Abstract: A mirror apparatus includes a plurality of holes which are divided by partition wall portions on a back surface of a mirror, a plurality of thin film piezoelectric elements which are fixed to bottom surfaces of the plurality of holes respectively, a radiation temperature-regulating plate which has a plurality of projections inserted into the holes, and a mirror control system which individually controls voltages to be applied to the plurality of thin film piezoelectric elements to deform the mirror. The mirror can be efficiently deformed and/or cooled from the side of the back surface without transmitting any vibration to the mirror.

Abstract: An optical module includes a mirror which reflects input light and which outputs output light; and a mirror control section which is opposite to the mirror and which controls, at the time of the input light being reflected from a reflecting surface of the mirror, the reflecting surface by distorting the reflecting surface according to voltage applied to the mirror so as to output the output light an optical coupling characteristic of which changes. By using this optical module, the optical coupling characteristic of the output light changes.

Abstract: The invention includes a deformable mirror for use in adaptive and active optical systems and in optical technology laser communication directed energy systems. The invention utilizes pockets formed in the back of the mirrors substrate. The pockets house actuators that are bonded to the substrate and may adjustably deform the mirror surface depending on the voltage supplied to the actuators. A plurality of mirrors may be combined to form a scalable array or positioned to overcome issues related to the uncontrollable portions of separate individual mirrors.

Abstract: Optical components and systems are disclosed that include an optical element and a base member. Multiple wells correspond to respective locations on a surface of the optical element. Liquid metal in the wells is coupled to the respective locations to apply respective hydrostatic pressures to the locations. At least one displacement device is coupled to at least one well to selectively change the respective hydrostatic pressure applied, relative to the base member, by the liquid metal in the well to the respective location. The “liquid metal” is any of several formulations of metal that are liquid under actual-use conditions (e.g., a liquid alloy of gallium). The liquid metal can be displaced through conduits to change the hydrostatic pressure being applied to the respective locations. The displacement, and hence the hydrostatic pressure, can be feedback controlled.

Abstract: In various embodiments, an optical element may include at least one elastically deformable support, on which at least one reflective layer is applied; and in addition at least one deformation apparatus for elastically deforming the at least one support.

Abstract: Disclosed are a mirror unit and a method of producing the same. In one preferred embodiment, the mirror unit includes a mirror with a multilayered film formed on a substrate, the multilayered film having two materials periodically laminated in layers on the substrate, and a substrate deforming device for producing deformation of a shape of the substrate of the mirror, wherein, in the multilayered film, the number of laminated layers in a predetermined region of the substrate differs from that in another region of the substrate. A mirror unit producing method according to another preferred embodiment includes forming a multilayered film on a substrate, the multilayered film having two materials periodically laminated in layers on the substrate, providing substrate deforming means in association with the substrate, the deforming means having a function for producing deformation of the shape of the substrate, and partially removing the multilayered film.

Abstract: A Micromirror Array Lens comprises a plurality of micromirrors arranged on a flat or a curved surface to reflect incident light. Each micromirror in the Micromirror Array Lens is configured to have at least one motion. The Micromirror Array Lens forms at least one optical surface profile reproducing free surfaces by using the motions of the micromirrors. The free surface can be any two or three-dimensional continuous or discrete reflective surface. The Micromirror Array Lens having the corresponding optical surface profile provides optical focusing properties substantially identical to those of the free surface. The Micromirror Array Lens can forms various optical elements such as a variable focal length lens, a fixed focal length lens, an array of optical switches, a beam steerer, a zone plate, a shutter, an iris, a multiple focal length lens, other multi-function optical elements, and so on.

Abstract: The invention relates to a bimorph mirror presenting first and second layers (1, 2) of piezoelectric ceramic together with at least one electrode enabling at least one curvature of the mirror to be varied as a function of at least one electrical voltage applied to the piezoelectric ceramics. The mirror of the invention is characterized in that the first and second layers (1, 2) are separated by a central core (5) of material such as glass or silica, forming a semirigid beam.

