Abstract: An optical module includes a stationary substrate, a movable substrate, a stationary reflecting film provided to the stationary substrate, a movable reflecting film provided to the movable substrate and opposed to the stationary reflecting film, a first control electrode disposed outside the stationary reflecting film in a filter plan view, a second control electrode disposed outside the movable reflecting film in the filter plan view, and opposed to the first control electrode, and a tilt control section adapted to make a first control current flow through the first control electrode, and make a second control current, which has an opposite direction to the first control current in the filter plan view, flow through the second control electrode.

Abstract: High resolution fast tunable optical filters are described such that each filter includes a tunable single-peak narrow-bandwidth (SPNB) filter and a tunable etalon in tandem with the tunable SPNB filter, where the bandwidth of the tunable SPNB filter is less than the free spectral range (FSR) of the tunable etalon.

Abstract: The invention relates to an apparatus for generating a scannable optical delay for a beam of light and an apparatus for Fourier domain optical coherence tomography having said apparatus for generating a scannable optical delay in its reference arm (15). The light beam is directed to a pivotably driven mirror (10) from where it is reflected to a fixed mirror (12), and from there back retro reflected along the reference arm (5). Lens optics (9) are provided to ensure accurate optical alignment in several pivot positions of the pivotably driven mirror (10).

Abstract: A Fabry-Perot tunable filter (FPTF) includes a top mirror having a first surface for receiving light and a second surface opposite the first surface. A movable mirror having a front side is secured to the second surface of the top mirror and includes back side. The movable mirror includes an inner bend resistant portion, wherein the front side includes a flexible front side portion outside the inner bend resistant portion recessed relative to the inner bend resistant portion, and a front side outer bend resistant portion thicker than the flexible front side portion. The back side includes a flexible back side portion outside the inner bend resistant portion and a back side outer bend resistant portion thicker than the flexible back side portion. An actuator mechanically coupled to the back side of the movable mirror moves the inner bend resistant portion relative to the second surface of the top mirror.

Abstract: A wavelength tunable interference filter includes an electrostatic actuator that changes the dimension of a gap between a fixed reflection film and a movable reflection film, a fixed drawn electrode and a movable drawn electrode that are connected to the electrostatic actuator, and a third substrate having a top surface portion and a sidewall portion. An end surface of the sidewall portion is bonded to a first substrate so that a space surrounded by the top surface portion, the sidewall portion, and the first substrate is hermetically sealed. A second substrate and the electrostatic actuator are disposed in the space, and the fixed drawn electrode and the movable drawn electrode are disposed on the first substrate and extend both inside and outside the space.

Abstract: An interference filter is fixed with respect to a base substrate by a fixing member which is disposed on one portion which is on the outer side of a filter region. Accordingly, since the periphery end of the interference filter, other than a portion (end portion) in which the fixing member is disposed, becomes a floated state (free end), it is possible to suppress the warping of the interference filter even when there is the difference in coefficients of thermal expansion with the base substrate. Further, spacer portions which are lower than the height of the fixing member are formed outside the filter region and on the portion separated from the fixing member. At the time of the impact, since the spacer portions come in contact with the base substrate to function as stoppers, it is possible to suppress occurrence of peeling-off or cracks on the fixing member.

Abstract: An optical filter includes a first substrate, a first mirror formed on the first substrate, a second substrate coupled to the first substrate, the second substrate including a concave portion, a second mirror formed on the concave portion and facing the first mirror, and an electrode formed on the second substrate and around the second mirror. The first substrate includes a plurality of first hinge portions and a plurality of second hinge portions inside the plurality of first hinge portions.

Abstract: The color reflected by an interferometric modulator may vary as a function of the angle of view. A range of colors are thus viewable by rotating the interferometric modulator relative to an observer. By placing a textured layer between an observer and an interferometric modulator, a pattern which includes the range of colors may be viewed by the observer, and the range of colors may thus be viewable from a single viewing angle.

