Acceleration Patents (Class 315/111.61)
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Patent number: 7459858Abstract: A Hall thruster with a shared magnetic structure including a plurality of plasma accelerators each including an anode and a discharge zone for providing plasma discharge. An electrical circuit having one or more cathodes connected to the plurality of plasma accelerators emits electrons that are attracted to the anode in each of the plasma accelerators. A shared magnetic circuit structure establishes a transverse magnetic field in each of the plurality of plasma accelerators that creates an impedance to the flow of electrons toward the anode in each of the plurality of plasma accelerators and enables ionization of a gas moving through one or more of the plurality of plasma accelerators. The impedance localizes an axial electric field in the plurality of plasma accelerators for accelerating ionized gas through the one or more of the plurality of plasma accelerators to create thrust.Type: GrantFiled: December 13, 2005Date of Patent: December 2, 2008Assignee: Busek Company, Inc.Inventors: Vladimir J. Hruby, Bruce Pote, Rachel A. Tedrake, Lawrence T. Byrne, James J. Szabo, Jr., Juraj Kolencik
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Patent number: 7436122Abstract: Atoms of a propellant gas are ionized in a helicon plasma source, preferably in an annular area between inner and outer cylinders. The annular ionization area is aligned with an annular acceleration stage similar to the electrical-magnetic acceleration stage of a Hall effect thruster.Type: GrantFiled: May 18, 2006Date of Patent: October 14, 2008Assignee: Aerojet-General CorporationInventors: Brian E. Beal, Roger M. Myers, Kristi H. de Grys, Alfred C. Wilson
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Patent number: 7420182Abstract: This invention features a combined radio frequency (RF) and Hall Effect ion source and plasma accelerator system including a plasma accelerator having an anode and a discharge zone, the plasma accelerator for providing plasma discharge. A gas distributor introduces a gas into the plasma accelerator. A cathode emits electrons attracted to the anode for ionizing the gas and neutralizing ion flux emitted from the plasma accelerator. An electrical circuit coupled between the anode and the cathode having a DC power source provides DC voltage. A magnetic circuit structure including a magnetic field source establishes a transverse magnetic field in the plasma accelerator that creates an impedance to the flow of the electrons toward the anode to enhance ionization of the gas to create plasma and which in combination with the electric circuit establishes an axial electric field in the plasma accelerator.Type: GrantFiled: April 27, 2006Date of Patent: September 2, 2008Assignee: Busek CompanyInventors: Vladimir Hruby, Kurt Hohman, Thomas Brogan
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Publication number: 20080191629Abstract: A focused ion source based on a Hall thruster with closed loop electron drift and a narrow acceleration zone is disclosed. The ion source of the invention has an ion focusing system consisting of two parts. The first part is a ballistic focusing system in which the aperture through which the beam exits the discharge channel is tilted. The second is a magnetic focusing system which focuses the ion beam exiting the discharge channel by canceling a divergent magnetic field present at the aperture through which the beam exits the discharge channel. The ion source of the invention also has an in-line hollow cathode capable of forming a self-sustaining discharge. The invention further reduces substrate contamination, while increasing the processing rate. Further the configuration disclosed allows the ion source to operate at lower operational gas pressures.Type: ApplicationFiled: February 9, 2007Publication date: August 14, 2008Inventors: Michael Gutkin, Alexander Bizyukov, Vladimir Sleptsov, Ivan Bizyukov, Konstantin Sereda
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Patent number: 7408303Abstract: A pulsed plasma accelerator includes two electrodes (1) arranged between dielectric bars (2) made from an ablating material, a discharge channel with an open end part whose walls are defined by the surfaces of electrodes (1) and dielectric bars (2), an energy accumulator (11) and current supplies (14,15) for connecting the electrodes (1) with the energy accumulator (11). The current supplies (14, 15) define in conjunction with the electrodes (1) and the energy accumulator (11) an external electric circuit, with characteristics of the external electric circuit being selected on the condition: 2?C/L, where C (?F) is the electric capacitance of the external electric circuit, and L is the inductance of the external electric circuit, L?100 nH. During operation of the plasma accelerator, quazi-nonperiodic pulse discharges are ignited and maintained in the discharge channel.Type: GrantFiled: September 20, 2004Date of Patent: August 5, 2008Assignee: Gosudarstvennoe Nauchnoe Uchrezhdenic “Gosudarstvenny Nauchno-Issledovatelsky Institut Prikladnoi Mechanik I Elektrodinamiki”Inventors: Nikolay Nikolaevich Antropov, Grigory Alexandrovich Diyakonov, Michail Michailovich Orlov, Garry Alekseevich Popov, Valery Konstantinovich Tyutin, Vladimir Nikolaevich Yakovlev
