Having Emitter-base Junction And Base-collector Junction On Different Surfaces (e.g., Mesa Planar Transistor) (epo) Patents (Class 257/E29.185)
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Patent number: 9012279Abstract: A SiGe HBT is disclosed, which includes: a silicon substrate; shallow trench field oxides formed in the silicon substrate; a pseudo buried layer formed at bottom of each shallow trench field oxide; a collector region formed beneath the surface of the silicon substrate, the collector region being sandwiched between the shallow trench field oxides and between the pseudo buried layers; a polysilicon gate formed above each shallow trench field oxide having a thickness of greater than 150 nm; a base region on the polysilicon gates and the collector region; emitter region isolation oxides on the base region; and an emitter region on the emitter region isolation oxides and a part of the base region. The polysilicon gate is formed by gate polysilicon process of a MOSFET in a CMOS process. A method of manufacturing the SiGe HBT is also disclosed.Type: GrantFiled: September 13, 2012Date of Patent: April 21, 2015Assignee: Shanghai Hua Hong NEC Electronics Co., Ltd.Inventors: Donghua Liu, Wenting Duan, Wensheng Qian, Jun Hu, Jing Shi
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Patent number: 8853827Abstract: In at least one aspect, an apparatus can include a silicon carbide material, a base contact disposed on a first portion of the silicon carbide material, and an emitter contact disposed on a second portion of the silicon carbide material. The apparatus can also include a dielectric layer disposed on the silicon carbide material and disposed between the base contact and the emitter contact, and a surface electrode disposed on the dielectric layer and separate from the base contact and the emitter contact.Type: GrantFiled: January 11, 2013Date of Patent: October 7, 2014Assignee: Fairchild Semiconductor CorporationInventor: Martin Domeij
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Patent number: 8829609Abstract: An insulated gate semiconductor device, comprising: a semiconductor body having a front side and a back side opposite to one another; a drift region, which extends in the semiconductor body and has a first type of conductivity and a first doping value; a body region having a second type of conductivity, which extends in the drift region facing the front side of the semiconductor body; a source region, which extends in the body region and has the first type of conductivity; and a buried region having the second type of conductivity, which extends in the drift region at a distance from the body region and at least partially aligned to the body region in a direction orthogonal to the front side and to the back side.Type: GrantFiled: July 26, 2012Date of Patent: September 9, 2014Assignee: STMicroelectronics S.r.l.Inventors: Donato Corona, Giovanni Samma Trice, Sebastiano Amara, Salvatore Pisano, Antonio Giuseppe Grimaldi
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Patent number: 8685805Abstract: Provided is a semiconductor device. The semiconductor device includes a semiconductor substrate, a first isolation dielectric pattern on the semiconductor substrate, and an active pattern on the first isolation dielectric pattern. A semiconductor pattern is interposed between the semiconductor substrate and the first isolation dielectric pattern, and a second isolation dielectric pattern is interposed between the semiconductor substrate and the semiconductor pattern. The semiconductor substrate and the semiconductor pattern are electrically connected by a connection pattern.Type: GrantFiled: August 11, 2011Date of Patent: April 1, 2014Assignee: Samsung Electronics Co., Ltd.Inventor: Chang-Woo Oh
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Patent number: 8598678Abstract: A parasitic vertical PNP bipolar transistor in BiCMOS process comprises a collector, a base and an emitter. The collector is formed by active region with p-type ion implanting layer (P type well in NMOS). It connects a P-type conductive region, which formed in the bottom region of shallow trench isolation (STI). The collector terminal connection is through the P-type buried layer and the adjacent active region. The base is formed by N type ion implanting layer above the collector which shares a N-type lightly doped drain (NLDD) implanting of NMOS. Its connection is through the N-type poly on the base region. The emitter is formed by the P-type epitaxy layer on the base region with heavy p-type doped, and connected by the extrinsic base region of NPN bipolar transistor device. This invention also includes the fabrication method of this parasitic vertical PNP bipolar transistor in BiCMOS process.Type: GrantFiled: December 8, 2010Date of Patent: December 3, 2013Assignee: Shanghai Hua Hong Nec Electronics Company, LimitedInventors: Wensheng Qian, Jun Hu, Donghua Liu