Abstract: A coordinate system defines the length of the curve of a parabola used in constructing a parabolic trough reflector. The origin (0,0) of the coordinate system is at the bottom center of the coordinate system. The two upper points of the coordinate system define the width, height of the parabola. These points are defined as (X1,Y1)=(?width,height), and (X2,Y2)=(width,height). The equation defining the parabola is f(x)=a·x2, where a=height/width2. The plot of this equation produces a parabola that fits into the coordinate system. Two small blocks are used as anchor points for the ends of the parabola. The length of the curve of the parabola is defined in the equation: length(x)=a·[x·(?{square root over (x2+b2)})+b2·ln(x+?{square root over (x2+b2)})] where b=1/2·a. An inexpensive trough reflector is constructed out of flexible material. It is used to build a much more complicated six reflector system to concentrate parallel radiation like sunlight much like a magnifying glass.

Abstract: A deformable element for use in microelectromechanical systems comprises a core layer and a protective layer. The protective layer is capable of deterring combinations of undesired chemical components in operational environments with the core layer of the deformable element.

Abstract: The present invention provides an optical micromirror device and their array device and method for making the same. By introducing a sub coating layer and an over coating layer with a high reflective metal layer, the reflective layer of the micromirrors is protected from environmental circumstances, oxidation, degradation, acid, base, and galvanic corrosion of the micro-mechanical structures. Also the new coating structure enhances the performance of the micromirror array device by reducing degradation of the reflectivity of the metal layer, by providing anti-reflection in the optically non-effective area, and by protecting the micro-mechanical structures.

Abstract: The present invention provides a micromirror array device specially Micromirror Array Lens device structure and method for making the same. By introducing a sub coating layer and an over coating layer with a high reflective metal layer, the reflective layer of the micromirrors is protected from environmental circumstances, oxidation, degradation, acid, base, and galvanic corrosion of the micro-mechanical structures. Also the new coating structure enhances the performance of the Micromirror Array Lens by reducing degradation of the reflectivity of the metal layer, by providing anti-reflection in the optically non-effective area, and by protecting the micro-mechanical structures.

Abstract: Actuator arrays for use in adaptive-optical elements and optical systems containing at least one such element are disclosed. The actuator arrays provide more precise control of the shape of the adaptive-optical surface while utilizing fewer actuators than conventional systems. An adaptive-optical system of an embodiment includes an array of force devices coupled to a deformable optical surface. The force devices of the array are arranged in braking groups and force-altering groups such that each force device belongs to a respective combination of braking group and force-altering group. A respective force controller is coupled to the force devices of each force-altering group, and a respective braking controller is coupled to the force devices of each braking group.

Abstract: The present invention relates to a variably focusing mirror for realizing an automatic focusing and optical zooming of a miniature camera module, the mirror comprising a driving part having a supporting board and more than one permanent magnet attached on the supporting board; and a mirror having a coil, a reflective surface of which a curvature is changed by the magnitude and the direction of a current flowing through the coil and a thin film on which the reflective surface is incorporated. The variably focusing mirror according to the present invention can realize a focusing and an optical zooming by adjusting a curvature radius of a reflective surface. Therefore, it can remarkably decrease the volume of a camera module and be used in various applications requiring for a miniature camera module.

Abstract: A thin nearly wireless adaptive optical device capable of dynamically modulating the shape of a mirror in real time to compensate for atmospheric distortions and/or variations along an optical material is provided. The device includes an optical layer, a substrate, at least one electronic circuit layer with nearly wireless architecture, an array of actuators, power electronic switches, a reactive force element, and a digital controller. Actuators are aligned so that each axis of expansion and contraction intersects both substrate and reactive force element. Electronics layer with nearly wireless architecture, power electronic switches, and digital controller are provided within a thin-film substrate. The size and weight of the adaptive optical device is solely dominated by the size of the actuator elements rather than by the power distribution system.

Abstract: A curvature-adjustment device used for an optical scanner that includes an optical beam emission unit to emit an optical beam, a deflection unit to deflect the optical beam in a main scanning direction and a mirror to reflect the optical beam. The curvature-adjustment device corrects a curvature of a main scanning line on a surface of a scanning target, and includes a support unit to support the mirror at an end thereof by contacting a rear surface of the mirror, an edge-positioned adjustment unit to curve the mirror by exerting a first force, a center-positioned adjustment unit to curve the mirror reversely in a direction to which the edge-positioned adjustment unit curves the mirror by providing a second force perpendicular to the reflecting surface at a center of the mirror, and a fine adjustment unit to adjust the strength of the first force depending on the strength of the second force.

