Abstract: A rotary encoder includes a first component group and a second component group, the two component groups being rotatably arranged relative to each other in a measuring operation. The first component group has a detector system, a housing part having at least one wedge-shaped element, and a clamping ring having at least one cam. The second component group includes a code disk and a shaft. The housing part is arranged radially outside of the shaft, and a force having a radial directional component oriented toward the axis is applicable on the at least one wedge-shaped element via the at least one cam by a turning motion of the clamping ring relative to the housing part such that the shaft is able to be clamped on the housing part outside of the measuring operation.

Abstract: A method of calibrating a scale measurement apparatus. A scale has scale markings arranged to form an incremental pattern and at least one scale mark. A readhead has an incremental detector means which produces an output signal and a scale mark detector means for producing a signal having a zero crossing. The readhead is moved relative to the scale. The output from the incremental detector is used to determine a predetermined phase in the output signal and the value of the signal from the scale mark detector corresponding to the predetermined phase in the output signal from the incremental detector on either side of the zero crossing is determined. These values are used to define the width of the scale mark pulse.

Abstract: Disclosed herein is a magnetic scale including a pipe, a strip-shaped magnetic member having a one side surface in the direction across the thickness thereof as a contact surface adapted to be closely attached to the inner surface of the pipe and the other side surface opposite to the one side surface as a back surface, the magnetic member being inserted in the pipe so as to extend straight in the longitudinal direction of the pipe, the magnetic member being formed with magnetic marks provided by a plurality of N poles and S poles alternately arranged in the longitudinal direction of the magnetic member, and a retainer member inserted in the pipe to press the back surface of the magnetic member toward the contact surface of the magnetic member, thereby maintaining a closely contact condition of the contact surface to the inner surface of the pipe. Accordingly, the magnetic member can be reliably protected to thereby improve its durability.

Abstract: A low cost digital ruler with desirable ergonomic characteristics and accuracy. A low friction sliding position indicator includes a compliant element that forces its connection pads against the ruler's electronic scale contacts, to determining measurement positions. The position indicator includes an instrument receiving feature that engages a writing instrument and moves in conjunction with it, thereby measuring a line as it is drawn. A position indicator preload arrangement includes the compliant element, which is deflected to exert a preload that forces the sliding position indicator against a housing of the digital ruler. Alignment features of the position indicator and housing have cross sections that provide a self-aligning angled interference fit, which accurately aligns the sliding position indicator, under the action of the preload force. Misalignment constraint surfaces constrain the sliding position indicator in approximate alignment by, even if an external force overcomes the preload force.

Abstract: First, an inner tube member is accommodated in an outer tube member. Then, rigid powder, having high rigidity and a hard-to-magnetize characteristic, into the inner tube member. Next, magnetic powder is filled into a recessed portion of the inner tube member. Then, the inner tube member is drawn out of the outer tube member. Then, a composite filler composed of the rigid powder, magnetic powder and outer tube member is subjected to a cold hydrostatic pressure pressing process as pre-processing. Next, the composite filler is heated and solidified into a billet. Then, the billet is subjected to a hot extrusion process so that it is formed into a bar-shaped workpiece. The bar-shaped workpiece is rolled onto a roller, and then the outer tube member is peeled off. Next, the bar-shaped workpiece is subjected to a cutting process so that it is formed into an elongated bar. Then, a magnetic section of the elongated bar is magnetized into a scale structure.

Abstract: A power table saw of the type which has a generally rectangular table with front and rear end portions, a motor operatively coupled to drive a rotary cutting blade extending upwardly through a top of the table, the table saw including an elongated fence having front and rear end portions, and being configured to be laterally movable along the width of the table and be secured to the front and rear end portions of the table, front and rear releasable locking mechanisms operatively associated with the front and rear end portions of the fence for locking each end portion to the end portions of the table, and at least one positional sensor provided with each of the front and rear end portions of the fence for determining the lateral position of each end portion of the fence along the width of the table.

Abstract: A linear position transducer reliably and wirelessly tracks rapid motion. The transducer includes a scale, a control head, and a wirelessly-powered read head disposed proximate to the scale. The read head is configured to sense movement between the scale and the read head and to wirelessly communicate position data to the control head. The control head can include a wireless data receiver to receive position data from the read head, an output data driver to communicate with an external device, and a microcontroller to coordinate a data transfer between the wireless data receiver and the output data driver. In addition, the read head can include a wireless data transmitter to transmit position data to the control head, a linear position sensor to sense position along the scale, and a microcontroller to calculate a position measurement from the scale. The microcontroller in the read head can also coordinate a data transfer between the wireless data transmitter and the control head.

