Abstract: An optical filter includes first and second substrates, first and second mirrors, and first and second electrodes. The second substrate faces the first substrate. The second substrate includes a first surface and a second surface. The second surface surrounds the first surface in a plan view and a second height of the second surface is lower than a first height of the first surface. The first mirror is formed on the first surface of the second substrate. The second mirror is formed on the first substrate, the second mirror facing the first mirror. The first electrode is formed on the first substrate. The second electrode is formed on the second surface of the second substrate. The second electrode faces the first electrode.

Abstract: A variable wavelength interference filter includes a first substrate having a fixed mirror, a second substrate bonded to the first substrate and having a movable portion and a movable mirror fixed to the movable portion, a third substrate bonded to the second substrate on the side opposite to the first substrate, and an electrostatic actuator which displaces the movable portion in a substrate thickness direction, wherein a penetration hole connecting a light exiting-side space between the first substrate and the second substrate and a light incident-side space between the second substrate and the third substrate to a space outside the filter is formed, and the penetration hole is sealed with a sealant which tightly closes each space in a reduced-pressure state.

Abstract: A filter includes a fixed substrate, a movable substrate opposed to the fixed substrate, a first reflection film provided on a surface of the fixed substrate facing the movable substrate, a second reflection film provided on the movable substrate and opposed to the first reflection film across a gap, a first electrode provided on the surface of the fixed substrate facing the movable substrate, a second electrode provided on the movable substrate and opposed to the first electrode, bonding parts provided on opposing surfaces of the fixed and movable substrates and bonding the fixed substrate to the movable substrate, and a groove part provided in at least one of the opposing surfaces, and the gap is in communication with an exterior of the filter via the groove part.

Abstract: There is herein described an optical filter. The optical filter includes a substrate and a plurality of at least four optical thin film layers. The optical thin film layers are disposed on top of the substrate. Each of the optical thin film layers has an effective refractive index different from effective refractive indices of the immediate upper and lower optical thin film layers. At least one of the optical thin film layers is a thickness tunable nano-feature layer. The nano-feature layer contains a plurality of flexible nano-features. At least one of the optical thin film layers is a dense layer.

Abstract: A voltage-controlled capacitor and methods for forming the same are described. A mechanical conductor membrane of the voltage-controlled capacitor is movable to and from a first position and a second position. An amount of capacitance can vary with the movement of the mechanical conductor membrane. A microelectromechanical systems (MEMS) voltage-controlled capacitor can be used in a variety of applications, such as, but not limited to, RF switches and RF attenuators.

Abstract: In one embodiment of the invention, a semiconductor optical amplifier (SOA) in a laser ring is chosen to provide low polarization-dependent gain (PDG) and a booster semiconductor optical amplifier, outside of the ring, is chosen to provide high polarization-dependent gain. The use of a semiconductor optical amplifier with low polarization-dependent gain nearly eliminates variations in the polarization state of the light at the output of the laser, but does not eliminate the intra-sweep variations in the polarization state at the output of the laser, which can degrade the performance of the SS-OCT system.

Abstract: A tunable etalon, driver circuit, a light receiving device, an I-V convertor circuit connected to the light receiving device, an amplifier circuit having a gain switching function, an AD convertor, a microprocessor, and a voltage setting memory having a gain table as data of gain of the amplifier circuit are provided, and preliminary measurement of a light reception voltage is performed based on a current detected by the light receiving device, and the gain of the amplifier circuit is adjusted to adjust the light reception voltage obtained by the preliminary measurement to a dynamic range of the AD convertor with reference to the gain table of the gain of the amplifier circuit with respect to the light reception voltage obtained by the preliminary measurement stored in the voltage setting memory.

Abstract: An optical filter includes fixed substrate, a movable substrate opposed to the fixed substrate, a first reflection film provided on a surface of the fixed substrate facing the movable substrate, a second reflection film provided on the movable substrate and opposed to the first reflection film across a gap, a first electrode formed to cover the first reflection film and to extend beyond an outer circumference of the first reflection film, and a second electrode provided on a surface of the movable substrate facing the fixed substrate and opposed to a part of the first electrode, and the first electrode is formed of a light-transmissive material, and the first electrode and the second reflection film are electrically connected at the same potential.