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Patent number: 8519443Abstract: The invention concerns a heterojunction bipolar transistor comprising a support, and epitaxially grown from said support, at least: one collecting, respectively emitting, layer; at least one base layer; and at least one emitting, respectively collecting, layer. The collecting, respectively emitting, layer comprises: at least one first undercoat contacted with said base layer, substantially of similar composition as said emitting, respectively collecting, layer; and at least one second undercoat on the side opposite said base layer relative to said first undercoat.Type: GrantFiled: July 18, 2006Date of Patent: August 27, 2013Assignees: Centre National de la Recherche Scientifique-CNRS, S.O.I. Tec Silicon on Insulator TechnologiesInventors: Jean-Luc Pelouard, Melania Lijadi, Christophe Dupuis, Fabrice Pardo, Philippe Bove
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Patent number: 8395237Abstract: A bipolar transistor includes: a substrate; a collector and a base layer with a p-conductive-type, an emitter layer with an n-conductive-type. The collector layer is formed above the substrate and includes a first nitride semiconductor. The base layer with the p-conductive-type is formed on the collector layer and includes a second nit ride semiconductor. The emitter layer with the n-conductive-type is formed on the base layer and includes a third nitride semiconductor. The collector layer, the base layer and the emitter layer are formed so that crystal growing directions with respect to a surface of the substrate are in parallel to a [0001] direction of the substrate. The first nitride semiconductor includes: InycAlxcGa1-xc-ycN (0?xc?1, 0?yc?1, 0<xc+yc?1). In the first nitride semiconductor, a length of an a-axis on a surface side is longer than a length of an a-axis on a substrate side.Type: GrantFiled: October 16, 2009Date of Patent: March 12, 2013Assignee: NEC CorporationInventors: Yuji Ando, Hironobu Miyamoto, Tatsuo Nakayama, Yasuhiro Okamoto, Takashi Inoue, Kazuki Ota
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Patent number: 8357985Abstract: A bipolar transistor comprising an emitter region, a base region and a collector region, and a guard region spaced from and surrounding the base. The guard region can be formed in the same steps that form the base, and can serve to spread out the depletion layer in operation.Type: GrantFiled: January 13, 2012Date of Patent: January 22, 2013Assignee: Analog Devices, Inc.Inventors: William Allan Lane, Andrew David Bain, Derek Frederick Bowers, Paul Malachy Daly, Anne Maria Deignan, Michael Thomas Dunbar, Patrick Martin McGuinness, Bernard Patrick Stenson
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Patent number: 8350352Abstract: A bipolar transistor comprising an emitter region, a base region and a collector region, and a guard region spaced from and surrounding the base. The guard region can be formed in the same steps that form the base, and can serve to spread out the depletion layer in operation.Type: GrantFiled: November 2, 2009Date of Patent: January 8, 2013Assignee: Analog Devices, Inc.Inventors: William Allan Lane, Andrew David Bain, Derek Frederick Bowers, Paul Malachy Daly, Anne Maria Deignan, Michael Thomas Dunbar, Patrick Martin McGuinness, Bernard Patrick Stenson
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Publication number: 20130001647Abstract: In an embodiment, a bipolar transistor structure is formed on a silicon-on-insulator (SOI) structure that includes a semiconductor substrate, a buried oxide layer formed on the semiconductor substrate and a top silicon layer formed on the buried oxide layer.Type: ApplicationFiled: June 28, 2011Publication date: January 3, 2013Inventor: Steven J. Adler
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Patent number: 8148737Abstract: Disclosed are a light emitting device, a light emitting device package and a lighting system. The light emitting device of the embodiment includes a light emitting structure including a first conductive semiconductor layer, an active layer over the first conductive semiconductor layer, and a second conductive semiconductor layer over the active layer; a dielectric layer over a first region of the first conductive semiconductor layer; a second electrode over the dielectric layer; and a first electrode over a second region of the first conductive semiconductor layer.Type: GrantFiled: October 21, 2010Date of Patent: April 3, 2012Assignee: LG Innotek Co., Ltd.Inventor: Sung Min Hwang