Abstract: An optical scanning unit includes a light source including a plurality of light-emitting elements; a light detector to detect a light beam emitted from the light source; a light-flux splitter, angled to the optical axis of the light beam emitted from the light source, having an aperture, a portion of reduced thickness susceptible to warping, a concave face of the warped light-flux splitter as a reflecting face, and a convex face of the warped light-flux splitter opposite the concave face as a non-reflecting face; and a light-flux splitter pressing unit to press the light-flux splitter onto a light-flux splitter holding member without blocking the aperture. Light beam passed the aperture is used as a write-use light flux. The reflecting face reflects a light flux other than the write-use light flux as a monitor-use light flux. The light-flux splitter pressing unit presses a portion of maximum convexity of the non-reflecting face.

Abstract: An optical module includes a first plate-shaped member having a light transmissive optical component which is formed by applying etching to a silicon region, and a second plate-shaped member having light reflective optical components (mirrors) for reflecting light transmitting through the light transmissive optical component. The first and second plate-shaped members are bonded to one another, and an optical path for light transmitting through the light transmissive optical component is along a component forming surface of the first plate-shaped member and a principal surface of the second plate-shaped member. Thereby, realizing an optical module in which it is possible to dispose the light reflective optical component and the light transmissive optical component close to one another, and a manufacturing method for the optical module.

Abstract: A high quality factor optical resonator structure includes a substrate, a center disc formed on the substrate, and a plurality of concentric grating rings surrounding the center disc. The concentric rings are spaced apart from the center disc and from one another by regions of lower index of refraction material with respect thereto, and wherein spacing between the grating rings and the center disc is non-periodic such that a magnitude of a displacement distance of a given grating ring with respect to a ?/4 Bragg reflector geometry is largest for a first of the grating rings immediately adjacent the center disk and decreases in a radially outward direction.

Abstract: In a delay line interferometer inside a demodulator, with respect to polarization states of two split beams of light to be interfered with each other, p polarization and s polarization are reversed by a half beam splitter and, further, again multiplexed by the half beam splitter used for splitting so that interference beams of light are generated.

Abstract: A method comprising providing a first substrate and forming a first sacrificial layer over the first substrate, the first sacrificial layer comprising a curved surface portion, and forming a curved micromirror by depositing a reflective material over at the curved surface portion.

Abstract: A wavelength tunable interference filter, an optical apparatus, and an optical component include a first substrate, which includes a first optical film and a first driving electrode, and a second substrate, which includes a support portion that supports the first substrate, a second optical film, and a second driving electrode. The second substrate includes an external connection electrode extending to an outer side of the support portion, and includes an electrode forming surface on which the external connection electrode is disposed. A plurality of protruding portions protruding from the electrode forming surface are formed so as to be arrayed in a direction crossing the extending direction of the external connection electrode.

Abstract: A wavelength tunable interference filter includes a fixed substrate, a movable substrate facing the fixed substrate, a fixed reflective film provided on the fixed substrate, a movable reflective film provided on the movable substrate and facing the fixed reflective film with an inter-reflective film gap interposed therebetween, a first wiring electrode provided on the fixed substrate, and a first conductive member provided on the fixed substrate. The fixed reflective film is connected to the first wiring electrode through the first conductive member, and the thickness of the first conductive member is less than the thickness of the first wiring electrode.

Abstract: A wavelength tunable interference filter, an optical filter device, an optical module, and an electronic apparatus include a fixed substrate, a movable substrate, a fixed reflective film provided on the fixed substrate, a movable reflective film provided on the movable substrate and facing the fixed reflective film with an inter-reflective film gap interposed therebetween, and an electrostatic actuator that changes the size of the inter-reflective film gap. The movable substrate is curved in a convex shape in a direction away from the fixed substrate in an initial state. The reflective film has reflectance characteristics in which the first reflectance at a predetermined first wavelength in a measurement wavelength range is lower than the second reflectance at a second wavelength longer than the first wavelength.

