And Passive Device (e.g., Resistor, Capacitor, Etc.) Patents (Class 438/190)
  • Patent number: 9029180
    Abstract: A method of producing a temperature sensing device is provided. The method includes forming at least one silicon layer and at least one electrode or contact to define a thermistor structure. At least the silicon layer is formed by printing, and at least one of the silicon layer and the electrode or contact is supported by a substrate during printing thereof. Preferably, the electrodes or contacts are formed by printing, using an ink comprising silicon particles having a size in the range 10 nanometers to 100 micrometers, and a liquid vehicle composed of a binder and a suitable solvent. In some embodiments the substrate is an object the temperature of which is to be measured. Instead, the substrate may be a template, may be sacrificial, or may be a flexible or rigid material. Various device geometries are disclosed.
    Type: Grant
    Filed: September 13, 2011
    Date of Patent: May 12, 2015
    Assignee: PST Sensors (Proprietary) Limited
    Inventors: David Thomas Britton, Margit Harting
  • Patent number: 9018060
    Abstract: A variable capacitance sensor includes a first conductive electrode comprising electrically interconnected first conductive sheets; a second conductive electrode comprising electrically interconnected second conductive sheets, wherein the first conductive sheets are at least partially interleaved with the second conductive sheets, and wherein the second conductive electrode is electrically insulated from the first conductive electrode; and microporous dielectric material at least partially disposed between and contacting the first conductive sheets and the second conductive sheets. A method of making a variable capacitance sensor by replacing ceramic in a ceramic capacitor with a microporous material is also disclosed.
    Type: Grant
    Filed: June 2, 2011
    Date of Patent: April 28, 2015
    Assignee: 3M Innovative Properties Company
    Inventors: Stefan H. Gryska, Michael C. Palazzotto
  • Patent number: 9006703
    Abstract: Aspects of the present invention relate to method for reducing lateral extrusion formed in semiconductor structures and semiconductor structures formed thereof. Various embodiments include a method for reducing lateral extrusion formed in semiconductor structures. The method can include removing a portion of a first lateral extrusion in an aluminum layer of the semiconductor structure, and determining a post-removal thickness of a dielectric layer positioned adjacent the aluminum layer. The post-removal thickness may be determined subsequent to the removing of the portion of the first lateral extrusion. The method can also include determining a difference between the post-removal thickness of the dielectric layer and a pre-removal thickness of the dielectric layer.
    Type: Grant
    Filed: July 31, 2013
    Date of Patent: April 14, 2015
    Assignee: International Business Machines Corporation
    Inventors: Shawn A. Adderly, Brian M. Czabaj, Daniel A. Delibac, Jeffrey P. Gambino, Matthew D. Moon, David C. Thomas
  • Patent number: 8999781
    Abstract: A method for fabricating a semiconductor device is described. A plurality of isolation structures is formed in a substrate. The isolation structures are arranged in parallel and extend along a first direction. A well of a first conductive type is formed in the substrate. A plurality of first doped regions of a second conductive type is formed in the well. Each of the first doped regions is formed between two adjacent isolation structures. A plurality of gates of the second conductive type is formed on the substrate. The gates are arranged in parallel and extend along a second direction different from the first direction. One of the first doped regions is connected to one of the gates. A plurality of second doped regions of the first conductive type is formed in the well. Each of the second doped regions is formed in the first doped regions between two adjacent gates.
    Type: Grant
    Filed: March 18, 2013
    Date of Patent: April 7, 2015
    Assignee: Winbond Electronics Corp.
    Inventor: Wen-Yueh Jang
  • Patent number: 8993396
    Abstract: A method for fabricating a capacitor includes forming a mold structure over a substrate, wherein the mold structure has a plurality of open parts and has a mold layer stacked with a support layer; forming cylinder type lower electrodes in the open parts; forming a first upper electrode over an entire surface of a structure including the cylinder type lower electrodes to fill the cylinder type lower electrodes; defining a through hole that passes through portions of the first upper electrode and the support layer; removing the mold layer through the through hole and exposing the cylinder type lower electrodes; forming a second upper electrode to fill the through hole and spaces between the cylinder type lower electrodes; and forming a third upper electrode to connect the second upper electrode and the first upper electrode with each other.
    Type: Grant
    Filed: August 27, 2012
    Date of Patent: March 31, 2015
    Assignee: SK Hynix Inc.
    Inventors: Jong-Kook Park, Yong-Tae Cho
  • Patent number: 8970003
    Abstract: System and method for embedded passive integration relating to a multi-chip packaged device. The packaged device includes a capacitance layer that is configured for electrical coupling to a power supply and to a reference power supply. Further, the capacitance layer is configured for filtering the power supply and providing a filtered power supply. A semiconductor layer including a logic device is configured for electrical coupling to the filtered power supply.
    Type: Grant
    Filed: July 29, 2011
    Date of Patent: March 3, 2015
    Assignee: Tessera, Inc.
