Abstract: Disclosed are a portable surface characteristics measurement device and a control method thereof. The portable surface characteristics measurement device includes: a roughness sensor configured to convert a signal sensed from a surface of an object during movement of the portable surface characteristics measurement device on the surface of the object into an electric vibration signal; a movement measurement sensor configured to measure a movement physical quantity of the portable surface characteristics measurement device; and a processor configured to change a sampling interval depending on the measured movement physical quantity, and sample the vibration signal in real time, wherein the processor is configured to perform Fourier transform on the sampled vibration signal, and identify a peak frequency band shown in the Fourier-transformed vibration signal as surface roughness information of the object.

Abstract: There is provided a roughness tester that improves measurement efficiency and roughness measurement accuracy. A roughness tester includes a stylus unit including a stylus that is provided in such a manner as to protrude from and retract into a through hole of a skid and performs scanning movement along a surface of a workpiece, and a stylus displacement detecting unit that detects displacement of the stylus, and a drive unit that moves the stylus unit forward and backward in a drive-axis direction. The roughness tester further includes a height detector that is provided in such a manner as to face a front end face of the main-body housing part, interposing the skid between the height detector and the front end face and that detects a height of an object in a direction parallel with a measurement axis.

Abstract: The present invention relates to a shape measurement apparatus comprising: a driving body 130; a measurement arm part 110 having a stylus 111 coming into contact with an object to be measured, and an arm 113 for supporting the stylus 111 so that the stylus 111 comes into contact with the object to be measured; a measurement arm support part 120 coupled to an end of the arm 113; a pivot 121 for rotatably supporting the measurement arm support part 120 with respect to the driving body 130; and an actuator part 140 for controlling the measurement arm support part 120 to rotate up and down with respect to the pivot 121 so that the stylus 111 moves along the object to be measured.

Abstract: A chemical mechanical polish (CMP) system is provided. The CMP system includes a platen rotatable about a rotation axis. The CMP system further includes a polishing pad positioned on the platen. The CMP system also includes a detecting module having a base portion and a number of pins positioned over the polishing pad. The pins are movable relative to the platen and have their bottom end in direct contact with the polishing pad to detect the planarity of the polishing pad.

Abstract: In a shape measuring apparatus for measuring the roughness and/or contour of a surface of a workpiece by sliding a sensing pin on a tip end side of an arm on the workpiece, the arm is provided with an engagement mechanism that makes a sensing pin side of the arm removable to a base end side of the arm. The engagement mechanism has two engagement surfaces which face each other and attract each other by a magnetic force. One of the engagement surfaces includes a linear first groove that is in parallel to an axis of the arm and another engagement part that is different from the first groove, and the other of the engagement surfaces includes a first fitting pin that is positioned to be fitted into the first groove and a second fitting pin that is fitted into the other engagement part.

Abstract: A contour shape measurement method that can more accurately align an article to be measured to a predetermined position to enable high-precision evaluation even in a state where a probe measurement axis and a table rotation axis do not match with sufficient precision is provided. A spatial position of the table rotation axis relative to the probe measurement axis is obtained as a rotation axis vector. Alignment data obtained in at least two directions is coordinate-transformed around the rotation axis vector, to constitute synthesized alignment data. The article is aligned based on the synthesized alignment data. Since three-dimensional data of a surface to be measured of the article can be calculated, the article can be directly aligned to the probe measurement axis.

Abstract: According to the present invention, a center deviation amount, which is an amount of deviation (distance) between the center line of a reference measurement target and the detection point is calculated using the reference measurement target having a known diameter, and a measurement value of a diameter of an arbitrary measurement target is corrected using the center deviation amount. Therefore, an accurate diameter value can be calculated even in the case of a measurement target having a diameter value different from the diameter value of the reference measurement target.

Abstract: Apparatus, methods and systems for obtaining one or more dimensions of an object employing, at least in part, touch sensors.

Abstract: An eyeglass frame shape measurement device includes: an eyeglass frame holding unit including a first slider and a second slider for holding an eyeglass frame; a rim measuring unit including a tracing stylus for a rim of the eyeglass frame, and detecting the movement position of the tracing stylus to measure a shape of the rim; a template holder configured to attach a template and a measurement object of a demo lens; a template measuring unit including a tracing stylus shaft configured to contact an edge of the measurement object attached to the template holder, for measuring radius vector information of the measurement object; and a housing portion provided to house the template holder and provided in one of the first slider and the second slider when measurement using the template measuring unit is not being performed.

