Abstract: In general, in one aspect, the invention features a catadioptric projection objective having a plurality of optical elements arranged along an optical axis to image a pattern arranged in an object surface of the projection objective onto an image surface of the projection objective. The optical elements include a concave mirror; a first deflecting mirror tilted relative to the optical axis by a first tilt angle t1 about a first tilt axis to deflect light from the object surface towards the concave mirror or to deflect light from the concave mirror towards the image surface; and a second deflecting mirror tilted relative to the optical axis by a second tilt angle t2 about a second tilt axis. The first deflecting mirror has a first reflective coating with reflectivity Rs1(?1) for s-polarized light and a reflectivity Rp1(?1) for p-polarized light incident on the first deflecting mirror at first angles of incidence ?1 from a first range of angles of incidence according to (t1???1)??1?(t1+??1).

Abstract: A catadioptric lens with optical elements, which are arranged along an optical axis and with at least one concave mirror located in the vicinity of a pupillar surface of the projection lens. The concave mirror is sub-divided into a number of annular or honeycomb mirror segments, which can be displaced independently in relation to one another with the aid of piezoelectric drive elements. The mirror can be used as a phase-shifting pupillar filter, whereby the filtration function can be adjusted by the relative displacement of the mirror elements in relation to one another.

Abstract: A projection exposure apparatus for the exposure of a radiation-sensitive substrate arranged in the region of an image surface of a projection objective with at least one image of a pattern of a mask that is arranged in the region of an object surface of the projection objective has a light source for emitting ultraviolet light from a wavelength band having a bandwidth ??>10 pm around a central operating wavelength ?>200 nm; an illumination system for receiving the light from the light source and for directing illumination radiation onto the pattern of the mask; and a projection objective for the imaging of the structure of the mask onto a light-sensitive substrate.

Abstract: An optical projection system which creates pincushion distortion of an image and then creates a barrel distortion of the pincushion-distorted image to compensate for the pincushion distortion and then projects an enlarged image without substantial distortion onto an image display surface. An embodiment includes a polynomial reflector to compensate for the pincushion distortion, to enlarge an image, and to project the enlarged image toward a screen.

Abstract: A telescope imaging system is provided. The telescope imaging system comprises a first lens group for receiving a spot light and generating a first refracted beam, a second lens group for receiving the first refracted beam and generating a second refracted beam, a third lens group having a convex lens disposed at a side of the third lens group distant from the spot light for receiving the second refracted beam and generating a parallel beam by an effective focus formed by the first lens group, the second lens group and the third lens group, a first reflective mirror having an opening, receiving the parallel beam and generating a reflected beam, and a second reflective mirror adjacent to the third group lens and reflecting the reflected beam for allowing the reflected beam passing through the opening and focused as an image.

Abstract: A catadioptric projection optical system for forming a reduced image of a first surface (R) on a second surface (W) is a relatively compact projection optical system having excellent imaging performance as well corrected for various aberrations, such as chromatic aberration and curvature of field, and being capable of securing a large effective image-side numerical aperture while suitably suppressing reflection loss on optical surfaces. The projection optical system comprises at least two reflecting mirrors (CM1, CM2), and a boundary lens (Lb) whose surface on the first surface side has a positive refracting power, and an optical path between the boundary lens and the second surface is filled with a medium (Lm) having a refractive index larger than 1.1.

Abstract: An optical sheet includes a substrate onto which light is incident, and a convex part protruded from the substrate by a predetermined thickness. A thickness of the convex part increases from an edge to a center thereof.

Abstract: A method and apparatus for inspecting a specimen are provided. The apparatus comprises a primary illumination source, a catadioptric objective exhibiting central obscuration that directs light energy received from the primary illumination source at a substantially normal angle toward the specimen, and an optical device, such as a prism or reflective surface, positioned within the central obscuration resulting from the catadioptric objective for receiving further illumination from a secondary illumination source and diverting the further illumination to the specimen. The method comprises illuminating a surface of the specimen at a variety of angles using a primary illumination source, illuminating the surface using a secondary illumination source, the illuminating by the secondary illumination source occurring at a substantially normal angle of incidence; and imaging all reflected, scattered, and diffracted light energy received from the surface onto a detector.