Abstract: An optical filter comprising: a first substrate; a second substrate facing the first substrate, the second substrate including a first surface and a second surface, a first height of the first surface being different from a second height of the second surface; a first mirror formed on the first surface of the second substrate; a second mirror formed on the second surface of the second substrate; a third mirror formed on the first substrate, the third mirror facing the first mirror; a fourth mirror formed on the first substrate, the fourth mirror facing the second mirror; a first electrode formed on the first substrate; and a second electrode formed on the second substrate, the second electrode facing the first electrode.

Abstract: An optical filter includes a first substrate, a second substrate opposed to the first substrate, a first optical film provided on a surface of the first substrate facing the second substrate, a second optical film provided on the second substrate and opposed to the first optical film via a gap, a first electrode provided on the surface of the first substrate facing the second substrate, and a second electrode provided on the second substrate and opposed to the first electrode, wherein a first charged body film with charge is formed on top of the first optical film, a second charged body film with charge is formed on top of the second optical film, and the first charged body film and the second charged body film are charged with the same polarity and opposed.

Abstract: There is set forth herein an optomechanical device which can comprise a first mirror and a second mirror forming with the first mirror a cavity. In one aspect the first mirror can be a movable mirror. The optomechanical device can be adapted so that the first mirror is moveable responsively to radiation force.

Abstract: An apparatus includes an optical filter having first and second passbands that are different, the optical filter including selectively operable first passband adjusting structure that varies a characteristic of the first passband without influencing the second passband. According to a different aspect, a method includes filtering radiation with an optical filter having first and second passbands that are different, and selectively varying a characteristic of the first passband without influencing the second passband.

Abstract: An optical system of a microlithographic projection exposure apparatus permits comparatively flexible and fast influencing of the intensity distribution and/or the polarization state. The optical system includes at least one layer system that is at least one-side bounded by a lens or a mirror. The layer system is an interference layer system of several layers and has at least one liquid or gaseous layer portion with a maximum thickness of one micrometer (?m), and a manipulator for manipulation of the thickness profile of the layer portion.

Abstract: A photonic device is provided having a two or three-dimensionally periodic structure of interconnected members with alterable spacing between the members. The structure is composed of a shape memory polymer configured to be thermo-mechanically tunable to display a plurality of optical properties under a series of temperature changes and stress. A method of producing a photonic device based on a shape memory polymer is provided. A mold, having a two or three-dimensionally periodic structure of interconnected components with a characteristic spacing between the components, is infiltrated with a shape memory polymer precursor to form a composite structure. The composite structure is solidified. The mold is removed from the composite structure to form a photonic device as an inverse replica of the mold.

Abstract: A tunable interference filter includes: first and second opposed substrates; a first reflection film provided on a first reflection film fixing surface of the first substrate; a second reflection film provided on a second reflection film fixing surface of the second substrate and separated from the first reflection film by a gap; and a first electrode provided on a first electrode surface of the first substrate facing the second substrate, wherein the first electrode surface is spaced apart from the second substrate by a different distance than the first reflection film fixing surface, and a layered part in which the first reflection film and the first electrode are stacked is provided on the first electrode surface, the layered part being spaced apart from the second substrate by a larger distance than the first reflection film fixing surface.

Abstract: A wavelength filter based on a symmetric PLC circuit comprising an MZ filter-based demultiplexer, a waveguide resonator, and an MZ filter-based multiplexer is presented. The wavelength filter is tuned using pulse width modulated drive signals that enable fine wavelength control resolution. Embodiments in accordance with the present invention attain narrow spectral filtering capability over a wide wavelength tuning range. Further, embodiments in accordance with the present invention mitigate chromatic dispersion.

Abstract: A tunable interference filter includes: a first substrate; a second substrate; a first drive electrode provided on the first substrate ; a second drive electrode provided on the second substrate; a first detection electrode provided on the first substrate; a second detection electrode provided on the second substrate, wherein the first drive electrode includes a first partial drive electrode and a second partial drive electrode, a first lead drive electrode extending from the first partial drive electrode and a second lead drive electrode extending from the second partial drive electrode are provided on the first substrate, the first detection electrode includes a first partial detection electrode and a second partial detection electrode provided along a virtual circle, a first lead detection electrode extending from the first partial detection electrode and a second lead detection electrode extending from the second partial detection electrode are provided on the first substrate.