Abstract: A scanning unit including a light source for illuminating a scale by a light beam and a detector for detecting the light beam which has been modulated by the scale as a function of a relative position between two objects. An inner chamber of the scanning unit in which the light beam extends is closed off in a dust-proof manner against an outer chamber, and the inner chamber is closed off by a transparent body, through which the light beam passes. The inner chamber is connected with the outer chamber via a filter which is dust-proof, but permeable to gas and vapor.

Abstract: A securing system for transporting and mounting a measuring instrument for the determination of a position of two components which are movable in relation to each other. The securing system including a securing device and a support body having a guide track and supporting a linearly extending measuring graduation. The securing device includes a base body, which is longitudinally displaceable along the guide track of the support body and can be fixed in place on the support body by clamping forces in order to maintain the mounting base in a desired position in regard to the support body.

Abstract: Scale reading apparatus having a scale and readhead moveable relative to one another. The scale has a first incremental scale pattern with a fine pitch and a second incremental scale pattern with a coarse pitch. The readhead has a detector to detect each of the incremental scale patterns. The scale reading apparatus can be used for both slow speed and fast speed measurements. The second incremental scale pattern may be provided in a scale track which has a dual function (e.g. limit track or reference mark) and the readhead may be configured to decode the signal to produce an output suitable for the desired function.

Abstract: A stage device is equipped with a first scale which is placed with a Y-axis direction serving as its longitudinal direction and in which a first grating whose periodic direction is in an X-axis direction is formed and a second scale which is placed with the X-axis direction serving as its longitudinal direction and in which a second grating whose periodic direction is orthogonal to the periodic direction of the first grating is formed, the first scale and the second scale being placed on a plane which a wafer stage faces. Further, on the upper surface of the wafer stage, a plurality of X heads placed at different positions in the X-axis direction and a plurality of Y heads placed at different positions in the Y-axis direction are arranged. An encoder system that has these heads measures positional information of the stage within an XY plane, based on an output of the X head facing the first scale and an output of the Y head facing the second scale.

Abstract: An elevator installation with at least one car includes at least one device for determining a position of the car and a method of operating such an elevator installation. The position determining device has a code mark pattern and a sensor device. The code mark pattern is arranged along the length of travel of the car and consists of a multiplicity of code marks. The sensor device is mounted on the car and has sensors contactlessly scanning the code marks. The code marks are arranged in a single line and the sensor device comprises at least two sensor groups which are separated from each other perpendicular to the line of the code marks, which makes reading the code marks possible even if there are lateral displacements between the sensor device and the line of the code marks.

Abstract: A measuring arrangement including a support and a scale having a measuring graduation, wherein the scale is fixed on the support by a mounting force generated via electrostatic clamping.

Abstract: An elevator installation, and a method of operating such an elevator installation, has at least one car and at least one equipment for detecting a car position wherein the equipment includes a code mark pattern and a sensor device. The code mark pattern is mounted along the travel path of the car and has a plurality of code marks arranged in a single track. The sensor device is mounted at the car and contactlessly scans the code marks with a plurality of sensors arranged in a single track.

Abstract: The present invention Provides a position detector includes a scale provided with a recording medium recorded with information for position detection; a slider disposed to face the recording medium of the scale and to relatively travel along an elongate direction of the scale and provided with a detection sensor for detecting the information of the recording medium, a carrier for carrying the slider, and a posture control mechanism disposed between the carrier and the slider to control slider posture relative to the scale. The posture control mechanism is located on a straight line being vertical to a plane provided with the recording medium facing the detection sensor and passing the detection sensor and biases the slider toward the scale in the direction of the straight line for posture control. The slider is provided with a guide restricting section slidably contact with the scale to restrict a biasing force of the posture control mechanism.

