Abstract: A method is described for determining a relative position of an axis of rotation of a rotary table of a coordinate measuring machine. The rotary table has or forms a reference element that is arranged eccentrically in relation to the axis of rotation. The method includes a measuring step including performing a rotary movement of the rotary table, and producing measuring points that encode a position of the reference element by a sensor of the coordinate measuring machine during the rotary movement. The method includes a determining step including determining the relative position of the axis of rotation of the rotary table based on the measuring points.

Abstract: A computer-implemented method for determining a two-point size of a workpiece includes receiving a set of measuring points of the workpiece, determining a longitudinal axis of the workpiece based on the set of measuring points, projecting at least a part of the set of measuring points into a projection plane perpendicular to the longitudinal axis to obtain a set of projection points, and determining a two-point size of the workpiece based on the projection point.

Abstract: A method for extracting a gear tooth profile edge based on an engagement-pixel image edge tracking method includes defining a transmission ratio relationship between a cutter and an envelope tooth profile, setting a cutter profile step size and an envelope step size, acquiring instantaneous contact images at different engaging times, and performing a binarization processing on each curve envelope cluster image; sweeping a boundary of an envelope curve cluster, acquiring pixel points of the edge; preliminarily tracking a tooth profile edge, and then performing a secondary extraction and compensation on the pixel points; calibrating coordinates of a cutter profile; extracting a pixel coordinate of an instantaneous engaging point; converting the pixel points among different instantaneous engaging images; extracting a final tooth profile coordinate of the gear, and performing a tooth shape error analysis and a contact line error analysis.

Abstract: A surface property measuring device includes a measuring arm that is supported so as to be capable of circular arced movement, a stylus that is provided to a distal end of the measuring arm, a position change detector that detects a change in position of the measuring arm, and a measurement force applier (voice coil motor) that biases the measuring arm in a circular arced movement direction and applies a measurement force. A control device includes a central controller that outputs a measurement force instruction that issues an instruction for an orientation and size of the measurement force, and a measurement force controller that controls the orientation and size of the measurement force produced by the measurement force applier. The measurement force controller monitors a position change detection, and when a position change speed of the measuring arm exceeds a predetermined threshold value, applies feedback.

Abstract: A machining system includes a robot arm for changing a workpiece or inspecting a machined workpiece, and a probe that is attached to a distal end portion of the robot arm via a force sensor, where the robot arm is controlled such that the probe is arranged at a predetermined measurement position in contact with a side surface of a tool holder, where detection values of the force sensor are obtained over a predetermined period of time in a state where a main spindle is performing rotation operation, where an attached state of the tool holder is determined based on the detection values obtained over the predetermined period of time.

Abstract: A method for dimensionally inspecting a component of a gas turbine system is provided. The method includes disposing the component on a fixture for stabilizing the component. Also included is probing a first datum location of the component with a coordinate measurement machine for establishing a first datum point. Further included is probing at least one location of the component with the coordinate measurement machine to determine at least one measurement relative to the first datum point. Yet further included is displaying the at least one measurement in an output report.

Abstract: A surface texture measuring apparatus includes a stylus displacement detector having a measurement arm which is able to swing, a pair of styli provided at a tip of the measurement arm, and a detection unit configured to detect swing amounts of the measurement arm, a stage configured to mount the subject of measurement thereon, and a relative movement mechanism configured to cause a relative movement between the detector and the stage. The apparatus includes a posture switching mechanism configured to switch a posture of the measurement arm between a posture in which the measurement arm is urged in one swing direction and a posture in which the measurement arm is urged in the other swing direction, and a speed control mechanism configured to control a switching speed of posture switching of the measurement arm to a preset speed when the posture of the measurement arm is switched by the posture switching mechanism.

Abstract: An eyeglass frame shape measurement device includes: an eyeglass frame holding unit including a first slider and a second slider for holding an eyeglass frame; a rim measuring unit including a tracing stylus for a rim of the eyeglass frame, and detecting the movement position of the tracing stylus to measure a shape of the rim; a template holder configured to attach a template and a measurement object of a demo lens; a template measuring unit including a tracing stylus shaft configured to contact an edge of the measurement object attached to the template holder, for measuring radius vector information of the measurement object; and a housing portion provided to house the template holder and provided in one of the first slider and the second slider when measurement using the template measuring unit is not being performed.

Abstract: This invention relates to a method of measuring a collapsed component, comprising: laying the component to be measured on a bed; detecting the location of a plurality of points on the component; storing the location of each of the points relative to at least one other point; mapping the plurality of points on to a reference shape which corresponds to the component in a non-collapsed state to provide mapped data points; and, using the mapped data points to determine the dimensions of the component.