Abstract: An optical filter and a method for fabricating an optical filter with a wide tuning range and a structure subject to miniaturization. The optical filter includes a bottom and a top dielectric layer with a stripe or film of metal between the dielectric layers which have dissimilar refractive index dispersion. The stripe of metal functions as a waveguide supporting a long-range surface plasmon polariton mode which will be achieved at wavelengths for which the refractive indices of the dielectric layers are the same thereby providing a bandpass filter. Furthermore, one of the dielectric layers is made of a material that allows its refractive index to be tuned, such as by changing its applied voltage or temperature. By tuning the refractive index of the dielectric layer, the wavelength at which the refractive indices of the dielectric layers match changes thereby effectively tuning the optical filter.

Abstract: A switchable free-spectral-range mode selector is used to change the free spectral range of a free-space delay-line interferometer. The mode selector consists of a rotatable device with at least one transparent plate selected to produce the desired change in the free spectral range of the delay-line interferometer. The device may be rotated in and out of the free-space optical path of on of the interferometer arms. If used as a DPSK demodulator, the device enables operation at multiple predetermined free spectral ranges. In the preferred embodiment, the demodulator includes a 50/50 beam-splitter cube combined with two cavities. The mode selector consists of a plurality of different transparent slabs attached to a rotatable shaft so that any one of the slabs or none may be inserted in the appropriate optical path to obtain the desired FSR mode of operation.

Abstract: An etalon (tunable interference filter) includes a fixed substrate, a movable substrate facing the fixed substrate, a fixed reflection film disposed on the fixed substrate, a movable reflection film disposed on the movable substrate and facing the fixed reflection film via a gap, a fixed electrode disposed on the fixed substrate, and a movable electrode disposed on the movable substrate and facing the fixed electrode. A movable insulating film is stacked on a surface of the movable electrode on the side of the fixed electrode, the movable electrode has a compressive stress, and the movable insulating film has a tensile stress.

Abstract: An etalon as a tunable interference filter includes a first substrate, a second substrate, a fixed mirror, a movable mirror, and an electrostatic actuator. The respective mirrors are formed by stacking one layer of a TiO2 film and one layer of an alloy film. A film thickness dimension of the TiO2 film and a film thickness dimension of the Ag alloy film are set to film thicknesses such that reflectance of a reference wavelength may be target reflectance and reflectance of a set wavelength may be lower than that of the case where the reflection film is formed only by the metal film.

Abstract: Tunable spectral filter includes a Fabry-Pérot interferometer (FPI), at least three actuators, at least three respective spring elements, and at least three respective sensors. The FPI includes two optical elements each having a partially reflective surface, with an optical cavity defining an optical gap between the two surfaces. The actuators, spring elements and sensors are disposed along the periphery of the optical elements. Multi-wavelength incident light enters the first optical element toward the optical cavity. Each actuator applies a selective force to move the optical element surfaces relative to each other, as the respective spring element applies an opposing force, thereby establishing an optical gap width, while maintaining the optical element surfaces substantially in parallel.

Abstract: An etalon is provided with a fixed substrate and a movable substrate opposed to the fixed substrate. The fixed substrate is provided with a first bonding surface to be bonded to the movable substrate via a bonding film and a first electrode surface on which a part of the first electrode is formed. The movable substrate is provided with a second bonding surface to be bonded to the first bonding surface via the bonding film and a second electrode surface on which a part of the second electrode is formed. In the state in which the fixed substrate and the movable substrate are bonded to each other with the bonding film, the first electrode formed on the first electrode surface and the second electrode formed on the second electrode surface have contact with each other.

Abstract: An optical filter includes a first substrate, a second substrate, a first reflective film that is disposed on the first substrate, a second reflective film that is disposed on the second substrate, first and second fixed electrodes that are disposed on the first substrate at positions located at the periphery of the first reflective film in plan view, and first and second variable electrodes that are disposed on the second substrate and face the first and second fixed electrodes. Slit portions of the second variable electrode are formed such that the first and second variable electrodes have a center symmetrical structure with the reflective film as its center.

