Of Charging Load-holding Or -supporting Element From Source And Transporting Element To Working, Treating, Or Inspecting Station Patents (Class 414/806)
  • Patent number: 8216422
    Abstract: An apparatus for supporting a substrate within a processing chamber is provided. In one aspect, a substrate support member is provided comprising a housing having a bore formed therethrough, a support pin at least partially disposed within the bore, and a plurality of bearing elements disposed about the housing. In one aspect, the bearing elements comprise a roller having a central bore formed therethrough, a contoured outer surface, and a shaft at least partially disposed through the central bore. In another aspect, the bearing elements comprise a ball assembly comprising a larger spherical member and four smaller spherical members arranged about the larger spherical member.
    Type: Grant
    Filed: January 27, 2005
    Date of Patent: July 10, 2012
    Assignee: Applied Materials, Inc.
    Inventors: Shinichi Kurita, Suhail Anwar, Toshio Kiyotake
  • Publication number: 20120171001
    Abstract: An electronic component manufacturing method includes the steps of preparing at least one electronic component chip having a first surface and a second surface opposite each other; holding the electronic component chip between a first plate and a second plate such that the first surface is in contact with a first elastic layer of the first plate and the second surface is in contact with a second elastic layer of the second plate; and turning the electronic component chip by relatively moving the first and second plates in a planar direction thereof using a planar movement mechanism and moving the first and second plates in accordance with a turning path of the electronic component chip using the planar movement mechanism and a vertical movement mechanism.
    Type: Application
    Filed: December 28, 2011
    Publication date: July 5, 2012
    Applicant: MURATA MANUFACTURING CO., LTD.
    Inventors: Katsunori OGATA, Miyuki MIZUKAMI
  • Publication number: 20120171002
    Abstract: A substrate transfer apparatus includes upper and lower substrate support systems configured to support a substrate at upper and lower support levels, respectively, within a process chamber. A substrate elevator system is configured to move the substrate between the upper and lower support levels. A transfer robot for transferring substrates into and out of the process chamber, a loadlock chamber and methods of transferring substrates are also disclosed.
    Type: Application
    Filed: January 4, 2012
    Publication date: July 5, 2012
    Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC
    Inventors: Kyung Young KIM, Seunghoon LEE
  • Publication number: 20120171003
    Abstract: An apparatus for sensing specimen slides (38) has a specimen slide holder (42) holding specimen slides (38), each specimen slide (38) comprising an identification code. The specimen slides (38) are arranged inside the specimen slide holder (42) on a lifting element (50) in a lifted position. The apparatus includes a reading apparatus (40) for reading out the identification code, and a positioning apparatus that moves the specimen slide holder (42) with the specimen slides (38) relative to the lifting element (50) so that the specimen slides (38) drop successively from the lifted position on the lifting element (50). As one of the specimen slides (38) drops, the identification code of the specimen slide (38) or of the subsequent specimen slide (38) becomes readable for the reading apparatus (40). A triggering apparatus (67, 68) triggers the reading apparatus (40) to read the identification code.
    Type: Application
    Filed: December 28, 2011
    Publication date: July 5, 2012
    Applicant: Leica Biosystems Nusslock GmbH
    Inventors: Markus EGLE, Stefan THIEM, Simon KEIMER, Karl-Heinz WESTERHOFF
  • Publication number: 20120159803
    Abstract: Method for transfer of containers, such as vials (101), between a freeze dryer (1) that is located at a first location and a separate transport vehicle (30) that is mobile with respect to the freeze dryer, wherein the freeze dryer (1) comprises a freeze dryer housing (2) with an access opening (11) towards an inner freeze drying chamber (10) inside the freeze dryer housing (2), multiple shelves (21-24) that are arranged spaced apart above each other inside the freeze dryer chamber (10) and each provided with a horizontally extending first flat supporting surface (25) for supporting the containers, wherein the mobile transport vehicle (30) comprises a mobile undercarriage (31) supporting a storage housing (33) with an access opening (40) towards an inner storage chamber (39), a carrier provided with a second flat supporting surface (58) for supporting the containers inside the storage housing (33), and a container shifter (60) for pushing out containers away from the second flat supporting surface (58) in a pu
    Type: Application
    Filed: July 21, 2010
    Publication date: June 28, 2012
    Inventors: Johannes Van Veen, Franciscus Antonius Damen, Alexander Clemens Henricus Josef Schaepman, Florentinus Adriaan Cornelis Marie Jongenelen
  • Patent number: 8202034
    Abstract: A robot according to this invention includes a driving mechanism, a first arm rotatably connected to the driving mechanism, a second arm rotatably connected to the first arm, and an X-shaped end effector rotatably disposed at the distal end of the second arm. Of the four distal ends of the end effector, two distal ends include holding units which can hold substrates in one direction, and the remaining two distal ends include holding units which can hold substrates in the opposite direction.