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Patent number: 7400094Abstract: A device for generating a particle beam includes a particle source, and a structure having a first section and a second section, the first section coupled to the particle source, the first section having a first power input, and the second section having a second power input, wherein the first section is configured to produce a particle beam having a first energy E1, and the second section is configured to increase or decrease the first energy E1 by an amount E2, the absolute value of E2 being less than E1.Type: GrantFiled: August 25, 2005Date of Patent: July 15, 2008Assignee: Varian Medical Systems Technologies, Inc.Inventor: Gard E. Meddaugh
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Publication number: 20080164820Abstract: An ion gun 11 supplies an Ar gas into a main body 111 from a gas inlet 114, causes DC hot cathode discharge between a filament 113 and an anode 112 to generate Ar plasma. Next, a voltage gradient is applied to separated accelerator grids 116a, 116b having a bi-separated configuration in an ion ejecting direction. The each potential of the separated accelerator grids 116a, 116b is independently controlled by independently setting accelerator control switches 121a, 121b on or off to change the potential of that of the separated accelerator grids 116a, 116b which corresponds to an ion beam to be disabled.Type: ApplicationFiled: November 28, 2007Publication date: July 10, 2008Applicant: SHOWA SHINKU CO., LTD.Inventors: Yusuke Osada, Tadahisa Shiono, Yutaka Yabe, Makoto Ito
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Patent number: 7381949Abstract: A system for joining at least two beams of charged particles that includes directing a first beam along a first axis into a field. A second beam is directed along a second axis into the field. The first and second beams are turned, by interaction between the field and the first and second beams, into a third beam directed along a third axis.Type: GrantFiled: June 15, 2006Date of Patent: June 3, 2008Assignee: Coincident Bearns Licensing CorporationInventor: Michael Mauck
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Publication number: 20080116808Abstract: A method to manipulate a fluid flow over a surface is provided. This method may be used to reduce drag, improve the lift to drag (L/D) ratio, attach fluid flow, or reduce flow noise at the surface. This involves flowing a fluid over the surface wherein the fluid contains positively charged ions and electrons. An electric field accelerates ions and electrons in directions parallel to the electric field. A magnetic field at the surface redirects ions and electrons based on their velocity and charge. The magnetic field imparts little force on the relatively heavy and slow moving positive ions but has a significant impact on the relatively fast moving, light weight electrons. This results in a non-zero net change in the total momentum of the positive ions and electrons allowing thrust to be realized. This thrust may be sufficient for vehicle propulsion or manipulation of the fluid flow around the vehicle.Type: ApplicationFiled: November 22, 2006Publication date: May 22, 2008Inventors: Paul D. McClure, Charles J. Chase
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Patent number: 7309961Abstract: A plasma accelerator (300) is disclosed that has three separate sections of coils (301-316) disposed outside the plasma chamber (321). The separate sections of coils include an initial discharge section (309-316), an acceleration section (303-308), and a nozzle section (301-302). Each section of coils is driven by signals of a different frequency to more efficiently discharge and accelerate a plasma in the plasma accelerator (300).Type: GrantFiled: November 16, 2005Date of Patent: December 18, 2007Assignee: Samsung Electronics Co., Ltd.Inventors: Won-taek Park, Vladimir Volynets
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Patent number: 7294969Abstract: Disclosed is a high-frequency discharge plasma generation-based two-stage Hall-effect plasma accelerator, which comprises an annular acceleration channel having a gas inlet port, a high-frequency wave supply section, an anode, a cathode, a neutralizing electron generation portion and a magnetic-field generation element, wherein: gas introduced from the gas inlet port into the annular acceleration channel is ionized by a high-frequency wave supplied from the high-frequency wave supply section, to generate plasma; a positive ion includes in the generated plasma is accelerated by an acceleration voltage applied between the anode and cathode, and ejected outside; and an electron included in the generated plasma is restricted in its movement in the axial direction of the annular acceleration channel by an interaction with a magnetic field.Type: GrantFiled: June 1, 2005Date of Patent: November 13, 2007Assignee: Japan Aerospace Exploration AgencyInventor: Hitoshi Kuninaka
