Of Charging Load-holding Or -supporting Element From Source And Transporting Element To Working, Treating, Or Inspecting Station Patents (Class 414/806)
  • Publication number: 20130280017
    Abstract: A substrate processing system 10 includes a multiple number of substrate processing units 40A and 40B having substrate processing modules 40a and 40b, respectively; substrate buffers 30a and 30b which respectively correspond to the substrate processing units 40A and 40B; and a first substrate transfer device 50 configured to take out substrates W from substrate receptacles 20 on substrate mounting tables 25 into substrate buffers 30a and 30b. When a second substrate transfer device 60b of the substrate processing unit 40B is broken down, a substrate W remaining in the substrate buffer 30b corresponding to the substrate processing unit 40B is delivered into the substrate buffer 30a corresponding to the substrate processing unit 40A by a substrate delivery device 35.
    Type: Application
    Filed: April 17, 2013
    Publication date: October 24, 2013
    Applicant: Tokyo Electron Limited
    Inventor: Tomohiro Kaneko
  • Publication number: 20130272824
    Abstract: A substrate transfer device that transfers a substrate by allowing a substrate opening formed on a front surface of a substrate transfer vessel to face an opening formed on a partition wall from one side of the partition wall and separating a cover body of the substrate transfer vessel from the other side of the partition wall includes a door configured to open and close the opening from the other side of the partition wall; a reciprocating unit configured to straightly move the door back and forth between a first position where the opening is closed and a second position away from the first position toward the other side of the partition wall; and a rotating unit configured to rotate the door around a rotation axis in a straightly moving direction of the door between the second position and a third position deviated from a region facing the opening.
    Type: Application
    Filed: April 10, 2013
    Publication date: October 17, 2013
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Naruaki Iida, Akihiro Teramoto
  • Publication number: 20130269608
    Abstract: The present invention relates to an apparatus, method, a reaction chamber and a use of a reaction chamber for processing a surface of a substrate by subjecting the surface of a substrate to successive surface reactions of at least a first precursor and a second precursor. The apparatus includes a vacuum chamber; a detachable reaction chamber arranged to be installed inside the vacuum chamber, and inside which the substrate is positioned during processing and a precursor system for supplying the at least first and second precursors into the action chamber and for discharging the at least first and second precursors from the reaction chamber. According to the present invention the reaction chamber is provided as a gastight vessel.
    Type: Application
    Filed: January 24, 2012
    Publication date: October 17, 2013
    Applicant: BENEQ OY
    Inventors: Mikko Soderlund, Pekka Soininen, Jarmo Maula
  • Patent number: 8560108
    Abstract: Even when a module constituting a multi-module becomes an unavailable module, transfer of substrates can be promptly performed, while restricting generation of inferior products. When a destination module of a multi-module becomes unavailable before a substrate is transferred to the destination module, a destination of the substrate is changed to a module to which a substrate subsequent to the substrate is to be loaded. Upon generation of an unavailable module, before the transfer unit accesses the module on an upstream end of the transfer cycle, the transfer cycle proceeds until a precedent substrate becomes ready to be unloaded from the changed destination module. Alternatively, upon generation of an unavailable module, when the transfer unit is located on an upstream side of the unavailable module in the transfer cycle, the transfer operation of the transfer unit is made standby until a precedent substrate becomes ready to be unloaded in the changed destination module.
    Type: Grant
    Filed: December 17, 2010
    Date of Patent: October 15, 2013
    Assignee: Tokyo Electron Limited
    Inventors: Kenichirou Matsuyama, Takeshi Matsumoto
  • Publication number: 20130266406
    Abstract: A feed mechanism (1) to feed objects for insertion into tobacco industry products comprises a rotary member for receiving objects, the rotary member (4) having a plurality of channels (9), each channel (9) being adapted so that in use objects assemble in a row in the channel (9) which rotates with the rotary member (4), each channel (9) having an outlet (13) for dispensing an object from the channel (9); and a pneumatic mechanism (5) configured to hold an object in a row prior to the object being dispensed.
    Type: Application
    Filed: November 30, 2011
    Publication date: October 10, 2013
    Applicant: Tobacco Research and Development Institute (Proprietary) Limited
    Inventor: Gerhard Le Roux
  • Patent number: 8549735
    Abstract: A challenge to be met by the present invention is to provide a component mounting device, a component mounting system, and a component mounting method that make it possible to correctly position a substrate at a working location and mount components on the substrate even when components mounted on the substrate project outside from an end of the substrate in a direction parallel to a substrate conveyance path. When a front end portion (PbT) of a substrate (Pb) conveyed by a substrate conveyance path (13) is detected to have reached inspection light (L), operation of the substrate conveyance path (13) is immediately halted.
