Abstract: An electrical distribution device assembly includes a drawout substructure having at least first and second opposing side portions. The electrical distribution device assembly also includes a telescoping rail unit mounted to one of the first and second opposing side portions. The telescoping rail unit includes a carrier rail having a carrier rail support surface and a loading rail having a loading rail support surface. The loading rail is slidably supported by the carrier rail to define an extended deployed configuration and a retracted stowed configuration. The electrical distribution device assembly also includes an electrical device is supported upon at least one of the carrier rail and the loading rail and is selectively shiftable into and out from the drawout substructure.

Abstract: A substrate transport apparatus comprising a drive section, an upper arm, a first forearm, and a second forearm. The upper arm is rotatably connected to the drive section at a first end of the upper arm. The upper arm is rotatably connected to the drive section for rotating the upper arm about an axis of rotation of the drive section. The first forearm is pivotably connected to the upper arm for pivoting relative to the upper arm. The first forearm has a first end effector depending therefrom. The second forearm is pivotably connected to the upper arm for pivoting relative to the upper arm. The second forearm has a second end effector depending therefrom.

Abstract: The invention includes multi-station workpiece processors, methods of processing semiconductor workpieces within multi-station workpiece processors, and methods of moving semiconductor workpieces within multi-station workpiece processors. In one implementation, a multi-station workpiece processor includes a processing chamber comprising multiple stations for processing individual workpieces. A pedestal is associated with individual of the stations. The pedestals are mounted for selective vertical up movement within the chamber to contact a workpiece and for selective vertical down movement within the chamber to be displaced from a workpiece. The pedestals respectively comprise an upper surface upon which an individual workpiece is received during processing within the chamber. At least one workpiece engagement arm is associated with individual of the pedestals.

Abstract: A device for applying a weatherstrip to a motor vehicle body, and a related method. The body bears an elongated receiving surface with a predetermined profile. The application device includes a plate for applying the weatherstrip on the receiving surface, a presser pressing the weatherstrip on the receiving surface, and a guide for guiding the application plate on a trajectory along the predetermined profile of the receiving surface The guide includes a programmable articulated mechanical element for moving the application plate, and that is programmable to adapt the trajectory of the application plate to different predetermined profiles corresponding to different vehicles.

Abstract: An object taking-out apparatus for taking out objects randomly stacked in a container according to a condition of how each object is placed, which includes a robot hand having telescopic means and a coupling member whose one ends are connected to a robot arm end, and holding means coupled to their other ends. The telescopic means expands and contracts to cause the holding means to assume either a first orientation where a small angle is formed or a second orientation where a large angle is formed between a holding direction axis of the holding means and a rotary axis of the robot arm end, thereby taking out objects without causing interaction between the robot and the container.

Abstract: An apparatus and method for hanging a gate is provided. The apparatus includes a first leg and a second leg. The second leg is coupled to the first leg such that the first leg forms an angle with the second leg. The apparatus also includes a link. The link is coupled to at least one of the first leg and the second leg. Also, the link is adapted to be coupled to a gate.

Abstract: A process and associated apparatus (1) for picking up, transferring and depositing a whole layer of products to be palletized, the pickup apparatus (1) including a flexible loading surface (5) which is movable between two positions, a wound position for defining a bottom opening, and a deployed position for closing the opening to thereby define the loading surface, the motion being driven by an associated motor unit (17). In the pickup process, the layer of containers is reached by the flexible loading surface (5) in a wound position to be introduced in such configuration in the apparatus. The layer of containers therein introduced is transferred onto the flexible surface by retracting the pickup apparatus. Actuation occurs either after disconnecting the drive between the flexible loading surface (5) and the associated motor unit or by synchronizing the unit with the arms of the corresponding robot (2) associated to the apparatus.