    Type: Grant
    Filed: September 1, 2010
    Date of Patent: June 19, 2012
    Assignee: Canon Anelva Corporation
    Inventors: Hiroshi Sone, Ryuji Higashisaka, Kazutoshi Yoshibayashi, Tatsunori Sato, Tatsuhiro Takahashi
  • Patent number: 8197171
    Abstract: Disclosed is an apparatus for loading and unloading a tray of a freeze drying plant with a number of vials. An example apparatus includes a transfer table upstream of the freeze drying plant for receiving temporarily said vials and a pusher apparatus for displacing said vials between said transfer table and said tray. The pusher apparatus includes right and left transport carriages and a loading element. With the example apparatus, the vials are securely transferred with little friction onto/from the tray, and the transport carriages are disposed on the transfer table and/or on the tray to form a lateral limitation of the transfer table and/or of the tray for the vials located on the edge of the transfer table and/or of the tray to directly abut a transport carriage during loading or unloading.
    Type: Grant
    Filed: July 18, 2008
    Date of Patent: June 12, 2012
    Assignee: Accurro GmbH
    Inventors: Alexander Wagner, Ralf Battenberg
  • Publication number: 20120141247
    Abstract: In an embodiment, articles are left in storage areas, such as lockers or other receptacles that may be associated with a household services company. A divided storage receptacle is discussed. The receptacle is divided by an angled plane such that the top portion may be used to hang clothes of various lengths thereby utilizing the space efficiently.
    Type: Application
    Filed: August 28, 2011
    Publication date: June 7, 2012
    Inventor: Arik Seth Levy
  • Publication number: 20120141236
    Abstract: A method and storage system (1) for storing and order-picking articles (2). The storage system (1) includes a pallet rack store (3) for storing articles supplied on introductory load carriers, an arrangement (8) for depalletizing, separating and rearranging articles between introductory load carriers and transporting load carriers (7), a rack store (4) for storing separated articles as an interim buffer store upstream of the order-picking operation, at least one order-picking station (6), in which articles are loaded onto a destination load carrier (30), and a conveying mechanism for transporting separated articles to the rack store and from the rack store to the order-picking station. Transporting load carriers (7) are used for transporting separated articles on the conveying mechanism. Separated articles (2) are stored in the rack store (4) without transporting load carriers.
    Type: Application
    Filed: July 6, 2010
    Publication date: June 7, 2012
    Inventor: Erik Körner
  • Publication number: 20120142197
    Abstract: A combinatorial processing chamber is provided. The combinatorial processing chamber is configured to isolate a radial portion of a rotatable substrate support, which in turn is configured to support a substrate. The chamber includes a plurality of clusters process heads in one embodiment. An insert having a base plate disposed between the substrate support and the process heads defines a confinement region for a deposition process in one embodiment. The base plate has an opening to enable access of the deposition material to the substrate. Through rotation of the substrate and movement of the opening, multiple regions of the substrate are accessible for performing combinatorial processing on a single substrate.
    Type: Application
    Filed: February 14, 2012
    Publication date: June 7, 2012
    Applicant: Intermolecular, Inc.
    Inventors: Rick Endo, Kurt Weiner, Indranil De, James Tsung, Maosheng Zhao, Jeremy Cheng
  • Publication number: 20120128451
    Abstract: Systems for effecting transfer of reaction receptacles between modules of an instrument for performing multi-step analytical procedures and for adjusting for variations in the positions of such modules includes a receptacle carrier supported on a track on which the carrier translates between different modules located adjacent to the track. The carrier includes a receptacle distribution head supported on a receptacle carrier carriage. The distribution head includes a receptacle moving mechanism adapted to move receptacles into and out of the distribution head and into and out of a module. The carriage is engaged with the track and adapted for translation along the track. Drive systems effect powered translation of the carriage, powered elevation and rotation of the distribution head, and powered movement of receptacles into and out of the distribution head. A transfer position locating system automatically determines a receptacle transfer position of the receptacle carrier with respect to each module.
    Type: Application
    Filed: May 17, 2010
    Publication date: May 24, 2012
    Applicants: STRATEC BIOMEDICAL AG, GEN-PROBE INCORPORATED
    Inventors: Norbert D. Hagen, Byron J. Knight, David Opalsky, Jason F. Rhubottom, Olaf Hörger, Heiko Sayer, Harald Thahedl, Stefan Habrich
  • Patent number: 8177469
    Abstract: An apparatus and method for handling disks as part of a magnetic disk manufacturing process is provided. In one embodiment, during a drying process the disks are engaged at the inner diameter rather than the outer diameter to eliminate the formation of residue on the surface of the disks at or proximate data zones. The disks may be engaged individually or in pairs.
