Plural Diverse X-ray Analysis Patents (Class 378/90)
  • Patent number: 7120228
    Abstract: Apparatus for analysis of a sample includes a radiation source, which is adapted to direct a converging beam of X-rays toward a surface of the sample. At least one detector array is arranged to sense the X-rays scattered from the sample as a function of elevation angle over a range of elevation angles simultaneously, and to generate output signals responsively to the scattered X-rays. The detector array has a first configuration in which the detector array senses the X-rays that are reflected from the surface of the sample at a grazing angle, and a second configuration in which the detector array senses the X-rays that are diffracted from the surface in a vicinity of a Bragg angle of the sample. A signal processor processes the output signals so as to determine a characteristic of the surface layer of the sample.
    Type: Grant
    Filed: September 21, 2004
    Date of Patent: October 10, 2006
    Assignee: Jordan Valley Applied Radiation Ltd.
    Inventors: Boris Yokhin, Isaac Mazor, Tzachi Rafaeli
  • Patent number: 7092485
    Abstract: A baggage scanning system and method employ combined angular and energy dispersive x-ray scanning to detect the presence of a contraband substance within an interrogation volume of a baggage item. The interrogation volume is illuminated with penetrating, polychromatic x-rays in a primary fan beam from a source such as a tungsten-anode x-ray tube. An energy-dependent absorption correction is determined from measurement of the attenuation of the fan beam at a plurality of different energies. Radiation coherently scattered by substances in the interrogation volume is detected by an energy-resolved x-ray detector operated at a plurality of scattering angles to form a plurality of scattering spectra. Each scattering spectrum is corrected for energy-dependent absorption and the corrected spectra are combined to produce a scattering pattern. The experimental scattering pattern is compared with reference patterns that uniquely characterize known contraband substances.
    Type: Grant
    Filed: May 27, 2003
    Date of Patent: August 15, 2006
    Assignee: Control Screening, LLC
    Inventor: Scott D. Kravis
  • Patent number: 7072440
    Abstract: X-ray radiation is transmitted through and scattered from an object under inspection to detect weapons, narcotics, explosives or other contraband. Relatively fast scintillators are employed for faster X-ray detection efficiency and significantly improved image resolution. Detector design is improved by the use of optically adiabatic scintillators. Switching between photon-counting and photon integration modes reduces noise and significantly increases overall image quality.
    Type: Grant
    Filed: November 12, 2003
    Date of Patent: July 4, 2006
    Assignee: Control Screening, LLC
    Inventors: Arthur W. Mario, Scott D. Kravis
  • Patent number: 7039161
    Abstract: A method and apparatus for analyzing a film structure analyze particle or pore size distribution with high accuracy and evaluate a shape of a surface or interface even in the case where the absolute amount of particles or pores in the thin film is small.
    Type: Grant
    Filed: October 19, 2004
    Date of Patent: May 2, 2006
    Assignee: Rigaku Corporation
    Inventors: Yoshiyasu Ito, Kazuhiko Omote
  • Patent number: 6985615
    Abstract: There is disclosed an image processing apparatus for performing a dynamic range compression processing to an arbitrary image to add a high frequency component obtained based on the image, the image processing apparatus comprising: conversion means for converting the magnitude of the amplitude of the added high frequency component based on the magnitude of the high frequency component. When the dynamic range compression processing is performed, artifacts such as an overshoot and undershoot are depressed, the amplitude of the high frequency component is held and the width of an image density distribution is set to be freely adjustable, so that a satisfactory processed image can be obtained.
    Type: Grant
    Filed: August 28, 2003
    Date of Patent: January 10, 2006
    Assignee: Canon Kabushiki Kaisha
    Inventor: Hiroyuki Shinbata
  • Patent number: 6895075
    Abstract: Apparatus for inspection of a sample includes a radiation source and an array of detector elements arranged to receive radiation from the surface due to irradiation of an area of the surface by the radiation source. The array has a first operative configuration for resolving the received radiation along a first axis perpendicular to the surface, and a second operative configuration for resolving the received radiation along a second axis parallel to the surface. A signal processor processes the signal from the detector array in the two configurations so as to determine a reflectance of the surface as a function of elevation angle relative to the surface and a scattering profile of the surface as a function of azimuthal angle in a plane of the surface.
    Type: Grant
    Filed: February 12, 2003
    Date of Patent: May 17, 2005
    Assignee: Jordan Valley Applied Radiation Ltd.
    Inventors: Boris Yokhin, Alexander Dikopoltsev, Tzachi Rafaeli, Amos Gvirtzman
  • Patent number: 6879657
    Abstract: An imaging system includes an x-ray source coupled to a gantry. The x-ray source generates an x-ray flux, wherein a portion of the x-ray flux becomes scatter radiation. A scatter detector is also coupled to the gantry to receive the scatter radiation. The scatter detector generates a scatter signal in response to the scatter radiation, and a host computer receives the scatter signal.