Abstract: An optical filter includes first and second substrates, first and second mirrors and first and second electrodes. The second substrate includes first, second and third surfaces. The second surface surrounds the first surface in a plan view, and the third surface surrounds the second surface in a plan view. A second height of the second surface is lower than a first height of the first surface, and a third height of the third surface is higher than the first height of the first surface. The first, second and third surfaces face a single flat surface of the first substrate. The first mirror is disposed on the first surface. The second mirror is disposed on the first substrate and faces the first mirror. The first electrode is disposed on the first substrate. The second electrode is disposed on the second surface of the second substrate and faces the first electrode.

Abstract: An optical module includes a wavelength variable interference filter having a fixed reflective film, a movable reflective film which faces the fixed reflective film with a gap between reflective films interposed therebetween, and an electrostatic actuator that changes the gap between reflective films, and a gap control unit that controls the electrostatic actuator. The gap control unit controls the electrostatic actuator on the basis of an order which is set in accordance with a wavelength to be measured, and changes the gap between the reflective films.

Abstract: A variable wavelength interference filter includes a first substrate having a stationary mirror, a second substrate bonded to the first substrate and provided with a movable section and a movable mirror fixed to the movable section, and a third substrate bonded to the second substrate on an opposite side to the first substrate, and is provided with a first inner space sandwiched by the first substrate and the second substrate, a first gap, through which the first inner space communicates with the outside, a second inner space sandwiched by the second substrate and the third substrate, and a second gap, through which the second inner space communicates with the outside, and the first gap and the second gap are each sealed by a sealing member.

Abstract: The invention relates to controllable Fabry-Perot interferometers which are produced with micromechanical (MEMS) technology. The prior art interferometers have a temperature drift which causes inaccuracy and requirement for complicated packaging. According to the invention the interferometer arrangement has both an electrically tuneable interferometer and a reference interferometer on the same substrate. The temperature drift is measured with the reference interferometer and this information is used for compensating the measurement with the tuneable interferometer. The measurement accuracy and stability can thus be improved and requirements for packaging are lighter.

Abstract: A variable wavelength interference filter includes a stationary substrate and a movable substrate opposed to each other, the stationary substrate includes a stationary reflecting film, a first drive electrode, and a first capacitance detecting electrode, and the movable substrate includes a movable reflecting film arranged to have an inter-reflecting film gap with the stationary substrate, a second drive electrode arranged to have an inter-drive electrode gap with the first drive electrode, and a second capacitance detecting electrode arranged to have an inter-capacitance detecting electrode gap with the first capacitance detecting electrode. The capacitance detecting electrodes detect the capacitance between the electrodes. The gap amount of the inter-reflecting film gap is changed by the drive electrodes. The gap amounts of the inter-reflecting film gap, the inter-drive electrode gap, and the inter-capacitance detecting electrode gap are different from each other.

Abstract: An optical filter includes first and second substrates, first and second mirrors, and first and second electrodes. The second substrate faces the first substrate. The second substrate includes a first surface and a second surface. The second surface surrounds the first surface in a plan view and a second height of the second surface is lower than a first height of the first surface. The first mirror is formed on the first surface of the second substrate. The second mirror is formed on the first substrate, the second mirror facing the first mirror. The first electrode is formed on the first substrate. The second electrode is formed on the second surface of the second substrate. The second electrode faces the first electrode.

Abstract: An apparatus for reducing fringe interference of light created in the optical system of a laser spectroscopy system comprising an electromagnetic actuator for generating, along a laser path, physical translational vibration of an optical element of the optical system and a control device for controlling the amplitude and frequency of said vibration. The optical element is arranged on a cantilever body which is, at one end, attached to a base by a flexural pivot and, at the other free end, coupled to the electromagnetic actuator, and the control device includes a controller that controls the amplitude of the vibration and a vibration sensor attached to the cantilever body and providing the actual vibration value to the controller to improve fringe interference reduction, especially with longer wavelengths.

