Abstract: An exposure apparatus illuminates a pattern on an original form, introduces light from the pattern to a plate, and exposes the plate. The exposure apparatus includes at least one optical element, and forcing member that applies a force to the at least one optical element in a non-contact manner.

Abstract: In a variable-shape mirror of which the shape of the mirror surface can be varied, a mirror portion is bonded only to a fixed portion and not to a piezoelectric element. When the piezoelectric element is not operating, the mirror portion, receiving a predetermined force from the piezoelectric element, makes contact with the piezoelectric element. When the piezoelectric element contracts, the mirror portion tends to restore its original shape by its counterforce. Thus, even when the piezoelectric element contracts, the contact between the mirror portion and the piezoelectric element is held, and hence the electric conduction to the piezoelectric element is maintained.

Abstract: A focusing-device for the radiation from a light source (2) is provided with a collector mirror (1, 1?) which is arranged in a mount (24) and collects the light, in virtual or real terms, from the light source (2) at the second focus (200). The collector mirror (1, 1?) is displaceably connected to the mount (24) via a bearing in such a way that its optical properties remain at least approximately the same even in the event of temperature changes.

Abstract: It is made possible to improve the variations in the “generated force (load)—deflection characteristics”. A deformable mirror device includes: a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member facing opposite from the first face; a first insulation film provided on the first face of the support member; a second insulation film provided on the second face of the support member; and a deformable electrode film disposed so as to be opposed to the electrodes at a spacing, formed so as to cover the opening, and supported by the support member with sandwiching the first insulation film.

Abstract: Disclosed is a reflection mirror of a projection television to prevent the frame of the projection television from being deformed and to fabricate the projection television with ease. The reflection mirror is fabricated by forming a plurality of ribs at a section of the frame and inserting a soft shield plate between the ribs.

Abstract: A mirror assembly for an optical system of a laser processing machine includes a mount with a cavity, and an adaptive mirror. A magnetorheological or electrorheological fluid flows through the cavity, is adjusted in its viscosity, and provides an adjustable pressure onto the adaptable mirror.

Abstract: A variable-shape mirror is provided with: a support base; a mirror portion that is disposed to face the support base and that has, on a side thereof facing away from the support base, a mirror surface which is irradiated with a light beam; fixed portions that fix the mirror portion to the support base; and piezoelectric elements that are sandwiched between the support base and the mirror portion and that vary a shape of the mirror surface. Here, the piezoelectric elements are arranged closer to a center of the mirror portion than the fixed portions are.

Abstract: A deformable mirror control device is provided with improved response characteristic by devising the mode of control even if the deformable mirror has a large time constant in comparison with the response speed required in applications such as the retinal camera. The deformable mirror device comprises a deformable mirror 10 having a reflective surface deformed with an applied voltage, and a voltage control circuit 20 for controlling the voltage applied to the deformable mirror 10. Here, the voltage control circuit 20 produces a steady-state voltage at which the reflective surface of the deformable mirror 10 takes an intended shape in a steady state, and produces a transient voltage that causes the reflective surface of the deformable mirror 10 to deform toward the intended shape, and also produces a transient voltage that causes the shape of the reflective surface of the deformable mirror 10 to shift quickly toward the intended shape.

Abstract: A closed loop compensation system including a deformable mirror including an array of spaced actuators. An array of spaced sensors is mapped in optical space to reside between pairs of actuators. A lens system receives a wavefront from the deformable mirror and focuses sub-apertures of the wavefront onto individual ones of the spaced sensors. A sequencer addresses each actuator and associated sensor in the arrays. A compute unit is configured to respond to the sequencer to set a first actuator to an adjusted stroke position and then adjust the stroke of subsequent actuators to locate, to a pre-established position, the focused sub-aperture on a sensor in the pathway between each particular subsequent actuator and a neighboring previously adjusted portion of the mirror to compensate for sub-aperture tilt while maintaining relative phase between sub-apertures.