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Patent number: 7276140Abstract: A plasma accelerating apparatus and a plasma processing system having the same are provided. The apparatus includes a circular channel comprising an inner wall, an outer wall, and an end wall connected to an end of the inner wall and the outer wall to form an outlet port at the other ends of the inner and outer walls; a gas supply portion to supply a gas to an inside of the channel; and a plasma generating and accelerating portion to supply ionization energy to the gas inside the channel to generate a plasma beam, and to accelerate the generated plasma beam toward the outlet port, wherein one of the inner wall and outer wall of the channel is inclined at an angle so that the other end of the wall is located closer to a center of the plasma accelerating apparatus.Type: GrantFiled: May 18, 2006Date of Patent: October 2, 2007Assignee: Samsung Electronics Co., Ltd.Inventors: Jin-woo Yoo, Won-taek Park
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Patent number: 7262564Abstract: An electrostatic fluid acceleration and method of operation thereof includes at least two synchronously powered stages. A single power supply or synchronized and phase controlled power supplies provide high voltage power to each of the stages such that both the phase and amplitude of the electric power applied to the corresponding electrodes are aligned in time. The frequency and phase control allows neighboring stages to be closely spaced at a distance of from 1 to 2 times an inter-electrode distance within a stage, and, in any case, minimizing or avoiding production of a back corona current from a corona discharge electrode of one stage to an electrode of a neighboring stage. Corona discharge electrodes of neighboring stages may be horizontally aligned, complementary collector electrodes of all stages being similarly horizontally aligned between and horizontally offset from the corona discharge electrodes.Type: GrantFiled: March 23, 2004Date of Patent: August 28, 2007Assignee: Kronos Advanced Technologies, Inc.Inventors: Igor A. Krichtafovitch, Vladimir L. Gorobets
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Patent number: 7247992Abstract: For an ion accelerator system having a special magnetic field structure with an alternating predominantly longitudinal and crosswise progression of the magnetic field, a geometry of the ionization chamber having a non-cylindrical shape of the chamber wall that is adapted to the progression of the magnetic field is proposed.Type: GrantFiled: December 13, 2003Date of Patent: July 24, 2007Assignee: Thales Electron Devices GmbHInventors: Günter Kornfeld, Gregory Coustou, Norbert Koch
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Patent number: 7247993Abstract: The invention relates to an ion accelerator arrangement which uses a combination of a magnetic field having a cusp structure and a cross-section of an ionisation chamber that is extended in one direction transversally in relation to the longitudinal axis. This enables the ionic current to be advantageously scaled.Type: GrantFiled: December 10, 2003Date of Patent: July 24, 2007Assignee: Thales Electron Devices GmbHInventors: Günter Kornfeld, Gregory Coustou, Norbert Koch
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Patent number: 7183515Abstract: A plasma jet system includes a housing with an opening. A plasma generator is coupled to ionize a fluid in the housing. An electromagnetic accelerator is coupled to generate an electric field that accelerates ionized fluid in the housing toward the opening. A controller can modulate the frequency of the electric field to cause the ionized fluid to form a plasma vortex flow through the opening. A magnetic field is applied normal to the direction of the plasma vortex flow to mitigate the momentum of the electrons. The electrons slowed by the magnetic field can be collected and conducted to a location where they are re-inserted into the plasma vortex flow to maintain charge neutrality.Type: GrantFiled: December 20, 2004Date of Patent: February 27, 2007Assignee: Lockhead-Martin CorporationInventors: Daniel N. Miller, Paul D. McClure, Charles J. Chase, Robert R. Boyd
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Patent number: 7180243Abstract: The closed electron drift plasma accelerator comprises an annular ionization chamber, an acceleration chamber on the same axis as the ionization chamber, an annular anode, a hollow cathode, a first DC voltage source, an annular gas manifold, a magnetic circuit, and magnetic field generators. A coaxial annular coil is placed in the cavity of the ionization chamber, is provided with bias conductive cladding connected, together with the electrically-conductive material of the inside faces of the walls of the ionization chamber, to the positive pole of a second voltage source whose negative pole is connected to the anode, and constitutes an additional magnetic field generator which, together with the other magnetic field generators, forms a magnetic field having a magnetic line of force with an “X” point corresponding to a magnetic field zero situated between the coaxial annular coil and the anode.Type: GrantFiled: July 8, 2004Date of Patent: February 20, 2007Assignee: SNECMA MoteursInventors: Olivier Secheresse, Antonina Bougrova, Alexei Morozov