Abstract: A catadioptric projection objective for projecting a pattern arranged in the object plane of the projection objective into the image plane of the projection objective, having: a first objective part for projecting an object field lying in the object plane into a first real intermediate image; a second objective part for generating a second real intermediate image with the radiation coming from the first objective part; a third objective part for generating a third real intermediate image with the radiation coming from the second objective part; and a fourth objective part for projecting the third real intermediate image into the image plane.

Abstract: A portable electro-optical scanner for reading a target bar code having a plurality of bar code elements. The portable scanner includes: a housing supporting a scanning module and an optic system. The scanning module electro-optically scans the target bar code with a scanning beam and collects reflected light returning from the bar code. The scanning module includes a beam source emitting a scanning beam, beam directing apparatus causing the scanning beam to be repetitively scanned along a scanning plane intersecting the target bar code and photodetector circuitry receiving light from the target bar code. The optic system includes an exit window, a light collection lens and a reflective surface. The scanning beam passes through the exit window upon exiting the housing. The light collection lens receives reflected light from the target bar code and directing the reflected light toward a focal point. The focal point lying on the scanning plane of the scanning beam.

Abstract: A catadioptric projection optical for forming an image of the intermediate image onto a second object, the catadioptric projection optical system include, a first dioptric group including a first lens group that has a positive refractive power and a second lens group that has a positive refractive power, a catadioptric group including a concave mirror and a third lens group that an incidence light and reflected light from the concave mirror pass, and a second dioptric group. A first deflective reflector is arranged between the first lens group and the second lens group. A second deflective reflector is arranged between the second lens group and the third lens group or between the third lens group and the second dioptric group. A first intermediate image is formed between the second lens group and the concave mirror. A second intermediate image is formed between the concave mirror and the second dioptric group.

Abstract: At least one exemplary embodiment is directed to a projection optical system that projects an image of a pattern of a first object onto a second object includes a first image forming optical system, a second image forming optical system, and a light-shielding member. The first image forming optical system forms an intermediate image of the pattern, and includes a concave mirror and a reflecting mirror. The concave mirror has a reflecting surface opposing the second object. The reflecting mirror directs light from the first object to the concave mirror. The second image forming optical system forms an image of the intermediate image onto the second object, and includes a lens. The light-shielding member is disposed between the concave mirror and the lens.

Abstract: A catadioptric projection optical system for forming a reduced image of a first surface (R) on a second surface (W) is a relatively compact projection optical system having excellent imaging performance as well corrected for various aberrations, such as chromatic aberration and curvature of field, and being capable of securing a large effective image-side numerical aperture while suitably suppressing reflection loss on optical surfaces. The projection optical system comprises at least two reflecting mirrors (CM1, CM2), and a boundary lens (Lb) whose surface on the first surface side has a positive refracting power, and an optical path between the boundary lens and the second surface is filled with a medium (Lm) having a refractive index larger than 1.1.

Abstract: A catadioptric projection optical system for forming a reduced image of a first surface (R) on a second surface (W) is a relatively compact projection optical system having excellent imaging performance as well corrected for various aberrations, such as chromatic aberration and curvature of field, and being capable of securing a large effective image-side numerical aperture while suitably suppressing reflection loss on optical surfaces. The projection optical system comprises at least two reflecting mirrors (CM1, CM2), and a boundary lens (Lb) whose surface on the first surface side has a positive refracting power, and an optical path between the boundary lens and the second surface is filled with a medium (Lm) having a refractive index larger than 1.1.

Abstract: A reduced size catadioptric inspection system employing a catadioptric objective and immersion substance is disclosed. The objective may be employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range, and can provide numerical apertures in excess of 0.9. Elements are less than 100 millimeters in diameter and may fit within a standard microscope. The objective comprises a focusing lens group, a field lens, a Mangin mirror arrangement, and an immersion substance or liquid between the Mangin mirror arrangement and the specimen. A variable focal length optical system for use with the objective in the catadioptric inspection system is also disclosed.

