Abstract: An inspection apparatus for inspecting an inspection target object, includes an X-ray generation tube having a target including an X ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to an inspection target surface of the inspection target object, an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X ray generation portion and totally reflected by the inspection target surface, and an adjustment mechanism configured to adjust a relative position between the inspection target surface and the X-ray detector.

Abstract: The system for in-situ real-time measurements of microstructure properties of 3D-printing objects during 3-D printing processes. An intensive parallel X-ray beam (with an adjustable beam size) impinges on a printing object and is diffracted on a crystal lattice of the printing material. The diffracted radiation impinges on a reflector formed with an array of reflector crystals mounted on an arcuated substrate. The diffracted beams reflected from the reflector crystals correspond to the diffraction intensity peaks produced by interaction of the crystal lattice of the printing material with the impinging X-ray beam. The intensities of the diffraction peaks are observed by detectors which produce corresponding output signals, which are processed to provide critical information on the crystal phase composition, which is closely related to the defects and performance of the printing objects.

Abstract: An optical measurement device may include a light source; an emission optic configured to direct a first portion of light generated by the light source to a measurement target; a collection optic configured to receive light from the measurement target; an optical conduit configured to direct a second portion of light generated by the light source to a spectral reference; the spectral reference; a sensor; and a filter. A first portion of the filter may be provided between the collection optic and a first portion of the sensor. A second portion of the filter may be provided between the spectral reference and a second portion of the sensor.

Abstract: Disclosed herein is an x-ray interferometer for x-ray phase contrast imaging including an x-ray source, an x-ray source grating, two x-ray phase gratings, an x-ray analyzer grating and an x-ray detector. An alternative interferometer includes a periodically structured x-ray source, two x-ray phase gratings, an x-ray analyzer grating and an x-ray detector. The phase gratings are placed much closer to the x-ray detector than to the x-ray source and the image object is positioned upstream and close to the phase gratings to achieve high sensitivity and large field-of-view simultaneously.

Abstract: The present invention provides a novel method for identifying a molecular structure by a single crystal X-ray analysis. A single crystal that gives an X-ray diffraction spectrum sufficient for determining a structure of a molecule can be efficiently obtained by including a test molecule in a metal complex, and then crystallizing the test-molecule included in the metal complex. By analyzing this single crystal by an X-ray analysis, it is possible to determine a structure of the test molecule without obtaining a single crystal of the test molecule. With the novel method according to the present invention, the structure of a test molecule in a trace amount of a sample can also be determined.

Abstract: Disclosed herein are variations of megavoltage (MV) detectors that may be used for acquiring high resolution dynamic images and dose measurements in patients. One variation of a MV detector comprises a scintillating optical fiber plate, a photodiode array configured to receive light data from the optical fibers, and readout electronics. In some variations, the scintillating optical fiber plate comprises one or more fibers that are focused to the radiation source. The diameters of the fibers may be smaller than the pixels of the photodiode array. In some variations, the fiber diameter is on the order of about 2 to about 100 times smaller than the width of a photodiode array pixel, e.g., about 20 times smaller. Also disclosed herein are methods of manufacturing a focused scintillating fiber optic plate.

Abstract: A sample inspection system and a corresponding method for inspecting a sample is provided. The sample inspection system includes a beam former, a beam modulator an energy resolving detector and a collimator. The beam former is adapted to receive an electromagnetic radiation from an electromagnetic source to generate a primary beam of electromagnetic radiation. The beam modulator is provided at a distance from the beam former to define a sample chamber. The collimator is provided between the beam modulator and the energy resolving detector. The collimator has a plurality of channels adapted to receive diffracted or scattered radiation. Upon incidence of the primary beam onto the beam modulator, the beam modulator provides a reference beam of diffracted or scattered radiation. The energy resolving detector is arranged to detect the reference beam.

Abstract: An apparatus for inspecting a semiconductor device according to an embodiment includes an X-ray irradiation unit configured to make monochromatic X-rays obliquely incident on the semiconductor device, which is an object at a predetermined angle of incidence, a detection unit configured to detect observed X-rays observed from the object using a plurality of two-dimensionally disposed photodetection elements, an analysis apparatus configured to generate X-ray diffraction images obtained by photoelectrically converting the observed X-rays, and a control unit configured to change an angle of incidence and a detection angle of the X-rays, in which the analysis apparatus acquires an X-ray diffraction image every time the angle of incidence is changed, extracts a peak X-ray diffraction image, X-ray intensity of which becomes maximum for each of pixels and compares the peak X-ray diffraction image among the pixels to thereby estimate a stress distribution of the object.