    Inventor: Michael Curtis Parris
  • Patent number: 8946000
    Abstract: A back-end-of-line thin ion beam deposited fuse (204) is deposited without etching to connect first and second last metal interconnect structures (110, 120) formed with last metal layers (LM) in a planar multi-layer interconnect stack to programmably connect separate first and second circuit connected to the first and second last metal interconnect structures.
    Type: Grant
    Filed: February 22, 2013
    Date of Patent: February 3, 2015
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Douglas M. Reber, Mehul D. Shroff, Edward O. Travis
  • Patent number: 8916426
    Abstract: Device structures, design structures, and fabrication methods for passive devices that may be used as electrostatic discharge protection devices in fin-type field-effect transistor integrated circuit technologies. A device region is formed in a trench and is coupled with a handle wafer of a semiconductor-on-insulator substrate. The device region extends through a buried insulator layer of the semiconductor-on-insulator substrate toward a top surface of a device layer of the semiconductor-on-insulator substrate. The device region is comprised of lightly-doped semiconductor material. The device structure further includes a doped region formed in the device region and that defines a junction. A portion of the device region is laterally positioned between the doped region and the buried insulator layer of the semiconductor-on-insulator substrate. Another region of the device layer may be patterned to form fins for fin-type field-effect transistors.
    Type: Grant
    Filed: March 27, 2012
    Date of Patent: December 23, 2014
    Assignee: International Business Machines Corporation
    Inventors: William F. Clark, Jr., Robert J. Gauthier, Jr., Terence B. Hook, Junjun Li, Theodorus E. Standaert, Thomas A. Wallner
  • Patent number: 8871582
    Abstract: One method includes forming a recessed gate/spacer structure that partially defines a spacer/gate cap recess, forming a gate cap layer in the spacer/gate cap recess, forming a gate cap protection layer on an upper surface of the gate cap layer, and removing portions of the gate cap protection layer, leaving a portion of the gate cap protection layer positioned on the upper surface of the gate cap layer. A device disclosed herein includes a gate/spacer structure positioned in a layer of insulating material, a gate cap layer positioned on the gate/spacer structure, wherein sidewalls of the gate cap layer contact the layer of insulating material, and a gate cap protection layer positioned on an upper surface of the gate cap layer, wherein the sidewalls of the gate cap protection layer also contact the layer of insulating material.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: October 28, 2014
    Assignees: GLOBALFOUNDRIES Inc., International Business Machines Corporation
    Inventors: Daniel Pham, Xiuyu Cai, Balasubramanian Pranatharthiharan, Pranita Kulkarni
  • Patent number: 8872273
    Abstract: An integrated circuit containing a gate controlled voltage divider having an upper resistor on field oxide in series with a transistor switch in series with a lower resistor. A resistor drift layer is disposed under the upper resistor, and the transistor switch includes a switch drift layer adjacent to the resistor drift layer, separated by a region which prevents breakdown between the drift layers. The switch drift layer provides an extended drain or collector for the transistor switch. A sense terminal of the voltage divider is coupled to a source or emitter node of the transistor and to the lower resistor. An input terminal is coupled to the upper resistor and the resistor drift layer. A process of forming the integrated circuit containing the gate controlled voltage divider.
    Type: Grant
    Filed: August 6, 2012
    Date of Patent: October 28, 2014
    Assignee: Texas Instruments Incorporated
    Inventors: Hideaki Kawahara, Marie Denison, Sameer Pendharkar, Philip L. Hower, John Lin, Robert A. Neidorff
  • Patent number: 8829527
    Abstract: The present invention provides a method for manufacturing a highly reliable display device at a low cost with high yield. According to the present invention, a step due to an opening in a contact is covered with an insulating layer to reduce the step, and is processed into a gentle shape. A wiring or the like is formed to be in contact with the insulating layer and thus the coverage of the wiring or the like is enhanced. In addition, deterioration of a light-emitting element due to contaminants such as water can be prevented by sealing a layer including an organic material that has water permeability in a display device with a sealing material. Since the sealing material is formed in a portion of a driver circuit region in the display device, the frame margin of the display device can be narrowed.
    Type: Grant
    Filed: September 14, 2012
    Date of Patent: September 9, 2014
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Satoshi Murakami, Motomu Kurata, Hiroyuki Hata, Mitsuhiro Ichijo, Takashi Ohtsuki, Aya Anzai, Masayuki Sakakura
  • Patent number: 8822281
    Abstract: A semiconductor device has a semiconductor die mounted over a carrier. An encapsulant is deposited over the semiconductor die and carrier. An insulating layer is formed over the semiconductor die and encapsulant. A plurality of first vias is formed through the insulating layer and semiconductor die while mounted to the carrier. A plurality of second vias is formed through the insulating layer and encapsulant in the same direction as the first vias while the semiconductor die is mounted to the carrier. An electrically conductive material is deposited in the first vias to form conductive TSV and in the second vias to form conductive TMV. A first interconnect structure is formed over the insulating layer and electrically connected to the TSV and TMV. The carrier is removed. A second interconnect structure is formed over the semiconductor die and encapsulant and electrically connected to the TSV and TMV.
