Abstract: Apparatus for treating items with a treatment gas to decontaminate the items includes a chamber which receives the items. The chamber has a gas inlet in fluid communication with a distribution duct positioned within the chamber. The duct distributes the treatment gas throughout the chamber to prevent gas stratification. The chamber may also have a gas outlet for exhausting the chamber, a treatment gas source providing gas, such as ozone, carbon dioxide, or other treatment gas to the chamber. A vacuum pump is used to lower the pressure within the chamber and a purge pump is used to flush the treatment gas from the chamber upon completion of the treatment. A liquid reservoir is used to maintain a desired humidity within the chamber. A heat exchanger is used to maintain a desired temperature within the chamber, and a fan is used to circulate the treatment gas within the chamber.

Abstract: A detection system assembly is provided. The detection system assembly includes a detector system including a housing having a sample port configured to receive a sample of an unknown substance, a detector assembly in flow communication with the sample port, and a pump in flow communication with the detector assembly. The detection system assembly further includes a dryer cartridge removably coupled to an outer surface of the housing of the detector system. The dryer cartridge is in flow communication with the pump and the detector assembly.

Abstract: A shower drying system directs air downwardly onto the walls, surfaces and/or shower curtain of a shower enclosure. In one embodiment, the air is heated. The movement of the air in the downward direction helps urge droplets of water on the shower surface towards a drain at the lower level of the shower enclosure. Remaining water on the surfaces is evaporated into water vapor that is exhausted from above the shower enclosure, thereby reducing mold and mildew.

Abstract: The invention relates to a method for producing a round container and to a round container configured for said method, which provide faster construction of the round container, mostly independent from the precision of the preliminary work in spite of high final precision, and which provide simple transportation of the components to the construction site. This is accomplished by the invention through setting up wall profiles (2), which are continuous over the wall height of the round container (1) and which have in particular a flat inner surface, continuously along the circumference and by connecting them with one another and with the subsurface in particular through bolting.

Abstract: A clothes treating apparatus is disclosed. The clothes treating apparatus includes a cabinet defining a accommodating space for receiving clothes, an air supplying device for drying air circulating into the accommodating space, and a guide unit for guiding dry air generated by the air supplying device to be uniformly dispersed into the accommodating space.

Abstract: A clothing dryer capable of effectively drying a small amount of substance, and a control method thereof by changing an algorithm of a sensor-dry course, which is configured to control an operation rate, a degree of drying or a temperature of drying, to be adapted to the small load of substance in a case where the substance to be dried has a small load when compared to the entire volume of the clothing dryer, so that the drying efficiency is enhanced regardless of the load of the substance, and a separate option button is provided for a sensor-dry course, so that a small load of substance is dried adaptively to the material characteristic of the substance for a respective dry course, thereby enhancing the drying efficiency.

Abstract: A substrate treatment apparatus is provided. The apparatus may include a process chamber configured to have an internal space, a substrate supporting member disposed in the process chamber to support a substrate, a first supplying port configured to supply a supercritical fluid to a region of the internal space located below the substrate, a second supplying port configured to supply a supercritical fluid to other region of the internal space located over the substrate, and an exhaust port configured to exhaust the supercritical fluid from the process chamber to an exterior region.

Abstract: A method of manufacturing a nozzle part for a hand dryer. The nozzle part has a nozzle body and an air outlet aperture in the nozzle body, and the method includes moulding the nozzle body from plastic as a single part and then post-machining the air outlet aperture in the moulded plastic nozzle body.

Abstract: Provided is substrate processing apparatus including processing chamber that dries substrate W using high temperature and high pressure fluid, raw material accommodating unit that accommodates raw material in liquid state, and supplying unit that supplies the high temperature and high pressure fluid to the processing chamber. The supplying unit includes sealable outer vessel connected to the processing chamber and the raw material accommodating unit, and inner vessel provided within the outer vessel and configured to receive the raw material. The inner vessel is provided with opened holes portions configured to drop down the raw material toward a portion of the outer vessel to be heated. After the raw material is accommodated in the inner vessel, the raw material is contacted with the portion to be heated and then heated. A high temperature and high pressure fluid is then obtained and supplied to the processing chamber.