Abstract: An apparatus for measuring the shape of a material includes: a width roller configured to roll a width of the material; a plurality of transfer rollers arranged in a rear side of the width roller to transfer the width rolled material; and a measurement unit disposed between the transfer rollers to contact the material moved over the transfer rollers to measure the shape of the material.

Abstract: A coordinate measuring machine includes a probe having a measurement unit, a movement mechanism for moving the probe and a host computer for controlling the movement mechanism. The host computer includes: a compensation-amount calculating unit for calculating a compensation amount for compensating an error in the position of the measurement unit caused by the movement of the probe; and a compensator for compensating the error in the position of the measurement unit based on the compensation amount calculated by the compensation-amount calculating unit. The compensation-amount calculating unit calculates a translation-compensation amount for compensating a translation error of the probe and a rotation-compensation amount for compensating a rotation error of the probe based on a rotation frequency of the movement of the probe.

Abstract: A method for measuring surface profile of a sample, wherein jumping of a probe can be constrained without applying strong force to the sample, and an apparatus employing such a method. Control operation consists of detection of displacement in a probe in the vertical direction on the top surface of a sample being measured by means of a sensor, calculation of velocity and acceleration of the probe in accordance with detection of the displacement in the probe, detection of jumping of the probe through real-time monitoring of at least either velocity or acceleration of the probe, and a control of the current delivered to a stylus pressure generator for the probe. Such a control operation is performed in a small amount of time, and a stylus pressure applied to the probe is increased only while the probe is in the air, while the stylus pressure applied to the probe is returned to an original pressure before the probe touches the sample again.

Abstract: The present invention relates to a disk protrusion detection/flatness measurement circuit and a disk glide tester, in which protrusion detection and average value calculation can be performed without switching signal processing circuits of two systems, one for the protrusion detection of a disk and the other for the average value calculation with respect to a track or a sector of the disk. This also makes it possible to reduce the size of the measurement circuit. In the protrusion detection/flatness measurement circuit, a signal from a protrusion detection sensor is amplified and converted from an analog signal to a digital signal. The signal passes through a band-pass filter to obtain a digital signal with a predetermined bandwidth. Then, peak detection and average value calculation processes are applied in parallel to the obtained digital signal. Thus, pass/fail decision of the disk can be made based on the detected peak and average values.

Abstract: A spherical-form measuring apparatus which efficiently measures the sphericity and the form of a sphere to be measured with use of the mechanism of a roundness measuring machine, including a turntable, a probe for measuring a contour of a sphere to be measured on an equatorial plane parallel to a surface of the turntable, associated with rotation of the turntable, and a holding unit mounted on the turntable, for holding the sphere to be measured, wherein the holding unit positions the center of the sphere to be measured on a rotational axis of the turntable, and holds the sphere to be measured so that the sphere is rotatable about an inclined axis which passes the center of the sphere and is inclined at the angle in the range of ?5 degrees-+5 degrees centered on the angle where the sine is 1?3 (1 divided by the square root of 3) against the surface of the turntable.

Abstract: A roundness measuring apparatus includes a stylus stocker and a controller. The stylus stocker stores plural types of styli prepared corresponding to shapes of measurement sites of a measurement target object. The stylus stocker can store styli in such a manner that each stylus can be held thereon and taken out thereof. The stylus stocker is provided outside a measurement region, which is determined on the basis of the operation range of a turntable and a detector driving mechanism. The detector driving mechanism can move the detector to the outside of the measurement region. When a measurement command is given, the controller carries out roundness measurement of the object while controlling the turntable and the detector driving mechanism. When a stylus replacement command is given, the controller carries out stylus replacement operation between a detector main unit and the stylus stocker while controlling the detector driving mechanism.

