Abstract: A method for forming EUV LITHOGRAPHY GLASS STRUCTURES WITH VOIDS is disclosed which includes forming a slurry mixture including silica soot particles, and inserting the slurry mixture into a casting mold. The method provides low weight mass reduced rigid glass structures with beneficial thermal stability. The casting mold includes therein a casting form. The casting form is adapted to provide selected geometry void spaces within the glass lithography structure. The slurry mixture is dried to form a green ware object. The casting form is removed from the green ware and the green ware object is consolidated into a lithography glass structure with voids.

Abstract: A evaluation process of a vibration level at the surface of silicon melt held in a silica glass crucible is provided by setting in the vacuum furnace, the test piece of the silica glass cut out from a silica glass crucible, melting a little amount of silicon put on said piece of the glass, and measuring a vibration cycle of the silicon melt. Moreover, a silica glass crucible not causing the vibration at the surface of the silicon melt held in the silica glass crucible is also provided, wherein the vibration cycle of a silica glass of a side wall of the crucible is controlled at more than ? seconds.

Abstract: Problems the invention is to solve: An object of the present invention is to provide a method for producing a quartz glass crucible capable of pulling up a silicon single crystal at a highly improved yield, yet without generating oscillation at the surface of the melt on pulling up silicon single crystal, and free from generating dislocations due to the peeling off of quartz glass fractions.

Abstract: An object of the present invention is to provide a quartz glass jig, which, when employed in a processing apparatus using plasma, is less in generation of abnormal etching and particles and low in contamination with impurities. This object is obtained by a quartz glass jig for a processing apparatus using plasma, wherein a surface of the jig is subjected to grinding or a sandblast processing and has a surface roughness Ra in the range of from 2 ?m to 0.05 ?m, and microcracks of grinding marks formed during the grinding or sandblast processing have a depth of 50 ?m or less.

Abstract: The granule consists of individual granules approximately spherical in shape, having a pore volume of 0.5 cm3, a mean diameter of pores of 50 nm or less, a specific surface area of 100 m2/g or less, and a bulk density of 0.7 g/cm3 or higher. It is produced by dispersing a fumed silica obtained by hydrolysis of a silicon compound into pure water to obtain a slurry, and drying the slurry. The granule is used for producing high purity synthetic quartz glass powder. The method further comprises: a first heat treatment under an oxygen-containing atmosphere, a second heat treatment in a temperature range of from 600 to 1100° C., and a third heat treatment in a temperature range of from 1100 to 1300° C. under an atmosphere containing hydrogen chloride; and a step of densification comprising calcining the product at a temperature not higher than 1500° C. under vacuum or in an atmosphere of gaseous hydrogen or gaseous helium.

Abstract: The invention provides a method to transform large quantities of waste glass into useful ceramic products by a low-cost manufacturing process. The method improves green strength compared to previous methods, and does not require water or any other liquid solvent. Only one firing step is needed with a low peak firing temperature of about 700° C. to about 1000° C. The method conserves energy and natural resources compared to clay-based traditional ceramic manufacturing. High-quality impervious ceramic products can be produced by the invention.

Abstract: The present invention relates to a method for forming an optical device. The method includes providing a glass aggregate. Typically, the glass aggregate is a mixture of fine glass soot particles and coarser ground or milled glass powder. The glass particles are mixed with a liquid to form a slurry which is cast in a mold to form a porous pre-form. Subsequently, the porous pre-form is consolidated into a glass object by heating the pre-form at a relatively high temperature. The method of the present invention produces optical components having substantially no striae. As a result, scattering is substantially reduced when EUV light is reflected from a component produced from the optical blank.

Abstract: The present invention relates to a method for forming an optical blank. The method includes providing a green body that has a non-porous exterior portion and a porous interior portion. The interior portion is evacuated to create a vacuum in the interior portion. The green body is then pressed using a hot isostatic pressing technique to densify the green body into a solid glass optical blank. This method produces homogeneous optical blanks having substantially no striae. The method also produces dense, inclusion free glass. As a result, scattering is substantially reduced when EUV light is reflected from a component produced from optical blank employing the method of the present invention.

