Abstract: The magnetic recording medium consists essentially of a polymeric substrate, a coherent, magnetic thin metal film applied to the surface of the substrate by a PVD method and, if required, a protective layer formed on the thin metal film. In order to achieve a large residual induction component in the plane of the film, in particular high residual induction in the transverse direction, the thin metal film contains a noble gas or noble gas mixture, preferably argon. During the coating of the polymeric substrate with the magnetic metal or with the magnetic alloy, the noble gas is fed directly and preferably tangentially to the substrate surface at a specific noble gas flow of from 1.0.multidot.10.sup.4 to 6.0.multidot.10.sup.4. In the plane of the thin metal film, the ratio of residual induction in the longitudinal direction to that in the transverse direction is from about 0.9 to about 1.8.

Abstract: A metallizing apparatus for vacuum-metallizing both recessed and non-recessed surfaces of relatively massive articles such as automotive wheels includes a vacuum chamber and a linear array of electron beam-type metal particle emitters. The emitter array is positioned in the chamber to thermally evaporate metal onto each article. A rack is supported within the chamber and rotates about a horizontal rack axis between two vertical end braces. Two or more identical articles are supported to rotate on the rack about respective second and third axes as the rack rotates about the horizontal rack axis. The articles both rotate around the rack axis and each simultaneously rotate around their respective second and third rotational axes while being held in the path of metal particles emanating from the emitters. The articles are mounted on the rack so that their respective second and third rotational axes are positioned at an angle to the rack axis. Adjustable pivot mechanisms allow an operator to vary these angles.

Abstract: In a manufacturing method of a magnetic recording medium with a vacuum deposition, two shielding members are provided above a substrate for defining an aperture. An evaporation source is located at a position wherein evaporated atoms from an evaporation material can adhere to a moving substrate through the aperture. The substrate is moved while a material in the evaporation source is irradiated at two evaporation portions with two electron beams along a moving direction of the substrate to form a magnetic layer. Thus, curving of columnar gains formed in the magnetic layer is suppressed or crystal orientation is enhanced, and magnetic read/write characteristics are improved. Further, a productivity is improved because the aperture can be enlarged than previously by using the two evaporation portions.

Abstract: The present invention provides a novel process and apparatus for coating electrically conductive substrate with alkali metal by vacuum metallizing. Novel methods and apparatus are provided to protect the alkali metal surface against atmospheric degradation. The alkali metal coated substrate prepared according to this invention can be used as an anode in electrochemical batteries.

Abstract: A process for producing an electrode plate for an electrolytic condenser. According to the process, a fixed or movable substrate is introduced into a chamber, and an oxidizing atmosphere and vaporized aluminum are also introduced into the chamber, under a pressure of 0.8 to 2.3 Pa in a deposit zone. A coating of grain agglomerates comprising a porous matrix of aluminum oxide containing metallic aluminum crystallites arranged randomly within the grains is deposited onto at least one surface of the substrate by condensation from the atmosphere at a rate between 0.03 and 0.2 micrometers per second. The coated substrate is then removed from the chamber and subjected to a chemical or electrochemical stabilization treatment.

Abstract: A method of sequential deposition of source materials onto a web substrate. A substrate transfer mechanism imparts continuous movement of a substrate past a plurality of deposition sources during vapor deposition of deposition source materials. Every portion of the substrate is exposed to deposition fluxes from the deposition sources in an alternating periodic manner. The number of source exposures is greater than the number of sources.

Abstract: A coreless refractory fiber is made by introducing a filament (16) of a starting material into a chemical vapor deposition (CVD) enclosure (10) and then heating the end (21) of the filament by means of a contactless heating source. The source comprises a conducting coil connected to an AC source in the frequency range HF to UHF and with a linear or strip conducting element (110) connected to it such that the ends of the element is adjacent to the end (21) of the filament. The filament (16) is then withdrawn such that refractory material is continuously built up on its end from the chemical vapors in the enclosure to form a coreless retractory fiber. Whiskers of a coreless refractory material may be made by introducing fine particles of a catalyst material to form droplets and then feeding CVD gases to the droplets (30) to thereby promote crystal growth by precipitation from the supersaturated liquid.