Abstract: In a surface texture measuring instrument, a measurement arm includes: a first measurement arm that is supported by a bracket around a support shaft movably in a circular movement in a casing; and a second measurement arm having styluses that are attachably and detachably provided to an end of the first measurement arm via an attachment-detachment mechanism, the attachment-detachment mechanism being arranged in the casing. A displacement detector includes: a scale provided to the measurement arm; and a detection head provided to the bracket to face the scale. A detecting surface of the scale is on an axis of the measurement arm and on a plane of the circular movement of the measurement arm.

Abstract: An ordering terminal (10) installed on an order side of a spectacle lens has a correction function concerning a measurement error measured by a spectacle frame shape measurement device (13), and transmits information necessary for machining the spectacle lens including the spectacle frame shape information to a spectacle lens manufacture control device (20) in a factory. When correcting the measurement error, the circumference of a reference frame (30) for which a reference circumference as a reference is determined in advance is measured by the spectacle frame shape measurement device (13). A measurement circumference obtained on the basis of a measurement value of the circumference is compared with the reference circumference, and a correction value which corrects the spectacle frame shape information such that the measurement circumference approaches the reference circumference is employed as the correction value of the spectacle frame shape measurement device (13).

Abstract: A position controller provided in a controlling module obtains a difference between a detected rotation angle of a stylus and a target rotation angle, and determines an energization amount to a voice coil motor so that the difference becomes zero. A variable limiter circuit limits a driving current, which is supplied from the position controller, to a limitation value so that a rotation force applied to the stylus from the voice coil motor is constant. A target rotation angle issuing portion switches over the target rotation angle based on a relative position of a contact portion of the stylus.

Abstract: A method for inspecting a honeycomb structured body of the present invention is a method for inspecting a honeycomb structured body comprising a pillar-shaped honeycomb fired body having a multitude of cells placed in parallel with one another in the longitudinal direction with a cell wall therebetween, the method comprising: measuring the shape of the honeycomb structured body in the longitudinal direction through preparing a contact measurement apparatus including a reference surface, a rail disposed perpendicularly to the reference surface, and a measurement probe including a contacting probe configured to move along the rail; contacting one end face of the honeycomb structured body with the reference surface; and moving the measurement probe in a direction nearing the reference surface to contact the contacting probe with the other end face of the honeycomb structured body.

Abstract: A method for measuring a surface profile using a surface sensing device mounted on an articulating probe head in which the probe head is moved along a nominal path relative to the surface profile, an at least approximation of the surface normal of the surface profile, the surface profile is sensed with the surface sensing device and the distance or force of the surface sensing device relative to the surface profile substantially in the direction of the surface normal. The surface normal may be determined by approximating at least one section to a curved profile which can be mathematically parameterised.

Abstract: An automated mechanism for measuring the amount of accuracy loss attributable to reverse engineering processes that use 3D scan data is discussed. The embodiments provide a mechanism that displays to a user the effect scan data editing and CAD remodeling operations have on scan data accuracy. Additionally, the user can choose the way the graphical display illustrates the error distribution on the model such as by color mapping and whisker mapping. The accuracy loss may be displayed to the user after finishing an editing/modeling command or during the previewing of the command thereby allowing a user to take appropriate action. Parameters may also be adjusted programmatically based on the amount of accuracy loss determined to be attributable to scan data editing or CAD remodeling operations.

Abstract: Contours of a surface of a bearing which extends about an axis are displayed on a grid. To visualize the contours, points on the surface are measured at a plurality of angular positions to determine the corresponding measured values. The measured values at each angular position are normalized to determine a normalized measurement datum corresponding to each angular position. The normalized measurement datum is subtracted from each of the measured values to determine a plurality of deviations of the corresponding points. Shades are assigned that correspond to a range of possible deviations. Each of the deviations are displayed as a data segment on a grid that represents the shape of the surface of the bearing. Each data segment is shaded on the grid to the corresponding shade to provide a topographical representation of the contours of the surface of the bearing.

Abstract: In probing by scanning a workpiece (71) to be measured using a coordinate measuring machine a stylus tip is moved before the scanning along a scanning path (73) along an initialization path (83) or/and after the scanning path (73) along a finalization path (85). A length (Lv, Ln) of the initialization path, respectively finalization path, is chosen in dependence of parameters of a concrete measuring task, in particular in dependence of a pre-determined scanning speed, a stiffness of the stylus or a mass of the stylus.