Abstract: An apparatus for measuring complex electrical admittance and/or complex electrical impedance in animal or human patients includes a first electrode and at least a second electrode which are adapted to be disposed in the patient. The apparatus includes a housing adapted to be disposed in the patient. The housing has disposed in it a stimulator in electrical communication with at least the first electrode to stimulate the first electrode with either current or voltage, a sensor in electrical communication with at least the second electrode to sense a response from the second electrode based on the stimulation of the first electrode, and a signal processor in electrical communication with the sensor to determine the complex electrical admittance or impedance of the patient.

Abstract: This disclosure relates to an apparatus and methods for applying X-ray reflectometry (XRR) in characterizing three dimensional nanostructures supported on a flat substrate with a miniscule sampling area and a thickness in nanometers. In particular, this disclosure is targeted for addressing the difficulties encountered when XRR is applied to samples with intricate nanostructures along all three directions, e.g. arrays of nanostructured poles or shafts. Convergent X-ray with long wavelength, greater than that from a copper anode of 0.154 nm and less than twice of the characteristic dimensions along the film thickness direction, is preferably used with appropriate collimations on both incident and detection arms to enable the XRR for measurements of samples with limited sample area and scattering volumes.

Abstract: A non-transitory computer readable medium on which is stored machine-readable instructions that, when executed by at least one processor, cause the processor to determine the location in 3D space of an object of interest within the interior region of an opaque container. Hence, a user or operator is allowed to construct a three-dimensional representation of the interior region of the opaque container so as to allow viewing of objects, components and substances within the interior region. The users or operators now have the opportunity to isolate a particular object of interest within the interior region that may be a threat, such as an explosive device or other energetic component. A disrupter device is aimed at the three-dimensional location and thereafter, the disrupter device fires a projectile or substance at the object of interest in order to disable or destroy the object of interest.

Abstract: A two-dimensional X-ray diffractometer uses an X-ray source that emits a divergent beam toward a sample under test. The divergent beam has a substantially fixed width in a first direction perpendicular to its propagation direction, and a thickness in a second direction perpendicular to the propagation direction that increases proportionally to a distance from the source. An aperture may be used to block a portion of the beam in the second direction, and the sample is positioned so that the beam illuminates a two-dimensional area of the sample surface. The detector detects an X-ray signal diffracted from the sample across a two-dimensional detection area, and may use a one-dimensional detector array that collects diffracted X-ray signal at a number of different positions. The source, detector and sample may be mounted to a goniometer to maintain them in a desired relative orientation.

Abstract: Provided are an operation guide system, an operation guide method, and an operation guide program, which are capable of allowing a user to easily understand measurement of an X-ray optical system to be selected. A quantitative phase analysis device includes qualitative phase analysis result acquisition means for acquiring information on a plurality of crystalline phases contained in a sample, and weight ratio calculation means for calculating a weight ratio of the plurality of crystalline phases based on a sum of diffracted intensities corrected with respect to a Lorentz-polarization factor, a chemical formula weight, and a sum of squares of numbers of electrons belonging to each of atoms contained in a chemical formula unit, in the plurality of crystalline phases.

Abstract: A wavelength dispersive X-ray fluorescence spectrometer includes a single one-dimensional detector (10) having detection elements (7) arranged linearly, and includes a detector position change mechanism (11) for setting a position of the one-dimensional detector (10) to either a parallel position at which an arrangement direction of the detection elements (7) is parallel to a spectral angle direction of a spectroscopic device (6) or an intersection position at which the arrangement direction intersects the spectral angle direction. At the parallel position, a receiving surface of the one-dimensional detector (10) is located at a focal point of focused secondary X-rays (42). At the intersection position, a receiving slit (9) is disposed at the focal point of the focused secondary X-rays (42), and the receiving surface is located at a traveling direction side of the focused secondary X-rays (42) farther from the spectroscopic device (6) than the receiving slit (9).