Abstract: A process for producing an SiO2 shaped body which is at least partially vitrified, wherein an amorphous, porous SiO2 green body is sintered or vitrified by contactless heating by means of radiation, while avoiding contamination to the SiO2 shaped body with foreign atoms, wherein the radiation used is the beam of a laser at a subatmospheric pressure below 1000 mbar.

Abstract: Fiber-reinforced ceramic composites contain bundles, tows or hanks of long fibers, wherein the long fiber bundles, tows or hanks are completely surrounded by a short fiber-reinforced matrix, with the long and short fibers having, independently of one another, a mean diameter of from 4 to 12 &mgr;m and the long fibers having a mean length of at least 50 mm and the short fibers having a mean length of not more than 40 mm, a process for producing them and their use for producing clutch disks or brake disks.

Abstract: The present invention relates to a glass used as a sintering aid for a resorbable moulded body containing calcium phosphate as well as to a method for manufacturing said moulded body. According to the invention, the material is &bgr;-tricalcium phosphate and the glass has a chemical composition of 68-78% by weight SiO2, 5-12% by weight MgO and 12-27% by weight Na2O. The aforesaid moulded body is manufactured by melting said glass, grinding it until a grain size D50 of 0.7-2 &mgr;m is achieved and mixing it with &bgr;-tricalcium phosphate having a grain size D50 of 1-7.5 &mgr;m, giving the mixture the desired shape and producing the moulded body by sintering said mixture at between 1,150 and 1,350° C., wherein the grain size of &bgr;-TCP must not be smaller than that of the glass.

Abstract: SiO2—TiO2 glasses having a low coefficient of thermal expansion are produced by a molding being produced that consists of SiO2 powder, SiO2—TiO2 powder or TiO2 powder and that contains by way of secondary component a titanium-containing component which is converted into amorphous TiO2.

Abstract: A method of making a fragrance delivery system comprising forming fused microspheres and incorparting a fragrance therein. The method relates to the mixing together of two separate factions comprising a silicate part and a modifier part, drying the mixture, heating the mixture to form an agglomeration, removing any free-flowing spheres from the agglomeration, soaking the agglomeration in fragrances or essential oils, and then drying the agglomeration.

Abstract: The invention relates to the production of decorative facing materials using a glass-pelletizer and refractory filler. The inventive method for a continuous production of decorative facing slabs consists in loading of basic materials into casting-moulds which are placed on an open heat-insulated palette, and in thermal treatment in a furnace at a temperature ranging from 900° C. to 950° C. After the thermal treatment, the palette with the moulds is taken out and conditioned at an ambient temperature during 80-90 sec accompanied by cooling the surface of the slabs to a temperature ranging from 600° C. to 634° C. Afterwards, the slabs are placed in a heat-insulated closed space having a thermal resistance of walls which makes it possible to cool the surface of the slab to a temperature ranging from 100° C. to 140° C. with an average cooling rate ranging from 0.016 to 0.020 degrees/sec.

Abstract: A method of making an EUV lithography stage structure includes depositing a layer of a Ti doped SiO2 glass powder in a confined region to provide an underlying layer; applying a binder to form a primitive with the binder bonding the glass powder together at one or more selected regions; depositing an above layer of the glass powder above the deposited layer; applying the binder to the above layer with the binder bonding the glass powder together at one or more selected regions; repeating the deposition and binding steps to produce a number of successive layers with the binder bonding the successive layers together; and removing the unbonded glass powder to provide a bonded glass powder lithography stage structure which is then sintered and densified into a densified nonpowder glass lithography stage.

Abstract: The present invention intends to provide a manufacturing method for a plasma display panel, so as to overcome problems associated with a withstanding voltage of a dielectric glass layer. Glass particles have angular shapes after grinding with a grinder, but as the surface of them has been melted, they are converted into spheroids. Those glass particles can get wet evenly, so that a binder evenly adheres to the surface of a glass particle when a glass paste including the glass particles is applied to the surface of a substrate. In this case, there is a scarce possibility for a gas, generated by baking the binder, to remain in the form of bubbles in a formed dielectric glass layer. There are fewer bubbles remaining in a completed dielectric glass layer than in a dielectric glass layer than in a glass layer made from angular glass particles.