    Type: Grant
    Filed: May 10, 2002
    Date of Patent: April 12, 2005
    Assignee: GE Medical Systems Global Technology, LLC
    Inventor: David Michael Hoffman
  • Patent number: 6798863
    Abstract: In order to provide a single, small apparatus capable of elemental and structural analysis of inorganic matter by utilizing X-rays having non-obstructive and non-contact characteristics there is provided a small, energy distribution type X-ray detector for detecting X-ray fluorescence and subjecting the X-ray fluorescence to elemental and quantative analysis, and a CCD line sensor for performing structural analysis. An X-ray tube target structure that is a Cu layer on an Mo layer is adopted. When excitation is performed using a low accelerating voltage, this is made monochromatic by using a Cu filter to filter the Cu—K lines and the continuous X-rays generated, with the radiation quality (Cu—K lines) thus generated then being utilized in X-ray diffraction.
    Type: Grant
    Filed: May 16, 2002
    Date of Patent: September 28, 2004
    Assignee: SII NanoTechnology Inc.
    Inventor: Masao Sato
  • Patent number: 6785360
    Abstract: A personnel x-ray inspection system includes an electron source that provides a pencil beam of electrons. An electromagnet assembly receives the pencil beam of electrons and directs the beam of electrons along a line to form a scanning redirected beam under the control of a scan command signal. The scanning redirected beam strikes a target and generates a cone of x-rays that moves along a target line as a result of the scanning redirected beam. A collimator receives the scanning cone of x-rays and generates a collimated traveling pencil beam, which is directed to a person under inspection. A moving platform translates the person under inspection through the collimated traveling pencil beam. A backscatter detector detects backscattered x-rays, and provides a backscattered detected signal indicative thereof. A system controller provides the scan command signal, and also receives and processes the backscattered detected signal.
    Type: Grant
    Filed: November 5, 2002
    Date of Patent: August 31, 2004
    Inventor: Martin Annis
  • Patent number: 6754305
    Abstract: The teachings of the subject invention lead to a new application of the XRR and RXRR systems. In particular, it has been recognized for the first time that such systems can be used to measure thickness of a variety of thin films (both dielectric, opaque and metal films) on patterned wafers where the feature size is smaller than the measurement spot. Broadly speaking, one aspect of the invention is the recognition that XRR and RXRR systems can be used not only on test wafers but on patterned wafers as well. The approach of the present invention to measuring the film thicknesses of patterned semiconductor wafers using XRR relies on the recognition that the measured X-ray reflection curve can be attributed primarily to the thicknesses of the layers rather than the structure of the pattern. In one aspect of the present invention, analysis of the patterned wafer may be reduced to the problem of analyzing an unpatterned wafer through a relatively simple transformation of the data.
    Type: Grant
    Filed: August 1, 2000
    Date of Patent: June 22, 2004
    Assignee: Therma-Wave, Inc.
    Inventors: Allan Rosencwaig, Jon Opsal
  • Patent number: 6710341
    Abstract: An electron microscope is offered which is fitted with an X-ray spectrometer having a compact optical system and high resolution. The spectrometer has a spectrometer chamber whose inside is evacuated by a vacuum pumping system. A diffraction grating having unequally spaced grooves is placed in the chamber. An X-ray detector is mounted to an end of the chamber. The X-ray spectrometer is mounted to the sidewall of the electron microscope via a gate valve. A specimen is irradiated with an electron beam and emits characteristic X-rays, which are made to impinge on the face of the grating at a large angle with respect to the normal line to the face. Diffracted X-rays from the grating reach the X-ray detector and are detected.
    Type: Grant
    Filed: February 26, 2002
    Date of Patent: March 23, 2004
    Assignee: JEOL Ltd.
    Inventor: Masami Terauchi
  • Patent number: 6693988
    Abstract: A baggage inspection device based on coherent x-ray scatter has an x-ray source on one side of the scanning area and detectors on the other side of the scanning area. The detectors measure the energy of the scattered x-ray quanta. A primary ray collimator is arranged between scanning area and x-ray source. A secondary ray collimator for scattered rays is arranged between scanning area and detectors. The detectors are positioned on a Z axis forming an axis of symmetry for the secondary ray collimator. A point 0 on the Z axis forms the origin of a Cartesian coordinate system. The primary ray collimator allows passage only of x-ray beams impinging on the point 0. The x-ray source has an extended anode with a focus position controlled electronically about the anode length. Primary ray collimator and x-ray source extend cylindrically symmetrically about the symmetry axis or parallel to the Y axis in the X-Y plane.
    Type: Grant
    Filed: March 14, 2002
    Date of Patent: February 17, 2004
    Assignee: Yxlon International X-Ray GmbH
    Inventor: Geoffrey Harding
  • Patent number: 6678349
    Abstract: This invention provides a measurement device that includes both an X-ray reflectometer and a thermal or plasma wave measurement module for determining the characteristics of a sample. Preferably, these two measurement modules are combined into a unitary apparatus and arranged to be able to take measurements at the same location on the wafer. A processor will receive data from both modules and combine that data to resolve ambiguities about the characteristics of the sample. The processor can be part of the device or separate therefrom as long as the measurement data is transferred to the processor.
    Type: Grant
    Filed: December 4, 2002
    Date of Patent: January 13, 2004
    Assignee: Therma-Wave, Inc.