    Type: Grant
    Filed: October 20, 2010
    Date of Patent: October 8, 2013
    Assignee: Panasonic Corporation
    Inventors: Hideki Sumi, Yoshiaki Awata
  • Publication number: 20130255407
    Abstract: Systems and methods to control particle generation in a reticle inspection system are presented. The number of particles added to a reticle during an entire load-inspect-unload sequence of a reticle inspection system is reduced by performing all reticle contact events in a controlled, flowing air environment. In one embodiment, the reticle is fixed to a carrier by clamping outside of the vacuum environment, and the carrier, rather than the reticle, is coupled to the reticle stage of the inspection system. In this manner, the high levels of back-side particulation associated with electrostatic chucking are avoided. In addition, the carrier is configured to be coupled to the reticle stage in any of four different orientations separated by ninety degrees.
    Type: Application
    Filed: March 8, 2013
    Publication date: October 3, 2013
    Inventors: Francis Charles Chilese, Ulrich Pohlmann, Detlef Wolter, Joseph Fleming Walsh
  • Publication number: 20130259635
    Abstract: A laboratory liquid handling system includes a pipetting module, a lab member, and a drive system. The pipetting module includes a pipettor including a pipettor shaft and a pipetting tip extending from an end of the pipettor shaft. The lab member includes a body and at least one adapter structure including an interlock feature configured to laterally receive and interlock with the pipettor shaft to releasably secure the lab member to the pipettor shaft. The drive system is operable to: selectively move the pipettor shaft laterally relative to the interlock structure to engage the pipettor shaft with the interlock structure to secure the lab member to the pipetting module; move the pipetting module to transport the lab member secured thereto; and selectively move the pipettor shaft laterally relative to the interlock structure to disengage the pipettor shaft from the interlock structure to thereby release the lab member.
    Type: Application
    Filed: March 14, 2013
    Publication date: October 3, 2013
    Applicant: PerkinElmer Health Sciences, Inc.
    Inventors: Eugene S. Maslana, Karen A. McElroy, Dennis F. Malkowski, James W. Sim
  • Publication number: 20130251479
    Abstract: A vending machine, In a method and apparatus for handling a package in an automated dispensary, a package is positioned in an inspection station of the dispensary. Images are captured of the package and are read to identify data on labels or on the package itself. The data is encoded as source data in an identifying label which is applied to the package and is used subsequently in handling the package for dispensing and other inventory management procedures.
    Type: Application
    Filed: September 10, 2012
    Publication date: September 26, 2013
    Applicant: PCAS Patient Care Automation Services Inc.
    Inventors: Donald Waugh, Richard Panetta, Peter Suma, Leigh Pauls
  • Publication number: 20130236274
    Abstract: A method, device, and apparatus is provided for detecting moisture and/or electrically conductive remains on a wafer after the wafer is removed from a drying chamber of a processing tool that includes wet clean processing. Embodiments include fixing a wafer to an endeffector between a processing chamber and a FOUP, moving the wafer from the processing chamber toward the FOUP, detecting moisture and/or electrically conductive remains on the wafer, and delivering the wafer to the FOUP, if no moisture and/or electrically conductive remains are detected, or delivering the wafer to a buffer station, if moisture and/or electrically conductive remains are detected.
    Type: Application
    Filed: March 8, 2012
    Publication date: September 12, 2013
    Applicant: GLOBALFOUNDRIES Inc.
    Inventors: Thomas PAPPRITZ, Lutz Claussen
  • Publication number: 20130236838
    Abstract: A substrate processing apparatus is disclosed equipped with a transfer mechanism that transfers a substrate processed at a processing block to a carrier so that the increase of the number of transfer process is suppressed, improving the processing efficiency. The substrate processing apparatus is configured in such a way that, when a second-transfer module houses at least one substrate and a carrier that can house the at least one substrate is not placed in a carrier-placement unit, the at least one substrate is transferred to a buffer module. When the second transfer module houses at least one substrate and the carrier that can house the at least one substrate is placed in the carrier-placement unit, the at least one substrate is transferred to the carrier, regardless of whether or not a substrate is being transferred from the buffer module to the carrier.
    Type: Application
    Filed: April 15, 2013
    Publication date: September 12, 2013
    Applicant: Tokyo Electron Limited
    Inventors: Kenichirou MATSUYAMA, Tomohiro KANEKO
  • Patent number: 8529314
    Abstract: When both surfaces of a wafer are sequentially subjected to processing, the wafer is made to be surely supported so that a predetermined processing and transporting can be performed. On one surface of the wafer a first fixing jig (3a) is fixed in close contact. After having performed a predetermined processing to the opposite surface of the wafer, a second fixing jig (3b) is fixed in close contact with the opposite surface of the wafer. The first fixing jig (3a) is removed and the wafer is handed over to the second fixing jig (3b). Each of the fixing jigs is made up of a jig main body (31), and a close contact layer (32) which is disposed on one surface thereof. The jig main body has a plurality of supporting projections (33) to support the close contact layer, and a side wall (34). The close contact layer is adhered to an end surface of the side wall to thereby define a partitioned space (35) enclosed by the side wall, between the close contact layer and the jig main body.