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Patent number: 7174703Abstract: An ion thrusting system is disclosed comprising an ionization membrane having at least one area through which a gas is passed, and which ionizes the gas molecules passing therethrough to form ions and electrons, and an accelerator element which accelerates the ions to form thrust. In some variations, a potential is applied to the ionization membrane may be reversed to thrust ions in an opposite direction. The ionization membrane may also include an opening with electrodes that are located closer than a mean free path of the gas being ionized. Methods of manufacture and use are also provided.Type: GrantFiled: February 26, 2004Date of Patent: February 13, 2007Assignee: Ionfinity LLCInventor: Frank T. Hartley
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Patent number: 7161158Abstract: An apparatus and method for fast changing a focal length of a charged particle beam the method comprising the step of changing a control signal in response to a relationship between the control signal voltage value and the focal length of the charged particle beam.Type: GrantFiled: October 9, 2002Date of Patent: January 9, 2007Assignee: Applied Materials, Inc.Inventors: Dror Shemesh, Dubi Shachal
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Patent number: 7119491Abstract: A system and method for containing plasma and forming a Field Reversed Configuration (FRC) magnetic topology are described in which plasma ions are contained magnetically in stable, non-adiabatic orbits in the FRC. Further, the electrons are contained electrostatically in a deep energy well, created by tuning an externally applied magnetic field. The simultaneous electrostatic confinement of electrons and magnetic confinement of ions avoids anomalous transport and facilitates classical containment of both electrons and ions. In this configuration, ions and electrons may have adequate density and temperature so that upon collisions they are fused together by nuclear force, thus releasing fusion energy. Moreover, the fusion fuel plasmas that can be used with the present confinement system and method are not limited to neutronic fuels only, but also advantageously include advanced fuels.Type: GrantFiled: May 19, 2005Date of Patent: October 10, 2006Assignee: The Regents of the University of CaliforniaInventors: Norman Rostoker, Michl Binderbauer, Artan Qerushi, Hooshang Tahsiri
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Patent number: 7084572Abstract: The invention relates to various advantageous embodiments of a plasma-accelerator configuration, especially for the configuration and design of electron sources used for ionizing the working gas and/or neutralizing the discharged plasma jet.Type: GrantFiled: June 24, 2002Date of Patent: August 1, 2006Assignee: Thales Electron Devices GmbHInventors: Günter Kornfeld, Werner Schwertfeger, Roland Lenz, Gregory Coustou
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Patent number: 7078852Abstract: A system for joining at least two beams of charged particles that includes directing a first beam along a first axis into a field. A second beam is directed along a second axis into the field. The first and second beams are turned, by interaction between the field and the first and second beams, into a third beam directed along a third axis.Type: GrantFiled: March 17, 2005Date of Patent: July 18, 2006Assignee: Coincident Beams Licensing CorporationInventor: Michael Mauck
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Patent number: 7053389Abstract: The invention provides a charged particle therapy system capable of increasing the number of patients treated. An irradiation filed forming apparatus for irradiating a charged particle beam extracted from a charged particle beam generator to an irradiation target includes an RMW device. The RMW device comprises a housing and an RMW disposed within the housing. A rotary shaft of the RMW is rotatably mounted to the housing. The RMW device is detachably installed in an RMW holding member provided in a casing of the irradiation filed forming apparatus. The housing can be placed in contact with the RMW holding member, and hence positioning of the rotary shaft of the RMW to a predetermined position can be performed in a short time. This contributes to cutting a time required for treatment per patient and increasing the number of patients treated.Type: GrantFiled: August 13, 2004Date of Patent: May 30, 2006Assignee: Hitachi, Ltd.Inventors: Masaki Yanagisawa, Hiroshi Akiyama, Koji Matsuda, Hisataka Fujimaki
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Patent number: 7053565Abstract: An electrostatic fluid acceleration and method of operation thereof includes at least two synchronously powered stages with final or rear-most electrodes of one stage maintained at substantially the same instantaneous voltage as the immediately adjacent initial or forward-most electrodes of a next stage in an airflow direction. A single power supply or synchronized and phase controlled power supplies provide high voltage power to each of the stages such that both the phase and amplitude of the electric power applied to the corresponding electrodes are aligned in time. The frequency and phase control allows neighboring stages to be closely spaced at a distance of from 1 to 2 times an inter-electrode distance within a stage, and, in any case, minimizing or avoiding production of a back corona current from a corona discharge electrode of one stage to an electrode of a neighboring stage.Type: GrantFiled: May 18, 2004Date of Patent: May 30, 2006Assignee: Kronos Advanced Technologies, Inc.Inventors: Igor A. Krichtafovitch, Vladimir L. Gorobets