Abstract: A device for refreshing fabrics by reducing malodors and/or wrinkles without requiring that the fabrics to be put through an entire standard laundry process. The device comprises an extractable drawer which is pulled out of the device to allow for loading of a fabric into a receiving region. The extractable drawer can then be closed transporting the fabric into the interior of the device. A fabric treatment composition is sprayed or otherwise dispensed onto the fabrics when the device is operated. The device comprises an air flow path and a heating element which allows for the fabrics to be treated during use and comprises a passive heat management system within the shell to minimize formation of hot spots and direct air flow away from the side walls. The extractable drawer of the present invention can be positioned to extract laterally or vertically out of the shell of the device.

Abstract: Methods and systems are provided for drying wet biosolids to produce a class A biosolids. Generally described, the method of treating biosolids includes drying a wet biosolids in an indirect dryer to produce a partially dried biosolids and drying the partially dried biosolids in a direct dryer in series with and downstream of the indirect dryer to produce a class A biosolids. The indirect dryer and direct dryer may be operated at an average temperature of greater than about 100° C. and may have a total combined residence time of less than about 60 minutes. Also provided are systems for drying wet biosolids including an indirect biosolids dryer and a direct biosolids dryer in series. The methods and systems are particularly effective at reducing the moisture content of the biosolids from greater than 85% to less than 10% by weight.

Abstract: An heat pump drying machine has a normal dry mode (e.g., compression ratio is equal to or greater than 3) for operating a compressor at a predetermined dry operation frequency and an energy saving dry mode (e.g., compression ratio is equal to or greater than 2.3 and is less than 3) for operating the compressor at an energy saving operation frequency that is lower than the dry operation frequency. A control device is provided to control an operation frequency of the compressor 5so that the two dry operation modes are switched to each other. The control device can execute the control for increasing the operation frequency of the compressor to the dry operation frequency during the operation of the energy saving dry mode.

Abstract: An enclosure for storing of moisture sensitive devices (MSD's). The enclosure includes a plurality of compartments, each continuously purged with dry air supplied by a commercially available de-humidifier. MSD's housed in said compartments are thus protected from absorbing moisture which could cause cracking of the devices after being mounted on printed circuit boards and subjected to the high temperatures associated with wave solder and solder reflow processes.

Abstract: The present invention provides grain-drying facilities which can effectively use the heat energy of a biomass combustion hot-air that has been generated in a biomass combustion furnace.

Abstract: According to one embodiment, a supercritical drying method for a semiconductor substrate, comprises introducing the semiconductor substrate into a chamber in a state, a surface of the semiconductor substrate being wet with alcohol, substituting the alcohol on the semiconductor substrate with a supercritical fluid of carbon dioxide by impregnating the semiconductor substrate to the supercritical fluid in the chamber, and discharging the supercritical fluid and the alcohol from the chamber and reducing a pressure inside the chamber. The method further comprises performing a baking treatment by supplying an oxygen gas or an ozone gas to the chamber after the reduction of the pressure inside the chamber.

Abstract: A drying system for drying a personal hydration system having a fill opening and a supply tube includes a dryer assembly providing a flow of forced air to be introduced into the fill opening of the personal hydration device. The dryer assembly includes seal-forming structure engageable with the fill opening to form a seal between the dryer assembly and the fill opening to enhance the pressurization and inflation of the personal hydration system. The dryer assembly also includes a channel defining a relief valve for permitting exhaust of air flow from the fill opening upon pressurization and inflation of the personal hydration system. The dryer assembly further includes a resilient cam arm for enabling the dryer assembly to sealingly fit variously sized fill openings.

Abstract: A drying system for a dishwasher including a passive vent assembly mounted to a top portion of the dishwasher. The passive vent assembly includes a passive vent structure having a series of air vents defined therein and through which drying air flows are drawn into the wash chamber of the dishwasher, a diffuser mounted over the air vents and including a series of fins for spreading the drying air flows across the wash chamber, and a moisture trap hood mounted over an upper surface of the passive vent structure.

Abstract: A dual path kiln is provided that includes a kiln having one or more chambers and at least two lumber charge paths adapted to convey lumber through the kiln in opposite directions by means of a track having two rails in which a pusher device pushes the lumber through the kiln and comprises a variable output electric motor to effect a high degree of accurate control of the movement speed of the pusher device and the lumber it's pushing and wherein the pusher device includes a faceplate having two side walls extending from said faceplate to engage the side of the lumber in order to greatly enhance stability of the lumber while it is being transported and minimize the risk of spillage.