Abstract: Known is a method of producing a quartz glass crucible in which a crucible base body is provided at least in part with an inner layer in which the formation of cristobalite is induced by using a crystallization promoter. On the basis thereof, in order to provide an inexpensive method of producing a quartz glass crucible with reproducible characteristics for long service lives, it is suggested according to the invention that the crystallization promoter and a reducing substance are introduced into the inner layer.

Abstract: Known is a method of producing a quartz glass crucible in which a crucible base body is provided at least in part with an inner layer in which the formation of cristobalite is induced by using a crystallization promoter. On the basis thereof, in order to provide an inexpensive method of producing a quartz glass crucible with reproducible characteristics for long service lives, it is suggested according to the invention that the crystallization promoter and a reducing substance are introduced into the inner layer.

Abstract: A method of producing a foamed glass composite panel is provided. Glass and 0.1-20.0% by weight of at least one non-sulfur based foaming agent are mixed together, and the mixture is heated to a temperature sufficient to foam it. The foamed mixture is cooled to form at least one foamed glass substrate. During or after the cooling step, material is bonded or attached to at least one side of the foamed glass substrate to form a composite panel.

Abstract: Methods of forming plasma addressed liquid crystal display ribs are disclosed. An exemplary method includes introducing a glass paste which includes a curable medium into cavities formed in an intaglio collector to define rib structures, which are from the collector to a surface of the substrate, and removing the curable medium from the rib structures on the substrate surface to generate pores in the rib structures. The substrate having rib structures is then dipped into a solution containing an opaque pigment which is absorbed into the rib structure.

Abstract: In order to provide a quartz glass crucible distinguished by high purity, high opacity and/or low transmissibility in the IR spectrum, it is proposed on the basis of a known quartz glass crucible of opaque quartz glass with a crucible body symmetrical in relation to a rotational axis, an outer zone (3) of opaque quartz glass transitioning radially toward the inside into an inner zone (2) of transparent quartz glass and with a density of at least 2.15 g/cm3, that according to the invention, the crucible body (1) be made of a synthetic SiO2 granulate with a specific BET surface ranging from 0.5 m2/g to 40 m2/g, a tamped volume of at least 0.8 g/cm3 and produced from at least partially porous agglomerates of SiO2 primary particles.

Abstract: The present invention provides a method for manufacturing an optical element to be used for an optical system and an optical instrument using the optical system, and a method for manufacturing a device using the optical instrument, wherein the optical element is manufactured by the steps including the steps for processing a high purity silica glass by lithography, and the hydrogen molecule content is adjusted after manufacturing the optical element.

Abstract: The present invention relates to a method for forming an optical blank. The method includes providing a green body that has a non-porous exterior portion and a porous interior portion. The interior portion is evacuated to create a vacuum in the interior portion. The green body is then pressed using a hot isostatic pressing technique to densify the green body into a solid glass optical blank. This method produces homogeneous optical blanks having substantially no striae. The method also produces dense, inclusion free glass. As a result, scattering is substantially reduced when EUV light is reflected from a component produced from optical blank employing the method of the present invention.

Abstract: Burners (40) for producing fused silica boules are provided. The burners employ a tube-in-tube (301-306) design with flats (56, 50) on some of the tubes (305, 301) being used to limit the cross-sectional area of certain passages (206, 202) within the burner and/or to atomize a silicon-containing, liquid source material, such as OMCTS. To avoid the possibility of flashback, the burner has separate passages for fuel (205) and oxygen (204, 206), i.e., the burner employs nozzle mixing, rather than premixing, of the fuel and oxygen. The burners are installed in burner holes (26) formed in the crown (20) of a furnace and form a seal with those holes so that ambient air cannot be entrained into the furnace through the holes. An external air cooled jacket (60) can be used to hold the temperature of the burner below a prescribed upper limit, e.g., 400° C.

Abstract: The invention relates to optical quality glass made by vacuum casting very stable, low viscosity aqueous suspension of submicron silica particles. The suspension is a mixture of silica particles and aqueous ammonia, and is characterized by a solid loading of up to 75 weight percent.