Abstract: A metrological instrument determines a surface profile or form of a surface (61) of a workpiece (60) by effecting relative movement between a probe (11, 12) and the surface (61) so that the probe follows and is displaced by changes in the surface topography. A measure of the displacement of the probe as it follows the surface is obtained by a displacement provider which may be an interferometric gauge (35). Instead of making a measurement along a single measurement path over the surface (61), respective measurements are made on sections (61d and 61e or 61g and 61h) of that measurement path to obtain corresponding measurement data sets and these measurement data sets are independently positioned or aligned to a reference data set. The reference data set may be obtained by a measurement made on another section (61c) of the measurement path (61), on another measurement path (61f) over another surface (62a and 62b) of the component or on another measurement path over a surface on which the component is located.

Abstract: A spherical-form measuring apparatus 10 which efficiently measures the sphericity and the form of a sphere to be measured with use of the mechanism of a roundness measuring machine, including: a turntable 14; a probe 22 for measuring a contour of a sphere to be measured on an equatorial plane parallel to a surface of the turntable 14, associated with rotation of the turntable 14; and a holding unit 24 mounted on the turntable 14, for holding the sphere to be measured 30; wherein the holding unit 24 positions the center of the sphere to be measured 30 on a rotational axis of the turntable 14, and holds the sphere to be measured 30 so that the sphere is rotatable about an inclined axis which passes the center of the sphere and is inclined at the angle in the range of ?5 degrees-+5 degrees centered on the angle where the sine is 1?3 (1 divided by the square root of 3) against the surface of the turntable 14.

Abstract: A method for inspecting a honeycomb structured body of the present invention is a method for inspecting a honeycomb structured body comprising a pillar-shaped honeycomb fired body having a multitude of cells placed in parallel with one another in the longitudinal direction with a cell wall therebetween, the method comprising: measuring the shape of the honeycomb structured body in the longitudinal direction through preparing a contact measurement apparatus including a reference surface, a rail disposed perpendicularly to the reference surface, and a measurement probe including a contacting probe configured to move along the rail; contacting one end face of the honeycomb structured body with the reference surface; and moving the measurement probe in a direction nearing the reference surface to contact the contacting probe with the other end face of the honeycomb structured body.

Abstract: Straight tracks are formed in a first direction on a base. The top surface of a platform is formed so as to be flat to mount a wafer having an Ori-Fla, and the platform is moved in the first direction by being engaged with the straight tracks via engagement means. A block having a flat face against which the Ori-Fla of the wafer abuts and which is parallel with the first direction is installed with a first clearance L being provided with the straight track in a second direction perpendicular to the first direction. Wafer fixing means for fixing the wafer in a state in which the wafer is mounted on the platform is provided in the platform, and a measurement device having a probe opposed to the straight track and capable of being displaced in the second direction is installed on the base with a second clearance M being provided with the block in the first direction. When a clearance between the tip end of the probe and the straight track is taken as N, the relationship of 0 ?m<L?N?100 ?m exists.

Abstract: A process in which a white light scanner and a CMM are integrated into one inspection tool. The white light scanner and CMM will be tied to the same table and articulate using the same mechanism. Both inspection processes use the same absolute point to take measurements. The white light data will be modified using the CMM inspection data. Ultimately, the output of the inspection process will be a surface created by the white light inspection with the accuracy of a CMM. The white light scanner first scans the part to determine the surface topography within a first predetermined tolerance. The CMM scanner then scans the part using the coordinates from the white light scanner to position the probe close and fast, and then scans the surface topography of the part with a better tolerance than the white light scanner.

Abstract: A metrological instrument determines a surface profile or form of a surface (61) of a workpiece (60) by effecting relative movement between a probe (11, 12) and the surface (61) so that the probe follows and is displaced by changes in the surface topography. A measure of the displacement of the probe as it follows the surface is obtained by a displacement provider which may be an interferometric gauge (35). Instead of making a measurement along a single measurement path over the surface (61), respective measurements are made on sections (61d and 61e or 61g and 61h) of that measurement path to obtain corresponding measurement data sets and these measurement data sets are independently positioned or aligned to a reference data set. The reference data set may be obtained by a measurement made on another section (61c) of the measurement path (61), on another measurement path (61f) over another surface (62a and 62b) of the component or on another measurement path over a surface on which the component is located.