    Inventors: Jon Opsal, Allan Rosencwaig
  • Patent number: 6665373
    Abstract: The present invention provides for an apparatus and method for use in a system with an x-ray source to produce a pencil beam of x-rays to scan an object and a first detector providing a value representative of the intensity of the x-rays scattered from the object to produce a scattered image having a second detector disposed opposite the first detector to provide a value representative of the intensity of the x-rays passing directly from the x-ray source to the second detector; a processor coupled to the system to receive information specifying a position of the pencil beam of x-rays, the processor also coupled to second detector to produce a shadow image formed of pixels indicating the intensity value measured by the second detector for a plurality of positions of the pencil beam of x-rays; and combining the scattered and shadow image to produce a composite image.
    Type: Grant
    Filed: March 12, 2002
    Date of Patent: December 16, 2003
    Assignee: Rapiscan Security Products (USA), Inc.
    Inventors: Andreas F. Kotowski, Steven W. Smith
  • Patent number: 6661867
    Abstract: X-ray radiation is transmitted through and scattered from an object under inspection to detect weapons, narcotics, explosives or other contraband. Relatively fast scintillators are employed for faster X-ray detection efficiency and significantly improved image resolution. Detector design is improved by the use of optically adiabatic scintillators. Switching between photon-counting and photon integration modes reduces noise and significantly increases overall image quality.
    Type: Grant
    Filed: October 19, 2001
    Date of Patent: December 9, 2003
    Assignee: Control Screening, LLC
    Inventors: Arthur W. Mario, Scott D. Kravis
  • Patent number: 6621888
    Abstract: A system and method for inspecting an enclosure with penetrating radiation. Radiation side-scattered from an object within the enclosure is detected, allowing the object to be located. If the object is deemed suspect, a volume element of the suspect object is further irradiated with penetrating radiation, and radiation coherently-scattered by the volume element is detected. The energy spectrum and angular distribution of the coherently-scattered radiation are used to characterize the volume element of the suspect object.
    Type: Grant
    Filed: July 8, 2002
    Date of Patent: September 16, 2003
    Assignee: American Science and Engineering, Inc.
    Inventors: Lee Grodzins, William Adams, Peter Rothschild
  • Publication number: 20030169843
    Abstract: A method and an apparatus for detecting unacceptable items in objects, such as in luggage, wherein a detector apparatus, functioning as a second detector stage is divided into a lower testing stage and a higher testing stage. In the lower testing stage, the coordinates of the object location are determined, and subsequently, a diffraction apparatus is moved to this location in the higher testing stage. In particular, X-ray diffraction can be employed to determine the explosive material of the item in the object. The diffraction apparatus comprises a collimator/detector arrangement, which is disposed to be adjusted height-wise and laterally in the higher testing stage, with a laterally-adjustable X-ray source, which is synchronized with the collimator/detector arrangement. The collimator/detector arrangement preferably has only one collimator and one detector. The collimator preferably has a conically-expanding ring slot, which simulates a predetermined angle &THgr;M of a scatter radiation.
    Type: Application
    Filed: May 21, 2001
    Publication date: September 11, 2003
    Inventors: Hermann Ries, Patricia Schall, Frank Cordes, Martin Hartick
  • Publication number: 20030169846
    Abstract: A thin film analysis system includes multi-technique analysis capability. Grazing incidence x-ray reflectometry (GXR) can be combined with x-ray fluorescence (XRF) using wavelength-dispersive x-ray spectrometry (WDX) detectors to obtain accurate thickness measurements with GXR and high-resolution composition measurements with XRF using WDX detectors. A single x-ray beam can simultaneously provide the reflected x-rays for GXR and excite the thin film to generate characteristic x-rays for XRF. XRF can be combined with electron microprobe analysis (EMP), enabling XRF for thicker films while allowing the use of the faster EMP for thinner films. The same x-ray detector(s) can be used for both XRF and EMP to minimize component count. EMP can be combined with GXR to obtain rapid composition analysis and accurate thickness measurements, with the two techniques performed simultaneously to maximize throughput.
    Type: Application
    Filed: March 7, 2002
    Publication date: September 11, 2003
    Inventors: Gary R. Janik, Jeffrey Moore
  • Patent number: 6556653
    Abstract: The system for inspecting an object comprises a structure having a first, second and third orthogonal axes, and a source of x-ray pencil beam mounted thereto along the first axis. An incident radiation detector is mounted to the structure perpendicularly to the first axis. A first and second linear arrays of scattered radiation detectors are mounted to the structure perpendicularly to the second and third axes respectively. The source of x-ray pencil beam, the incident radiation detector and the first and second linear arrays of scattered radiation detectors are spaced apart and define therebetween an inspection zone. In use, an object to be inspected is moved inside the inspection zone relative to the x-ray pencil beam. The object is inspected voxel by voxel and the radiation measurements taken at each voxel are indicative of incident radiation attenuation, scattered radiation attenuation and electron density of that voxel.
    Type: Grant
    Filed: May 21, 2001
    Date of Patent: April 29, 2003
    Assignee: University of New Brunswick
    Inventor: Esam Hussein
  • Patent number: 6532276
    Abstract: A method for determining the material of a detected item in objects, especially explosives in luggage, using X-ray diffraction. In this method, wherein scatter radiation deflected at the crystal-lattice structure of the material is measured and compared to characteristic energy spectra or diffraction spectra of various explosives, the absorption by the material influences the X-ray diffraction spectrum, so that information is missing, and inaccurate conclusions may be drawn regarding the material. To improve this method, the primary beam of an X-ray source is used for measuring the absorption. The beam passes through the material, and, from the absorption, an average atomic number of the material is determined, and this additional information is used for the identification of material known by comparing the recorded spectra with diffraction spectra.