Abstract: An exemplary contour measuring method for measuring aspects of objects includes: (1) providing a contour measuring probe (10) comprising a tip extension (16), a displacement sensor (19), and a processor (119) connected to the displacement sensor, the tip extension being slidable in a first direction; (2) driving the tip extension to move so as to contact with the object at a first predetermined point, and recording a coordinate of the first predetermined point in the processor; (3) driving one of the tip extension and the object to move, thus, the tip extension contacting with the object at a second predetermined point, the displacement sensor sensing a displacement of the tip extension along the first direction and sending the displacement to the processor, and the processor recording a coordinate of the second predetermined point; and (4) repeating the step (3), the processor recording a series of measured coordinates of points.

Abstract: A temporary fastener includes a grip length indicator. By machining a flattened area into a body of the temporary fastener, by engraving an scale into the flattened area, and by attaching an indicator dot visible in the groove to a moving part of an internal assembly of the temporary fastener, the grip length of the installed temporary fastener may be read directly on the scale while the temporary fastener applies a clamp-up force to a structure. By using the temporary fastener of the present invention, it is possible to determine a fastener hole length while a temporary fastener is installed. Using the method for determining a fastener grip length of the present invention enables the effective determination of the correct fastener grip length for each particular fastener hole of a large structure, such as an aircraft airframe.

Abstract: On a machine tool, a program receives data from a scanning or analogue probe, measuring a feature of a workpiece. This data is combined with assumed machine position data during the scanning movement. This avoids having to break into the servo feedback loop to get actual measured machine position data. The assumed machine position data can be derived from a part program which controls the scanning movement. Several ways are described for compensating for errors between the assumed machine position values and the actual values.

Abstract: A process for machining a blank from all directions with a machine tool, such as a milling machine, involves the machining from all directions being based on a three-dimensional template. In a first step, the three-dimensional form and, if need be, also the surface finish of the three-dimensional template may be automatically measured, and the associated data may be saved. In a second step, a blank may be held by at least one clamping adapter and a first region is brought into its final, ready to use partial form by the machine tool or the milling machine using said data for numerical control. In a third step, the partially machined blank may be held by at least one clamping adapter in the first, finally machined region and the remaining region may be brought into its final, ready to use overall form by the same machine tool or milling machine.

Abstract: A peripheral surface shape measuring apparatus of a roll-like object which measures a peripheral surface shape of the roll-like object such as a magnetic tape bulk roll, comprising a pair of receiving portions on which both ends of a core of the roll-like object are placed, a receiving portion horizontally moving device which moves the pair of receiving portions in an axial direction of the roll-like object, a receiving portion vertically moving device which moves up and down the pair of receiving portions, a position sensor having a probe with a tip urged in a direction of abutting against a surface of the roll-like object to measure the peripheral surface shape of the roll-like object and a sensor moving device which moves the position sensor in the axial direction of the roll-like object.

Abstract: A shape measuring instrument is provided as being capable of measuring a surface shape of a target with a small contact force while changing the contact force. A measuring probe 32 is supported while a tilt ? is provided. A retracting force of the measuring force 32 is produced by the tilt ?, and thus, is obtained as mgsig ? which is much small as compared with a self weight “m”. On the other hand, biasing is provided with an extruding force Fc by means of an air cylinder 40. Thus, a contact force of the measuring probe 32 relevant to a work piece W is obtained as a difference between a measuring probe self weight tilt component mgsig? and the extruding force Fc of the air cylinder 40 (F=Fc?mgsig?), thus making it possible to reduce a contact force to be very small.

Abstract: Methods and apparatus for inspecting a component are provided. The method includes receiving a plurality of data points that define a shape of the component, fitting the received data points to a curve that defines a predetermined model shape, and comparing the received data points to the curve defining the predetermined model shape to determine a break radius of the component.

Abstract: In a flatness measurement apparatus, a sensor unit having a flatness-detection sensor is slidable along the linear guide rail. A support system supports the linear guide rail such that the linear guide rail is rotatable in a horizontal plane, whereby a surface of a wafer stage to be measured is scanned all over with the sensor unit having the flatness-detection sensor so as to ensure a flatness measurement of the whole surface of the wafer stage.

