Gated Diode Structure (epo) Patents (Class 257/E29.195)
  • Patent number: 11804543
    Abstract: Structures for a diode and methods of fabricating a structure for a diode. The structure includes a layer comprised of a semiconductor material. The layer includes a first section, a second section, and a third section laterally positioned between the first section and the second section. The structure includes a first terminal having a raised semiconductor layer on the first section of the layer, a second terminal including a portion on the second section of the layer, and a gate on the third section of the layer.
    Type: Grant
    Filed: December 2, 2021
    Date of Patent: October 31, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Vibhor Jain, Judson R. Holt
  • Patent number: 11563119
    Abstract: Disclosed are etchstop regions in fins of semiconductor devices, and related methods. A semiconductor device includes a buried region, a fin on the buried region, and a gate formed at least partially around the fin. At least a portion of the fin that borders the buried region includes an etchstop material. The etchstop material includes a doped semiconductor material that has a slower etch rate than that of an intrinsic form of the semiconductor material. A method of manufacturing a semiconductor device includes forming a gate on a fin, implanting part of the fin with dopants configured to decrease an etch rate of the part of the fin, removing at least part of the fin, and forming an epitaxial semiconductor material on a remaining proximal portion of the fin.
    Type: Grant
    Filed: December 27, 2017
    Date of Patent: January 24, 2023
    Assignee: Intel Corporation
    Inventors: Cheng-Ying Huang, Willy Rachmady, Gilbert Dewey, Erica J. Thompson, Aaron D. Lilak, Jack T. Kavalieros
  • Patent number: 9954119
    Abstract: The present disclosure relates to a Zener diode including a Zener diode junction formed in a semiconductor substrate along a plane parallel to the surface of the substrate, and positioned between a an anode region having a first conductivity type and a cathode region having a second conductivity type, the cathode region extending from the surface of the substrate. A first conducting region is configured to generate a first electric field perpendicular to the plane of the Zener diode junction upon application of a first voltage to the first conducting region, and a second conducting region is configured to generate a second electric field along the plane of the Zener diode junction upon application of a second voltage to the second conducting region.
    Type: Grant
    Filed: January 10, 2017
    Date of Patent: April 24, 2018
    Assignee: STMICROELECTRONICS (ROUSSET) SAS
    Inventors: Roberto Simola, Pascal Fornara
  • Patent number: 9041065
    Abstract: Planar Schottky diodes for which the semiconductor material includes a heterojunction which induces a 2DEG in at least one of the semiconductor layers. A metal anode contact is on top of the upper semiconductor layer and forms a Schottky contact with that layer. A metal cathode contact is connected to the 2DEG, forming an ohmic contact with the layer containing the 2DEG.
    Type: Grant
    Filed: August 22, 2013
    Date of Patent: May 26, 2015
    Assignee: Transphorm Inc.
    Inventors: Yifeng Wu, Umesh Mishra, Primit Parikh, Rongming Chu, Ilan Ben-Yaacov, Likun Shen
  • Patent number: 9024356
    Abstract: A semiconductor device includes a first compound semiconductor material and a second compound semiconductor material on the first compound semiconductor material. The second compound semiconductor material comprises a different material than the first compound semiconductor material such that the first compound semiconductor material has a two-dimensional electron gas (2DEG). The semiconductor device further includes a buried field plate disposed in the first compound semiconductor material and electrically connected to a terminal of the semiconductor device. The 2DEG is interposed between the buried field plate and the second compound semiconductor material.
    Type: Grant
    Filed: December 20, 2011
    Date of Patent: May 5, 2015
    Assignee: Infineon Technologies Austria AG
    Inventors: Gilberto Curatola, Oliver Häberlen
  • Patent number: 8952418
    Abstract: Some embodiments include gated bipolar junction transistors. The transistors may include a base region between a collector region and an emitter region; with a B-C junction being at an interface of the base region and the collector region, and with a B-E junction being at an interface of the base region and the emitter region. The transistors may include material having a bandgap of at least 1.2 eV within one or more of the base, emitter and collector regions. The gated transistors may include a gate along the base region and spaced from the base region by dielectric material, with the gate not overlapping either the B-C junction or the B-E junction. Some embodiments include memory arrays containing gated bipolar junction transistors. Some embodiments include methods of forming gated bipolar junction transistors.
