Sonic Or Ultrasonic Patents (Class 427/600)
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Patent number: 6368675Abstract: A system for applying a fluid coating onto a substrate includes forming a fluid wetting line by introducing a stream of fluid onto a first side of the substrate along a laterally disposed fluid-web contact area. An electrical force is created on the fluid from an effective electrical field originating from a location on the second side of the substrate and at a location substantially at and downstream of the fluid contact area. The electrical field can be generated in a highly effective manner relative to the coating fluid by a sharply defined electrode on the second side of the substrate. Ultrasonics combined with electrostatic fields further enhances coating process conditions and coating uniformity.Type: GrantFiled: April 6, 2000Date of Patent: April 9, 2002Assignee: 3M Innovative Properties CompanyInventors: John W. Louks, Sharon Wang, Luther E. Erickson
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Publication number: 20020037375Abstract: A method and device for generating droplets of immiscible fluids are provided. Extremely fine droplets may be generated, on the order of 1 picoliter or less, using focused acoustic energy to eject the droplets from a reservoir containing two or more immiscible fluids. Optionally, the droplets may be ejected onto discrete sites on a substrate surface so as to form an array thereon.Type: ApplicationFiled: September 24, 2001Publication date: March 28, 2002Inventors: Richard N. Ellson, Mitchell W. Mutz, James K. Foote
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Patent number: 6348243Abstract: A cork stopper for a wine bottle or the like is coated with, for example, silicone rubber to prevent impurities in the cork from contaminating the contents of the bottle. The coating may be applied by dipping or immersion preferably with ultrasonic agitation to improve penetration of the coating material into the cork pores. Prior to coating, the corks may be soaked in a solvent to leach out taint compounds from the surface of the cork, thereby reducing the likelihood of such compounds concentrating on the coating surface.Type: GrantFiled: June 29, 1998Date of Patent: February 19, 2002Inventors: Jess P Fuller, David B Orr, Steven J Watkins
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Patent number: 6335059Abstract: A system (100, 100′, 100″) and method for robotic manipulation of objects (130) is provided wherein particulates (110, 110′) are agitated by the transfer of energy thereto to establish patterned granular motion of the particulates (110, 110′). The patterned granular motion of the particulates (110, 110′) forms standing waves (112). The objects (130) align themselves with the standing waves (112) and thus are dynamically arranged in a configuration established by the location of the standing waves (112). The location of the standing waves (112) can be predetermined by controlling the waveform of the signals applied to the energy application system (140). The predetermined waveforms are supplied from the signal source (150, 154) to the energy application system (140).Type: GrantFiled: January 24, 2000Date of Patent: January 1, 2002Assignee: The Mitre CorporationInventor: Alexander D. Wissner-Gross
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Publication number: 20010055654Abstract: A method for forming metallic nanoclusters upon a substrate includes moving the substrate through a deposition chamber at a predetermined uniform velocity and depositing metallic precursor compounds onto the substrate. The metallic precursor compounds are subsequently bombarded with an ultrasonic jet of atomic hydrogen to form the metallic nanoclusters.Type: ApplicationFiled: April 30, 2001Publication date: December 27, 2001Inventor: Bret L. Halpern
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Patent number: 6319386Abstract: A megasonic plating technique employs a submerged megasonic transducer array (22) to create a ridge (38) of electrolyte that extends upward above a plating tray (12). A chuck (40) holds the substrate (42) so the face to be plated is oriented downwards. A controlled power supply (32) for the megasonic transducer array (22) energizes selected transducer cells (36) to create the ridge (38) of electrolyte and cause it to move or walk across the face of the substrate. This technique avoids need for drive mechanisms for either the tray (12) or the chuck (40). A annular anode element (24) may be positioned above the transducer array, and may be a consumable anode. This technique may be used for electroplating, electroless plating, or for other wet chemistry techniques such as planing or etching.Type: GrantFiled: February 3, 2000Date of Patent: November 20, 2001Assignee: Reynolds Tech Fabricators, Inc.Inventor: H. Vincent Reynolds
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Patent number: 6316060Abstract: The amount of coating dispensed by a metering rod type applicator such as used on size press coater for applying coating onto the size press rolls can be reduced by vibrating the metering rod. Such vibration of the metering rod has been found to reduce the thickness of the film passing through the metering nip of the coating applicator for a given metering nip rod pressure.Type: GrantFiled: August 20, 1996Date of Patent: November 13, 2001Assignee: Pacifica Papers Inc.Inventors: David Richard Elvidge, Malcolm Kenneth Smith
