Abstract: The present invention discloses an optical laminate comprising a light-transparent base material and a low-refractive index layer provided on the light-transparent base material, the low-refractive index layer simultaneously having both contamination preventive properties and slipperiness. The optical laminate comprises a light-transparent base material, and a hard coat layer and a low-refractive index layer provided in that order on the light-transparent base material, wherein the low-refractive index layer contains a contamination preventive agent and/or a slipperiness imparting agent, and contamination preventive agent and/or slipperiness imparting agent are added so that the concentrations of the contamination preventive agent and/or slipperiness imparting agent have a concentration gradient from the surface of the hard coat layer toward the surface of the low-refractive index layer.

Abstract: A transparent conductive oxide (TCO) based film is formed on a substrate. The film may be formed by sputter-depositing, so as to include both a primary dopant (e.g., Al) and a co-dopant (e.g., Ag). The benefit of using the co-dopant in depositing the TCO inclusive film may be two-fold: (a) it may prevent or reduce self-compensation of the primary dopant by a more proper positioning of the Fermi level, and/or (b) it may promote declustering of the primary dopant, thereby freeing up space in the metal sublattice and permitting more primary dopant to create electrically active centers so as to improve conductivity of the film. Accordingly, the use of the co-dopant permits the primary dopant to be more effective in enhancing conductivity of the TCO inclusive film, without significantly sacrificing visible transmission characteristics. An example TCO in certain embodiments is ZnAlOx:Ag.

Abstract: A multilayer mirror includes a layer sequence arranged on a substrate and a plurality of layer pairs. Each layer pair includes a first layer composed of a first material and a second layer composed of a second material. The first layers and the second layers each have a thickness of more than 2 nm, and the first material or the second material is a silicon boride or a molybdenum nitride.

Abstract: An optical film has multi-coated layers. Diffusion layers are used to scatter light. Each diffusion layer has an interface microstructure. A condensing optical layer is used to concentrating light. A design of a multi-coating technology is thus used for scattering and concentrating light. By integrating scattering and concentrating materials in a single optical film, cost is effectively reduced. By using diffusion layers having interface microstructures, interface-dominating mechanism, not only hybrid optical performance with luminance and haze is effectively enhanced; but also quality variations owing to particles added or film warp and scoring on the beneath optical film owing to particles coated are reduced.

Abstract: Designs for ultra-high, broadband transmittance through windows over a wide range of incident angles are disclosed. The improvements in transmittance result from coating the windows with a new class of materials consisting of porous nanorods. A high transmittance optical window comprises a transparent substrate coated on one or both sides with a multiple layer coating. Each multiple layer coating includes optical films with a refractive index intermediate between the refractive index of the transparent substrate and air. The optical coatings are applied using an oblique-angle deposition material synthesis technique. The coating can be performed by depositing porous SiO2 layers using oblique angle deposition. The high transmittance window coated with the multiple layer coating exhibits reduced reflectance and improved transmittance, as compared to an uncoated transparent substrate.

Abstract: A system and method for uniform light generation in projection display systems. An illumination source comprises a light source to produce colored light, and a scrolling optics unit optically coupled to the light source, the scrolling optics unit configured to create lines of colored light from the colored light, and to scroll the lines of colored light along a direction orthogonal to a light path of the illumination source. The scrolling optics unit comprises a single light shaping diffuser to transform the colored light into the lines of colored light, an optical filter positioned in the light path after the light shaping diffuser, and a scrolling optics element positioned in the light path after the optical filter. The single light shaping diffuser is capable of simultaneously transforming colored light into lines of colored light having substantially uniform intensity to provide uniform illumination.

Abstract: A coated article includes a temperable antireflection (AR) coating that utilizes medium and low index (index of refraction “n”) layers having compressive residual stress in the AR coating. In certain example embodiments, the coating may include the following layers from the glass substrate outwardly: silicon oxynitride (SiOxNy) medium index layer/high index layer/low index layer. In certain example embodiments, depending on the chemical and optical properties of the high index layer and the substrate, the medium and low index layers of the AR coating are selected to cause a net compressive residual stress and thus optimize the overall performance of the antireflection coating when the coated article is tempered and/or heat-treated.