    Type: Grant
    Filed: November 10, 2008
    Date of Patent: May 15, 2012
    Assignee: Seagate Technology LLC
    Inventor: Daniel Peinovich
  • Publication number: 20120110954
    Abstract: A system and method are provided for optimizing the flow of seed along a seed handling path. The system and method include multiple stages at which seeds undergo different processes to prepare the seeds for sale or further handling. The stages may include one or more of Receiving, Husking, Sorting, Drying, Shelling, Bulk Storage, Sizing, Conditioning, Treating, and Packaging. Sensors may be located along the seed handling path for monitoring the seed handling path and the operations and conveyances occurring along the seed handling path at and between different stages. The sensors may provide feedback signals to a controller, which may in turn adjust the operating parameters of various processing devices associated with one or more of the stages in a real-time scenario to optimize the operations and conveyances occurring along the seed handling path.
    Type: Application
    Filed: November 4, 2011
    Publication date: May 10, 2012
    Inventors: Thomas B. Brumback, Steven J. Corak, James L. Hunter, Yong G. Lee
  • Publication number: 20120114457
    Abstract: The package structure for glass containers for pharmaceutical use (e.g.: bottles, carpules and phials . . . ), comprises a tray (2) accommodating, at a raised position with respect to its bottom, a support plane (4) having a plurality of holes (12) for introducing containers spaced with a preset spatial order, the support plane comprising, at each introduction hole, elastically yielding means (13) for holding the container by means of a radial holding force, the holding means extending inside the volume enclosed by the projection of the perimeter of the hole in a manner parallel to the central symmetry axis (S) of the latter.
    Type: Application
    Filed: January 17, 2012
    Publication date: May 10, 2012
    Inventor: Fabiano Nicoletti
  • Publication number: 20120107074
    Abstract: In order to transport a flat material to be treated (21) in an installation for the chemical and/or electrochemical treatment of said material, within which the material to be treated (21) is transported within a plane of transport in a direction of transport (5), holding means (22, 25) are attached to said material to be treated (21). The holding means (22, 25) hold the material to be treated (21) at at least two points on an edge region of said material, which edge region is directed along the direction of transport (5) when said material to be treated (21) is being transported. The holding means (22, 25) are coupled in a detachable manner to a transporting device (41) which moves said holding means (22, 25) in the direction of transport in order to transport the material to be treated (21).
    Type: Application
    Filed: April 22, 2010
    Publication date: May 3, 2012
    Applicant: ATOTECH DEUTSCHLAND GMBH
    Inventors: Henry Kunze, Christian Thomas
  • Publication number: 20120107072
    Abstract: A substrate transport apparatus comprises a substrate holder capable of holding a substrate, a link unit which extends/retracts the substrate holder, a driving unit which generates a driving force to operate the link unit, a guide bar provided to one of the substrate holder and the link unit; and a support unit which is provided to the other of the substrate holder and the link unit, and slidably supports the guide bar when the substrate holder moves by the operation of the link unit.
    Type: Application
    Filed: October 19, 2011
    Publication date: May 3, 2012
    Applicant: CANON ANELVA CORPORATION
    Inventor: Kazuhito WATANABE
  • Publication number: 20120099950
    Abstract: Disclosed herein are a system for management of a transportation device, including: a plurality of work tables disposed to be spaced from each other; charging terminals provided around the work tables; and transportation devices transporting objects between the work tables and including a supercapacitor as a power supply, and a method therefor.
    Type: Application
    Filed: October 17, 2011
    Publication date: April 26, 2012
    Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
    Inventors: Young Hak JEONG, Bae Kyun KIM, Senug Hyun RA, Hyun Chul JUNG, Yong Wook KIM
  • Publication number: 20120093617
    Abstract: A vacuum processing apparatus including a processing chamber for processing a sample to be processed, a cooling chamber for cooling the high-temperature sample processed in the processing chamber, and a vacuum transfer chamber for establishing a connection between the processing chamber and the cooling chamber, a vacuum transfer robot equipped inside the vacuum transfer chamber, wherein the cooling chamber includes a gas-exhausting unit for reducing pressure inside the cooling chamber, a gas-supplying unit for supplying a gas into the cooling chamber, a pressure-controlling unit for controlling the pressure inside the cooling chamber, a supporting unit for supporting the high-temperature sample, and a mounting stage for proximity-holding the sample supported by the supporting unit, the mounting stage having a temperature-adjusting unit for adjusting the temperature of surface of the mounting stage into a temperature which is capable of cooling the high-temperature sample, the supporting unit having an ascendi
    Type: Application
    Filed: January 21, 2011
    Publication date: April 19, 2012
    Inventors: Yutaka Kudou, Hiroaki Takikawa, Takahiro Shimomura, Masakazu Isozaki, Takashi Uemura
  • Publication number: 20120093618
    Abstract: A method and an apparatus (A) are disclosed, for transferring a plurality of tubular receptacles (1) made of a fragile material, suitable for containing doses of medicinal substances, for example barrels (1) for syringes or vials, from containers (2, 20), in which the receptacles (1) are housable separated from one another, to a packing machine (M) for processing the receptacles (1). Each container (2, 20) houses a multiplicity of receptacles (1) and is transportable by a conveyor line (L) towards the packing machine (M). The method includes the following steps: a. collecting a plurality of receptacles (1) from a container (2, 20), maintaining the receptacles (1) separated from one another; b. arranging the collected receptacles (1) at an inlet (I) of the packing machine (M), in a predefined formation and kept separated from one another, and c.
