Abstract: A robot has a robot arm, a support structure, and a movable platform. The platform includes a cantilevered member coupled to a guide of the support structure such that motion of the platform is directed along a first direction. The robot further includes first and second timing belts having portions that extend along the first direction and that are disposed on opposite sides of the cantilevered member, and first and second shafts movable with the movable platform. The shafts are coupled to the respective timing belts, to the robot arm such that rotation of the first shaft imparts angular motion to the robot arm and rotation of the second shaft imparts radial motion. The robot also includes a third timing belt to which the platform is coupled and by which it is moved. Motors are provided that impart movement to the timing belts.

Abstract: A percussive digging tool attachment for a small robotic platform employs a percussor module for applying percussive impulses of relatively low impact at relatively high frequency to an attached digging tool to dig into or break up soil and rocks. By using low-impact, high-frequency percussive forces, it reduces the reaction loads on the small robotic platform while providing increased capability.

Abstract: A construction machine including: a lower propelling body; an upper slewing body having a rear region with an engine room; a slewing device for slewing the upper slewing body; and a platform cover. The slewing device includes a slewing electric motor having an electric-motor output shaft, and a speed reducer having a speed-reducer output shaft rotated more slowly than the electric-motor output shaft, the speed reducer installed forward of the engine room such that the speed-reducer output shaft points downward, the slewing electric motor disposed just above the speed reducer. The platform cover is provided on a top of the slewing electric motor, having an upper surface serving as a platform for maintenance of equipment in the engine room. The platform cover is lower than the engine cover and adjacent to a front side of the engine room.

Abstract: An industrial robot including a first arm which has a first arm portion, and a second arm portion supported by the first arm portion. The industrial robot also includes a second arm which has a third arm portion and a fourth arm portion supported by the third arm portion. The first arm and the second arm can be expanded/retracted independently. A turning center of the first arm portion and a turning center of the third arm portion are placed coaxially. The first arm and the second arm are constructed so as to be almost line-symmetric with respect to an imaginary line under the condition that the first arm and the second arm are retracted. The first arm portion, the third arm portion, the second arm portion, and the fourth arm portion are placed in this order in a vertical direction.

Abstract: A substrate transport apparatus comprises a substrate holder capable of holding a substrate, a link unit which extends/retracts the substrate holder, a driving unit which generates a driving force to operate the link unit, a guide bar provided to one of the substrate holder and the link unit; and a support unit which is provided to the other of the substrate holder and the link unit, and slidably supports the guide bar when the substrate holder moves by the operation of the link unit.

Abstract: A loader assembly for a TEM machine having a retractable arm that is moveable between a retracted position and an extended position. A hoop portion of the retractable arm also moves between the retracted position and the extended position. A lower closure for holding a part to be processed in the TEM machine is removably positioned in the hoop portion. A ram piston of the TEM machine is movable between a load position and a process position. When the ram piston moves from a load position to a process position the ram piston contacts the lower closure and extends through the hoop of the retractable arm to move the lower closure to the process position. A thermal chamber receives the lower closure when the ram piston moves to the process position.

Abstract: A robot assembly for transferring substrates includes a central tube assembly oriented along a central axis, perpendicular to a substrate transfer plane, and having an inner surface that forms part of a first enclosure at a first pressure, and an outer surface that forms part of a second enclosure at a second, different pressure. The robot assembly further includes a transfer robot which itself includes multiple rotor assemblies, each configured to rotate parallel to the substrate transfer plane. The various rotor assemblies are organized in pairs, each pair having one rotor fitted with a telescoping support arm/end effector arrangement to support substrates thereon, and the other rotor fitted with inner and outer actuator arms that cooperate to effect radial movement of the corresponding end effector of the paired rotor assembly. Each rotor is controlled to effect the transfer of substrates within a wafer processing system asynchronously and at differing heights.

