Controlled By Field Effect (e.g., Bipolar Static Induction Transistor (bsit)) (epo) Patents (Class 257/E29.194)
  • Patent number: 9024356
    Abstract: A semiconductor device includes a first compound semiconductor material and a second compound semiconductor material on the first compound semiconductor material. The second compound semiconductor material comprises a different material than the first compound semiconductor material such that the first compound semiconductor material has a two-dimensional electron gas (2DEG). The semiconductor device further includes a buried field plate disposed in the first compound semiconductor material and electrically connected to a terminal of the semiconductor device. The 2DEG is interposed between the buried field plate and the second compound semiconductor material.
    Type: Grant
    Filed: December 20, 2011
    Date of Patent: May 5, 2015
    Assignee: Infineon Technologies Austria AG
    Inventors: Gilberto Curatola, Oliver Häberlen
  • Patent number: 8686424
    Abstract: Disclosed is a method of manufacturing a bipolar transistor, comprising providing a substrate (10) comprising a first isolation region (12) separated from a second isolation region by an active region (11) comprising a collector impurity; forming a layer stack over said substrate, said layer stack comprising a base layer (14, 14?), a silicon capping layer (15) over said base layer and a silicon-germanium (SiGe) base contact layer (40) over said silicon capping layer; etching the SiGe base contact layer to form an emitter window (50) over the collector impurity, wherein the silicon emitter cap layer is used as etch stop layer; forming sidewall spacers (22) in the emitter window; and filling the emitter window with an emitter material (24). A bipolar transistor manufactured in accordance with this method and an IC comprising one or more of such bipolar transistors are also disclosed.
    Type: Grant
    Filed: September 14, 2012
    Date of Patent: April 1, 2014
    Assignee: NXP, B.V.
    Inventors: Evelyne Gridelet, Johannes Josephus Theodorus Marinus Donkers, Tony Vanhoucke, Petrus Hubertus Cornelis Magnee, Hans Mertens, Blandine Duriez
  • Patent number: 8513774
    Abstract: An electrostatic discharge (ESD) protected device may include a substrate, an N+ doped buried layer, an N-type well region and a P-type well region. The N+ doped buried layer may be disposed proximate to the substrate. The N-type well region may be disposed proximate to a portion of the N+ doped buried layer to form a collector region. The P-type well region may be disposed proximate to remaining portions of the N+ doped buried layer and having at least a P+ doped plate corresponding to a base region and distributed segments of N+ doped plates corresponding to an emitter region.
    Type: Grant
    Filed: October 6, 2010
    Date of Patent: August 20, 2013
    Assignee: Macronix International Co., Ltd.
    Inventors: Hsin-Liang Chen, Chan Wing Chor
  • Publication number: 20130087799
    Abstract: Disclosed is a method of manufacturing a bipolar transistor, comprising providing a substrate (10) comprising a first isolation region (12) separated from a second isolation region by an active region (11) comprising a collector impurity; forming a layer stack over said substrate, said layer stack comprising a base layer (14, 14?), a silicon capping layer (15) over said base layer and a silicon-germanium (SiGe) base contact layer (40) over said silicon capping layer; etching the SiGe base contact layer to form an emitter window (50) over the collector impurity, wherein the silicon emitter cap layer is used as etch stop layer; forming sidewall spacers (22) in the emitter window; and filling the emitter window with an emitter material (24). A bipolar transistor manufactured in accordance with this method and an IC comprising one or more of such bipolar transistors are also disclosed.
    Type: Application
    Filed: September 14, 2012
    Publication date: April 11, 2013
    Applicant: NXP B.V.