Abstract: A reactive ionized cluster beam deposition method according to this invention is embodied by utilizing two vacuum subregions partitioned by a partition wall formed with an opening. A closed heating crucible and an ionization accelerating unit are disposed in one vacuum subregion partitioned by the partition wall. A substrate is also disposed in the other vacuum subregion, and at the same time a reactive gas is introduced thereinto. Degrees of vacuums in the two vacuum subregions partitioned by the partition wall are equal to or different from each other. Particularly, a gas concentration in the latter vacuum subregion is enhanced. Then, the ionized cluster beams formed in the former vacuum subregion are introduced into the latter vacuum subregion via the opening of the partition wall and react to the reactive gas within the latter vacuum subregion. The ionized cluster beams reacting to the reactive gas impinge on the substrate, thereby forming the deposited film on the substrate surface.

Abstract: A wetting unit provides a contact agent between the coating roll and the film surface before coating by a thermal source.

Abstract: The thickness distribution of a vapor deposited layer such as an interference filter deposited on a substrate such as a glass faceplate for a projection television tube, is controlled in the plane of the substrate by employing at least one variable transmission mark to partially shield the substrate during deposition.

Abstract: When manufacturing a magnetic recording medium, depositing material in a crucible is heated to evaporate, and the vapor particles of the deposition material is continuously deposited on a continuous substrate material running along the peripheral surface of a cylindrical cooling can between a position where the vapor particles impinge upon the substrate material at a large angle and a position where the vapor particles impinge upon the substrate material at a small angle. The distance r(.theta.min) between the substrate material and the depositing material in the crucible when the vapor particles impinge upon the substrate material at a minimum incidence angle and the distance r(.theta.max) between the substrate material and the depositing material in the crucible when the vapor particles impinge upon the substrate material at a maximum incidence angle satisfy the formula 0.25.ltoreq.{r(.theta.min)/r(.theta.max)}.sup.2.

Abstract: A reaction gas or a gas containing a reaction gas is blown through blowing nozzles onto a steel material in a chemical vapor deposition treating chamber at a velocity sufficient to forcibly remove reacted products from reacted surfaces of a steel material while suppressing irregular thickness of a deposited film.

Abstract: A drum is provided on its surface with depressions corresponding to the portions of a web not to be coated and is partially enclosed by a chamber in which separating agent is evaporated. The depressions capture vapor as the drum is rotated, and the web is passed over the drum where it is not enclosed by the chamber. Separating agent condenses on selective of the web correspond to the depressions, and a functional coating is subsequently applied. Thereafter the functional coating is removed from the areas where the separating agent was applied.

Abstract: An improved process is disclosed for depositing a layer of metal on a semiconductor wafer wherein a shadow ring normally engages the end edge of the front surface of the wafer to inhibit deposition of the metal on the backside of the wafer and a barrier or nucleation layer is deposited on the unshielded portion of the front surface of the wafer prior to the deposition of the metal layer thereon, and wherein gases used to form the metal layer may contact and react with underlying materials on the front surface of the wafer beneath the shadow ring.

Abstract: The disclosure relates to a method for forming a porous sheet comprising a plurality of porous sheets such as foamed sheet, mesh sheet and nonwoven fabric sheet. These sheets are adhered and layered to each other either by a melting or with an adhesive or by layering without each other with adhering these sheets to each other. Then, the porous sheet thus layered is plated at a high current density by forcibly applying plating liquid to the layered sheet in a direction substantially perpendicular thereto in a plating tank, or by vacuum evaporation while the layered sheet is being transported inside the vapor deposition vacuum container enclosed by a cooking tank through a cooling roller mounted therein. The metallic porous sheet formed according the above-described method is preferably used as the electrode of a battery.

Abstract: In a deposition apparatus, a barrier is used to separate a process gas section from the section of the chamber below the substrate on which a metal layer is deposited. The substrate is supported on a support. During an unloading stage, purge gas is introduced into the chamber below the substrate. To prevent the substrate from being moved on the support by the purge gas, the barrier is perforated so that the process gas can flow through the barrier and into a vacuum manifold system.

Abstract: A method for forming hermetic coatings on optical fibers by hot filament assisted chemical vapor deposition advantageously produces a desirable coating while maintaining the pristine strength of the pristine fiber. The hermetic coatings may be formed from a variety of substances, such as, for example, boron nitride and carbon.

Abstract: Vacuum metallizing substrates having both vertical and horizontal surfaces occurs by directing metal from two remote sources by thermal evaporation. One source is connected horizontally below the object to depose metal vertically toward the object to the horizontal surface thereof. The second source is connected vertically to the object to depose metal horizontally toward the object to the vertical surface thereof. A vacuum chamber contains a rotating carousel supporting the objects with the sources located fixedly within the chamber to perform the thermal evaporation.