Abstract: An umbilical member motion limiting device is provided on a robot which has a forearm, a wrist portion, an operating tool attached to the end of the wrist portion, and the umbilical member connected to the operating tool through the forearm, for limiting the motion of the umbilical member corresponding to the motion of the robot. The motion limiting device comprises a swing portion attached to the wrist portion so as to swing around a swing axis and a limiting portion arranged on the swing portion for limiting the motion of the umbilical member. Thus, the motion limiting device can minimize interference due to surplus length of the umbilical member and avoid contact of the umbilical member with external equipment.

Abstract: A transfer robot that is safe and produced at low cost is provided. A transfer robot (100) includes a base (7) fixable to a floor surface, a link mechanism provided on the base (7), an arm rotatably attached to the base (7) by the link mechanism, casters attached to a lower surface of the arm and used to move the arm, and a holding section provided on an upper surface of the arm to hold a carriage (13). The link mechanism includes a motor, a first reduction mechanism rotated by the motor, and a second reduction mechanism coupled to the first reduction mechanism and rotating the arm.

Abstract: The present invention provides methods, apparatus, and systems for a wrist assembly including a housing having a cap and a bottom, at least one pivot at least partially enclosed in the housing and adapted to be coupled to a robot arm, and a belt coupled to the pivot and adapted to rotate the pivot about a bearing. The bottom of the housing is adapted to reflect heat away from the at least one pivot and the bearing.

Abstract: Methods correcting wafer position error are provided. The methods involve measuring wafer position error on a robot, e.g. a dual side-by-side end effector robot, during transfer to an intermediate station. This measurement data is then used by a second robot to perform wafer pick moves from the intermediate station with corrections to center the wafer. Wafer position correction may be performed at only one location during the transfer process. Also provided are systems and apparatuses for transferring wafers using an intermediate station.

Abstract: A die detachment apparatus for detaching a die from an adhesive tape on which the die is mounted includes a pick-and-place tool movable along a pick-up axis for picking up the die from the adhesive tape and a die ejector comprising an ejector shaft including an ejector pin. The ejector pin is movable parallel to the pick-up axis to raise the die from the adhesive tape to facilitate pick-up of the die by the pick-and-place tool. At least one movable table to which the ejector shaft is operatively coupled is actuable by at least one piezoelectric actuator which is connected to the movable table via a flexure. Actuation by the piezoelectric actuator forces the movable table and ejector shaft to move in directions which are perpendicular to the pick-up axis for alignment of the ejector pin with the die pick-up tool along the pick-up axis.

Abstract: A pallet exchanger capable of providing a sufficient operation space on an operator's access side, for example, in front of a machining space, without increasing the size of the exchanger is provided. An arm is formed in a chevron shape in a plane view including two forks as pallet supporting parts, which are arranged radially from a turning spindle with less than 180° angle between them such as 120° . Further, by means of a table, the arm is slidable between a stand-by position in front of a machining space and a retreating position laterally separated by a predetermined distance from the stand-by position in a horizontal position. By moving the arm on the retreating position side, an operation space can be provided in front of the machining space.

Abstract: A media transportation mechanism and a media processing device enabling carrying media without transportation errors or picking errors by accurately detecting if media is present. A media transportation mechanism 31 has a gripping mechanism 130 for holding media and a media detection mechanism 200 for detecting media gripped by the gripping mechanism 130 positioned on a transportation arm 36 that can move up and down. The media detection mechanism 200 has a detection lever 201 that is pivotably supported on the arm base 125a of the transportation arm 36 and is displaced from a media-not-detected position in contact with the arm base 125a to a media-detected position separated from the arm base 125a when the detection lever 201 contacts the media, a detector 202 that detects displacement of the detection lever 201 to the media-detected position, and an attraction unit including a magnet 203 and steel plate 204 that pull the arm base 125a and detection lever 201 together using magnetic force.

Abstract: A linear transfer mechanism includes a guide member, a transfer carriage movable along a horizontal linear transfer path provided on the guide member, and a drive mechanism provided with a drive pulley and an output belt wound around the drive pulley for reciprocating movement in a reciprocating movement section in parallel to the transfer path. The transfer mechanism also includes a drive source for driving the drive pulley. The transfer carriage is connected with the output belt of the drive mechanism by a connecting member. Both the drive mechanism and the drive source are supported by the guide member.