Abstract: A method an apparatus for measuring the depths of many fine holes formed in the surface of a sample by etching. Positional information on a plurality of hole patterns is acquired by scanning, with a stylus, the surface of the sample in which the hole patterns are formed by etching. The depths of the plurality of hole patterns are measured by scanning, with the stylus, bottom faces of the plurality of hole patterns and the surface of the sample in the respective vicinities of the hole patterns on the basis of the positional information that has been acquired. Information on distribution of the depths of the plurality of hole patterns is displayed on a screen on the basis of information on the measured depths of the plurality of hole patterns and the positional information on each of the hole patterns.

Abstract: A dimensional gage adapted to make measurements on a workpiece has a fixed member, a spindle assembly comprising a hollow spindle which receives the fixed member and is rotatable with respect to the fixed member, a motor which rotates the spindle assembly, and a sensing assembly attached to the fixed member and adapted to measure one or more dimensions of the workpiece. The dimensions may be measured both statically and dynamically, and the sensing assembly can have separate sensor assemblies for each dimension to be measured.

Abstract: In a calibration method for a surface texture measuring instrument which measures a surface of a workpiece and includes an arm that is supported to be swingable around a base point thereof and is provided with a contact point at an end for scanning the workpiece surface, the calibration method includes a measurement step for measuring a calibration gauge of which cross section contains a part of a substantially perfect circle, an assignment step for assigning the detection results, which are obtained in the measurement step, in an evaluation formula based on a circle equation in which the center coordinates of the calibration gauge are (xc, zc) and the radius is “r”, and a calibration step for calibrating each parameter based on the evaluation formula obtained in the assignment step.

Abstract: A surface profile measuring instrument for measuring a surface profile of a workpiece has: a probe having a stylus provided with a measuring portion for measuring a surface of a workpiece at a tip end thereof and a detector for outputting a detection signal which varies depending on a measurement condition between the surface of the workpiece and the measuring portion; a scanning mechanism for relatively moving the measuring portion along the surface of the workpiece; a memory (46) that stores a position information of the contact portion when the detection signal reaches a predetermined reference signal value; a vibration inclination angle calculator (51) that calculates a response variation factor (vibration inclination angle ?) that applies variation to the detection signal from the surface of the workpiece; and a profile processor (53) that corrects the position information to obtain an actual profile of the surface of the workpiece using the response variation factor.

Abstract: A measuring probe for obtaining positional information on a measuring target face has: a movable member having a contact portion which is formed in its top and comes into contact with the measuring target face and a reflecting plane formed on its base end for reflecting a measuring light beam; a magnetic substance mounted on the movable member; a fixed member disposed in a fixed state; a bearing provided on the fixed member for supporting the movable member movably in axis line direction; and a magnetic force generating portion provided on the fixed member for generating force acting upon the magnetic substance to move the movable member in the axis line direction. The movable member is formed from a nonmagnetic material, and the bearing and the fixed member are formed from a magnetic material.

Abstract: A method of calibrating a probe mounted on a machine in which the probe has a probe calibration matrix which relates the probe outputs in three orthogonal axes to the machine's X, Y and Z coordinate system. A datum ball mounted on the machine is bi-directionally scanned by the probe in one or more planes. For each plane, the mean direction of two approximate probe vectors in the plane is rotated about an axis orthogonal to that plane until the apparent material condition from the scan in each direction is the same. This process may be iterative. The mean values of the directions of the probe vectors for each plane are rotated, thus forming a corrected probe calibration matrix. The datum ball is preferably bi-directionally scanned in three orthogonal planes.

Abstract: A polar coordinate-based profilometer includes a base, a rotary stage, a linear stage, and a probe device. The rotary stage is mounted on the base and includes a rotary table rotatable about a vertical axis oriented orthogonal to the base. The linear stage is mounted on the rotary table and is rotatable therewith. The linear stage includes a linear slide member that is translatable along a radial axis orthogonal to the vertical axis. The probe device is mounted on the linear slide member and is translatable therewith. The probe device includes a probe tip that is linearly displaceable along the radial direction and communicates with a linear displacement-sensing transducer. Alternatively, the probe device scans an object without contacting the object. Methods are provided for measuring an object based on polar coordinates, and correcting for misalignment prior to measurement.

Abstract: An inspection device includes a mount that secures the inspection device to the object for travel along the object, a sensor attached to the mount that measures characteristics of the object, and a position indicator attached to the mount that determines the position of the inspection device on the object.

Abstract: An inspection device includes a mount that secures the inspection device to the object for travel along the object, a sensor attached to the mount that measures characteristics of the object, and a position indicator attached to the mount that determines the position of the inspection device on the object.

