Abstract: A wafer supporting mechanism including: a wafer supporting table; and a movable part supported by the wafer supporting table, wherein the wafer supporting table includes a wafer supporting portion for transfer that stands up from a first surface opposing a back surface of a wafer to be placed and is provided further toward an inner side than an outer peripheral edge of the wafer to be placed, and the movable part includes a wafer supporting portion for film formation that is positioned further toward an outer peripheral side of the wafer to be placed than the wafer supporting portion for transfer and is relatively movable with respect to the wafer supporting table in a standing direction of the wafer supporting portion for transfer.

Abstract: A lifting device, which is configured to lift or drop at least one load bearing mechanism. The lifting device includes a power driving mechanism and multiple lifting mechanisms connecting to the power driving mechanism. The multiple lifting mechanisms march the load bearing mechanism at least from a first height location to a second height location in a rolling manner under a function of a driving force provided by the power driving mechanism. An embodiment of the present invention further discloses an ultrasonic inspection system using the lifting device.

Abstract: A cassette adapter which makes it possible for a second cassette which accommodates a circular wafer of a diameter of 200 mm to be used on a load port ready for a first cassette which accommodates a different circular wafer of another diameter of 300 mm is locked to the load port by an adapter main body locking apparatus. The locking apparatus includes a locking air cylinder serving as a locking member for locking the first cassette to a carrier base of the load port, and a locking target member provided integrally on a rear face of an adapter plate of the cassette adapter for disengageably engaging with a locking pawl at an end of a rod of the air cylinder. A seating sensor mechanism detects that the second cassette is seated at a correct position on the adapter plate.

Abstract: In a storage system (1; 18) with at least one shelving level (3, 4, 5, 6, 7), comprising at least one transport aisle (10), shelves (8, 9; 19, 20) situated alongside the transport aisle (10) with storage spaces (L) for products (P) and a level transport device (EBG) movable in the transport aisle (10) for approaching the storage spaces (L), with a conveyor system (2; 24) for supplying products (P) to the shelving level (3, 4, 5, 6, 7) and removing therefrom, with at least one intermediate buffer (Z), in which the products (P) supplied by means of the conveyor system (2; 24) are temporarily stored until their storage in a storage space (L) and in which products (P) that are removed from the storage places (L) are temporarily stored until their transfer to the conveyor system (2; 24), there is provided that substantially each storage space (L) has a movable compartment floor (F) and that the level transport device (EBG) has compartment floor-moving means, by means of which a compartment floor (F) may be transfe

Abstract: A work aligning system capable of easily altering the kind of works to be aligned. The work aligning system (1) comprises a storage device (10) in which nuts (11) are stored, a take-out base (30) on which the nuts (11) are placed, and a robot (20) for grasping and taking out the nuts from the take-out base (30) and aligning the nuts. An electromagnet (53) is provided at the tip end of the robot arm (23) of the robot (20). The storage device (10) is equipped with a plurality of buckets (131-134) in which nuts (11) of different kinds are stored, and a feed screw mechanism (14) for moving one bucket selected from the plurality of buckets (131-134) to a position near the take-out base (30). The take-out base (30) is equipped with a part (31) on which the nuts (11) are placed and a drive device (32) for discharging the nuts (11) on the part (31) to one bucket selected from the plurality of buckets (131-134).

Abstract: An automated arrangement for filling a shipping rack structure with water bottles (or any other type of bottle) includes an elevator arrangement and a pusher component, both under the control of a programmed control element (such as a microprocessor), to automatically present a plurality of filled bottles to an open rack “column” and move (push) the bottles from the elevator into the rack. The loader system is pre-programmed with inputs including the array size of the rack being loaded (i.e., how many bottles “deep” along each rail, the number of rows in the rack and the number of columns in the rack). With this information, the elevator will thus lift the proper number of bottles into place to fill a column, and then stop. Once the elevator stops, the pusher component will advance to move the column of bottles into the rack. The pusher then retracts, the elevator is re-started, and the next column of filled bottles is loaded into the elevator.