Abstract: Apparatus for a bottle forming machine; wherein the apparatus comprises i) a tong arm assembly for gripping a formed bottle and for transferring it from a first location to a second location through a swinging action about a shaft, and ii) a drive that drives said swinging action; characterised in that the apparatus further comprises the following: a) a release mechanism that can disengage a tong head assembly from the drive when a collision occurs; and/or b) a tensioning device that automatically maintains tension in a drive belt or chain when the assembly is in use.

Abstract: A ball bearing having external surfaces coated with ceramic materials is provided. The raceways of the ball bearing may advantageously be formed of metal such as stainless steel. The ceramic coating acts as an insulator increasing the resistance of the ball bearing to heat within the ball bearing environment. The balls within the raceway of the ball bearing may advantageously be coated with a lubricant to decrease friction in the ball bearing because the insulating ceramic coating prevents the environmental heat from causing the degradation of the lubricant.

Abstract: Provided is a substrate transfer apparatus which can perform stable and highly accurate transfer without making a configuration complicated. A substrate transfer apparatus according to the present invention includes a multijoint arm whose one end is arranged on a base and the other end is connected to a hand for supporting a substrate, a linear guide for guiding a rectilinear movement of the hand, and a belt driving mechanism for moving the hand along a guide rail of the linear guide. The substrate transfer apparatus having such a configuration supports a load acting on the hand by the multijoint arm and ensures rectilinear transfer performance of the hand by the linear guide. Therefore, since a special mechanism for passing the substrate through a dead point is not required, the configuration is prevented from becoming complicated. Furthermore, since the load does not directly act on the linear guide, high transfer accuracy can be obtained.

Abstract: A transfer apparatus includes a stationary base, a swivel supported by the stationary base to be rotatable about a vertical axis, a guide member mounted on the swivel, a linear movement mechanism supported by the swivel or the guide member, a hand supported by the linear movement mechanism and moved by the linear movement mechanism for carrying a work along a straight and horizontal travel stroke, a drive source disposed inside the stationary base, and a transmission shaft disposed along the vertical axis to transmit drive power from the drive source to the linear movement mechanism. The swivel includes an upper section and a lower section detachably connected with each other. The upper section has a connecting member supported by the upper section to be rotatable about the vertical axis. The connecting member has a detachable engagement member for engagement with the transmission shaft from the above.

Abstract: In a first aspect, a first mainframe is provided for use during semiconductor device manufacturing. The first mainframe includes (1) a sidewall that defines a central transfer region adapted to house a robot; (2) a plurality of facets formed on the sidewall, each adapted to couple to a process chamber; and (3) an extended facet formed on the sidewall that allows the mainframe to be coupled to at least four full-sized process chambers while providing service access to the mainframe. Numerous other aspects are provided.

Abstract: The present invention shows a transport system for the transport of bulk goods, in particular of concrete, comprising a transport belt for the conveying of the bulk goods to an unloading point, wherein a rotary arm is provided which is rotatable about a vertical axis of rotation and which transports bulk goods to its free end and unloads them there. In this respect, the rotary arm is supported at a holder which is or can be arranged at a stationary support column such that the axis of rotation of the rotary arm extends eccentrically to the support column, with the rotary arm advantageously being arranged next to the support column, viewed from above, in at least one rotational position. The invention furthermore shows a corresponding support column as well as a method for the rebuilding of the transport system.

Abstract: A substrate transfer apparatus for loading and unloading substrates in a reaction chamber, includes: an arm having a distal end which is laterally movable in a straight line direction; and end-effectors for loading and unloading substrates in a reaction chamber, which include a lower end-effector and an upper end-effector. One of the lower end-effector or the upper end-effector is movably coupled to the arm at a distal end of the arm, and the other end-effector is fixed to the movably coupled end-effector. The fixed end-effector is fixed to the movably coupled end-effector.