Abstract: A method and device for measuring an amount of wear on a flank of a gear tooth is provided. The method includes positioning a template comprising a first template tooth adjacent a gear comprising a first gear tooth. The method also includes adjusting the position of the template in a rotational direction with respect to a known rotational reference point of the gear, adjusting the position of the template in an axial direction with respect to a known axial reference point of the gear, and adjusting the position of the template in a radial direction with respect to a known radial reference point of the gear. The method further includes measuring an extent of a gap between an edge of the first template tooth and an adjacent flank of the first gear tooth, wherein the gap corresponds to the amount of wear on the flank.

Abstract: An eyeglass frame shape measuring apparatus comprises: a frame holding unit which holds a eyeglass frame in a desired position; a rotary base; a feeler holding unit which comprises a support shaft to which a feeler for measurement is attached, a first arm for holding the support shaft, an elastic body for urging the first arm so that the support shaft is urged outward with respect to a rotation center axis of the rotary base, and a first arm holding unit for holding the first arm to enable the support shaft to be inclined with respect to the rotation center axis; a detecting unit which detects movement of the first arm; and an arithmetic unit which obtains a three-dimensional movement position of the feeler to obtain the three-dimensional shape of the rim, on the basis of rotation of the rotary base and results of detection of the detecting unit.

Abstract: An exemplary test apparatus for a columniform workpiece includes a base plate, a support plate perpendicularly mounted to a top surface of the base plate, a shaft rotatably mounted to the support plate, a contact member mounted the support plate and perpendicularly slidable relative to the support plate, and a test meter. The shaft is configured for mounting the columniform workpiece at a side of the support plate and making the columniform workpiece perpendicularly rotate relative to the support plate. The contact member includes a first end contacting the end surface of the columniform workpiece. The test meter includes a pole with a distal end contacting a second end opposite to the first end of the contact member, the poles' length resiliently adjusting corresponding to the end surface of the columniform workpiece, and a value of the test meter changing corresponding to changes in the length of the pole.

Abstract: A measuring tool for a blade cuff mounted on a rotor blade assembly includes a cam follower assembly which simulates a longitudinal profile of an ideal blade cuff within a contour plane. A cam lock locks the gauge at a desired longitudinal position along a central axis to measure a radial plane defined around the blade cuff as the blade cuff profile fixture is rotated relative the base and cam follower assembly. A master block is removably mounted to the blade cuff fixture to simulate an ideal blade cuff such that the gauge may be zeroed thereon. Once zeroed, and after removal of the master block, the cam follower assembly provides a continuous zero position for the gauge such that any deviations from the ideal profile anywhere on the blade cuff is indicated on the gauge.

Abstract: In a flatness measurement apparatus, a sensor unit having a flatness-detection sensor is slidable along the linear guide rail. A support system supports the linear guide rail such that the linear guide rail is rotatable in a horizontal plane, whereby a surface of a wafer stage to be measured is scanned all over with the sensor unit having the flatness-detection sensor so as to ensure a flatness measurement of the whole surface of the wafer stage.

Abstract: The present invention provides a surface roughness/contour shape measuring apparatus that can move a probe relative to a workpiece within an orthogonal X-Y plane while employing a relatively inexpensive construction. In the surface roughness/contour shape measuring apparatus (1), the probe (6, 7) and a driving unit (4) for driving the probe (6, 7) in one predesignated direction are connected together by a connecting member (8) capable of moving the probe (6, 7) in one predesignated direction relative to the driving unit (4).

Abstract: The device 1 for positioning the measuring element of a measuring apparatus comprises a traverse 14 on which the measuring element is arranged. The device further comprises a track 11 on which bearings 12, 13 run, and on which the traverse 14 is held by means of bearings 124, 125. The measuring element of the measuring apparatus can be positioned radially in relation to the track 11 and along the track 11. The traverse 14 comprises multiple components, wherein the components 141, 142 of the traverse 14 are interconnected with one or several bearings 143, or the components 141, 142 of the traverse 14 are held inside each other so as to be telescopically slidable. Radial positioning takes place in that the angle ?14 between the components 141, 142 of the traverse 14 is changed or in that in the case of a telescopic traverse 14, which constitutes a chord in the track 11, the length is altered.