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Patent number: 7049736Abstract: Background plasma electrons in a laser wake field are trapped and accelerated using a sharp downward density transition. A short and intense laser pulse travels through low density plasma with a sharp downward density transition. The density transition scale length is much smaller than the wavelength of a laser wake wave. As the laser wake wave passes the density transition, its wavelength increases suddenly so that some background plasma electrons are self-injected into the acceleration phase of the wake field and trapped and accelerated by the strong laser wake field.Type: GrantFiled: February 12, 2003Date of Patent: May 23, 2006Assignee: Korea Electrotechnology Research InstituteInventors: Hy-yong Suk, Guang-Hoon Kim, Jong-Uk Kim, Chang-Bum Kim, Hae-June Lee
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Patent number: 7045792Abstract: A charged particle buncher with a series of spaced apart electrodes 1 arranged to generate a shaped electric field, the series comprising a first electrode 1a, a last electrode 1b and one or more intermediate electrodes, wherein the shaped electric field is generated substantially without free charges being transferred onto or away from the intermediate electrode or electrodes. The first and last electrodes may be connected to means for transferring charged on to or off the electrode. The first, intermediate and last electrodes may be connected in serried with capacitors.Type: GrantFiled: August 14, 2003Date of Patent: May 16, 2006Assignee: Scientific Analysis Instruments, Ltd.Inventors: Victor Carl Parr, Stephen Paul Thompson, Mark Duncan Mills
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Patent number: 7045793Abstract: A multi-grid ion beam source has an extraction grid, an acceleration grid, a focus grid, and a shield grid to produce a highly collimated ion beam. A five grid ion beam source is also disclosed having two shield grids. The extraction grid has a high positive potential and covers a plasma chamber containing plasma. The acceleration grid has a non-positive potential. The focus grid is positioned between the acceleration grid and the shield grid. The combination of the extraction grid and the acceleration grid extracts ions from the plasma. The focus grid acts to change momentum of the ions exiting the acceleration grid, focusing the ions into a more collimated ion beam than previous approaches. In one embodiment, the focus grid has a large positive potential. In another embodiment, the focus grid has a large negative potential.Type: GrantFiled: June 14, 2004Date of Patent: May 16, 2006Assignee: Veeco Instruments, Inc.Inventor: Erik Karl Kristian Wåhlin
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Patent number: 7030576Abstract: A Hall effect thruster for propelling spacecraft and satellites includes at least two acceleration channels, each of the channels has a closed end and an open end, and a plurality of flux guides adjacent each of the channels. The plurality of flux guides includes an innermost flux guide, an outermost flux guide, and at least one intermediate flux guide. Each intermediate flux guide helps provide a magnetic field to each of two adjacent acceleration channels.Type: GrantFiled: December 2, 2003Date of Patent: April 18, 2006Assignee: United Technologies CorporationInventors: John B. McVey, Andrew S. Perrucci, Edward J. Britt
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Patent number: 7030398Abstract: A system and method of accelerating ions in an accelerator to optimize the energy produced by a light source. Several parameters may be controlled in constructing a target used in the accelerator system to adjust performance of the accelerator system. These parameters include the material, thickness, geometry and surface of the target.Type: GrantFiled: March 1, 2005Date of Patent: April 18, 2006Assignee: The Regents of the University of CaliforniaInventor: Toshiki Tajima
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Patent number: 6982520Abstract: An efficiency enhancing anode-magnetic structure of a Hall effect thruster produces a radially directed magnetic field between inner and outer poles at the exit portion of a gas distribution channel. The field-shaping structure includes magnetic material extending alongside the channel with an associated secondary flux-generating component to create an axially directed magnetic field in the area between the anode of the thruster and the exit portion of the gas distribution channel.Type: GrantFiled: September 10, 2002Date of Patent: January 3, 2006Assignee: Aerojet-General CorporationInventor: Kristi H. de Grys