Abstract: An optical position measuring arrangement for detecting the position of a first object and a second object which are movable in relation to each other in a measuring direction. The optical position measuring arrangement including a scale which is connected with the first object, the scale including an incremental graduation extending in the measuring direction and having the graduation period (TPINC). The optical position measuring arrangement including a reference marking at a reference position, wherein the reference marking includes a structure with a graduation period (TPREF), which changes locally, wherein the reference marking has a mean graduation period (TPREF,m) within a range of the graduation period (TPINC) of the incremental graduation. A scanning unit connected with the second object and including a scanning system for generating a reference signal at the reference position.

Abstract: A linear measuring arrangement for measuring a relative position of two objects, the linear measuring arrangement including guide surfaces, a scale having a measuring graduation and a scanning carriage for scanning the measuring graduation, wherein the scanning carriage is linearly guided in a measuring direction on the guide surfaces. The linear measuring arrangement further including a carrier device which can be fastened to one of the two objects and a coupling, by which the scanning carriage is coupled to the carrier device rigidly in the measuring direction and transversely thereto resiliently. The coupling includes a first coupling element, having a first coupling face, arranged on the scanning carriage and a second coupling element, having a second coupling face, arranged on the carrier device, wherein the second coupling face contacts the first coupling face and wherein at least one of the first and second coupling elements is made of a ceramic material at least in an area of a contact.

Abstract: A guide rail for a linear bearing has a longitudinal axis, a first and second diametrically opposed lateral surface and a top lateral surface, running surfaces provided on the first and/or second lateral surfaces and extending parallel to the longitudinal axis, for a guide carriage of the linear bearing, and an incremental dimensional standard for a position measuring device provided on one of the lateral surfaces, wherein an absolute dimensional standard is provided on another lateral surface, which is scanable by the position measuring device together with the incremental dimensional standard in order to determine an absolute position.

Abstract: A method for assembling a position measuring arrangement for measuring a relative position of a first object with respect to a second object, wherein the position measuring arrangement includes a first unit movable in relation to a second unit of the position measuring arrangement, the method including fastening said first unit to the first object and fastening the second unit to the second object. The method further including adjusting a required scanning distance (A) between a scanning element of the second unit and a graduation of the second unit by applying a gauge to a first limit stop face of the first unit, as well as to a second limit stop face of the second unit. Prior to the fastening the first unit and the fastening the second unit, positioning and fixing either the first limit stop face on the first unit or the second limit stop face on the second unit in a direction of the required scanning distance so that the scanning distance (A) is optimally adjusted.

Abstract: Laser interferometers and high-quality linear encoders both are competitive linear measurement systems used in high-precision machines. Plane laser interferometry allows measuring to a target that moves perpendicular to the measurement direction and to set up the laser beam in line with the functional point. In this way, a stacking of measurement systems can be avoided and a measurement configuration complying with the Abbe principle can be configured. On the other hand, laser interferometry is known to be sensitive to environmental changes. High-quality linear scales are used as an alternative. A disadvantage of linear scales is that the target is only allowed to move along the measurement axis. For targets translating in more than one direction with a range over several millimeters, this leads to a simple stacking of several linear scales together with the supporting slides. This indirect way of measuring introduces errors and partially destroys the accuracy provided by modern linear scales.

Abstract: A linear measuring arrangement for measuring a relative position of two objects. The linear measuring arrangement includes a unit having a housing and a scale in the housing and a scanning unit, which can be shifted relative to the unit in a measuring direction, wherein the scanning unit is arranged inside the housing and includes a heat-generating electrical component. The arrangement further includes a mounting piece, which is fastened to the scanning unit by a coupling, which is rigid in the measuring direction and resilient transversely thereto, and which extends to a mounting area arranged outside of the housing. The arrangement further includes a heat-conducting element, which is designed for transferring heat generated by the heat generating electrical component to the mounting piece and permits relative movements between the mounting piece and the scanning unit at least transversely to the measuring direction.

Abstract: A scanning system of a position measuring device for photo-electric scanning of a measuring graduation, the scanning system including a support carrying measuring components, an adapter including a scanning graduation in a graduation plane and a holder that holds the support on the adapter. The holder is structured so that the support is stationarily positioned on the adapter in six degrees of freedom, but compensates thermally caused expansion of the support in relation to the adapter in a first coordinate direction and a second direction which define the graduation plane.

Abstract: A position measuring arrangement that includes an arrangement of scanning elements for scanning an absolute code and a selection system for selecting scanning signals from the arrangement of scanning elements by a first method of selection and a second method of selection different from the first method of selection. The position measuring arrangement further includes a decoding device for forming a first absolute measured position value from the scanning signals selected by the selection system when the first method of selection is applied to the selection system and a second absolute measured position value from the scanning signals selected by the selection system when the second method of selection is applied.