    Type: Grant
    Filed: March 1, 2011
    Date of Patent: February 10, 2015
    Assignee: Micron Technology, Inc.
    Inventors: Rajesh N. Gupta, Farid Nemati, Scott T. Robins
  • Patent number: 8941412
    Abstract: A circuit comprises a control line and a two terminal semiconductor device having a first terminal is coupled to a signal line, and a second terminal coupled to the control line. The semiconductor device has a capacitance when a voltage on the first terminal is above a threshold and has a smaller capacitance when a voltage on the first terminal is below the threshold. A signal is placed on the signal line and a voltage on the control line is modified. When the signal falls below the threshold, the semiconductor device acts as a very small capacitor and the output will be a small value. When the signal is above the threshold, the semiconductor device acts as a large capacitor and the output will be influenced by the signal and the modified voltage on the control line and the signal is amplified.
    Type: Grant
    Filed: September 6, 2012
    Date of Patent: January 27, 2015
    Assignee: International Business Machines Corporation
    Inventors: Wing K. Luk, Robert H. Dennard
  • Patent number: 8779551
    Abstract: A semiconductor structure provided with a plurality of gated-diodes having a silicided anode (p-doped region) and cathode (n-doped region) and a high-K gate stack made of non-silicided gate material, the gated-diodes being adjacent to FETs, each of which having a silicided source, a silicided drain and a silicided HiK gate stack. The semiconductor structure eliminates a cap removal RIE in a gate first High-K metal gate flow from the region of the gated-diode. The lack of silicide and the presence of a nitride barrier on the gate of the diode are preferably made during the gate first process flow. The absence of the cap removal RIE is beneficial in that diffusions of the diode are not subjected to the cap removal RIE, which avoids damage and allows retaining its highly ideal junction characteristics.
    Type: Grant
    Filed: June 6, 2012
    Date of Patent: July 15, 2014
    Assignee: International Business Machines Corporation
    Inventors: Anthony I. Chou, Arvind Kumar, Edward P. Maciejewski, Shreesh Narasimha, Dustin K. Slisher
  • Patent number: 8541818
    Abstract: Planar Schottky diodes for which the semiconductor material includes a heterojunction which induces a 2 DEG in at least one of the semiconductor layers. A metal anode contact is on top of the upper semiconductor layer and forms a Schottky contact with that layer. A metal cathode contact is connected to the 2 DEG, forming an ohmic contact with the layer containing the 2 DEG.
    Type: Grant
    Filed: June 26, 2012
    Date of Patent: September 24, 2013
    Assignee: Transphorm Inc.
    Inventors: Yifeng Wu, Umesh Mishra, Primit Parikh, Ilan Ben-Yaacov
  • Patent number: 8445946
    Abstract: A gated diode memory cell is provided, including one or more transistors, such as field effect transistors (“FETs”), and a gated diode in signal communication with the FETs such that the gate of the gated diode is in signal communication with the source of a first FET, wherein the gate of the gated diode forms one terminal of the storage cell and the source of the gated diode forms another terminal of the storage cell, the drain of the first FET being in signal communication with a bitline (“BL”) and the gate of the first FET being in signal communication with a write wordline (“WLw”), and the source of the gated diode being in signal communication with a read wordline (“WLr”).
    Type: Grant
    Filed: December 11, 2003
    Date of Patent: May 21, 2013
    Assignee: International Business Machines Corporation
    Inventors: Wing K. Luk, Robert H. Dennard
  • Publication number: 20120286325
    Abstract: An apparatus includes an electrostatic discharge (ESD) protection device. In one embodiment, the protection device electrically coupled between a first node and a second node of an internal circuit to be protected from transient electrical events. The protection device includes a bipolar device or a silicon-controlled rectifier (SCR). The bipolar device or SCR can have a modified structure or additional circuitry to have a selected holding voltage and/or trigger voltage to provide protection over the internal circuit. The additional circuitry can include one or more resistors, one or more diodes, and/or a timer circuit to adjust the trigger and/or holding voltages of the bipolar device or SCR to a desired level. The protection device can provide protection over a transient voltage that ranges, for example, from about 100 V to 330V.