Abstract: A magnetic recording medium, essentially consisting of a polymeric, web-like substrate and a coherent thin layer of a ferromagnetic material, is produced in a chamber under reduced pressure by depositing a vapor jet of the ferromagnetic material onto the moving substrate surface guided over a roller-like cooling element.

Abstract: A magnetic recording medium, consisting essentially of a polymeric, web-like substrate and a coherent thin layer of a ferromagnetic material, is produced in a chamber under reduced pressure by depositing a vapor jet of the ferromagnetic material onto the moving substrate surface guided over a cylindrical drum, by a process in which the axis of the cooling element is inclined relative to the plane of the evaporator unit.

Abstract: A semiconductor substrate or other object (32) for vapor deposition is mounted on a susceptor disk (16) which rotates about a vertical axis. Chemical vapor flows downwardly through a passageway (14) onto the object (32). A radial space (14a) is provided between the periphery of the disk (16) and an adjacent inner wall (12a) of the passageway (14). Rotation of the disk (16) urges a portion of the vapor flow (60) to be deflected from the disk (16) and the wall (12a) of the passageway (14) upwardly to cause deleterious recirculation of the vapor above the disk (16). A flow guide (52) disposed in the passageway (14) above the disk (16) has an upstream converging section (52a) which causes the flow (56) of vapor to accelerate, and a downstream diverging section (52b) which causes the accelerated flow (58) to expand downwardly and radially outwardly so as to interact with, and prevent upward movement of the deflected portion of the flow (60) and thereby suppress recirculation of the vapor.

Abstract: Fine-grained and/or equiaxed coatings, substantially free from columnar structure, are deposited on substrates by chemical vapor deposition by directing the flow of reactant gases to the substrate with high velocity and in close proximity thereto, most often at a velocity gradient of at least about 1050 and preferably at least about 2000 cm./cm.-sec. The deposition process is preferably conducted while moving the substrate so as to coat large areas thereof. By this method, tungsten and/or rhenium X-ray targets having excellent properties under conditions of rapid temperature cycling may be produced.

Abstract: A process for the production of a heat-mode recording material by coating in a sealed zone maintained under vacuum conditions a web support with a heat-mode recording layer of vapor depositable material and within the sealed zone laminating a protective organic resin layer in web form by means of an adhesive layer onto the supported heat-mode recording layer. The web support moves within the sealed zone from a delivery reel to a take-up roll with the recording layer deposited thereon in a region between the rolls and the protective layer is laminated over the recording layer before the coated web support is collected on the take-up rolls.

Abstract: A method and apparatus for manufacturing a magnetic recording medium at high efficiency. A flexible web is passed around first and second cooling cans. The web is reversed between the two cans so that the same surface of the web is directed to the outside on both cans. A single evaporation source produces an evaporated stream of magnetic film forming material which impinges on the web as it passes around both cans, thereby to form two films of the evaporated magnetic material on the same surface of the web.

Abstract: An aluminium vacuum deposition machine for coating parts of lead frames, having a vacuum chamber containing the lead frames and aluminium to be vaporized. To reduce the incidence of imperfections in the aluminium coatings, a meissner trap is positioned within the vacuum chamber itself rather than or in addition to a meissner trap adjacent to a diffusion pump. Also, to reduce the thermal mass within the chamber, a support jig for the lead frames comprises a pair of end rings and a bracer member joining the end rings and holding them apart. Two pairs of spaced rollers are arranged in the chamber so that each ring rests on a respective pair of rollers, and the rollers are driven so that the support jig is rotated during vacuum deposition.

Abstract: A high speed apparatus for forming capacitors includes a vacuum chamber in which is located a carrier defining a continuous surface configured to move at a rate of from about 150 feet per minute to about 600 feet per minute during the forming operation, a metal depositing device, a dielectric depositing device, and a radiation source. The metal depositing device is configured to deposit layers of metal onto the moving surface, and the dielectric depositing device includes (a) a device for atomizing a radiation-curable polyfunctional acrylic monomer to form liquid droplets of the monomer, (b) a heated surface on which the atomized monomer droplets impinge and are flash vaporized, and (c) device for thereafter condensing the flash-vaporized monomer on the metal layers to form a monomer coating on successive layers. The radiation source is positioned for curing successive monomer coatings after each such coating has been deposited, to thereby form a polymer dielectric layer.