    Type: Grant
    Filed: February 23, 2010
    Date of Patent: September 2, 2014
    Assignee: STATS ChipPAC, Ltd.
    Inventors: Reza A. Pagaila, Yaojian Lin, Seung Uk Yoon
  • Patent number: 8822998
    Abstract: An organic light emitting display device includes a substrate, a plurality of sub-pixels on the substrate, each sub-pixel including a first region configured to emit light and a second region configured to transmit external light, a plurality of thin film transistors disposed in the first region of the each sub-pixel, a plurality of first electrodes disposed in the first region of each sub-pixel and electrically connected to the thin film transistors, a first insulating layer on at least a portion of the first region of each sub-pixel to cover a portion of the first electrode, an organic emission layer on the first electrode, a second insulating layer on at least a portion of the second region of each sub-pixel, the second insulating layer including a plurality of openings therein, and a second electrode covering the organic emission layer, the first insulating layer, and the second insulating layer.
    Type: Grant
    Filed: March 8, 2011
    Date of Patent: September 2, 2014
    Assignee: Samsung Display Co., Ltd.
    Inventors: Seong-Min Kim, Jun-Ho Choi, Jin-Koo Chung
  • Patent number: 8823009
    Abstract: The present invention provides a method for manufacturing a highly reliable display device at a low cost with high yield. According to the present invention, a step due to an opening in a contact is covered with an insulating layer to reduce the step, and is processed into a gentle shape. A wiring or the like is formed to be in contact with the insulating layer and thus the coverage of the wiring or the like is enhanced. In addition, deterioration of a light-emitting element due to contaminants such as water can be prevented by sealing a layer including an organic material that has water permeability in a display device with a sealing material. Since the sealing material is formed in a portion of a driver circuit region in the display device, the frame margin of the display device can be narrowed.
    Type: Grant
    Filed: June 1, 2012
    Date of Patent: September 2, 2014
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Satoshi Murakami, Motomu Kurata, Hiroyuki Hata, Mitsuhiro Ichijo, Takashi Ohtsuki, Aya Anzai, Masayuki Sakakura
  • Patent number: 8815695
    Abstract: A first electrode layer for a Metal-Insulator-Metal (MIM) DRAM capacitor is formed wherein the first electrode layer contains a conductive base layer and conductive metal oxide layer. A second electrode layer for a Metal-Insulator-Metal (MIM) DRAM capacitor is formed wherein the second electrode layer contains a conductive base layer and conductive metal oxide layer. In some embodiments, both the first electrode layer and the second electrode layer contain a conductive base layer and conductive metal oxide layer.
    Type: Grant
    Filed: December 27, 2012
    Date of Patent: August 26, 2014
    Assignees: Intermolecular, Inc., Elpida Memory, Inc.
    Inventors: Xiangxin Rui, Mitsuhiro Horikawa, Hiroyuki Ode, Karthik Ramani
  • Patent number: 8796738
    Abstract: There are disclosed herein various implementations of a semiconductor structure and method. The semiconductor structure comprises a substrate, a transition body over the substrate, and a group III-V intermediate body having a bottom surface over the transition body. The semiconductor structure also includes a group III-V device layer over a top surface of the group III-V intermediate body. The group III-V intermediate body has a continuously reduced impurity concentration wherein a higher impurity concentration at the bottom surface is continuously reduced to a lower impurity concentration at the top surface.
    Type: Grant
    Filed: September 5, 2012
    Date of Patent: August 5, 2014
    Assignee: International Rectifier Corporation
    Inventor: Michael A. Briere
  • Patent number: 8796087
    Abstract: A semiconductor device including a substrate; a bottom electrode on the substrate; a first dielectric layer on the bottom electrode, the first dielectric layer including a first metal oxide including at least one of Hf, Al, Zr, La, Ba, Sr, Ti, and Pb; a second dielectric layer on the first dielectric layer, the second dielectric layer including a second metal oxide including at least one of Hf, Al, Zr, La, Ba, Sr, Ti, and Pb, wherein the first metal oxide and the second metal oxide are different materials; a third dielectric layer on the second dielectric layer, the third dielectric layer including a metal carbon oxynitride; and an upper electrode on the third dielectric layer.
    Type: Grant
    Filed: June 21, 2013
    Date of Patent: August 5, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Weon-Hong Kim, Min-Woo Song, Jung-Min Park
  • Patent number: 8766410
    Abstract: Integrated circuits having combined memory and logic functions are provided. In one aspect, an integrated circuit is provided. The integrated circuit comprises: a substrate comprising a silicon layer over a BOX layer, wherein a select region of the silicon layer has a thickness of between about three nanometers and about 20 nanometers; at least one eDRAM cell comprising: at least one pass transistor having a pass transistor source region, a pass transistor drain region and a pass transistor channel region formed in the select region of the silicon layer; and a capacitor electrically connected to the pass transistor.
