Abstract: Desired spectral characteristics are achieved while achieving reduced size and decreased noise, and detecting the distance between optical substrates with superior precision. Provided is a variable spectroscopy element (1) including optical coating layers (3) provided on opposing surfaces, which face each other, of first and second optical substrates (4a, 4b) that face each other with a gap therebetween; an actuator (4c) that changes the gap between the first and second optical substrates (4a, 4b); a first sensor portion (6a) provided on the first optical substrate (4a), for detecting the gap between the first and second optical substrates (4a, 4b); and a second sensor portion (6b) provided on the second optical substrate (4b) so as to oppose the first sensor portion (6a), for detecting the gap between the first and second optical substrates (4a, 4b), wherein the numbers of the first and second sensor electrodes (6a, 6b) differ.

Abstract: Various embodiments described herein relate to a laser source for producing a pulsed laser beam comprising a plurality of ultrashort optical pulses having a variable repetition rate. In one embodiment, the laser source comprises a fiber oscillator, which outputs optical pulses and a pulse stretcher disposed to receive the optical pulses. The optical pulses have an optical pulse width. The pulse stretcher has dispersion that increases the optical pulse width yielding stretched optical pulses. The laser source further comprises a fiber amplifier disposed to receive the stretched optical pulses. The fiber optical amplifier has gain so as to amplify the stretched optical pulses. The laser source includes an automatically adjustable grating compressor having dispersion that reduces the optical pulse width. The grating compressor automatically adjusts this dispersion for different repetition rates.

Abstract: An optical filter for filtering an electromagnetic radiation of variable angle of incidence, includes a stack of at least one dielectric or semi-conductor layer arranged between two partially reflective layers, said stack defining a set of Fabry-Pérot cavities set to a predetermined wavelength. The average refractive index of the dielectric or semi-conductor layer is variable in a plane orthogonal to the direction of the stack so as to compensate the effects of the variation in the angle of incidence of the electromagnetic radiation on the transmission spectrum of the cavities.

Abstract: High-precision monolithic optical assemblies are formed using low-cost standard optical components, such as wedge plates and/or wedge second surface mirrors. By rolling and/or shifting the components relative to each other with matched optical surfaces in contact, a precise alignment solution is found for a particular optical assembly. The resulting arrangement of components can be bonded or held together so as to form a high-precision monolithic optical assembly, which can be inserted into an optical system, according to the assembly's function. The functionality of the monolithic optical assembly can be independent of the optical system in which it is used.

Abstract: Electrically tunable Fabry-Perot interferometers which are produced with micromechanical (MEMS) technology. Producing interferometers with prior art processes includes costly and complicated production phases. Therefore, it has not been possible to apply interferometers in consumer mass products. According to the present solution, the Fabry-Perot cavity is made by removing a sacrificial layer (112) which has been polymer material. A mirror layer (113, 117-120) which is produced above the sacrificial layer can be made with atomic layer deposition technology, for example. According to a preferable embodiment, electrodes (106b, 115b) of the mirror structures are formed by using sputtering or evaporation. With the present solution it is possible to avoid the above mentioned problems related with prior art.

Abstract: An etalon includes a first substrate and a second substrate. The first substrate has a first protrusion that does not face the second substrate, and a first electrode pad is formed on the first protrusion, whereby connection reliability can be improved.

Abstract: A light filter has a first reflecting film and a second reflecting film opposed to each other, a first electrode, a second electrode, a third electrode, a fourth electrode, and a potential difference control unit, the first electrode and the third electrode are opposed at a first distance, the second electrode and the fourth electrode are opposed at a second distance different from the first distance, the potential difference control unit brings the first electrode and the third electrode into contact by producing a potential difference between the first electrode and the third electrode and brings the second electrode and the fourth electrode into contact by producing a potential difference between the second electrode and the fourth electrode, and thereby, a gap between the first reflecting film and the second reflecting film may be controlled with high accuracy.