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Patent number: 6309711Abstract: Improved assembly and methods for manufacturing a three-dimensional object are described. The assembly includes a crucible for holding molten metal, an orifice disposed in the bottom of the crucible through which a jet of molten metal can flow towards a movable substrate, and a mechanically oscillating member immersed in the molten metal for controlling the flow of molten metal through the orifice and for breaking the flow of molten metal into the sequence of molten metal drops. As the drops land on the movable substrate, a three-dimensional object is built up. Continuously variable diameter or controllable planar jets may be used as the orifices. In forming drops from the output of a planar jet, the jet is first broken up by the oscillating member into horizontal cylindrical ligaments and the ligaments are then broken up into drops by acoustic energy applied by audio loudspeakers adjacent the falling ligaments. The assembly and methods are useful in the fields of rapid prototyping and materials processing.Type: GrantFiled: October 26, 2000Date of Patent: October 30, 2001Assignee: Arizona State UniversityInventors: Ampere A. Tseng, Tae-Woo Lee
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Publication number: 20010026839Abstract: A closed space is formed in a reduced pressure drying station, and the closed space is brought to a vacuum state. In this state, an EB unit irradiates a wafer mounted on a hot plate with an electron beam to foam an insulating film material. Subsequently, the hot plate is raised to a predetermined temperature, and drying processing is performed under a reduced pressure. As described above, since the foaming processing is performed in the reduced pressure drying station, bubbles remain in the insulating film, so that the existence of the bubbles can decrease the relative dielectric constant.Type: ApplicationFiled: March 21, 2001Publication date: October 4, 2001Inventors: Masami Akimoto, Yoichi Deguchi
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Publication number: 20010026850Abstract: A deposition process for coating a substrate with an ultrasonically generated aerosol spray of a pseudocapacitive material, or a precursor thereof, contacted to a substrate heated to a temperature to instantaneously solidify the pseudocapacitive material or convert the precursor to a solidified pseudocapacitive metal compound, is described. The ultrasonic aerosol droplets are much smaller in size than those produced by conventional processes and the heated substrate minimizes the possibility of contamination, thereby providing the present coating having an increased surface area. When the coated substrate is an electrode in a capacitor, a greater surface area results in an increased electrode capacitance.Type: ApplicationFiled: May 1, 2001Publication date: October 4, 2001Inventors: Ashish Shah, Barry C. Muffoletto
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Publication number: 20010024700Abstract: A deposition process for coating a substrate with an ultrasonically generated aerosol spray, is described. The resultant droplets are much smaller in size than those produced by conventional processes, thereby providing the present coating having an increased surface area. When the coated substrate is an electrode in a capacitor, a greater surface area results in an increased electrode capacitance. A preferred coating is of a ruthenium-containing oxide.Type: ApplicationFiled: June 1, 2001Publication date: September 27, 2001Inventors: Asbish Shah, Barry C. Muffoletto
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Publication number: 20010023661Abstract: A means of effectively applying an organic EL material application liquid with good application liquid cut-off is provided. A heater and an ultrasonic oscillator are formed in a thin film formation apparatus when applying the application liquid, and heat and ultrasonic oscillations are imparted to the application liquid. Defective application liquid cut-off and liquid clogging can thus be resolved.Type: ApplicationFiled: February 2, 2001Publication date: September 27, 2001Applicant: Semiconductor Energy Laboratory Co., Ltd.Inventors: Masaaki Hiroki, Noriko Shibata, Shunpei Yamazaki
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Patent number: 6277448Abstract: This invention relates to methods whereby nanoparticle precursor solutions are used in conventional thermal spray deposition for the fabrication of high-quality nanostructured coatings. The method allows combining nanoparticle synthesis, melting, and quenching into a single operation.Type: GrantFiled: June 4, 1999Date of Patent: August 21, 2001Assignees: Rutgers the State University of New Jersey, University of ConnecticutInventors: Peter R. Strutt, Bernard H. Kear, Ross F. Boland
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Publication number: 20010012544Abstract: An electrode substrate is brush cleaned with a hydrogen gas dissolved water, which has an oxidation-reduction potential of −860 mV to −400 mV and a pH of 8 to 12, before applying an alignment layer material on the electrode substrate. Thus, it is possible to decrease the manufacturing costs without decreasing the detergency.Type: ApplicationFiled: February 13, 2001Publication date: August 9, 2001Applicant: KABUSHIKI KAISHA TOSHIBAInventors: Yoshiyuki Nagahara, Naoya Hayamizu, Naoaki Sakurai, Noriko Okoshi, Toshitaka Nonaka, Hiroaki Furuya