Abstract: In a method of analyzing solid form properties of a substance, which including the step of solidifying the substance, the solidified substance is obtained in one of a plurality of wells of a multi-well plate. In the multi-well plate the at least one of the plurality of wells has a bottom made of a thermoplastic polyimide. The method further includes analyzing the solidified substance in the well of the multi-well plate by X-ray diffraction. Thereby, the analysis includes providing X-ray through the solidified substance and a bottom of the well and evaluating the X-ray which passed the solidified substance and the bottom of the well. Such method and multi-well plate provide a durable and cost efficient system allowing a high quality analysis of solid form properties of the substance and an efficient and safe processing of the substance.

Abstract: A method that measures stress of a test subject including a metal includes: detecting, using a two-dimensional detector, a diffraction ring of diffracted X-rays which is formed by causing X-rays from an irradiation unit to be incident on the test subject and to be diffracted by the test subject; and calculating the stress of the test subject based on detection results during the detection step. Therein, the detection step involves causing X-rays from the irradiation unit to be incident on each of a plurality of sites on the test subject with the irradiation unit angled relative to the test subject in a manner such that the angle of incidence on the test subject is within the range of 5-20°, inclusive, and detecting, using a two-dimensional detector, the diffraction ring formed by the diffraction of the X-rays by the test subject.

Abstract: In an X-ray inspection device according to the present invention, an X-ray irradiation unit 40 includes a first X-ray optical element 42 for focusing characteristic X-rays in a vertical direction, and a second X-ray optical element 43 for focusing the characteristic X-rays in a horizontal direction. The first X-ray optical element 42 is constituted by a crystal material having high crystallinity. The second X-ray optical element includes a multilayer mirror.

Abstract: Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) are disclosed. For example, a method of measuring a sample by X-ray reflectance scatterometry involves impinging an incident X-ray beam on a sample having a periodic structure to generate a scattered X-ray beam, the incident X-ray beam simultaneously providing a plurality of incident angles and a plurality of azimuthal angles. The method also involves collecting at least a portion of the scattered X-ray beam.

Abstract: To provide an X-ray analysis device and a method for optical axis alignment thereof by which measurement time is shortened and measurement cost may be reduced without optical axis alignment at each measurement using an analyzer. The X-ray analysis device includes a sample stage for supporting a sample, an N-dimensional detector, and an analyzer including analyzer crystals. A detection surface of the N-dimensional detector has first and second detection areas, a plurality of optical paths includes a first optical path that directly reaches the first detection area and a second optical path that reaches via the analyzer crystals, and the N-dimensional detector performs a measurement of the first optical path by X-ray detection of the first detection area, and performs a measurement of the second optical path by X-ray detection of the second detection area.

Abstract: Multilayer targets enabling fast and accurate, absolute calibration and alignment of X-ray based measurement systems are described herein. The multilayer calibration targets have very high diffraction efficiency and are manufactured using fast, low cost production techniques. Each target includes a multilayer structure built up with pairs of X-ray transparent and X-ray absorbing materials. The layers of the multilayer target structure is oriented parallel to an incident X-ray beam. Measured diffraction patterns indicate misalignment in position and orientation between the incident X-Ray beam and the multilayer target. In another aspect, a composite multilayer target includes at least two multilayer structures arranged adjacent one another along a direction aligned with the incident X-ray beam, adjacent one another along a direction perpendicular to the incident X-ray beam, or a combination thereof. In some embodiments, the multilayer structures are spatially separated from one another by a gap distance.

Abstract: A mounting system and a sample holder for an X-ray diffraction (XRD) apparatus are provided. The mounting system includes a mounting bracket, an attachment module and a biasing assembly. The mounting bracket is mountable to the XRD apparatus and is rotatable about a rotation axis. The mounting bracket includes an abutment structure defining a reference position. The attachment module is mountable onto the mounting bracket at an adjustable attaching position with respect to the reference position. The attachment module comprises an attaching element that is engageable with the abutment structure for abutting the mounting bracket proximate the reference position. The biasing assembly is mounted onto one of the mounting bracket or the attachment module for interlocking the mounting bracket with the attachment module, such that the mounting bracket is blocked in a plane substantially parallel to the rotation axis, thereby allowing the attaching position to be aligned with the rotation axis.