Abstract: The present patent application provides an interference cavity for precisely controlling an optical path including a cavity formed by two equal distance arms, wherein a positive adjusting plate and a negative adjusting plate are disposed in the interference cavity for compensating the change of a cavity length with temperature and thereby ensuring that the interference cavity length is a constant. The present patent application utilizes the matching relationship between the change of the refractive index of the positive adjustment plate with the temperature and the change of the refractive index of the negative adjusting plates with the temperature to make the optical path difference OPL invariant with changes in the environment temperature and thereby to ensure the precision of the optical path.

Abstract: An optical filter includes: a lower substrate; a lower mirror provided to the lower substrate; a lower electrode provided to the lower substrate; an upper substrate disposed so as to be opposed to the lower electrode; an upper mirror provided to the upper substrate, and opposed to the lower mirror; and an upper electrode provided to the upper substrate, and opposed to the lower electrode, wherein the upper substrate has a groove surrounding the upper mirror in a plan view, the groove includes a first side surface section, a second side surface section, a bottom surface section, a first end section located between the first side surface section and the bottom surface section, and a second end section located between the second side surface section and the bottom surface section, in a cross-sectional view, and the first end section and the second end section each have a curved surface.

Abstract: One embodiment includes display comprising a light modulator configured to display a portion of an image such as a reflective light modulator, a light emitter configured to display the portion of the image and a circuit configured to selectively provide signals to at least one of the light modulator and the light emitter indicative of the portion of the image. In one such embodiment, an active matrix provides a simple, efficient drive for such devices. Other embodiments methods of making and driving such devices.

Abstract: A system for spectrally filtering light is provided. The system includes a variable wavelength selector for selecting a wavelength from a light source and a tunable interference filter for filtering light from the variable wavelength selector. The interference filter may be synchronously tunable to the output of the variable wavelength selector.

Abstract: An optical filter includes: a first substrate; a second substrate opposed to the first substrate; a first reflecting film provided to the first substrate; a second reflecting film provided to the second substrate and opposed to the first reflecting film; a first electrode provided to the first substrate in a peripheral area of the first reflecting film; a second electrode provided to the first substrate in a peripheral area of the first electrode; a third electrode provided to the second substrate and opposed to the first electrode; and a fourth electrode provided to the second substrate and opposed to the second electrode.

Abstract: A material of variable emissivity includes a first metallic layer having a first aperture, a second metallic layer having a second aperture, and a variable dielectric layer interposed between the first metallic layer and the second metallic layer.

Abstract: In one embodiment of the invention, a semiconductor optical amplifier (SOA) in a laser ring is chosen to provide low polarization-dependent gain (PDG) and a booster semiconductor optical amplifier, outside of the ring, is chosen to provide high polarization-dependent gain. The use of a semiconductor optical amplifier with low polarization-dependent gain nearly eliminates variations in the polarization state of the light at the output of the laser, but does not eliminate the intra-sweep variations in the polarization state at the output of the laser, which can degrade the performance of the SS-OCT system.

Abstract: A variable wavelength interference filter includes: a first substrate having a light transmissive property; a second substrate opposed to and bonded to one surface of the first substrate; a first reflecting film disposed on the one surface of the first substrate; a second reflecting film disposed on a first surface of the second substrate opposed to the first substrate, and opposed to the first reflecting film via a gap; and a variable section adapted to vary the gap, wherein the second substrate includes a light transmission opening disposed at a position opposed to the first reflecting film, and penetrating through the second substrate from the first surface to the second surface on the opposite side, and a planar transmissive member opposed to the first substrate and adapted to close the light transmission opening.

Abstract: A switchable free-spectral-range mode selector is used to change the free spectral range of a free-space delay-line interferometer. The mode selector consists of a rotatable device with at least one transparent plate selected to produce the desired change in the free spectral range of the delay-line interferometer. The device may be rotated in and out of the free-space optical path of on of the interferometer arms. If used as a DPSK demodulator, the device enables operation at multiple predetermined free spectral ranges. In the preferred embodiment, the demodulator includes a 50/50 beam-splitter cube combined with two cavities. The mode selector consists of a plurality of different transparent slabs attached to a rotatable shaft so that any one of the slabs or none may be inserted in the appropriate optical path to obtain the desired FSR mode of operation.