    Type: Application
    Filed: October 13, 2011
    Publication date: April 19, 2012
    Applicant: MARCHESINI GROUP S.P.A.
    Inventor: Giuseppe MONTI
  • Publication number: 20120074204
    Abstract: A method for handling a stator bar at a braze station including: lifting the stator bar from a platform, wherein the stator bar is in a substantially horizontal orientation on the platform; turning the stator bar from the horizontal orientation to an orientation at least 45 degrees from horizontal; aligning an upper end of the bar with a brazing station and positioning a lower end of the bar in a pit; turning the bar to reverse positions of the ends of the bar, and returning the stator bar to a horizontal orientation.
    Type: Application
    Filed: December 5, 2011
    Publication date: March 29, 2012
    Applicant: General Electric Company
    Inventors: David Robert Schumacher, Yu Wang, Vincenzo Sofia, Alan Michael Iversen, Jeffrey Michael Breznak
  • Patent number: 8143595
    Abstract: An ion implanter includes an implantation chamber into which an ion beam is introduced, a holder for holding substrates on two columns of a first column and a second column in an X-direction, and a holder driving unit having a function of setting the holder in a horizontal state and then positioning the holder in a substrate exchange position and a function of setting the holder in a standing state and then driving reciprocally and linearly the holder along the X-direction in an irradiation area of the ion beam. Also, the ion implanter includes two load lock mechanisms, and two substrate carrying units equipped with arms, which carry the substrates between the load lock mechanisms and a substrate exchange position respectively, every two arms.
    Type: Grant
    Filed: August 25, 2009
    Date of Patent: March 27, 2012
    Assignee: Nissin Ion Equipment Co., Ltd.
    Inventors: Junichi Tatemichi, Masatoshi Onoda, Kohichi Orihira
  • Publication number: 20120070254
    Abstract: An apparatus for manufacturing an absorbent article having a first material and a second material includes (A) a holding body that includes a holding surface and that holds the first material with the holding surface and (B) a transfer section that transfers the first material to the second material by moving the holding body, that is holding the first material, to the second material. (C) The first material has a first portion and a second portion, the second portion having a thickness greater than that of the first portion in a thickness direction of the first material. (D) The holding surface has a first region and a second region, the second region being located at a position that is more recessed to an inner side than the first region in a height direction of the holding body. (E) The holding body holds the first material by causing the first portion to be held by suction on the first region and causing the second portion to be held by suction on the second region.
    Type: Application
    Filed: March 29, 2010
    Publication date: March 22, 2012
    Inventor: Akira Hamada
  • Patent number: 8137050
    Abstract: It is an object of the present invention to provide a device which can pick up a chip from an adhesive film while preventing damage to the chip. In addition, a device which can pick up a chip over an adhesive film with a high yield is provided. A pickup device includes: a frame for holding a film to which a chip is attached, which is fixed to a support; a pressing jig which presses a surface of the film, to which a chip is not attached, while rotated or moved; a holding jig which holds the chip simultaneously with or after the pressing jig pressing the film; and a moving unit which moves the holding jig.
    Type: Grant
    Filed: September 20, 2006
    Date of Patent: March 20, 2012
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Daiki Yamada, Naoto Kusumoto
  • Publication number: 20120057953
    Abstract: A system and device for use in a security area, and more particularly, a rack system and holding device for placing various objects that are processed through a security area are taught.
    Type: Application
    Filed: November 14, 2011
    Publication date: March 8, 2012
    Inventor: Joseph T. Ambrefe, JR.
  • Publication number: 20120051874
    Abstract: An apparatus and method for sorting stackable articles according to a sort feature use a holding device with receiving units. The apparatus has a sorting system with a measuring instrument and a discharge device, a movable holding device and a plurality of receiving units. The holding device has a rack, preferably a running gear and a plurality of bays for respectively a receiving unit. The discharge device includes at least two discharge sites. Each receiving unit is capable of receiving a stack of articles. A bay is respectively assigned to each discharge site. The measuring instrument is capable of measuring for each article the value which the predefined sort feature assumes for the article. The discharge device selects a discharge site for each article and discharges the article into a receiving unit. The receiving unit is received by that bay of the holding device which is assigned to the selected receiving site.