Abstract: A process for producing a metallizable, sealable, biaxially stretch-oriented multi-ply film includes the steps of: providing melts of a predominantly polypropylene base layer, and first and second polyolefinic facing layers; co-extruding the melts through a flat film die, wherein the first and second polyolefinic facing layers are co-extruded on either side of the base layer; solidifying the co-extruded film by cooling; longitudinally stretching the co-extruded film at a temperature from about 120.degree. to 130.degree. C. in a ratio of from about 5 to 7:1; transversely stretching the co-extruded film at a temperature from about 160.degree. to 170.degree. C. in a ratio of from about 8 to 10:1; and corona-treating one facing layer of the co-extruded film which is metallizable. Each of the melts contains a calcium carbonate neutralizing agent having an absolute particle size of less than about 10 .mu.m, a mean particle size of less than about 0.1 .mu.m, a specific surface area of more than about 40 m.sup.

Abstract: A continuous vacuum processing apparatus has a vacuum processing chamber and at least one auxiliary vacuum chamber connected to at least one of the upstream and downstream ends of the vacuum processing chamber as viewed in the direction of flow of a material to be processed. The apparatus further has a slit-type seal device provided in the auxiliary vacuum chamber and capable of conveying the material to be processed while sealing the vacuum processing chamber from exterior of the vacuum processing chamber. The seal device is provided with a guide member for guiding the material. Independent tensioning devices are provided in the vacuum processing chamber and the auxiliary vacuum chamber and capable of independently applying tensions to the portions of the material in the vacuum processing chamber and auxiliary vacuum chamber, so that a material which is not resistant to heat can be processed without being damaged.

Abstract: The method includes applying ions and electrons from an ion gun onto a polymer film while the polymer film is traveling circumferentially along a peripheral surface of a cylindrical can from a supply location to a take-up location of the polymer film relative to the cylindrical drum. The ions and electrons from the ion gun are applied onto a part of the polymer film while it is moving through a position near the supply location of the polymer film relative to the drum at which the polymer film begins to contact the outer peripheral surface of the drum. At a downstream location relative to the drum, electrons are applied from an electron gun onto the polymer film traveling on the drum surface. At a further downstream location relative to the drum, the thin film is deposited, e.g., by vacuum evaporation, on the polymer film travelling on the drum. This method enables a thin film, having no wrinkles and with a high adhesion strength with respect to the polymer film, to be produced in a stable manner.

Abstract: Coating apparatus for a thin plastics web comprises a coating deposition station for applying a coating to the web by vapor deposition and a support for supporting the web at the coating deposition station. The apparatus includes a device for urging gas into the region where the thin plastics web converges with the support to improve the thermal coupling between the web and the support and also to reduce the coefficient of friction between the web and support. The gas enables the coating to be applied by vapor deposition at coating speeds of up to 90 meters per minute without deformation of the thin plastics web.

Abstract: A material for forming a high purity thin film which includes a silicone ladder polymer dissolved in an organic solvent is applied to a substrate to form a thin film thereon. The thin film is then heated, thereby removing the solvent and simultaneously curing the thin film. Subsequently, the cured thin film is exposed to an oxygen plasma to form a high purity SiO.sub.2 thin film on the substrate. Although the method consists of simple processes and employs low treatment temperatures, it is capable of forming a high purity SiO.sub.2 thin film which exhibits excellent step coverage and high dielectric breakdown strength.

Abstract: A method of improving the quality of an edge surface of a cutting device, the method comprising a first step of irradiating assisting ions obtained from a first substance, which is in the state of gas in the room temperature, and a second substance, which is vapor-deposited from a hard material, onto a surface of a base body to form a first layer comprising of the hard material influenced by the assisting ions; and a second step of irradiating the second substance onto the first layer in an atmosphere of the first substance to form a second layer.

Abstract: A method for manufacturing a precursor wire for a CFRM material, which comprised a continuous carbon fiber bundle of carbon filaments as a reinforcement and a metal as a matrix. In a pretreatment process, the fiber bundle with a sizing agent adhered thereto is passed through an inert atmosphere at a temperature in the range of from 350.degree. to 800.degree. C., thereby thermally decomposing the sizing agent, the chemical structure of the sizing agent including ether linkages, and a residue of thermal decomposition containing the ether linkages is left on the surface of each single filament. In a chemical vapor deposition process, a material gas containing a titanium compound and a boron compound and a reducing gas containing zinc are caused to act simultaneously on the fiber bundle at a temperature in the range of from 700.degree. to 800.degree. C.