Abstract: Present invention suppresses undesirable effects of the bubbles trapped in a silica glass crucible on single crystallization during the pulling process under a high-temperature load. When raw material powder is melted in a mold 1, graphite components of electrodes and impurities contained in the raw material are removed by introducing hydrogen gas and/or oxygen gas immediately after the start of arc discharge. Graphite and impurities are prevented from entering the product crucible, thereby suppressing the volume increase rate of the bubbles and reducing the inner pressure of the bubbles. Gases remaining in voids of an accumulated layer of silica powder formed inside the mold 1 can be replaced with helium gas, by supplying helium gas to the accumulated layer from the mold 1.

Abstract: A synthetic quartz glass member having (i) a change of transmittance at 193 nm of up to 0.002 cm−1 as expressed in extinction coefficient when 4×104 shots of ArF excimer laser light are irradiated at 2 mJ/cm2/pulse, (ii) an initial transmittance of at least 99.6% at 193 nm, (iii) a hydrogen molecule content of at least 5×1017 molecules/cm3, (iv) a refractive index amplitude of up to 1×10−6, and (v) a birefringence of up to 1 nm/cm finds use in an excimer laser because it experiences a minimized change of light transmittance.

Abstract: Methods and apparatus for producing fused silica members having high internal transmission are disclosed. The apparatus and methods are capable of producing fused silica having internal transmission of at least 99.65%/cm at 193 nm.

Abstract: Silica crucibles containing an inner layer which is substantially pure and substantially bubble-free and methods for making such crucibles. The inner layer is also substantially stable against roughening and spot devitrification. The inner layer is formed by making a web structure which is then converted to a continuous layer, thereby minimizing or eliminating bubble formation. The inner layer is also formed using a gettering agent which getters alkaline and alkaline-earth elements while the inner layer is formed. The alkaline and alkaline-earth elements are gettered on an innermost portion of the inner layer which is later removed, leaving an inner layer with relatively few impurities. When used in a CZ-crystal growing process, the inner surface of the crucible remains smooth and substantially no bubbles grow in the inner layer.

Abstract: A method for quartz crucible formation wherein an at least substantially enclosed chamber surrounds a crucible mold. The atmosphere in the chamber is controlled to include a desired gas or combination of gases at a positive pressure. The positive pressure is achieved because the total outflow of gas is less than the total inflow of gas. A heat source is initiated to melt a quartz material lining the mold once the desired atmosphere is achieved, and the quartz material is fused.

Abstract: Methods of forming plasma addressed liquid crystal display ribs are disclosed. An exemplary method includes introducing a glass paste which includes a curable medium into cavities formed in an intaglio collector to define rib structures, which are from the collector to a surface of the substrate, and removing the curable medium from the rib structures on the substrate surface to generate pores in the rib structures. The substrate having rib structures is then dipped into a solution containing an opaque pigment which is absorbed into the rib structure.

Abstract: In a device (5) for producing a quartz glass crucible (2) a section (14, 15) of a wall (13) of a rotating quartz glass crucible (2) is heated by at least two electrode arrangements (7, 8) which are evenly spaced along the periphery of the quartz glass crucible (2) and create a first and a second electric arc. The use of a plurality of electrode arrangements (7, 8) allows a reduction of the cooling phase of the section (14, 15) i.e. the time until it reaches the next heating zone (11, 12), so that undesirably high temperature differentials in the wall (13) are prevented. At the same time the required heat output of each individual electrode arrangement (7, 8) can be reduced so that vaporization and the concurrent bubble formation is reduced. In addition to the higher levels of quality attainable hereby, the duration of the manufacturing process is also reduced.

Abstract: A method for fabricating fused quartz crucibles is disclosed. Quartz sand is placed in a rotating fusion pot and takes on the shape of a bowl as a result of centrifugal forces. The quartz sand is heated to a temperature sufficient to melt and fuse the quartz sand together. A fast diffusing gas such as helium or hydrogen is passed through the quartz sand to displace residual gases present in voids defined by the quartz sand. The fast diffusing gas remains present in the voids. The resulting crucible has reduced bubble growth during use as well as reduced bubble count and bubble size at fusion.