    Inventors: Evelyne GRIDELET, Johannes Josephus Theodorus Marinus DONKERS, Tony VANHOUCKE, Petrus Hubertus Cornelis MAGNEE, Hans MERTENS, Blandine DURIEZ
  • Patent number: 8404508
    Abstract: An enhancement-mode GaN transistor and a method of forming it. The enhancement-mode GaN transistor includes a substrate, transition layers, a buffer layer comprised of a III Nitride material, a barrier layer comprised of a III Nitride material, drain and source contacts, a gate III-V compound containing acceptor type dopant elements, and a gate metal, where the gate III-V compound and the gate metal are formed with a single photo mask process to be self-aligned and the bottom of the gate metal and the top of the gate compound have the same dimension. The enhancement mode GaN transistor may also have a field plate made of Ohmic metal, where a drain Ohmic metal, a source Ohmic metal, and the field plate are formed by a single photo mask process.
    Type: Grant
    Filed: April 8, 2010
    Date of Patent: March 26, 2013
    Assignee: Efficient Power Conversion Corporation
    Inventors: Alexander Lidow, Robert Beach, Alana Nakata, Jianjun Cao, Guang Yuan Zhao
  • Patent number: 8232583
    Abstract: The objective is to develop a device that generates power with high efficiency and utilizes the obtained electrical energy effectively without external combustion energy such as fossil fuels or the like. Electrical energy is obtained by carriers passing through a potential barrier due to a field effect, and thus energy is pre-supplied to the carriers to increase the number of carriers contributing to electrical energy generation, whereby a highly efficient field power generation device can be realized.
    Type: Grant
    Filed: June 16, 2009
    Date of Patent: July 31, 2012
    Inventor: Norio Akamatsu
  • Patent number: 8049223
    Abstract: A junction FET having a large gate noise margin is provided. The junction FET comprises an n? layer forming a drift region of the junction FET formed over a main surface of an n+ substrate made of silicon carbide, a p+ layer forming a gate region formed in contact with the n? layer forming the drift region and a gate electrode provided in an upper layer of the n+ substrate. The junction FET further incorporates pn diodes formed over the main surface of the n+ substrate and electrically connecting the p+ layer forming the gate region and the gate electrode.
    Type: Grant
    Filed: May 25, 2008
    Date of Patent: November 1, 2011
    Assignee: Renesas Electronics Corporation
    Inventors: Haruka Shimizu, Hidekatsu Onose
  • Publication number: 20110233607
    Abstract: According to one embodiment, a semiconductor device includes a first semiconductor layer of a first conductivity type, a first semiconductor region of a second conductivity type, a second semiconductor region of the first conductivity type, a third semiconductor region of the first conductivity type, a fourth semiconductor region of the second conductivity type, and a control electrode. The first semiconductor region is provided selectively on a first major surface of the first semiconductor layer. The second semiconductor region is provided selectively on the first major surface in contact with the first semiconductor region. The third semiconductor region is provided selectively on a surface of the first semiconductor region. The fourth semiconductor region is provided to face a projecting surface between a side surface and a bottom surface of the first semiconductor region with the second semiconductor region interposed.
    Type: Application
    Filed: March 17, 2011
    Publication date: September 29, 2011
    Applicant: Kabushiki Kaisha Toshiba
    Inventors: Satoshi Yanagisawa, Shuji Kamata
  • Patent number: 8017974
    Abstract: A semiconductor device having the present high withstand voltage power device IGBT has at a back surface a p collector layer with boron injected in an amount of approximately 3×1013/cm2 with an energy of approximately 50 KeV to a depth of approximately 0.5 ?m, and an n+ buffer layer with phosphorus injected in an amount of approximately 3×1012/cm2 with an energy of 120 KeV to a depth of approximately 20 ?m. To control lifetime, a semiconductor substrate is exposed to protons at the back surface. Optimally, it is exposed to protons at a dose of approximately 1×1011/cm2 to a depth of approximately 32 ?m as measured from the back surface. Thus snapback phenomenon can be eliminated and an improved low saturation voltage (Vce (sat))-offset voltage (Eoff) tradeoff can be achieved.
    Type: Grant
    Filed: July 17, 2008
    Date of Patent: September 13, 2011
    Assignee: Mitsubishi Electric Corporation
    Inventor: Yoshiaki Hisamoto
  • Patent number: 7964895
    Abstract: A III-nitride heterojunction power semiconductor device having a barrier layer that includes a region of reduced nitrogen content.
