Thermal Or Magnetic Actuator Patents (Class 315/39.59)
  • Patent number: 7915827
    Abstract: A microwave generation device includes: a magnetron having a cathode containing a filament and an anode containing a hollow resonator arranged to oppose to each other; a filament current measuring unit; and an application voltage measuring unit for measuring voltage applied to the filament. Based on the current and the voltage obtained by the current measuring unit and the voltage measuring unit, a resistance value calculation unit obtains a resistance value of the filament. A temperature calculation unit calculates the filament temperature from the resistance value and the resistance-temperature dependent characteristic. A filament power source is controlled by a power control unit so that the filament temperature is within a predetermined temperature range.
    Type: Grant
    Filed: March 7, 2008
    Date of Patent: March 29, 2011
    Assignee: Tokyo Electron Limited
    Inventors: Shigeru Kasai, Yuki Osada
  • Patent number: 6259208
    Abstract: An optically tuned magnetron oscillator employs materials whose electrodynamic properties are altered by the absorption of light. A probe constructed from a leaky dielectric light guide coated with a photoconductive material is inserted into each of the magnetron's cavities. When light is injected into the light guide, it leaks into the coating where it is absorbed, creating free charge carriers whose presence alters the dielectric properties of the material, thereby perturbing the resonant frequency of the cavity. The frequency can be controlled by varying the amount of light injected into each of the optical probes. When no light is present, the resonant frequency of the magnetron cavity will be at one extreme of its operating band; when the light is at full intensity, the change in the properties of the probe will be maximum as will be the change in the resonant frequency.
    Type: Grant
    Filed: March 17, 1997
    Date of Patent: July 10, 2001
    Inventor: David D. Crouch