    Type: Application
    Filed: May 11, 2011
    Publication date: November 15, 2012
    Applicant: ANALOG DEVICES, INC.
    Inventor: Edward Coyne
  • Patent number: 8242537
    Abstract: An IGBT with a fast reverse recovery time rectifier includes an N-type drift epitaxial layer, a gate, a gate insulating layer, a P-type doped base region, an N-type doped source region, a P-type doped contact region, and a P-type lightly doped region. The P-type doped base region is disposed in the N-type drift epitaxial layer, and the P-type doped contact region is disposed in the N-type drift epitaxial layer. The P-type lightly doped region is disposed between the P-type contact doped region and the N-type drift epitaxial layer, and is in contact with the N-type drift epitaxial layer.
    Type: Grant
    Filed: November 10, 2009
    Date of Patent: August 14, 2012
    Assignee: Anpec Electronics Corporation
    Inventors: Wei-Chieh Lin, Jen-Hao Yeh, Ho-Tai Chen
  • Patent number: 8237198
    Abstract: Planar Schottky diodes for which the semiconductor material includes a heterojunction which induces a 2DEG in at least one of the semiconductor layers. A metal anode contact is on top of the upper semiconductor layer and forms a Schottky contact with that layer. A metal cathode contact is connected to the 2DEG, forming an ohmic contact with the layer containing the 2DEG.
    Type: Grant
    Filed: January 18, 2011
    Date of Patent: August 7, 2012
    Assignee: Transphorm Inc.
    Inventors: Yifeng Wu, Rongming Chu, Primit Parikh, Umesh Mishra, Ilan Ben-Yaacov, Likun Shen
  • Patent number: 8212282
    Abstract: A power supply device is disclosed that is able to satisfy the power requirements of a device in service and has high efficiency. The power supply device includes a first power supply; a voltage step-up unit that steps up an output voltage of the first power supply; a voltage step-down unit that steps down an output voltage of the voltage step-up unit; and a load that is driven to operate by an output voltage of the voltage step-down unit. The voltage step-up unit steps up the output voltage of the first power supply to a lower limit of an operating voltage of the voltage step-down unit.
    Type: Grant
    Filed: September 24, 2010
    Date of Patent: July 3, 2012
    Assignee: Ricoh Company, Ltd.
    Inventors: Masaya Ohtsuka, Yoshinori Ueda
  • Patent number: 8143655
    Abstract: A fabrication process for a trench Schottky diode with differential oxide thickness within the trenches includes forming a first nitride layer on a substrate surface and subsequently forming a plurality of trenches in the substrate including, possibly, a termination trench. Following a sacrificial oxide layer formation and removal, sidewall and bottom surfaces of the trenches are oxidized. A second nitride layer is then applied to the substrate and etched such that the second nitride layer covers the oxide layer on the trench sidewalls but exposes the oxide layer on the trench bottom surfaces. The trench bottom surfaces are then re-oxidized and the remaining second nitride layer then removed from the sidewalls, resulting in an oxide layer of varying thickness being formed on the sidewall and bottom surfaces of each trench. The trenches are then filled with a P type polysilicon, the first nitride layer removed, and a Schottky barrier metal applied to the substrate surface.
    Type: Grant
    Filed: October 11, 2007
    Date of Patent: March 27, 2012
    Assignee: International Rectifier Corporation
    Inventor: Davide Chiola
  • Patent number: 8143680
    Abstract: A gated-diode semiconductor device or similar component and a method of fabricating the device. The device features a gate structure disposed on a substrate over a channel and adjacent a source and a drain. The top of the source or drain region, or both, are formed so as to be at a higher elevation, in whole or in part, than the bottom of the gate structure. This configuration may be achieved by overlaying the gate structure and substrate with a profile layer that guides a subsequent etch process to create a sloped profile. The source and drain, if both are present, may be symmetrical or asymmetrical. This configuration significantly reduces dopant encroachment and, as a consequence, reduces junction leakage.