Abstract: A projection system comprising a first imaging component, at least a second imaging component, and a color combiner. The first and second imaging components each comprise an imager and a reflective polarizer that is configured to at least partially separate a light beam from the imager into a first portion and second portion, where the first portion and the second portion have substantially orthogonal polarization states. The first portions of the light beams are directed in the same direction above or below a plane defined by the second portions of the light beams. The color combiner is configured to combine the second portions of the light beams, where the second portions of the light beams have substantially orthogonal polarization states prior to entering the color combiner.

Abstract: An antireflection film comprises: at least one layer containing fine pores; and an antistatic layer, wherein the antistatic layer and one of said at least one layer containing fine pores are the same or different; and wherein, when a surface of the antireflection film is brought into contact with water for 15 minutes, a wiped portion of the surface shows a chromaticity change, ?E, of 0.45 or less in the CIE 1976 L*a*b* color space measured under a standard illuminant D65.

Abstract: The invention is directed to elements having fluoride coated surfaces having multiple layers of fluoride material coatings for use in laser systems, and in particular in laser systems operating at wavelength <200 nm. In a particular embodiment the invention is directed to highly reflective mirrors for use in wavelengths <200 nm laser systems. The invention describes the mirrors and a method of making them that utilizes a plurality of periods of fluoride coatings, each period comprising one layer a high refractive index fluoride material and one layer low refractive index fluoride material, and additionally at least one layer of an amorphous silica material. The silica material can be inserted between each period, inserted between a stack consisting of a plurality of periods, and, optionally, can also be applied as the final layer of the finished element to protect the element.

Abstract: An apparatus includes a pulsed laser source that produces a pulsed laser beam at an input repetition rate and an input pulse power, a passive pulse splitter that receives the pulsed laser beam and outputs a signal including a plurality of sub-pulses for each input pulse of the pulsed laser beam, a sample, and a detector. The output signal has a repetition rate that is greater than the input repetition rate and the powers of each of the sub-pulses are less than the input pulse power. The sample is placed in the path of a sample beam that is formed from the beam that exits the pulse splitter. The detector receives a signal of interest emitted from the sample.

Abstract: Disclosed herein are optical interference multilayer coatings employing a high refractive index material comprising a NbTaZr oxide. Such coatings provide enhanced retention of favorable optical and physical properties at high temperatures. Also disclosed herein are lamps comprising a light-transmissive envelope, at least a portion of the surface of the light-transmissive envelope being provided with the optical interference multilayer coating noted above. Such coatings, when used on lamps, may advantageously offer improved energy efficiencies for such lamps.

Abstract: An anti-reflection coating has an average total reflectance of less than 10%, for example less than 5.9% such as from 4.9% to 5.9%, over a spectrum of wavelengths of 400-1100 nm and a range of angles of incidence of 0-90 degrees with respect to a surface normal of the anti-reflection coating. An anti-reflection coating has a total reflectance of less than 10%, for example less than 6% such as less than 4%, over an entire spectrum of wavelengths of 400-1600 nm and an entire range of angles of incidence of 0-70 degrees with respect to a surface normal of the anti-reflection coating.

Abstract: Embodiments of the invention provide a class of ethylene/?-olefin block interpolymers. The ethylene/?-olefin interpolymers are characterized by an average block index, ABI, which is greater than zero and up to about 1.0 and a molecular weight distribution, Mw/Mn, greater than about 1.3. Preferably, the block index is from about 0.2 to about 1. In addition or alternatively, the block ethylene/?-olefin interpolymer is characterized by having at least one fraction obtained by Temperature Rising Elution Fractionation (‘TREF’), wherein the fraction has a block index greater than about 0.3 and up to about 1.0 and the ethylene/?-olefin interpolymer has a molecular weight distribution, Mw/Mn, greater than about 1.4.

Abstract: Multilayer-film reflective mirrors are disclosed that exhibit desired optical characteristics and resistance to reflective-surface degradation. An exemplary multilayer-film mirror includes a base and a multilayer film on the base. The multilayer film is made of first and second layers alternatingly laminated at a prescribed period length. The surface of the multilayer film has an irregular surface profile, relative to the surface profile of the base. The multilayer film reflects incident extreme ultraviolet (EUV) light. A third layer, situated on and covering the surface of the multilayer film, is formed of a substance having substantially the same refractive index to EUV light as the refractive index of a vacuum. The third layer has a surface profile substantially the same as the surface contour of the base. The third layer is covered with a protective layer.

Abstract: An antireflection film comprising a transparent support, a hard coat layer and a low refractive index layer, wherein the low refractive index layer is formed with a composition containing a binder polymer, a polymerization initiator and an ethylenically unsaturated group-containing hardenable compound.