Abstract: The invention relates to a gyroscope production method and to the configuration of a gyroscope thus produced. More specifically, the invention relates to a method of producing a base (15, 35) for a scale (24, 44) on a gyroscopic ring (3, 7) belonging to a gyroscopic suspension of an arm of a parallel kinematic machine, said gyroscopic ring (3, 7) being provided with bearing pins (5, 9). According to the invention, the bearing pins (5, 9) are worked in a secure fixed state and the base (15, 35) for the scale (23) is also worked in the same fixed state, without said state being changed between the working of the bearing pins (5, 9) and that of the base (15) for the scale (24, 44). The invention also relates to a scale configuration produced using the aforementioned method.

Abstract: A side seal fixing unit 24, which is made up of a U-shaped pressing member 25 which presses and holds a side seal 20 against a lubricant application member 22, a pivot shaft 26 provided at one end portion of the pressing of the pressing member 25 along a height diection of a guide rail 10 and a support plate 27 which supports rotatably the pressing member 25 via the pivot shafty 26 is provided between an end cap 17 and the lubricant application member 22.

Abstract: A method is for initializing a position-measuring system for an object movable in at least two degrees of freedom relative to a measuring frame. The position-measuring system includes one position-measuring device per degree of freedom, including a scale having an incremental track for measuring relative positions and an absolute track for measuring absolute positions, as well as scanning heads, assigned to the scales, for reading the incremental tracks and absolute tracks. In an initialization step, the incremental tracks are evaluated using a first evaluation procedure having a large tolerance with respect to the alignment of scanning head and associated scale, and in so doing, approximate absolute positions are determined per degree of freedom. In an alignment step, the movable object is aligned relative to the measuring frame based on the approximate position.

Abstract: A scale for a scale reading apparatus has a scale track with scale marks which form an incremental scale. The scale also has a set of reference marks. The scale has at least one additional track and different combinations of markers in the at least one additional track have different functions, for example reference mark enablers and right and left limit switches.

Abstract: The invention relates to an oblong signal strip (1), comprising signalling sections (2, 3) along the longitudinal extent thereof, each comprising at least two different pieces of information, referring to an optical property, a magnetic property or a property relating to a reflection of electromagnetic waves from the signalling section (2, 3), as determined by at least one sensor device (7-9). Information relating to the same property in alternating signal sections (2, 3) are different from each other. The signal strip (1) is applied to a system for determining a movement status of a moving body, in particular, a car (6) of a lift system (4).

Abstract: A magnetic scale is disclosed wherein a magnetic member is protected with certainty to effectively enhance the durability. The magnetic scale includes a magnetic member provided between outside and inside pipe members and has magnetic graduations magnetized alternately with the N and S poles along the extending direction thereof. When the magnetic member and the inside pipe member are assembled in the outside pipe member, the inside pipe member contacts partly with an inner face of the outside pipe member and partly with a back face of the magnetic member in such a manner as to cover the overall back face. The outer face of the inside pipe member presses the back face of the magnetic member over the overall length so that the close contact face of the magnetic member is closely contacted with the inner face of the outside pipe member.

Abstract: A mounting tool that includes a base extending along a first direction that is parallel to a longitudinal dimension of the base and a height gage attached to the base. The height gage includes a first leg attached to the base and extending along a second direction that is not parallel to the first direction and a second leg attached to the first leg and comprising a support portion extending along a third direction that is not parallel to the second direction.

Abstract: A rotary encoder includes two component groups that are rotatably arranged relative to each other about an axis. The second component group includes a shaft having a central bore hole, a shoulder and a ridge having an outer surface, and a ring element having an inner surface and an actuation device. In addition, the rotary encoder has a component, which is arranged between the outer surface and the inner surface of the ring element. Both points on the inner surface of the ring element as well as points on the outer surface of the shaft have different distances with respect to the axis such that, via the actuation device, the ring element rests on the shoulder so that a radial force acts on the ridge via the component and a machine part is clampable.