Abstract: A deformable mirror includes a mirror substrate having a mirror surface, a supporting member that support the mirror substrate and has a through hole extending in the direction substantially perpendicular to the mirror substrate, an electrode portion that is disposed on the underside of the supporting member opposite to the surface for supporting the mirror substrate so as to cover at least a part of the through hole, and an actuator that is inserted in the through hole and is bonded and fixed to the electrode portion, the actuator being expanded and contracted so as to deform the mirror surface as well as the mirror substrate when electric power is supplied via the electrode portion.

Abstract: This invention relates to a hybrid deformable mirror. A deformable mirror is provided comprising a reflective surface provided on a substrate and a layer of deformable material attached to the substrate that is operable to deform the mirror and wherein the substrate is supported by an actuator that is operable to deform the mirror.

Abstract: An improved device for reflecting, radiating, or receiving electromagnetic radiation, acoustic waves, or other energy forms through the use of a membrane stretched across a lightweight, round, frame structure. A near perfectly round and flat semi-rigid backplane surface (1) and a near perfectly round ring or stack of rings (2) are mutually reinforced, forming a raised circumferential planar surface, and a cavity within. A membrane (3) is attached to the top of the rings, forming one wall of a sealed chamber. A source of sub-ambient pressure (4) is applied to the chamber, causing a primary uniform deformation in the membrane for the purpose of manipulating electromagnetic radiation, acoustic waves, or other energy. The backplane surface also deforms uniformly, increasing the strength of the structure. A flat, rigid floating batten (5) prevents waves or wrinkles from forming in the membrane material.

Abstract: A deformable optical device includes a reflection device having a first reflecting surface and a second surface, an actuator (e.g., an integrated circuit piezoelectric actuator) having a support device and moveable extensions extending therefrom, which are coupled to the second surface, and electrodes coupled to corresponding ones of the extensions. Wavefront aberrations are detected and used to generate a control signal. The extensions are moved based on the control signal. The movement deforms the reflecting surface to correct the aberrations in the wavefront.

Abstract: A shape of a mirror face of a shape-deformable mirror that reduces aberration and has a simple configuration is calculated in a simple method. The shape of the mirror face of the shape-deformable mirror 14a is approximately calculated using fourth and fifth terms of the Zernike Polynomials. Furthermore, one of the Zernike coefficients C4 and C5, which configure the fourth and fifth terms of the Zernike Polynomials respectively, is expressed as a value with the other coefficient as a variable by using the following expression: C5/C4=2{1?cos(2?)}/(cos(2?)+3). The expression is substituted in the Zernike Polynomials, thereby the shape of the mirror face of the shape-deformable mirror 14a is approximated as a linear function, and thus can be calculated in a simple calculation.

Abstract: Optical mirror elements for high bandwidth free space optical communication are produced by an electroforming replication technique. Onto the precision surface of a mandrel that is a negative of the required optical surface a layer of metal is deposited forming an exact copy of the mandrel surface and is then separated to form the required optical element. During the production process the mandrel may be coated with a variety of materials that are then separated together with the electroformed optical element during the release step to form a monolithic structure that includes a reflective coating. The mandrel remains unchanged by the process and can then be re-used. The high cost of conventional polishing techniques is therefore limited to the production of the mandrel. The replication process results in the production of low cost optical elements suitable for high bandwidth free space optical data transmission.

Abstract: An array of high fill factor mirrors has each mirror be coupled across two deformable spring bars that are deformed using a drive. The two deformable springs are parallel to each other, and coupled together, e.g., by a cross bar. A support is coupled at one end to the cross bar and at its opposite end to the mirror. Coupled across the deformable spring bars on the opposite side thereof from the mirror support, is at least one moveable drive plate. Motion by the moveable drive plate causes the deformable spring bars to torque, e.g., in the local vicinity of the connection of the drive plate to the deformable spring bars. The torque causes the deformable spring bars to move downward, e.g., near their centers. As a result, cross bar, and hence the mirror, move downward.

Abstract: A photolithography apparatus includes an optical illumination system. The optical illumination system includes a light source, an illumination system, a photomask, and a projection system. The light source generates light. The illumination system transmits the light generated by the light source. The photomask receives the light transmitted by the illumination system and forms an optical pattern image. The projection system transmits the optical pattern image formed by the photomask to a substrate surface. Either one of the illumination system and the projection system includes at least one mirror for correcting aberrations.