Abstract: A projection objective of a microlithographic projection exposure apparatus has a plurality of optical elements, for example lenses or mirrors. The objective furthermore includes an actuator for exerting a mechanical force that deforms a selected optical element of the projection objective. A manipulator modifies the spatial position of one of the optical elements as a function of the force exerted by the actuator.

Abstract: A method for manufacturing a multilayer mirror that includes a substrate and a multilayer film formed on the substrate, and has a reflection surface shape includes the steps of estimating a surface shape variation amount as a difference between a surface shape of the substrate before the multilayer film is formed on the substrate and a surface shape of the multilayer mirror after the multilayer film is formed on the substrate, processing the surface shape of the substrate into a shape generated by subtracting the surface shape variation amount from the reflection surface shape, and forming the multilayer film on the substrate processed by the processing step.

Abstract: An optical element includes a substrate, a magnetostrictive film arranged on the substrate, a film thickness of the magnetostrictive film varying in accordance with intensity of a magnetic field, and a reflection film arranged on the magnetostrictive film and reflects light. An optical apparatus includes a stage including a holder provided with plural holes arranged in a carrying surface thereof for carrying an optical element provided with a magnetostrictive film arranged on a substrate, a film thickness of the magnetostrictive film varying in accordance with intensity of a magnetic field, and a reflection film arranged on the magnetostrictive film and reflecting light, plural magnetic field generation parts embedded in the plural holes, and a control mechanism for controlling the magnetic field generated by each of the plural magnetic field generation parts, and controlling the film thickness of the magnetostrictive film.

Abstract: A shape-variable optical element, which includes: a shape-variable section made up of an organic material that can be expanded and contracted by an electric field, in a direction of the electric field; and a pair of electrode layers to sandwich the shape-variable section, wherein amounts of expansion and contraction of the shape-variable section, which are generated by the electric field when a voltage is applied to the pair of electrode layers, have a distribution pattern in a surface perpendicular to the electric field.

Abstract: Mirrors and other optical elements are disclosed that include a body defining an optical surface (typically a reflective surface) and an opposing second surface. The body has a coefficient of thermal expansion (CTE). The optical element includes a correcting portion (e.g., a layer) attached to the second surface and having a CTE that, during heating of the optical element, imparts a bending moment to the body that at least partially offsets a change in curvature of the optical surface caused by heating. The body can be internally cooled. The body and correcting portion desirably are made of respective thermally conductive materials that can vary only slightly in CTE. The body desirably has a lower CTE than the correcting portion, and the correcting portion can be tuned according a variable property of the body and/or reflective surface. The body and correcting portion desirably function cooperatively in a thermally bimetallic-like manner.

Abstract: Optical elements are disclosed that exhibit “multimetallic”-like self corrections of thermally induced distortions. An exemplary optical element includes first and second portions. The first portion has a first coefficient of thermal expansion (CTE), an obverse surface, and a reverse surface. A second portion is bonded to the reverse surface. The second portion has a second CTE different from the first CTE to form an optical element exhibiting a thermally multimetallic-like change in curvature of the obverse surface accompanying a temperature change of the optical element. The second portion has a thermal-response property in a first direction that is different from a thermal-response property in a second direction. Thus, aberrations such as astigma-type aberrations can be readily self-corrected.

Abstract: A deflector mirror is disclosed that includes a mirror substrate configured to vibrate in a reciprocating manner on beams as a torsional rotary shaft so as to deflect a light beam emitted from a light source. The mirror substrate includes multiple regions in each of portions thereof extending from the torsional rotary shaft to respective ends of the mirror substrate, the regions being different in flexural rigidity.

Abstract: An apparatus that comprises a liquid mirror. The liquid mirror includes a liquid that forms an interface with a fluid adjacent to the liquid. The liquid mirror also includes a layer of reflective particles located at the interface, wherein the layer forms a reflective surface.

Abstract: There is provided an optical component. The optical component includes a material having a coefficient of thermal expansion ?, where the coefficient of thermal expansion is dependent on location. The following applies to the location-dependent coefficient of thermal expansion: ?= ?±??, with ?? being the maximum deviation of the coefficient of thermal expansion from the mean value of the coefficient of thermal expansion ? of the material. The following homogeneity condition applies to the material: ? ?? ? ? ( 0.14 + 0.1 · x + 390 x ) · ? _ Q . ?with the progress of the lacation-dependent progress of the coefficient of thermal expansion being periodical with a wavelength x given in mm, and the thermal output which is absorbed by the optical component being designated by Q given in watts (W), the resulting emissivity being designated by ?, and |??|in units of ppb K .