Abstract: A package measurement apparatus comprising three measurement devices, one for each dimension. Each measurement device comprises a plurality of signal receptor modules. Each module comprises a row of signal receptor, and a signal energy source. In a first calibration step, the outputs of each receptor are standardized to reference maximums and minimums. In a second calibration step, calibration sets of receptor outputs are created and recorded. During measurement, a measurement set of receptor outputs is obtained and matched with a calibration set of receptor outputs to determine the dimension of an object.

Abstract: A rotary ring system for use in scale reading apparatus comprises a rotary ring (12), provided with scale marks on its surface and at least one intermediate member (24). The at least one intermediate member (24) is fitted between the rotary ring (12) and the machine part (10) on which the rotary ring is to be mounted. Application of a force to the at least one intermediate member adjusts the effective radius of the rotary ring. The at least one intermediate member may be tangentially compliant.

Abstract: An elastic fixture which is employed for attaching a length measuring apparatus to an object to be measured having a different linear expansion coefficient therefrom. The elastic fixture is elastically deformable in the lengthwise direction of the length measuring apparatus. The elastic fixture includes a sheet-metal curved beam having one end fixedly attached to the length measuring apparatus and the other end fixedly attached to the object to be measured. The sizes and the machining accuracy of the elastic fixture are less restricted, and the elastic fixture can be manufactured easily. In addition, the elastic fixture is applicable to relatively severe temperature environments in a manual machine tool or the like. Further, the sizes and the cost of the elastic fixture can be reduced as compared with a parallel spring mechanism.

Abstract: An angular displacement sensor. The input shaft is supported by a housing and fixed to a main gear. A plurality of secondary gears are arranged around and meshed with the primary gear. A plurality of displacement sensors are integrally coupled with the secondary gears. Advantageously, the main shaft is formed with a shear notch. Further, each of the secondary gears are coupled to the displacement sensors so as to break free in case of a jam.

Abstract: End caps 3b are made from a resin having an izod impact strength with notch of 10.5 kJ/m2 or greater. Because of this, the occurrence of damage such as chipping or cracking to the end caps can be prevented, thereby making it possible to enhance the durability of the end caps when a linear guide apparatus is driven at high speeds.

Abstract: A rotary ring for use in scale reading apparatus, comprises a flexible ring (10) which has scale markings (14) provided on a surface thereof. The rotary ring is mounted onto a machine part (22) by providing the machine part with a region of increased diameter (26) and stretching or shrinking the flexible rotary scale (10) over said region of increased diameter. The manufacturing tolerance of the rotary scale or differential e.g. thermal expansion is thus taken up by stretching or shrinking it into place. The region of increased diameter may comprise an annular protrusion or an O-ring, for example.

Abstract: A bracket set is for mounting an encoder device to a machine tool. The bracket set includes a first connector connectable to the machine tool; a first member adjustably connected to the first connector, a longitudinal axis of the first member arranged transverse to a longitudinal axis of the first connector; a second member adjustably connected to the first member, a longitudinal axis of the second member arranged transverse to the longitudinal axis of the first member; and a second connector adjustably connectable to the encoder device, a longitudinal axis of the second connector arranged transverse to the longitudinal axis of the second member.

Abstract: A position detecting device includes a plurality of detecting units that detects marks on an object, a plurality of housing units that houses the detecting units, and a holding member that fixedly holds the housing units. A total expansion amount of the housing units due to temperature change is substantially equal to an expansion amount of the holding member between the fixed positions due to temperature change. The total expansion amount represents a total amount of expansion of the housing units from a fixed-position plane including a fixed position to a detection-position plane including a detection position in a direction parallel to a moving direction of the object. The fixed-position plane and the detection-position plane are perpendicular to the moving direction of the object.

Abstract: Rolling element holding members have two holding window for holding rolling elements in rolling element running channels formed between both track faces of a rail and a slider. Further, the rolling element holding members are held between two end caps fixed opposite end surfaces of the slider by engagement of four retaining grooves formed on the end caps and opposite end portions of the rolling element holding members.

Abstract: An apparatus and method are disclosed for measuring the angular or linear displacement of an object. That displacement is transmitted to a movable conductive member, which, in response thereto, is moved to a position at which it electrically contacts one of a plurality of fixed contacts, thereby to complete an electrical circuit that includes a memory location in a read-only memory that contains digital data representing the amount of displacement that correlates to the fixed contact associated with that memory location. That digital data is transferred to an output device for display or additional data processing.