Abstract: In a tunable interference filter according to the invention, a second substrate includes a light transmission hole and alight transmissive member provided within the light transmission hole, and the light transmission hole is formed in a tapered shape having a diameter dimension of an inner circumferential surface increasing from the first surface toward the second surface, and the light transmissive member has a light incident surface in parallel to the first reflection surface and the second reflection surface, a light exiting surface in parallel to the first reflection surface and the second reflection surface, and a tapered side surface having a diameter dimension increasing from the first surface toward the second surface, and the tapered side surface is in contact with the inner circumferential surface of the light transmission hole.

Abstract: A wavelength variable interference filter includes: a first substrate which has a light transmissive property; a second substrate which has a light transmissive property and is disposed to face one surface of the first substrate and is bonded thereto; a first reflection film which is provided on the first substrate; a second reflection film which is provided on the second substrate; and a variable section which varies the gap; wherein the second substrate includes: a first layer which has a movable section; and a second layer which is laminated to a surface of the first layer facing the first substrate, is formed in a plate shape with a uniform thickness, and has a support section configured to displaceably support the movable section; and the first layer is not laminated to at least a region overlapping with the support section in the planar view.

Abstract: A microscope includes a source of electromagnetic radiation, having a wavelength, ?1 and dividing optical elements configured for dividing the radiation from the source into multiple excitation beams. The microscope also includes a detector and directing optical elements, which are configured for directing each excitation beam in unique directions, such that the beams intersect in an excitation region within a sample to create a two-dimensional or three-dimensional interference pattern of multiple excitation maxima within the sample. The detector has individual detector elements, where the detector elements are configured for detecting light resulting from an interaction of an individual excitation maximum and the sample.

Abstract: A system and method for uniform light generation in projection display systems. An illumination source comprises a light source to produce colored light, and a scrolling optics unit optically coupled to the light source, the scrolling optics unit configured to create lines of colored light from the colored light, and to scroll the lines of colored light along a direction orthogonal to a light path of the illumination source. The scrolling optics unit comprises a single light shaping diffuser to transform the colored light into the lines of colored light, an optical filter positioned in the light path after the light shaping diffuser, and a scrolling optics element positioned in the light path after the optical filter. The single light shaping diffuser is capable of simultaneously transforming colored light into lines of colored light having substantially uniform intensity to provide uniform illumination.

Abstract: A wavelength tunable light source includes: an optical gain medium generating light; a wavelength tunable filter positioned on a optical path and transmitting or reflecting only a predetermined wavelength generated from and injected into the optical gain medium; a first housing where the optical gain medium and the wavelength tunable filter are mounted; and an optical fiber block providing the optical wave having the predetermined wavelength come from the wavelength tunable filter, wherein the wavelength tunable filter comprised of a dielectric thin-film filter formed by alternately stacking a first dielectric thin film layer and a second dielectric thin film layer having different refractive index.

Abstract: An optical element includes a multilayer film which has a first transmittance characteristic in a first wavelength region, and has a second transmittance characteristic in a second wavelength region existing at the side where a wavelength is longer than that of the first wavelength region. The multilayer film has a transmittance characteristic where a first peak with a maximum transmittance exists in the second wavelength region.

Abstract: A wavelength-specific optical switch combines one or more tunable filters and bandblock reflectors such that the absorption or reflection of selected wavelength bands in the optical spectrum (visible, near infrared, or near ultraviolet) can be switched on and off. The wavelength switch is programmable, multifunctional, general-purpose, solid-state optical filter. The wavelength switch may serve as a tunable notch or bandblock filter, a tunable bandpass filter, a tunable highpass or lowpass filter, or a tunable band reflector. The wavelength switch has particular, but not exclusive, application in optics as a filter, band reflector, and as a means of isolating particular wavelengths or wavelength bands from a collimated light stream for transmission to, or rejection from, a sensor.

Abstract: Optical filters tunable for both center wavelength and bandwidth, having applications such as in astronomy, remote sensing, laser spectroscopy, and other laser-based sensing applications, using Michelson interferometers or Mach-Zehnder interferometers modified with Gires-Tournois interferometers (“GTIs”) are disclosed. A GTI nominally has unity magnitude reflectance as a function of wavelength and has a phase response based on its resonator characteristics. Replacing the end mirrors of a Michelson interferometer or the fold mirrors of a Mach-Zehnder interferometer with GTIs results in both high visibility throughput as well as the ability to tune the phase response characteristics to change the width of the bandpass/notch filters. A range of bandpass/bandreject optical filter modes, including a Fabry-Perot (“FP”) mode, a wideband, low-ripple FP mode, a narrowband notch/bandpass mode, and a wideband notch/bandpass mode, are all tunable and wavelength addressable.