Abstract: The invention relates to an X-ray imaging apparatus (2), comprising: a source (4) for generating X-ray radiation, an object receiving space (6) for arranging an object of interest for X-ray imaging, an X-ray collimator arrangement (8) arranged between the source (4) and the collimator arrangement (8), and an X-ray mirror arrangement (10). The mirror arrangement (10) comprises for example two tapered mirrors (22) facing each other and adapted for guiding X-ray radiation of the source (4) to the collimator arrangement (8). Consequently, the X-ray intensity at the object receiving space (6) is increased. In order to limit the X-ray radiation to an area, where the X-ray radiation can be utilized form imaging, an angle of spread ?m between the mirrors (22) and a length LM of each mirror (22) is adapted, such that a number of total reflections of X-ray radiation, provided by the source (4), at the mirrors (22) is limited.

Abstract: Methods and mechanisms for correcting a wavefront error in an optical element are disclosed. A wavefront error that is downstream of an optical element in an optical path is determined. A refractive index prescription that reduces the wavefront error is determined. A beam of energy is directed at a surface of the optical element in accordance with the refractive index prescription to alter the surface to change an index of refraction at multiple locations on the surface.

Abstract: The X-ray reflectometer of the present invention includes: an irradiation angle variable unit (10) configured to vary an irradiation angle of a focused X-ray beam (6) with a sample surface (8a); a position sensitive detector (14) which is fixed; and a reflection intensity calculation unit (15) configured to, per reflection angle of reflected X-rays (13) constituting a reflected X-ray beam (12), integrate a detected intensity by a corresponding detection element (11), for only the detection elements (11) positioned within a divergence angle width of the reflected X-ray beam (12) in the position sensitive detector (14), in synchronization of variation in the irradiation angle (?) of the focused X-ray beam (6) by the irradiation angle variable unit (10).

Abstract: A method for monitoring tubing wall thickness includes conveying a tool through a tubular string in a borehole, the tool including a photon source that directs a photon beam along a radial path toward a wall of the borehole, the tool further including an array of collimated detectors that measure Compton backscattering rates at respective distance bins along the radial path. The method further includes calculating a sequence of ratios between measurements from neighboring detectors. The method further includes identifying one or more local extrema in the sequence, each extremum representing a boundary between different materials. The method further includes determining a wall thickness of the tubular string from absolute or relative positions of the one or more extrema. The method further includes displaying a representation of the wall thickness.

Abstract: A system for the x-ray topography analysis of a sample, comprising in combination, a goniometer having a base, a tube arm rotatably associated with the base, a detector arm rotatably associated with the base, and a sample stage operatively associated with the base. The system also includes an x-ray source operatively coupled with the tube arm and is capable of emitting a non-collimated beam of x-rays. A collimator is operatively associated with the x-ray source and converts the non-collimated beam of x-rays into a collimated beam of x-rays having a quasi-rectangular shape with a divergence less than three degrees in all directions. A detector operatively coupled to the detector arm.

Abstract: At least two values of an X-ray irradiation width are set for a single specimen. A rocking curve is measured for each of the X-ray irradiation widths. A rocking curve width value is determined for each of the rocking curves. The values of the X-ray irradiation width and the values of the rocking curve width are plotted on a planar coordinate system having a vertical axis representing the rocking curve width value and a horizontal axis representing the X-ray irradiation width value, and a rocking curve width shift line is determined based on the plotted points. A gradient of the rocking curve width shift line is determined. A curvature radius of the specimen is determined based on the gradient. The amount of bowing of a single-crystal substrate under measurement can be measured without a need to move the single-crystal substrate for reliable measurement with a small amount of error.

Abstract: Methods and apparatus for estimating an unknown value of at least one of a plurality of sets of data, each set of data including a plurality of values indicative of radiation diffracted and/or reflected and/or scattered by one or more features fabricated in or on a substrate, wherein the plurality of sets of data include at least one known value, and wherein at least one of the plurality of sets of data includes an unknown value, the apparatus including a processor to estimate the unknown value of the at least one set of data based on: the known values of the plurality of sets of data, a first condition between two or more values within a set of data of the plurality of sets of data, and a second condition between two or more values being part of different sets of data of the plurality of the sets of data.

Abstract: A method of measuring properties of a thin film stack by GIXR divides the stack into sub-layers and represents the composition of each sub-layer by an number P. The numbers P represent the composition of each layer. For example, integers may represent pure material and fractional values represent mixtures of the adjacent pure materials. This representation is then used to fit to measured data and the best fit gives an indication of the material composition of each of the sub-layers and hence as a function of depth.