Abstract: An optical system and method for illuminating an object under investigation with filtered light is disclosed. In one embodiment, the system comprises a linear filter array having a plurality of elongate variable bandpass filters. The variable bandpass filters each have a cam follower and are translatable along a longitudinal axis, whereby translation brings a selected filter in line with a beam of light. The cam follower of selected filter engages a cam adjacent to the array. This causes tilting of the filter to a desired angle thereby allowing precise selection of the bandpass frequency of the selected filter. Preferably, the filter can be tilted by an angle of up to 60°. Each elongate filter is preferably substantially rectangular and has a long dimension that is at least about twice the short dimension.

Abstract: An optical image shutter is disclosed. The optical image shutter includes an optical filter having a fixed refractive index and an optical filter having a variable refractive index. The optical filter having a fixed refractive index may include two layers having different refractive indexes and stacked alternately at least once. Alternatively, the optical filter having a variable refractive index may include at least one refractive index variable layer, and two layers having different refractive indexes and stacked alternately at least once. The optical image shutter may further include a transparent electrode for applying an electric field to the at least one refractive index variable layer.

Abstract: An optoelectronic swept-frequency semiconductor laser coupled to a microfabricated optical biomolecular sensor with integrated resonator and waveguide and methods related thereto are described. Biomolecular sensors with optical resonator microfabricated with integrated waveguide operation can be in a microfluidic flow cell.

Abstract: Disclosed are a wavelength tunable optical filter and an optical source which can achieve a wideband, a high speed wavelength tuning and a consecutive variation, and can be simply manufactured. The wavelength tunable optical filter according to an exemplary embodiment of the present disclosure includes a first optical deflector driven by an electrical signal and configured to control the propagation direction of an incident light and a Fabry-Perot (FP) filter configured to filter the incident light having passed through the first optical deflector to output a selected light having a particular wavelength.

Abstract: A Fabry-Perot tunable filter comprises a membrane device. The membrane device includes a support structure having an optical port. Also, the membrane device has an optical membrane structure separated from the support structure over the optical port. The optical membrane structure includes a center body portion and an outer body potion. Tethers extend radially from the center body portion to the outer body portion of the optical membrane structure. The center body portion has an area that is about equal or smaller than the area of the optical port.

Abstract: A optical module includes, a wavelength variable interference filter which include reflection films opposite to each other and an electrostatic actuator portion including a first electrostatic actuator and a second electrostatic actuator and changing a gap between the reflection films, and a voltage control portion which controls voltage which is applied to the electrostatic actuator portion, the voltage control portion includes, a bias driving portion which applies bias voltage to the first electrostatic actuator, a gap detector, and a feedback control portion which applies feedback voltage corresponding to a detected gap amount to the second electrostatic actuator.

Abstract: A variable-wavelength interference filter includes: a first substrate; a second substrate facing the first substrate; a first reflection layer provided on a surface facing the second substrate, of the first substrate; a second reflection layer which is provided on a surface facing the first substrate, of the second substrate, and faces the first reflection layer via an inter-layer gap; and an electrostatic actuator which flexes the second substrate in a direction toward the first substrate and thus changes the inter-layer gap. The first reflection layer and the second reflection layer have a reflectance characteristic showing a higher reflectance to light with a second wavelength that is shorter than a first wavelength, than a reflectance to light with the first wavelength.

Abstract: An optical filter includes a first variable wavelength bandpass filter that extracts light of a first wavelength band and has first and second spectral bands and a second variable wavelength bandpass filter that extracts light of a second wavelength band adjacent to the first wavelength band and has third and fourth spectral bands. Part of the period during which the light of the first spectral band is extracted overlaps with the period during which the light of the third spectral band is extracted, and part of the period during which the light of the second spectral band is extracted overlaps with the period during which the light of the fourth spectral band is extracted.