Abstract: A variable shape mirror includes a support substrate, a mirror substrate that is opposed to the support substrate, a fixing member that is disposed on the support substrate and fixes the mirror substrate, and a piezoelectric element that is disposed on the support substrate and is expanded or contracted so that a reflection plane of the mirror substrate can be deformed. A coefficient of linear expansion of the fixing member is larger than a coefficient of linear expansion of the piezoelectric element. A back surface of the mirror substrate is provided with a metal bonding layer that is disposed in at least a portion to be bonded to the fixing member. The metal bonding layer enables the mirror substrate and the fixing member to be bonded to each other by pressing the mirror substrate and the fixing member to each other while they are heated. The mirror substrate and the piezoelectric element are not bonded to each other.

Abstract: A variable shape mirror includes a support substrate, a mirror substrate that is opposed to the support substrate, a fixing member that is disposed on the support substrate and fixes the mirror substrate, and a piezoelectric element that is disposed on the support substrate and is expanded or contracted so as to deform a reflection plane of the mirror substrate. A bonding layer for bonding the mirror substrate and the fixing member to each other is provided to the surface of the mirror substrate opposite to the surface on which the reflection plane is formed, and the bonding layer is formed in an area that corresponds to the outside of an incident area of a light beam that enters the reflection plane.

Abstract: The variable shape mirror (1) includes a substrate (2) and a bulk piezoelectric body (3). On the piezoelectric body (3), a specular surface (4) is formed, and further a plurality of grooves (5a-5e) are formed at a predetermined interval. The grooves (5a-5e) are arranged so as to surround the specular surface (4) and filled with the conductive members. The conductive members embedded in the grooves (5a-5e) are connected electrically to one of a pair of common electrodes (7a and 7b) that is disposed to cross the grooves (5a-5e) and are formed to be electrodes having different polarities in alternating manner in the direction from the inner side to the outer side of the grooves (5a-5e).

Abstract: Disclosed are a mirror unit and a method of producing the same. In one preferred embodiment, the mirror unit includes a mirror with a multilayered film formed on a substrate, the multilayered film having two materials periodically laminated in layers on the substrate, and a substrate deforming device for producing deformation of a shape of the substrate of the mirror, wherein, in the multilayered film, the number of laminated layers in a predetermined region of the substrate differs from that in another region of the substrate. A mirror unit producing method according to another preferred embodiment includes forming a multilayered film on a substrate, the multilayered film having two materials periodically laminated in layers on the substrate, providing substrate deforming means in association with the substrate, the deforming means having a function for producing deformation of the shape of the substrate, and partially removing the multilayered film.

Abstract: An adjustable rear view mirror structure is provided. The rear view mirror structure comprises a flexible body and an adjusting apparatus wherein the body has a reflective surface and an inner surface. The adjusting apparatus is disposed at a rear portion of the body and is utilized to drive the inner surface of the body. Thus, the reflective surface of the body can form a particular curvature whereby the rear view mirror structure can offer a wider viewing angle.

Abstract: A glass structure, such as a mirror facet, having a glass member, a composite structure and a support structure. The composite structure includes a rigid interlayer which is bonded to the glass member and exerts a compressive force thereon to place the glass member in compression. The support structure is used to mount the glass structure and prevents the glass member from collapsing due to the compressive force exerted by the rigid interlayer. The glass structure is particularly well adapted for use in forming heliostats, parabolic dishes, trough concentrators, or other like elements for use in solar power systems, and does not suffer from the limitations or prior forms of such devices.

Abstract: In a variable-shape mirror (1) of which the shape of the mirror surface can be varied, four piezoelectric elements (4) are sandwiched between a support base (2) and a mirror portion (3), and are arranged symmetrically in cross-shaped directions. The piezoelectric elements (4) are bonded to the mirror portion (3), and serve both to vary the shape of the mirror portion (3) by being driven and to fix the mirror portion (3) to the support base (2). Support portions (5) are arranged one inside each of the piezoelectric elements (4). With this structure, a small movement that the piezoelectric elements (4) produce when driven can be converted into a large movement of the mirror portion (3).