    Type: Grant
    Filed: July 31, 2008
    Date of Patent: September 10, 2013
    Assignees: Lintec Corporation, Shin-Etsu Polymer Co., Ltd.
    Inventors: Takeshi Segawa, Kiyofumi Tanaka
  • Patent number: 8528225
    Abstract: A method and apparatus for the continuous sublimation of a substance includes cascading a material containing a substance capable of sublimation, such as water, between a plurality of trays vertically stacked within a processing zone provided within a processing chamber. A substantially atmospheric environment is maintained within the processing zone at a temperature whereby the substance sublimes forming a sublimate within the environment. The environment containing the sublimate is contacted with a drying agent such as a desiccant to maintain the environment whereby the substance sublimes at substantially atmospheric pressure and at the controlled temperature.
    Type: Grant
    Filed: November 19, 2010
    Date of Patent: September 10, 2013
    Assignee: Wyssmont Company Inc.
    Inventor: Edward Weisselberg
  • Patent number: 8523510
    Abstract: An apparatus for transferring and securing a substrate is shown. A pressure source is provided that is adapted to provide positive and negative pressure. A vacuum chuck is provided having a top side with a plurality of vacuum chuck portals formed therein. Each vacuum chuck portal is in fluid communication with the pressure source. The substrate is secured to the top side of the vacuum chuck when the pressure source provides negative pressure to the vacuum chuck portals. An intermediate member that selectively cooperates with the vacuum chuck to support and transfer the substrate between the vacuum chuck and the intermediate member is provided. The intermediate member has a plurality of receiving spaces and a plurality of transfer members. The receiving spaces and transfer members are adjacent to one another in an alternating pattern, and each transfer member has a top side with a plurality of transfer member portals formed therein.
    Type: Grant
    Filed: July 11, 2011
    Date of Patent: September 3, 2013
    Assignee: FAS Holdings Group, LLC
    Inventors: Scott Snodgrass, Gregory M. Gibson
  • Patent number: 8504194
    Abstract: A substrate processing apparatus includes: a plurality of substrate processing sections arranged alongside a transport passage; a standby mechanism which retains a substrate in standby, the standby mechanism being movable along the transport passage; a transport mechanism which transports the substrate between the standby mechanism and each of the substrate processing sections, the transport mechanism being movable along the transport passage; a first movement mechanism which moves the transport mechanism along the transport passage; and a second movement mechanism which moves the standby mechanism along the transport passage.
    Type: Grant
    Filed: March 11, 2010
    Date of Patent: August 6, 2013
    Assignee: Dainippon Screen MFG. Co., Ltd.
    Inventor: Ichiro Mitsuyoshi
  • Publication number: 20130192524
    Abstract: A processing chamber having a plurality of movable substrate carriers stacked therein for continuously processing a plurality of substrates is provided. The movable substrate carrier is capable of being transported from outside of the processing chamber, e.g., being transferred from a load luck chamber, into the processing chamber and out of the processing chamber, e.g., being transferred into another load luck chamber. Process gases delivered into the processing chamber are spatially separated into a plurality of processing slots, and/or temporally controlled. The processing chamber can be part of a multi-chamber substrate processing system.
    Type: Application
    Filed: January 31, 2013
    Publication date: August 1, 2013
    Inventors: Banqiu Wu, Nag B. Patibandla, Toshiaki Fujita, Ralf Hofmann, Pravin K. Narwankar, Jeonghoon Oh, Srinivas Satya, Li-Qun Xia
  • Publication number: 20130195720
    Abstract: A sample rack handling unit comprising an onload section for loading sample racks holding a sample container is presented. The onload section comprises an onload edge and a receiving area with an onload rail longitudinally on the receiving area parallel to the onload edge. The onload rail engages a recess on the rack bottom such that the rack longitudinally slides on the receiving area along the onload rail when the rack is engaged. The onload rail has a base portion and a protrusion extending from the base portion. The protrusion faces the onload edge and the base portion comprises an inclined onload rail side opposite the onload edge such that the recess engages the onload rail when the rack is loaded on the receiving area from the onload edge transversely to the onload rail and the recess disengages the onload rail by sliding the rack towards the onload edge.
    Type: Application
    Filed: January 16, 2013
    Publication date: August 1, 2013
    Applicant: ROCHE DIAGNOSTICS OPERATIONS, INC.
    Inventor: Roche Diagnostics Operations, Inc.
  • Patent number: 8490268
    Abstract: The invention relates to a method for laser-cutting sheet steel (1), wherein a sheet steel (1) is gradually inserted in a defined position into the cutting area (2) of a laser cutter in a direction of advance V in order to machine it. The sheet steel (1) is machined by laser cutting in a machinable area corresponding to the length of the cutting area (2), in the entire machinable area or only in a section thereof. The machined part (8) and the non-machined part (8) of the sheet steel may also only overlap in some sections (10). An automatic discharge device is also provided. The manufactured parts and the remaining grid are likewise cut from the sheet steel (1) by laser cutting. The method can be repeated in several machining steps until the sheet steel (1) is completely machined, the results of the preceding machining step being taken into consideration for the subsequent machining step. The invention allows to optimally utilize the sheet steel (1) even when using smaller laser cutters.