Abstract: A transfer apparatus includes a stationary base, a swivel rotatable around a vertical rotation axis, a linear movement mechanism supported by the swivel, a hand supported by the linear movement mechanism for transferring a work along a horizontal path, a driving power source in the stationary base, and a transmission shaft arranged along the rotation axis for transmitting driving force from the driving power source to the linear movement mechanism. The linear movement mechanism includes a driving mechanism and a guide rail for movably supporting the hand. The driving mechanism has a plurality of pulleys, including a driving pulley supported rotatably around a horizontal axis, and an output belt wound around the plurality of pulleys for reciprocal movement within a predetermined section extending parallel to the movement path. The hand is connected to the output belt via a connection member.

Abstract: An end effector assembly for a substrate transfer robot is described. The end effector assembly includes a robot wrist. At least one end effector is secured to the robot wrist. The end effector has a fixed end, a free end, a load-supporting surface and a tension member. The fixed end is coupled with the robot wrist. The free end is disposed opposite to the fixed end. The load-supporting surface is coupled between the fixed end and the free end. The tension member is coupled with the load-supporting surface between the fixed end and the free end.

Abstract: A transport arm of the present disclosure includes a pneumatic cylinder and an acting arm. The pneumatic cylinder includes a main body, a piston rod, a piston and a guiding pin. A chamber is defined in the main body. The piston rod is partially received in the chamber of the main body. The piston rod defines a guiding groove therein, and a section of the guiding groove is slanted relative to an axis of the piston rod. The piston is fixed to the piston rod and partitions the chamber of the main body into two chambers. The guiding pin is fixed to the main body, and an end of the guiding pin adjacent to the guiding groove of the piston rod moveably engages in the guiding groove. The acting arm is fixed to an end of the piston rod opposite to the piston.

Abstract: A substrate processing system including a load port module configured to hold at least one substrate container for storing and transporting substrates, a substrate processing chamber, an isolatable transfer chamber capable of holding an isolated atmosphere therein configured to couple the substrate processing chamber and the load port module, and a substrate transport mounted at least partially within the transfer chamber having a drive section fixed to the transfer chamber and having a SCARA arm configured to support at least one substrate, the SCARA arm being configured to transport the at least one substrate between the at least one substrate container and the processing chamber with but one touch of the at least one substrate, wherein the SCARA arm comprises a first arm link, a second arm link, and at least one end effector serially pivotally coupled to each other, where the first and second arm links have unequal lengths.

Abstract: A wafer transfer apparatus capable of improving working efficiency by simultaneously and selectively transferring a desired amount of wafers to shorten a wafer transfer time. The wafer transfer apparatus includes a plurality of wafer support members capable of supporting and transferring at least one wafer. The wafer transfer apparatus also includes a moving device connected to the wafer support members so as to move the wafer support members corresponding to a number of wafers to be transferred in such a manner that the wafer support members simultaneously transfer at least one wafer.

Abstract: A robot assembly and a method of installing a collar on a robot assembly. The robot assembly comprises a support shaft, an arm extending away from the shaft, a split connecting collar pivotally mounted on the support shaft and connected to the arm to connect the arm to the support shaft, and a tool connected to the arm for engaging the molded items and for removing the molded items from the molding machine. Two embodiments of the split collar are disclosed. The first is a multiple piece component, and the second is a single slotted body. Generally, both of these collars are designed such that installation or removal does not require that the shaft be pushed linearly through the diameter of the collar. Rather, the installation or removal of the collar is performed by moving the collar, or the collar components, away from the shaft, in a direction perpendicular to the shaft centerline instead of along and over the shaft diameter to the endpoint.

Abstract: A loadlock chamber assembly includes a loadlock chamber, a sub-chamber removably attached to the loadlock chamber and a first robot arm having a primary pivot axis within the sub-chamber, wherein the first robot arm can move a substrate from a position approximately in a center of the loadlock chamber to a position outside the loadlock chamber.