    Type: Grant
    Filed: January 17, 2002
    Date of Patent: March 11, 2003
    Assignee: Heimann Systems GmbH
    Inventors: Martin Hartick, Frank Cordes
  • Patent number: 6496562
    Abstract: The invention relates to a method for classifying and identifying by means of energy dispersion X-ray fluorescence analysis chemical substances whose X-ray fluorescence lines cannot be detected and which therefore cannot be classified by energy dispersion X-ray fluorescence analysis alone. Said method is characterized in that the sample to be analyzed is analyzed in its original packaging or natural state without prior processing in a sample vessel. According to the method the sample is: a) positioned in front of the measuring aperture in a sample chamber of an X-ray fluorescence apparatus; b) measured; and c) classified and identified by application of multivariate, statistical techniques to the measurement signals obtained, i.e., to the Compton and Rayleigh scattering.
    Type: Grant
    Filed: July 20, 2001
    Date of Patent: December 17, 2002
    Assignee: Merck Patentgesellschaft mit Beschrankter Haftung
    Inventors: Alexander Henrich, Hans-Helmut Itzel, Peter Hoffmann, Hugo Ortner
  • Patent number: 6483891
    Abstract: The invention relates to the mammography devices based on registration of a reduced-angle coherently scattered radiation when an object is rayed by a penetrating radiation. Registration of the radiation coherently scattered by an object allows to produce an image of an object in the form of distribution of its structural characteristics. The device comprises a system for forming a directed on a tested object, narrow small-divergence beams, or a beam, having the same characteristics, and a system for extracting the radiation that is coherently scattered in small angles by an object. The invention proposes versions of a device that also provide for registration of the radiation passed through an object to make allowance for its thickness so that to obviate the necessity to compress the breast. The device allows to carry out relative movements of an object and system of irradiation-registration, as well as irradiate an object at different angles and by a number of radiation sources simultaneously.
    Type: Grant
    Filed: March 16, 2001
    Date of Patent: November 19, 2002
    Assignee: Quanta Vision, Inc.
    Inventors: Pavel Ivanovich Lazarev, Oleg Valentinovich Komardin
  • Patent number: 6453007
    Abstract: An inspection system is for inspecting an object with penetrating radiation. A source of penetrating radiation provides a beam of radiation. The beam alternates between a first beam shape and a second beam shape, the first and second beam shapes being coplanar. A first detector arrangement is for detecting penetrating radiation from a portion of the beam transmitted through the object and generating a transmitted radiation signal. A second detector arrangement is for detecting penetrating radiation from a portion of the beam scattered by the object and generating a scattered radiation signal. A processor determines at least one characteristic of the object based at least on the transmitted and scattered radiation signals.
    Type: Grant
    Filed: February 16, 2001
    Date of Patent: September 17, 2002
    Assignee: American Science and Engineering, Inc.
    Inventors: William L. Adams, Lee Grodzins
  • Patent number: 6434217
    Abstract: A system and method are presented for determining the thickness and elemental composition of a layer within a measurement sample in an easy and inexpensive manner. An embodiment of the method includes impinging an incident x-ray beam into an exposed surface of a measurement sample containing one or more layers. The incident x-ray beam passes through the sample and may refract depending on the composition of the layers to produce a transmitted x-ray beam. The intensity and the angle of refraction of the transmitted x-ray beam may then be measured. These measurements may be compared to the results of a calibration sample that has been prepared with a known thickness and composition relative to the layer characteristics of the sample. The intensity of the transmitted x-ray beam is a function of the thickness of the layer; while the angle of refraction is a function of the elemental composition of the layer.
    Type: Grant
    Filed: October 10, 2000
    Date of Patent: August 13, 2002
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Bruce L. Pickelsimer, Tim Z. Hossain
  • Patent number: 6381303
    Abstract: Apparatus for X-ray microanalysis of a sample includes an X-ray source, which irradiates a spot having a dimension less than 500 &mgr;m on a surface of the sample. A first X-ray detector captures fluorescent X-rays emitted from the sample, responsive to the irradiation, at a high angle relative to the surface of the sample. A second X-ray detector captures X-rays from the spot at a grazing angle relative to the surface of the sample. Processing circuitry receives respective signals from the first and second X-ray detectors responsive to the X-rays captured thereby, and analyzes the signals in combination to determine a property of a surface layer of the sample within the area of the spot.
    Type: Grant
    Filed: September 29, 1999
    Date of Patent: April 30, 2002
    Assignee: Jordan Valley Applied Radiation Ltd.