Abstract: A lighting module able to give a light beam with cut-off line for a motor vehicle headlight, comprising a light source, a reflector, a dioptre serving as an exit lens or an exit lens, and a reflective folder. The light source is combined with a collimator in order to give a beam that can be assimilated to a parallel beam, substantially orthogonal to an exit plane of the collimator. The reflector and the dioptre or lens may be combined in a single piece made from transparent material, and the surface of the reflector and that of the folder means work in total reflection according to an air/transparent material interface.

Abstract: A catadioptric projection optical system for forming plural intermediate images of a first object and for imaging the image of the first object onto a second object, said catadioptric projection optical system includes at least one concave mirror, a first deflective reflector, and a second deflective reflector, wherein a light reflected by the first deflective reflector is directly led to the second deflective reflector.

Abstract: A photolithographic reduction projection catadioptric objective includes a first optical group G1 including an even number of at least four mirrors M1–M6; and a second at least substantially dioptric optical group G2 imageward than the first optical group G1 including a number of lenses E4–E13. The first optical group G1 provides compensative axial aberrative correction for the second optical group G2 which forms an image with a numerical aperture of at least substantially 0.65, and preferably at least 0.70 or 0.75. Six mirror examples are shown.

Abstract: An optical system comprising a concave primary mirror reflects light through an intermediate focus to a secondary mirror. The secondary mirror re-focuses the image to a final image plane. Optical limiter material is placed near the intermediate focus to optically limit the intensity of light so that downstream components of the optical system are protected from intense optical transients. Additional lenses before and/or after the intermediate focus correct optical aberrations.

Abstract: The invention is directed to multispectral multifield optical combinations that are intended to be integrated into an optical device. A Cassegrain-type multifield optical combination has an image focal plane, comprising a first holed concave primary mirror that is fixed relative to the image focal plane and a convex secondary mirror.

Abstract: A reduced size catadioptric objective and system is disclosed. The objective may be employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range. Elements are less than 100 mm in diameter. The objective comprises a focusing lens group configured to receive the light energy and comprising at least one focusing lens. The objective further comprises at least one field lens oriented to receive focused light energy from the focusing lens group and provide intermediate light energy. The objective also includes a Mangin mirror arrangement positioned to receive the intermediate light energy from the field lens and form controlled light energy for transmission to a specimen. The Mangin mirror arrangement imparts controlled light energy with a numerical aperture in excess of 0.65 and up to approximately 0.90, and the design may be employed in various environments.

Abstract: A catadioptric projection lens for imaging a pattern arranged in an object plane onto an image plane, preferably while creating a real intermediate image, including a catadioptric first lens section having a concave mirror and a physical beamsplitter having a beamsplitting surface, as well as a second lens section that is preferably refractive and follows the beamsplitter, between its object plane and image plane. Positive refractive power is arranged in an optical near-field of the object plane, which is arranged at a working distance from the first optical surface of the projection lens. The beamsplitter lies in the vicinity of low marginal-ray heights, which allows configuring projection lenses that are fully corrected for longitudinal chromatic aberration, while employing small quantities of materials, particularly those materials needed for fabricating their beamsplitters.

Abstract: A catadioptric projection lens for imaging a pattern arranged in an object plane while creating a real intermediate image, having a catadioptric first lens section having a concave mirror and a beam-deflection device, as well as a dioptric second lens section that follows the catadioptric lens section, between its object plane and image plane. The beam-deflection device deflects radiation coming from the object plane to the concave mirror. Positive refractive power is arranged following the first reflective surface, between the latter and the concave mirror, within an optical near-field of the object plane, within which the height of the principal ray of the outermost field point of radiation coming from the object exceeds the marginal-ray height.

Abstract: A system for multiple mode imaging is disclosed. The catadioptric system has an NA greater than 0.65, and preferably greater than 0.9, highly corrected for low and high order monochromatic aberrations. The system employs unique illumination entrances and optics to collect reflected, diffracted, and scattered light over a range of angles. Multiple imaging modes are possible by varying the illumination geometry and apertures at the pupil plane. Illumination can enter the catadioptric optical sytems using an auxiliary beamsplitter or mirror, or through the catadioptric elements at any angle from 0 to 85 degrees from vertical. The system may employ a relayed pupil plane, used to select different imaging modes, provide simultaneous operation of different imaging modes, Fourier filtering, and other pupil shaping operations.