Abstract: A storage-access apparatus includes a first support device including a first base; at least one first storage-access device and at least one first storage device, disposed on the first base and arranged in a first circle; a second support device including a second base; at least one second storage-access device and at least one second storage device, disposed on the second base and arranged in a second circle; and a transporting device, wherein the first storage-access device, the first storage device, the second storage-access device and the second storage device each has plural compartments, the transporting device corresponds to the compartments, and the first storage-access device and the first storage device can rotate relative to the second storage-access device and the second storage device. Accordingly, the storage-access apparatus can be employed in depositing and picking up products independently. Also disclosed is a storage system including, among others, the storage-access apparatus.

Abstract: A component tube holding arrangement for holding one or more component tubes and for vibratory feeding of components in a picking position in a component mounting machine, as well as a combination of such a component tube holding arrangement and a vibratory feed magazine. The arrangement comprises a support surface for supporting component tubes, a reception portion for receiving component tubes, and at least one component stop at the reception portion defining a picking position for fed components. The arrangement also comprises identification means holding information of the identity of the arrangement. The arrangement is further arranged to be releasably mountable in a component mounting machine or in a vibratory feed magazine arranged to be loaded into the component mounting machine. The component tube holding arrangement lacks component feeding means and is arranged for allowing vibratory feeding means provided in the magazine.

Abstract: A media storage library for storing a plurality of media cartridges is provided. The media storage library includes at least one media transfer mechanism, and a plurality of storage panels for storing media cartridges, including at least a first movable storage panel. The first storage panel is movable from the first position to a second position, and each storage panel of the plurality of movable storage panels includes at least a first access face for the at least one media transfer mechanism to access the media cartridges. An access space is formed between the first movable storage panel and a second storage panel, and the at least one media transfer mechanism is able to access the media cartridges via the access space and the first access face.

Abstract: Within a storage compartment, closely spaced rows of adjacent stacks are supported on a plurality of parallel sliding rails. A pair of coordinated robots is positioned with one robot on one side of the stacks to push the stacks within a selected row toward the other robot. The pushing robot on one side of the row starts off with a starting stack supported in its support arms. The pushing robot pushes the starting stack into one end of the selected row, causing the row to shift toward the waiting receiving robot, which receives the stack at the opposite end of the row from the starting stack. A series of pushes between the two robots moves a stack containing a desired sample into alignment with an access port in the storage compartment.

Abstract: A system, method and corresponding apparatus are provided for storing, retrieving and delivering unit dose blisters in their natural, raw state (i.e., without over-wrapping or repackaging). In particular, a plurality of unit dose blister mounts are configured to position a corresponding plurality of different types of unit dose blisters in a predetermined, repeatable orientation, so that they can be retrieved and delivered using, for example, an automated retrieval system. The storage apparatus (or unit dose blister mount) may include a cavity that is configured to receive a unit dose medication or medication cavity of the unit dose blister in such a way that the unit dose blister lies substantially flat in the horizontal plane, enabling any identification information displayed on the underside of the unit dose blister (i.e., the side opposite the unit dose medication, or medication cavity) to be viewed.

Abstract: A storage rack for storing and transferring objects is provided with at least one rack module (1) including a plurality of shelves (1a), wherein a laterally insertable receiving means (2) is assignable to each shelf (1a), and wherein each receiving means (2) comprises at least one object receiver for a safe arrangement of an object (W); a lifting unit (4) for receiving a receiving means (2) removed from a shelf (1a) of the rack module (1), and for vertically displacing the receiving means (2); and a transfer unit (3) for receipt/delivery of the object (W) from/to the receiving means (2), and for further handling of the object (W).

Abstract: A method for processing portable objects and a machine for processing portable objects including a device (1) for transferring portable objects (C), incorporating an integrated circuit and processing means consisting of at least two processing lifts (2, 2?) separated by a space of a size of a portable object (C), translatory moved perpendicularly to the plane of the main surface of the portable objects (C) and sequentially on a guiding support (25) by driving and positioning means, each lift (2, 2?) being formed with a parallelepipedal plate (22) provided with at least two processing devices, both lifts having determined different roles. The method consists of successively placing each portable object to be processed in contact with a processing station of the first lift and of the second lift.

Abstract: A delivery rack system for transporting a dolly. The delivery rack system includes a frame disposed on a plurality of wheels. The frame includes a side rail and first and second transverse rails disposed proximate the side rail. The side rail, the first transverse rail, and second transverse rail cooperate to define a compartment adapted to receive the dolly.