Abstract: A high speed process for forming a multi layered thin film structure in a vacuum wherein each film is less than about four microns thick and the total layers can reach upwards to 4,000 or more. The polymeric layers are formed of a cross linked component selected from the group consisting of polyfunctional acrylates and mixtures of polyfunctional acrylates and monocrylates with the component having a preferable molecular weight of between 200 and 300 and a vapor pressure preferably in excess of 1.times.10.sup.-2 Torr. The polymeric layers may be interleaved with metal layers.

Abstract: This invention includes a method featuring steps having a transport (64, 68) to carry metal articles (10, 14) through a vacuum chamber (62, 66, 90) containing a plasma cleaning station (32) followed by exposure to an evaporant of metal (42) generated by an E-Beam (50) caused to condense on the articles in high vacuum. A channel structure (51) is provided to cause selective condensation upon the surface of said articles. The apparatus includes several stations (101, 102, 103) to provide multiple coatings on one or both sides of an article to be coated.

Abstract: Aluminum-coated ammonium perchlorate is prepared in an apparatus consisting f a four-opening reaction flask (which serves as a vacuum chamber). The reaction flask is fitted with an electrically-heated tungsten helix coil (for vaporizing the aluminum), a mercury diffusion pump, a mechanical vacuum pump, a dry ice-acetone-cooled trap, and a McLeod pressure-measurement gage. The heater electrodes are submitted through two of the openings; reduced pressure operation is maintained through the third opening, and the aluminum is fed through the fourth opening. The reaction flask is operated at approximately 10 Torr. A magnetic stirrer permits the ammonium perchlorate to be vaporized onto the surface of the ammonium perchlorate after the melted aluminum on the tungsten helix coil is subsequently vaporized from the tungsten helix coil.

Abstract: A magnetic recording medium comprising a substrate and, as a recording layer, a ferromagnetic metal thin layer formed on the substrate by deposition, in which the ferromagnetic metal thin layer contains oxygen atom in such a manner that concentrations of oxygen atom in a surface layer and an interfacial layer adjacent to the substrate are higher than that in an intermediate layer between the surface and interfacial layers, which has an improved coercive force and smaller magnetic domain.

Abstract: In manufacturing perpendicular magnetic recording medium wherein a magnetic layer containing Co and Cr as main contents on a running substrate of polymer film incident angle (.phi..sub.f) of vaporized atom to form said magnetic layer is 30.degree. or larger at the final part of the film formation to improve manufacturing capacity, and magnetic layer (119) is heated after forming the magnetic layer in an oxygen-containing atmosphere.

Abstract: A metallized high specular gloss polyethylene plexifilamentary film-fibril sheet with very low emissivity is made by a process of calendering a polyethylene film-fibril sheet between a smooth metal roll and a soft, resilient roll to form a sheet of high specular gloss, followed by vacuum metallization of the smooth high specular gloss surface. Such metallized sheets are useful as radiant barriers or roof liners for energy savings purposes.

Abstract: Magnetic recording media for perpendicular recording are produced by coating a non-magnetic substrate by a PVD method with a cobalt-containing, ferromagnetic metal layer which has magnetic anisotropy perpendicular to the plane of the layer, by a process in which the temperature of the substrate is increased by external heating during coating.

Abstract: A method for producing a magnetic recording medium in which a flexible nonmagnetic support is moved continuously while being retained in contact with a plurality of spaced apart cylindrical cans to form thin films of metal on opposite sides of the support successively at portions where the support is in contact with the cylindrical cans. The tension of the support with respect to the Young's modulus thereof is adjusted to satisfy predetermined conditional expressions in each of a plurality of support conveyance sections which are defined by the spaced cylindrical cans.

Abstract: Metal deposition apparatus having at least one roller arranged for consolidation of the deposited metal by rolling thereof in the course of the deposition process, which roller comprises a plurality of sub-rollers of independent movement.

Abstract: A method for producing a thin-film magnetic recording medium having an improved corrosion resistance and which permits production of the medium at a high speed. A magnetic material vapor flow from an evaporation source and a gas or ion flow are applied to a nonmagnetic base in an evaporation chamber and the two flows reacted with each other to form the thin-film magnetic layer on the nonmagnetic base. During this process, the expression P.sub.1 /P.sub.0 .ltoreq.0.1 is maintained, wherein P.sub.0 represents the degree of vacuum in the evaporation chamber, under a first condition where only the gas or ion flow is applied after the pressure in the chamber has been reduced to a predetermined degree of vacuum, and P.sub.1 represents the degree of vacuum in the chamber under a second condition where the magnetic material vapor flow is applied to the nonmagnetic base simultaneously with the gas or ion flow. The rate of formation of the thin-film magnetic layer is 200 .ANG./sec or more on the average.