Abstract: The invention provides a telescope system for inputting an image and presenting the image to a user. The telescope system includes a first array of flat mirrors including a plurality of first mirrors, the image, being light information, incident upon and reflected by each of the first array of mirrors; a primary reflecting curved mirror, each of the first mirrors reflecting light information onto the primary reflecting curved mirror; and a light collection portion, the light collection portion collecting and combining light information, originating from each of the first mirrors, so as to present a viewable image.

Abstract: A catadioptric projection lens configured for imaging a pattern arranged in an object plane (2) onto an image plane (4) while creating a single, real, intermediate image (3) has a catadioptric imaging group (5) having a concave mirror (6) and a beam-deflector (7), and a dioptric imaging lens group (20) that commences after the beam-deflector. The system is configured such that the intermediate image follows the first lens (17) of a dioptric section (8) and is preferably readily accessible. Arranging the intermediate image both between a pair of lenses (17, 21) of the dioptric section and at a large distance behind the final reflective surface of the beam-deflector helps to avoid imaging aberrations.

Abstract: A projection exposure lens has an object plane, optical elements for separating beams, a concave mirror, an image plane, a first lens system arranged between the object plane and the optical elements for separating beams, a second double pass lens system arranged between the optical elements for separating beams and the concave mirror, a third lens system arranged between the optical elements for separating beams and the image plane. The second lens system has a maximum of five lenses.

Abstract: A projection exposure lens system has an object side catadioptric system, and intermediate image and a refractive lens system. The refractive lens system from its intermediate image side and in the direction of its image plane has a first lens group of positive refractive power, a second lens group of negative refractive power, a third lens group of positive refractive power, a fourth lens group of negative refractive power, and a fifth lens group of positive refractive power.

Abstract: A laser diode module includes a laser diode device, a first photo detector part for receiving, first divided light that is a first portion of light when at least one of light emissions of the laser diode device is divided into two portions of light each traveling a different optical path, a second photo detector part for receiving second divided light that is a second portion of light thus divided via at least a wavelength selective member, and a controller which controls the lasing wavelength of the laser diode device on the basis of outputs of the first and second photo detector parts. A beam splitter provided between the laser diode and the wavelength selective member divides light emitted from the laser diode into the first and second divided light and a quarter-wave plate is provided in an optical path between the beam splitter and the wavelength selective member.

Abstract: A reflective afocal telescope is described herein that has multiple field of views and can be packaged in a compact arrangement. In one embodiment, the reflective telescope includes two entrance pupils, a primary mirror, a secondary mirror, a tertiary mirror, a quaternary mirror, a moveable fold mirror and an exit pupil. The fold mirror can be moved into a non-bypass position and out of the way such that the incident beams transverse the primary, secondary, tertiary and quaternary mirrors and form a collimated region and a real external exit pupil. Or, the fold mirror can be moved into a bypass position where the incident beams bypass the primary, secondary, tertiary and quaternary mirrors and instead reflect off the fold mirror directly to the exit pupil. In an alternative embodiment, the tertiary mirror instead of the fold mirror can be moved into either the bypass position or the non-bypass position.

Abstract: A coupling configuration for connecting an optical conductor to an opto-receiver has a parabolic mirror or a spherical mirror that reflects light emerging from the optical conductor onto a launching mirror through which the light is launched into the opto-receiver. Such a configuration is largely adjustment-free and therefore particularly suitable for the connection of single-mode fibers (SMF).

Abstract: A compact reflector telescope has a spherical primary reflector and a secondary reflector with a negative lens interposed there between in axial alignment therewith. Light reflected from the primary reflector is passed through the negative lens and is diverted by the secondary reflector to a positive lens at the side of the telescope tube. The positive lens focuses the light rays onto an eye piece or ocular or onto a photographic emulsion or electronic detector. The telescope reduces or substantially eliminates spherical aberration and can be configured to have a focal ratio significantly greater than the focal ratio of the primary reflector. The telescope produces a flat field of view and an image which is substantially diffraction limited.