Abstract: The method of inspecting a degraded area of a metal structure covered by a composite repair generally comprises operating a Compton scattering inspection device onto the degraded area, including emitting a beam of radiation particles directed towards and across the composite repair, detecting at least some backscattered photons scattered back from the metal structure, and acquiring Compton scattering data from the detected backscattered photons, the Compton scattering data being indicative of remaining wall thickness of the degraded area.

Abstract: A method and apparatus for performing an X-ray diffraction measurement with a diffractometer having an X-ray beam directed at a sample and a two-dimensional X-ray detector includes the performance of a physical scan during which the detector is moved through a scanning range in an angular direction about the sample position. To provide a uniform exposure time, the detector, when located at an extreme of the scanning range, is controlled to progressively change the portion of the detected X-ray energy that is used at a rate that maintains a uniform exposure time for each angular position in the scanning range. Alternatively, when located at an extreme of the range, the detector is kept stationary until a desired minimum exposure time is obtained for each angular position, after which the collected diffraction data is normalized relative to exposure time.

Abstract: A system for the x-ray topography analysis of a sample, comprising in combination, a goniometer having a base, a tube arm rotatably associated with the base, a detector arm rotatably associated with the base, and a sample stage operatively associated with the base. The system also includes an x-ray source operatively coupled with the tube arm and is capable of emitting a non-collimated beam of x-rays. A collimator is operatively associated with the x-ray source and converts the non-collimated beam of x-rays into a collimated beam of x-rays having a quasi-rectangular shape with a divergence less than three degrees in all directions. A detector operatively coupled to the detector arm.

Abstract: A crystalline phase contained in a sample is identified, from X-ray diffraction data of the sample which contain data of a plurality of ring-shaped diffraction patterns, using a database in which are registered data related to peak positions and peak intensity ratios of X-ray diffraction patterns for a plurality of crystalline phases. Peak positions and peak intensities for a plurality of the diffraction patterns are detected from the X-ray diffraction data (step 102), and the circumferential angle versus intensity data of the diffraction patterns is created (step 103). The diffraction patterns are grouped into a plurality of clusters on the basis of the circumferential angle versus intensity data (step 105). Crystalline phase candidates contained in the sample are searched from the database on the basis of sets of ratios of peak positions and peak intensities of the diffraction patterns grouped into the same cluster (step 106).

Abstract: This application relates to an apparatus and methods for enhancing the performance of X-ray reflectometry (XRR) when used in characterizing thin films and nanostructures supported on a flat substrate. In particular, this application is targeted for addressing the difficulties encountered when XRR is applied to samples with very limited sampling volume, i.e. a combination of small sampling area and miniscule sample thickness or structure height. Point focused X-ray with long wavelength, greater than that from a copper anode or 0.154 nm, is preferably used with appropriately controlled collimations on both incident and detection arms to enable the XRR measurements of samples with limited volumes.

Abstract: Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) are disclosed. For example, a method of measuring a sample by X-ray reflectance scatterometry involves impinging an incident X-ray beam on a sample having a periodic structure to generate a scattered X-ray beam, the incident X-ray beam simultaneously providing a plurality of incident angles and a plurality of azimuthal angles. The method also involves collecting at least a portion of the scattered X-ray beam.

Abstract: A galvannealed steel sheet includes a plating layer containing 7.2-10.6 mass % of Fe, 0.2-0.4 mass % of Al, and 0.1 mass % or more of at least one of Ni, Co, Cu, and In, and the balance of Zn and impurities. In a vertical cross-section of the plating layer, an average thickness of a ? phase is 0.2 ?m or less, and an average thickness of a ? phase is 0.5 ?m or less. In the ? phase, at least one of Ni, Co, Cu, and In are contained at a ratio in the ? phase of 0.5 mass % or more. A phase existing in contact with the ? phase is a mixed phase of ?1 phase and ? phase, and a ? phase percentage defined by “(? phase/? phase contact interface length)/(? phase/? phase contact interface length+?1 phase/? phase contact interface length)×100” is 10% or more.