    Type: Grant
    Filed: June 6, 2011
    Date of Patent: July 1, 2014
    Assignee: International Business Machines Corporation
    Inventors: Jin Cai, Josephine Chang, Leland Chang, Brian L. Ji, Steven John Koester, Amlan Majumdar
  • Patent number: 8748988
    Abstract: A semiconductor device has a semiconductor substrate, a field insulating film disposed on a surface of the semiconductor substrate, a base insulating film disposed on a surface of the field insulating film, and a resistor disposed on the base insulating film. The resistor is formed of a polycrystalline silicon film and has a resistance region and electrode lead-out regions disposed at both ends of the resistance region. A portion of the base insulating film below the resistance region projects with respect to portions of the base insulating film below the electrode lead-out regions so that a height difference occurs therebetween. The resistance region has a thickness thinner than that of each of the electrode lead-out regions.
    Type: Grant
    Filed: May 26, 2011
    Date of Patent: June 10, 2014
    Assignee: Seiko Instruments Inc.
    Inventor: Yuichiro Kitajima
  • Patent number: 8709891
    Abstract: Memory devices and methods for providing the memory devices are provided. The memory devices utilize multiple metal oxide layers. The methods for providing the memory devices can include providing a transistor; producing a capacitor that includes metal layers and metal oxide layers; connecting the capacitor to a side of the transistor; and providing a wordline, bitline, and driveline through connection with the transistor or the capacitor.
    Type: Grant
    Filed: June 14, 2013
    Date of Patent: April 29, 2014
    Assignee: 4D-S Ltd.
    Inventors: Zhida Lan, Dongmin Chen
  • Patent number: 8703562
    Abstract: A manufacturing method of a random access memory includes the following steps: providing a semiconductor structure having an array region and a peripheral region; forming a plurality of first trenches in the array region, and concurrently, a plurality of second trenches on the peripheral region; forming a polysilicon layer to cover the array region and the peripheral region, and the first and the second trenches are filled up with the polysilicon layer; planarizing the polysilicon layer so the remaining polysilicon layer only resides in the first and the second trenches; forming a conductive layer on the semiconductor structure; patterning the conductive layer to form a plurality of landing pads on the array region, and a plurality of bit line units on the peripheral region; and forming a plurality of capacitor units which is in electrical connection to the landing pads.
    Type: Grant
    Filed: March 22, 2012
    Date of Patent: April 22, 2014
    Assignee: Inotera Memories, Inc.
    Inventors: Tzung-Han Lee, Chung-Lin Huang, Ron-Fu Chu
  • Patent number: 8701283
    Abstract: A method for producing an integrated device including a capacitor. The method includes the steps of providing a functional substrate including functional circuits of the integrated device, forming a first conductive layer including a first plate of the capacitor on the functional substrate, forming a layer of insulating material including a dielectric layer of the capacitor on a portion of the first conductive layer corresponding to the first plate, forming a second conductive layer including a second plate of the capacitor and functional connections to the functional circuits on a portion of the layer of insulating material corresponding to the dielectric layer, forming a protective layer of insulating material covering the second plate and the functional connections, forming a first contact for contacting the first plate, and forming a second contact and functional contacts for contacting the second plate and the functional connections, respectively, through the protective layer.
    Type: Grant
    Filed: December 20, 2010
    Date of Patent: April 22, 2014
    Assignee: STMicroelectronics S.r.l.
    Inventor: Alessandro Dundulachi
  • Patent number: 8692291
    Abstract: Device structures, design structures, and fabrication methods for passive devices that may be used as electrostatic discharge protection devices in fin-type field-effect transistor integrated circuit technologies. A device structure is formed that includes a well of a first conductivity type in a device region and a doped region of a second conductivity in the well. The device region is comprised of a portion of a device layer of a semiconductor-on-insulator substrate. The doped region and a first portion of the well define a junction. A second portion of the well is positioned between the doped region and an exterior sidewall of the device region. Another portion of the device layer may be patterned to form fins for fin-type field-effect transistors.
    Type: Grant
    Filed: March 27, 2012
    Date of Patent: April 8, 2014
    Assignee: International Business Machines Corporation
    Inventors: William F. Clark, Jr., Robert J. Gauthier, Jr., Junjun Li
  • Patent number: 8686446
    Abstract: A capacitor device prevents capacitor failure and pixel failure by preventing the capacitor from experiencing a short circuit caused by disconnection of a bridge formed between electrodes of the capacitor and a display apparatus having the capacitor device. A display device comprises a thin film transistor, a light emitting device, and the capacitor device described above.
    Type: Grant
    Filed: August 30, 2011
    Date of Patent: April 1, 2014
    Assignee: Samsung Display Co., Ltd.
    Inventor: Sang-Min Hong
  • Patent number: 8669150
    Abstract: A semiconductor device including a capacitor and a proximate high-voltage gate having a boron-barrier layer that ideally serves as part of both the capacitor dielectric and the (high voltage) HV gate oxide. The boron-barrier layer is preferably formed over a poly oxide layer that is in turn deposited on a substrate infused to create a neighboring wells, and N-well over which the capacitor will be formed, and P-well to be overlaid by the HV gate. The boron-barrier helps to reduce or eliminate the harmful effects of boron diffusion from the P-well during TEOS deposition of the gate oxide material.