Abstract: Storage and retrieval systems and methods are provided to automate the process of handling a mixed inventory of palletized and containerized items. In one embodiment, the stowage and retrieval system comprises a storage area comprising a plurality of stationary cell modules arranged in a matrix, wherein each cell module comprises at least one motor. The system also comprises a plurality of carriers comprising at least one magnet disposed on an underside of each of the carriers and at least one engagement mechanism disposed on a top side of each of the carriers. The at least one magnet of the carrier is configured to engage the at least one motor of a corresponding cell module, and the at least one motor is configured to move the carrier within the storage area.

Abstract: This reaction vessel support is of the type comprising at least one supporting plate (46, 48) designed to take one or more reaction vessels, and mounted rotatably about an axis of rotation (R). In one aspect of the invention, the support comprises at least one control member (94, 96) comprising releasable means (100) of coupling to a movable actuating element (40) of an actuator (10), in such a way as to enable the control member (94, 96) to be moved by the actuator (10), with the control member (94, 96) and the supporting plate (46, 48) being connected together in such a way that a movement of the control member (94, 96) by the actuator (10) is able to bring about a rotation of the supporting plate (46, 84) about the axis of rotation (R) in at least one direction of rotation. Of particular application to supports for microassay plates comprising wells laid out in a matrix arrangement.

Abstract: According to the type of the plate placed in a plate placing device of a component feeder, appropriate holding operation and expanding operation are performed selectively and automatically according to the type of the plate by regulating the lowered position of a plate pressurizing member for the tray feeding plate to securely hold the plate and performing wafer expanding while securely holding the wafer feeding plate by releasing the regulation of the lowered position for the wafer feeding plate.

Abstract: A stocker apparatus includes a first tray stock section (70) for storing a plurality of empty trays (11a), a second tray stock section (80) for storing the plurality of empty trays (11a) loaded with products, tray supporting means (130) provided in the first tray stock section (70) and the second tray stock section (80) for mounting the trays (11) thereon, and lifting and lowering means for lifting and lowering the tray supporting means (130). The stocker apparatus further includes carrier means (140) for carrying the loaded tray to the second tray stock section (80). The stocker apparatus further includes an outer wall constituting member covering the first tray stock section (70) and the second tray stock portion (80) for shielding the first tray stock section (70) and the second tray stock section (80) from an external atmosphere.

Abstract: The invention relates to a method for storing articles (21) in a set-down location (20), and retrieving them therefrom, with a load-bearing means (1) with a loading platform (2) which can be displaced transversally to a rack aisle (R) and, for receiving articles (21), is pushed between a rack shelf (24) and the articles (21). In order to enable a secure automatic retrieval of different articles (21) from a planar rack shelf (24) and the storing thereof, it is provided that the loading platform (2), as it receives articles, is lowered on the side facing the set-down location (20), preferably during displacement in a direction transverse to the rack aisle (R).

Abstract: In order to make possible simple operation of a cable storage device it is proposed that a multitude of cable storage elements be arranged on a rail and comprise an element with which they can be displaced by the cable gripper in a front delivery row until they are collected, preferably manually, for further treatment.

Abstract: An automatic system (100) for conserving samples at a controlled temperature comprising at least one controlled-temperature thermo-insulated conservation chamber (1) with temperature control means (3) containing a set of disks (9) for storing samples (19) and a Cartesian robotic system (4) equipped with pick-up device (18), contained in an upper chamber (2) separated from the chamber (1) by means of an insulating shelf (6), where said Cartesian system (4) through the controlled-access opening (7) moves the samples (19) between the I/O drawer (20) and the above-mentioned set of disks (9). The combined and synchronized movement of the robotic device (4) and of every single disk of the set enables each storage location to be reached. The management of the devices of the automatic system (100) is controlled by an N/C system driven by dedicated management SW.

Abstract: A forklift pocket for a rack or container has a top surface defined by a material having a plurality of apertures therein. The pocket defines a hollow interior portion with which the apertures are in fluid communication.

