perpendicular direction to the extension direction of the extension sections and each includes an end connecting to the contact section; a well region of a second conductive type which connects to the other end of each column region and tips of the extension sections; and electric field relaxing electrodes which are provided above at least some of residual pn junctions with an insulating film interposed therebetween. Herein, the residual pn junctions are pn junctions other than voltage holding pn junctions formed in interfaces between the extension sections and the column regions.
    Type: Grant
    Filed: April 19, 2018
    Date of Patent: January 17, 2023
    Assignee: NISSAN MOTOR CO., LTD.
    Inventors: Toshiharu Marui, Tetsuya Hayashi, Keiichiro Numakura, Wei Ni, Ryota Tanaka, Keisuke Takemoto
  • Patent number: 11552017
    Abstract: In a general aspect, a transistor can include a trench disposed in a semiconductor region and a gate electrode disposed in an upper portion of the trench. The gate electrode can include a first and second gate electrode segments. The transistor can also include a shield electrode having a first shield electrode portion disposed in a lower portion of the trench, and a second shield electrode portion orthogonally extending from the first shield electrode portion in the lower portion of the trench to the upper portion of the trench. The first shield electrode portion can be disposed below the first and second gate electrode segments, and the second shield electrode portion can being disposed between the first and second gate electrode segments. The transistor can also include a patterned buried conductor layer. The first and second gate electrode segments can be electrically coupled via the patterned buried conductor layer.
    Type: Grant
    Filed: January 25, 2021
    Date of Patent: January 10, 2023
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Prasad Venkatraman, Gary Horst Loechelt
  • Patent number: 11532608
    Abstract: A semiconductor device including a protected element, a contact region, wiring, and a channel stopper region. The protected element is configured including a p-n junction diode between an anode region and a cathode region, and is arranged in an active layer of a substrate. The periphery of the diode is surrounded by an element isolation region. The contact region is arranged at a portion on a main face of the anode region, and is set with a same conductivity type as the anode region, and set with a higher impurity concentration than the anode region. The wiring is arranged over the diode. One end portion of the wiring is connected to the contact region and another end portion extends over a passivation film. The channel stopper region is arranged at a portion on the main face of the anode region under the wiring between the contact region and the element isolation region, and is set with an opposite conductivity type to the contact region.
    Type: Grant
    Filed: July 8, 2019
    Date of Patent: December 20, 2022
    Assignee: KABUSHIKI KAISHA TOKAI-RIKA-DENKI-SEISAKUSHO
    Inventor: Yoshikazu Kataoka
  • Patent number: 11527639
    Abstract: A semiconductor device includes a semiconductor substrate, an emitter region, a base region and multiple accumulation areas, and an upper accumulation area in the multiple accumulation areas is in direct contact with a gate trench section and a dummy trench section, in an arrangement direction that is orthogonal to a depth direction and an extending direction, a lower accumulation area furthest from the upper surface of the semiconductor substrate in the multiple accumulation areas has: a gate vicinity area closer to the gate trench section than the dummy trench section in the arrangement direction; and a dummy vicinity area closer to the dummy trench section than the gate trench section in the arrangement direction, and having a doping concentration of the first conductivity type lower than that of the gate vicinity area.
    Type: Grant
    Filed: November 1, 2020
    Date of Patent: December 13, 2022
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventor: Tatsuya Naito
  • Patent number: 11508845
    Abstract: A semiconductor structure is disclosed. The semiconductor structure includes: a substrate of a first conductivity; a first region of the first conductivity formed in the substrate; a second region of the first conductivity formed in the first region, wherein the second region has a higher doping density than the first region; a source region of a second conductivity formed in the second region; a drain region of the second conductivity formed in the substrate; a pickup region of the first conductivity formed in the second region and adjacent to the source region; and a resist protective oxide (RPO) layer formed on a top surface of the second region. An associated fabricating method is also disclosed.
    Type: Grant
    Filed: September 22, 2020
    Date of Patent: November 22, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chen-Liang Chu, Ta-Yuan Kung, Ker-Hsiao Huo, Yi-Huan Chen
  • Patent number: 11489046
    Abstract: A semiconductor device according to an embodiment includes, a silicon carbide layer having first and second planes; a first electrode on the first plane; a second electrode on the second plane; a first conductivity type first silicon carbide region; second and third silicon carbide regions of a second conductivity type between the first silicon carbide region and the first plane; a first conductivity type fifth silicon carbide region between the first and the second silicon carbide region with higher impurity concentration than the first silicon carbide region; a first conductivity type sixth silicon carbide region between the first and the third silicon carbide region with higher impurity concentration than the first silicon carbide region; a first conductivity type seventh silicon carbide region between the fifth and the sixth silicon carbide region with lower impurity concentration than the fifth and the sixth silicon carbide region; and a gate electrode.
    Type: Grant
    Filed: February 12, 2019
    Date of Patent: November 1, 2022
    Assignees: KABUSHIKI KAISHA TOSHIBA, TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION
    Inventors: Teruyuki Ohashi, Hiroshi Kono, Masaru Furukawa
  • Patent number: 10326009
    Abstract: A power semiconductor transistor includes a trench extending into a semiconductor body along a vertical direction and having first and second trench sidewalls and a trench bottom, an electrode in the trench electrically insulated from the semiconductor body, drift and source regions of a first conductivity type, a semiconductor channel region of a second conductivity type laterally adjacent the first trench sidewall and separating the source and drift regions, and a guidance zone. The guidance zone includes a bar section of the second conductivity type extending along the second trench sidewall or along a sidewall of another trench in the vertical direction to a depth in the semiconductor body deeper than the trench bottom, and a plateau section of the second conductivity type adjoining the bar section and extending under the trench bottom towards the semiconductor channel region. The plateau section has at least one opening below the channel region.