    Type: Grant
    Filed: December 30, 2005
    Date of Patent: July 23, 2013
    Assignee: Bystronic Laser AG
    Inventor: Thomas Plüss
  • Patent number: 8489226
    Abstract: A method is provided for automatically and sequentially loading objects onto a feed system, each having a respective axis of rotation and respective first and second indices of rotation about the respective axes. The loading of each object onto the feed system causes an orientation in a predetermined relative position. The method consists in particular in selectively operating a relative rotation of the object and of the handling device about their axis of rotation to achieve the orientation.
    Type: Grant
    Filed: October 11, 2006
    Date of Patent: July 16, 2013
    Assignee: Saverglass S.A.S.
    Inventors: Didier Lourman, Didier Heckmann
  • Publication number: 20130174632
    Abstract: A gripper assembly for a forging manipulator includes a main body configured to be in operative communication with the manipulator; a contact plate attached to the main body and configured to be in physical communication with a heated metal part; and an insulating plate disposed between the main body and the contact plate, wherein the insulating plate is configured to substantially prevent heat transfer from the heated metal part to the main body.
    Type: Application
    Filed: January 9, 2012
    Publication date: July 11, 2013
    Applicant: FIRTH RIXSON LIMITED
    Inventors: David Hebert, Matthew Louis Foley, II, Chris Meyers, Diane Pham
  • Publication number: 20130171364
    Abstract: A wood treatment method and apparatus employing a bundle support structure to support a bundle of wood during transportation and treatment of the bundle. The bundle support structure rests on a movable cart during transportation of the bundle, but is detached from the movable cart during treatment of the bundle.
    Type: Application
    Filed: November 29, 2012
    Publication date: July 4, 2013
    Applicant: Eastman Chemical Company
    Inventor: Eastman Chemical Company
  • Publication number: 20130170929
    Abstract: A method for handling busbars on wind power plants in which a power connection between a generator device disposed in an upper region of the wind power plant and a substation located at a base area of the wind power plant consists of a plurality of busbar subregions each comprising a certain number of mutually interconnected busbars.
    Type: Application
    Filed: June 9, 2011
    Publication date: July 4, 2013
    Applicant: FLYTEG GMBH & CO. KG
    Inventor: Joerg Wiechers
  • Publication number: 20130170927
    Abstract: Apparatuses and methods produce radioisotopes in instrumentation tubes of operating commercial nuclear reactors. Irradiation targets may be inserted and removed from instrumentation tubes during operation and converted to radioisotopes otherwise unavailable during operation of commercial nuclear reactors. Example apparatuses may continuously insert, remove, and store irradiation targets to be converted to useable radioisotopes or other desired materials at several different origin and termination points accessible outside an access barrier such as a containment building, drywell wall, or other access restriction preventing access to instrumentation tubes during operation of the nuclear plant.
    Type: Application
    Filed: December 28, 2011
    Publication date: July 4, 2013
    Inventors: Yogeshwar Dayal, Earl F. Saito, John F. Berger, Martin W. Brittingham, Stephen K. Morales, Jeffrey M. Hare
  • Publication number: 20130172526
    Abstract: A wood treatment method and apparatus that includes a laterally shiftable transportation segment adjacent a door of a wood treatment vessel. When retracted, the shiftable transportation segment accommodates the opening and/or closing of the door. When aligned, the shiftable transportation segment can support the weight of a cart that transports a bundle of wood into and/or out of the wood treatment vessel. Wood treatment systems described herein may also include a bundle adjustment system for applying an aligning force to at least a portion of the bundle during its loading and/or unloading from the wood treatment vessel.
    Type: Application
    Filed: November 29, 2012
    Publication date: July 4, 2013
    Applicant: Eastman Chemical Company
    Inventor: Eastman Chemical Company
  • Publication number: 20130171365
    Abstract: A wood treatment system that includes at least one wood treatment vessel and a bundle lift system for loading and unloading a bundle of wood from a cart used to transport the bundle into and/or out of the treatment vessel. The lift system vertically disengages the bundle of wood from the cart within the interior of the vessel, thereby allowing the cart to be removed from the vessel prior to initiating treatment. The lift system, which can be physically separate from or physically coupled to the cart, is entirely disposed within a lower portion of the interior volume of the wood treatment vessel.