    Type: Grant
    Filed: October 4, 2007
    Date of Patent: June 21, 2011
    Assignee: International Rectifier Corporation
    Inventor: Michael A. Briere
  • Patent number: 7851825
    Abstract: Enhancement-mode III-nitride transistors are described that have a large source to drain barrier in the off state, low off state leakage, and low channel resistance in the access regions are described. The devices can include a charge depleting layer under the gate and/or a charge enhancing layer outside of the gate region, that is, in the access region.
    Type: Grant
    Filed: November 26, 2008
    Date of Patent: December 14, 2010
    Assignee: Transphorm Inc.
    Inventors: Chang Soo Suh, Ilan Ben-Yaacov, Robert Coffie, Umesh Mishra
  • Publication number: 20090212393
    Abstract: A method of manufacturing an electronic device including a PNP bipolar transistor comprises forming a collector in a substrate, depositing a base layer and an emitter layer on the substrate, and growing a nitride interface layer on the base layer as a base current modulation means, such that the nitride interface layer is arranged between the base layer and the emitter layer.
    Type: Application
    Filed: February 23, 2009
    Publication date: August 27, 2009
    Applicant: TEXAS INSTRUMENTS DEUTSCHLAND GMBH
    Inventor: Alfred Haeusler
  • Publication number: 20090212291
    Abstract: An embodiment of the present invention is an transparent thin film transistor which has an substantially transparent substrate, a gate line made of a thin film of a substantially transparent conductive material, a substantially transparent gate insulating film, a substantially transparent semiconductor active layer, a source line made of a thin film of a metal material and a drain electrode made of a thin film of a substantially transparent conductive material. In addition, the source line and the drain electrode are formed apart from each other and sandwich the substantially transparent semiconductor active layer. Moreover, at least any one of the thin film of the gate line and the thin film of the source line is stacked with a thin film of a metal material.
    Type: Application
    Filed: February 20, 2009
    Publication date: August 27, 2009
    Applicant: Toppan Printing Co., Ltd.
    Inventor: Noriaki IKEDA
  • Patent number: 7535039
    Abstract: A dual gate power switch comprised of a vertical arrangement of a normally off SIT (static induction transistor) in series with a normally on SIT in a monolithic semiconductor structure. The structure includes a first pillar having at the base thereof laterally extending shoulder portions having sections of a first gate for controlling the normally off SIT. The structure includes a second pillar, of a width greater than the first pillar and which also has laterally extending shoulder portions having sections of a second gate for controlling the normally on SIT. Contacts are provided for SIT operation.
    Type: Grant
    Filed: June 16, 2006
    Date of Patent: May 19, 2009
    Assignee: Northrop Grumman Corp
    Inventors: Eric J. Stewart, Stephen Van Campen, Rowland C. Clarke
  • Publication number: 20090072272
    Abstract: Enhancement mode III-nitride devices are described. The 2DEG is depleted in the gate region so that the device is unable to conduct current when no bias is applied at the gate. Both gallium face and nitride face devices formed as enhancement mode devices.
    Type: Application
    Filed: September 17, 2007
    Publication date: March 19, 2009
    Applicant: Transphorm Inc.
    Inventors: Chang Soo Suh, Umesh Mishra
  • Publication number: 20080286915
    Abstract: A method of fabricating Group III-V semiconductor metal oxide semiconductor (MOS) and III-V MOS devices are described.