Abstract: A surface curvature measuring apparatus includes a platform and a magnetically attractable curvature-measuring module. The platform has a rotary mechanism to mount and to rotate a sample object. The magnetically attractable curvature-measuring module includes a fixed guiding member, a movable measuring member and a magnetically attractable slide track. The movable measuring member includes a magnetic slide to attract the magnetically attractable slide track, and a measuring rod to be in contact with an undersurface of the sample object. The magnetic slide attracts the magnetically attractable slide track but the movable measuring member disposed between the fixed guiding member and the magnetically attractable slide track is capable of moving upwardly or downwardly. When the sample object rotates, a downward stress exerted by the sample object presses on the measuring rod such that the movable measuring member is moved downwardly to appear positions of the undersurface, and subsequently stopped.

Abstract: A method of measuring an object on a coordinate positioning apparatus. A first object is placed on a coordinate positioning apparatus and measured with a workpiece contacting probe to create measurement data. The measurement data is collected at multiple stylus deflections or probe forces. For a plurality of points on the surface of the first object, the measurement data is extrapolated to that corresponding to zero stylus deflection or zero probe force. An error function or map is created from the measurement data and the extrapolated data. Subsequent objects are then measured using a known stylus deflection or known probe force and the error function or map is used to apply an error correction to these measurements.

Abstract: Systems and methods for obtaining dimensions for threaded fasteners are disclosed. In one embodiment, a system includes an apparatus that determines a dimension of a fastener using a probe that senses a linear displacement of the fastener. A probe tip is rotatably disposed on the probe that contacts the fastener. A controller is coupled to the apparatus for receiving the dimensional characteristic. In another embodiment, a measurement apparatus includes a rotating spindle that supports the fastener and a probe that detects a dimension and having a portion that rotatably engages the fastener. A scale is coupled to the probe to determine a displacement. In another embodiment, a method includes positioning a fastener in a spindle that rotates the fastener, engaging the fastener with a probe to sense a dimension of the fastener, the probe having a terminal portion that rotatably conforms to the fastener, and processing the dimension.

Abstract: A method for forming a topographical image of the heterogeneous variations in a surface of a material has a first machining step and a second scanning step. The preferred machining step uses a preselected scribing tool to scribe a plurality of adjacent grooves in a selected material surface at a preselected constant force. This machining step produces a machined surface whose local elevations relative to a datum plane are dependent on the local hardness or wear resistance of the surface. Then the scanning step shifts the scribing tool across the surface in contact with the surface, and measures the elevation of the tool at a plurality of selected surface coordinates. The measured elevations allow formation of a topological map depicting sub-micron structural features of the surface.

Abstract: A method for measuring the thickness of a tube wall comprising mounting a cut tube onto a rod is disclosed. At least two contact tips are moved into contact with the tube. The tips are imaged with an optical system when the tips are in contact with the cut tube. The optical image is converted into a measurement.

Abstract: Apparatus for measuring a surface geometry of hard tissue covered by a layer of soft tissue, including a plurality of elements each having a tip adapted to penetrate said soft tissue and not substantially penetrate said hard tissue; a frame supporting movement of said elements, each along a path, such that a plurality of said tips, when positioned along the paths, define a surface; and at least one position sensor which generates a signal indicative of a tip position of at least one of said elements.

Abstract: A general method is disclosed for using distance sensors to measure the surface profile and twist of objects, even in the presence of rigid-body motions in the measurement directions between the surface and the sensors. The method involves making multiple sequential measurements from a group of sensors while the object moves longitudinally relative to the sensors. The surface height features of the measured object appear in delayed sequence as the observed surface moves longitudinally relative to the sensor array. However, any rigid-body motions in the measurement directions appear simultaneously at all sensors. Mathematical procedures are used to separate the delayed and simultaneous components of the measurements, from which the surface height profile is determined. The invention can handle many different measurement types, including simultaneous measurement of the surfaces of two-sided objects, measurement of surface twist and two-dimensional surface scanning.