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Patent number: 6960888Abstract: A method of producing and accelerating an ion beam comprising the steps of: providing a magnetic field with a cusp that opens in an outward direction along a centerline that passes through a vertex of the cusp: providing an ionizing gas that sprays outward through at least one capillary-like orifice in a plenum that is positioned such that the orifice is on the centerline in the cusp, outward of the vortex of the cusp; providing a cathode electron source, and positioning it outward of the orifice and off of the centerline; and positively charging the plenum relative to the cathode electron source such that the plenum functions as an anode. A hot filament may be used as the cathode electron source, and permanent magnets may be used to provide the magnetic field.Type: GrantFiled: January 5, 2004Date of Patent: November 1, 2005Assignee: The United States of America as represented by the Administrator of the National Aeronautics and Space AdministrationInventor: John E. Foster
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Patent number: 6929712Abstract: A high-frequency current detector of a plasma processing apparatus detects a high-frequency current produced when high-frequency power in the range that does not cause generation of plasma in a chamber is supplied from a high-frequency power supply source to the chamber. The high-frequency current detector outputs the detected high-frequency current to a computer. The computer compares the high-frequency current received from the high-frequency current detector with a reference high-frequency current. When the received high-frequency current matches the reference high-frequency current, the computer determines that the process performance is normal. Otherwise, the computer determines that the process performance is abnormal. In this way, high-frequency characteristics specific to the apparatus are detected and the process performance are evaluated based on the detected high-frequency characteristics.Type: GrantFiled: September 6, 2002Date of Patent: August 16, 2005Assignee: Renesas Technology Corp.Inventors: Minoru Hanazaki, Keiichi Sugahara, Toshihiko Noguchi, Toshio Komemura, Masakazu Taki, Mutumi Tuda, Kenji Shintani
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Patent number: 6906338Abstract: A system and method of accelerating ions in an accelerator to optimize the energy produced by a light source. Several parameters may be controlled in constructing a target used in the accelerator system to adjust performance of the accelerator system. These parameters include the material, thickness, geometry and surface of the target.Type: GrantFiled: January 8, 2001Date of Patent: June 14, 2005Assignee: The Regents of the University of CaliforniaInventor: Toshiki Tajima
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Patent number: 6906453Abstract: A system for joining at least two beams of charged particles that includes directing a first beam along a first axis into a field. A second beam is directed along a second axis into the field. The first and second beams are turned, by interaction between the field and the first and second beams, into a third beam directed along a third axis.Type: GrantFiled: May 10, 2004Date of Patent: June 14, 2005Assignee: Coincident Beams Licensing CorporationInventor: Michael Mauck
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Patent number: 6897617Abstract: A method to limit ozone production in wind ion devices while simultaneously realizing incidents of high acceleration in such devices varies the high voltage potential across the array of emitter(s) (10) and collectors (20) over time in such a manner as to generate a wave effect of airflow. The variance may be achieved by switching, ramping, or gating the high voltage potential delivered to the array.Type: GrantFiled: December 22, 2000Date of Patent: May 24, 2005Assignee: Zenion Industries, Inc.Inventor: Jim L. Lee
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Patent number: 6873123Abstract: The invention concerns a device (10) for regulating the intensity of a beam extracted from a particle accelerator, such as a cyclotron, used for example for protontherapy, said particles being generated from an ion source. The invention is characterized in that it comprises at least: a comparator (90) determining a difference ? between a digital signal IR representing the intensity of the beam measured at the output of the accelerator and a setpoint value IC of the beam intensity: a Smith predictor (80) which determines on the basis of the difference ?, a correct value of the intensity of the beam IP; an inverted correspondence table (40) supplying, on the basis of the corrected value of the intensity of the beam IP, a setpoint value IA for supply arc current from the ion source (20).Type: GrantFiled: June 3, 2002Date of Patent: March 29, 2005Assignee: Ion Beam Applications S.A.Inventors: Bruno Marchand, Bertrand Bauvir