    Inventors: Long Vu, Boris Yokhin, Isaac Mazor, Amos Gvirtzman
  • Publication number: 20020044628
    Abstract: The present invention pertains to a non-rotating method for non-intrusively determining the density of a point embedded within an object, without necessarily obtaining a full image for the entire object. The method consists of passing a X-ray beam through a point within an object and measuring Compton scatterings from the point from a first and second energy bands within the energy spectrum of the X-ray beam, along a first and second angles from the X-ray beam. Using the kinetics of Compton scattering at a specific angle, four equations are formulated with four measurements and four unknowns; the radiation attenuation factor along the object between the X-ray source and the point, the radiation attenuation factor between the point and each of the detectors and the density of the object at the point. The four equations are solved simultaneously to determined the four unknowns. There is also provided a matrix inversion process to facilitate the solution of the equations.
    Type: Application
    Filed: August 22, 2001
    Publication date: April 18, 2002
    Inventors: Esam Hussein, Balza Achmad
  • Publication number: 20010033636
    Abstract: A method for determining the material of a detected item in objects, especially explosives in luggage, using X-ray diffraction. In this method, wherein scatter radiation deflected at the crystal source of the material is measured and compared to characteristic energy spectra or diffraction spectra of the various explosives, the absorption by the material influences the X-ray diffraction spectrum, so that information is missing, and inaccurate conclusions may be drawn regarding the material. To improve this method, the primary beam of an X-ray source is used for measuring the absorption. The beam passes through the material, and, from the absorption, an average atomic number of the material is determined, and this information additionally is used in the comparison to known diffraction spectra.
    Type: Application
    Filed: January 16, 2001
    Publication date: October 25, 2001
    Inventors: Martin Hartick, Frank Cordes
  • Publication number: 20010016028
    Abstract: An inspection system is for inspecting an object with penetrating radiation. A source of penetrating radiation provides a beam of radiation. The beam alternates between a first beam shape and a second beam shape, the first and second beam shapes being coplanar. A first detector arrangement is for detecting penetrating radiation from a portion of the beam transmitted through the object and generating a transmitted radiation signal. A second detector arrangement is for detecting penetrating radiation from a portion of the beam scattered by the object and generating a scattered radiation signal. A processor determines at least one characteristic of the object based at least on the transmitted and scattered radiation signals.
    Type: Application
    Filed: February 16, 2001
    Publication date: August 23, 2001
    Inventors: William L. Adams, Lee Grodzins
  • Patent number: 6192104
    Abstract: A system and method for inspecting an object, where both a fan beam and a pencil beam of penetrating radiation are used to illuminating the object concurrently. Both beams may be derived from a single source of penetrating radiation. The pencil beam is noncoplanar with the fan beam and may be scanned with respect to the object. Radiation scattered from the pencil beam within the object is detected, and the scatter signal thus generated is used in conjunction with a transmission signal which characterizes attenuation of the fan beam by the object.
    Type: Grant
    Filed: November 24, 1999
    Date of Patent: February 20, 2001
    Assignee: American Science and Engineering, Inc.
    Inventors: William Adams, Lee Grodzins
  • Patent number: 6151381
    Abstract: An inspection system for inspecting an enclosure and its contents using temporally gated sources of penetrating radiation. A first source produces an intermittent first beam having a duration of inactivity while a second sources produces a second beam, which may have an energy spectrum differing from that of the first beam, during the inactivity of the first beam. One detector generates a transmission signal based on penetrating radiation transmitted through the enclosure while a scatter detector generates a scatter signal based on penetrating radiation scattered by the contents of the enclosure. The scatter detector may be gated for non-detection during the pulsing of the transmission beam. A processor derives properties of the contents of the enclosure on the basis of the transmission signal and the scatter signal.
    Type: Grant
    Filed: January 27, 1999
    Date of Patent: November 21, 2000
    Assignee: American Science and Engineering, Inc.
    Inventors: Lee Grodzins, Roderick D. Swift
  • Patent number: 6121623
    Abstract: A parallel radiation detector includes a plurality of radiation detecting elements, a plurality of preamplifiers for converting signals from the radiation detecting elements into voltage signals, a signal processing device for processing the voltage signals, a main control device for controlling the signal processing device to analyze the voltage signals, a display device for displaying analyzed results from the signal processing device, a storage device for storing signals, a plurality of a reset circuits corresponding to the plurality of preamplifiers, each reset circuit for generating a reset signal for returning the corresponding one of the preamplifiers to an initial state thereof when the voltage signal from the corresponding one of the preamplifiers reaches a predetermined voltage, and an inhibitor circuit for generating an inhibit signal for inhibiting the signal processing device from receiving and processing the voltage signals from the preamplifiers temporarily, based on the reset signal.
    Type: Grant
    Filed: October 2, 1998
    Date of Patent: September 19, 2000
    Assignee: Hitachi, Ltd.
    Inventors: Isao Ochiai, Kimio Kanda, Takehiro Ohkawa
  • Patent number: 6078642
    Abstract: A method and apparatus for detecting and classifying objects in computed tomography (CT) data are disclosed. A connectivity process can be applied to voxels in the data to combine them into objects. A dilation function can then be performed on the eroded object to replace surface voxels removed by erosion. A corrected mass using the mean eroded density of the object can be computed and compared to mass thresholds to classify the object as to whether it poses a threat. Multiple mass thresholds can be used, each of which is associated with a particular density range based on the density of an expected threat object.