    Type: Application
    Filed: August 26, 2011
    Publication date: March 1, 2012
    Applicant: SIEMENS AKTIENGESELLSCHAFT
    Inventor: PETER BERDELLE-HILGE
  • Publication number: 20120051881
    Abstract: A method of moving opening devices configured to be attached to respective sealed packages of pourable food product involves: forward moving a plurality of linearly arranged opening devices in a forward direction along a path; stopping the forward movement of the linearly arranged opening devices by virtue of a forwardmost one of the opening devices contacting a stop positioned at a first position in front of the forwardmost opening device; pushing the stop to a second position at which the stop no longer prevents movement of the forwardmost opening device in the forward direction; and moving the forwardmost opening device in the forward direction past the stop located at the second position.
    Type: Application
    Filed: November 7, 2011
    Publication date: March 1, 2012
    Applicant: TETRA LAVAL HOLDINGS & FINANCE S.A.
    Inventors: Stefano MENOZZI, Alessandro Morselli
  • Publication number: 20120052654
    Abstract: The present invention provides a temporary carrier bonding and detaching process. A first surface of a semiconductor wafer is mounted on a first carrier by a first adhesive layer, and a first isolation coating disposed between the first adhesive layer and the first carrier. Then, a second carrier is mounted on the second surface of the semiconductor wafer. The first carrier is detached. Then, the first surface of the semiconductor wafer is mounted on a film frame. The second carrier is detached. The method of the present invention utilizes the second carrier to support and protect the semiconductor wafer, after which the first carrier is detached. Therefore, the semiconductor wafer will not be damaged or broken, thereby improving the yield rate of the semiconductor process. Furthermore, the simplicity of the detaching method for the first carrier allows for improvement in efficiency of the semiconductor process.
    Type: Application
    Filed: August 23, 2011
    Publication date: March 1, 2012
    Applicant: ADVANCED SEMICONDUCTOR ENGINEERING, INC.
    Inventors: Kuo-Pin Yang, Wei-Min Hsiao, Cheng-Hui Hung
  • Publication number: 20120039690
    Abstract: A device for processing a process good with a process medium has a provider for providing the process medium, and a transporter. The transporter has a transport element configured to move the process good along a process path between being accepted by a delivery device and being delivered to an accepting device and move with the process good from being accepted to being delivered. The process good enters the process medium laterally and is moved through same or is passed by same while floating on the process medium.
    Type: Application
    Filed: January 21, 2011
    Publication date: February 16, 2012
    Applicant: SINGULUS STANGL SOLAR GMBH
    Inventors: Wolfgang STANGL, Michael DOLCH, Martin Maximilian MENSCHICK
  • Publication number: 20120027563
    Abstract: In a method of sorting mailpieces, in which method the mailpieces sorted into the sorting outlets of a postal sorting machine are transferred from said sorting outlets to an unstacker magazine of the machine, or to an unstacker magazine of another sorting machine for the purpose of being sorted again into sorting outlets, said mailpieces are handled by means of shuttle trays of variable storage capacity for the purpose of transferring them from the sorting outlets to the unstacker magazine.
    Type: Application
    Filed: March 15, 2011
    Publication date: February 2, 2012
    Applicant: Solystic
    Inventors: Bruno Cartal, Eric Moullard, Damien Hugues
  • Publication number: 20120027952
    Abstract: The invention describes a device for transporting a substrate (5) into a working area (2, 3, 22) which can be temporarily separated in a vacuum-tight manner, and a corresponding method. A transport means (4) transports a substrate (5) in the plane (XY) to a defined working area (2, 3, 22) of a chamber (1). The transport means (4) has a deflectable sealing frame (6) which can be moved in a Z-direction perpendicular with respect to the XY-plane. The sealing frame (6) has two opposing sealing surfaces (10, 11) in the Z-direction. By pressing a closure means (16, 21, 24) against a first sealing surface (10, 11) and thus pressing the second sealing surface (11, 10) against a chamber wall (32, 31), the space of the working area (2, 3, 22) of the chamber (1) can be sealed.
    Type: Application
    Filed: April 23, 2010
    Publication date: February 2, 2012
    Inventors: Michael Reising, Stefan Kempf, Georg Roth
  • Publication number: 20120006257
    Abstract: A substrate holder stocker device capable of reducing foot print is provided. The device includes: a movable table A which holds a plurality of substrate holders side by side in a plate thickness direction thereof and moves back and forth; a movable table B which is provided parallel to the movable table A and holds a plurality of the substrate holders side by side in a plate thickness direction thereof, and which moves back and forth; and an inter-table transfer mechanism for allowing the substrate holder which is held by one of the movable tables A and B stopped at predetermined positions to be held by the other of the movable tables A and B.