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Patent number: 8120136Abstract: A bipolar transistor comprising an emitter region, a base region and a collector region, and a guard region spaced from and surrounding the base. The guard region can be formed in the same steps that form the base, and can serve to spread out the depletion layer in operation.Type: GrantFiled: November 2, 2009Date of Patent: February 21, 2012Assignee: Analog Devices, Inc.Inventors: William Allan Lane, Andrew David Bain, Derek Frederick Bowers, Paul Malachy Daly, Anne Maria Deignan, Michael Thomas Dunbar, Patrick Martin McGuiness, Bernard Patrick Stenson
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Patent number: 8115256Abstract: A semiconductor device includes an inverter having an NMOSFET and a PMOSFET having sources, drains and gate electrodes respectively, the drains being connected to each other and the gate electrodes being connected to each other, and a pnp bipolar transistor including a collector (C), a base (B) and an emitter (E), the base (B) receiving an output of the inverter.Type: GrantFiled: August 31, 2007Date of Patent: February 14, 2012Assignee: Sanyo Electric Co., Ltd.Inventors: Haruki Yoneda, Hideaki Fujiwara
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Publication number: 20110278570Abstract: Bipolar transistor structures, methods of designing and fabricating bipolar transistors, methods of designing circuits having bipolar transistors. The method of designing the bipolar transistor includes: selecting an initial design of a bipolar transistor; scaling the initial design of the bipolar transistor to generate a scaled design of the bipolar transistor; determining if stress compensation of the scaled design of the bipolar transistor is required based on dimensions of an emitter of the bipolar transistor after the scaling; and if stress compensation of the scaled design of the bipolar transistor is required then adjusting a layout of a trench isolation layout level of the scaled design relative to a layout of an emitter layout level of the scaled design to generate a stress compensated scaled design of the bipolar transistor.Type: ApplicationFiled: August 1, 2011Publication date: November 17, 2011Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Alvin Jose Joseph, Ramana Murty Malladi, James Albert Slinkman
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Patent number: 7989844Abstract: The invention relates to a semiconductor device with a substrate (11) and a semiconductor body (12) with a heterojunction bipolar, in particular npn, transistor with an emitter region (1), a base region (2) and a collector region (3), which are provided with, respectively, a first, a second and a third connection conductor (4, 5, 6), and wherein the bandgap of the base region (2) is smaller than that of the collector region (3) or of the emitter region (1), for example by the use of a silicon-germanium mixed crystal instead of pure silicon in the base region (2). Such a device is characterized by a very high speed, but its transistor shows a relatively low BVeeo. In a device (10) according to the invention the doping flux of the emitter region (1) is locally reduced by a further semiconductor region (20) of the second conductivity type which is embedded in the emitter region (1).Type: GrantFiled: February 12, 2004Date of Patent: August 2, 2011Assignee: NXP B.V.Inventors: Rob Van Dalen, Prabhat Agarwal, Jan Willem Slotboom, Gerrit Elbert Johannes Koops
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Patent number: 7936034Abstract: A MESA-type photonic detection device, including at least one first junction, which itself includes a first receiving layer and sides formed or etched in the receiving layer. These sides at least partially include a layer with a doping opposite the doping of the first receiving layer.Type: GrantFiled: April 4, 2005Date of Patent: May 3, 2011Assignee: Commissariat a l'Energie AtomiqueInventor: Johan Rothman