Abstract: A control of gobos defend by records in the gobo. The gobos are formed by menued shapes.

Abstract: A deformable mirror (DM) embodying the invention includes a reflective layer attached to the front surface of a solid monolithic block of a ceramic material. A plurality of holes is drilled from the back surface with the top end of each hole being terminated a predetermined distance below the front surface. Conductors, functioning as actuators, are inserted into each hole to apply a localized electric field at the top end of the hole. Each one of the electric fields is used to create local deformation of the front surface of the block and the corresponding portion of the reflective layer.

Abstract: The invention in microgravity uses the natural effect of capillary action and surface tension of a liquid substance inside a cylindrical chamber to form a curved meniscus suitable to use in a space telescope. The geometry of the meniscus can be controlled by using a boundary line that fixes the contact point of the meniscus and then controlling the volume of the liquid. The meniscus geometry can then be controlled to form a reflective liquid mirror dish that is suitable to use in a space telescope.

Abstract: A deformable mirror device includes a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member opposite from the first face; a deformable electrode film formed below the first face of the support member so as to be opposed to the electrodes with a distance and so as to cover the opening; an insulation film provided between the deformable electrode film and the support member; a reflection film provided on a face of the deformable electrode film opposite from the electrodes so as to overlap the opening; and a plurality of through holes passing through the reflection film and the deformable electrode film and disposed so as to overlap the opening.

Abstract: An optical element with multi-layer composites that deforms to reduce optical aberrations in off-axis optic. Methods are also described in relation to the optical element.

Abstract: The invention relates to active microoptic reflecting components for adapting or changing the focal length or focal position in optical systems. It is the object of the invention to make available a miniaturized reflecting microoptic component for focusing or defocusing incident electromagnetic radiation, with which a variation in the focal distance can be achieved simply and at low cost. On the component according to the invention there is an elastically deformably membrane which is formed at least with one reflecting layer comprising a first material or material mixture and at least with one further layer or substrate which is formed from a second material or material mixture. First and second materials or material mixtures have thermal coefficients of expansion which deviate from each other. In addition a heating or temperature control mechanism is present.

Abstract: A deformable mirror device includes a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member opposite from the first face; a deformable electrode film formed below the first face of the support member so as to be opposed to the electrodes with a distance and so as to cover the opening; an insulation film provided between the deformable electrode film and the support member; and a reflection film provided on a face of the deformable electrode film opposite from the electrodes so as to overlap the opening. The electrodes are electrically insulated each other by a plurality of grooves radially extending from a region which includes a position corresponding to a center of the opening.

Abstract: The disclosed technology provides a dynamic interconnection system which allows to couple a pair of optical beams carrying modulation information. In accordance with the disclosed technology, two optical beams emanate from transceivers at two different locations. Each beam may not see the other beam point of origin (non-line-of-sight link), but both beams can see a third platform that contains the system of the disclosed technology. Each beam incident on the interconnection system is directed into the reverse direction of the other, so that each transceiver will detect the beam which emanated from the other transceiver. The system dynamically compensates for propagation distortions preferably using closed-loop optical devices, while preserving the information encoded on each beam.

Abstract: A thin nearly wireless adaptive optical device capable of dynamically modulating the shape of a mirror in real time to compensate for atmospheric distortions and/or variations along an optical material is provided. The device includes an optical layer, a substrate, at least one electronic circuit layer with nearly wireless architecture, an array of actuators, power electronic switches, a reactive force element, and a digital controller. Actuators are aligned so that each axis of expansion and contraction intersects both substrate and reactive force element. Electronics layer with nearly wireless architecture, power electronic switches, and digital controller are provided within a thin-film substrate. The size and weight of the adaptive optical device is solely dominated by the size of the actuator elements rather than by the power distribution system.

Abstract: The present invention provides a reflector for a solar energy collection system. The reflector comprises a reflective material for receiving solar radiation and directing the received solar radiation to an absorber. The reflector also comprises a polymeric body supporting the reflective material. The polymeric body comprises a polymeric core that is sandwiched by at least one polymeric layer.