Abstract: An exemplary optical modulator includes an interferometer. The interferometer includes an input optical coupler, an output optical coupler, and two or more controllable optical waveguides. Each controllable optical waveguide connects the input optical coupler to the output optical coupler and has an electro-absorption modulator along a segment thereof. Two of the controllable optical waveguides are connected to transmit to an output of the output optical coupler light of substantially different maximum amplitude.

Abstract: A microfabricated optical wave plate comprises a reflective polarizer and a mirror separated by a fixed or variable distance. The wave plate imparts a relative phase delay on polarization components of incident light, thereby transforming the overall polarization of the light.

Abstract: An apparatus includes an optical filter having first and second passbands that are different, the optical filter including selectively operable first passband adjusting structure that varies a characteristic of the first passband without influencing the second passband. According to a different aspect, a method includes filtering radiation with an optical filter having first and second passbands that are different, and selectively varying a characteristic of the first passband without influencing the second passband.

Abstract: There is provided a method for referencing and correcting the beating spectrum generated by the interference of the components of a frequency comb source. The proposed method allows monitoring of variations of a mapping between the source and the beating replica. This can then be used to compensate small variations of the source in Fourier transform spectroscopy or in any other interferometry application in order to overcome the accuracy and measurement time limitations of the prior art. Constraints on source stability are consequently reduced.

Abstract: A method for creating a periodic interference pattern of coherent waves in two or three dimensions, D, includes generating at least D+2 waves, where each wave has substantially the same wavelength, ?, and travels substantially in a unique direction, kn. The waves are directed such that at least a portion of each wave intersects in a common excitation region to create the interface pattern. The directions, kn, of the waves are selected such that the interference pattern within the excitation region forms a Bravais lattice, and at least one wave travels substantially in a direction, ki, such that one or more symmetry operations characteristic of the Bravais lattice map the direction of the wave, ki, onto a direction of a different wave, kj. The directions of the waves, kn, do not all lie on a D-dimensional set of mutually orthogonal axes.

Abstract: A tunable chromatic dispersion compensation device used to compensate chromatic dispersion of wavelength of at least one predetermined wavelength band of light signal is provided. The tunable chromatic dispersion compensation device comprises a chromatic dispersion compensator, and a controller. The chromatic dispersion compensator comprises at least a first chromatic dispersion compensation unit and a second chromatic dispersion compensation unit connected with the first chromatic dispersion compensation unit in series. The first chromatic dispersion compensation unit has a free spectral range, the second chromatic dispersion compensation unit has a free spectral range same as to that of the first chromatic dispersion compensation unit. Each chromatic dispersion compensation unit comprises an interference cavity. The controller comprises an inputting unit being configured for inputting a predetermined chromatic dispersion compensation information.

Abstract: A voltage-controlled capacitor and methods for forming the same are described. A mechanical conductor membrane of the voltage-controlled capacitor is movable to and from a first position and a second position. An amount of capacitance can vary with the movement of the mechanical conductor membrane. A microelectromechanical systems (MEMS) voltage-controlled capacitor can be used in a variety of applications, such as, but not limited to, RF switches and RF attenuators.

Abstract: The present invention provides an optical power level discriminating device and method for discriminating optical power levels. The optical discriminating device includes a splitter for receiving an optical signal having first and second signal states, and splitting the received optical signal into a first and a second branch optical signal. A first optical fiber for transporting the first branch optical signal is provided that is made of a material having a high non-linear refractive index providing a different non-linear phase shift to the first and second signal states of the first branch optical signal. A second optical fiber is provided for transporting the second branch optical signal with little or no non-linear effect. The discriminating device also includes a combiner for combining the first branch optical signal and second branch optical signal to produce an output optical signal.