Abstract: The subject of the invention is a transparent substrate (6), especially glass substrate, comprising an antireflection coating on at least one of its faces, which is made of a multilayer (A) of thin layers having alternately high and low refractive indices. The multilayer is characterized in that the high-index first layer (1) and/or the high-index third layer (3) are based on a zinc tin mixed oxide, with a ratio, expressed in atomic percent, of the tin to the zinc that is greater than 1.

Abstract: A film stack includes an interlayer dielectric formed over one or more devices. The film stack further includes a first layer having a high extinction coefficient formed on the interlayer dielectric and a second layer having a low extinction coefficient formed on the first layer. The first and second layers prevent ultraviolet induced damage to the one or more devices while minimizing reflectivity for lithographic processes.

Abstract: An antireflection film includes a first layer, a second layer, a third layer, a fourth layer, a fifth layer, a sixth layer, and a seventh layer. Each of the first, third, fifth, and seventh layer is formed using a low refractive index material. Each of the second, fourth, and sixth layer is formed using a high refractive index material. The thicknesses of the first, second, third, fourth, fifth, sixth, and seventh layers are in ranges of 0.122d1 to 3.052d1, 0.267d2 to 0.370d2, 0.427d3 to 0.610d3, 0.760d4 to 0.924d4, 0.305d5 to 0.378d5, 0.575d6 to 0.718d6, and 1.160d7 to 1.342d7, correspondingly, wherein di=?/(4×ni), (i=1, 2, . . . 7), ni is a refractive index of the i-th layer, and ? is a reference wavelength of incident light entered into the antireflection film.

Abstract: A color filter structure includes a substrate, in which a number of first pixel regions, a number of second pixel regions, and a number of third pixel regions are defined on the substrate. Each first pixel region includes a first stack layer; each second pixel region includes a second stack layer; and each third pixel region includes the first stack layer and the second stack layer.

Abstract: Transparent especially glass, substrate (6) having at least on one of its sides an antireflection coating made from a stack (A) of thin dielectric layers of alternating high and low refractive indices, characterized in that the stack comprises, in succession: a high-index first film (1) having a refractive index n1 between 1.8 and 2.3 and a geometrical thickness e1 of between 10 and 25 nm; a low-index second film (2) with a refractive index n2 of between 1.40 and 1.55 and a geometrical thickness e2 of between 20 and 50 nm; a high-index third film (3) with a refractive index n3 of between 1.8 and 2.3 and a geometrical thickness n3 of between 110 and 150 nm; and a low-index fourth film (4) with a refractive index n4 of between 1.40 and 1.55 and a geometrical thickness e4 of between 60 and 95 nm, the algebraic sum of the geometrical thickness e3+e1 being between 125 and 160 nm.

Abstract: Disclosed is a multilayer structure wherein a first layer of a first material having an outer surface and a refracted index between 2 and 4 extends across an outer surface of a second layer having a refractive index between 1 and 3. The multilayer stack has a reflective band of less than 200 nanometers when viewed from angles between 0° and 80° and can be used to reflect a narrow range of electromagnetic radiation in the ultraviolet, visible and infrared spectrum ranges. In some instances, the reflection band of the multilayer structure is less than 100 nanometers. In addition, the multilayer structure can have a quantity defined as a range to mid-range ratio percentage of less than 2%.

Abstract: A reflection-reducing interference layer system is disclosed, which has at least three alternating layers having different refractive indices. At least one nanostructured layer comprising an organic material or an organic-inorganic hybrid material is applied to the alternating layers. With the interference layer system, it is possible to obtain very low reflection over a wide wavelength and incident angle range.

Abstract: An electroluminescence (EL) display device with improved external light coupling efficiency and brightness that may be easily manufactured. The EL display device includes: a substrate; a first electrode arranged above the substrate; a second electrode arranged above and substantially parallel to the first electrode; an intermediate layer arranged between the first and second electrodes, and including an emissive layer; a color converting layer arranged between the substrate and the first electrode or above the second electrode; and a light resonance controlling layer arranged between the emissive layer and the color converting layer.

Abstract: An antireflective coating is disclosed having at least one layer of a first material with a first index of refraction and a first thickness, the first index of refraction and first thickness substantially conforming to a refractive index profile matching a reflectionless potential.