Abstract: The invention relates to a micro-optical arrangement with which in particular optical properties of an optical element or its influencing of electromagnetic radiation may be changed. Thereby the optical elements with a reflecting surface are preferred. It is the object of the invention to provide for a changeability of optical parameters, in particular of the focal width with small time constants, in an inexpensive manner and with a small required constructional volume. The micro-optical arrangement according to the invention comprises a plate-like optical element onto which electromagnetic radiation is directed on an optically effective surface. The optical element thereby is fixed or clamped at least at one outer edge point. The optical element is elastically deformed due to mass inertia as a result of a translatory movement at least approximately parallel to the optical axis between two reversal points (?z0, z0).

Abstract: A digital control for light beams. A position of an output light beam is changed based on a digital input control formed of a plurality of bits. The device may use movable mirrors to change the position of the output light beams.

Abstract: A deformable mirror comprises i) an electrically insulative substrate having a substantially plane front face, ii) a first stage comprising at least two plane electrodes placed at chosen places on top of said front face of the substrate, iii) a first layer of electro-active material placed in contact with the front face of the electrodes of said first stage and adapted to be deformed locally under the action of a chosen local difference of electric potential, iv) an electrically conductive reflecting layer, defining a ground electrode connected to an electric ground and placed on top of the front face of said first electro-active layer, and v) first electric power supply circuits each connected, on the one hand, to said electric ground and, on the other hand, to at least one of the electrodes of said first stage in such a manner as to impose locally, on command, a chosen potential difference adapted to deform locally an area of the first electro-active layer placed substantially in line with said electrode.

Abstract: A thin, nearly wireless adaptive optical device capable of dynamically modulating the shape of a mirror in real time to compensate for atmospheric distortions and/or variations along an optical material is provided. The device includes an optical layer, a substrate, at least one electronic circuit layer with nearly wireless architecture, an array of actuators, power electronic switches, a reactive force element, and a digital controller. Actuators are aligned so that each axis of expansion and contraction intersects both substrate and reactive force element. Electronics layer with nearly wireless architecture, power electronic switches, and digital controller are provided within a thin-film substrate. The size and weight of the adaptive optical device is solely dominated by the size of the actuator elements rather than by the power distribution system.

Abstract: An optical system and associated method are provided. Included is at least one telescope. Further provided is a deformable mirror operable to compensate for optical aberrations resulting from the telescope.

Abstract: A deformable mirror includes a deformable section on which a reflecting surface and a COM electrode are formed, a fixing section which fixes the deformable section, a driving and sensing electrode (driving force generating unit) which has a plurality of driving and sensing electrodes provided facing the COM electrode, and which drives the deformable section by applying an electric potential difference between the COM electrode and the driving and sensing electrode, and a capacitance detecting circuit which detects simultaneously a plurality of capacitances between the COM electrode and the driving and sensing electrode.

Abstract: A variable focal length lens consists of many micromirrors with degrees of freedom rotation and/or degrees of freedom translation and actuating components. As operating methods for the lens, the actuating components control the positions of micromirrors electrostatically and/or electromagnetically. The optical efficiency of the variable focal length lens is increased by locating a mechanical structure upholding micromirrors and the actuating components under micromirrors. The lens can correct aberration by controlling each micromirror independently. The lens can also be of a desired arbitrary shape and/or size. The micromirrors are arranged in a flat plane or in a curved plane with a predetermined curvature. The electrodes determining the position of the micromirrors can be made of material with high electrical conductivity, preferably metal.

Abstract: The variable shape mirror (1) includes a substrate (2) and a bulk piezoelectric body (3). On the piezoelectric body (3), a specular surface (4) is formed, and further a plurality of grooves (5a-5e) are formed at a predetermined interval. The grooves (5a-5e) are arranged so as to surround the specular surface (4) and filled with the conductive members. The conductive members embedded in the grooves (5a-5e) are connected electrically to one of a pair of common electrodes (7a and 7b) that is disposed to cross the grooves (5a-5e) and are formed to be electrodes having different polarities in alternating manner in the direction from the inner side to the outer side of the grooves (5a-5e).