Abstract: A pair of reference portions 20 and 20 is brought into contact with an internal peripheral surface 11 of the vicinity of both side end portions of a tubular body 10. The tubular body 10 is rotated such that contact portions where the tubular body 10 and the pair of reference portions 20 and 20 contact move on the internal peripheral surface 11 in a circumferential direction of the tubular body 10 with positions of the pair of reference portions 20 and 20 fixed. The radial displacement of an external peripheral surface 12 of the tubular body 10 caused by the rotation of the tubular body 10 at at least one position 31 and 32 of an external side of the tubular element 10 is detected, wherein the at least one position is fixed relative to the circumferential direction of the tubular element 10.

Abstract: An apparatus for checking the diameter and the roundness of pins, for example crankpins and main journals of a crankshaft rotating about its main axis of rotation (8), includes a measuring device, coupled to a Vee-shaped reference device (20) and including a feeler (17) axially movable along the bisecting line of the Vee, or a direction slightly sloping with respect to it, and a movable support device for the reference Vee. The support device includes a support element (5) and a coupling mechanism that carries the reference Vee (20). The coupling mechanism includes, for example, two support sections (e.g. parallelogram structures) in series and enables plain translation displacements of the reference Vee. While checking an orbitally rotating crankpin, the Vee-shaped device maintains proper contact with the surface of the pin by virtue of the force of gravity, and the angular arrangement of the direction along which the feeler (17) moves remains substantially unchanged.

Abstract: A unit for evaluating various properties of a paper envelope. The unit is capable of examining an envelope and determining key features of the envelope, such as the amount of front seal adhesive present, the tear strength of the side seams and the presence of properly printed graphics. The unit comprises a) a housing having either a touch screen video display unit or another source of data entry; b) a front seal control portion that contains linear encoders to determine the amount of adhesive on the seal; c) a side strength control portion that contains blades used to measure the force needed to burst the sides of the envelope: and d) a print design quality feature that is utilized to confirm the quality and location of any printing on the envelope.

Abstract: The peripheral surface shape measuring apparatus can simply and accurately measure a peripheral surface shape of a roll-like object. The peripheral surface shape of a roll-like object is measured by moving a displacement amount measuring device which pinches a diameter direction of the roll-like object with a sensor part and a reference point part arranged opposite to each other in the diameter direction of the roll-like object, from one end side to the other end side in an axial direction of the roll-like object by using a moving device.

Abstract: A method for measuring the height variability of a stack of materials comprises placing a stack of materials onto a holder that comprises a base and at least two sides extending from the base such that the stack of materials rests on the base and is generally flush with the sides. A distance of a top of the stack of materials relative to a fixed plane is measured at various locations along the top of the stack of materials. The height variability of the stack is determined based on the measurements.

Abstract: A tracer device having a tracer arm is mounted in an axial guide and is movable back and forth in the x direction while measuring the path, and a tracer head is mounted at the free area of the tracer arm, is in contact with the surface of a part during a measurement and, during its travel in the x direction, is deflected by the surface contours in a z direction that is perpendicular to the x direction, and having an analyzer device for detecting and analyzing the deflections in the z direction as a function of the path in the x direction. An easy to handle, compact design is provided since the front section of the tracer arm, which is rigid per se, is provided with a tracer leg that forms an articulated link of the tracer head to the tracer arm, and a measuring element that detects the deflection in the z direction is arranged on the tracer leg.

Abstract: A method of adjusting the relative attitude of a work in a surface texture measuring instrument for measuring the work having a feature region includes a measurement step of performing measurement of the feature region along an X-axis direction after positioning a detector in a Y-axis direction and the X-axis direction, a determination step of repeating the measurement which is performed while changing the position in the X-axis direction, and a step of adjusting the attitude of the work on the basis of the amount of relative attitude correction. Therefore, the direction of the feature region in the work is adjusted so as to be parallel to the Y axis.

Abstract: An apparatus for rotating a CRT panel (12) to facilitate inspecting a seal edge (13) thereof includes a support structure (30) rotatably connected to a base frame (21) for rotation about a horizontal axis (31). The CRT panel (12) is placed into the support structure (30) with the seal edge (13) positioned in a holding groove (77) formed on a bottom door assembly (40). A top door assembly (58) is slidable to a closed position to enclose and support the CRT panel (12) while the support structure (30) is rotated 180 degrees. The bottom door assembly (40) is movable to an open position to inspect the seal edge (13). The door assemblies (40, 58) are both arranged to engage the base frame (21) and prevent rotation of the support structure (30) relative to the base frame (21) when the door assemblies are moved to their respective open positions.