    Type: Grant
    Filed: December 21, 2012
    Date of Patent: March 11, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chyi-Chyuan Huang, Shyh-An Lin, Chen-Fu Hsu
  • Patent number: 8664741
    Abstract: Provided is a high voltage semiconductor device that includes a PIN diode structure formed in a substrate. The PIN diode includes an intrinsic region located between a first doped well and a second doped well. The first and second doped wells have opposite doping polarities and greater doping concentration levels than the intrinsic region. The semiconductor device includes an insulating structure formed over a portion of the first doped well. The semiconductor device includes an elongate resistor device formed over the insulating structure. The resistor device has first and second portions disposed at opposite ends of the resistor device, respectively. The semiconductor device includes an interconnect structure formed over the resistor device. The interconnect structure includes: a first contact that is electrically coupled to the first doped well and a second contact that is electrically coupled to a third portion of the resistor located between the first and second portions.
    Type: Grant
    Filed: June 14, 2011
    Date of Patent: March 4, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company Ltd.
    Inventors: Ru-Yi Su, Fu-Chih Yang, Chun Lin Tsai, Chih-Chang Cheng, Ruey-Hsin Liu
  • Patent number: 8627258
    Abstract: According to one exemplary embodiment, a method for adjusting geometry of a capacitor includes fabricating a first composite capacitor residing in a first standard cell with a first set of process parameters. The method further includes using a second standard cell having substantially same dimensions as the first standard cell. The method further includes using a capacitance value from the first composite capacitor to adjust a geometry of a second composite capacitor residing in the second standard cell, wherein the second composite capacitor is fabricated with a second set of process parameters. The geometry of the second composite capacitor can be adjusted to cause the second composite capacitor to have a capacitance value substantially equal to the capacitance value from the first composite capacitor.
    Type: Grant
    Filed: August 23, 2012
    Date of Patent: January 7, 2014
    Assignee: Broadcom Corporation
    Inventors: Peter Huang, Ming-Chun Chen
  • Patent number: 8627259
    Abstract: According to one exemplary embodiment, a method for adjusting geometry of a capacitor includes fabricating a first composite capacitor residing in a first standard cell with a first set of process parameters. The method further includes using a second standard cell having substantially same dimensions as the first standard cell. The method further includes using a capacitance value from the first composite capacitor to adjust a geometry of a second composite capacitor residing in the second standard cell, wherein the second composite capacitor is fabricated with a second set of process parameters. The geometry of the second composite capacitor can be adjusted to cause the second composite capacitor to have a capacitance value substantially equal to the capacitance value from the first composite capacitor.
    Type: Grant
    Filed: August 23, 2012
    Date of Patent: January 7, 2014
    Assignee: Broadcom Corporation
    Inventors: Peter Huang, Ming-Chun Chen
  • Publication number: 20140001518
    Abstract: A method includes forming a deep well region of a first conductivity type in a substrate, implanting a portion of the deep well region to form a first gate, and implanting the deep well region to form a well region. The well region and the first gate are of a second conductivity type opposite the first conductivity type. An implantation is performed to form a channel region of the first conductivity type over the first gate. A portion of the deep well region overlying the channel region is implanted to form a second gate of the second conductivity type. A source/drain implantation is performed to form a source region and a drain region of the first conductivity type on opposite sides of the second gate. The source and drain regions are connected to the channel region, and overlap the channel region and the first gate.
    Type: Application
    Filed: June 29, 2012
    Publication date: January 2, 2014
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chi-Feng Huang, Chia-Chung Chen, Victor Chiang Liang, Mingo Liu
  • Patent number: 8575720
    Abstract: A process is described for integrating, on an inert substrate, a device having at least one passive component and one active component. The process comprises: deposition of a protection dielectric layer on the inert substrate; formation of a polysilicon island on the protection dielectric layer; integration of the active component on the polysilicon island; deposition of the covering dielectric layer on the protection dielectric layer and on the active component; integration of the passive component on the covering dielectric layer; formation of first contact structures in openings realised in the covering dielectric layer in correspondence with active regions of the active component; and formation of second contact structures in correspondence with the passive component. An integrated device obtained through this process is also described.
    Type: Grant
    Filed: May 14, 2007
    Date of Patent: November 5, 2013
    Assignee: STMicroelectronics S.r.l.
    Inventors: Salvatore Leonardi, Salvatore Coffa, Claudia Caligiore, Francesca Paola Tramontana
  • Patent number: 8569127
    Abstract: A method for fabricating a semiconductor device is described. A substrate having thereon a polysilicon resistor is provided. A dielectric layer is formed over the substrate covering the polysilicon resistor. The dielectric layer is etched to form a contact opening over the polysilicon resistor, with overetching into the polysilicon resistor. A metal silicide layer is formed on the polysilicon resistor in the contact opening. A metal material is filled in the contact opening. A portion of the dielectric layer, the metal material, and a portion of the polysilicon resistor are removed to expose the metal silicide layer. A metal contact is formed over the metal silicide layer.