Abstract: Structural parameters of a specimen are determined by fitting models of the response of the specimen to measurements collected by different measurement techniques in a combined analysis. Models of the response of the specimen to at least two different measurement technologies share at least one common geometric parameter. In some embodiments, a model building and analysis engine performs x-ray and optical analyses wherein at least one common parameter is coupled during the analysis. The fitting of the response models to measured data can be done sequentially, in parallel, or by a combination of sequential and parallel analyses. In a further aspect, the structure of the response models is altered based on the quality of the fit between the models and the corresponding measurement data. For example, a geometric model of the specimen is restructured based on the fit between the response models and corresponding measurement data.

Abstract: A system for reflecting and recording x-ray radiation from an x-ray emitting event to characterize the event. A crystal is aligned to receive radiation along a first path from an x-ray emitting event. Upon striking the crystal, the x-ray reflects from the crystal along a second path due to a reflection plane of the crystal defined by one of the following Miller indices: (9,7,3) or (11,3,3). Exemplary crystalline material is germanium. The x-rays are reflected to a detector aligned to receive reflected x-rays that are reflected from the crystal along the second path and the detector generates a detector signal in response to x-rays impacting the detector. The detector may include a CCD electronic detector, film plates, or any other detector type. A processor receives and processes the detector signal to generate reflection data representing the x-rays emitted from the x-ray emitting event.

Abstract: Technologies are described for apparatus, methods and systems effective for filtering. The filters may comprise a first plate. The first plate may include an x-ray absorbing material and walls defining first slits. The first slits may include arc shaped openings through the first plate. The walls of the first plate may be configured to absorb at least some of first x-rays when the first x-rays are incident on the x-ray absorbing material, and to output second x-rays. The filters may comprise a second plate spaced from the first plate. The second plate may include the x-ray absorbing material and walls defining second slits. The second slits may include arc shaped openings through the second plate. The walls of the second plate may be configured to absorb at least some of second x-rays and to output third x-rays.

Abstract: In an X-ray detector operating in a rolling shutter read out mode, by precisely synchronizing sample rotation with the detector readout, the effects of timing skew on the image intensities and angular positions caused by the rolling shutter read out can be compensated by interpolation or calculation, thus allowing the data to be accurately integrated with conventional software. In one embodiment, the reflection intensities are interpolated with respect to time to recreate data that is synchronized to a predetermined time. This interpolated data can then be processed by any conventional integration routine to generate a 3D model of the sample. In another embodiment a 3D integration routine is specially adapted to allow the time-skewed data to be processed directly and generate a 3D model of the sample.

Abstract: An integrated hybrid crystal Light Emitting Diode (“LED”) display device that may emit red, green, and blue colors on a single wafer. The various embodiments may provide double-sided hetero crystal growth with hexagonal wurtzite III-Nitride compound semiconductor on one side of (0001) c-plane sapphire media and cubic zinc-blended III-V or II-VI compound semiconductor on the opposite side of c-plane sapphire media. The c-plane sapphire media may be a bulk single crystalline c-plane sapphire wafer, a thin free standing c-plane sapphire layer, or crack-and-bonded c-plane sapphire layer on any substrate. The bandgap energies and lattice constants of the compound semiconductor alloys may be changed by mixing different amounts of ingredients of the same group into the compound semiconductor. The bandgap energy and lattice constant may be engineered by changing the alloy composition within the cubic group IV, group III-V, and group II-VI semiconductors and within the hexagonal III-Nitrides.

Abstract: Apparatus, including a sample-support that retains a sample in a plane having an axis, the plane defining first and second regions separated by the plane. A source-mount in the first region rotates about the axis, and an X-ray source on the source-mount directs first and second incident beams of X-rays to impinge on the sample at first and second angles along beam axes that are orthogonal to the axis. A detector-mount in the second region moves in a plane orthogonal to the axis and an X-ray detector on the detector-mount receives first and second diffracted beams of X-rays transmitted through the sample in response to the first and second incident beams, and outputs first and second signals, respectively, in response to the received first and second diffracted beams. A processor analyzes the first and the second signals so as to determine a profile of a surface of the sample.

Abstract: Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) are disclosed. For example, a method of measuring a sample by X-ray reflectance scatterometry involves impinging an incident X-ray beam on a sample having a periodic structure to generate a scattered X-ray beam, the incident X-ray beam simultaneously providing a plurality of incident angles and a plurality of azimuthal angles. The method also involves collecting at least a portion of the scattered X-ray beam.