Abstract: This invention relates to a mirror holding method, wherein a symmetry axis of an illuminating area corresponds with that of a mirror holder, and a center of the illuminating area in a mirror differs from a centroid of the mirror.

Abstract: An adjustable rear view mirror structure is provided. The rear view mirror structure comprises a flexible body and an adjusting apparatus wherein the body has a reflective surface and an inner surface. The adjusting apparatus is disposed at a rear portion of the body and is utilized to drive the inner surface of the body. Thus, the reflective surface of the body can form a particular curvature whereby the rear view mirror structure can offer a wider viewing angle.

Abstract: A deformable mirror includes a deformable section in which, a reflecting surface is formed, a fixing section which fixes an outer periphery of the deformable section, a GND electrode which is formed on the deformable section, a drive electrode which is provided facing the GND electrode, and a driving-signal source which deforms the deformable section by an electric voltage applied between the GND electrode and the drive electrode. The deformable mirror is sealed such that a pressure inside to be lower than an atmospheric pressure, and is provided with a capacitance detecting circuit which detects a change in response characteristics of the deformable section associated with a pressure change of a sealed-inside.

Abstract: A micromirror array fabricated on a semiconductor substrate. The array is comprised of three operating layers. An addressing layer is fabricated on the substrate. A hinge layer is spaced above the addressing layer by an air gap. A mirror layer is spaced over the hinge layer by a second air gap. The hinge layer has a hinge under and attached to the mirror, the hinge permitting the mirror to tilt. The hinge layer further has spring tips under the mirror, which are attached to the addressing layer. These spring tips provide a stationary landing surface for the mirror.

Abstract: An image pickup apparatus comprising a first lens unit which comprises at least a negative lens element and at least a positive lens element and has negative refractive power, a second lens unit which has positive refractive power, and an optical path bending reflecting optical element which has a variable reflecting surface disposed in an airspace between a most object side lens component of the first lens unit and a most object side lens component of the second lens unit. This image pickup apparatus changes a magnification by moving the second lens unit along an optical axis and corrects a deviation of an image location by varying a shape of the variable reflecting surface of the reflecting optical element.

Abstract: A method, or corresponding apparatus, for controlling deformation of a structure, in part, includes applying a command signal at a first signal level to at least one actuator mechanically coupled to a structure, the first signal level known to produce an energy level in the actuator(s) substantially the same as an energy level currently stored by the actuator(s). The method enables the actuator(s) to respond to the command signal by applying an electrical reference to the actuator(s). The method drives the command signal from the first signal level to a second signal level, changing the actuator(s) in at least one dimension as a function of the command signal, which results in a corresponding deformation of the structure. The method electrically disables the actuator(s) by removing the electrical reference, which results in maintaining deformation of the structure defined by energy stored by the actuator(s).

Abstract: An active hybrid optical component includes a substrate including a mounting surface; a replicated optical surface mounted on the mounting surface; and a plurality of actuators for deforming the substrate to impose a predetermined finished optical shape to the replicated optical surface.

Abstract: An integrated actuator meniscus mirror includes an optical substrate having a mirror surface on one side and a support structure on the other for controllably altering the shape of the mirror surface without a reaction mass.

Abstract: A deformable membrane mirror and a related method for its use, the mirror including a deformable membrane having a reflective front face and a back face, and further including electrodes located on both sides of the membrane, to provide a desired surface contour without imparting a concave bias to the membrane. The electrodes include a first set of electrodes spaced from the back face of the membrane, and at least one additional electrode spaced from the front face of the membrane.

Abstract: An integrated actuator meniscus mirror includes an optical substrate having a mirror surface on one side and a support structure on the other and a plurality of actuators embedded in the support structure, spaced from and generally parallel to the mirror surface for applying bending moments to the mirror surface for controllably altering the shape of the mirror surface.