Abstract: A substrate is transferred from an environment at about vacuum into a load lock through a first door. The substrate is then sealed within the load lock. The pressure within the load lock is raised to a high pressure above vacuum. A second door coupling the load lock to a high-pressure processing chamber is then opened and the substrate moved from the load lock into the high-pressure chamber. The substrate is then sealed within the high-pressure chamber. High-pressure processing, such as high pressure cleaning or high pressure deposition, is then performed on the substrate within the high-pressure chamber. Subsequently, the second door is opened and the substrate transferred into the load lock. The substrate is then sealed within the load lock. The pressure within the load lock is lowered to about vacuum and the first door opened. The substrate is then removed from the load lock into the environment.

Abstract: A cassette for holding substrate in a load-lock comprising an outer casing having a front surface with multiple slots and two sidewalls having holes at the bottom section thereof. Braces are set at the corner edges inside the outer casing and side plates are attached to the braces. Each slot has a set of side plates attached to the braces for holding a substrate. Obstruction pieces are also set inside the outer casing near the corresponding holes. Each obstruction pieces comprise a fixed part and an obstructing part. The fixed part attaches firmly to a bottom plate of the outer casing, and the obstructing part blocks the corresponding hole on the outer casing.

Abstract: An adjustable detection apparatus. The apparatus includes a first holding member and a second holding member and a detection device. The first holding member has a first sliding area, in which the second holding member is moveable. The second holding member has a second sliding area. The detection device comprises a detachable detector, wherein the detection device is moveable in the second sliding area.

Abstract: An object of this invention is to provide a preform conveying device of high production efficiency under the technical theme of aligning the plurality of preforms in single rows at high speed, while eliminating contact of individual preforms with other preforms and minimizing the chances of contact with device parts.

Abstract: A part handling and handwork table including a lift assembly, a drive assembly, a stack support assembly, and a part support beam assembly. The lift assembly is raised/lowered to properly position the stack support assembly adjacent a cart containing a series of stacks, one of which is to be lifted to access a rework part incorporated therein. The drive assembly is operated to drive a movable member of the stack support assembly into the cart and beneath the stack containing the rework part. The lift is further raised and the drive assembly is reversed to carry the stack out of the cart on the movable member of the stack support assembly. The part support beam assembly is secured to the movable member and includes a manually withdrawn movable portion that defines a surface upon which parts from the stack of parts may be placed so as to access or reveal the rework part.

Abstract: Methods and apparatus for ensuring the proper handling of reticles in the manufacturing of microdevices are disclosed. The methods and apparatus employ one or more reticle stop blocks fixed to a reticle handling arm. The one or more reticle stop blocks are designed and arranged to engage an edge of the reticle in order to place the reticle in a desired position on the reticle handling arm should the reticle be improperly arranged in a cassette in which the reticle is stored. By ensuring proper placement of the reticle on the reticle handling arm when the reticle is removed from the cassette, the likelihood of a subsequent fault in handling the reticle is greatly reduced.

Abstract: The invention relates to a transfer device and a method for transferring baking trays from a load carrier to a transport device, or vice versa. According to the invention a stack of baking trays is transferred integrally into or out of the load carrier. In a stacking magazine the stack is first formed or, conversely, arranged separately after unloading. Owing to the method and the device a load carrier can be emptied or filled more rapidly, and a more efficient manner of working is achieved.

Abstract: A reticle manipulating device with an at least substantially closed housing for maintaining clean-room conditions inside the housing, an input/output station for introducing and discharging reticles in and out of the housing, and at least one functional unit arranged in the housing for impressing a predetermined function on the reticles. The device has a manipulating device also arranged inside the housing, for manipulating the reticles in the housing.

Abstract: An order picker truck includes an extendible mast, and a load platform slidably fixed relative to the extendible mast. An operator platform is slidably fixed relative to the load platform, and a load former is fixed to the operator platform. The load former defines a volume over a portion of the load platform to guide an operator building the load and stabilize the load on the load platform.

Abstract: A plant for producing semiconductor products is described and has a plurality of production and measuring units in at least one clean room. Provided there is a configuration of processing stations, which has at least one production unit or measuring unit, a production buffer disposed at the latter for the deposition of semiconductor products and a handling device for the automatic delivery and outward transport of the semiconductor products. The processing stations are interconnected via a conveyor system.