    Type: Grant
    Filed: May 12, 2010
    Date of Patent: March 27, 2012
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Da-Wen Lin, Ying-Shiou Lin, Shyh-Wei Wang, Li-Ping Huang, Ying-Keung Leung, Carlos H. Diaz
  • Patent number: 8049223
    Abstract: A junction FET having a large gate noise margin is provided. The junction FET comprises an n? layer forming a drift region of the junction FET formed over a main surface of an n+ substrate made of silicon carbide, a p+ layer forming a gate region formed in contact with the n? layer forming the drift region and a gate electrode provided in an upper layer of the n+ substrate. The junction FET further incorporates pn diodes formed over the main surface of the n+ substrate and electrically connecting the p+ layer forming the gate region and the gate electrode.
    Type: Grant
    Filed: May 25, 2008
    Date of Patent: November 1, 2011
    Assignee: Renesas Electronics Corporation
    Inventors: Haruka Shimizu, Hidekatsu Onose
  • Patent number: 7932537
    Abstract: Process variation-tolerant diodes and diode-connected thin film transistors (TFTs), printed or patterned structures (e.g., circuitry) containing such diodes and TFTs, methods of making the same, and applications of the same for identification tags and sensors are disclosed. A patterned structure comprising a complementary pair of diodes or diode-connected TFTs in series can stabilize the threshold voltage (Vt) of a diode manufactured using printing or laser writing techniques. The present invention advantageously utilizes the separation between the Vt of an NMOS TFT (Vtn) and the Vt of a PMOS TFT (Vtp) to establish and/or improve stability of a forward voltage drop across a printed or laser-written diode. Further applications of the present invention relate to reference voltage generators, voltage clamp circuits, methods of controlling voltages on related or differential signal transmission lines, and RFID and EAS tags and sensors.
    Type: Grant
    Filed: April 15, 2009
    Date of Patent: April 26, 2011
    Assignee: Kovio, Inc.
    Inventors: Vivek Subramanian, Patrick Smith
  • Publication number: 20110079819
    Abstract: An IGBT with a fast reverse recovery time rectifier includes an N-type drift epitaxial layer, a gate, a gate insulating layer, a P-type doped base region, an N-type doped source region, a P-type doped contact region, and a P-type lightly doped region. The P-type doped base region is disposed in the N-type drift epitaxial layer, and the P-type doped contact region is disposed in the N-type drift epitaxial layer. The P-type lightly doped region is disposed between the P-type contact doped region and the N-type drift epitaxial layer, and is in contact with the N-type drift epitaxial layer.
    Type: Application
    Filed: November 10, 2009
    Publication date: April 7, 2011
    Inventors: Wei-Chieh Lin, Jen-Hao Yeh, Ho-Tai Chen
  • Patent number: 7898004
    Abstract: Planar Schottky diodes for which the semiconductor material includes a heterojunction which induces a 2DEG in at least one of the semiconductor layers. A metal anode contact is on top of the upper semiconductor layer and forms a Schottky contact with that layer. A metal cathode contact is connected to the 2DEG, forming an ohmic contact with the layer containing the 2DEG.
    Type: Grant
    Filed: December 10, 2008
    Date of Patent: March 1, 2011
    Assignee: Transphorm Inc.
    Inventors: Yifeng Wu, Umesh Mishra, Primit Parikh, Rongming Chu, Ilan Ben-Yaacov, Likun Shen
  • Patent number: 7842967
    Abstract: A power supply device is disclosed that is able to satisfy the power requirements of a device in service and has high efficiency. The power supply device includes a first power supply; a voltage step-up unit that steps up an output voltage of the first power supply; a voltage step-down unit that steps down an output voltage of the voltage step-up unit; and a load that is driven to operate by an output voltage of the voltage step-down unit. The voltage step-up unit steps up the output voltage of the first power supply to a lower limit of an operating voltage of the voltage step-down unit.
    Type: Grant
    Filed: June 8, 2007
    Date of Patent: November 30, 2010
    Assignee: Ricoh Company, Ltd.