Abstract: A variable wavelength interference filter includes a stationary substrate provided with a stationary reflecting film, a movable substrate provided with a movable reflecting film, a first electrostatic actuator, and a second electrostatic actuator which can be driven independently of the first electrostatic actuator, two first partial actuators constituting the first electrostatic actuator have the same shape as each other in the plan view, and are arranged at regular angular intervals and with the same distance with respect to the filter center point, and two second partial actuators constituting the second electrostatic actuator have the same shape as each other in the plan view, and are arranged at regular angular intervals and with the same distance with respect to the filter center point.

Abstract: A variable wavelength interference filter includes a stationary substrate including a stationary reflecting film and a stationary electrode, and a movable substrate including a movable reflecting film and a movable electrode, the stationary electrode and the movable electrode are disposed outside an optical interference region where the stationary reflecting film and the movable reflecting film overlap each other in a filter plan view, an inner peripheral edge of the stationary electrode is located nearer to the optical interference region than an outer peripheral edge of the movable electrode, and an outer peripheral edge of the stationary electrode is located further from the optical interference region than an outer peripheral edge of the movable electrode.

Abstract: An interference filter includes: a first substrate; a second substrate that faces one side of the first substrate and is bonded to the first substrate; a first reflection film formed on the side of the first substrate that faces the second substrate; and a second reflection film provided on the second substrate and faces the first reflection film, the first substrate including a first gap formation region in which the first reflection film is disposed and which is not contact with the second substrate, and wherein the first substrate and the second substrate are adhesively bonded to each other with the adhesive applied into the adhesive grooves with the first bonding region and the second bonding region bonded to each other.

Abstract: An acoustic-wave sensor (10) is constructed by a membrane (11) adapted to be displaced by an acoustic wave, a first waveguide (16a) for transmitting light therein, an optical coupling part (15) to which the light transmitted through the first waveguide (16a) is adapted to be optically coupled, and a second waveguide (16b) through which the light coupled from the optical coupling part (15) transmits. When the membrane (11) is displaced by its reception of the acoustic wave, at least one of an optical coupling coefficient between the first waveguide (16a) and the optical resonator (15) and an optical coupling coefficient between the second waveguide (16b) and the optical resonator (15) is changed to output a corresponding optical signal.

Abstract: A Fabry-Perot etalon is provided with first and second partially reflecting mirrors (12, 14) attached to a cuboidal spacer (16). The spacer (16) has a cylindrical bore (18) through its centre and the mirrors (12, 14) are bonded, on axis, to opposite ends of this bore (18). Four support elements (22-28) are arranged symmetrically with respect to the axis in a tetrahedral configuration and constrain the cuboidal spacer (16) in all degrees of freedom. The cuboidal spacer (16) is flattened at its vertices, which results in modified distortion of the spacer (16) under the action of a compressive force acting through the supports. This structure of etalon provides insensitivity to inertial forces due to acceleration in all six degrees of freedom (three linear and three rotational) simultaneously with insensitivity to differential forces.

Abstract: An interference filter includes a first substrate, a second substrate opposed to the first substrate, a first optical film provided to the first substrate, and a second optical film provided to the second substrate and opposed to the first optical film, at least one of the first and second optical films has a metal film having a reflecting property and a transmitting property with respect to light in a desired wavelength band, a surface and an edge portion of the metal film are covered by a barrier film, and the barrier film is formed of a material having conductivity.

Abstract: An optical filter device includes an interference filter and a housing. The interference filter includes a fixed substrate, a movable substrate joined to the fixed substrate, a fixed reflective film provided on the fixed substrate, and a movable reflective film provided on the movable substrate and opposed to the fixed reflective film across an inter-reflective film gap. The housing includes a base substrate on which the interference filter is arranged. A fixing member is arranged between the movable substrate and the base substrate. The movable substrate is fixed to the base substrate by the fixing member in one place excluding a region where the movable reflective film is provided.