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Patent number: 6815880Abstract: A system for joining at least two beams of charged particles that includes directing a first beam along a first axis into a field. A second beam is directed along a second axis into the field. The first and second beams are turned, by interaction between the field and the first and second beams, into a third beam directed along a third axis.Type: GrantFiled: May 2, 2003Date of Patent: November 9, 2004Assignee: Coincident Beams Licensing CorporationInventor: Michael Mauck
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Patent number: 6798141Abstract: For a plasma accelerator arrangement having a focused electron beam introduced into a plasma chamber, an annular structure of the chamber and a hollow cylindrical form of the electron beam are presented. A beam-guiding magnet system and, if appropriate, an electrode system is preferably formed in a plurality of stages in an adapted toroidal form.Type: GrantFiled: September 20, 2002Date of Patent: September 28, 2004Assignee: Thales Electron Devices GmbHInventors: Günter Kornfeld, Werner Schwertfeger
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Publication number: 20040183452Abstract: The invention relates to various advantageous embodiments of a plasma-accelerator configuration, especially for the configuration and design of electron sources used for ionizing the working gas and/or neutralizing the discharged plasma jet.Type: ApplicationFiled: May 17, 2004Publication date: September 23, 2004Inventors: Gunter Kornfeld, Werner Schwertfeger, Roland Lenz, Gregory Coustou
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Patent number: 6753652Abstract: An ion implanter having means for scanning an ion beam on a wafer is provided, wherein the scanning means, on which the wafer is mounted, moves the wafer in a region where the ion beam is irradiated. A detecting means, which is fixedly mounted adjacent to the scanning means, detects the ion beam that is overly scanned out of the scanning means. The detecting means has an inclined surface so that a portion of the detecting means adjacent to the scanning means is positioned below a surface of the wafer that is disposed on the scanning means. Accordingly, the ion implanter may prevent the wafer in the scanning means from being polluted with sputtering particles generated from a surface of the scanning means.Type: GrantFiled: May 30, 2002Date of Patent: June 22, 2004Assignee: Samsung Electronics Co., Ltd.Inventor: Won-Ju Kim
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Patent number: 6744225Abstract: The present invention mainly relates to an ion accelerator with significantly simplified construction, for accelerating an much larger amount of ions, wherein that a plasma-generating target 12, a vacuum chamber 16 for extracting ions from plasma generated from the plasma-generating target 12, and an ion linac 30 are connected in series, the vacuum chamber 16 is installed near an ion entrance of the ion linac 30, the ion accelerator also has a high voltage power supply boosting the vacuum chamber 16 to a desired voltage, and ions are directly injected from the vacuum chamber 16 to the ion linac 30.Type: GrantFiled: May 1, 2002Date of Patent: June 1, 2004Assignee: RikenInventors: Masahiro Okamura, Takeshi Takeuchi, Toshiyuki Hattori
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Patent number: 6735935Abstract: A pulsed Hall thruster system includes a Hall thruster having an electron source, a magnetic circuit, and a discharge chamber; a power processing unit for firing the Hall thruster to generate a discharge; a propellant storage and delivery system for providing propellant to the discharge chamber and a control unit for defining a pulse duration &tgr;<0.1d3&rgr;/{dot over (m)}, where d is the characteristic size of the thruster, &rgr; is the propellant density at standard conditions, and {dot over (m)} is the propellant mass flow rate for operating either the power processing unit to provide to the Hall thruster a power pulse of a pre-selected duration, &tgr;, or operating the propellant storage and delivery system to provide a propellant flow pulse of duration, &tgr;, or providing both as pulses, synchronized to arrive coincidentally at the discharge chamber to enable the Hall thruster to produce a discreet output impulse.Type: GrantFiled: December 11, 2001Date of Patent: May 18, 2004Assignee: Busek CompanyInventors: Vladimir J. Hruby, Bruce M. Pote, Manuel Gamero-Castano
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Publication number: 20040070349Abstract: A plasma impulse device/method has been developed to provide impulses that can be used for thrust. A field device produces electric and magnetic fields, which E×B drifts a charged portion in the ambient environment, resulting in thrust of the field device.Type: ApplicationFiled: May 20, 2003Publication date: April 15, 2004Inventor: John P. Keady
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Patent number: 6670767Abstract: A method for generating a closely spaced train of extremely high voltage short pulses. The method involves generating the train of pulses by combining a plurality of harmonic amplitudes to construct said pulses, via a Fourier construction. Any arbitrary pulse shape can be reproduced simply by changing the amplitude of the harmonics. The train of high voltage electrical pulses produced by the method of the present invention is particularly well suited for the acceleration of particles by applying the pulses to an appropriate accelerating structure, or the pulses can be used to drive an undulator/wiggler.Type: GrantFiled: October 30, 2001Date of Patent: December 30, 2003Assignee: FELtech CorporationInventor: Francesco Villa