Abstract: A reactor/transporter apparatus for coating particles by thermally decomposing at least one metal carbonyl into selected metal values and carbon monoxide with the metal values depositing on the particles. The reactor/transporter includes an upper end, a lower end and a source of transport fluid including the metal carbonyl. The transport fluid is supplied into the reactor/transporter for coating particles as they travel from the lower to the upper end. A separator is connected to the upper end of the reactor/transporter for separating the particles from the transport fluid. A downcomer is connected to the separator for collecting the particles. A heater heats the particles and a valve regulates the flow of particles into the reactor/transporter from the downcomer. In addition, the reactor/transporter has a purge vessel for removing coated particles.

Abstract: A method for preparing a magnetic recording medium comprises delivering a substrate from a delivery roller, passing the substrate through one or a plurality of conveying rollers and forming a magnetic recording layer on said substrate by the physical vapor deposition method in the course of running along the circumferential surface of a rotatory drum, characterized in that said substrate is heated between the delivery roller and the conveying roller or between a conveying roller and another conveying roller, and the conveying roller through which said substrate passes after heating is made an expander roller.

Abstract: A vertical magnetic recording medium is prepared by a process for vacuum-depositing a metal selected from cobalt and iron to form a magnetic layer on a substrate, wherein an oxygen gas and at least one gas chemically inactive in the vacuum deposition system, which is selected from nitrogen, argon, helium, neon, xenon, radon, methane and ethane, are introduced into the vacuum to an extent such that the pressure in the vicinity of the substrate is 1.times.10.sup.-3 to 5.times.10.sup.-2 Torr.

Abstract: A method and apparatus for forming a metallic sheet having a concave-convex profile by chemical vapor deposition utilizes a die having a profiled surface defined by a number of spaced protrusions. The method comprises covering at least a portion of the profiled surface with a mask of transparent material in such a way that the mask comes into a closely adjacent relation to the top faces of the protrusions, feeding at a reaction gas of a metallic compound to a restricted space defined between the mask and the profiled surface, radiating a light beam through the transparent mask onto the profiled surface in order to decompose the reaction gas and deposit on the profiled surface a metallic layer, and removing the resulting deposited metallic layer from the profiled surface to obtain a metallic sheet having a concave-convex profile corresponding to the profiled surface of the die.

Abstract: In a method of manufacturing a vertical magnetization type recording medium, a soft magnetic film layer is formed on each of the two sides of a non-magnetic support, and then a vertical magnetization film layer is formed on each soft magnetic film layer thus formed, thereby to provide a vertical magnetization type recording medium which has both sides uniform in characteristics and has characteristics making it excellent as a vertical magnetization type recording medium.This is a division of application Ser. No. 59,242 filed 6/10/87, which is a continuation of application Ser. No. 802,150 filed 11/27/85 both are now abandoned.

Abstract: A method of making metal carbide, nitride, or boride powders and mixtures thereof by direct reduction of metal compounds comprises (a) forming a reactant mixture, (b) heating the reactant mixture to temperatures that cause solid reactants to vaporize and above which the metal precursor compounds are reduced, (c) passing the heated reactant mixture through a converging-diverging nozzle designed to reduce the temperature of the mixture to a temperature and for a time sufficient for further product species to form and for nuclei to form and grow by condensation to form the product powders, and (d) exhausting the mixture and product powders from the nozzle into an expansion chamber.

Abstract: A wafer, in which at least one via hole is made in an insulating film formed on the substrate, is held on a wafer holder in a reaction chamber under reduced pressure, WF.sub.6 gas is introduced into the reaction chamber so that a first metallic film of W is formed on the substrate in the via hole. The additional WF.sub.6 gas and H.sub.2 gas are introduced into the chamber and light from a heating lamp is directed onto the wafer such that a difference in temperature is created between the insulating film and the first metallic film such that a second metallic film of W is formed only on the first metallic film. The temperature difference is created because of the differences of the absorption ratios of infrared components of the light between the insulating film, the substrate and the first metallic film. The WF.sub.6 gas and H.sub.