    Inventors: Masaya Ohtsuka, Yoshinori Ueda
  • Publication number: 20100237441
    Abstract: A gated-diode semiconductor device or similar component and a method of fabricating the device. The device features a gate structure disposed on a substrate over a channel and adjacent a source and a drain. The top of the source or drain region, or both, are formed so as to be at a higher elevation, in whole or in part, than the bottom of the gate structure. This configuration may be achieved by overlaying the gate structure and substrate with a profile layer that guides a subsequent etch process to create a sloped profile. The source and drain, if both are present, may be symmetrical or asymmetrical. This configuration significantly reduces dopant encroachment and, as a consequence, reduces junction leakage.
    Type: Application
    Filed: May 12, 2010
    Publication date: September 23, 2010
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Da-Wen Lin, Ying-Shiou Lin, Shyh-Wei Wang, Li-Ping Huang, Ying-Keung Leung, Carlis H. Diaz
  • Patent number: 7785973
    Abstract: An electronic device can include a gate electrode having different portions with different conductivity types. In an embodiment, a process of forming the electronic device can include forming a semiconductor layer over a substrate, wherein the semiconductor layer has a particular conductivity type. The process can also include selectively doping a region of the semiconductor layer to form a first doped region having an opposite conductivity type. The process can further include patterning the semiconductor layer to form a gate electrode that includes a first portion and a second portion, wherein the first portion includes a portion of the first doped region, and the second region includes a portion of the semiconductor layer outside of the first doped region. In a particular embodiment, the electronic device can have a gate electrode having edge portions of one conductivity type and a central portion having an opposite conductivity type.
    Type: Grant
    Filed: January 25, 2008
    Date of Patent: August 31, 2010
    Assignee: Spansion LLC
    Inventor: Burchell B. Baptiste
  • Patent number: 7732877
    Abstract: A gated-diode semiconductor device or similar component and a method of fabricating the device. The device features a gate structure disposed on a substrate over a channel and adjacent a source and a drain. The top of the source or drain region, or both, are formed so as to be at a higher elevation, in whole or in part, than the bottom of the gate structure. This configuration may be achieved by overlaying the gate structure and substrate with a profile layer that guides a subsequent etch process to create a sloped profile. The source and drain, if both are present, may be symmetrical or asymmetrical. This configuration significantly reduces dopant encroachment and, as a consequence, reduces junction leakage.
    Type: Grant
    Filed: April 2, 2007
    Date of Patent: June 8, 2010
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Da-Wen Lin, Ying-Shiou Lin, Shyh-Wei Wang, Li-Ping Huang, Ying-Keung Leung, Carlos H. Diaz
  • Patent number: 7700466
    Abstract: In one embodiment, a mandrel and an outer dummy spacer may be employed to form a first conductivity type region. The mandrel is removed to form a recessed region wherein a second conductivity type region is formed. In another embodiment, a mandrel is removed from within shallow trench isolation to form a recessed region, in which an inner dummy spacer is formed. A first conductivity type region and a second conductivity region are formed within the remainder of the recessed region. An anneal is performed so that the first conductivity type region and the second conductivity type region abut each other by diffusion. A gate electrode is formed in self-alignment to the p-n junction between the first and second conductivity regions. The p-n junction controlled by the gate electrode, which may be sublithographic, constitutes an inventive tunneling effect transistor.
    Type: Grant
    Filed: July 26, 2007
    Date of Patent: April 20, 2010
    Assignee: International Business Machines Corporation
    Inventors: Roger A. Booth, Jr., Kangguo Cheng, Jack A. Mandelman
  • Publication number: 20090159925
    Abstract: A main semiconductor region grown on a substrate has formed on its surface a pair of main electrodes spaced from each other, a gate electrode between the main electrodes, and a pair of diode-forming electrodes spaced farther away from the gate electrode than are the main electrodes. Making ohmic contact with the main semiconductor region, the pair of main electrodes serve both as drain or source of a HEMT switch and as cathodes of a pair of Schottky diodes integrated with the HEMT switch. Both gate electrode and diode-forming electrodes are in Schottky contact with the main semiconductor region.