Abstract: In a variable-shape mirror provided with a support base, a mirror portion that is disposed to face the support base and that has, on a side thereof facing away from the support base, a mirror surface which is irradiated with a light beam, and piezoelectric elements that are sandwiched between the support base and the mirror portion and that vary the shape of the mirror surface, the piezoelectric elements are bonded, by means of a thin layer of metal, to at least one of the support base and the mirror portion by the application of heat and pressure.

Abstract: A method of manufacturing a projection objective (22) of a microlithographic projection exposure apparatus (10). The projection objective (22) comprises at least one mirror (M1 to M6) that each have a mirror support (241 to 246) and a reflective coating (26) applied thereon. First imaging aberrations of a pre-assembled projection objective are measured. Before the coating (26) is applied, the mirror supports (241 to 246) are provided with a desired surface deformation (34). If the mirrors (M1 to M6) are not reflective for projection light without the coating (26), measuring light is used that has another wavelength. Alternatively, two identical mirror supports (246) may be provided. One support having a reflective coating is part of the pre-assembled projection objective whose imaging aberrations are measured. The other support is provided with surface deformations before coating and mounting the support into the objective.

Abstract: An optical unit includes a closed hollow body defining an enclosed chamber therein, and having an optical part that confines a portion of the chamber and that is deformable so as to be changeable in thickness and shape in response to changes in an inner pressure in the chamber. An image capturing device includes: a light-proof image-capturing housing that has a lens-mounting port; an image processing unit mounted in the image-capturing housing; and a focus-adjustable lens unit coupled to the lens-mounting port and including a closed hollow body defining an enclosed chamber therein, and having an optical part that confines a portion of the chamber, that is aligned with the lens-mounting port along an optical path, and that is deformable so as to be changeable in thickness and shape in response to changes in an inner pressure in the chamber. A reflective device is also disclosed.

Abstract: A deformable mirror includes a deformable section on which a reflecting surface and a COM electrode are formed, a fixing section which fixes the deformable section, a driving and sensing electrode (driving force generating unit) which has a plurality of driving and sensing electrodes provided facing the COM electrode, and which drives the deformable section by applying an electric potential difference between the COM electrode and the driving and sensing electrode, and a capacitance detecting circuit which detects simultaneously a plurality of capacitances between the COM electrode and the driving and sensing electrode.

Abstract: A deformable mirror apparatus is disclosed. The apparatus includes a flexible member having a mirror on a surface and having a part having a different section form to form a convex on the opposite surface of the mirror such that a predetermined strength distribution is imparted to the flexible member; a base substrate; a strength securing member provided between the base substrate and the flexible member to support the flexible member from the base substrate side; and a driving section that deforms the form of the mirror by applying driving force to the opposite surface of the mirror of the flexible member.

Abstract: A method of creating an internal dipole moment in an interferometric light modulating device is disclosed. In certain embodiments, the method includes applying heat and an electrical field to a dielectric layer of an interferometric light modulating device. Before this method, the dielectric layer has mobile charges or includes random dipoles. After this method, however, those random dipoles are substantially aligned, thereby inducing a fixed dipole moment in the dielectric layer. The electric field creates the dipole moment in the dielectric layer and the heat helps increase the speed of the process by supplying additional activation energy. Having a dielectric layer with an induced dipole moment provides an internal voltage source that provides at least a portion of the voltage required to operate the interferometric light modulating device. The induced dipole moment also reduces the possibility of an uncontrolled shift of charge within the device during operation.

Abstract: A variable shape mirror includes a support substrate provided with a conductive bonding portion that is divided into two areas bonded to a lamination type piezoelectric actuator. A bonding surface of the piezoelectric actuator is provided with a first metal film that is divided into a first area and a second area that are not connected to each other electrically. Side faces of the piezoelectric actuator are provided with a second metal film that connects a first common electrode to the first area electrically or connects a second common electrode to the second area electrically. The piezoelectric actuator is disposed on the bonding portion so that the individual areas of the first metal film are connected electrically to the different areas of the bonding portion, respectively.