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Patent number: 6258419Abstract: A process and apparatus for processing a monolayer film and transferring the monolayer film to a substrate are provided.Type: GrantFiled: September 2, 1999Date of Patent: July 10, 2001Assignee: Micron Technology, Inc.Inventor: Timothy A. Strodtbeck
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Patent number: 6248151Abstract: A method for manufacturing metal structures in which minute drops of a liquid metal are emitted from an acoustic device through an inert gas. The presence of the inert gas at the surface of the liquid metal prevent the formation of an oxide skin which would absorb acoustic energy and hinder droplet formation and emission. The droplets are then emitted towards a substrate, which may form as a carrier, where they may be used to form solder bumps, circuit traces, or accepted to form a three dimensional device.Type: GrantFiled: April 30, 1999Date of Patent: June 19, 2001Assignee: Xerox CorporationInventor: David A. Horine
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Publication number: 20010000330Abstract: A process and apparatus for processing a monolayer film and transferring the monolayer film to a substrate are provided.Type: ApplicationFiled: December 7, 2000Publication date: April 19, 2001Inventor: Timothy A. Strodtbeck
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Patent number: 6210748Abstract: An electrode substrate is brush cleaned with a hydrogen gas dissolved water, which has an oxidation-reduction potential of −860 mV to −400 mV and a pH of 8 to 12, before applying an alignment layer material on the electrode substrate. Thus, it is possible to decrease the manufacturing costs without decreasing the detergency.Type: GrantFiled: June 17, 1998Date of Patent: April 3, 2001Assignee: Kabushiki Kaisha ToshibaInventors: Yoshiyuki Nagahara, Naoya Hayamizu, Naoaki Sakurai, Noriko Okoshi, Toshitaka Nonaka, Hiroaki Furuya
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Patent number: 6197669Abstract: A method is provided for depositing an amorphous silicon thin film on a substrate. The method is carried out in a reactor chamber and can be a LPCVD, PECVD or RTCVD process. The method comprises introducing a gas species into the reactor chamber for a time sufficient to dehydrate the substrate and to form a thin layer of silicon on the substrate. Following formation of the thin layer of silicon, a dopant gas is introduced into the reactor chamber to form the doped silicon thin film. The temperature and pressure within the chamber is set to minimize formation of surface irregularities or pits within the thin amorphous silicon layer.Type: GrantFiled: April 15, 1999Date of Patent: March 6, 2001Assignee: Taiwan Semicondcutor Manufacturing CompanyInventors: Jih-Churng Twu, Syun-Ming Jang, Chen-Hua Yu
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Patent number: 6183658Abstract: A process for preparing an agglomerate-free suspension of nanosize iron-containing oxide particles coated in a stable manner comprises preparing an aqueous suspension of nanosize iron-containing oxide particles which are partially or completely in the form of agglomerates; adding a trialkoxysilane and a water-miscible polar organic solvent which has a boiling point at least 10° C. higher than the boiling point of water; treating the resulting suspension with ultrasound until at least 70% of the particles present are in the range of ±20% of the average particle diameter; removing the water by distillation under the action of ultrasound; and separating the non-disintegrated agglomerates.Type: GrantFiled: October 9, 1998Date of Patent: February 6, 2001Assignee: Institut für Neue Materialien gem. GmbHInventors: Christoph Lesniak, Thomas Schiestel, Rüdiger Nass, Helmut Schmidt
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Patent number: 6099916Abstract: A method for gumming sheet material, whereby a sheet is fed along a path directly facing a free surface of a bath of gum, and an electric field is generated over a portion of the sheet to draw the gum onto the portion.Type: GrantFiled: April 5, 1999Date of Patent: August 8, 2000Assignee: G. D. Societa'Per AzioniInventors: Mario Spatafora, Marco Ghini
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Patent number: 6037020Abstract: A method for treating a non-conductive through hole surface of a printed wiring board is disclosed. A printed wiring board including through holes is cleaned, conditioned, and a conductive coating is applied to the initially-nonconductive through hole by contacting it with a series of baths. The conductive coating, for example a graphite dispersion coating, facilitates later electroplating of the conductive surface. While at least partially immersing the through hole in one or more of these baths, ultrasonic energy is introduced in the bath in the vicinity of the through hole. The ultrasonic energy can be introduced during the entire immersing step, before the immersing step, or both. The ultrasonic energy reduces the formation of blowholes during later processing (and especially soldering) of the printed wiring board.Type: GrantFiled: January 29, 1997Date of Patent: March 14, 2000Assignee: Electrochemicals Inc.Inventors: Gregory Dean Garlough, Benjamin Todd Carroll, Michael Val Carano, Frank Polakovic