Abstract: An absorption type multi-layer film ND filter having a substrate formed of a resin film and on at least one side thereof an absorption type multi-layer film of oxide dielectric film layers and absorption film layers which are alternately wherein the oxide dielectric film layers are each a SiCyOx (0<y?0.1, 1.5<x<2) film having an extinction coefficient at a wavelength of 550 nm of 0.005 to 0.05, formed by a physical vapor deposition process using a film-forming material composed chiefly of SiC and Si, and the absorption film layers are each a metal film having a refractive index at a wavelength of 550 nm of 1.5 to 3.0 and an extinction coefficient at that wavelength of 1.5 to 4.0, formed by a physical vapor deposition process; an outermost layer of the multi-layer film being one oxide dielectric film layer of SiCyOx.

Abstract: A concentrating optical member (50) concentrates sunlight (Lsa) onto a solar cell (10) that generates power using a solar cell element (11) mounted on a receiver substrate (20). The concentrating optical member (50) includes a first optical member (51) having a first refractive index that is disposed on the side on which sunlight (Ls) is incident and a second optical member (52) having a second refractive index that is disposed on the side on which the solar cell element (11) is disposed. The first refractive index and the second refractive index have different values. A concentrating solar power generation module (40) includes the solar cell (10) and the concentrating optical member (50).

Abstract: Embodiments of the invention provide a class of mesophase separated ethylene/?-olefin block interpolymers with controlled block sequences. The ethylene/?-olefin interpolymers are characterized by an average block index, ABI, which is greater than zero and up to about 1.0 and a molecular weight distribution, Mw/Mn, greater than about 1.4. Preferably, the block index is from about 0.2 to about 1. In addition or alternatively, the block ethylene/?-olefin interpolymer is characterized by having at least one fraction obtained by Temperature Rising Elution Fractionation (‘TREF’), wherein the fraction has a block index greater than about 0.3 and up to about 1.0 and the ethylene/?-olefin interpolymer has a molecular weight distribution, Mw/Mn, greater than about 1.4.

Abstract: A method for producing an optical film formed of a porous film containing magnesium (Mg) and fluorine (F) includes the steps of applying, onto a base, a solution containing a fluorine-containing organomagnesium compound represented by general formula (1): (CF3—X—COO)2Mg??General formula (1) wherein X represents a single bond or —(CF2)n—, —(CH2)m—, or —(CF2)n—(CH2)m— which may have a substituent, and n and m each represent an integer of 1 to 4, to form a coating film; and heat-treating the coating film in an atmosphere containing a fluorine compound in a shielded space to obtain a porous film containing Mg and F.

Abstract: An optical article including a layer that has SiOx as a main component and is formed on an optical substrate, directly or with at least one different layer interposed between the layer and the optical substrate, a surface of the layer, which is in the opposite side to the optical substrate, being nitrided.

Abstract: An optical element includes an optical film; a substrate; and an adhesive layer disposed between the optical film and the substrate, wherein the adhesive layer is made of NbOx, where 0<x<2.5.

Abstract: The subject of the invention is a transparent substrate (6) having at least one antireflection coating, made from a film (A) comprising multiple thin layers of alternately high and low refractive indexes. The multilayer film comprises, in succession: a high-index first layer (1), having a refractive index n1 of between 1.8 and 2.3 and a geometrical thickness e1 of between 5 and 50 nm; a low-index second layer (2), having a refractive index n2 of between 1.30 and 1.70 and a geometrical thickness e2 of between 5 and 50 nm; a high-index third layer (3), having a refractive index n3 of between 1.8 and 2.3 and a geometrical thickness e3 of at least 100 nm; a low-index fourth layer (4), having a refractive index n4 of between 1.30 and 1.70 and a geometrical thickness e4 of at least 80 nm. This antireflection coating can be used in solar modules.

Abstract: The present invention provides an antireflective film including at least an antireflective layer and a base resin layer, the base resin layer including at least layers a and b respectively including a thermoplastic resin as a main component, the layer a having a flexural modulus higher than that of the layer b, and the layer a being closer to the antireflective layer than the layer b, a polarizer plate obtained by bonding the antireflective film to a polarizer, and a display including the polarizer plate. According to the present invention, an antireflective film in which an antireflective layer is stacked on a transparent resin substrate and exhibits excellent antireflective performance, tenacity, and surface hardness, a polarizer plate using the antireflective film, and a display including the polarizer plate are provided.