Abstract: Apparatus and methods for separating volatiles from particulates are provided. The apparatus includes a separator having an internal volume and a fluid discharge outlet, a particulate discharge outlet, a particulate inlet, and a fluid inlet disposed on the separator and in fluid communication with the internal volume. The particulate inlet is disposed toward a first end of the separator and the fluid inlet is disposed toward a second end of the separator. The fluid inlet includes one or more openings disposed through a sidewall of the separator.

Abstract: In one aspect, a substrate processing apparatus is provided. The apparatus comprises a mechanism for forming a meniscus on a surface of a substrate by moving the substrate through a fluid; an air knife apparatus positioned to apply an air knife to shorten the meniscus formed on the surface of the substrate; and a drying vapor nozzle positioned to direct a drying vapor to the meniscus shortened by the air knife. Numerous other aspects are provided.

Abstract: The present invention is related to an UV LED curing apparatus, and more particularly, to a portable UV LED curing apparatus with improved illumination and timer control to solidify a UV hardening gel, such as acrylic gel. The present invention provides an UV LED curing apparatus comprising a housing and an UV LED lighting assembly enclosed in the housing. The housing is provided with a light aperture allowing UV light shone from an UV LED light source on the UV LED lighting assembly and controlled by a timer and a current regulator integrated thereon. The UV LED lighting assembly is further provided with an optical element to direct and confine UV light shine toward the light aperture of the housing, capable of providing a focused illumination and preventing leakage of UV light outside of the housing.

Abstract: A present invention relates to a fabric treating apparatus including an inside cabinet which forms a treating chamber which the fabrics treated in, and a heating unit for supplying any one between hot wind and steam to the treating chamber, and a hanger rack disposed in the treating chamber, and a driving unit for generating rotary power outside the treating chamber and is disposed upper part of the inside cabinet, and a transmission unit for reciprocating the hanger rack by transmitting the rotary power of the driving unit.

Abstract: A system for continuous (re-)drying of wood pieces. A conveyor arrangement receives and carries the wood pieces in file following a course. A moisture content of each wood piece travelling on the conveyor arrangement is measured during the course. The wood pieces whose measured moisture content are above a target content are diverted towards a drying equipment, in particular by high-frequency, whereas the other wood pieces continue their course on the conveyor arrangement. The drying equipment removes a moisture portion from the diverted wood pieces. The moisture contents of the processed wood pieces are again measured. The pieces whose moisture content dropped below the target content are routed towards the conveyor arrangement whereas the other pieces are routed in the drying equipment for a re-drying.

Abstract: According to one embodiment, a supercritical drying method comprises cleaning a semiconductor substrate with a chemical solution, rinsing the semiconductor substrate with pure water after the cleaning, changing a liquid covering a surface of the semiconductor substrate from the pure water to alcohol by supplying the alcohol to the surface after the rinsing, guiding the semiconductor substrate having the surface wetted with the alcohol into a chamber, discharging oxygen from the chamber by supplying an inert gas into the chamber, putting the alcohol into a supercritical state by increasing temperature in the chamber to a critical temperature of the alcohol or higher after the discharge of the oxygen, and discharging the alcohol from the chamber by lowering pressure in the chamber and changing the alcohol from the supercritical state to a gaseous state. The chamber contains SUS. An inner wall face of the chamber is subjected to electrolytic polishing.

Abstract: A process for removing or treating harmful biological and organic substances within an enclosure includes heating the ambient air within the enclosed area to a predetermined temperature over time to cause harmful biological or organic substances to be destroyed or migrate into the ambient air. Temperature and pressure levels are monitored through the treatment process. Contaminated objects or areas may be subjected to biocides, irradiation, or even freezing as part of the treatment process. The air removed from the enclosure is preferably passed through an incinerator, a filter or an irradiation device and the heated air is re-circulated to enhance efficiency.

Abstract: An apparatus for torrefaction of water containing cellulosic materials is performed in an inert atmosphere. The cellulosic material is cascaded through the apparatus between a plurality of rotatable trays vertically stacked within multiple processing zones. Steam being generated from heating of the cellulosic material is recycled back to the apparatus to provide an inert atmosphere. The steam may be superheated in a heat exchanger. Exhaust from the torrefaction zone of the apparatus has some moisture and other volatiles removed prior to being reheated in a burner. The heated exhaust is used in the heat exchanger to superheat the recycled steam.