    Type: Grant
    Filed: March 13, 2012
    Date of Patent: October 29, 2013
    Assignee: United Microelectronics Corp.
    Inventors: Chien-Yang Chen, Chen-Hua Tsai, Shih-Fang Hong, Po-Chao Tsao, Ming-Te Wei
  • Patent number: 8530288
    Abstract: Some embodiments include DRAM having transistor gates extending partially over SOI, and methods of forming such DRAM. Unit cells of the DRAM may be within active region pedestals, and in some embodiments the unit cells may comprise capacitors having storage nodes in direct contact with sidewalls of the active region pedestals. Some embodiments include 0C1T memory having transistor gates entirely over SOI, and methods of forming such 0C1T memory.
    Type: Grant
    Filed: September 12, 2012
    Date of Patent: September 10, 2013
    Assignee: Micron Technology, Inc.
    Inventor: Kunal R. Parekh
  • Publication number: 20130217193
    Abstract: A method for fabricating a semiconductor device is described. A plurality of isolation structures is formed in a substrate. The isolation structures are arranged in parallel and extend along a first direction. A well of a first conductive type is formed in the substrate. A plurality of first doped regions of a second conductive type is formed in the well. Each of the first doped regions is formed between two adjacent isolation structures. A plurality of gates of the second conductive type is formed on the substrate. The gates are arranged in parallel and extend along a second direction different from the first direction. One of the first doped regions is connected to one of the gates. A plurality of second doped regions of the first conductive type is formed in the well. Each of the second doped regions is formed in the first doped regions between two adjacent gates.
    Type: Application
    Filed: March 18, 2013
    Publication date: August 22, 2013
    Applicant: WINBOND ELECTRONICS CORP.
    Inventor: WINBOND ELECTRONICS CORP.
  • Patent number: 8450164
    Abstract: A method of forming a plurality of capacitors includes an insulative material received over a capacitor array area and a circuitry area. The array area comprises a plurality of capacitor electrode openings within the insulative material received over individual capacitor storage node locations. The intervening area comprises a trench. Conductive material is formed within the openings and against a sidewall portion of the trench to less than completely fill the trench. Covering material is formed over an elevationally outer lateral interface of the conductive material within the trench and the insulative material of the circuitry area. The insulative material within the array area is etched with a liquid etching solution effective to expose outer sidewall portions of the conductive material within the array area and to expose the conductive material within the trench. The conductive material within the array area is incorporated into a plurality of capacitors.
    Type: Grant
    Filed: February 22, 2010
    Date of Patent: May 28, 2013
    Assignee: Micron Technology, Inc.
    Inventors: Vishwanath Bhat, Kevin R. Shea, Farrell Good
  • Patent number: 8450163
    Abstract: In a replacement gate approach, the semiconductor material or at least a significant portion thereof in a non-transistor structure, such as a precision resistor, an electronic fuse and the like, may be preserved upon replacing the semiconductor material in the gate electrode structures. To this end, an appropriate dielectric material may be provided at least prior to the removal of the semiconductor material in the gate electrode structures, without requiring significant modifications of established replacement gate approaches.
    Type: Grant
    Filed: December 8, 2010
    Date of Patent: May 28, 2013
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Sven Beyer, Klaus Hempel, Roland Stejskal, Andy Wei, Thilo Scheiper, Andreas Kurz, Uwe Griebenow, Jan Hoentschel
  • Patent number: 8421127
    Abstract: A semiconductor device and a method for fabricating the same are described. The semiconductor device includes a well of a first conductive type, first doped regions of a second conductive type, gates of the second conductive type, second doped regions of the first conductive type, and isolation structures. The well is disposed in a substrate. The first doped regions are disposed in the well. The first doped regions are arranged in parallel and extend along a first direction. The gates are disposed on the substrate. The gates are arranged in parallel and extend along a second direction different from the first direction. One of the first doped regions is electrically connected to one of the gates. Each of the second doped regions is disposed in the first doped regions between two adjacent gates. Each of the isolation structures is disposed in the substrate between two adjacent first doped regions.
    Type: Grant
    Filed: July 15, 2011
    Date of Patent: April 16, 2013
    Assignee: Windbond Electronics Corp.
    Inventor: Wen-Yueh Jang
  • Patent number: 8410577
    Abstract: The invention provides a semiconductor device which has a capacitor element therein to achieve size reduction of the device, the capacitor element having larger capacitance than conventional. A semiconductor integrated circuit and pad electrodes are formed on the front surface of a semiconductor substrate. A second insulation film is formed on the side and back surfaces of the semiconductor substrate, and a capacitor electrode is formed between the back surface of the semiconductor substrate and the second insulation film, contacting the back surface of the semiconductor substrate. The second insulation film is covered by wiring layers electrically connected to the pad electrodes, and the wiring layers and the capacitor electrode overlap with the second insulation film being interposed therebetween. Thus, the capacitor electrode, the second insulation film and the wiring layers form capacitors.