Abstract: A conveying arm of the invention includes a first pivotable shaft connected to a first arm which is also pivotably connected to a third arm having an intermediate pivotable portion. The third arm is also pivotably connected to a fifth arm which is also pivotably connected to a seventh arm which has a holding portion for an object to be conveyed. The conveying arm also includes a second pivotable shaft connected to a second arm which is also pivotably connected to a fourth arm having an intermediate pivotable portion. The fourth arm is also pivotably connected to a sixth arm which is also pivotably connected to the seventh arm. With respect to both the third and fourth arms, a line linking one-side end portion to an intermediate pivotable portion is substantially perpendicular to a line linking the other-side end portion to the intermediate pivotable portion.

Abstract: A carrying device carries a semiconductor wafer above a base disposed in a transfer chamber or the like. The carrying device comprises pick for holding the object, a main arm mechanism adapted to bend and stretch in a horizontal operating plane, and an auxiliary arm mechanism adapted to bend and stretch in a vertical operating plane. The main arm mechanism includes a proximal end supported by the base, and distal end connected to the pick, respectively. The auxiliary arm mechanism includes a main arm and an arm linkage. The main arm has a proximal end supported by the base, and distal end. The arm linkage has a proximal end connected to the distal end of the main arm and a distal end connected to the pick.

Abstract: A linear motion assembly is provided as part of a robot for processing substrates in a vacuum. An effector assembly is mounted for linear movement on linear bearings. The end effectors are driven by cables which in turn are driven by a drive which is positioned in an adjacent pressure vessel maintained at atmospheric pressure.

Abstract: A conveying device in which a conveying arm assembly can be quickly set in a conveying position and can be rapidly stabilized in the conveying position includes a conveying arm assembly, a fixed shaft, at least one set of hollow operating shafts which are necessary for controlling an operation of the conveying arm assembly, and a motor provided between the fixed shaft and each of the operating shafts. The one set of operating shafts are attached to the fixed shaft such that they can be rotated coaxially with respect to the fixed shaft outside fixed shaft and are arranged in an axial direction of the fixed shaft. The conveying arm assembly is attached to an end portion of the operating shaft close to the ended of the fixed shaft. The motor comprises a stator provided on the fixed shaft and a rotor provided on each of the operating shafts such that it is opposed to the stator on an outer peripheral side of the stator.

Abstract: A robot is disclosed in which load torque imposed on motors is reduced and therefore small-sized motors can be used. In the robot, an arm member, a first link, a second link and a third link constitute a parallel linkage, and the first link and the third link are coaxially pivotally supported on a base. With a pivotal shaft for pivotally connecting the second link and the third link, one end of a fourth link having shorter link length than the link length of the third link is pivotally connected to the second and third links and one end of a fifth link having the same link length as that of the fourth link is pivotally connected to the other end of the fourth link. The other end of the fifth link is pivotally supported on the base with a pivotal shaft to which the rotary shaft of the motor is coupled, so that the fifth link can move according to the rotation of the motor.

Abstract: According to the method, single compact discs (1) are removed from a magazine (10) by a pick up group (14) which is carried by a drum (13). The drum (13) rotates continuously on a vertical axis. The pick up group (14) is operated to move in a combined translation motion along a vertical axis and along a circumference around the drum (13), so as to move in a direction opposite to the movement direction imposed by said drum (13), from a first remote position, which is situated forward with respect to a median plane (M), to a close disk taking position. The combined translation motion of the pick up group (14) is continued, so as to bring the removed compact disc (1) to a second remote position. The removed compact disc (1) is then transferred to a conveying line (5) by a corresponding combined translation motion of the pick up group (14) with respect to the movement direction imposed by the drum (13), from a remote forward position to a close position, in which the compact disc (1) is released.

Abstract: A loadlock chamber assembly includes a loadlock chamber, a sub-chamber removably attached to the loadlock chamber and a first robot arm having a primary pivot axis within the sub-chamber, wherein the first robot arm can move a substrate from a position approximately in a center of the loadlock chamber to a position outside the loadlock chamber.