Abstract: Described herein are devices and techniques for spray drying a fluid to produce a dried powder. Assemblies include a spray drying head attachable to a gas supplier and a liquid sample, such as a standard unit of blood product. The spray drying head can be adapted to provide an aerosolized flow of liquid sample exposed to a drying gas. The assembly also includes a drying chamber adapted to separate the aerosolized flow of liquid sample into a dried powder and humid air. The assembly can be disposable, provided in a sterilized kit and having simplified attachments allowing quick connect and disconnect from the gas and liquid sample. Separation of the powder from the humid air exiting the drying chamber occurs within a filtered collection bag. In some embodiments, one or more of the drying chamber and collection bag are formed form a thin-walled, collapsible material.

Abstract: A heating apparatus for a vehicle having a chassis and a bulk load container mounted on the chassis. The apparatus includes a heating chamber for receiving the chassis, a heat source connected to the heating chamber for supplying heated gas to the chamber and a seal mounted to the heating chamber for substantially sealing the heating chamber about the chassis and the container, for guiding the heated gas along a floor and sides of the container to heat the container floor and sides.

Abstract: A configurable hoof drying apparatus. The drying components of the apparatus are selectable, configurable and inter-changeable for desired drying needs and change a pressure, speed and temperature of an original drying air source. Therefore it can be used with a hot/warm/cool/cold air drying source. The hoof drying apparatus is portable and specifically designed, but is not limited to, drying hooves for the purposes of: hoof wall repair, preparation for medication for hoof diseases and preparation of the hoof for application of hoof dressings and hoof shoes. The hoof drying apparatus can also be used for drying non-hoofed animals.

Abstract: Certain embodiments provide a supercritical drying device, comprising a sealable first vessel; a fluorine adsorbent provided inside the first vessel; a second vessel being provided inside the first vessel and housing a semiconductor substrate; a heater heating the inside of the first vessel; a pipe connected to the first vessel; and a valve provided on the pipe. Free fluorine generated by heating a fluorine containing solvent is adsorbed to the fluorine adsorbent.

Abstract: A wetsuit drying and transportation carrier includes a container having a wetsuit receiving interior. A reservoir is provided adjacent to the bottom of the container to receive liquid from the interior of the container. A first wetsuit support is pivotably connected to the container to pivot into and out of the container interior. A second wetsuit support is pivotably connected to the container in front of the first wetsuit support to pivot into and out of the interior of the container. A wetsuit shoulder support is connected to the container or to the first wetsuit support. A third wetsuit support is pivotably connected to the first and second wetsuit supports. The third wetsuit support desirably has a slot for receiving a wetsuit for drying and transportation.

Abstract: A system and process is provided for removing or treating harmful biologic and organic substances within an enclosure, such as a container, building or vehicle. Air within the enclosure is heated to a predetermined temperature to kill organisms and cause harmful substances in the structure to migrate into the ambient air. Boric acid in combination with the heat may be used to kill mold and similar undesirable organisms. Temperature and pressure levels are monitored. The heated air carrying the harmful substances is passed through a filter to remove the harmful substances, and the heated air is re-circulated to enhance efficiency. The system effectively kills insects, molds, viruses and bacteria and reduces the levels of allergens and volatile organic compounds in the structure.

Abstract: Exemplary mobile drying containers and related methods are provided. In one embodiment, the mobile drying container includes a first side wall, a second side wall, a first end wall, a second end wall having a gate, an interior bottom, an upper volume and a lower volume separated by a ventilated floor supported by support members, wheels positioned below the lower volume, and one or more support legs positioned below the lower volume to provide support between the mobile drying container and the ground. The upper volume holds the crop to be dried, and the gate of the second end wall is operable to open and provide a path to dump or remove the crop. The lower volume is operable to receive a flow of air from an opening to assist with the drying of the crop. The present invention also encompasses other embodiments and methods.

Abstract: The present invention aims to shorten a drying time for time for drying a coiled electrode. To this end, a drying device for drying the coiled electrode wound on a winding core includes a heating unit for heating the coiled electrode from a winding core side. Since this enables heat to be transferred from a core part toward a surface of the coiled electrode, tiny spaces can be generated between layers of an electrode and moisture can be evaporated from these spaces. Thus, moisture of the core part side, which has been difficult to evaporate, can be reliably evaporated and a drying time for the coiled electrode can be shortened.

Abstract: A drying system for a hair removing device is safe and convenient for drying and sterilizing a cutter head with a sufficient amount of heat. The drying system includes a casing having a dry chamber with a top opening for detachably receiving a cutter head of the hair removing device, and a heater for heating the cutter head, a blower for generating a forced air flow and drying the cutter head. A lid is provided to close the top opening of the dry chamber such that the drying chamber is kept free from the entry of the environmental dust, which enables to heat the cutter head at an elevated temperature for effective sterilization.