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Patent number: 6025036Abstract: A film of a coating material is produced on a substrate by a pulsed laser deposition method in which the material that forms the coating material is first combined with a matrix material to form a target. The target is then exposed to a source of laser energy to desorb the matrix material from the target and lift the coating material from the surface of the target. The target and the substrate are oriented with respect to each other so that the lifted coating material is deposited as a film upon said substrate. The matrix material is selected to have the property of being more volatile than the coating material and less likely than the coating material to adhere to the substrate. The matrix material is further selected as having the property such that when the target is exposed to a source of laser energy, the matrix material desorbs from the target and lifts the coating material from the surface of the target.Type: GrantFiled: May 28, 1997Date of Patent: February 15, 2000Assignee: The United States of America as represented by the Secretary of the NavyInventors: Robert Andrew McGill, Douglas Brian Chrisey
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Patent number: 6025034Abstract: This invention relates to methods whereby reprocessed nanoparticle powder feeds, nanoparticle liquid suspensions, and metalorganic liquids are used in conventional thermal spray deposition for the fabrication of high-quality nanostructured coatings. In one embodiment of this invention, the nanostructured feeds consist of spherical agglomerates produced by reprocessing as-synthesized nanostructured powders. The method is applicable to as-synthesized nanostructured powders made by a variety of liquid chemical processing methods. In another embodiment of this invention, a fine dispersion of nanoparticles is directly injected into a combustion flame or plasma thermal spray device to form high-quality nanostructured coatings.Type: GrantFiled: February 5, 1998Date of Patent: February 15, 2000Assignees: University of Connecticut and Rutgers, The State University of New JerseyInventors: Peter R. Strutt, Bernard H. Kear, Ross F. Boland
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Patent number: 6015597Abstract: A method for making particles coated with a diamond-like network, which can include additive components. The method comprises subjecting a multiplicity of particles to a carbon-based plasma in an evacuated radio frequency powered capacitively coupled reactor system in which ion sheaths are formed around the electrodes and wherein the particles are agitated in such a manner as to expose their surfaces to the reactive species in the plasma while keeping the particles substantially within an ion sheath.Type: GrantFiled: November 26, 1997Date of Patent: January 18, 2000Assignee: 3M Innovative Properties CompanyInventor: Moses M. David
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Patent number: 6007183Abstract: A method for manufacturing metal structures in which minute drops of a liquid metal are emitted from an acoustic device through an inert gas. The presence of the inert gas at the surface of the liquid metal prevent the formation of an oxide skin which would absorb acoustic energy and hinder droplet formation and emission. The droplets are then emitted towards a substrate, which may form as a carrier, where they may be used to form solder bumps, circuit traces, or accreted to form a three dimensional device.Type: GrantFiled: November 25, 1997Date of Patent: December 28, 1999Assignee: Xerox CorporationInventor: David A. Horine
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Patent number: 5976635Abstract: A method for coating a paper or board web or the like (7) using a coating mix aerosol generated by means of an ultrasonic atomizer. The output power of a plurality of ultrasonic transducers (15) disposed proximate to a surface of the moving web (7) is passed via a vibrated beam (14) to a coating mix flow (2) flowing proximate to the web (5). Ultrasonic vibrations applied to the coating mix atomize the upper layer of the coating mix flow into an aerosol (11) which is emitted toward the web (7) and adheres thereto.Type: GrantFiled: September 18, 1997Date of Patent: November 2, 1999Assignee: Valmet CorporationInventor: Jorma Kinnunen
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Patent number: 5935643Abstract: There is disclosed a method for manufacturing an electrode for phosphate type fuel cells, utilizing a combination of a coating process and a rolling process. Carbon paper is waterproofed to give an electrode support. Separately, platinum-dispersed carbon powder (Pt/C) is added in a solvent and mechanically stirred to give a homogeneous mixture which is, then, added with a PTFE emulsion at an amount of about 40-55 wt % and stirred. Another stirring is executed in the presence of a bridge-builder and a peptization agent, to produce an electrocatalyst layer slurry. Using a coating apparatus, the electrocatalyst slurry is coated upon the electrode support in a uniform thickness. The resulting structure is dried for 30 min in an inert atmosphere of 225.degree. C. to completely remove the solvent from the catalyst layer, passed through a rolling apparatus and subjected to sintering for 30 min in an inert atmosphere of 350.degree. C., to produce the electrode.Type: GrantFiled: December 16, 1997Date of Patent: August 10, 1999Assignee: Korea Institute of Energy ResearchInventors: Rak-Hyun Song, Dong-Ryul Shin, Chang-Soo Kim, Byung-Rok Lee