    Type: Application
    Filed: July 7, 2011
    Publication date: January 12, 2012
    Applicant: CANON ANELVA CORPORATION
    Inventors: Ryuji Higashisaka, Hiroshi Sone
  • Patent number: 8087869
    Abstract: A method and apparatus for spacing apart layers of cartons containing animal parts (such as chicken parts). In one embodiment is provided a vacuum assist lift device to transfer layers of cartons from a packed condition to a palletized spaced apart condition. In one embodiment is provided a method of simultaneously transferring a plurality of layers from a packed condition to a spaced apart condition. In one embodiment is provided a vacuum assist lift device which can be adjusted for a plurality of configurations of layers of cartons.
    Type: Grant
    Filed: March 17, 2009
    Date of Patent: January 3, 2012
    Inventor: Wallace R. Binford
  • Publication number: 20110314665
    Abstract: A system and method for sequencing component part delivery for use in assembling vehicle bodies arranged in a substantially random assembly sequence. The system and method includes a plurality of kit carts that are loaded or stocked with vehicle specific parts in a sequence or staging area of an assembly facility. The vehicle specific stocked carts are arranged and positioned to a coordinated vehicle to assemble the vehicle using the kit carts that move along in sequence with the vehicle as the vehicle is assembled along an assembly line. As the carts are depleted of parts, the carts are returned for restocking and assigned to a subsequent vehicle.
    Type: Application
    Filed: June 2, 2011
    Publication date: December 29, 2011
    Applicant: COMAU, INC.
    Inventor: Velibor Kilibarda
  • Publication number: 20110318144
    Abstract: A substrate transfer device has an arm, and a support shaft fixed to one end of the arm so as to pivotably support the arm in a horizontal plane. The support shaft is placed between a first working device and a second working device. A holding unit that is supported by the other end of the arm and sucks and holds an upper surface of a substrate, a rotational driving device makes the holding unit pivot on the support shaft as a center of rotation, and a posture holding mechanism keeps the pivoting holding unit in a fixed posture in horizontal directions. The substrate is transferred while the fixed posture in the horizontal directions is maintained by pivotal movement of the holding unit, between the first working device and the second working device.
    Type: Application
    Filed: March 10, 2010
    Publication date: December 29, 2011
    Inventors: Sakae Kobayashi, Akira Kabeshita, Masaya Watanabe
  • Patent number: 8083463
    Abstract: A mini clean room for preventing wafer pollution includes a robot arm, a clean room body slidably disposed on the robot arm and at least one lock unit which is rotatably connected with the clean room body. During operation, the robot arm extends out of the clean room body to carry a wafer waiting to be processed, and then moves back into the clean room body which can provide an isolated and protected space for the wafer to avoid that the wafer is polluted. The present invention also discloses a method of using a mini clean room for preventing wafer pollution.
    Type: Grant
    Filed: November 12, 2008
    Date of Patent: December 27, 2011
    Assignee: Inotera Memories, Inc.
    Inventors: Jhin-Siang Jhong, Jen Jui Cheng, Chen Lung Huang
  • Publication number: 20110313559
    Abstract: The invention discloses a novel application of standard printed circuit board (PCB) assembly modules, electronic assembly, and/or semiconductor assembly equipment for the assembly of consumer products, such as razor cartridges. In addition, nozzles of the pick/place component placement machine of the present invention may be desirably adapted to operate on type of razor cartridge component (e.g., blade, lubricating strip) disposed on a pallet. The adapted nozzle may include adaptors which may have an elongated portion, an angled portion, a tapered portion, a gripper portion, a curved portion, a rounded portion, a pointed tip, a stamper, a marker, a printer, a guide portion, a spring portion, a moveable leg, or any combination thereof, for operating on a razor cartridge component.
    Type: Application
    Filed: June 10, 2011
    Publication date: December 22, 2011
    Inventors: Gregory David Aviza, Yongqing Ju, Vitaly Pesikov
  • Publication number: 20110311340
    Abstract: A substrate processing apparatus includes a substrate transit table configured to mount thereon a plurality of substrates; a substrate processing chamber configured to process the substrate one by one; a substrate transfer device capable of loading the substrate into the substrate processing chamber from the substrate transit table and unloading the substrate from the substrate processing chamber to the substrate transit table; and N number of (N is an integer equal to or larger than 3) substrate holding devices provided at the substrate transfer device and configured to hold the substrates one by one. Here, a multiplicity of (2 to N?1 number of) substrates are concurrently held by 2 to N?1 number of substrate holding devices among the N number of substrate holding devices and one substrate is loaded into the substrate processing chamber.
    Type: Application
    Filed: June 14, 2011
    Publication date: December 22, 2011
    Applicant: TOKYO ELECTRON LIMTED
    Inventors: Akira Murata, Issei Ueda, Osamu Kuroda, Kouji Kimoto, Masahiro Yoshida
  • Patent number: 8079797
    Abstract: A substrate processing system includes a control section configured to control a series of transfer operations and preset to control operation of a container transfer apparatus, operation at a substrate access area, and operation of a substrate handling apparatus independently of each other. The control section includes a schedule creating portion configured to create a transfer schedule by individually adjusting operation timing of the container transfer apparatus, operation timing at the substrate access area, and operation timing of the substrate handling apparatus such that, in a state while a first lot of substrates are treated in the processing system, but the container transfer apparatus and the substrate access area are unoccupied, a container with a second lot of unprocessed substrates stored therein is transferred onto the substrate access area, thereby minimizing total transfer time.