Abstract: An etalon includes a first substrate, a second substrate facing the first substrate, a fixed mirror provided on a surface of the first substrate that faces the second substrate, a movable mirror provided on the second substrate and facing the fixed mirror via an inter-mirror gap, and a first electrode provided on the surface of the first substrate that faces the second substrate. A first multilayer stopper portion is provided by a portion of the first electrode being stacked with at least a portion of an outer circumferential edge of the fixed mirror.

Abstract: The invention relates to laser technology and can be used for creating tunable lasers in the near IR region for swept source optical coherence tomography. The developed tunable frequency selector is used for a tunable laser with a shortest possible optical length of the active cavity comprising a frequency selector for operation in the regime of single longitudinal mode generation. The use of the frequency selector as one of the laser mirrors reduces the number of adjustments of laser optical elements and laser costs. To achieve this goal, a waveguide with a mode size of several wavelengths is positioned in front of the Fabry-Perot cavity. The modes of the waveguide and the Fabry-Perot cavity are partially matched. The Fabry-Perot cavity may be tilted relative to the optical axis of the waveguide. The Fabry-Perot cavity may comprise two minors, at least one of which is convex, or two minors, at least one of which has no radial symmetry.

Abstract: A demodulator comprises an input splitter, optical device sets, and couplers. The input splitter splits an input signal comprising symbols to yield a number of signals. A first optical device set directs a signal of along a first path. A second optical device set directs another signal along a second path to yield a delayed signal. At least a portion of the second path is in free space. A path length difference between the first path and the second path introduces a delay between the first signal and the second signal. A coupler receives a portion of the signal and a portion of the delayed signal to generate interference, where the interference indicates a phase shift between a phase corresponding to a symbol and a successive phase corresponding to a successive symbol.

Abstract: A fundamental limit to the sensitivity of optical interferometry is thermal noise that drives fluctuations in the positions of the surfaces of the interferometer's mirrors, and thereby in the phase of the intracavity field. A scheme for substantially reducing this thermally driven phase noise is provided in which the strain-induced phase shift from a mirror's optical coating cancels that due to the concomitant motion of the substrate's surface. As such, although the position of the physical surface may fluctuate, the optical phase upon reflection can be largely insensitive to this motion.

Abstract: A variable wavelength interference filter includes an electrostatic actuator that includes a fixed electrode and a movable electrode. The fixed electrode includes a plurality of fixed partial electrodes, the movable electrode includes a plurality of movable partial electrodes, and each partial actuator is configured by the fixed partial electrode and the movable partial electrode that face each other. The partial actuators have an equal area, have centers of gravity thereof arranged at equal angular intervals on a virtual circle having a center point of the movable portion as its center, and are electrically connected in series between partial electrodes for voltage application.

Abstract: A wavelength-variable interference filter includes first and second electrodes provided at first and second substrates, respectively, the second substrate including a movable section, first and second electrode wires that extend from the first and second electrodes toward outer circumferential edges of the first and second substrates, respectively, a first opposite electrode wire disposed so as to be isolated from the second electrode, and a first conductive section that connects the first electrode wire with the first opposite electrode wire. The second electrode wire and the first opposite electrode wire extend passing through a center point of an imaginary circle of the movable section in respective directions and dividing the imaginary circle at regular angular intervals.

Abstract: An optical module comprising a tunable interference filter including a first substrate, a second substrate facing the first substrate, a first reflective film formed on the first substrate, a second reflective film formed on the second substrate and facing the first reflective film, a gap changing unit changing a gap between the first reflective film and the second reflective film, and a driving electrode line electrically connected to the gap changing unit, a temperature sensor detecting temperature of the tunable interference filter and including a first sensor wiring and a second sensor wiring, the first sensor wiring being electrically connected to the driving electrode line, a switch electrically connected to the second sensor wiring, and a temperature detecting circuit electrically connected to the switch.

Abstract: An interference filter includes a fixed mirror and a movable mirror which are disposed so as to face each other with a gap therebetween. The fixed mirror is formed by laminating a one-layer TiO2 film and a one-layer Ag alloy film. In addition, the movable mirror is formed by laminating a one-layer TiO2 film and a one-layer Ag alloy film.