Abstract: A dual path kiln is provided that includes a kiln having one or more chambers and at least two lumber charge paths adapted to convey lumber through the kiln in opposite directions by means of a track having two rails in which a pusher device pushes the lumber through the kiln and comprises a variable output electric motor to effect a high degree of accurate control of the movement speed of the pusher device and the lumber it's pushing and wherein the pusher device includes a faceplate having two side walls extending from said faceplate to engage the side of the lumber in order to greatly enhance stability of the lumber while it is being transported and minimize the risk of spillage.

Abstract: A technology can efficiently dry the high-boiling point solvent contained in the object and achieve the space-saving and energy-saving of a drying apparatus. A drying method for drying an object containing a first solvent while conveying the object into a chamber (38), comprises: a first drying step of drying the object up to a drying point in the prestage of the chamber (38); and a second drying step of forming a vapor atmosphere of a second solvent having a lower boiling point than the first solvent in the chamber (38) and drying the object such that the temperature of the object in an inlet port of the chamber (38) is made to be lower by a predetermined temperature difference than the temperature of the vapor atmosphere.

Abstract: A drying apparatus for honeycomb formed bodies includes: a drying chamber having a drying space to store undried honeycomb formed bodies; a microwave generator that generates microwaves; and a plurality of waveguides for introducing the microwaves into the drying chamber. On side surfaces of the drying chamber, provided is a plurality of microwave introduction ports for introducing the microwaves generated by the microwave generator into the drying space inside the drying chamber, the waveguides are disposed at the microwave introduction ports, and irradiation ports of the waveguides are provided directed to two or more different directions toward the drying space of the drying chamber.

Abstract: A portable cleaning apparatus includes a base module having a base housing with a bottom base wall, and enclosing a fan. The base module is moveable along an external surface in a first direction. The fan can move air through the base housing from an interior of the base housing to exteriorly of the base housing through an exhaust outlet in the base housing. A plenum fluidly communicates at a first end with the exhaust outlet and at a second end with at least one plenum outlet opening. The at least one plenum outlet opening is between the base wall and the external surface. The at least one plenum outlet opening can direct air exhausted from the interior of the base housing along the external surface in a second direction perpendicular to the first direction.

Abstract: The present document describes a bag for storing and drying garments or sports equipment. The bag comprises an external envelope substantially made of flexible resistant material. The bag further comprises a frame supporting the external envelope and comprising frame sections capable of adopting a retracted position and an extended position in which the frame occupies more space than in the retracted position. The bag further comprises a tubular structure for hanging the garments or sports equipment and through which air can be blown for drying the hung garments or sports equipment. The tubular structure is mounted on the frame and comprises tube sections capable of adopting a retracted position and an extended position in which the tubular structure occupies more space than in the retracted position.

Abstract: A drum-type washer/dryer having an evaporator for performing dehumidification by cooling air drawn from the inner space of a drum and also having condenser for heating the air dehumidified by the evaporator, wherein the air heated by the condenser is made to sequentially pass through a duct and a blowhole and blown as dry air to clothes in the drum. A backflow preventing portion is provided in the duct, and when bubbles flow back into the duct from the inner space of the drum through the blowhole, the backflow preventing portion functions as resistance for preventing the back flow of the bubbles.

Abstract: By means of the invention, a method and an apparatus (1) for the drying of goods, in particular for the convection drying of pastas, which are introduced from a first treatment zone (2) into a second treatment zone (3), are to be improved to the effect that the drying process has a lower energy consumption than conventional dryers and the surroundings of the dryer (1) are polluted only slightly by waste heat. Furthermore, the dryer (1) is to be designed in a structurally simple and cost-effective way. This object is achieved by means of a method for the drying of goods, in which the temperature in the first treatment zone (2) is on average lower than in the second treatment zone (3), and in which the energy obtained from the exhaust air of the first and/or the second treatment zone (2, 3) in at least one heat exchanger (6, 7, 8, 9, 10, 11) is introduced into the first treatment zone (2).