Abstract: Disclosed herein are optical interference multilayer coatings having region provided by a physical vapor deposition process and region provided by a chemical vapor deposition process. Also disclosed herein are methods of making such coatings, as well as lamps comprising a light-transmissive envelope, at least a portion of the surface of the light-transmissive envelope being provided with the optical interference multilayer coating noted above. Such coatings, when used on lamps, may advantageously offer improved energy efficiencies for such lamps.

Abstract: A general method is disclosed of designing two-component dichroic short-pass filters operable for incidence angle distributions over the 0-30° range, and specific preferred embodiments are listed. The method is based on computer optimization algorithms for an N-layer design, specifically the N-dimensional conjugate-gradient minimization of a merit function based on difference from a target transmission spectrum, as well as subsequent cycles of needle synthesis for increasing N. A key feature of the method is the initial filter design, upon which the algorithm proceeds to iterate successive design candidates with smaller merit functions. This initial design, with high-index material H and low-index L, is (0.75 H, 0.5 L, 0.75 H)^m, denoting m (20-30) repetitions of a three-layer motif, giving rise to a filter with N=2 m+1.

Abstract: An optical element having a laser damage suppression film which is capable of withstanding high power blue laser and formed on a plastic substrate. Specifically disclosed is an antireflection optical element wherein a multilayer film, which is composed of low refractive index material layers (105) and high refractive index material layers (107) arranged alternately, is formed on a plastic substrate. In this antireflection optical element, the oxygen permeability coefficient is decreased such that variation in laser permeability is 2% or less after being continuously irradiated with blue laser having an energy density of 120 mW/mm2 for 1000 hours at an ambient temperature of 25° C. In one embodiment, the oxygen permeability coefficient is set at 30 cm3·mm m2·24 hr·atm) or less.

Abstract: An optical interference coating that transmits light in a narrow angular band has been achieved. This filter works in filtering light from different angles of arrival when it is operated in a tilted configuration to the incoming signal. Two such tilted filters whose normal vectors are rotated about an optical axis by 90 degrees enable light from all polarizations and from all angles of arrival to be effectively filtered by angle.

Abstract: An antireflection film comprises: at least one layer containing fine pores; and an antistatic layer, wherein the antistatic layer and one of said at least one layer containing fine pores are the same or different; and wherein, when a surface of the antireflection film is brought into contact with water for 15 minutes, a wiped portion of the surface shows a chromaticity change, ?E, of 0.45 or less in the CIE 1976 L*a*b* color space measured under a standard illuminant D65.

Abstract: An optical element includes a substrate, and an antireflection film provided on a surface of the substrate. The antireflection film is a graded layer having a refractive index that is progressively decreased from the substrate side towards an outer surface of the antireflection film. The graded layer has a reflectivity characteristic occupying ? of a usable wavelength range around the center of the usable wavelength range. Reflectivity of the graded layer at a maximum value of the reflectivity characteristic is a peak value equal to or less than 0.4% The graded layer does not have a maximal value not corresponding to the peak value. At least one of reflectivities at both ends of the usable wavelength range is equal to or less than half the reflectivity at the peak value.

Abstract: An article and process having non-oxide nanoparticles containing stratified compositions for low refractive index compositions of utility as anti-reflective coatings for optical display substrates. The compositions comprise a high refractive index lower stratum containing nanoparticles and a low refractive index upper stratum on top of the high refractive index lower stratum.

Abstract: The present invention provides a method of forming a flexible dichroic optical filter. The method comprises depositing a plurality of pairs of layers adjacent a substrate. Each of the plurality of pairs of layers includes a first layer formed of a silicon-and-carbon containing material having a first index of refraction and a second layer formed of a silicon-and-carbon containing material having a second index of refraction that is different than the first index of refraction.

Abstract: A dichroic mirror includes a substrate, a first film stack, and a second film stack. The first film stack is deposed on the substrate and has a structure represented by a first formula: (2HL)n. The second film stack is deposed on the first film stack and has a structure represented by a second formula: (0.325H0.65L0.325H)m. ‘2HL’ and ‘0.325H0.65L0.325H’ respectively represent a double-layer sub-structure of the first film stack and a sandwiched sub-structure of the second film stack, and ‘n’ and ‘m’, which are integers, respectively represent the number of repetitions of the double-layer sub-structures and sandwiched sub-structures ‘H’ and ‘L’ respectively represent a high refractive index layer and a low refractive index layer, both of which have a height equal to ¼ of the reference wavelength of the dichroic mirror, and ‘2’, ‘0.325’ and ‘0.65’ are height coefficients.