Abstract: A wafer carrier is to be provided which is capable of supporting semiconductor wafers with an appropriate load weight irrespective of the number loaded therein, and preventing the semiconductor wafers from being damaged due to an impact during transportation. An inner elastic mechanism that elastically supports an inner support member applies a greater load weight to front and back end portions of the inner support member, than to a central portion thereof. Accordingly, in the case where the wafer carrier is fully loaded with the semiconductor wafers, all the wafers are supported with a uniform and appropriate load weight. On the other hand, in the case where a fewer number of semiconductor wafers are to be loaded, for example placing the semiconductor wafers in a central region, where a smaller load weight is applied by the inner elastic mechanism to the inner support member, enables applying a uniform and appropriate load weight to all of the fewer number of semiconductor wafers.

Abstract: The present invention is directed to an end effector having at least three substrate support members and at least three movable substrate gripping members. In one embodiment, an end effector has at least four substrate support members and at least three movable substrate gripping members. In another embodiment, an end effector has at least four movable substrate support members and at least three movable substrate gripping members.

Abstract: A linear actuator comprises a chain having adjacent first and second links. A pivotal connection pivotally connects the first link to the second link. The first link is pivotable about a pivot axis which is non-perpendicular to a longitudinal axis of the first link. A locking mechanism releasably locks the first link and the second link to prevent the first link from pivoting about the pivot axis. A releasing mechanism releases the locking mechanism to allow the first link to pivot about the pivot axis. A drive mechanism moves the chain between an extended position and a retracted position. At least a portion of the chain is helically wound when the chain is in the retracted position.

Abstract: A substrate transport apparatus is provided for stably transporting a substrate and sensing a receiving state of the substrate. The substrate transport apparatus includes a grip member for gripping a substrate placed on the pocket part of the hand when a hand returns to a groove position from a pickup position. The grip member may include a pusher and an elastic member. The pusher has a curved section contacting the edge of a substrate and is mounted on the base to move in the same direction as the at least one hand, and the elastic member supplies an elastic force for enabling the pusher to laterally press the edge of the substrate.

Abstract: A device is proposed for the contactless grasping and holding of an object from a direction directed at least partially in the direction of the force of gravity, using a holding element situated counter to the direction of the force of gravity, at least partially above the object and at a distance from the latter, which to the greatest extent possible avoids the carrying off or migrating of particles that are possibly present. According to the present invention this is achieved in that the holding element is designed as a vibrating holding element for generating levitation waves.

Abstract: A wafer carrier opener is provided. The wafer carrier opener may eliminate the use of two separate actuators by using a four-bar linkage mechanism. The wafer carrier opener includes a wafer carrier door receiver, a horizontally stationary member, and a link coupled between the wafer carrier door receiver and the horizontally stationary member so as to allow horizontal movement of the wafer carrier door receiver.

Abstract: The invention relates to a device for positioning an element with respect to at least two reference points (4a, 4c), in which said device acts upon a working point on the element to be positioned and comprises a positioning arm attached to a fixed hinging point with respect to said reference points (4a, 4c), comprising two mutually hinged parts (6a, 6b) allowing a movement of said element to each reference point (4a, 4c). The invention related further to a device for positioning at least one offset plate on a positioning table of a pre-press equipment, comprising means to move the offset plate in a plane parallel to the positioning table to at least one reference point (4a) on the positioning table, in which said means acts upon a working point situated in the supporting plane of the offset plate on the positioning table.

Abstract: Methods and apparatus for ensuring the proper handling of reticles in the manufacturing of microdevices are disclosed. The methods and apparatus employ one or more reticle stop blocks fixed to a reticle handling arm. The one or more reticle stop blocks are designed and arranged to engage an edge of the reticle in order to place the reticle in a desired position on the reticle handling arm should the reticle be improperly arranged in a cassette in which the reticle is stored. By ensuring proper placement of the reticle on the reticle handling arm when the reticle is removed from the cassette, the likelihood of a subsequent fault in handling the reticle is greatly reduced.