    Type: Grant
    Filed: April 16, 2008
    Date of Patent: April 2, 2013
    Assignees: SANYO Semiconductor Co., Ltd., Semiconductor Components Industries, LLC
    Inventors: Katsu Horikoshi, Hisayoshi Uchiyama, Takashi Noma, Yoshinori Seki, Hiroshi Yamada, Shinzo Ishibe, Hiroyuki Shinogi
  • Publication number: 20130032862
    Abstract: Provided is a high voltage semiconductor device. The high voltage semiconductor device includes a substrate that includes a doped well disposed therein. The doped well and the substrate have opposite doping polarities. The high voltage semiconductor device includes an insulating device disposed over the doped well. The high voltage semiconductor device includes an elongate resistor disposed over the insulating device. A non-distal portion of the resistor is coupled to the doped well. The high voltage semiconductor device includes a high-voltage junction termination (HVJT) device disposed adjacent to the resistor.
    Type: Application
    Filed: August 1, 2011
    Publication date: February 7, 2013
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY. LTD.
    Inventors: Ru-Yi Su, Fu-Chih Yang, Chun Lin Tsai, Chih-Chang Cheng, Ruey-Hsin Liu
  • Patent number: 8361848
    Abstract: A method includes forming a polysilicon layer on a substrate; and patterning the polysilicon layer to form a polysilicon resistor and a polysilicon gate. A first ion implantation is performed on the polysilicon resistor to adjust electric resistance of the polysilicon resistor. A second ion implantation is performed on a top portion of the polysilicon resistor such that the top portion of the polysilicon resistor has an enhanced etch resistance. An etch process is then used to remove the polysilicon gate while the polysilicon resistor is protected by the top portion.
    Type: Grant
    Filed: April 29, 2010
    Date of Patent: January 29, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Da-Yuan Lee, Matt Yeh
  • Publication number: 20130015508
    Abstract: A semiconductor device and a method for fabricating the same are described. The semiconductor device includes a well of a first conductive type, first doped regions of a second conductive type, gates of the second conductive type, second doped regions of the first conductive type, and isolation structures. The well is disposed in a substrate. The first doped regions are disposed in the well. The first doped regions are arranged in parallel and extend along a first direction. The gates are disposed on the substrate. The gates are arranged in parallel and extend along a second direction different from the first direction. One of the first doped regions is electrically connected to one of the gates. Each of the second doped regions is disposed in the first doped regions between two adjacent gates. Each of the isolation structures is disposed in the substrate between two adjacent first doped regions.
    Type: Application
    Filed: July 15, 2011
    Publication date: January 17, 2013
    Applicant: WINBOND ELECTRONICS CORP.
    Inventor: Wen-Yueh Jang
  • Patent number: 8338243
    Abstract: A semiconductor device including a capacitor and a proximate high-voltage gate having a boron-barrier layer that ideally serves as part of both the capacitor dielectric and the (high voltage) HV gate oxide. The boron-barrier layer is preferably formed over a poly oxide layer that is in turn deposited on a substrate infused to create a neighboring wells, and N-well over which the capacitor will be formed, and P-well to be overlaid by the HV gate. The boron-barrier helps to reduce or eliminate the harmful effects of boron diffusion from the P-well during TEOS deposition of the gate oxide material.
    Type: Grant
    Filed: May 9, 2011
    Date of Patent: December 25, 2012
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chyi-Chyuan Huang, Shyh-An Lin, Chen-Fu Hsu
  • Patent number: 8339769
    Abstract: A method of making an electrolytic capacitor includes providing a first electrode that includes a metal substrate, a carbide layer, and a carbonaceous material. The metal substrate includes a metal selected from the group consisting of titanium, aluminum, tantalum, niobium, zirconium, silver, steel, and alloys and combinations thereof. The method further includes providing a second electrode and an electrolyte.
    Type: Grant
    Filed: May 29, 2008
    Date of Patent: December 25, 2012
    Assignees: Medtronic, Inc., Kemet Electronics Corporation
    Inventors: Joachim Hossick Schott, Brian Melody, John Tony Kinard
  • Publication number: 20120319176
    Abstract: In at least one embodiment, a method of manufacturing a varactor includes forming a well over a substrate. The well has a first type doping. A first source region and a second source region are formed in the well, and the first source region and the second source region have a second type doping. A drain region is formed in the well, and the drain region has the first type doping. A first gate region is formed over the well between the drain region and the first source region. Moreover, a second gate region is formed over the well between the drain region and the second source region.
    Type: Application
    Filed: August 27, 2012
    Publication date: December 20, 2012
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chia-Chung CHEN, Chewn-PU JOU, Chin Wei KUO, Sally LIU
  • Patent number: 8296943
    Abstract: The present invention relates to surveillance and/or identification devices having capacitors connected in parallel or in series, and methods of making and using such devices. Devices with capacitors connected in parallel, where one capacitor is fabricated with a relatively thick capacitor dielectric and another is fabricated with a relatively thin capacitor dielectric achieve both a high-precision capacitance and a low breakdown voltage for relatively easy surveillance tag deactivation. Devices with capacitors connected in series result in increased lateral dimensions of a small capacitor. This makes the capacitor easier to fabricate using techniques that may have relatively limited resolution capabilities.