Abstract: A reflection preventing layered product is provided by laminating a high refractive index layer and a low refractive index layer, which has a refractive index lower than that of the high refractive index layer, in that order on a transparent plastic film, directly or through another layer. The low refractive index layer has a surface resistance of 1.0×1010 ohm/square inch or less, a total light remittance of 94% or more, and a refractive index of 1.25-1.37. An optical member provided with the reflection preventing layered product is also provided. This optical member is preferably a polarizing plate with reflection preventing function used for a liquid crystal display. The reflection preventing layered product excels in transparency, mechanical strength, antistaticity, and reflection preventing characteristics.

Abstract: The present invention provides an optical element including: a substrate; and an antireflection film formed on a surface of the substrate. The antireflection film includes a plurality of lower refractive index layers, and a plurality of higher refractive index layers which are layered alternately. Each of at least two of the plurality of lower refractive index layers comprises a same main component each other and comprises a side component with a different content ratio independently.

Abstract: A multilayer reflective film coated substrate includes a multilayer under film comprised of Mo/Si alternately-layered films and a multilayer reflective film comprised of Mo/Si alternately-layered films for reflecting exposure light. The multilayer under film and the multilayer reflective film are formed on a substrate in this order. Given that a cycle length of the multilayer under film is d bottom (unit:nm) and a cycle length of the multilayer reflective film is d top (unit:nm), a relationship of a formula (1) is satisfied when d bottom>d top, the formula (1) given by (n+0.15)×d top?d bottom?(n+0.9)×d top where n is a natural number equal to or greater than 1.

Abstract: An optical component includes an antireflection film that is a multilayer film having alternately-laminated six or more layers including high refractive index layers and low refractive index layers; wherein a first layer of the antireflection film deposited closest to the substrate is a high refractive index layer; ? satisfies 480 nm???530 nm where ? is the wavelength of light incident into the antireflection film; an optical thickness D1 of the first layer satisfies 0.02??D1?0.04?; an optical thickness Dm of a layer of the antireflection film that is located fifth from an outermost layer deposited furthest from the substrate satisfies 0.19??Dm?0.75?; a total physical thickness dt of the entire antireflection film satisfies 350 nm?dt?480 nm; and a total physical thickness da of the low refractive index layers satisfies 0.65 dt?da?0.80 dt.

Abstract: An optical film includes a base member having convex structures that are two-dimensionally and orderly arranged on a surface thereof and a hard-coating layer provided on the surface of the base member, the surface having the arranged structures thereon. A continuous wave surface is provided on a surface of the hard-coating layer so as to approximately conform to the shape of the structures of the surface of the base member, a maximum amplitude A and a minimum wavelength ? of the continuous wave surface are each substantially uniform, and a ratio (A/?) of the maximum amplitude A to the minimum wavelength ? is more than 0.002 and 0.011 or less.

Abstract: Antireflective films are described having a surface layer comprising a the reaction product of a polymerizable low refractive index composition comprising at least one fluorinated free-radically polymerizable material and surface modified inorganic nanoparticles. A high refractive index layer is coupled to the low refractive index layer. In one embodiment, the high refractive index layer comprises surface modified inorganic nanoparticles dispersed in a crosslinked organic material. The antireflective film is preferably durable, exhibiting a haze of less than 1.0% after 25 wipes with steel wool using a 3.2 cm mandrel and a mass of 1000 grams.

Abstract: Plasmon-enable devices such as ultra-small resonant devices produce electromagnetic radiation at frequencies in excess of microwave frequencies when induced to resonate by a passing electron beam. The resonant devices are surrounded by one or more depressed anodes to recover energy from the passing electron beam as/after the beam couples its energy into the ultra-small resonant devices.

Abstract: An antireflection film includes a multilayer film having six layers, in total, provided between an optical substrate and an adhesion layer. The respective layers of first to sixth layers are laminated in order from one side of the adhesion layer. A refractive index of the antireflection film as a whole is lower than that of the optical substrate and higher than that of the adhesion layer. The first and third layers are low refractive index layers having a refractive index of 1.35 to 1.50 at d line. The second, fourth and sixth layers are middle refractive index layers having a refractive index of 1.55 to 1.85 at the d line. The fifth layer is a high refractive index layer having a refractive index, at the d line, that is in a range of 1.70 to 2.50 and that is higher than that of the middle refractive index layer.