Abstract: A device for moving a machine or the like between plural workstations includes: a mechanism for suspending the machine, a guide, a structure for supplying the guide with electrical energy, a mechanical linkage between the machine and the guide, a connector for electrically connecting the machine to the guide, a connector for electrically connecting the machine to each workstation, and a switch for changing the electrical energy supply source of the machine when it is connected to both a workstation and to the guide. Further a management and control device controls moving the machine and its electrical energy supply.

Abstract: A system comprising a first robotic arm assembly for capturing and releasing a semiconductor wafer, a second robotic arm for capturing and releasing an interleaf, and a controller for actuation of the first and second robotic arms, the first and second robotic arms operating substantially simultaneously. At least one robotic arm can include a transfer arm, and a counterweight attached to a first end of the transfer arm and an end effector attached to a second, opposite end of the transfer arm. Two robotic arms permit the system to carry out the steps substantially simultaneously and therefore increase throughput significantly.

Abstract: A controlled robot assembly system including multiple independently operable robot assemblies are provided for use in semiconductor wafer processing. The robot assembly includes independent co-axial upper and lower robot assemblies adapted to handle multiple objects and a control system for high system throughput. The upper robot is stacked above the lower robot and the two robots are mounted concentrically to allow fast wafer transfer. Concentric drive mechanisms may also be provided for imparting rotary motion to either rotate the robot assembly or extend an extendable arm assembly into an adjacent chamber. The apparatus includes a wafer lifting and storing apparatus within each chamber.

Abstract: A dual arm robot assembly has two arms each having a set of joint/link pairs that, in conjunction with an actuator assembly, define at least three degrees of freedom to provide independent horizontal translation and rotation of a distalmost link. A vertical motion mechanism is also provided.

Abstract: A double arm substrate transport unit for transporting a work piece, such as a semiconductor wafer, includes a robotic arm formed of a first forearm supported by the tip part of a base arm so as to be freely rotatable. A first end effector on which a work piece is placed is supported by the tip part of the first forearm so as to be freely rotatable. A second forearm is supported by the tip part of the base arm so as to be freely rotatable is attached above the first forearm so as to overlap the first forearm. A second end effector on which a work piece is placed is supported by the tip part of the second forearm so as to be freely rotatable.

Abstract: A vial gripping mechanism (10) includes a pivotally mounted swing arm (26). A sensor receiving array (44) is mounted to a sensor end (34) on an inward edge (46) of the arm (26). A channel (38) protecting a cable (64) follows an outside edge (42) from the receiving array (44) to a cam end (36). A torsion spring (28) forces the cam end (36) against a cam (30) which is fixedly mounted to the mechanism (10) adjacent the arm (26). By action of the mechanism (10), the arm (26) is moved relative to the cam (30) such that in a sensing position, the receiving array (44) is directly opposite a sensor transmitting array (74), and in a shielded position, the receiving array (44) is housed within a shield (32). The shield (32) is fixedly mounted to the mechanism (10) and protects the receiving array (44) while in transit.

Abstract: A substrate transfer system comprises plural end-effectors that are placed so as to touch a periphery of a cone having a vertical angle at a 2&thgr; angle with respect to a central axis at an arbitrary &thgr; angle to a horizontal plane, wherein substrates are interchanged and simultaneously transferred where the end-effectors are in a horizontal position. Besides, since the end-effectors are vertically located, the minimum rotational radius of the system that is projected to a horizontal plane, can be reduced. This contributes toward the reduction of an installation area for a substrate processing equipment in which the substrate transfer system is equipped.

Abstract: A handler for transporting planar substrates, in particular wafers, used in the semiconductor industry, between at least two stations. The handler includes a movable flat support arm for receiving a substrate and means for defining the location of the substrate in the area of a predetermined point on the support arm. A vibration generator for generating a longitudinal ultrasonic vibration is provided, that the vibration generator interacts with the support arm in such a way that a substantially stationary vibration with at least one antinode can be set on the flat support arm, which permits a levitation of a substrate placed thereon. A means for defining the location of the substrate provide a lateral positioning exclusively by an interaction with the edge area of a substrate.