Abstract: An apparatus and method for mitigating a cold edge effect within a lithography mirror is presented. The apparatus includes a heated annular zone formed on a substrate and a heated optical aperture zone formed on the heated annular zone, where each zone includes a resistive layer, and where the resistive layer of at least one zone is produced such that electrical conductivity varies by increasing from the center of the resistive layer to the periphery of the resistive layer. A wiring layer in each zone includes an insulating sublayer and contacts for coupling to a power supply. A time-constant heat load on the lithography mirror is maintained by placing additional electrical heat loads on the mirror according to the actinic heat load on the mirror. Maintaining the time-constant heat load can reduce or eliminate variation in image distortion that occurs as a result of changes in the actinic heat load.

Abstract: An array of micromirror array lenses is invented. The micromirror array lens consists of many micromirrors and actuating components. Each micromirror array lens is variable focal length lens with high speed focal length change. The lens can have arbitrary type and/or size as desired and desired arbitrary optical axis and can correct aberration by controlling each micromirror independently. Independent control of each micromirror is possible by known microelectronics technologies. The actuating components control the positions of micromirrors electrostatically and/or electromagnetically. The optical efficiency of the micromirror array lens is increased by locating a mechanical structure upholding micromirrors and the actuating components under micromirrors. The known microelectronics technologies remove the loss in effective reflective area due to electrode pads and wires.

Abstract: A membrane receives an incident energy signal at a first surface of the membrane. An actuating electrode, located adjacent to the membrane on a side opposite the first surface, applies an actuating pressure to the membrane if an actuating potential is applied between the actuating electrode and the membrane. A restoring electrode, located adjacent to the first surface of the membrane, applies a restoring pressure to the membrane if a restoring potential is applied between the restoring electrode and the membrane. The restoring electrode has an outer surface defining an aperture that enables the incident energy signal to pass, for example, without significant obstruction and without significant attenuation, through the restoring electrode to impinge upon the membrane, and the length of the restoring electrode is at least as great as the smallest width of the aperture.

Abstract: Actuator arrays for use in adaptive-optical elements and optical systems containing at least one such element are disclosed. The actuator arrays provide more precise control of the shape of the adaptive-optical surface while utilizing fewer actuators than conventional systems. An adaptive-optical system of an embodiment includes an array of force devices coupled to a deformable optical surface. The force devices of the array are arranged in braking groups and force-altering groups such that each force device belongs to a respective combination of braking group and force-altering group. A respective force controller is coupled to the force devices of each force-altering group, and a respective braking controller is coupled to the force devices of each braking group.

Abstract: An array of movable elements is arranged on a substrate. Each element has a cavity and a movable member to move through the cavity. The pressure resistance of the elements varies, allowing actuation signals to be manipulated to activate elements with different pressure resistance at different levels of the actuation signal.

Abstract: This invention provides a dynamic interconnection system which allows to couple a pair of optical beams carrying modulation information. In accordance with this invention, two optical beams emanate from transceivers at two different locations. Each beam may not see the other beam point of origin (non-line-of-sight link), but both beams can see a third platform that contains the system of the present invention. Each beam incident on the interconnection system is directed into the reverse direction of the other, so that each transceiver will detect the beam which emanated from the other transceiver. The system dynamically compensates for propagation distortions preferably using closed-loop optical devices, while preserving the information encoded on each beam.

Abstract: In an optics system, a flexible mirror is deformed with an electromagnetic force. In one embodiment, an electrical current is directed through the mirror, or a conductor attached to the mirror, in the presence of a magnetic field. In one application in an adaptive optics system, the membrane mirror is used in a wavefront sensor. Deformed to oscillate between convex and concave positions, the mirror is used to alternately defocus a received light signal for determining aberrations in the light signal. By detecting aberrations in the light signal, the adaptive optics system can correct for those aberrations.

Abstract: A deformable mirror includes a reflecting surface disposed on a diaphragm and a diaphragm carrier that supports the diaphragm. The diaphragm carrier defines a non-circular, pressurizable rear surface of the diaphragm.