Abstract: A system and method for controlling an optical filter is provided. The system and method includes dithering a delay of an optical path within an optical filter unit cell, measuring a position of a filter zero, measuring a position of a filter pole, or measuring positions of both a filter zero and a filter pole by observing an output of the unit cell when the delay is dithered, and using the measurement as feedback for maintaining the position of the filter zero at a desired position, maintaining the position of the filter pole at a desired position, or maintaining the positions of both the filter zero and the filter pole at desired positions.

Abstract: An optical switch using a Michelson interferometer and differential onset of optical nonlinearity. Modulation of optical signals can occur at speeds that exceed that of electronic devices.

Abstract: One embodiment includes a display of interferometric modulators having a configurable resolution characteristic. Selected rows and/or columns are interconnected via a switch. The switch can include a fuse, antifuse, transistor, and the like. Depending on a desired resolution for a display, the switches can be placed in an “open” or “closed” state. Advantageously, using the switches, a display can readily be configured for differing modes of resolution. Furthermore, using the switches, a display can be configured to electrically connect certain rows or columns in the display such that the connected rows or columns can be driven simultaneously by a common voltage source.

Abstract: A single-mode, etched facet distributed Bragg reflector laser includes an AlGaInAs/InP laser cavity, a front mirror stack with multiple Fabry-Perot elements, a rear DBR reflector, and a rear detector. The front mirror stack elements and the rear reflector elements include input and output etched facets, and the laser cavity is an etched ridge cavity, all formed from an epitaxial wafer by a two-step lithography and CAIBE process.

Abstract: A wavelength dispersion compensation device includes an etalon 100 having a slab shape. Reflective films are formed on each side of the etalon 100. The reflective films respectively have predetermined reflectance. Reflectance of one of the reflective films differs according to a light incident angle by using a portion of light within a wavelength range to be used with which a filter characteristic in which transmittance rapidly changes is obtained.

Abstract: The color reflected by an interferometric modulator may vary as a function of the angle of view. A range of colors are thus viewable by rotating the interferometric modulator relative to an observer. By placing a textured layer between an observer and an interferometric modulator, a pattern which includes the range of colors may be viewed by the observer, and the range of colors may thus be viewable from a single viewing angle.

Abstract: Optical coating materials comprise a transparent matrix material having dispersed nanoparticles comprising between 1 and 20 volume percent of the optical coating material. The coating materials are used to form optical coatings on substrates, such as glass/ceramic, polymer or metal, to alter the color or other optical properties. The nanoparticles are semiconductive material or elemental metals or elemental metal alloys that exhibit surface plasmon resonance.

Abstract: In various embodiments, devices, methods, and systems for adjusting the reflectivity spectrum of a microelectromechanical systems (MEMS) device are described herein. The method comprises depositing a reflectivity modifying layer with the optical cavity of an interferometric modulator, where the reflectivity modifying layer shifts or trims the shape of the interferometric modulator's wavelength reflectivity spectrum relative to the absence of the reflectivity modifying layer.

Abstract: A tunable spectral filtration device comprises at least one optical filter for intersecting a first path of converging or diverging light comprising an axis at a first angle of incidence and at least one device positioned to enable a second path of the converging or diverging light to pass through the at least one optical filter at a second angle of incidence. The optical filter comprises at least one coating and is tiltable over a plurality of angles with respect to the axis. The first angle of incidence is opposite in sign to the second angle of incidence, such that the positioning of the at least one optical filter and the at least one device substantially cancels angle-of-incidence dependent spectral broadening and/or polarization dependent spectral broadening of the converging or diverging light.

Abstract: A micro movable device includes a movable member, a stationary portion, and connecting portions each connected to the movable member and the stationary portion. The movable member includes a pair of electrodes. The stationary portion includes a pair of electrodes cooperating with the electrodes of the movable member to generate a driving force for translating the movable member in its thickness direction. The connection points at which the respective connecting portions are connected to the movable member are spaced from each other. The electrodes of the movable member are positioned between two mutually spaced connection points, as viewed along the spacing direction of the two connection points.