Abstract: An alignment apparatus which obtains an amount of correction for centering a semiconductor wafer from four points of a wafer edge detected by noncontact proprioceptors in a wafer delivery position P1 where the semiconductor wafer is passed to a wafer carrying unit from a wafer carrying robot and centers the semiconductor wafer.

Abstract: A substrate transfer system employs a robot hand which is composed such that a sum length of a first arm and a third arm equal a length of a second arm, and a length of the first arm becomes longer than a length of the third arm. A ratio between arm lengths is determined such that a distal end portion of the first arm, a distal end portion of the second arm, a distal end portion of the third arm, and a distal end portion of the workpiece held by the end effector are inscribed in a track circle around a rotational axis of the first arm as a center. The ratio of the first, second and third arm lengths is approximately 1:({square root over ( )}5+1)/2:({square root over ( )}5−1)/2. This optimized ratio of the arm lengths allows the arm rotational radius to be smaller than the conventional value, and makes it possible to achieve a longer transfer distance in an equal installation area.

Abstract: A tooling fixture for rotatably positioning a plurality of workpieces includes a base and a housing carried by the base. A plurality of workpiece spindles are carried by the housing. The tooling fixture also includes a spindle drive assembly for rotatably positioning the workpiece spindles. The spindle drive assembly includes a body movable along a predetermined path of travel between first and second spaced-apart positions within the housing, and converter members for converting movement of the body along the predetermined path of travel into rotation of the workpiece spindles.

Abstract: The apparatus serves for pushing at least one of two hollow glass articles from a dead plate of a glass forming machine onto a conveyor belt. A pusher serves for this purpose, and includes a base portion and, for each glass article which is to be pushed, at least one thrust finger extending transversely to the base portion. Each thrust finger defines with the base portion a pocket for receiving the glass article. A nozzle is arranged in the region of a corner of the associated pocket. From each nozzle compressed air can be blown such that a pressure below atmospheric pressure which draws the glass article into the pocket is created between the pusher and the glass article. The compressed air is blown from the corner out between the base portion and the glass article.

Abstract: A substrate transport apparatus having a drive section, two independently movable arm assemblies connected to the drive section on a common axis of rotation, and substrate holders connected to the arm assemblies. The drive section includes three coaxial drive shafts with a pulley connected to one of the shafts. The arm assemblies are connected to respective ones of the two other shafts.

Abstract: A robot assembly including multiple independently operable robot assemblies are provided for use in semiconductor wafer processing. The robot assembly includes independent co-axial upper and lower robot assemblies adapted to handle multiple objects. The upper robot is stacked above the lower robot and the two robots are mounted concentrically to allow fast wafer transfer. Concentric drive mechanisms may also be provided for imparting rotary motion to either rotate the robot assembly or extend an extendable arm assembly into an adjacent chamber. Each robot can be either a single blade robot or a dual blade robot. Also provided is an apparatus for processing semiconductor wafers comprising a pre/post process transfer chamber housing multiple independent robot assemblies and surrounded by a plurality of pre-process chambers and post process chambers.

Abstract: A wafer handling system for a wafer processing apparatus includes a wafer load lock chamber, a wafer processing chamber and a transfer chamber operatively coupled to the wafer load lock chamber and the wafer processing chamber. The transfer chamber includes a wafer transfer mechanism comprising a transfer arm pivotably coupled to a portion of the transfer chamber which forms an axis. The transfer arm is operable to rotate about the axis to transfer a wafer between the wafer load lock chamber and the process chamber in a single axis wafer movement. The invention also includes a method of transferring a wafer to a wafer processing apparatus. The method includes loading a wafer into a wafer load lock chamber and rotating a transfer arm into the wafer load lock chamber to retrieve the wafer therein.