    Type: Grant
    Filed: February 11, 1998
    Date of Patent: June 20, 2000
    Assignee: Analogice Corporation
    Inventors: Sergey Simanovsky, Ibrahim M. Bechwati, Muzaffer Hiraoglu, Carl R. Crawford
  • Patent number: 5974111
    Abstract: An X-ray inspection device (10) for detecting a specific material of interest in items of various sizes and shapes (24A, 24B, 24C) includes an X-ray source system located at an inspection region and constructed to expose the examined item to at least one beam of X-ray radiation, and one or more X-ray detection systems (60, 80, 100). The X-ray inspection device also includes one or more dimension detectors (120) constructed to measure a selected dimension of the examined item, an interface system connected to receive X-ray data and dimension data, and a computer programmed to utilize the data for recognition of the specific material of interest and to indicate its presence in the examined item. Each detection system includes one or more arrays of X-ray detectors arranged in a linear, circular or semi-spherical geometry.
    Type: Grant
    Filed: December 5, 1997
    Date of Patent: October 26, 1999
    Assignee: Vivid Technologies, Inc.
    Inventors: Kristoph D. Krug, William F. Aitkenhead, Richard F. Eilbert, Jeffrey H. Stillson, Jay A. Stein
  • Patent number: 5970116
    Abstract: A method of non-destructively, on-line determining the density profile in a plate-shaped material with a density which varies discretely or continuously over the plate thickness, while the density at a specific depth of the plate is assumed to be constant, such as for instance plates based on wood, by means of X-rays or gamma rays from a source placed on one side of the plate. Two detectors are placed on the other side of the plate, one detector measuring in the emitting direction of the source and the other detector measuring in the other direction and being movable relative to the plate. The counting number of the second detector is adjusted by means of the counting number of the first detector. By a suitable choice of emitting direction and detecting direction it is possible to provide a measurement of the density in a specific measuring volume merely by dividing the counting number of the second detector by the counting number of the first detector.
    Type: Grant
    Filed: December 19, 1996
    Date of Patent: October 19, 1999
    Assignee: Wesser & Dueholm
    Inventors: Sten Dueholm, Steen Teller
  • Patent number: 5949847
    Abstract: An X-ray analyzing apparatus includes an X-ray tube, a monochromator crystal for making an X-ray monochromic, a slit, a moving table for supporting a product to be tested such as a semiconductor wafer, a detector for detecting the intensity of the X-ray beam, a table controller for setting a three-dimensional position and an angle of the moving table, and another detector for detecting scattered X-rays or fluorescent X-rays from the test product. A slit is provided so as to be vertically movable between the test product and the detector and to define a pass position of the X-ray beam which enters the detector. Thus, an X-ray irradiation angle to the test product can be set quickly and at high precision.
    Type: Grant
    Filed: October 23, 1997
    Date of Patent: September 7, 1999
    Assignee: Technos Institute Co., Ltd.
    Inventors: Shinichi Terada, Mikihisa Masaki
  • Patent number: 5936255
    Abstract: An X-ray, neutron or electron diffraction method, which is devoid of the defects of conventional diffraction apparatus using an imaging plate, which can analyzing a sample, in a non-destructive mode without contact and with a good S/N ratio, even when the sample significantly generates fluorescence or scattered X-rays.
    Type: Grant
    Filed: July 9, 1997
    Date of Patent: August 10, 1999
    Assignees: Sharp Kabushiki Kaisha, International Superconductivity Technology Center
    Inventors: Kenji Nakanishi, Akira Tsukamoto, Keiichi Tanabe
  • Patent number: 5917880
    Abstract: An apparatus particularly suited to the inspection of carp in trucks, shipping containers and the like uses a beam of high energy x-rays, e.g., in the order of 8 Mev. A first detector is aligned with the beam to detect x-rays that have passed directly through the cargo. A second detector, located adjacent the first detector, receives x-rays that are inelastically forward scattered from the cargo at an angle in the range of 4.degree. to 10.degree.. Comparison of the relative amounts of x-ray received at each of these detectors with values for known materials identifies the nature of the cargo. The beam is fan-shaped and preferably vertical, and the detectors are preferably linear arrays of detector elements. Collimators define the field of view of the two detector arrays so that they both include a common spatial location within the cargo.
    Type: Grant
    Filed: May 29, 1997
    Date of Patent: June 29, 1999
    Assignee: EG&G Astrophysics
    Inventor: Paul J. Bjorkholm
  • Patent number: 5642393
    Abstract: An inspection system for detecting a specific material of interest in items of baggage or packages includes a multi-view X-ray inspection probe and one or more material sensitive probes. The multi-view X-ray inspection probe employs X-ray radiation transmitted through or scattered from an examined item to identify a suspicious region inside the item. An interface is used to receive from said X-ray inspection probe X-ray data providing spatial information about the suspicious region and to provide this information to a selected material sensitive probe. The material sensitive probe then acquires material specific information about the previously-identified suspicious region and provides it to a computer. The computer uses a high level detection algorithm to identify presence of the specific material in the suspicious region. The material sensitive probe may be a directional probe such as a coherent scatter probe, or a non-directional probe such as a Compton scatter probe or an NQR probe.
    Type: Grant
    Filed: September 26, 1995
    Date of Patent: June 24, 1997
    Assignee: Vivid Technologies, Inc.