Abstract: A projection exposure apparatus for microlithography has a light source, an illumination system, a mask-positioning system and a projection lens. The latter has a system aperture plane and an image plane and contains at least one lens that is made of a material which has a birefringence dependent on the transmission angle. The exposure apparatus further has an optical element, which has a position-dependent polarization-rotating effect or a position-dependent birefringence. This element, which is provided close to a pupil plane of the projection exposure apparatus, compensates at least partially for the birefringent effects produced in the image plane by the at least one lens.

Abstract: A 1X projection optical system for deep ultra-violet (DUV) photolithography is disclosed. The optical system is a modified Dyson system capable of imaging a relatively large field at high numerical apertures at DUV wavelengths. The optical system includes a lens group having first and second prisms and four lenses having a positive-negative-positive negative arrangement as arranged in order from the prisms toward the mirror. A projection photolithography system that employs the projection optical system of the invention is also disclosed.

Abstract: A reflecting optical element is disclosed which includes the following articles. The reflecting optical element is constituted by: a base member having a continuous curved-surface portion, and a resin layer integrally formed of resin on the curved surface of the base member, and having a plurality of mutually discontinuous curved surfaces to be reflecting surfaces. The base member is made of a material smaller in coefficient of linear expansion than the resin for forming the resin layer. Thus, a reflecting optical element is provided which is low in optical-performance deterioration caused by the temperature effect, and small in the number of restraints in fabrication.

Abstract: The present embodiments provide for apparatuses, and methods for manufacturing apparatuses to convert a first distribution of an input radiation to a second distribution of output radiation. The apparatus can be defined in some embodiments by generating a two-dimensional representation of three active optical surfaces including calculating a segment of first, entry and second surfaces based on first second, and third generalized Cartesian ovals, respectively, and successively repeating the calculating of the segments of the first and second surfaces, and rotationally sweeping the two-dimensional representation about a central axis providing a three-dimensional representation. In some embodiments, portion of the first and/or second surfaces can be totally internally reflective.

Abstract: A projection optical system includes at least one lens, at least one concave mirror, at least one diffractive optical element, a first imaging optical system that includes the at least one lens and the at least one concave mirror, for imaging an intermediate image of an object, a second imaging optical system, having the at least one lens and the at least one diffractive optical element, for projecting the intermediate image onto an image plane, and a field optical system disposed between the first and second imaging optical systems.

Abstract: A catadioptric projection lens (1) which is designed in particular for use in microlithographic projection-exposure apparatus includes a plurality of refractive optical elements having intrinsic birefringence both in a catadioptric part (5) and in a dioptric part (18) adjacent to the image plane (3). Because these refractive optical elements in the catadioptric part (5) and in the dioptric part (18) are decoupled from one another with respect to polarisation by a polarisation-sensitive reflective layer (10), the catadioptric part (5) and the dioptric part (18) are compensated separately from one another with respect to intrinsic birefringence.

Abstract: Sine magnification error in a multi-aperture telescope or other optical system is corrected by placing an optical element in the optical path near an intermediate image of the telescope. The optical element has substantially no power, and in a reflective embodiment, has a plano-surface and a corrective surface.

Abstract: A beam collecting device and a laser emission device are disclosed incorporating a laminated optical waveguide array and refraction means therein. The laminated optical waveguide array is composed of a plurality of plate-like optical waveguides made of a material having a predetermined refractive index and a plurality of spacer members having a lower refractive index than that of said optical waveguides and arranged alternately with said optical waveguides. The spacer members take the form of cylindrical members, spherical members or plate-like members. The beam collecting device and laser emission device comprise a semiconductor laser array having a plurality of laser emitting parts arranged in fast and slow axis directions, the optical waveguide array, optical fibers and a collective lens. The laser emitting parts are divided into plural groups separated in the slow axis direction.

Abstract: An apparatus for the conduction of light. The apparatus includes two concave refracting elements, such as spherical mirrors or concave gratings, such that a connecting line segment between centers of the elements forms with a main axis of a first element an angle of incidence in excess of zero, and with a main axis of a second element an angle of incidence equal in size but in a plane perpendicular to the plane defined by the connecting line segment and the main axis of the first element. Thus, astigmatism error can be corrected. The apparatus is applicable in optical analyzers for conduction of measuring light to or from a sample.