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Patent number: 5932302Abstract: In a process for fabricating a carbon coating, an object such as a magnetic recording medium is disposed on a side of an electrode connected to a high-frequency power supply. Ultrasonic vibrations are supplied to the object. Discharge is generated between the electrode connected to the high-frequency power supply and a grounded electrode to fabricate a carbon coating on the surface of the object. Also, an electrode interval is set to 6 mm or less, pressure between the electrodes is set to 15 Torr to 100 Torr, whereby high-density plasma is generated to form an ion sheath on an anode side. Therefore, a coating is fabricated on the surface of the object by bombardment of ions and the coating contains pin-holes having a density of 30/mm.sup.2 or less.Type: GrantFiled: August 13, 1997Date of Patent: August 3, 1999Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Kenji Itoh, Shigenori Hayashi
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Patent number: 5910345Abstract: Deleterious effects of friction between bullets and the barrel of a firearm are reduced by improving the lubricity of the surface of the bullet by coating the same with molybdenum disulfide according to a method that includes heating the bullets to be coated to open the pores thereof and then agitating the bullets and molybdenum disulfide with an impacting instrumentality to drive the molybdenum disulfide against the bullet to be deeply absorbed therein. The bullets are also polished and burnished.Type: GrantFiled: September 18, 1997Date of Patent: June 8, 1999Inventor: William Luban
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Patent number: 5894985Abstract: An apparatus for depositing a selected pattern of solder onto a substrate on which electronic components are to be mounted. The apparatus includes a substrate support, a replaceable solder cartridge, and a solder ejector. The replaceable solder cartridge defines a cavity for containing solder and has an orifice for ejecting a continuous stream of molten solder. The solder ejector has a mechanism for retaining the replaceable solder cartridge during solder deposition and is positioned relative to the substrate support to deposit molten solder ejected from the orifice of the replaceable solder cartridge onto the substrate.Type: GrantFiled: September 24, 1996Date of Patent: April 20, 1999Assignee: Rapid Analysis Development CompanyInventors: Melissa E. Orme-Marmarelis, Eric Phillip Muntz
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Patent number: 5858475Abstract: A method is disclosed to improve the planarization of a coating upon a substrate, in particular to improve the planarization of a photoresist or spin-on-glass coating upon a semiconductor wafer. This is achieved by coupling an ultrasonic wave generator to either the chuck or the spindle of the chuck. Ultrasonic waves emanating from the ultrasonic generator are induced into the coating, vibrating it. The vibration causes coating material to fill in the valleys of the coating, thus planarizing the surface of the coating.Type: GrantFiled: December 23, 1996Date of Patent: January 12, 1999Assignee: Taiwan Semiconductor Manufacturing Company, LtdInventor: Wei-Kay Chiu
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Patent number: 5858503Abstract: A method of applying chemical charge-modifiers to a permeable sheet including the steps of: providing a permeable sheet having a plurality of individual exposed surfaces, at least a portion of which having relatively low surface energies; providing an aqueous solution containing amphiphilic macromolecules, the solution having a relatively high surface tension; contacting the solution containing amphiphilic macromolecules under shear stress conditions with the permeable sheet so that at least a portion of the amphiphilic macromolecules are adsorbed onto at least some individual exposed surfaces to form a coated permeable sheet; and contacting the coated permeable sheet with a solution containing chemical charge modifiers to incorporate chemical charge modifiers onto at least a portion of the amphiphilic macromolecules.Type: GrantFiled: October 26, 1995Date of Patent: January 12, 1999Assignee: Kimberly-Clark Worldwide, Inc.Inventors: Dennis Stein Everhart, Kristi Lynn Kiick-Fischer
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Patent number: 5851601Abstract: A method for controlling the application of lubricant to thin film, magnetic disk media entailing ultrasonic vibration of heated disk lubricant.Type: GrantFiled: August 29, 1997Date of Patent: December 22, 1998Assignee: StorMedia, Inc.Inventors: Yassin Mehmandoust, Hamid R. Samani, Atef H. Eltoukhy