Abstract: This invention discloses systems and methods for conversion of manure to novel fertilizer and/or soil builder products useful as input for organic farming operations. The equipment systems comprise a gas turbine generator unit (preferred heat source), a dryer vessel and a processing unit, wherein the connection between the gas turbine and the dryer vessel directs substantially all the gas turbine exhaust into the dryer vessel and substantially precludes the introduction of air into the dryer vessel. The dryer vessel receives the manure for contact with the turbine exhaust gases to convert the manure to a dry material, which is passed to the processing unit where it is formed into granules, pellets or other desired form for the final dry fertilizer product. The method comprises drying, heating and converting the manure to form novel self binding fertilizer and soil builder type products for organic farming and other uses.

Abstract: A drying system for drying a personal hydration system having a fill opening and a supply tube includes a dryer assembly providing a flow of forced air to be introduced into the fill opening of the personal hydration device. The dryer assembly includes seal-forming structure engageable with the fill opening to form a seal between the dryer assembly and the fill opening to enhance the pressurization and inflation of the personal hydration system. The dryer assembly also includes a channel defining a relief valve for permitting exhaust of air flow from the fill opening upon pressurization and inflation of the personal hydration system. The dryer assembly further includes a resilient cam arm for enabling the dryer assembly to sealingly fit variously sized fill openings.

Abstract: This heating blower has a housing 1, a fan 2, a heater 3, and an electrostatic atomizing device 5. The electrostatic atomizing device 5 is provided in the housing 1 and discharges nanometer-size ion mist to the outside. The electrostatic atomizing device 5 comprises a discharging electrode 50, an opposed electrode 52 disposed opposite the discharging electrode 50, a cooling part 53 which cools the discharging electrode 50 to generate moisture from ambient air near the discharging electrode, and a high voltage applying part 55 which applies a high voltage between said discharging electrode and the opposed electrode to atomize water generated near the discharging electrode. Therefore, this heating blower can discharge nanometer-size ion mist to the outside without replenishment of water.

Abstract: A drying system (100) for use in drying out a water-damaged structure includes a blower (105) for providing outside air to the water damaged structure. An indirectly fired furnace (101) is used for heating the outside air prior to its introduction into the water-damaged structure. An exhaust blower (114) removes humid air from the water-damaged building, and one or more remote temperature and humidity sensors (117) are used for controlling the furnace air temperature and supply blower volume. An air intake filter box (111) is used for adding make-up air to recirculated building air and promoting cooling within accompanying trailer. A differential air pressure transmitter (118) controls the volume of moist air removed from the water damaged building to an optimal rate.

Abstract: A burner for dryers that includes a tubular element having at least a funnel-shaped region tapering toward an inlet end for fuel gas and combustion air to form a gas/air mixing venturi tube, and an opposite having an outlet nozzle for said mixture. According to the invention, the burner body is made of two half shells tightly joined together along corresponding mutually coupling longitudinal flanges, which, once coupled together, form two opposite perimetrical longitudinal edges The burner body has a substantially rectangular plan shape with two longitudinal edges that are parallel substantially for the entire length of the burner body. The invention relates also to a process for manufacturing said burner.

Abstract: The present invention relates to a method and an apparatus for the manufacture of torreficated lignocellulosic material. Finely divided lignocellulosic material is exposed in running order for drying, heating to at least 200° C. in the absence of oxygen (the torrefication process itself) and cooling to a temperature preferably being below 130° C. The drying device (3) and the torrefication chamber (4) are jacketed, which allow performing of the drying as well as the torrefication with steam at over-pressure using indirect heating with the result that the heating medium is not contaminated during its cycle of operation. The heating steam is withdrawn in a steam turbine being part of a power/heating plant or a steam boiler and leaves the system preferably in the form of condensate water (32).

Abstract: A portable cleaning apparatus comprises a base module for movement along a surface and a plenum. The base module comprises a base housing enclosing a fan for moving air through the housing from the interior of the housing to the exterior of the housing through an exhaust outlet in the housing. The plenum fluidly communicates at one end with the exhaust outlet and at another end with at least one plenum outlet opening adjacent the surface to direct air exhausted from the housing interior along the surface.

Abstract: A fluid heater 20 includes a duct pipe 26 through which a fluid to be heated flows, and a heating part 23 configured to heat the duct pipe 26. One or more fillers 30 is provided inside the duct pipe 26. A substrate processing apparatus 60 includes: a supply source 92 configured to supply a liquid of a volatile organic solvent; the aforementioned fluid heater 20 configured to heat the liquid of the organic solvent supplied by the supply source 92 so as to generate a steam of the organic solvent; and a chamber 65 configured to accommodate a substrate W and to dry the substrate W accommodated therein, to which the steam of the organic solvent generated by the fluid heater 20 is supplied.