    Type: Application
    Filed: November 29, 2012
    Publication date: July 4, 2013
    Applicant: Eastman Chemical Company
    Inventor: Eastman Chemical Company
  • Publication number: 20130164102
    Abstract: A device for filling containers, in particular bottles and beakers with food products, in particular with low viscosity to pasty dairy and fat products, juices, waters and similar, comprising: an upper main element, a lower main element and lateral elements connecting the upper main element and the lower main element; and a plurality of support elements which are endlessly supported on rollers through the device past operating stations along the upper main element, the lateral element and the lower main element, wherein the support elements include receivers for containers which receivers are arranged in series transversal to a feed direction, wherein at least two support elements are arranged on a common frame and are run by the frame on rollers through the device in an endless manner.
    Type: Application
    Filed: June 21, 2012
    Publication date: June 27, 2013
    Inventor: Martin Junk
  • Publication number: 20130164781
    Abstract: An apparatus including at least one of a stainer module and a coverslipper module; an imaging module; a storage module; an automated transport module for transporting at least one slide between at least one of the stainer module and the coverslipper module, the imaging module and the storage module; and a controller. A method including processing at least one slide; determining whether an imaging module is available for imaging of a biological specimen on the at least one slide; transporting the at least one slide to the imaging module using an automated transport module; and transporting the at least one slide to a storage module using the automated transport module when it is determined that the imaging module is not available. A system including a processing module for processing at least one slide including a biological specimen thereon. A machine readable medium.
    Type: Application
    Filed: February 15, 2013
    Publication date: June 27, 2013
    Applicant: Sakura Finetek U.S.A., Inc.
    Inventor: Gilles Lefebvre
  • Publication number: 20130164113
    Abstract: A device for use in the semiconductor industry includes a robotic arm whose end effector includes electromagnetic means to hold a substrate carrier. A pushing member can move independently of a flat, spatula-like portion of the device and is configured to exert force against the substrate carrier while the spatula-like portion is retracted from the substrate carrier, after the substrate carrier has been brought to its intended position. In this manner, the position of the substrate carrier is maintained at its intended position as the spatula-like portion is retracted.
    Type: Application
    Filed: December 21, 2011
    Publication date: June 27, 2013
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: CHRISTOPHER O. LADA, STUART STEPHEN PAPWORTH PARKIN, MAHESH GOVIND SAMANT
  • Publication number: 20130149077
    Abstract: A method for combinatorially processing a substrate is provided. The method includes providing a substrate disposed on a substrate support. The substrate and the substrate support are raised against a plurality of sealing surfaces of corresponding sleeves of a plurality of flow cells of a combinatorial processing chamber. The combinatorial processing chamber is operable to concurrently process different regions of the substrate differently. A sealing pressure between the sealing surface of the sleeves and a surface of the substrate is monitored and the raising is terminated when a desired pressure is obtained. The different regions of the substrate are then processed differently.
    Type: Application
    Filed: December 13, 2011
    Publication date: June 13, 2013
    Applicant: Intermolecular, Inc.
    Inventors: Jeffrey Chih-Hou Lowe, Sandeep Mariserla, Robert Sculac
  • Publication number: 20130149078
    Abstract: According to one embodiment of the present invention, a substrate-processing apparatus includes: first and second chambers parallel to each other; a plurality of first lift pins disposed in the first chamber, and supporting a first substrate transferred to the first chamber; a plurality of second lift pins disposed in the second chamber, and supporting a second substrate transferred into the second chamber; and a transfer robot transferring the first and second substrates into the first and second chambers. The transfer robot includes first and second blades that simultaneously elevate to transfer the first and second substrates to the upper sides of the first and second lift pins, respectively.
    Type: Application
    Filed: August 30, 2011
    Publication date: June 13, 2013
    Applicant: EUGENE TECHNOLOGY CO., LTD.
    Inventors: Sung Tae Je, Il Kwang Yang, Jun Jin Hyon
  • Publication number: 20130149076
    Abstract: Electronic device processing systems and robot apparatus are described. The systems are adapted to efficiently pick or place a substrate at a destination by independently rotating an upper arm, a forearm, a first wrist member, and a second wrist member relative to each other through co-axial drive shafts. Methods of operating the robot apparatus are provided, as are numerous other aspects.
    Type: Application
    Filed: December 10, 2012
    Publication date: June 13, 2013
    Applicant: APPLIED MATERIALS, INC.
    Inventor: APPLIED MATERIALS, INC.
  • Patent number: 8459922
    Abstract: A substrate processing system including a housing for housing at least part of a processing device, at least one target affixed to the processing device, the processing device having a first processing device reference point in a known relationship with the at least one target, at least one transmitter located within the housing and configured to transmit an identification signal identifying the at least one transmitter to the at least one target and a controller operably connected to the at least one target and the at least one transmitter, the controller being configured to receive data signals, based on the identification signal, from one of the at least one target and the at least one transmitter and control an operational characteristic of the processing device, based on the data signals.
    Type: Grant
    Filed: December 31, 2009
    Date of Patent: June 11, 2013
    Assignee: Brooks Automation, Inc.