Abstract: A method for portable lift, support, and/or installation is disclosed which permits and enables these various functions without the need for external crane/lift machinery. The method includes attaching a removable swingarm assembly around an object extension of a structure, inserting a swingarm into a swingarm sleeve on the removable swingarm assembly, positioning the swingarm wherein an object support assembly on the swingarm is adjacent a removable object, attaching the object support assembly to the removable object, disconnecting the removable object from the structure, and pivoting the swingarm causing the removable object to be moved away from the structure.

Abstract: A mechanical arm device for carrying and detecting a wafer comprises a seat and an arm mechanism coupled to seat and including an elbow, a forearm, and a sensor wherein elbow is controlled by seat, forearm is secured to one end of elbow and includes a front fork, and sensor is secured to a bottom of forearm at its free end, extended from fork, and electrically coupled to seat through a signal cord. In operation, the arm device carries wafer for feeding into a wafer container for measuring wafer by sensor in a non-contact manner. It ensures a highly correct horizontal level and height measuring of wafer.

Abstract: A rotating handler arm is mounted on an upright column, and has electrical components thereon, which require powering. The power is carried to the rotating arm by a multi conductor flat cable that is supported on a platform adjacent to the rotating arm in a coil. The cable clamped to the platform as well as to the rotating member. The coil is made of a sufficient number of individual coil sections so that the coil will tighten as the rotating arm rotates in a first direction, and loosen as the rotating arm rotates in a second direction to avoid the need for slip rings or other complex electrical transmission elements.

Abstract: An edge gripping device grips and ungrips a substrate, such as a semiconductor wafer. A blade extends in a distal direction from a base of the device. At least one distal contact member is provided at the tip of the blade. Two proximal lever arms are pivotally coupled for synchronized, oppositely directed rotation to the base. Each lever arm has at least one proximal contact member at an outer end. A biasing member is coupled to the two proximal lever arms and to an actuator to effect pivoting movement of the lever arms. The pivoting motion moves the ends of the arms generally radially toward and away from the center of the substrate to be gripped or ungripped, thereby minimizing sliding of the substrate. The biasing member is biased to retain the lever arms in a closed position in the event of a power failure. Ramps are provided next to each contact member. The contact members and ramps are profiled to minimize the zone of the substrate edge that is contacted.

Abstract: A conveying arm of the invention includes a first pivotable shaft connected to a first arm which is also pivotably connected to a third arm having an intermediate pivotable portion. The third arm is also pivotably connected to a fifth arm which is also pivotably connected to a seventh arm which has a holding portion for an object to be conveyed. The conveying arm also includes a second pivotable shaft connected to a second arm which is also pivotably connected to a fourth arm having an intermediate pivotable portion. The fourth arm is also pivotably connected to a sixth arm which is also pivotably connected to the seventh arm. With respect to both the third and fourth arms, a line linking one-side end portion to an intermediate pivotable portion is substantially perpendicular to a line linking the other-side end portion to the intermediate pivotable portion.

Abstract: A conveying device in which a conveying arm assembly can be quickly set in a conveying position and can be rapidly stabilized in the conveying position includes a conveying arm assembly, a fixed shaft, at least one set of hollow operating shafts which are necessary for controlling an operation of the conveying arm assembly, and a motor provided between the fixed shaft and each of the operating shafts. The one set of operating shafts are attached to the fixed shaft such that they can be rotated coaxially with respect to the fixed shaft outside fixed shaft and are arranged in an axial direction of the fixed shaft. The conveying arm assembly is attached to an end portion of the operating shaft close to the ended of the fixed shaft. The motor comprises a stator provided on the fixed shaft and a rotor provided on each of the operating shafts such that it is opposed to the stator on an outer peripheral side of the stator.