    Type: Grant
    Filed: October 14, 2008
    Date of Patent: December 20, 2011
    Assignee: Tokyo Electron Limited
    Inventors: Osamu Tanaka, Takafumi Tsuchiya, Tohru Iwabae
  • Patent number: 8078312
    Abstract: The invention refers to a Method (69) for automatically inserting at least one part (13) into a storage section (15) of a container (11), wherein the storage section (15) comprises a plurality of holder means (17a-d), wherein the part (13) is inserted (103) by means of an insertion tool (49), and wherein the method (69) comprises the step of detecting (93) the position of the holder means (17a-d) by means of at least one optical sensor (51a-d). In order to provide a method for automatically inserting a part into a storage section (15), wherein collisions are avoided it is suggested that the method (69) further comprises the steps of verifying (95) whether the holder means (17a-d) of a certain storage section (15) are available for insertion of the part (13); detecting (99) the orientation of the holder means (17a-d); determining (100) an insertion path (47) along which the part is inserted; and inserting (103) the part (13) into the available storage section (15) along the determined insertion path (47).
    Type: Grant
    Filed: October 30, 2008
    Date of Patent: December 13, 2011
    Assignee: Inos Automationssoftware GmbH
    Inventor: Charalambos Tassakos
  • Publication number: 20110299058
    Abstract: Positional information of a wafer stage in a Z-axis direction and a tilt direction with respect to the XY plane (for example, a ?y direction) is measured, using a surface position measurement system, such as, for example, a Z head and the like, and the wafer stage is driven based on the measurement results. At the same time, positional information of the wafer stage is measured using an interferometer system such as, for example, a Z interferometer. When abnormality of the surface position measurement system is detected or when the wafer stage moves off from a measurement area of the surface position measurement system, drive control is switched to a drive control based on the measurement results of the interferometer system. Accordingly, the wafer stage can be driven continuously even at the time of abnormality generation in the surface position measurement system.
    Type: Application
    Filed: August 11, 2011
    Publication date: December 8, 2011
    Applicant: NIKON CORPORATION
    Inventors: Yuichi Shibazaki, Yuho Kanaya
  • Publication number: 20110286818
    Abstract: According to an example embodiment a substrate processing apparatus includes a supporting unit, a lifting unit on at least a side of the supporting unit, a tray supported by the lifting unit, and a transfer unit configured to transfer a substrate to the tray such that the substrate is positioned on the tray. The lifting unit moves the tray up and down to load or unload the substrate located on the tray on or from the supporting unit.
    Type: Application
    Filed: May 18, 2011
    Publication date: November 24, 2011
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Ul Tae Kim, Sang Hyun Park, Hi Kuk Lee, Sang Don Jang
  • Publication number: 20110282484
    Abstract: Disclosed is a substrate positioning apparatus capable of accurately performing positioning of a center of a circular-shape substrate with respect to a rotating shaft. The substrate positioning apparatus includes: a substrate disposing part; a first positioning mechanism including a first reference part contacting a side of the substrate; a second positioning mechanism including a second reference part contacting the side of the substrate; a first driver configured to drive the first positioning mechanism; a controller configured to control the drive of the first positioning mechanism. In particular, the second reference part contacts the substrate at a contact part and includes an elastic part that applies force in a moving direction of the first driver to the contact part and a detector that detects position information of the second positioning mechanism.
    Type: Application
    Filed: May 10, 2011
    Publication date: November 17, 2011
    Applicant: TOKYO ELECTRON LIMITED
    Inventor: Yoshifumi AMANO
  • Publication number: 20110280703
    Abstract: An apparatus configured to handle an object in a contactless manner, the apparatus includes a carrying body having a carrying surface which is configured to be directed towards the object, the carrying surface being provided with a plurality of traction members and a plurality of overpressure members, each overpressure member being provided with at least one exhaust opening, each traction member being provided with an indentation and at least two suction openings that are arranged in the indentation, the at least two suction openings of each traction member being configured to generate a pressure gradient between them so as to create a traction fluid flow in the indentation in a direction substantially parallel to the carrying surface; and a pressure controller configured to control the pressure gradient between the at least two suction openings of each traction member
    Type: Application
    Filed: April 7, 2011
    Publication date: November 17, 2011
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Theodorus Petrus Maria CADEE, Koen Jacobus Johannes Maria ZAAL, Timo HOL, Michael Wilhelmus Theodorus KOOT
  • Publication number: 20110280690
    Abstract: A book cover feeder to supply book covers to a production unit of a book production line. The feeder has a guiding side and a driving side for conveying the book covers in a production direction. The book cover feeder comprising includes a feeding device onto which book covers of a single format are deposited singly, in a scaled formation or in a stack formation. A magazine is arranged to receive the covers from the feeding device. The magazine has a stacking shaft. A separating device is operatively arranged relative to the magazine. The feeding device, the cover magazine and the separating device are embodied integrally or adjoining each other. The feeding device includes, on the guiding side and/or the driving side, a side guiding device that is divided into multiple sections arranged one behind the other in the production direction.