    Inventor: Martin Hosek
  • Publication number: 20130142613
    Abstract: The present invention relates to a panel pickup and placing method of UVM process and a combined panel pickup device for performing the method. The panel pickup and placing method of UVM process includes the following steps: Step 1: providing a liquid crystal panel, a machine table, a panel pickup device, and a vacuum suction device; Step 2: coupling the panel pickup device and the vacuum suction device together; Step 3: moving the panel pickup device to have the vacuum suction engaging a surface of the liquid crystal panel; Step 4: the vacuum suction device sucking and adhering to the liquid crystal panel; Step 5: moving the panel pickup device to have the vacuum suction device lifting the liquid crystal panel for transfer to the machine table; Step 6: the vacuum suction device releasing the liquid crystal panel; and Step 7: moving the panel pickup device to have the vacuum suction device departing from the liquid crystal panel in order to position the liquid crystal panel on the machine table.
    Type: Application
    Filed: December 5, 2011
    Publication date: June 6, 2013
    Applicant: Shenzhen China Star Opoelectronics Technology Co., LTD.
    Inventors: Fengming Yin, Wenpin Chiang, Chonghui Yin
  • Publication number: 20130142596
    Abstract: A sorting apparatus includes: a sorting device receiving and transporting a rack carrying vessels and transferring vessels from the rack to predetermined vessel loading portions; and a delivery device delivering the rack to the sorting device. The sorting device includes: a rack receiving unit capable of moving reciprocally between a rack delivery position where the rack is delivered and a sorting position where the vessels are loaded into the predetermined vessel loading portions; a transfer machine transferring the vessels from the rack on the rack receiving unit to the predetermined vessel loading portions; and a transportation mechanism on which the rack delivering unit and the transfer machine are installed. The transportation mechanism is installed so as to be capable of moving in a transportation direction in which rack receiving unit moves reciprocally. The transfer machine is capable of moving in a direction perpendicular to the transportation direction.
    Type: Application
    Filed: December 6, 2012
    Publication date: June 6, 2013
    Applicant: HIRATA CORPORATION
    Inventor: HIRATA CORPORATION
  • Publication number: 20130129467
    Abstract: In an electronic component mounting method, electronic components are picked up from a component supply unit in which two tray supply mechanisms are arranged, and mounted on substrates. In the method, both of the tray supply mechanisms are allowed to hold trays storing therein the electronic components to be mounted on the substrates. If shortage of the components occurs in one tray supply mechanism during a component mounting process, a target for picking up the electronic components is switched to the other tray supply mechanism. If use stop setting indicating that the pickup of the electronic components is no longer conducted is enabled in one tray supply mechanism, the controller prohibits an access of a mounting head to the one tray supply mechanism, and permits an operation access of an operator to a tray housing unit of the one tray supply mechanism.
    Type: Application
    Filed: June 21, 2011
    Publication date: May 23, 2013
    Applicant: PANASONIC CORPORATION
    Inventors: Teppei Kawaguchi, Takahiro Noda, Takuya Yamazaki, Toru Chikuma, Yoshiyuki Hattori
  • Publication number: 20130129468
    Abstract: In an electronic component mounting method, electronic components are picked up from a component supply unit in which first and second tray supply mechanisms are arranged, and mounted on substrates. In the method, a first substrate and a second substrate different in type from the first substrate are transported by first and second substrate transport lanes, respectively, and a first component to be mounted on the first substrate and a second component to be mounted on the second substrate are supplied by the first and second tray supply mechanisms, respectively. If use stop setting indicating that the pickup of the electronic components is no longer conducted is enabled in one tray supply mechanism, the controller prohibits an access of a mounting head to the one tray supply mechanism, and permits an operation access of an operator to a tray housing unit of the one tray supply mechanism.
    Type: Application
    Filed: June 21, 2011
    Publication date: May 23, 2013
    Applicant: Panasonic Corporation
    Inventors: Teppei Kawaguchi, Takahiro Noda, Takuya Yamazaki, Toru Chikuma, Yoshiyuki Hattori
  • Publication number: 20130115030
    Abstract: A method for inspecting a wafer and a system. The system includes: a chuck; and a robot that includes a movable element connected to a detachable adaptor selected from a group of diced wafer detachable adaptors and non-diced wafer detachable adaptors; wherein a diced wafer detachable adaptor is shaped such to partially surround the diced wafer and comprises at least one vacuum groove adapted to apply vacuum on a tape that supports the diced wafer; and wherein the robot is adapted to fetch the wafer from a cassette and to place the wafer on the chuck.
    Type: Application
    Filed: October 2, 2012
    Publication date: May 9, 2013
    Applicant: CAMTEK LTD.
    Inventor: Camtek Ltd.
  • Patent number: 8434993
    Abstract: A robot apparatus according to the invention is configured to hand over a workpiece by rotating by a prescribed angle a finger including a holding means for holding the workpiece. The robot apparatus includes: a drive shaft including a first finger and a second finger spaced from each other. The first finger includes a first arm portion and a second arm portion extending from its rotation center with a prescribed angle therebetween so as to be distanced from each other. The second finger includes a third arm portion and a fourth arm portion extending from its rotation center with a prescribed angle therebetween so as to be distanced from each other. The second arm portion and the fourth arm portion are distanced from each other when the first arm portion and the third arm portion overlap in the axial direction of the drive shaft. The robot apparatus can further improve productivity without incurring size increase and high cost.