Abstract: A tracer device having a tracer arm is mounted in an axial guide and is movable back and forth in the x direction while measuring the path, and a tracer head is mounted at the free area of the tracer arm, is in contact with the surface of a part during a measurement and, during its travel in the x direction, is deflected by the surface contours in a z direction that is perpendicular to the x direction, and having an analyzer device for detecting and analyzing the deflections in the z direction as a function of the path in the x direction. An easy to handle, compact design is provided since the front section of the tracer arm, which is rigid per se, is provided with a tracer leg that forms an articulated link of the tracer head to the tracer arm, and a measuring element that detects the deflection in the z direction is arranged on the tracer leg.

Abstract: A form measuring sensor (33) includes a stylus (40), a body (60) for holding the stylus (40) through an adaptor (50), the adaptor (50) including a stylus attachment (51) for the stylus (40) to be attached, a body attachment (52) to be attached to the body (60), and an elastically deformable connector (53) for connecting the stylus attachment (51) and the body attachment (52), where the sensor (33) and a threaded hole (100) are relatively moved to cause an elastic deformation of the connector (53) allowing a displacement of the stylus (40) in accordance with surface configuration of the threaded hole (100), so that the elastic deformation of the connector (53) is detected by a strain gauge (71) to detect the displacement of a contact portion (42A) to collect continuous configuration data of the threaded hole (100) within a short period of time.

Abstract: The apparatus for the positioning of a measuring device has an annular or arcuate track to which a measuring device is attached. To position the sensing head of the measuring unit radially with respect to the material under test, a crossbeam is provided which supports the measuring device. Bearings are arranged between the track and the crossbeam. In the apparatus for positioning, the position of the crossbeam with the measuring device can be changed in a radial direction to the track with respect to the track.

Abstract: A system and method are disclosed for determining properties of a feature located at a surface of a substrate. A plurality of probe tips are operable to traverse a surface of the substrate and provide measurement data indicative of topographical features scanned thereby. The measurement data obtained from the plurality of probe tips is aggregated and processed to determine feature properties, such as may include line edge roughness and/or linewidth.

Abstract: Straight tracks are formed in a first direction on a base. The top surface of a platform is formed so as to be flat to mount a wafer having an Ori-Fla, and the platform is moved in the first direction by being engaged with the straight tracks via engagement means. A block having a flat face against which the Ori-Fla of the wafer abuts and which is parallel with the first direction is installed with a first clearance L being provided with the straight track in a second direction perpendicular to the first direction. Wafer fixing means for fixing the wafer in a state in which the wafer is mounted on the platform is provided in the platform, and a measurement device having a probe opposed to the straight track and capable of being displaced in the second direction is installed on the base with a second clearance M being provided with the block in the first direction.

Abstract: A surface configuration measuring method is provided, the surface configuration measuring method being characterized in having the steps of: moving a touch signal probe by a command velocity vector to touch a surface of the workpiece to be measured; scanning the surface of the workpiece to be measured, the touch signal probe being moved along the surface to be measured while controlling the distance relative to the surface to be measured so that detected amplitude value of a detection signal outputted by the detecting circuit becomes a predetermined reference value, thus outputting the detected amplitude value and corresponding measuring position; and calculating an estimated surface position based on the detected amplitude value and the measuring position estimated to be obtained when surface is scanned to keep the detected amplitude value constant.

Abstract: An apparatus is provided for checking the shape of a part having a portion which is a cylinder of revolution around an axis and a reference end face. The apparatus includes a base and a support arrangement mounted on the base for receiving the cylinder portion and comprising two V-shaped pieces. A positioning arrangement is provided for positioning the part axially with respect to the reference end face. A mechanism is provided for driving the part in rotation about the axis. The positioning arrangement comprises a rectilinear portion with an hemispheric end providing an abutment for the end face. The rectilinear portion is mounted slidingly on the base along a direction which forms, with respect to the axis, an angle corresponding to the half of the angle of the V-shaped pieces. An adjustment means is provided for adjusting the position of the rectilinear portion in a manner which maintains the abutment point of the hemispheric end with the end face on the axis.