    Type: Application
    Filed: May 5, 2011
    Publication date: November 17, 2011
    Applicant: Mueller Martini Holding AG
    Inventor: HANS MUELLER
  • Patent number: 8057156
    Abstract: The invention relates to an analysis apparatus with an analysis device for analyzing body fluids, and a magazine for test elements with a fresh supply container and a transfer unit that comprises a transfer element. At least one aperture for receiving a test element is formed in the circumferential surface of the transfer element. A waste container is provided in which used test elements are stored again after use.
    Type: Grant
    Filed: July 31, 2008
    Date of Patent: November 15, 2011
    Assignee: Roche Diagnostics Operations, Inc.
    Inventor: Hans List
  • Publication number: 20110274527
    Abstract: A method for moving a reel of packaging material from a storage station to a supply station of a packaging unit involves clamping a peripheral edge of reel by using a pair of clamping elements of a clamping unit, rotating clamping elements relative to the reel, and supporting the reel on the pair of clamping elements by interacting with a portion of reel radially inner with respect to circumferential edge.
    Type: Application
    Filed: April 27, 2010
    Publication date: November 10, 2011
    Applicant: TETRA LAVAL HOLDINGS & FINANCE S.A.
    Inventors: Vittorio Cavirani, Paolo Ferrari
  • Publication number: 20110272867
    Abstract: A handling machine for handling rails, arranged in line immediately downstream of a rolling plant, which allows an optimal clamping of the rail along its longitudinal extension, thus effectively withstanding the deflection and its variations, while allowing a longitudinal movement of the rail caused by thermal shrinkage, thus avoiding damages both to the external surface of the rail and to the handlers. A process of handling the rail is also described, which optimizes moving, positioning along a roller table and maintaining the rail substantially rectilinear during the thermal treatment to which it is subjected.
    Type: Application
    Filed: December 4, 2009
    Publication date: November 10, 2011
    Inventors: Alfredo Poloni, Marco Schreiber, Daniele Andreatta
  • Publication number: 20110274837
    Abstract: An ALD reactor for treating one or more substrates is provided. The ALD reactor includes at least one reaction chamber which has a front plate including gas connections for introducing starting materials, flushing gases and the like gases into the reaction chamber. In addition, the front plate is arranged for being placed over the substrate for closing the reaction chamber and at distance from the substrate surface for opening the reaction chamber such that the substrate is arranged for being loaded below, above or in front of the front plate, when the reaction chamber is in the open state, in which the front plate is at a distance from the substrate and such that the substrate is treatable by the ALD method in the closed state of the reaction chamber, in which the front plate is placed onto the substrate.
    Type: Application
    Filed: February 8, 2010
    Publication date: November 10, 2011
    Applicant: BENEQ OY
    Inventors: Pekka Soininen, Jarmo Skarp
  • Patent number: 8047762
    Abstract: By providing an overhead buffer system between an automatic transport system and a load port assembly of a process tool, the efficiency of the respective load ports may be significantly enhanced, for instance, by reducing the idle time of empty carriers, thereby providing the potential for covering a wider range of operational scenarios compared to conventional strategies. For instance, for the same number of load ports, the overhead buffer system may provide a continuous operation, even if small lot sizes are used. The buffer system may comprise a dedicated transport mechanism for directly serving the load ports and respective buffer places, while respective transfer places may provide direct interaction with the automated transport system.
    Type: Grant
    Filed: February 18, 2008
    Date of Patent: November 1, 2011
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Olaf Zimmerhackl, Alfred Honold, Jan Rothe
  • Publication number: 20110262250
    Abstract: Systems and methods that process a plurality of surgical instruments for cleaning and/or packaging. A device identifies a robot-ready insert having a predetermined configuration for accepting at least one type of surgical instrument. The surgical instruments are identified and oriented according to type using an automated apparatus. Specialized tools are also provided for automatically opening and closing surgical instruments, flipping instruments and assisting in the processing and maintenance of surgical instruments. The automated apparatus then places each of the surgical instrument types in one or more predetermined areas of the insert, configured to accept a predetermined set of surgical instrument types.
    Type: Application
    Filed: July 8, 2011
    Publication date: October 27, 2011
    Applicant: ROBOTIC SYSTEMS & TECHNOLOGIES, INC.
    Inventors: Michael R. Treat, David Michael Brady, Russell Baker, Jack M. Kaplan, David Berk