Abstract: An apparatus for the photoelectric measurement of an essentially planar measurement original includes a photoelectric scanner and a positioning arrangement for the two dimensional movement of the scanner over the measurement original positioned on a supporting surface and the positioning at defined measurement locations on the measurement original. The positioning arrangement is constructed as a type of SCARA robot and includes a stationary base, a first and a second movable robot arm and a positioning control. The first robot arm is mounted on the stationary base for rotation by a motor about a first axis of rotation perpendicular to the supporting surface. The second robot arm is mounted at the free end of the first robot arm for rotation by a motor about a second axis of rotation perpendicular to the supporting surface and carries the scanner, and the positioning control is constructed for rotation of the two robot arms according to externally supplied positioning commands.

Abstract: An optical displacement-measuring instrument of a reflection type includes a sensor head movable above a scale in a direction of measurement. This instrument is of a three-grating type that comprises a first optical grating arranged close to a light source, a second optical grating arranged on the scale, and a third optical grating arranged in a photoreceptor. A light diffuser is arranged between the light source and the first optical grating. A collimated light from the light source is diffused at the light diffuser and led to the first optical grating.

Abstract: A position measuring system for determining the position of a first structural component and a second structural component. The position measuring system includes a first support for receiving a first position measuring device, which is set up and provided for being fastened to the first structural component and a second support for receiving a second position measuring device, which is set up and provided for being fastened to the second structural component. The position measuring system further includes a first connector that fastens the first support to the first structural component and a second connector that fastens the second support to the second structural component, wherein the second connector includes a nut, with which a screw can be brought into engagement, wherein the nut is inserted into a recess of the second support.

Abstract: A structure and associated method to accurately read an encoder tape in an encoder system. The encoder system comprises, a read head, a shoe structure adjacent the read head, and an encoder tape. The encoder tape is adapted to be read by the read head. The shoe structure is adapted to locally support the encoder tape and locally dampen a vibration of the encoder tape as the encoder tape is read by the read head.

Abstract: A measuring arrangement including a support and a scale having a measuring graduation, wherein the scale is fixed on the support by a mounting force generated via electrostatic clamping.

Abstract: The invention relates to an industrial truck having a first load-bearing component (12) and a second load-bearing component (14) which are provided such that they can move in relation to one another for the purpose of carrying out a conveying movement, a sensor scale (22) being provided on one of the load-bearing components (14) (scale load-bearing component) for the purpose of detecting the relative movement between the two load-bearing components (12, 14), and a sensor (24), which is designed to detect the sensor scale (22), being provided on the respective other load-bearing component (12) (sensor load-bearing component). The industrial truck is characterized in that the sensor scale (22) is designed integrally on the scale load-bearing component (14) such that a section (14a) of the scale load-bearing component (14) itself is the sensor scale (22).

Abstract: A scanning system of a position measuring device for photo-electric scanning of a measuring graduation, the scanning system including a support carrying measuring components, an adapter including a scanning graduation in a graduation plane and a holder that holds the support on the adapter. The holder is structured so that the support is stationarily positioned on the adapter in six degrees of freedom, but compensates thermally caused expansion of the support in relation to the adapter in a first coordinate direction and a second direction which define the graduation plane.

Abstract: A table saw having various embodiments of a measurement and display system. Several embodiments have at least one fence rail on which a removable fence is movably supported and comprise an elongated sensor strip that is located adjacent the fence rail and a sensing unit that is supported and positioned adjacent to the sensor strip and is capable of providing an electrical signal to a display unit that is indicative of the position of the sensor unit relative to the elongated sensor strip. A processing unit is operatively connected to the sensing unit and display unit to provide a digital readout of the position of the sensing unit. A switch is connected to the processing unit and is adapted to provide a zero or reference setting position.

Abstract: A linear scale attachment device for holding and securely attaching a linear scale on an object to be measured is disclosed. The device includes an aluminum base formed with a holding groove having a larger opening than the width of a linear scale that is fitted in this groove, and a retainer for preventing the linear scale fitted in the holding groove from falling off. The base is permanently attached to the object at one location in the lengthwise direction, and resiliently attached at one or more other locations such as to be pressed in the X and Y directions using a cantilever plate spring. While using an aluminum base, the attachment device allows easy attachment and maintenance of the scale and relieves the effect of thermal stress caused by a difference in the thermal expansion coefficient between the aluminum base and the object.