Buried Channel Patents (Class 438/175)
  • Patent number: 5885847
    Abstract: The invention relates to a method of fabricating a compound semiconductor device by forming a first and a second compound semiconductor devices having a plurality of different epitaxial layers on a common semiconductor substrate.
    Type: Grant
    Filed: April 11, 1997
    Date of Patent: March 23, 1999
    Assignee: Electronics And Telecommunications Research Institute
    Inventors: Hyung-Sup Yoon, Jin-Hee Lee, Byung-Sun Park, Chul-Sun Park, Kwang-Eui Pyun