    Type: Grant
    Filed: November 30, 2007
    Date of Patent: May 7, 2013
    Assignee: Shibaura-Mechatronics Corporation
    Inventors: Hidehito Azumano, Masahiro Tanabe
  • Publication number: 20130102159
    Abstract: To provide a substrate processing apparatus, including: a plurality of process chambers in which a prescribed number of each type of substrates is processed; and a controller configured to decide the number of dummy substrates so that the number of the dummy substrates used in each process chamber is approximately the same between the process chambers, when the number of the dummy substrates used in each process chamber is decided so that the number of each type of substrates used in each process chamber reaches the prescribed number.
    Type: Application
    Filed: October 1, 2012
    Publication date: April 25, 2013
    Applicant: HITACHI KOKUSAI ELECTRIC INC.
    Inventor: HITACHI KOKUSAI ELECTRIC INC.
  • Publication number: 20130091896
    Abstract: A method and apparatus (54) for positioning glass sheets for forming includes positioners (55) that are moved slower than the speed of glass sheet conveyance to provide rotational adjustment of a glass sheet into alignment above a forming mold (52). The forming mold (52) is moved upwardly for the forming in a pressing manner against a downwardly facing upper mold (58). Both preformed and flat glass sheets can be positioned by different embodiments of the apparatus.
    Type: Application
    Filed: October 17, 2011
    Publication date: April 18, 2013
    Applicant: GLASSTECH, INC.
    Inventors: David B. Nitschke, Dean M. Nitschke, Daniel P. Lechner
  • Publication number: 20130094932
    Abstract: A workpiece takeout system includes a robot arm and a disposed-state detector. The robot arm is configured to perform a workpiece takeout operation to take out a workpiece disposed in an area among a plurality of areas. The disposed-state detector is configured to detect a disposed state of the workpiece and is configured to, while the robot arm is performing the workpiece takeout operation to take out the workpiece disposed in the area among the plurality of areas, detect a disposed state of another workpiece disposed in another area among the plurality of areas.
    Type: Application
    Filed: October 4, 2012
    Publication date: April 18, 2013
    Applicant: KABUSHIKI KAISHA YASKAWA DENKI
    Inventor: KABUSHIKI KAISHA YASKAWA DENKI
  • Publication number: 20130089395
    Abstract: A system and method are disclosed for removing vertically oriented substrates from a cassette. A lifter includes a lifter notch and a stabilizer notch for holding a substrate. The lifter notch engages and lifts the substrate along the substrate ID, while the stabilizer notch captures the substrate OD to prevent lateral movement of the substrate during lifting. In use, the cassette is tilted to bias all substrates to one side and ensure consistent spacing. The lifter moves up into the cassette until the notches are adjacent, but beneath, the ID and OD of a substrate. The lifter is moved laterally to position the notches directly below the ID and OD. Upward movement of the lifter causes the lifter notch to lift the substrate along the ID. The lifter continues upward with the substrate until the substrate clears the top of the cassette. Other embodiments are described and claimed.
    Type: Application
    Filed: October 7, 2011
    Publication date: April 11, 2013
    Applicant: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
    Inventors: John Robert Fairhurst, Jeffrey E. Krampert, Richard J. Hertel
  • Publication number: 20130084148
    Abstract: A production line with processing stations processing products with a production speed in products per unit time, the production line comprising a temporarily discontinuously operating processing station; a production line section connected upstream of the temporarily discontinuously operating processing station; a production line section connected downstream from the temporarily discontinuously operating processing station; a first product buffer arranged between the upstream production line section and the temporarily discontinuously operating processing station; and a second product buffer arranged between the temporarily discontinuously operating processing station and the downstream production line section.
    Type: Application
    Filed: August 10, 2012
    Publication date: April 4, 2013
    Applicant: MALL & HERLAN GMBH
    Inventors: Johannes Linden, Herrn Bernd Ullmann
  • Publication number: 20130078059
    Abstract: A substrate processing apparatus includes: a carrier block including first and second carrier placement units spaced apart in a right and left direction; a processing block having a layered structure in which a plurality of layered parts are vertically arranged, the layered parts each including a substrate transport mechanism for transporting a substrate and a processing module for processing a substrate; a tower unit including plural substrate placement units located at height positions where a substrate is transferred by the substrate transport mechanism of the layered part corresponding to the substrate placement unit; a first substrate transfer mechanism configured to transfer a substrate between the carrier on the first carrier placement unit and the substrate placement unit of the tower unit; and a second substrate transfer mechanism configured to transfer a substrate between the carrier on the second substrate placement unit and the substrate placement unit of the tower unit.