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Patent number: 5843535Abstract: The invention relates to apparatus for use in a process in which a layer is formed on a surface of a workpiece and then forced into underlying voids. The apparatus for applying elevated pressure to the workpiece 1 comprises a chamber 103 (which includes a workpiece support 109a) means 108 for flooding the chamber 103 with liquid to immerse a workpiece 1 on the support 109a and means for applying a pulse of elevated pressure to the liquid and hence the workpiece. These means may include a liquid reservoir 102, which shares a common flexible wall 101 with the chamber 103, and electrodes 100 and 104 to which a high voltage pulse can be supplied to create a shock in the liquid of reservoir 102 which is transmitted to the liquid in 103 via the wall 101.Type: GrantFiled: October 2, 1995Date of Patent: December 1, 1998Assignee: Trikon Technologies LimitedInventor: Christopher David Dobson
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Patent number: 5840375Abstract: A rare earth-based permanent magnet such as a neodymium-iron-boron permanent magnet, which is disadvantageous in respect of the low corrosion resistance, can be imparted with high corrosion resistance by providing the surface with a protective coating film of vitrified alkali metal silicate, e.g., sodium silicate, of which the SiO.sub.2 :(alkali metal oxide) molar ratio is in the range from 1.5 to 20. The vitrified alkali metal silicate-based protective coating film can be formed by coating the surface of the magnet with an aqueous coating solution containing sodium silicate to form a coating layer which is dried and subjected to a heat treatment at 50.degree. to 450.degree. C. to effect vitrification of the alkali metal silicate. The thickness of the thus formed protective coating film should be in the range from 5 nm to 10 .mu.m.Type: GrantFiled: June 12, 1996Date of Patent: November 24, 1998Assignee: Shin-Etsu Chemical Co., Ltd.Inventors: Kenichi Katsumi, Takehisa Minowa, Masao Yoshikawa
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Patent number: 5837332Abstract: A method and apparatus for preparing thin films, a device, an electronic and magnetic apparatus, an information recording and reproducing apparatus, an information processing apparatus and a crystal preparing method from the molten state. A thin film is prepared as the substrate or the surface of the substrate is being excited and characterized by a device having at least a substrate and a thin film with at least one layer prepared thereon and an electronic and magnetic apparatus having integration of the devices, wherein at least one layer of the thin film is prepared as the surface of the substrate is being excited. The recording and reproducing apparatus for recording and reproducing information is composed of an information memory medium device having a recording layer of the thin film prepared as the surface of the substrate is being excited and a recording head whose core is prepared as the surface of the substrate is being excited.Type: GrantFiled: July 31, 1996Date of Patent: November 17, 1998Assignees: Nihon Victor Kabushiki-kaisha, Kabushiki-kaisha Hitachi SeisakushoInventors: Migaku Takahashi, Katsuya Yokoyama, Jun Yamada, Takashi Shiba
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Patent number: 5763018Abstract: A dielectric layer is formed on a semiconductor substrate by the steps of depositing water molecules and plasma-dissociated products of water on a dielectric layer-forming surface of a substrate according to a plasma enhanced CVD process, and forming a dielectric layer on the dielectric layer-forming surface of the substrate according to a CVD process using a silicon-containing gas and an oxidant as starting gases. Alternatively, water molecules alone may be deposited on the dielectric layer-forming surface according to a normal or reduced pressure CVD process used in placed of the above-mentioned CVD process. By this, the dielectric layer becomes so fluid that a final layer is free of any void and flat. In addition, the dielectric layer having a low concentration of hydroxyl group therein with a good quality can be formed at high productivity.Type: GrantFiled: May 29, 1996Date of Patent: June 9, 1998Assignee: Sony CorporationInventor: Junichi Sato
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Patent number: 5753302Abstract: The present invention provides an acoustic dispenser for propelling objects toward a substrate, together with methods of use of the dispenser. The acoustic dispenser uses a source of acoustic vibration and a membrane for the application of acoustic vibration wherein the objects are propelled from the membrane to a substrate. The acoustic dispenser and the methods of the invention can be used with numerous types of objects. In some embodiments, the objects are particles in a dry powder, which can include, for example, a pharmaceutically active ingredient. In other embodiments, the objects are beads, which preferably have an average diameter of about 100 to about 300 microns. Additionally, the acoustic dispenser can be used with more than one type of object, for example, two types of objects such as beads and dry powder.Type: GrantFiled: June 10, 1996Date of Patent: May 19, 1998Assignee: David Sarnoff Research Center, Inc.Inventors: Hoi Cheong Steve Sun, Pabitra Datta, William Yat Chung Chiang, Howard Christopher Rivenburg, Bawa Singh, Dominic S. Rosati, James Regis Matey