Abstract: An improved apparatus and method is provided for storing semiconductor wafer carriers, and for loading wafers or wafer carriers to a fabrication tool. The apparatus preferably provides an elevated port for receipt of wafer carriers from an overhead factory transport, allows for local interconnection among a plurality of the inventive apparatuses, and enables independent loading of the factory load port and the tool load port. An inventive wafer handling method which divides a lot of wafers into sublots and distributes the sublots among tools configured to perform the same process is also provided.

Abstract: A handling device for handling of parts is disclosed. The handling device comprises a storage module within which a plurality of support locations are provided in a stacked way for supporting pallets on different levels. The handling device further comprises a presentation module for handling and presentation of parts being linked for transferring parts with at least one station assigned thereto. Further, a transport device for moving pallets between the lifting module, the storage module and the presentation module is provided.

Abstract: In a conventional load handling system which has a load storage device and a load handling device and moves a load between these devices, when the load is not resistant to dust and the like, the entire system including the load storage device needs be provided inside a clean room, resulting in high installation costs and high operating costs of the system. Thus, the system cannot be readily adopted. In contrast, a load take in/out sections each for the load storage device and the load handling device are provided to face the clean room defined by partition walls, and a load is transferred between these devices inside the clean room. Thus, although the load storage device and the load handling device can be placed in a non-clean room (an atmospheric air chamber, etc.), a load can be moved between the load storage device and the load handling device in a sufficiently clean atmosphere by using the clean room.

Abstract: The present invention provides a wafer positioning device having wafer storage capability. The wafer positioning device has a wafer platform with wafer lift pins, a wafer position sensor, and a storage location in close proximity to the wafer platform and the wafer position sensor. The storage location may be above the wafer position sensor, in which case the wafer position sensor retracts or rotates so that the wafer lift pins may elevate a positioned wafer past the position sensor to the storage location. Alternatively, the storage location may be between the wafer platform and the wafer positioning device. The storage location is preferably formed by a plurality of rotatable towers or a plurality of retractable lift pins that are operatively coupled to the wafer platform and that have wafer support portions capable of assuming both a wafer storage position and a wafer passage position.

Abstract: An apparatus and method for controlling wafer temperature and environment is provided. The apparatus includes a batch processing fixture for batch processing wafers at a first elevated temperature. The batch of wafers is not substantially ramped in temperature within the batch processing fixture. The apparatus also includes a single wafer processing apparatus for rapidly ramping temperature of a wafer of the batch from the first elevated temperature wherein a uniform temperature across the wafer is maintained during the ramping. Another embodiment of the apparatus (10) includes an RTP chamber (20) having an inert or reducing environment and that includes a pedestal (24) for holding a single wafer (16) and a heater unit (22) arranged so as to uniformly and rapidly heat the single wafer.

Abstract: An apparatus and associated method for transporting a first substrate and a second substrate relative to a cell. The cell contains a pedestal that is configured to interact with a single substrate. When swapping wafers in a cell, a first substrate is displaced from the pedestal to a remote location and a second substrate is inserted into the cell and onto the pedestal. The first substrate is then removed from the cell.

Abstract: The present invention relates to a linear personalization machine comprising a transfer system (3) for portable objects (4), incorporating an integrated circuit, characterized in that it comprises a personalization elevator (20) translated vertically and sequentially on a guide support (70) by driving end positioning means (29, 73, 28, 75, 72), said elevator (20) being made up of a parallelepiped plate (23) fitted wits a plurality of connection devices whether or not mixed type (22i, 22n) connecting to the integrated circuit of portable objects (4) that are brought in sequential manner in front of an incoming/outgoing station or the transfer line.

Abstract: An apparatus for transferring a movable body comprises a rack having flexibility, a pinion for driving the rack and a guide device for guiding the rack. The guide device has a curved portion. The pinion may locate along the curved portion of the guide device. The movable body comprises a disc.

Abstract: An improved apparatus and method is provided for storing semiconductor wafer carriers, and for loading wafers or wafer carriers to a fabrication tool. The apparatus preferably provides an elevated port for receipt of wafer carriers from an overhead factory transport, allows for local interconnection among a plurality of the inventive apparatuses, and enables independent loading of the factory load port and the tool load port. An inventive wafer handling method which divides a lot of wafers into sublots and distributes the sublots among tools configured to perform the same process is also provided.