Abstract: An edge gripping device for a robot arm grips and ungrips substrates, such as semiconductor wafers. A base is fixed to an end of the robot arm. A blade, having a distal contact location thereon, and a pusher bar, having preferably two proximal contact locations thereon, are movably mounted to the base via a linkage mechanism. The linkage mechanism includes two four-bar linkages. The first four-bar linkage has a stationary link and three movable links connected in a parallelogram configuration. The pusher bar is fixed to one of the movable links of the first linkage for movement therewith. The second four-bar linkage has a stationary link and three movable links connected in a trapezoidal configuration. The blade is fixed to one of the movable links of the second linkage for movement therewith. The two linkages share a stationary pivot point.

Abstract: The present invention comprises a material handling device and method for transferring material from one location to another. More specifically, the present invention relates to a device for placing material onto a pallet and/or removing material from a pallet. The device has a pedestal with a working arm pivotally connected to the pedestal. The working arm is driven by a horizontal motion actuator. Connected to the working arm and horizontal motion actuator is a cam follower that is received in a cam track on a cam track plate. The cam track plate can be easily removed and replaced with another plate with the cam tracks in a different arrangement. The horizontal motion actuator moves the cam follower along the cam track, resulting in movement of the working arm along a pre-selected path. At the end of the working arm is a material holder used for grasping and releasing the material to be transferred.

Abstract: An alignment tool, method and system are provided for aligning a robot blade in a workpiece handling system, in which the tool comprises a frame or fixture adapted to be supported by a transfer chamber support surface or other support surface in the system, in which the frame has one or more non-contact distance sensors positioned to measure the distance of a workpiece or robot blade from the sensor or a predetermined reference point or surface. In one embodiment, the frame is used to align a robot blade relative to a robot support alignment surface in a robot chamber. In another embodiment, the frame emulates a workpiece cassette and the distance sensors provide an output to align the robot blade to a cassette support alignment surface. As a consequence, accidental scratching and breakage of workpieces such as semiconductor wafers and display substrates may be reduced or eliminated.

Abstract: A semiconductor processing system includes a transfer apparatus for transferring a wafer. The transfer apparatus has a pick arm member with wings. The reference distances between the wafer located at the normal position and the wings are stored in a memory of a CPU. Detection ranges of line sensors are set in a standby position in front of a process chamber in order to detect the distances between the wafer and the wings. In the CPU, the amount of positional shift of the wafer is detected based on the reference distances and the detected distances.

Abstract: The present invention provides a load lock having a vertically movable lid, an internal robot, and a wafer lifting mechanism and further provides a method of transferring wafers through a load lock directly to a process chamber. An atmospheric transfer robot shuttles wafers to and from the lifting mechanism while the lid is raised and the lifting mechanism then transfers wafers to and from the internal robot. The load lock is directly attached to a process chamber and communicates therewith via a slit valve which is selectively opened and closed. The internal robot is extended and retracted through the slit valve aperture in order to transfer a wafer to and from the process chamber. In one embodiment the lifting mechanism is comprised of vertically movable lift pins disposed through the bottom of the load lock. In another embodiment the lifting mechanism includes two pairs of lift forks disposed through the cover of the load lock.

Abstract: Bottle extractor for hollow glass moulding machines, of the type that have bottle handling fingers comprising, a head joined to a fixed position spin axis and which includes at least one fluidic action cylinder, whose rod is joined to the fingers, the head having a mobile head supporting the fluidic action cylinder(s); a head base joined to the fixed position spin axis and nut-screw means to move the mobile head with respect to the head base.

Abstract: A system for recycling the components dismantled from a disused automobile, which includes a main body having a control part, front and rear glass removers connected with the main body for dismantling the glass from the body of the disused automobile, two molding removal systems connected to the glass remover for removing the molding which connects the glass to the body of the automobile, and a moving apparatus for removing the molding which connects the glass to the body of the automobile, and a moving apparatus for moving the main body in all directions and controlling the position of the main body to the automobile. The windshield glass and the rear glass are automatically dismantled from the disused automobile before compression of the body of the automobile.