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Patent number: 5747117Abstract: A film is applied to a substrate in accordance with a predetermined pattern by applying a solution of a copolymer of fluoropolymers dissolved in a solvent onto the surface of the substrate; curing and annealing the solution to boil off the solvent and form a copolymer film on the substrate; depositing a thin metal film on the copolymer film; patterning the thin metal film by a photoresist etching process to expose the underlying copolymer film in accordance with the predetermined pattern; removing the exposed copolymer film so that the underlying substrate is exposed in accordance with the predetermined pattern; removing any remaining thin metal film; depositing the film to the remaining copolymer film and exposed substrate; then removing the remaining copolymer film and any film applied thereon by ultrasonic cleaning.Type: GrantFiled: June 4, 1997Date of Patent: May 5, 1998Assignee: Servo Corporation of AmericaInventor: Rand Dannenberg
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Patent number: 5741557Abstract: A method for forming a desired pattern of a material of conductive or non-conductive type on a variety of substrates. It is based on the use of a pen which essentially consists of a refractory tip wetted with the material in the molten state. The pen preferably consists of a pointed tungsten tip attached to the top of a V-shaped tungsten heater, forming a heater assembly. The tip and the heater top portion are roughened at the vicinity of the welding point. In turn, the ends of the V-shaped heater are welded to the pins of a 3-lead TO-5 package base. The pen is incorporated in an apparatus adapted to the direct writing technique. To that end, the pen is attached to a supporting device capable of movements in the X, Y and Z directions, while the substrate is placed on an X-Y stage for adequate X, Y and Z relative movements therebetween. The two pins of the pen are connected to a power supply to resistively heat the heater.Type: GrantFiled: May 24, 1995Date of Patent: April 21, 1998Assignee: International Business Machines CorporationInventors: Antoine Corbin, Philippe Demoncy, Jacques Foulu, Pierre Sudraud
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Patent number: 5736195Abstract: A method for coating a substrate with a relatively thin, uniform film of a fluid with a minimum of waste. A volume of fluid is produced and the size and velocity of the volume of fluid are selected such that the volumes of fluid break up upon impact with the substrate without splashing or rippling. The apparatus and method are ideal for coating semiconductor wafers with a photoresist solution. The kinetic energy of the volume of fluid is adjusted to overcome the free energy associated with surface tension on impact. The collision of the fluid thus results in a uniform, thin coating of photoresist or other coating solution which may then be further processed by conventional techniques.Type: GrantFiled: April 3, 1995Date of Patent: April 7, 1998Assignee: Mobium Enterprises CorporationInventor: Peter D. Haaland
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Patent number: 5723184Abstract: A method and apparatus are disclosed for atomizing or vaporizing chloroprofam or any other organic compound that is a solid at ambient temperature and pressure conditions. The method provides an air stream that can be nearly saturated with chloroprofam vapor and free of both combustion products and carrier solvents. In addition, the temperature of the air stream can be maintained at a temperature that is sufficiently low that it will not adversely affect tubers which are bathed in the air stream. The method includes introducing heated liquified chloroprofam under extreme pressure into a moving air mass within an atomization duct. An apparatus by which the method may be practiced includes a fluid delivery tube which transports liquified chloroprofam under pressure, first to a liquid-heating heat exchanger, and second to a discharge nozzle within a vaporization duct.Type: GrantFiled: August 9, 1996Date of Patent: March 3, 1998Inventor: Christopher W. Yamamoto
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Patent number: 5695829Abstract: Proteins are applied to a polymeric article by contacting the polymeric article with a protein and exposing the contacted polymeric article to a frequency with a sufficient power dissipation for a sufficient period of time. A frequency range for applying proteins to a polymeric article is between about 5 kHz to about 40 kHz with a minimum power dissipated of about 1 watt. As a result, polymeric articles so treated exhibit improved water wettability, proteins may be applied to the polymeric articles very rapidly and more uniformly than by other methods, and polymeric articles having selected zones of wettability may be produced.Type: GrantFiled: September 25, 1996Date of Patent: December 9, 1997Assignee: Kimberly-Clark Worldwide, Inc.Inventors: Roger Bradshaw Quincy, III, Ronald Sinclair Nohr, Elizabeth Deibler Gadsby