Abstract: There is provided a compact, strong and high-performance catoptric optical system. This catoptric optical system has plural optical curved reflective surfaces. A gap between a pair of reflective surfaces, through which light incident upon said catoptric projection optical system passes, is the same gap between a pair of reflective surfaces, through which light exited from the catoptric projection optical system passes.

Abstract: A photolithographic reduction projection catadioptric objective includes a first optical group G1 including an even number of at least four mirrors M1-M6; and a second at least substantially dioptric optical group G2 imageward than the first optical group G1 including a number of lenses E4-E13. The first optical group G1 provides compensative axial aberrative correction for the second optical group G2 which forms an image with a numerical aperture of at least substantially 0.65, and preferably at least 0.70 or 0.75. Six mirror examples are shown.

Abstract: A projection optical system forms an image of an object in a first plane onto a second plane. The projection optical system has an optical element group including at least one refractive member and plural reflective members, and a plurality of lens-barrel units holding the optical element group divided into a plurality of respective groupings. The reflective members are all held by a single lens-barrel unit of the plurality of lens-barrels units.

Abstract: An aberration-correcting optical relay for an optical system. The relay comprises front and rear converging optical units together with a correcting meniscus or two correcting meniscuses placed symmetrically relative to each other, the meniscus(es) having main faces that are substantially concentric, and preferably exactly concentric, the two converging optical units being placed on a common axis and the correcting meniscus(es) being placed on said axis between the two converging optical units. The front converging optical unit situated upstream from the correcting meniscus(es) is placed in such a manner that the distance from an image point of the portion of the optical system upstream from the optical relay to the front converging optical unit is equal to the focal length of the front converging optical unit, said unit thus transforming a beam coming from said image point into a parallel beam.

Abstract: A catadioptric projection lens configured for imaging a pattern arranged in an object plane (2) onto an image plane (4) while creating a single, real, intermediate image (3) has a catadioptric first section (5) having a concave mirror (6) and a beam-deflection device (7), and a dioptric second section (8) that commences after the beam-deflection device. The system is configured such that the intermediate image follows the first lens (17) of the dioptric section (8) and is preferably readily accessible. Arranging the intermediate image both between a pair of lenses (17, 21) of the dioptric section and at a large distance behind the final reflective surface of the beam-deflection device helps to avoid imaging aberrations.

Abstract: A projection exposure lens system has an object side catadioptric system, and intermediate image and a refractive lens system. The refractive lens system from its intermediate image side and in the direction of its image plane has a first lens group of positive refractive power, a second lens group of negative refractive power, a third lens group of positive refractive power, a fourth lens group of negative refractive power, and a fifth lens group of positive refractive power.

Abstract: An image producing apparatus is capable of producing image data representing an image of a subject seen from a wide range of directions. An elliptic mirror reflects light radiated from a subject located at one of two focal points of the elliptic mirror. The light reflected by the elliptic mirror travels toward the other one of the two focal points of the elliptic mirror and falls on a fisheye camera disposed at the other one of the two focal points. The fisheye camera senses the incident light and takes an image of the subject.

Abstract: To use a beam splitting optical system smaller than the conventional beam splitters and to set a longer optical path between a concave, reflective mirror and an image plant. A light beam from an object surface travels through a first converging group to enter a beam splitter, and a light beam reflected by the beam splitter is reflected by a concave, reflective mirror to form an image of patterns on the object surface inside the concave, reflective mirror. A light beam from the image of the patterns passes through the beam splitter and thereafter forms an image of the patterns through a third converging group on an image plane.

Abstract: Catadioptric projection systems are disclosed for projecting an illuminated region of a reticle onto a corresponding region on a substrate. The systems are preferably used with ultraviolet light sources (e.g., 193 nm). The systems comprise a first imaging system, a concave mirror, and a second imaging system. The first imaging system comprises a single-pass lens group and a double-pass lens group. The single-pass lens group comprises a first negative subgroup, a positive subgroup, and a second negative subgroup. Light from the illuminated region of the reticle passes through the single-pass lens group and the double-pass lens group, and reflects from the concave mirror to pass back through the double-pass lens group to form an intermediate image of the illuminated region of the reticle. The light is then directed to the second imaging system that re-images the illuminated region of the reticle on the substrate.