Abstract: An optical filter comprising a first substrate, a second substrate having a support portion which supports the first substrate, a first optical film provided on the first substrate, a second optical film provided on the second substrate and arranged to face the first optical film, a first protective film covering at least the first optical film, a second protective film covering at least the second optical film, a first bonding film, a portion of the first bonding film overlapping a surface of the first protective film in a plan view but does not overlapping the first optical film and a second bonding film, a portion of the second bonding film overlapping a surface of the second protective film in the plan view but does not overlapping the second optical film.

Abstract: A light filter comprising a first substrate, a second substrate, a first optical film, a second optical film, a second bonding film, and a first bonding film, wherein the first optical film is formed to be a multilayer film in which a first optical substrate film, a first optical intermediate film, and a first optical surface film are stacked, the second optical film is formed to be a multilayer film in which a second optical substrate film, a second optical intermediate film, and a second optical surface film are stacked, a part of the first bonding film is one of the first optical substrate film and the first optical intermediate film, and a part of the second bonding film is one of the second optical substrate film and the second optical intermediate film.

Abstract: The present invention relates to an optical filter arrangement that have a cut wavelength for light passing there through. The optical filter arrangement comprises a stack of a first optical layer and a second optical layer. Further, the optical filter arrangement comprises an electro active polymer material arranged between the first and second layers such that the cut wavelength is adjusted upon application of an electrical voltage to the electro active polymer material.

Abstract: A tunable interference filter comprising a first substrate, a second substrate facing the first substrate, a first reflection film formed on the first substrate, a second reflection film formed on the second substrate, the second reflection film facing the first reflection film by interposing a gap, and a gap adjustable-part that adjusts the gap, wherein the second substrate has a first surface and a second surface opposed to the first surface, wherein the second substrate includes a first groove on the first surface, and wherein the second substrate includes a second groove on the second surface, the second groove facing the first groove.

Abstract: Sensor electrodes and wiring patterns can be formed with fewer processes, and easy assembly without interference between the wires and optical substrates is realized.

Abstract: A wavelength-tunable interference filter comprising a first substrate, a second substrate facing the first substrate, a first reflective film provided on the first substrate, a second reflective film provided on the second substrate, the second reflective film facing the first reflective film, a first electrode provided on the first substrate, and a second electrode provided on the second substrate, the second electrode facing the first electrode, wherein the first electrode includes a first electrode layer and a second electrode layer, the first electrode layer has a first in-plane internal stress which is compressive, and the second electrode layer has a second in-plane internal stress which is tensile.

Abstract: An optical filter includes a first substrate, a second substrate facing the first substrate, a first optical film provided to the first substrate, and a second optical film provided to the second substrate and facing the first optical film, and at least one of the first optical film and the second optical film has a metal film having a reflecting property and transmissibility of a light in a desired wavelength band, and a surface and an edge portion of the metal film is covered by a dielectric film. It is also possible to provide a tilted surface to an edge portion of the metal film. Further, it is also possible to form a step-like bump between the metal film and a dielectric film as another optical film formed under the metal film.

Abstract: An imaging system includes a platform for placement of a sample or an animal to be imaged, and at least one excitation light source for irradiating the sample or animal to stimulate an emission at a plurality of different center wavelengths. An acousto-optic tunable filter (AOTF) is provided that includes a piezoelectric transducer crystal for emitting an acoustic wave having a ground electrode disposed on one side of the piezoelectric crystal. A patterned electrode layer is disposed on a side of the piezoelectric crystal opposite the ground electrode. The patterned electrode layer includes a continuous region proximate to its center and a discontinuous region, a pattern in the discontinuous region comprising a plurality of spaced apart features electrically connected to the continuous region, and an AO interaction crystal receiving the acoustic wave attached to the ground electrode or the patterned electrode layer.

Abstract: A tunable spectral filtration device is disclosed that includes one or more pairs of interference filters in series, wherein each element of each pair is independently selected from one or more options, independently positioned to intersect a path of converging or diverging light, and independently tilted with respect to the light path. Each filter may be either of a bandpass type, a shortpass type, a longpass type, a notch type, or multiple combinations thereof. Each filter in the series may be independently selected and tilted to tune the net spectral output of the series. The elements in a pair of filters may be tilted in opposite directions so as to cancel angle-of incidence dependent broadening of the spectral output of the individual filters for noncollimated light, as well as cancel translational shift of the transmitted light rays.