Abstract: A robot with a base, a first link connected to the base by a shoulder joint, and a second link connected to the first link by an elbow joint. A shoulder motor drives the shoulder joint, and an elbow motor drives the elbow joint. An upper elbow pulley is coupled to the first link. An end effector pulley coupled to the upper elbow pulley, and a dual-bladed end effector driven by the end effector pulley. The diameter of the upper elbow pulley and the diameter of the end effector pulley are related by a 1:2 ratio. Ferro-fluid seals are used to seal each joint. A static seal joins the seams of the links. Each arm link has a particle filter. The robot can communicate electrical signals through the revolute joints with a conductive slip-ring assembly. Alternately, the joint may have an inner cylinder and an outer cylinder, and a cable may be coiled between the cylinders.

Abstract: The present invention comprises a material handling device and method for transferring material from one location to another. More specifically, the present invention relates to a device for placing material onto a pallet and/or removing material from a pallet. The device has a pedestal with a working arm pivotally connected to the pedestal. The working arm is driven by a horizontal motion actuator. Connected to the working arm and horizontal motion actuator is a cam follower that is received in a cam track on a cam track plate. The cam track plate can be easily removed and replaced with another plate with the cam tracks in a different arrangement. The horizontal motion actuator moves the cam follower along the cam track, resulting in movement of the working arm along a pre-selected path. At the end of the working arm is a material holder used for grasping and releasing the material to be transferred.

Abstract: An articulated robot comprises a movable first transferring portion and a second transferring portion movably supported in relation to the movable first transferring portion by a joint portion. A workpiece is positioned at a position, where a workpiece positional deviation detecting means is located, by a hand portion formed at an end of the second transferring portion. The workpiece positional deviation detecting means detects the amount of deviation in the position of the workpiece. A positioning portion of the workpiece and a sensor portion for detecting deviations of the workpiece are formed either at the first transferring portion of the second transferring portion which form the articulated robot. A detecting operation by the sensor portion and transferring of the first and second transferring portions are enabled when the workpiece is positioned at the positioning portion of the articulated robot.

Abstract: The proposal is for a handler for the transporting of flat substrates, in particular or wafers (9) for application in the semi-conductor industry between at least two stations with a mobile planar carrying arm (6) for taking up a substrate as well as the means for layering information of the substrate in the area of a pre-given place on the carrying arm (6). The invention is based on the task of avoiding detrimental effect to the underside of a substrate during layer positioning and the generation of particles on layer positions.

Abstract: A handling robot comprises a first and a second robotic link mechanism (B1, B2) so configured as to be jointly rotatable. Each mechanism has a transfer table (8a, 8b) at its forward end and is adapted to operatively be projected and retracted in a radial direction with respect to the transfer table when operatively extended and contracted. The first and second robotic mechanisms are arranged so that the two transfer tables may located within a narrow angular range.

Abstract: An articulated robot comprises a movable first transferring portion and a second transferring portion movably supported in relation to the movable first transferring portion by a joint portion. A workpiece is positioned at a position, where a workpiece positional deviation detecting means is located, by a hand portion formed at an end of the second transferring portion. The workpiece positional deviation detecting means detects the amount of deviation in the position of the workpiece. A positioning portion of the workpiece and a sensor portion for detecting deviations of the workpiece are formed either at the first transferring portion of the second transferring portion which form the articulated robot. A detecting operation by the sensor portion and transferring of the first and second transferring portions are enabled when the workpiece is positioned at the positioning portion of the articulated robot.

Abstract: A substrate transport apparatus having a drive section, two independently movable arm assemblies connected to the drive section on a common axis of rotation, and substrate holders connected to the arm assemblies. The drive section includes three coaxial drive shafts with a pulley connected to one of the shafts. The arm assemblies are connected to respective ones of the two other shafts.

Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.