    Type: Grant
    Filed: December 26, 2017
    Date of Patent: June 18, 2019
    Assignee: Infineon Technologies AG
    Inventors: Anton Mauder, Franz-Josef Niedernostheide, Christian Philipp Sandow
  • Patent number: 9012954
    Abstract: An Adjustable Field Effect Rectifier uses aspects of MOSFET structure together with an adjustment pocket or region to result in a device that functions reliably and efficiently at high voltages without significant negative resistance, while also permitting fast recovery and operation at high frequency without large electromagnetic interference.
    Type: Grant
    Filed: February 16, 2012
    Date of Patent: April 21, 2015
    Assignee: STMicroelectronics International B.V.
    Inventors: Alexei Ankoudinov, Vladimir Rodov
  • Patent number: 9006839
    Abstract: In a semiconductor substrate of a semiconductor device, a drift layer, a body layer, an emitter layer, and a trench gate electrode are formed. When the semiconductor substrate is viewed in a plane manner, the semiconductor substrate is divided into a first region covered with a heat dissipation member, and a second region not covered with the heat dissipation member. A density of trench gate electrodes in the first region is equal to a density of trench gate electrodes in the second region. A value obtained by dividing an effective carrier amount of channel parts formed in the first region by an area of the first region is larger than a value obtained by dividing an effective carrier amount of channel parts formed in the second region by an area of the second region.
    Type: Grant
    Filed: April 25, 2014
    Date of Patent: April 14, 2015
    Assignee: Toyota Jidosha Kabushiki Kaisha
    Inventor: Tadashi Misumi
  • Patent number: 9000479
    Abstract: According to one embodiment, a semiconductor device includes a base layer, a second conductivity type semiconductor layer, a first insulating film, and a first electrode. The first insulating film is provided on an inner wall of a plurality of first trenches extending from a surface of the second conductivity type semiconductor layer toward the base layer side, but not reaching the base layer. The first electrode is provided in the first trench via the first insulating film, and provided in contact with a surface of the second conductivity type semiconductor layer. The second conductivity type semiconductor layer includes a first second conductivity type region, and a second second conductivity type region. The first second conductivity type region is provided between the first trenches. The second second conductivity type region is provided between the first second conductivity type region and the base layer, and between a bottom part of the first trench and the base layer.
    Type: Grant
    Filed: March 12, 2014
    Date of Patent: April 7, 2015
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Mitsuhiko Kitagawa
  • Patent number: 9000478
    Abstract: A semiconductor apparatus includes a substrate having a device region and a peripheral region located around the device region. A first semiconductor region is formed within the device region, is of a first conductivity type, and is exposed at an upper surface of the substrate. Second-fourth semiconductor regions are formed within the peripheral region. The second semiconductor region is of the first conductivity type, has a lower concentration of the first conductivity type of impurities, is exposed at the upper surface, and is consecutive with the first semiconductor region directly or indirectly. The third semiconductor region is of a second conductivity type, is in contact with the second semiconductor region from an underside, and is an epitaxial layer. The fourth semiconductor region is of the second conductivity type, has a lower concentration of the second conductivity type of impurities, and is in contact with the third semiconductor region from an underside.
    Type: Grant
    Filed: May 24, 2012
    Date of Patent: April 7, 2015
    Assignee: Toyota Jidosha Kabushiki Kaisha
    Inventor: Masaru Senoo
  • Patent number: 8994106
    Abstract: A transistor structure includes a p-type substrate, an n-well implanted in the substrate, a p-doped p-body implanted in the n-well, first and second transistors, an input line, and an output line. The first transistor includes a first gate, a first source, and a first drain, and the second transistor includes a second gate, a second source, and a second drain. The first source includes a first p+ region and a first n+ region, and the first drain includes a second n+ region. The second source includes a third n+ region and a second p+ region, and the second drain includes a third p+ region. The input line connects the first gate and the second gate, and the output line connects the second n+ region and the third p+ region.
    Type: Grant
    Filed: February 7, 2014
    Date of Patent: March 31, 2015
    Assignee: Volterra Semiconductor LLC
    Inventors: Budong You, Marco A. Zuniga
  • Patent number: 8994113
    Abstract: A semiconductor device formed in a semiconductor substrate includes an isolation trench in the semiconductor substrate to laterally insulate adjacent components of the semiconductor device. A lateral isolation layer is disposed in the isolation trench. The semiconductor device further includes a source region and a drain region, and a body region and a drift region disposed between the source region and the drain region. The semiconductor device additionally includes a gate electrode adjacent to at least a portion of the body region and a field plate adjacent to at least a portion of the drift region. A field dielectric layer is disposed between the drift region and the field plate. A top surface of the field dielectric layer is disposed at a greater height measured from a first main surface of the semiconductor substrate than a top surface of the lateral isolation layer.
    Type: Grant
    Filed: April 17, 2013
    Date of Patent: March 31, 2015
    Assignee: Infineon Technologies Dresden GmbH
    Inventors: Marc Strasser, Karl-Heinz Gebhardt, Andreas Meiser, Till Schloesser
  • Patent number: 8981477
    Abstract: A laterally-diffused metal oxide semiconductor (LDMOS) device and method of manufacturing the same are provided. The LDMOS device can include a drift region, a source region and a drain region spaced a predetermined interval apart from each other in the drift region, a field insulating layer formed in the drift region between the source region and the drain region, and a first P-TOP region formed under the field insulating layer. The LDMOS device can further include a gate polysilicon covering a portion of the field insulating layer, a gate electrode formed on the gate polysilicon, and a contact line penetrating the gate electrode, the gate polysilicon, and the field insulating layer.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: March 17, 2015
    Assignee: Dongbu Hitek Co., Ltd.
    Inventor: Nam Chil Moon