    Type: Application
    Filed: May 16, 2007
    Publication date: November 20, 2008
    Inventors: Thomas Edward Dungan, Philip Gene Nikkel
  • Publication number: 20080280426
    Abstract: A method is provided for forming a matching thermal expansion interface between silicon (Si) and gallium nitride (GaN) films. The method provides a (111) Si substrate and forms a first aluminum (Al)-containing film in compression overlying the Si substrate. Nano-column holes are formed in the first Al-containing film, which exposes regions of the underlying Si substrate. A layer of GaN layer is selectively grown from the exposed regions, covering the first Al-containing film. The GaN is grown using a lateral nanoheteroepitaxy overgrowth (LNEO) process. The above-mentioned processes are reiterated, forming a second Al-containing film in compression, forming nano-column holes in the second Al-containing film, and selectively growing a second GaN layer. Film materials such as Al2O3, Si1-xGex, InP, GaP, GaAs, AlN, AlGaN, or GaN, may be initially grown at a low temperature. By increasing the growth temperatures, a compressed layer of epitaxial GaN can be formed on a Si substrate.
    Type: Application
    Filed: May 9, 2007
    Publication date: November 13, 2008
    Inventors: Tingkai Li, Douglas J. Tweet, Jer-Shen Maa, Sheng Teng Hsu
  • Patent number: 7439563
    Abstract: A high-breakdown-voltage semiconductor device comprises a high-resistance semiconductor layer, trenches formed on the surface thereof in a longitudinal plane shape and in parallel, first regions formed on the semiconductor layer to be sandwiched between adjacent ones of the trenches and having an impurity concentration higher than that of the semiconductor layer, a second region having opposite conductivity to the first regions and continuously disposed in a trench sidewall and bottom portion, a sidewall insulating film disposed on the second region of the trench sidewall, a third region disposed on the second region of the trench bottom portion and having the same conductivity as and the higher impurity concentration than the second region, a fourth region disposed on the back surface of the semiconductor layer, a first electrode formed on each first region, a second electrode connected to the third region, and a third electrode formed on the fourth region.
    Type: Grant
    Filed: June 9, 2006
    Date of Patent: October 21, 2008
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Tetsuo Hatakeyama, Takashi Shinohe
  • Publication number: 20080206972
    Abstract: A doped semiconductor junction for use in an electronic device and a method for making such junction is disclosed. The junction includes a first polycrystalline semiconductor layer doped with donors or acceptors over a substrate such that the first doped semiconductor layer has a first polarity, the first layer including fused semiconductor nanoparticles; and a second layer in contact with the first semiconductor layer over a substrate to form the semiconductor junction.
    Type: Application
    Filed: February 26, 2007
    Publication date: August 28, 2008
    Inventor: Keith B. Kahen
  • Publication number: 20080179631
    Abstract: An enhancement mode III-nitride power semiconductor device that includes normally-off channels along the sidewalls of a recess and a process for fabricating the same, the device including a first power electrode, a second power electrode, and a gate disposed between the first power electrode and the second power electrode over at least a sidewall of the recess.
    Type: Application
    Filed: January 26, 2007
    Publication date: July 31, 2008
    Inventor: Daniel M. Kinzer
  • Publication number: 20080116487
    Abstract: Transistors having a high carrier mobility and devices incorporating the same are fabricated by forming a preliminary semiconductor layer in a semiconductor substrate at both sides of a gate pattern. A source/ drain semiconductor layer having a heterojunction with the semiconductor substrate is formed by irradiating a laser beam onto the preliminary semiconductor layer. The source/drain semiconductor layer is formed in a recrystallized single crystal structure.
    Type: Application
    Filed: July 24, 2007
    Publication date: May 22, 2008
    Inventors: Byeong-Chan Lee, Si-Young Choi, Young-Pil Kim, Yong-Hoon Son, In-Soo Jung, Jin-Bum Kim
  • Publication number: 20080116488
    Abstract: An HBT structure and manufacturing method thereof, in which the HBT structure includes an emitter, an intrinsic base, a collector, an insulating sidewall, and a stress-inducting base formed by selective epitaxial growth to locally induce a stress to the HBT structure. Compressive or tensile stress is additionally induced from outside to modify physical and electric properties of a semiconductor layer, thereby improving the performance of the transistor.