Abstract: In advance to measuring texture of the workpiece by a surface texture measuring machine (1), a workpiece orientation adjustment stage (10) is manually moved by the surface texture measuring machine (1) in accordance with calculated orientation correction amount of the workpiece, thus adjusting orientation of the workpiece. Since it is only necessary for an operator to operate respective adjustment means until reaching a displayed correction amount, operation thereof can be facilitated and orientation thereof can be highly accurately adjusted without impairing operability.

Abstract: A polar coordinate-based profilometer includes a base, a rotary stage, a linear stage, and a probe device. The rotary stage is mounted on the base and includes a rotary table rotatable about a vertical axis oriented orthogonal to the base. The linear stage is mounted on the rotary table and is rotatable therewith. The linear stage includes a linear slide member that is translatable along a radial axis orthogonal to the vertical axis. The probe device is mounted on the linear slide member and is translatable therewith. The probe device includes a probe tip that is linearly displaceable along the radial direction and communicates with a linear displacement-sensing transducer. Alternatively, the probe device scans an object without contacting the object. Methods are provided for measuring an object based on polar coordinates, and correcting for misalignment prior to measurement.

Abstract: A method of adjusting the relative attitude of a work in a surface texture measuring instrument for measuring the work having a feature region includes a measurement step of performing measurement of the feature region along an X-axis direction after positioning a detector in a Y-axis direction and the X-axis direction, a determination step of repeating the measurement which is performed while changing the position in the X-axis direction, and a step of adjusting the attitude of the work on the basis of the amount of relative attitude correction. Therefore, the direction of the feature region in the work is adjusted so as to be parallel to the Y axis.

Abstract: The surface shape measuring apparatus comprises a polar coordinate conversion portion for converting the orthogonal coordinate data representing the surface shape of a measurement object into the polar coordinate data, an approximate expression calculating portion for calculating an approximate expression on the basis of the polar coordinate data employing the Zernike's polynomial, an angle calculating portion for calculating angles representing the generating line and principal directions, a first approximate sectional shape calculating portion for calculating approximate sectional shapes in the generating line and principal line directions based on the calculated angles, a second approximate sectional shape calculating portion for calculating the center coordinates and the radiuses of curvature for the approximate sectional shapes, and a sectional shape data calculating portion for calculating the numerical data of approximate sectional shapes in the generating line and principal line directions on the

Abstract: An apparatus (20) for measuring alignment and tilt of a CRT neck (14) attached to a recycled CRT funnel portion (11) includes a support structure (21) that engages and supports a seal edge (24) of the CRT funnel portion (11), and a plurality of stopper pads (28-30) which engage respective alignment stoppers (34-36) molded on the CRT funnel portion (11). Distance measuring gauges (45-48) contact lower and upper points on two sides of the CRT neck (14). The alignment of the CRT neck (14) is determined by readings from the lower gauges (45, 47) on the first and second sides of the CRT neck (14). The tilt of the CRT neck (14) is measured by comparing the readings from the lower and upper gauges (45-48) on each of the first and second sides of the CRT neck. The stopper pads (28-30) on the support structure (21) can be changed to accommodate different sizes of CRT funnel portions (11, 11′).

Abstract: A fine feed mechanism (50) and a coarse feed mechanism (60) respectively for minutely and greatly displacing a stylus (12) is provided to a microscopic geometry measuring device (1), so that the respective mechanisms (50, 60) are combinedly actuated for easily controlling the movement of the stylus (12) in a wide range at a short time. Further, a movable balancing portion (53) moving in a direction opposite to a movable driving portion (52) is provided to the fine feed mechanism (50). Since a reaction force caused by the movement of the movable driving portion (52) is cancelled by another reaction force caused by the movement of the movable balancing portion (53) at a fixed portion (51), no mechanical interference is caused between the respective mechanisms (50, 60), thus accurately controlling the movement of the stylus (12).

Abstract: A measuring apparatus for a pulley which features a workpiece holding post, a slide table and a measuring post which are controlled and moved by a controlling board. A probe tip extends from a detecting head of the measuring post and, in operation, is brought into contact with the portion to be measured to carry out the copying measurement which involves one or more measurements directed at the groove diameter of the ball groove, angle of the intersection, a divided angle, over-ball diameter, between diameter, lead deviation, run-out, concentricity, tapered angle of the conical surface, straightness of the conical surface, and deviation of the conical surface.

Abstract: The disclosed invention is an improvement on the traditional measuring wheel. When the odometry information is combined with two robust attitude sensors and an on-board computer, the instrument is able to perform useful measurements such as the calculation of an area or the description of a non-linear contour, as well as the traditional distance measurements and other uses.