Abstract: A method and apparatus involve an optical element having a passband with a center wavelength, and filtering radiation having first and second portions that arrive along a path of travel extending to the optical element. The first portion includes radiation inside the passband, and the second portion includes radiation above and below the passband. The optical element transmits one of the first and second portions of the radiation therethrough, and reflects the other of the first and second portions of the radiation therefrom. The optical element is supported for a range of movement relative to the path of travel. As the optical element moves through the range of movement, the center wavelength changes.

Abstract: An optical interferometer includes a substrate; a first and a second branch lines; a third and a fourth branch lines; a first interference portion for causing the first and the third branch lights to interfere with each other; and a second interference portion for causing the second and the fourth branch lights to interfere with each other; wherein each of the first and the third branch lines runs in the surface of the substrate such that the first and the third branch lines provide respective optical path lengths with a constant difference for a temperature change, and each of the second and the fourth branch lines runs in the surface such that the second and the fourth branch lines provide respective optical path lengths with a constant difference for a temperature change.

Abstract: The disclosure concerns an optical system of a microlithographic projection exposure apparatus. To permit comparatively flexible and fast influencing of intensity distribution and/or the polarization state, an optical system includes at least one layer system that is at least one-side bounded by a lens or a mirror. The layer system is an interference layer system of several layers and has at least one liquid or gaseous layer portion with a maximum thickness of one micrometer (?m), and a manipulator for manipulation of the thickness profile of the layer portion.

Abstract: Desired spectral characteristics are obtained by bringing reflection films sufficiently close together while avoiding optical contact between the reflection films. Provided is a variable spectral element (1) that includes a pair of optical substrates (2,3) that oppose each other with a gap therebetween; two mutually opposing reflection films (5) respectively disposed on the opposing surfaces of the optical substrates (2, 3); two mutually opposing sensor electrodes (6) that are disposed respectively on the sides where the reflection films (5) are disposed, and that form a distance sensor that detects the distance between the optical substrates (2,3); and an actuator (4) that changes the distance between the optical substrates (2, 3) by relatively moving the optical substrates (2, 3); wherein the distance between the opposing surfaces of the two reflection films (5) is larger than the distance between the opposing surfaces of the two sensor electrodes (6).

Abstract: A Littrow-type external-cavity diode laser optical axis displacement correction method and device to easily, inexpensively, and accurately correct displacement of optical axis in Littrow-type ECDLs is provided. In the Littrow-type ECDL optical axis displacement correction device and method, a means for introducing a laser beam, a jig 36 for integrally fixing a diffraction grating 33 and a prism 35 into which the laser beam is introduced in a predetermined arrangement, and a rotary shaft 34 capable of integrally rotating the diffraction grating 33 and the prism 35 are included. By the rotation of the diffraction grating 33 and the prism 35 around the rotary shaft 34, the wavelength of the incident light can be changed, and the optical axis of the output light 39 is not changed by the change of the wavelength.

Abstract: To provide a miniaturized Fabry-Perot type tunable filter that can be applied to e.g. a light of wide wavelength range from infrared rays to ultraviolet rays and actuated at a low voltage. A movable portion moving in a direction parallel to the surface of the SOI substrate (hereafter called ‘plane direction’), a suspension supporting member supporting the movable portion elastically and movably, and a fixed portion secured to the SOI substrate are provided. By the comb-teeth electrode of the comb-teeth type electrostatic actuator that moves the movable portion, the first mirror structure body formed bonding to the surface of the movable portion is controlled and moved in the plane direction.

Abstract: A thin-film interference filter structure has a generally wavelength-dependent resonant response to incident optical energy in a predetermined range of wavelengths. The thin-film interference filter structure includes a thermally tunable layer having a thermally tunable optical characteristic such that a range of wavelength-dependent resonant optical responses of the thermally tunable layer are induced by a corresponding range of thermal conditions of the thermally tunable layer. The thin-film interference filter structure is configured to (1) receive a spatially varying pattern of thermal energy at the thermally tunable layer to impart a corresponding spatially varying pattern to the thermally tunable characteristic of the thermally tunable layer, and (2) receive the incident optical energy into the thermally tunable layer and output optical energy having spatial modulation corresponding to the spatially varying pattern of the thermally tunable characteristic.

Abstract: Improvements in an interferometric modulator that has a cavity defined by two walls.