    Type: Application
    Filed: February 16, 2007
    Publication date: May 22, 2008
    Inventors: Kyu-Hwan Shim, Sang-Sig Choi, A-Ram Choi
  • Publication number: 20080087916
    Abstract: A low-cost field-effect transistor with a moisture-resistant gate covered by a thick moisture-resistant insulating film which suppresses an increase in gate capacitance, and a method of manufacturing the field-effect transistor. The field-effect transistor, has one of a T-shaped gate electrode and ?-shaped gate electrode, a drain electrode, and a source electrode, the source electrode and the drain electrode being electrically connected through an n-doped semiconductor region. The gate, source, and drain electrodes are located on a semiconductor layer which includes an insulating film having a thickness of 50 nm or less and covering a surface of the gate electrode and a surface of the semiconductor layer. A silicon nitride film, deposited by catalytic CVD, covers the insulating film and includes a void volume located between a portion of the gate electrode corresponding to a canopy of an open umbrella and the semiconductor layer.
    Type: Application
    Filed: March 22, 2007
    Publication date: April 17, 2008
    Applicant: MITSUBISHI ELECTRIC CORPORATION
    Inventors: Hirotaka AMASUGA, Masahiro TOTSUKA
  • Publication number: 20080083935
    Abstract: A bipolar transistor structure includes an intrinsic base layer formed over a collector layer, an emitter formed over the intrinsic base layer, and an extrinsic base layer formed over the intrinsic layer and adjacent the emitter. A ring shaped collector implant structure is formed within an upper portion of the collector layer, wherein the ring shaped collector implant structure is disposed so as to be aligned beneath a perimeter portion of the emitter.
    Type: Application
    Filed: October 11, 2007
    Publication date: April 10, 2008
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventor: Francois Pagette
  • Publication number: 20080067548
    Abstract: A III-nitride power semiconductor device that includes a two dimensional electron gas having a low field region under the gate thereof.
    Type: Application
    Filed: March 19, 2007
    Publication date: March 20, 2008
    Inventor: Thomas Herman
  • Publication number: 20080017889
    Abstract: A wiring structure of a semiconductor device may include an insulation interlayer on a substrate, the insulation interlayer having a linear first trench having a first width and a linear second trench having a second width, the linear second trench being in communication with a lower portion of the linear first trench, the first width being wider than the second width, and a conductive layer pattern in the linear first and second trenches.
    Type: Application
    Filed: May 16, 2007
    Publication date: January 24, 2008
    Inventors: Young-Ho Koh, Byung-Hong Chung, Won-Jin Kim, Hyun Park, Ji-Young Min
  • Publication number: 20070278582
    Abstract: A voltage divider device includes a double gate field effect transistor (FET) having a first gate and a second gate disposed at opposite sides of a body region. An input voltage is coupled between the first and second gates, and an output voltage is taken from at least one of a source of the FET and a drain of the FET, wherein the output voltage represents a divided voltage with respect to the input voltage.
    Type: Application
    Filed: August 20, 2007
    Publication date: December 6, 2007
    Applicant: INTERNATIONAL BUSINESS MACHINE CORPORATION
    Inventors: Kenneth Goodnow, Joseph Iadanza, Edward Nowak, Douglas Stout
  • Publication number: 20070241367
    Abstract: A method for forming and the structure of a strained vertical channel of a field effect transistor, a field effect transistor and CMOS circuitry is described incorporating a drain, body and source region on a sidewall of a vertical single crystal semiconductor structure wherein a hetero-junction is formed between the source and body of the transistor, wherein the source region and channel are independently lattice strained with respect to the body region and wherein the drain region contains a carbon doped region to prevent the diffusion of dopants (boron) into the body. The invention reduces the problem of leakage current from the source region via the hetero-junction and lattice strain while independently permitting lattice strain in the channel region for increased mobility via choice of the semiconductor materials.
    Type: Application
    Filed: April 16, 2007
    Publication date: October 18, 2007
    Inventors: Qiqing Ouyang, Jack Chu