Abstract: A system and method are disclosed for determining properties of a feature located at a surface of a substrate. A plurality of probe tips are operable to traverse a surface of the substrate and provide measurement data indicative of topographical features scanned thereby. The measurement data obtained from the plurality of probe tips is aggregated and processed to determine feature properties, such as may include line edge roughness and/or linewidth.

Abstract: A surface configuration measuring method is provided, the surface configuration measuring method being characterized in having the steps of: moving a touch signal probe by a command velocity vector to touch a surface of the workpiece to be measured; scanning the surface of the workpiece to be measured, the touch signal probe being moved along the surface to be measured while controlling the distance relative to the surface to be measured so that detected amplitude value of a detection signal outputted by the detecting circuit becomes a predetermined reference value, thus outputting the detected amplitude value and corresponding measuring position; and calculating an estimated surface position based on the detected amplitude value and the measuring position estimated to be obtained when surface is scanned to keep the detected amplitude value constant.

Abstract: An apparatus for determining physical and geometrical defects in motor vehicle wheel rims and tires comprises at least one measurement unit to be associated with a self-centering unit of the vertical axis of a tire removal machine, in order to occupy a rest position in which it lies outside the operational region of the self-centering unit and a working position in which it can assume a first measuring configuration in which it is in light contact with a bead retaining flange of the wheel rim of that wheel at that moment, mounted on the moving self-centering unit, and a second configuration in which it is in light contact with the tread of the tire of the mounted wheel, the at least one measurement unit being connected to a system for collecting and displaying the data obtained.

Abstract: A Stylus 1 is moved along the surface of a workpiece 20 and the surface texture of the workpiece 20 is measured based on the displacement of the stylus 1 in the Z direction. A spherical reference gage of known radius is measured with the stylus 1 in advance and radius values r of the tip sphere of the stylus 1 are calculated according to angle by subtracting the radius R of the reference gage from the measured values. The actual contour of workpiece 20 is calculated by using the radius values r as the correction data according to angle and subtracting the correction values according to angle and subtracting the correction values according to angle from the measured data obtained by movement along the surface of workpiece 20.

Abstract: A fine feed mechanism (50) and a coarse feed mechanism (60) respectively for minutely and greatly displacing a stylus (12) is provided to a microscopic geometry measuring device (1), so that the respective mechanisms (50, 60) are combinedly actuated for easily controlling the movement of the stylus (12) in a wide range at a short time. Further, a movable balancing portion (53) moving in a direction opposite to a movable driving portion (52) is provided to the fine feed mechanism (50). Since a reaction force caused by the movement of the movable driving portion (52) is cancelled by another reaction force caused by the movement of the movable balancing portion (53) at a fixed portion (51), no mechanical interference is caused between the respective mechanisms (50, 60), thus accurately controlling the movement of the stylus (12).

Abstract: A method and an apparatus for measuring dimensional rough stone blocks. In the method, a dimensional rough stone block is measured in a three-dimensional coordinate system by means of an inertia measuring device by moving the device from one point to another on the surface of the stone block to be measured. The apparatus comprises an inertia measuring device and a calculating device with which it is possible to calculate the dimensions of the stone block based on the coordinate values of the points measured by the inertia measuring device.

Abstract: Method for measuring the surface shape of a thin element such as a silicon wafer measures the surface shapes of one surface and the other surface of the thin element by independently measuring the distance each to one surface and to the other surface of the thin element by rotating or moving the thin element within a single plane and independently moving the first and second measuring means along the first and second guide shafts. Apparatus for measuring the surface shape of the thin element measures the surface shapes of one surface and the other surface of the thin element by rotating or moving the thin element supported within the same plane by a supporting means, and independently measuring the distance each to one surface and to the other surface of the thin element by the first and second measuring means while independently moving the first and second sliders along the first and second guide shafts.

Abstract: An automated mechanism for measuring the amount of accuracy loss attributable to reverse engineering processes that use 3D scan data is discussed. The embodiments provide a mechanism that displays to a user the effect scan data editing and CAD remodeling operations have on scan data accuracy. Additionally, the user can choose the way the graphical display illustrates the error distribution on the model such as by color mapping and whisker mapping. The accuracy loss may be displayed to the user after finishing an editing/modeling command or during the previewing of the command thereby allowing a user to take appropriate action. Parameters may also be adjusted programmatically based on the amount of accuracy loss determined to be attributable to scan data editing or CAD remodeling operations.