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Patent number: 7898024Abstract: In a MIS-type semiconductor device having a trench gate structure, a withstand voltage is ensured without changing the thickness of a drift layer and on-resistance can be reduced without applying a high gate drive voltage. The lower half of a trench extending through a p-base region into an n-drift region is filled with a high-permittivity dielectric having a relative permittivity that is higher than that of a silicon oxide film, preferably a silicon nitride film, and an insulated gate structure including a gate insulator and a gate electrode is fabricated on the high-permittivity dielectric. The depth d2 of the deepest portion of the high-permittivity dielectric is designed to be deeper than the depth d1 of a depletion layer in the semiconductor region away from the high-permittivity dielectric.Type: GrantFiled: January 31, 2008Date of Patent: March 1, 2011Assignee: Fuji Electric Systems Co., Ltd.Inventors: Akio Sugi, Tatsuji Nagaoka, Hong-fei Lu
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Patent number: 7868424Abstract: The invention relates to a semiconductor device (10) with a substrate (11) and a semiconductor body (12) comprising a vertical bipolar transistor with an emitter region, a base region and a collector region (1, 2, 3) of, respectively, a first conductivity type, a second conductivity type opposite to the first conductivity type and the first conductivity type, wherein the collector region (3) comprises a first sub-region (3A) bordering the base region (2) and a second sub-region (3B) bordering the first sub-region (3A) which has a lower doping concentration than the second sub-region (3B), and the transistor is provided with a gate electrode (5) which laterally borders the first sub-region (3A) and by means of which the first sub-region (3A) may be depleted.Type: GrantFiled: July 7, 2005Date of Patent: January 11, 2011Assignee: NXP B.V.Inventors: Godefridus Adrianus Maria Hurkx, Prabhat Agarwal, Erwin Hijzen, Raymond Josephus Engelbart Hueting
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Patent number: 7838377Abstract: A bipolar junction transistor includes a collector having a first conductivity type, a drift layer having the first conductivity type on the collector, a base layer on the drift layer and having a second conductivity type opposite the first conductivity type, a lightly doped buffer layer having the first conductivity type on the base layer and forming a p-n junction with the base layer, and an emitter mesa having the first conductivity type on the buffer layer and having a sidewall. The buffer layer includes a mesa step adjacent to and spaced laterally apart from the sidewall of the emitter mesa, and a first thickness of the buffer layer beneath the emitter mesa is greater than a second thickness of the buffer layer outside the mesa step.Type: GrantFiled: September 9, 2008Date of Patent: November 23, 2010Assignee: Cree, Inc.Inventors: Qingchun Zhang, Anant K. Agarwal
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Patent number: 7821037Abstract: A heterojunction bipolar transistor includes a first conductivity type subcollector layer, a first collector layer containing a first conductivity type impurity, a third collector layer containing a higher concentration of the first conductivity type impurity than the first collector layer, a second collector layer containing a lower concentration of the first conductivity type impurity than the first collector layer, a second conductivity type base layer, a first conductivity type emitter layer containing a semiconductor with a wider bandgap than the base layer, and a first conductivity type emitter cap layer.Type: GrantFiled: November 16, 2007Date of Patent: October 26, 2010Assignee: NEC Electronics CorporationInventors: Takaki Niwa, Naoto Kurosawa
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Patent number: 7800093Abstract: An integrated circuit including a memory cell includes a vertical bipolar select device including a base and an emitter. The memory cell includes a resistive memory element coupled to the emitter and a buried metallized word line contacting the base.Type: GrantFiled: February 1, 2007Date of Patent: September 21, 2010Assignee: Qimonda North America Corp.Inventors: Thomas Happ, Jan Boris Philipp