Abstract: A method and a device examine a sample with radiation emitted from a radiation source, which is directed to the sample carried by a sample holder via a beamforming unit and detected by a detector and evaluated in an evaluating unit. Prior to the examination of the sample, at least one of the following components, including the radiation source, beamforming unit, sample holder, detector, and a primary beam stop, are spatially oriented and/or positioned in relation to at least one of the other components and/or in relation to a predefined fixed point and/or in relation to the optical path with a control unit via actuating drives. The radiation intensity measured by the detector, in a predefined detector range, and/or a value derived therefrom is used for establishing a control variable conferred from the control unit to the actuating drives assigned to the components.

Abstract: The X-ray imaging device includes an X-ray generator to generate an X-ray and radiate the X-ray to an object, an X-ray detector to detect the X-ray passing through the object and acquire an image signal of the object, and a controller to analyze the image signal of the object, evaluate a characteristic of the object and generate at least one of a single energy X-ray image and a multiple energy X-ray image according to the evaluated characteristic.

Abstract: An integrated hybrid crystal Light Emitting Diode (“LED”) display device that may emit red, green, and blue colors on a single wafer. The various embodiments may provide double-sided hetero crystal growth with hexagonal wurtzite III-Nitride compound semiconductor on one side of (0001) c-plane sapphire media and cubic zinc-blended III-V or II-VI compound semiconductor on the opposite side of c-plane sapphire media. The c-plane sapphire media may be a bulk single crystalline c-plane sapphire wafer, a thin free standing c-plane sapphire layer, or crack-and-bonded c-plane sapphire layer on any substrate. The bandgap energies and lattice constants of the compound semiconductor alloys may be changed by mixing different amounts of ingredients of the same group into the compound semiconductor. The bandgap energy and lattice constant may be engineered by changing the alloy composition within the cubic group IV, group III-V, and group II-VI semiconductors and within the hexagonal III-Nitrides.

Abstract: The present invention relates to a method and device for determining the energetic composition of electromagnetic waves. It is the object of the present invention to provide a method and device for X-ray spectroscopy that allows simultaneous detection of the individual energies at a comparatively higher resolution and/or across a comparatively wider energy range. According to the invention, at least one reflective zone plate (12) is used that comprises a multitude of predefined wavelength-selective regions (14) arranged next to one another, wherein the wavelength-selective regions (14) each include a multitude of reflecting arched portions (20), which extend exclusively and continuously across the respective wavelength-selective region (14).

Abstract: A scintillator panel includes a scintillator layer that includes a phosphor including columnar crystals in which an X-ray rocking curve of a specific plane index measured by applying an X-ray to a columnar crystal growth ending surface after cutting to have a thickness of 5 ?m from a columnar crystal growth starting surface has a half-width (a) of equal to or less than 15 degrees, an X-ray rocking curve of the specific plane index measured by applying an X-ray to the columnar crystal growth ending surface without cutting has a half-width (b) of equal to or less than 15 degrees, and a ratio (a/b) is within a range of from 0.5 to 2.0. The scintillator panel can provide radiation images having higher sharpness.

Abstract: A monochromator is adapted to select at least one band of wavelengths from diverging incident radiation. The apparatus includes a first crystal and a second crystal. A band of emitted wavelengths of the first crystal is adapted to the at least one band of wavelengths. A surface curvature of the first crystal is adapted to focus emitted radiation in a first plane. A band of emitted wavelengths of the second crystal also is adapted to the at least one band of wavelengths. Parallel faces of a lattice structure of the second crystal are oriented at a first predetermined angle from a surface of the second crystal. In another embodiment, an apparatus is adapted to select at least one band of wavelengths from diverging incident synchrotron radiation in a given range of wavelengths with an energy resolution finer than about five parts in 10000 and optical efficiency greater than about 50 percent.

Abstract: Methods and systems for fabricating platelets of a monochromator for X-ray photoelectron spectroscopy (XPS) are disclosed. For example, a method of fabricating a platelet of a monochromator for X-ray photoelectron spectroscopy involves placing a crystal on a stage of an X-ray measuring apparatus, the crystal having a top surface. The method also involves measuring, by X-ray reflection, an orientation of a crystal plane of the crystal, the crystal plane beneath the top surface of the crystal and having a primary axis. The method also involves measuring a surface angle of the top surface of the crystal by measuring a light beam reflected from the top surface of the crystal.