    Type: Application
    Filed: September 12, 2012
    Publication date: March 28, 2013
    Applicant: Tokyo Electron Limited
    Inventors: Suguru ENOKIDA, Masahiro NAKAHARADA, Akira MIYATA, Hidekazu KIYAMA, Naruaki IIDA
  • Publication number: 20130078061
    Abstract: A substrate treatment system comprise a treatment station having a plurality of treatment units provided at multiple tiers in an up-down direction, a cassette mounting table on which a cassette housing a plurality of wafers W is mounted, and a wafer transfer mechanism arranged between the treatment station and the cassette mounting table, wherein a delivery block in which a plurality of delivery units are provided at multiple tiers is provided between the treatment station and the wafer transfer mechanism, the delivery units temporarily housing a wafer to be transferred between the cassette mounting table and the treatment station and a wafer to be transferred between the tiers of the treatment units. The wafer transfer mechanism includes a first transfer arm that transfers a wafer between the cassette mounting table and the delivery block, and a second transfer arm that transfers a wafer between the tiers of the delivery units.
    Type: Application
    Filed: September 20, 2012
    Publication date: March 28, 2013
    Applicant: TOKYO ELECTRON LIMITED
    Inventor: TOKYO ELECTRON LIMITED
  • Publication number: 20130074326
    Abstract: A substrate stopped at a first position is transferred toward a second position and is stopped at the second position in an accurate and stable manner. An intermediate position arrival time AT is measured while the substrate is being transferred from a substrate stop position toward a mounting work position, and a transfer status of the substrate (whether or not an unexpected factor has occurred) is assessed based on the intermediate position arrival time AT. Before the substrate reaches the second position, a deceleration pattern is controlled by altering a deceleration start timing T14 and the deceleration b in accordance with the intermediate position arrival time AT, thereby accurately stopping and positioning the substrate at the mounting work position. In this manner, under feed-forward control, the substrate can be stably transferred to the mounting work position.
    Type: Application
    Filed: September 5, 2012
    Publication date: March 28, 2013
    Applicant: YAMAHA HATSUDOKI KABUSHIKI KAISHA
    Inventors: Daisuke UEKAWA, Kazuaki YAMADA
  • Publication number: 20130078058
    Abstract: A method of controlling the management of forming drums in building tyres for vehicle wheels and a plant for production of tyres for vehicle wheels, wherein the plant includes at least one building line including at least one assembly of “m” work stations, each adapted to form at least one portion of a component of the tyre; devices for feeding and picking up “n” forming drums, one at a time, to and from the building line at each time interval equal to a cycle time; transfer devices for respectively bringing and moving apart “m” distinct forming drums to and from “m” distinct work stations of the assembly, wherein each of the “m” work stations respectively receives and releases a forming drum at each time interval equal to a multiple of “m” of said cycle time, wherein “m” is greater than or equal to 2 and “n” is greater than or equal to “m”.
    Type: Application
    Filed: May 4, 2011
    Publication date: March 28, 2013
    Inventors: Maurizio Marchini, Gianni Mancini, Michele Ballabio
  • Publication number: 20130071209
    Abstract: A method and apparatus for feeding joining elements to a joining tool is presented. The joining tool may be movable by a programmable handling unit, and a magazine for receiving at least one joining element may be mounted on the joining tool. The magazine may be moved to a filling station that has a tubular section with an outlet opening. An inlet opening of the magazine may be oriented in relation to the outlet opening. At least one joining element may be conveyed to the tubular section so that it passes through the tubular section, the outlet opening, the inlet opening, and into the magazine. During the orienting, the magazine may be oriented in relation to the outlet opening such that the magazine is spaced apart from the filling station during the conveying of the at least one joining element.
    Type: Application
    Filed: September 19, 2012
    Publication date: March 21, 2013
    Inventors: Alexander Schug, Florian Steinmuller, Manuel Spiess, Simon Dietz
  • Publication number: 20130071224
    Abstract: A storage device test system includes a test slot configured to receive at least two storage devices for testing, the at least two storage devices being in a same plane.
    Type: Application
    Filed: September 20, 2012
    Publication date: March 21, 2013
    Applicant: Teradyne, Inc.
    Inventor: Teradyne, Inc.
  • Publication number: 20130039726
    Abstract: Substrate transport systems, apparatus, and methods are described. The systems are adapted to efficiently put or pick substrates at a destination by rotating a boom linkage to a position adjacent to the destination and then independently actuating an upper arm link housing and one or more wrist members to put or pick one or more substrates at the destination wherein the wrist member is independently actuated relative to the forearm link housing and the motion of the forearm link member is kinematically linked to the motion of the upper arm link housing. Numerous other aspects are provided.
    Type: Application
    Filed: August 8, 2011
    Publication date: February 14, 2013
    Applicant: Applied Materials, Inc,
    Inventors: Jeffrey A. Brodine, Jeffrey C. Hudgens, Izya Kremerman