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Patent number: 7645689Abstract: A gallium nitride-based light emitting device, and a method for manufacturing the same are disclosed. The light emitting device comprises an n-type GaN-based clad layer, an active layer, a p-type GaN-based clad layer and a p-side electrode sequentially stacked on a substrate. The device further comprises an n-side electrode formed on one region of the n-type GaN-based clad layer, and two or more MIM type tunnel junctions formed on the other regions of the n-type GaN-based clad layer. Each of the MIM type tunnel junctions comprises a lower metal layer formed on the GaN-based clad layer so as to contact the n-type GaN-based clad layer, an insulating film formed on the lower metal layer, and an upper metal layer formed on the insulating film. The device is protected from reverse ESD voltage, so that tolerance to reverse ESD voltage can be enhanced, thereby improving reliability of the device.Type: GrantFiled: June 22, 2007Date of Patent: January 12, 2010Assignee: Samsung Electro-Mechanics Co., Ltd.Inventors: Jun Ho Seo, Suk Kil Yoon, Seung Wan Chae
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Patent number: 7592648Abstract: An integrated circuit arrangement and fabrication method is provided. The integrated circuit arrangement contains an NPN transistor and a PNP transistor. The PNP transistor contains an emitter connection region and a cutout. The cutout delimits the width of the emitter connection region. The electrically conductive material of the connection region laterally overlaps the cutout.Type: GrantFiled: December 6, 2005Date of Patent: September 22, 2009Assignee: Infineon Technologies AGInventors: Thomas Böttner, Stefan Drexl, Thomas Huttner, Martin Seck
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Patent number: 7554174Abstract: Disclosed are a bipolar transistor comprising an emitter terminal and a base terminal having substantially equal heights, and a method of fabricating the same. The bipolar transistor comprises a silicon-germanium layer acting as a base and formed on a semiconductor layer acting as a collector. The bipolar transistor further comprises an insulating layer having contact windows for an emitter terminal and a collector terminal. The emitter and collector terminals are formed by forming a polysilicon layer filling the contact windows and performing a planarization process on the polysilicon layer. An ion implantation process is performed to form a polysilicon emitter terminal and a polysilicon base terminal.Type: GrantFiled: January 24, 2006Date of Patent: June 30, 2009Assignee: Samsung Electronics Co., Ltd.Inventors: Young-Dae Seo, Bong-Gil Yang
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Publication number: 20080258211Abstract: In a MIS-type semiconductor device having a trench gate structure, a withstand voltage is ensured without changing the thickness of a drift layer and on-resistance can be reduced without applying a high gate drive voltage. The lower half of a trench extending through a p-base region into an n-drift region is filled with a high-permittivity dielectric having a relative permittivity that is higher than that of a silicon oxide film, preferably a silicon nitride film, and an insulated gate structure including a gate insulator and a gate electrode is fabricated on the high-permittivity dielectric. The depth d2 of the deepest portion of the high-permittivity dielectric is designed to be deeper than the depth d1 of a depletion layer in the semiconductor region away from the high-permittivity dielectric.Type: ApplicationFiled: January 31, 2008Publication date: October 23, 2008Applicant: FUJI ELECTRIC HOLDINGS CO., LTD.Inventors: Akio SUGI, Tatsuji NAGAOKA, Hong-fei LU
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Publication number: 20080217742Abstract: Bipolar transistor device structures that improve bipolar device reliability with little or no negative impact on device performance. In one embodiment, the bipolar device has a collector of first conductivity type material formed in a substrate, a base of a second conductivity type material including an extrinsic base layer and an intrinsic base layer, a raised emitter of a first conductivity type semiconductor material formed on the intrinsic base layer, and, a dielectric material layer separating the intrinsic base region and the raised emitter region, and, a thin “shunt” layer of dopant of second conductivity type material added to the region below the emitter dielectric layer. In a second embodiment, a selectively implanted collector (pedestal implant) is added to the vertical bipolar transistor device to enable a reduction in overall subcollector doping level to improve reliability without sacrificing device performance.Type: ApplicationFiled: March 9, 2007Publication date: September 11, 2008Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Jeffrey B. Johnson, Edward J. Nowak, Andreas D. Stricker, Benjamin T. Voegeli