    Type: Grant
    Filed: May 15, 2009
    Date of Patent: October 30, 2012
    Assignee: Kovio, Inc.
    Inventors: Patrick Smith, Criswell Choi, James Montague Cleeves, Vivek Subramanian, Arvind Kamath, Steven Molesa
  • Patent number: 8298885
    Abstract: In a semiconductor device comprising sophisticated high-k metal gate structures formed in accordance with a replacement gate approach, semiconductor-based resistors may be formed above isolation structures substantially without being influenced by the replacement gate approach. Consequently, enhanced area efficiency may be achieved compared to conventional strategies, in which the resistive structures may have to be provided on the basis of a gate electrode metal, while, nevertheless, a low parasitic capacitance may be accomplished due to providing the resistive structures above the isolation structure.
    Type: Grant
    Filed: April 14, 2010
    Date of Patent: October 30, 2012
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Andy Wei, Andrew Waite
  • Patent number: 8294218
    Abstract: An integrated circuit with gate self-protection comprises a MOS device and a bipolar device, wherein the integrated circuit further comprises a semiconductor layer with electrically active regions in which and on which the MOS device and the bipolar device are formed and electrically inactive regions for isolating the electrically active regions from each other. The MOS device comprises a gate structure and a body contacting structure, wherein the body contacting structure is formed of a base layer deposited in a selected region over an electrically active region of the semiconductor layer, and the body contacting structure is electrically connected with the gate structure. The base layer forming the body contacting structure also forms the base of the bipolar device. The present invention further relates to a method for fabricating such an integrated circuit.
    Type: Grant
    Filed: June 8, 2010
    Date of Patent: October 23, 2012
    Assignee: Texas Instruments Incorporated
    Inventors: Badih El-Kareh, Scott Gerard Balster, Hiroshi Yasuda, Manfred Schiekofer
  • Patent number: 8255858
    Abstract: According to one exemplary embodiment, a method for adjusting geometry of a capacitor includes fabricating a first composite capacitor residing in a first standard cell with a first set of process parameters. The method further includes using a second standard cell having substantially same dimensions as the first standard cell. The method further includes using a capacitance value from the first composite capacitor to adjust a geometry of a second composite capacitor residing in the second standard cell, wherein the second composite capacitor is fabricated with a second set of process parameters. The geometry of the second composite capacitor can be adjusted to cause the second composite capacitor to have a capacitance value substantially equal to the capacitance value from the first composite capacitor.
    Type: Grant
    Filed: November 26, 2008
    Date of Patent: August 28, 2012
    Assignee: Broadcom Corporation
    Inventors: Peter Huang, Ming-Chun Chen
  • Patent number: 8093118
    Abstract: A semiconductor structure and a method of forming the same are provided. The semiconductor structure includes a substrate, a resistor and a metal gate structure. The substrate has a first area and a second area. The resistor is disposed in the first area, wherein the resistor does not include any metal layer. The metal gate structure is disposed in the second area.
    Type: Grant
    Filed: June 26, 2009
    Date of Patent: January 10, 2012
    Assignee: United Microelectronics Corp.
    Inventors: Kun-Szu Tseng, Che-Hua Hsu, Cheng-Wen Fan, Chih-Yu Tseng, Victor Chiang Liang
  • Publication number: 20110309372
    Abstract: A circuit includes input drain, source and gate nodes. The circuit also includes a group III nitride enhancement-mode HFET having a source, drain and gate and a voltage shifter having a first terminal connected to the gate of the enhancement mode HFET at a common junction. The circuit also includes a load resistive element connected to the common junction. The drain of the enhancement-mode HFET serves as the input drain node, the source of the enhancement-mode HFET serves as the input source node and a second terminal of the voltage shifter serves as the input gate node.
    Type: Application
    Filed: June 21, 2010
    Publication date: December 22, 2011
    Applicant: VELOX SEMICONDUCTOR CORPORATION
    Inventors: Xiaobin XIN, Milan POPHRISTIC, Michael SHUR
  • Patent number: 8071433
    Abstract: A semiconductor component including: a substrate, at least one semiconductor chip arranged on the substrate and at least one passive device likewise arranged on the substrate. The passive device is mounted with its underside on the substrate. The semiconductor component further includes an interspace disposed between the underside of the passive device and the substrate. The interspace is filled with an underfilling material. In order to avoid the solder pumping effect, the upper side and the lateral sides of the passive device are also embedded in a plastic compound.
    Type: Grant
    Filed: August 25, 2010
    Date of Patent: December 6, 2011
    Assignee: Infineon Technologies AG
    Inventors: Erich Syri, Gerold Gruendler, Juergen Hoegerl, Thomas Killer, Volker Strutz