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Patent number: 6646383Abstract: A device for use in a linear accelerator operable to accelerate charged particles along a beam axis is disclosed. The device includes a plurality of monolithic members connected to form a series of accelerating cavities aligned along the beam axis and coupling cavities. Each of the coupling cavities intersects with adjacent accelerating cavities at first and second coupling apertures. The first and second coupling apertures have different sizes.Type: GrantFiled: March 15, 2001Date of Patent: November 11, 2003Assignee: Siemens Medical Solutions USA, Inc.Inventors: Kirk Joseph Bertsche, Chong-Guo Yao
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Patent number: 6640535Abstract: A linear gridless ion thruster (LGIT) is provided to serve as an ion source for spacecraft propulsion or plasma processing. The LGIT is composed of two stages: (1) an ionization stage composed of a hollow cathode, anode, and cusp magnetic field circuit to ionize the propellant gas; and (2) an acceleration stage composed of a downstream cathode, upstream anode, and a radial magnetic field circuit to accelerate ions created in the ionization stage. The LGIT replaces grids used in conventional ion thrusters (Kaufman guns) to accelerate ions with Hall-current electrons as in the case with conventional Hall thrusters.Type: GrantFiled: June 13, 2002Date of Patent: November 4, 2003Assignee: The Regents of the University of MichiganInventors: Alec D. Gallimore, Brian Beal
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Patent number: 6635998Abstract: An ion beam processing apparatus and a method of operating an ion source therefore are provided for reducing the frequency of breakdown due to particles, and for increasing an apparatus available time by operating the apparatus in a stable state for a long time and minimizing maintenance operations such as cleaning for the apparatus, and so on. A plasma generating gas is introduced into a vacuum chamber formed of a processing chamber and an ion source mounted thereto to produce a plasma from the gas, and an electric field is applied within the vacuum chamber to extract ions within the plasma as an ion beam. The ion source comprises an arc power supply, an acceleration power supply for applying an acceleration electrode with a positive potential to extract an ion beam, and a deceleration power supply for applying a deceleration electrode with a negative potential to prevent ions from flowing into the ion source.Type: GrantFiled: October 2, 2002Date of Patent: October 21, 2003Assignee: Hitachi, Ltd.Inventors: Shigeru Tanaka, Isao Hashimoto
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Patent number: 6635883Abstract: Incorporating the use of a permanent magnet within a GCIB apparatus to separate undesirable monomer ions from a gas cluster ion beam to facilitate improved processing of workpieces. In an alternate embodiment, the effect of the permanent magnet may be controlled by the use of an electrical coil. The above system eliminates problems related to power consumption and heat generation.Type: GrantFiled: December 1, 2000Date of Patent: October 21, 2003Assignee: Epion CorporationInventors: Richard P. Torti, Jerald P. Dykstra
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Publication number: 20030184235Abstract: An object of the present invention is to provide an apparatus for producing stable plasma. Another object of the present invention is to provide an apparatus having a long-lasting cathode electrode which is superior in field emission characteristic since the plasma density has to be raised in order to increase the throughput. The structure of the plasma producing apparatus of the present invention relates to a plasma producing apparatus with a plasma chamber surrounded by walls to make material gas into plasma, characterized in the plasma chamber has a cathode electrode, an anode electrode, means for introducing the material gas, and exhaust means, and that a carbon nano tube is formed on a surface of the cathode electrode and the anode electrode is formed on the surface of the cathode electrode.Type: ApplicationFiled: March 19, 2003Publication date: October 2, 2003Applicant: Semiconductor Energy Laboratory Co., LtdInventor: Osamu Nakamura
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Patent number: 6611087Abstract: A system for joining at least two beams of charged particles that includes directing a first beam along a first axis into a field. A second beam is directed along a second axis into the field. The first and second beams are turned, by interaction between the field and the first and second beams, into a third beam directed along a third axis.Type: GrantFiled: August 6, 2002Date of Patent: August 26, 2003Assignee: Coincident Beams Licensing CorporationInventor: Michael Mauck