Abstract: The variable-shape mirror is provided with a support base and a minor portion that is disposed to face the support base and that has on a side thereof facing away from the support base a minor surface which is irradiated with a light beam. There are also provided piezoelectric elements that are sandwiched between the support base and the mirror portion and that vary the shape of the mirror surface. The piezoelectric elements are bonded, through a thin layer of metal that is separately provided for bonding, to at least one of the support base and the mirror portion. A driving voltage to the piezoelectric elements is supplied through the thin layer of metal.

Abstract: An optical subassembly with an optical element, for example a mirror element (7), has an optical surface (9) and bearing points (12) arranged on the circumference. The optical element (7) is connected to a mount (13) at the bearing points (12) via connecting elements (14, 15, 16, 17, 18). Stress-decoupling cutouts, for example curved slots (11), are provided between the optical surface (9) and the bearing points (12).

Abstract: A light-weight mirror blank assembly, having at least one sheet of corrugated material; and at least one face sheet in intimate contact with a surface of the sheet of corrugated material forming the light-weight mirror blank assembly. The light-weight mirror blank assembly has an areal density less than an equivalent blank assembly having a solid support structure for supporting a mirrored surface.

Abstract: A thin, nearly wireless adaptive optical device capable of dynamically modulating the shape of a mirror in real time to compensate for atmospheric distortions and/or variations along an optical material is provided. The device includes an optical layer, a substrate, at least one electronic circuit layer with nearly wireless architecture, an array of actuators, power electronic switches, a reactive force element, and a digital controller. Actuators are aligned so that each axis of expansion and contraction intersects both substrate and reactive force element. Electronics layer with nearly wireless architecture, power electronic switches, and digital controller are provided within a thin-film substrate. The size and weight of the adaptive optical device is solely dominated by the size of the actuator elements rather than by the power distribution system.

Abstract: A wavefront aberration compensating apparatus, including: a deformable mirror which compensates a wavefront aberration of a light flux and includes electrodes, and a thin-film mirror which changes a configuration thereof in accordance with a voltage value applied to each of the electrodes; an optical system provided with the deformable mirror and including an object subjected to aberration compensation; a wavefront sensor which measures the wavefront aberration of the light flux; a memory which stores therein a voltage template provided for each expansion mode according to a polynomial of wavefront aberration, as a voltage alignment data for the electrodes which induces the corresponding expansion mode; and a controller configured to determine a superposition amplitude value of each of the expansion modes and calculate the voltage value applied to each of the electrodes by using the voltage templates stored such that the wavefront aberration obtained by the wavefront sensor becomes a desired aberration, and t

Abstract: A piezoelectric transducer is described that is configured for use within a path length control apparatus of an optical device. The transducer comprises at least one void formed within a central region of the piezoelectric transducer, the one void or alternatively, the multiple voids, utilized at least in part to limit a curvature induced into a mirror during operation of the piezoelectric transducer.

Abstract: A wavefront aberration compensating apparatus includes: a deformable mirror which compensates a wavefront aberration of a light flux entered, the deformable mirror including a plurality of electrodes, and a thin-film mirror which changes a configuration thereof in accordance with a voltage value applied to each of the electrodes; an optical system provided with the deformable mirror, and including an object subjected to aberration compensation; a wavefront sensor which receives the light flux traveled through the object and the deformable mirror, and which measures the wavefront aberration of the light flux; and a controller configured to calculate the voltage value applied to each of the electrodes, on the basis of differences, from a signal outputted from the wavefront sensor, between application points on the thin-film mirror and target points both corresponding to the electrodes, respectively, and to repeat compensation of the configuration of the thin-film mirror of the deformable mirror on the basis of

Abstract: A wavefront aberration compensating apparatus, which includes: a deformable mirror having electrodes and a thin-film mirror; an optical system provided with the deformable mirror and including an object; a wavefront sensor which measures a wavefront aberration of a light flux; and a controller configured to: calculate a first voltage value applied to each of the electrodes, on the basis of differences between application points on the thin-film mirror and target points both corresponding to the electrodes respectively; determine a superposition amplitude value of each expansion mode according to a polynomial of wavefront aberration, and calculate a second voltage value applied to each of the electrodes by using voltage templates previously stored, such that the wavefront aberration obtained by the wavefront sensor becomes a desired aberration; determine the voltage value applied to each of the electrodes, by mainly using the second voltage value in an initial stage of compensation of the configuration of the