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Publication number: 20080061362Abstract: Junction field-effect transistors with vertical channels and self-aligned regrown gates and methods of making these devices are described. The methods use techniques to selectively grow and/or selectively remove semiconductor material to form a p-n junction gate along the sides of the channel and on the bottom of trenches separating source fingers. Methods of making bipolar junction transistors with self-aligned regrown base contact regions and methods of making these devices are also described. The semiconductor devices can be made in silicon carbide.Type: ApplicationFiled: November 5, 2007Publication date: March 13, 2008Applicant: SEMISOUTH LABORATORIES, INC.Inventors: Joseph Merrett, Igor Sankin
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Patent number: 7329941Abstract: The mobility of charge carriers in a bipolar (BJT) device is increased by creating compressive strain in the device to increase mobility of electrons in the device, and creating tensile strain in the device to increase mobility of holes in the device. The compressive and tensile strain are created by applying a stress film adjacent an emitter structure of the device and atop a base film of the device. In this manner, the compressive and tensile strain are located in close proximity to an intrinsic portion of the device. A suitable material for the stress film is nitride. The emitter structure may be “T-shaped”, having a lateral portion atop an upright portion, a bottom of the upright portion forms a contact to the base film, and the lateral portion overhangs the base film.Type: GrantFiled: July 20, 2004Date of Patent: February 12, 2008Assignee: International Business Machines CorporationInventors: Dureseti Chidambarrao, Gregory G. Freeman, Marwan H. Khater
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Patent number: 7323390Abstract: The semiconductor device according to the invention includes a substrate, a field insulating region which delimits an active region of the semiconductor substrate, a collector, at least one collector contact region associated with the collector, and a base with an associated base connection region. The collector and the collector contact region are formed in the same active region. In addition the base connection region extends partially over the active region and is separated from the surface of the active region by an insulator layer.Type: GrantFiled: December 2, 2002Date of Patent: January 29, 2008Assignee: IHP GmbH - Innovations for High Performance Microelectronics/Institut fur innovative MikroelektronikInventors: Bernd Heinemann, Dieter Knoll, Karl-Ernst Ehwald, Holger Rücker
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Patent number: 7297993Abstract: A bipolar transistor having a base electrode of an air bridge structure is simplified in structure and enhanced in the degree of freedom of a contact position of a base wiring line with the base electrode. The bipolar transistor has a semiconductor mesa portion having a base layer formed on an upper face thereof, and a base electrode contacts with the base layer and has a floating extension which extends from the semiconductor mesa portion to a space on the outer side with respect to the semiconductor mesa portion. The floating extension is used as a contact portion for a base wiring line to the base electrode.Type: GrantFiled: July 12, 2005Date of Patent: November 20, 2007Assignee: Sony CorporationInventor: Junichiro Kobayashi
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Publication number: 20070131971Abstract: Provided are a hetero-junction bipolar transistor (HBT) that can increase data processing speed and a method of manufacturing the hetero-junction bipolar transistor.Type: ApplicationFiled: December 6, 2006Publication date: June 14, 2007Inventors: Yong Kim, Eun Nam, Ho Kim, Sang Lee, Dong Jun, Hong Lee, Seon Hong, Dong Kim, Jong Lim, Myoung Oh
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Patent number: 7084044Abstract: The present invention provides an optoelectronic device and a method of manufacture thereof. In one embodiment, the method of manufacturing the optoelectronic device may include creating a multilayered optical substrate and then forming a self aligned dual mask over the multilayered optical substrate. The method may further include etching the multilayered optical substrate through the self aligned dual mask to form a mesa structure.Type: GrantFiled: June 7, 2004Date of Patent: August 1, 2006Assignee: TriQuint Technology Holding Co.Inventors: Charles W. Lentz, Bettina A. Nechay, Abdallah Ougazzaden, Padman Parayanthal, George J. Przybylek