    Inventors: Kristoph D. Krug, Michael Ellenbogen, Paul J. Hurd, John O. Tortora
  • Patent number: 5640437
    Abstract: In a goniometer having several axes around which a crystal specimen to be examined can be rotated, a radiation source, a detector for Bragg reflections and a detector for fluorescence radiation, with the detector making it possible to measure lattice geometry and chemical composition at the same time. The detector for the fluorescence radiation is secured in a holder, and is oriented with its surface parallel to the specimen and is pivotably secured together with the specimen to the specimen table. As such, reflexes can be simultaneously observed using the Bragg detector which is secured in a pivotable arm, and the fluorescence radiation using the fluorescence detector.
    Type: Grant
    Filed: August 18, 1995
    Date of Patent: June 17, 1997
    Assignee: Daimler-Benz Aktiengesellschaft
    Inventor: Hans-Wolfgang Grueninger
  • Patent number: 5600700
    Abstract: An X-ray inspection device for detecting a specific material of interest (typically contraband, for example, weapons, drugs, money, explosives) in items of various sizes and shapes includes an X-ray source system located at an inspection region and constructed to expose the examined item to at least one beam of X-ray radiation, one or more x-ray detection systems located at the inspection region and constructed to detect x-ray radiation modified by the examined item. The X-ray inspection device also includes one or more dimension detectors constructed to measure a selected dimension of the examined item, an interface system connected to receive X-ray data and dimension data, and a computer programmed to utilize the data for recognition of the specific material of interest and to indicate its presence in the examined item. The X-ray detection systems detect transmitted and/or scattered X-ray radiation utilizing several different geometries.
    Type: Grant
    Filed: September 25, 1995
    Date of Patent: February 4, 1997
    Assignee: Vivid Technologies, Inc.
    Inventors: Kristoph D. Krug, William F. Aitkenhead, Richard F. Eilbert, Jeffrey H. Stillson, Jay A. Stein
  • Patent number: 5588032
    Abstract: An apparatus and method for rapid real time imaging with wavefield energy by inverse scattering using a C.P.U programmed to process data derived from wavefield energy that has been transmitted and scattered by an object so as to reconstruct a wavefield image of the object. Electronic signals are propagated and are transduced into wavefield energy waves which in turn are propagated toward the object. Detector means detect the wavefield energy waves scattered by the object. The detected wavefield energy waves are then electronically processed and input into a high-speed digital computer which may comprise a C.P.U. and/or a C.P.U in combination with an array or parallel processor.
    Type: Grant
    Filed: October 14, 1992
    Date of Patent: December 24, 1996
    Inventors: Steven A. Johnson, James W. Wiskin, David T. Borup, Douglas A. Christensen, Frank Stenger
  • Patent number: 5579362
    Abstract: An apparatus for and a method of measuring at least one painted layer formed on a sample to be analyzed, which sample may be, for example, a galvanized steel including a substrate having the painted layer formed thereon with or without an intervention of a primer coated layer. In the practice of the invention, radiation is directed onto a surface of the painted layer so as to excite the sample. The intensity of resultant Compton scattering rays, the intensity of resultant fluorescent X-rays emitted from zinc contained in a plated zinc and the intensity of resultant fluorescent X-rays emitted from strontium contained in the primer coated layer are measured, and also the absorption of the fluorescent X-rays are taken into consideration, to provide a basis for calculation of the amount of paint coating forming the painted layer. In this way, the amount of primer and paint material both applied to the galvanized steel can be easily measured on a non-destructive basis.
    Type: Grant
    Filed: December 22, 1995
    Date of Patent: November 26, 1996
    Assignees: Rigaku Industrial Corp., Igeta Steel Sheet Co., Ltd., Kawatetsu Galvanizing Co., Ltd., Taiyo Steel Co., Ltd., Yodogawa Steel Works, Ltd.
    Inventors: Naoki Matsuura, Seiya Shibata, Tatsuo Fukuzaki, Akira Tanaka, Shigeo Fukuda, Hiroki Nishiyama, Mitsuru Tanaka
  • Patent number: 5491738
    Abstract: An x-ray diffraction apparatus for use in analyzing the x-ray diffraction pattern of a sample. The apparatus includes a beam source for generating a collimated x-ray beam having one or more discrete x-ray energies, a holder for holding the sample to be analyzed in the path of the beam, and a charge-coupled device having an array of pixels for detecting, in one or more selected photon energy ranges, x-ray diffraction photons produced by irradiating such a sample with said beam. The CCD is coupled to an output unit which receives input information relating to the energies of photons striking each pixel in the CCD, and constructs the diffraction pattern of photons within a selected energy range striking the CCD.
    Type: Grant
    Filed: March 15, 1993
    Date of Patent: February 13, 1996
    Assignee: The United States of America as represented by the Administrator of the National Aeronautics and Space Administration
    Inventors: David F. Blake, Charles Bryson, Friedemann Freund
  • Patent number: 5457726
    Abstract: A sample is mounted on a sample base. A detector is provided on the sample base, and detects a fluorescent X-ray generated from the sample, and a scattered X-ray of an incident X-ray when the sample is irradiated with the incident X-ray. A controller controls the sample base and an operation of the detector. The controller sequentially changes an incident angle of the incident X-ray to the sample so as to detect the fluorescent X-ray generated from the sample at each incident angle, and the scattered X-ray of the incident X-ray. Next, the controller obtains the relationship between the incident angle of the incident X-ray to the sample and a standard value obtained by standardizing intensity of the fluorescent X-ray by intensity of the scattered X-ray. Then, the controller corrects the incident angle of the incident X-ray to the sample based on the obtained relationship.