Abstract: A variable spectroscopic element in which a placed position of first sensor and a placed position of the third sensor are symmetrical and a placed position of second sensor and a placed position of fourth sensor are symmetrical with respect to a line connecting the centers of mass of the surfaces of a pair of optical substrates opposite to each other respectively and first to fourth actuators are arranged includes a control unit which calculates a distance between the centers of mass, a first angle that is made between the moved optical substrate and the other optical substrate and a second angle that is made between the other optical substrate and the moved optical substrate, with signals from the first to fourth sensors, and drives the first to fourth actuators on the basis of the distance between the centers of mass, the first angle, and the second angle.

Abstract: A method of forming a tunable Fabry-Perot filter includes forming a first reflective layer on a surface of a substrate, forming a sacrificial layer over the first reflective layer, forming a second reflective layer over the sacrificial layer, defining vias through the sacrificial layer, forming a support body over the sacrificial layer which extends into the vias and removing the sacrificial layer to define a gap intermediate the first and second reflective layers.

Abstract: Tunable filters are provided that have transmittances that are independent of the polarization state of an incident beam. The tunable filters include an interference bandpass filter positioned to transmit an input beam of light to produce transmitted light. A wave plate is positioned to rotate the polarization of the transmitted light and a reflector is positioned to reflect the rotated light so that it propagates through the wave plate a second time and then passes through the interference filter a second time to produce second transmitted light.

Abstract: The variable spectroscopic element includes a pair of optical substrates 21-22, four sensors 31-34, four piezoelectric elements 41-44, and a control section. The sensors 31, 33 are arranged to form symmetry with respect to the center axis, which links gravity centers of mutually facing surfaces of the optical substrates 21-22, and so are the sensors 32, 34. The control section calculates, from signals of the sensors 31-34, a distance x between the gravity centers of the mutually facing surfaces, and angles ?, ? each of which is formed by a plane perpendicular to the center axis and the facing surface of the movable substrate 22, to drive the piezoelectric elements 41-44 on the basis of the distance x, the angles ?, ?, and to carry out feedback control and feed forward control with respect to at least one of the distance x, the angle ?, and the angle ?.

Abstract: A variable wavelength interference filter includes a stationary substrate, a movable substrate bonded to the stationary substrate, a stationary reflecting film provided to the stationary substrate, a movable reflecting film provided to the movable substrate, and opposed to the stationary reflecting film across an inter-reflecting film gap, and an electrostatic actuator adapted to vary the gap amount of the inter-reflecting film gap by deflecting the movable substrate toward the stationary substrate, a releasing space to which air between the stationary reflecting film and the movable reflecting film moves when the gap amount of the inter-reflecting film gap is reduced is provided between the stationary substrate and the movable substrate, and assuming that a spring constant of the movable substrate is kv, and a spring constant of the air existing in the inter-reflecting film gap is kair, kv?20×kair is satisfied.

Abstract: A wavelength variable interference filter includes a fixed substrate including a fixed reflective film, a movable substrate including a movable reflective film, and a bonding section configured to bond the fixed substrate and the movable substrate. The movable substrate includes a movable section, a holding section, and a substrate outer circumferential section. The holding section includes a flat section having a uniform thickness dimension and a curved surface section provided on the outer circumferential side of the flat section, a thickness dimension of the curved surface section increasing toward the substrate outer circumferential section. The bonding section is provided in an outer circumferential region extending along substrate outer circumferential edges on surfaces opposed to each other of the fixed substrate and the movable substrate. The inner circumferential edge of the bonding section is provided further on the inner side than the outer circumferential edge of the curved surface section.