Abstract: Disclosed is a filter for a light receiving element, which can sufficiently eliminate disturbance due to sunlight and the like out of doors. A filter for a light receiving element according to one embodiment of the present invention is used for a light receiving element which receives signal light having a known spectral distribution. The filter for a light receiving element according to one embodiment of the present invention is configured so that when the energy density of the ambient light in the light receiving element is represented by N1 and the energy density of the signal light in the light receiving element is represented by N2, N1/(N2)2 is minimized under constraints.

Abstract: An interference filter has a fixed mirror and a movable mirror that are formed of Ag—Sm—Cu alloy films that contain silver (Ag), samarium (Sm), and copper (Cu), or Ag—Bi—Nd alloy films that contains silver (Ag), bismuth (Bi), and neodymium (Nd).

Abstract: Interferometric modulators include a movable mirror that is actuated by voltage applied to a plurality of electrodes relative to at least one other electrode, to define a cavity relative to a partially reflective mirror formed by a top plate. The depth of the cavity determines a bandwidth of light that is modulated by internal reflections within the cavity and which interferes with light that is reflected from a partially reflective mirror on the top plate, producing a desired reflected color of light for the modulator. Variations in manufacturing and material characteristics can cause the movable mirror to tilt relative to the partially reflective mirror, which degrades the modulation accuracy. To compensate, different voltages can be applied to the plurality of electrodes. The voltage can be determined at time of manufacture and stored in non-volatile memory, for use when the modulator is actuated during use.

Abstract: A tunable filter is provided.

Abstract: A beam delivery system of a projection exposure system comprises a laser generating a beam of laser light from a plurality of longitudinal laser modes in a cavity, wherein light generated by a single longitudinal laser mode has an average line width ?lat, wherein the laser light of the beam has, at each of respective lateral positions of the beam, a second line width ?lat corresponding to lateral laser modes, and wherein the laser light of the beam has, when averaged over a whole cross section thereof, a line width ?b corresponding to plural lateral laser modes, and wherein ?m<?lat<?b, and wherein an optical delay apparatus disposed in the beam provides an optical path difference ?l, wherein 0.8 · ? 0 2 ( 2 · ? ? ? ? l ) < ? ? ? l < 1.8 · ? 0 2 ( 2 · ?? l ) , wherein ?0 is an average wavelength of the light of the first beam of laser light, and ??lat represents the second line width.

Abstract: An optical filter includes a first variable wavelength bandpass filter that extracts light of a first wavelength band and has first and second spectral bands and a second variable wavelength bandpass filter that extracts light of a second wavelength band adjacent to the first wavelength band and has third and fourth spectral bands. Part of the period during which the light of the first spectral band is extracted overlaps with the period during which the light of the third spectral band is extracted, and part of the period during which the light of the second spectral band is extracted overlaps with the period during which the light of the fourth spectral band is extracted.

Abstract: Various embodiments of the invention relate to methods and systems for generating the color white in displays created from interferometric modulators and more specifically, to the generation of the color white through the use of reflected light at two wavelengths. In one embodiment, a display device displays the color white. The color white is generated by reflecting light from two pluralities of interferometric modulator types. The first modulator type reflects colored light at a specific wavelength. The second modulator type reflects colored light selected to be at a wavelength complementary to the first. The combined light reflected from the two types appears white in the display.

Abstract: An optical filter includes: a first variable wavelength bandpass filter that can extract light of a first wavelength band (400 to 460 nm), the first wavelength band having a first spectral band having a central wavelength equal to a first wavelength in the first wavelength band and a second spectral band having a central wavelength equal to a second wavelength in the first wavelength band; and a second variable wavelength bandpass filter that can extract light of a second wavelength band (480 to 540 nm) adjacent to the first wavelength band, the second wavelength band having a third spectral band having a central wavelength equal to a third wavelength in the second wavelength band and a fourth spectral band having a central wavelength equal to a fourth wavelength in the second wavelength band.

Abstract: The color reflected by an interferometric modulator may vary as a function of the angle of view. A range of colors are thus viewable by rotating the interferometric modulator relative to an observer. By placing a textured layer between an observer and an interferometric modulator, a pattern which includes the range of colors may be viewed by the observer, and the range of colors may thus be viewable from a single viewing angle.