    Type: Grant
    Filed: October 6, 1994
    Date of Patent: October 10, 1995
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Kunihiro Miyazaki
  • Patent number: 5428657
    Abstract: The invention is a method and apparatus for identifying and pinpointing the location of unwanted pieces of material or defects in, for example, de-boned poultry pieces. The poultry pieces to be inspected are carried on a conveyor and passed under an impinging collimated X-ray beam. The Rayleigh scattering resulting is detected and measured, as is the Compton back scattering and the data is processed in a processing unit to determine the location and type of foreign matter involved. The ratio of the Rayleigh and Compton scattering is also determined and used to verify the identity of the foreign material. Transmitted X-rays, i.e., radioscopy, are used to normalize the data, and to aid in a pinpointing of the location of the unwanted material.
    Type: Grant
    Filed: March 22, 1994
    Date of Patent: June 27, 1995
    Assignee: Georgia Tech Research Corporation
    Inventors: Chris D. Papanicolopoulos, J. Craig Wyvill, Wayne D. R. Daley, William R. Owens
  • Patent number: 5418830
    Abstract: Radiometric gage for contactless measurement of the surface density or the thickness of a flat product, includes:an X-radiation emitter, whose tube, is directed toward the flat productan X-radiation receiver, whose detector is disposed in order to receive X-radiation scattered or transmitted in attenuated form through said flat product, said receiver delivering a measurement signala member for processing the measurement signal, in order to obtain information representing the surface density or the thickness of the flat productThe anticathode of the tube is made of a material with atomic number as high as possible, preferably greater than 70, which is a good conductor of heat and has a high melting point.
    Type: Grant
    Filed: May 7, 1993
    Date of Patent: May 23, 1995
    Assignee: Scan-Tech S.A.
    Inventor: Jean-Jacques Florent
  • Patent number: 5400380
    Abstract: A method of calculating the thickness of a sheet material comprising directing a beam of photons against the sheet material from a photon source (1) located on one side of said sheet material (7), detecting reflected radiation from said sheet material in a first detector (2) located on the same side of said sheet material and detecting transmitted radiation in a second detector (5) located on the opposite side of the said sheet material, combining the signals of transmitted and reflected photon beams, measuring and processing the data from both detectors for a number of calibrating samples, obtaining the thickness as a function of the detected data and applying this function to determine the unknown thickness of a sample. Apparatus for carrying out the method of the invention is also disclosed.
    Type: Grant
    Filed: March 5, 1993
    Date of Patent: March 21, 1995
    Assignee: Data Measurement Corporation
    Inventors: Dominque Gignoux, Roland M. Gouel
  • Patent number: 5313511
    Abstract: An imaging device for increasing the ability to recognize, in x-ray produced images, materials of low atomic number. A flying spot scanner illuminates an object to be imaged in a raster pattern; the flying spot repeatedly sweeps a line in space, and the object to be imaged is moved so that the illuminating beam intersects the object. At least a pair of x-ray detectors are employed, each pair associated with signal processing apparatus and a display.
    Type: Grant
    Filed: December 18, 1991
    Date of Patent: May 17, 1994
    Assignee: American Science and Engineering, Inc.
    Inventors: Martin Annis, Paul J. Bjorkholm
  • Patent number: 5280513
    Abstract: A microbalance and method for measuring the total mass of small quantities of material (mass ranging from about 10 nanograms to about 0.1 gram) using Compton and Rayleigh scattered radiation provides excellent mass measurements for these samples. The apparatus includes a standard radiation generation and detection assembly, including a substantially evacuated chamber through which incident radiation travels, and commercially available radiation generators, power sources, and detectors, having enough spectral resolution to identify the scattered radiation of interest.
    Type: Grant
    Filed: November 12, 1991
    Date of Patent: January 18, 1994
    Assignee: Advanced Analytical Products and Services
    Inventor: Carl M. Meltzer
  • Patent number: 5260982
    Abstract: A flying-spot pencil beam generating unit is arranged under a conveyor. A backscatter detector is located between an upper belt and a lower belt of the conveyor. Thus, this apparatus is set up to be perpendicular. A pencil beam is irradiated upward and scans an object on the belt of the conveyor by the flying-spot pencil beam generating unit, as the conveyor carries the object to be inspected. The backscatter detector gathers Compton scatter X-rays transmitted through the upper belt, as they reflect back from the object. A CPU produces a backscatter image based on the detection signal output from the backscatter detector. The backscatter image is shown on a display unit to enable detection of low-Z materials, such as plastic explosives and narcotics. In addition to the backscatter imaging, the unit may retain use of a transmitted image to thus reliably detect metal-based weapons such as guns.
    Type: Grant
    Filed: May 11, 1992
    Date of Patent: November 9, 1993
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Masashi Fujii, Kazunori Masanobu, Teruo Yamamoto