Abstract: A wavelength variable interference filter includes a fixed substrate, a movable substrate, a fixed reflective film provided on the fixed substrate, a movable reflection film provided on the movable substrate and opposed to the fixed reflective film via an inter-reflective film gap, a fixed electrode provided on the fixed substrate, a movable electrode provided on the movable substrate and opposed to the fixed electrode via an inter-electrode gap, a fixed charging preventing electrode provided along the outer circumferential edge of the fixed electrode and in non-contact with the fixed electrode and grounded, and a movable charging preventing electrode provided along the outer circumferential edge of the movable electrode and in non-contact with the movable electrode and grounded.

Abstract: A conventional interference tunable filter is combined with a pair of shaping prisms to enlarge the circular input beam in the direction orthogonal to the direction of beam propagation and to the axis of rotation of the tunable filter. The degree of expansion is tailored to minimize the walk-off losses produced by successive reflections in the cavity of the tunable filter. By appropriately sizing the enlargement, the substantially elliptical beam produced by the shaping prisms encompasses sufficient reflected beams after passing through the tunable filter to produce substantially the same filter output that in a conventional filter would require a materially larger input beam. The input beam is preferably first converted to two parallel beams of the same polarization state. Both beams are then expanded by the prisms and processed by the tunable filter.

Abstract: What is disclosed is a filter array for a multi-resolution multi-spectral camera system which not only captures 2D images at multiple wavelength bands simultaneously but also at a spatial resolution that meets the demand for spatial feature extraction. The present system optimizes filter bands that provide high image contrast at the highest possible resolution to enable spatial feature extraction and other wavelength bands at lower resolution to achieve maximum number of wavelength bands (e.g. spectral resolution) for multi-spectral analysis. After determining the required spatial resolution and number of wavelength bands for spectral analysis, multiple filters are arranged in a geometric pattern with each filter being designed to have specified wavelength and spatial resolution. Physical sizes of filters differ within each filter group. This maximizes the detector usage while optimizing the trade-off between spatial resolution and spectral resolution.

Abstract: A laser interference lithography apparatus capable of stitching small exposed areas into a large exposed area includes a body, a laser beam supplying unit, a reflecting mechanism, an L-shaped fixing mechanism and a substrate stage. The laser beam supplying unit fixed onto the body provides a laser beam. The reflecting mechanism is movably and rotatably mounted on the body. The L-shaped fixing mechanism mounted on the body includes a first mounting seat and a second mounting seat. An upright first reflecting mirror is fixed to the first mounting seat. The second mounting seat connected to the first mounting seat fixes a horizontal mask, and is substantially perpendicular to the first mounting seat. The substrate stage, movably mounted on the body and disposed below the second mounting seat, supports a substrate. Thus, a large-area pattern formed by stitching small-area patterns may be obtained.

Abstract: A variable wavelength interference filter includes: a first reflective film disposed on a face of a first substrate facing a second substrate; a second reflective film disposed on a face of the second substrate facing the first substrate and the first reflective film; a first electrode disposed on the face of the first substrate; and a second electrode disposed on the face of the second substrate. The second substrate includes a movable portion on which the second reflective film is disposed and a connection maintaining portion maintaining the movable portion to be movable in a substrate thickness direction, the connection maintaining portion circumscribes the movable portion and is thinner than the movable portion, and the second electrode is disposed on a portion of the second substrate that is thicker than the connection maintaining portion.

Abstract: The present invention provides an imaging lens composed of three lenses that can be made compact (downsized, thinned), allows a reduction in cost and can be made compatible with a high pixel imaging element having a megapixel or more incorporated in a small mobile product such as a mobile phone. The imaging lens 6 includes, in order from the object side to the image surface side: an aperture stop 4; a first lens 1 having positive refractive power whose lens surface facing the image surface side is provided with a diffractive optical element; a second lens 2 composed of a meniscus lens having positive refractive power whose lens surface facing the image surface side is convex; a third lens 3 having negative refractive power.