    Type: Application
    Filed: December 16, 2008
    Publication date: June 25, 2009
    Applicant: SANKEN ELECTRIC CO., LTD.
    Inventor: Osamu Machida
  • Patent number: 7528017
    Abstract: Process variation-tolerant diodes and diode-connected thin film transistors (TFTs), printed or patterned structures (e.g., circuitry) containing such diodes and TFTs, methods of making the same, and applications of the same for identification tags and sensors are disclosed. A patterned structure comprising a complementary pair of diodes or diode-connected TFTs in series can stabilize the threshold voltage (Vt) of a diode manufactured using printing or laser writing techniques. The present invention advantageously utilizes the separation between the Vt of an NMOS TFT (Vtn) and the Vt of a PMOS TFT (Vtp) to establish and/or improve stability of a forward voltage drop across a printed or laser-written diode. Further applications of the present invention relate to reference voltage generators, voltage clamp circuits, methods of controlling voltages on related or differential signal transmission lines, and RFID and EAS tags and sensors.
    Type: Grant
    Filed: September 15, 2006
    Date of Patent: May 5, 2009
    Assignee: Kovio, Inc.
    Inventors: Vivek Subramanian, Patrick Smith
  • Patent number: 7439591
    Abstract: Method, apparatus, and article of manufacture for a diode defined by a portion of a gate layer of an integrated circuit. Illustrative, non-limiting embodiments of the invention are provided, including a temperature compensated DRAM, a temperature compensated CPU, a temperature compensated logic circuit and other on-chip temperature sensor applications.
    Type: Grant
    Filed: October 5, 2004
    Date of Patent: October 21, 2008
    Assignee: Infineon Technologies AG
    Inventor: Woo-Tag Kang
  • Publication number: 20080179631
    Abstract: An enhancement mode III-nitride power semiconductor device that includes normally-off channels along the sidewalls of a recess and a process for fabricating the same, the device including a first power electrode, a second power electrode, and a gate disposed between the first power electrode and the second power electrode over at least a sidewall of the recess.
    Type: Application
    Filed: January 26, 2007
    Publication date: July 31, 2008
    Inventor: Daniel M. Kinzer
  • Patent number: 7323402
    Abstract: A fabrication process for a trench Schottky diode with differential oxide thickness within the trenches includes forming a first nitride layer on a substrate surface and subsequently forming a plurality of trenches in the substrate including, possibly, a termination trench. Following a sacrificial oxide layer formation and removal, sidewall and bottom surfaces of the trenches are oxidized. A second nitride layer is then applied to the substrate and etched such that the second nitride layer covers the oxide layer on the trench sidewalls but exposes the oxide layer on the trench bottom surfaces. The trench bottom surfaces are then re-oxidized and the remaining second nitride layer then removed from the sidewalls, resulting in an oxide layer of varying thickness being formed on the sidewall and bottom surfaces of each trench. The trenches are then filled with a P type polysilicon, the first nitride layer removed, and a Schottky barrier metal applied to the substrate surface.
    Type: Grant
    Filed: January 14, 2005
    Date of Patent: January 29, 2008
    Assignee: International Rectifier Corporation
    Inventor: Davide Chiola
  • Patent number: 6967363
    Abstract: Various circuit devices, including diodes, and methods manufacturing therefor are provided. In one aspect, a method manufacturing is provided that includes forming a gate structure on a semiconductor portion of a substrate. The semiconductor portion has a first conductivity type. First and spacer structures are formed on opposite sides of the gate structure. A first impurity region of a second conductivity type is formed proximate the first spacer structure while the semiconductor portion lateral to the second spacer structure is masked. The first impurity region and the semiconductor portion define a junction. A width of the second spacer structure is reduced while the second spacer structure and the first impurity region are masked. A second impurity region of the first conductivity type is formed in the semiconductor portion proximate the second spacer structure. The method provides a diode with reduced series resistance.
    Type: Grant
    Filed: October 1, 2003
    Date of Patent: November 22, 2005
    Assignee: Advanced Micro Devices, Inc.
    Inventor: James F. Buller