Abstract: This invention relates to a drive-transferring apparatus having a constraining guide (10) carrying a plurality of drive-transferring members (11) interconnected compressively. Drive members (13) drive the drive-transferring members (11) about the constraining guide (10). One or more elongate apertures such as slots (13) permit access to the drive-transferring members for connection of further members thereto; and for reading, of data carried by the drive-transferring members (11) or by members connected thereto.

Abstract: Apparatus for packing a pack of boards, eg plaster board, for wrapping and then delivery to a site is disclosed. The apparatus 1 comprises broadly about 30 to 40 board storage units or bins 2, 3 arranged in two sets. Each bin 2, 3 stores a different size and specification of plasterboard. The apparatus 1 also includes a conveyor 4 onto which the boards are tipped from the bin 2, 3 and which conveys the boards from the bins 2, 3 to a packing point. The apparatus 1 also includes a stacker 5 at the packing point for stacking the boards and also attaching for tying the boards together to form a single pack suitable for transport to the site.

Abstract: Particles are prevented from clinging to the back of a water in the notch alignment of the wafer, and the problems encountered when a plurality of wafers were aligned all at once are solved. Three support poles 105 are erected on a turntable 103. The substrate outer periphery 104b of wafers 104 is supported by the tapered portions of support pins 107 protruding from the support poles 105. The turntable 103 is driven by a single motor 106, and all of the wafers 104 are rotated at once. During rotation, the notches 104a of al the wafers 104 are detected by an optical sensor 116 provided to a sensor pole 117, and the angular position thereof is stored. The wafers 104 are rotated an the basis of the angular position data, and notch alignment is performed successively, starting with the bottom wafer 104.

Abstract: The present invention provides a wafer positioning device having wafer storage capability. The wafer positioning device has a wafer platform with wafer lift pins, a wafer position sensor, and a storage location in close proximity to the wafer platform and the wafer position sensor. The storage location may be above the wafer position sensor, in which case the wafer position sensor retracts or rotates so that the wafer lift pins may elevate a positioned wafer past the position sensor to the storage location. Alternatively, the storage location may be between the wafer platform and the wafer positioning device. The storage location is preferably formed by a plurality of rotatable towers or a plurality of retractable lift pins that are operatively coupled to the wafer platform and that have wafer support portions capable of assuming both a wafer storage position and a wafer passage position.

Abstract: The present invention provides a wafer positioning device having wafer storage capability. The wafer positioning device has a wafer platform with wafer lift pins, a wafer position sensor, and a storage location in close proximity to the wafer platform and the wafer position sensor. The storage location may be above the wafer position sensor, in which case the wafer position sensor retracts or rotates so that the wafer lift pins may elevate a positioned wafer past the position sensor to the storage location. Alternatively, the storage location may be between the wafer platform and the wafer positioning device. The storage location is preferably formed by a plurality of rotatable towers or a plurality of retractable lift pins that are operatively coupled to the wafer platform and that have wafer support portions capable of assuming both a wafer storage position and a wafer passage position.

Abstract: A product supply unit which has a pair of plate members disposed opposite to each other and connected together by a number of supports that are in between the two plate members and disposed around the circumference of the plate members. Each support has a product holding nozzle used to move a product from a supply point, to a work point, to a stock point.

Abstract: A substrate detection sensor is operatively connected to a door moving mechanism for opening/closing a front door with respect to a sealed container accommodating therein a plurality of substrates. The substrate detection sensor enters the sealed container and detects the substrates successively as it is lowered integrally with the front door, and retracts from the sealed container when all of the substrates have been detected.

Abstract: A cart loading system for placing library-like items onto a library cart is provided for a cart having a plurality of shelves between first and second cart end members. The loading system includes a cart tilting mechanism for receiving and tilting the cart so as to raise the second cart end member relative to a ground plane and relative to said first cart end member such that the shelves are at a selected angle relative to the ground plane. The loading system also includes a placer device having a rack member for supporting an individual item and a pusher element for pushing the individual item off of the rack member.