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Patent number: 5695833Abstract: Method and apparatus for applying thin films of coating material with a high degree of uniformity, high utilization of coating fluid and superior adhesion characteristics are disclosed. According to the method, an inverted substrate is moved horizontally and countercurrent to a two stage coating fluid applicator assembly. The first coating stage utilizes megasonic pressure waves directed inclinedly upwardly through the coating fluid/substrate surface interface to wet, clean, degas and deposit coating fluid on the substrate surface. A second stage removes excess coating fluid at the substrate's trailing edge so as to precisely establish a thin and uniform coating film. After the coating has been applied, spinning of the substrate may be employed to enable further coating film uniformity and to increase the film's drying rate.Type: GrantFiled: June 12, 1996Date of Patent: December 9, 1997Inventors: Hendrik F. Bok, Philip J. Birbara
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Patent number: 5688565Abstract: A precursor liquid comprising several metal 2-ethylhexanoates, such as stroritium tantalum and bismuth 2-ethylhexanoates, in a xylenes/methyl ethyl ketone solvent is prepared, a substrate is placed within a vacuum deposition chamber, the precursor liquid is misted, and the mist is flowed into the deposition chamber while maintaining the chamber at ambient temperature to deposit a layer of the precursor liquid on the substrate. The liquid is dried, baked, and annealed to form a thin film of a layered superlattice material, such as strontium bismuth tantalate, on the substrate. Then an integrated circuit is completed to include at least a potion of the layered superlattice material film in a component of the integrated circuit.Type: GrantFiled: June 7, 1995Date of Patent: November 18, 1997Assignee: Symetrix CorporationInventors: Larry D. McMillan, Carlos A. Paz de Araujo, Michael C. Scott
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Patent number: 5688464Abstract: Methods and apparatus for providing a vibrational enhancement to the recoating process in stereolithography are disclosed. The formation of a thin layer of building material over a previous layer of structure of a partially completed three-dimensional object, in preparation for formation of an additional layer of structure, is enhanced by the use of vibrational energy imparted to the building medium. In a first preferred apparatus, vibration is induced into the surface of the material by a plurality of vibrating needles that penetrate below the working surface to a sufficient depth to ensure adequate coupling but not deep enough to come into contact with the surface of the partially completed part. In a second preferred apparatus, vibration is coupled directly to the object support. The vibrational energy is then transmitted through the part to the surface of the building material.Type: GrantFiled: March 16, 1995Date of Patent: November 18, 1997Assignee: 3D Systems, Inc.Inventors: Paul F. Jacobs, J. Scot Thompson, Hop D. Nguyen, Dennis R. Smalley
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Patent number: 5681615Abstract: A method for fabrication of polymer composite layers in a vacuum is disclosed. More specifically, the method of dissolving salts in a monomer solution, vacuum flash evaporating the solution, condensing the flash evaporated solution as a liquid film, and forming the condensed liquid film into a polymer composite layer on a substrate is disclosed.Type: GrantFiled: July 27, 1995Date of Patent: October 28, 1997Assignee: Battelle Memorial InstituteInventors: John D. Affinito, Mark E. Gross
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Patent number: 5656339Abstract: The invention relates to a method of applying a fluid (12) to a surface (13), the pressurised fluid being applied from a container (1) to the surface via a hollow needle (7). In order to preclude clogging of the needle the needle is subjected to a longitudinal vibration during the application of fluid. The invention also relates to an arrangement for carrying out the method, the arrangement comprising a vibration device (3), such as a piezoelectric transducer, which can be coupled to the needle (7) to set the needle into longitudinal vibration. The fluid may be, for example, a solder paste or an adhesive.Type: GrantFiled: June 20, 1995Date of Patent: August 12, 1997Assignee: U.S. Philips CorporationInventors: Wessel J. Wesseling, Nicolaas J. A. Van Veen
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Patent number: 5622752Abstract: A printed circuit board ("PCB") is moved on a conveyor towards an ultrasonic spray head ("head") that is mounted below the PCB on a guide rail. The guide rail and the direction of motion of the PCB define an acute angle. When the PCB reaches a predetermined position, the head begins a motion across the PCB, spraying a rectangular swatch of soldering flux. The velocity of the head is controlled such that the swatch of flux is substantially perpendicular to the direction of motion of the PCB. After spraying, the head deactivates and reciprocates back across the PCB such that no flux is sprayed. The cycle repeats after a predetermined delay whereby adjacent swatches of flux do not substantially overlap.Type: GrantFiled: April 24, 1995Date of Patent: April 22, 1997Assignee: Ultrasonic Systems, Inc.Inventors: Stuart Erickson, Drew Erickson