Abstract: Methods of forming plasma addressed liquid crystal display ribs are disclosed. An exemplary method includes introducing a glass paste which includes a curable medium into cavities formed in an intaglio collector to define rib structures, which are from the collector to a surface of the substrate, and removing the curable medium from the rib structures on the substrate surface to generate pores in the rib structures. The substrate having rib structures is then dipped into a solution containing an opaque pigment which is absorbed into the rib structure.

Abstract: Silica crucibles containing an inner layer which is substantially pure and substantially bubble-free and methods for making such crucibles. The inner layer is also substantially stable against roughening and spot devitrification. The inner layer is formed by making a web structure which is then converted to a continuous layer, thereby minimizing or eliminating bubble formation. The inner layer is also formed using a gettering agent which getters alkaline and alkaline-earth elements while the inner layer is formed. The alkaline and alkaline-earth elements are gettered on an innermost portion of the inner layer which is later removed, leaving an inner layer with relatively few impurities. When used in a CZ-crystal growing process, the inner surface of the crucible remains smooth and substantially no bubbles grow in the inner layer.

Abstract: A method of forming foamed articles suitable for refractory, thermal insulation and construction application in a form such as bricks, blocks, slabs and discs includes the preparation of homogeneous mixture of at least one oxygen-containing, water-insoluble raw material having a particle size <200 microns and at least one gas forming reagent having a particle size <130 microns. The mixture is humidified and shaped and then heated to a formation temperature sufficient to melt the raw material to develop an oxygen-containing molten liquid phase. This phase reacts at the formation temperature with the gas-forming reagent to induce a foamed structure which is then cooled to a solid state. The raw materials preferably make up 99-99.95 wt % of the mixture, and the gas forming reagent makes up the balance.

Abstract: Fused silica boules (19) having improved radial homogeneity are produced by controlling the air flow around the boule (19) during its formation. The boule is formed in a cup-like containment vessel (13) which collects silica particles from a plurality of burners (14). The containment vessel (13) rotates and oscillates relative to the burners (14) as the boule (19) is formed. The containment vessel (13) is bounded by a cup-like containment wall (22), and a shadow or air flow wall (130) is spaced apart from and surrounds the containment wall (22) forming a gap or air flow passage (175) therebetween. A radially-outwardly extending deflecting wedge portion (23) is formed at the upper extent of the containment wall (22) and at an outlet end of flow passage (175).

Abstract: A cup attaching apparatus for attaching a cup, used during processing of an eye glass lens, to the lens, the apparatus includes: a placing portion onto which the lens is placed; a holding portion for detachably holding the cup; a supporting portion for supporting the holding portion; a moving mechanism for moving the supporting portion in an optical axis direction of the placed lens; and a pressure regulating mechanism for preventing a cup attaching force from exceeding a predetermined pressure.

Abstract: A method of manufacturing a microlens array comprises the steps of providing a first light transmitting layer precursor above a master to form a first light transmitting layer; and providing a second light transmitting layer precursor above the first light transmitting layer to form a second light transmitting layer.

Abstract: Known is a method of producing a quartz glass crucible in which a crucible base body is provided at least in part with an inner layer in which the formation of cristobalite is induced by using a crystallization promoter. On the basis thereof, in order to provide an inexpensive method of producing a quartz glass crucible with reproducible characteristics for long service lives, it is suggested according to the invention that the crystallization promoter and a reducing substance are introduced into the inner layer.

Abstract: A new method is disclosed for producing thin plates by sintering a thin gel plate (e.g., silica) made using a sol-gel process, which substantially eliminates warpage of the plate during the sintering step. Sintering a sol-gel based silica plate to a dense glass typically causes significant shrinkage, and this can cause the plate to curl, especially around its edges. This phenomenon is referred to as warpage. In the method of the invention, the sintering step is performed while the gel plate is mounted on a support surface, separated by a thin layer of refractory powder. At the high sintering temperature, the powder partially fuses and sticks to both the gel plate and the support surface, which prevents non-uniform stresses in the gel plate from warping the plate.

Abstract: Plasma addressed liquid crystal display ribs are produced by introducing a glass paste which includes a curable medium into cavities formed in an intaglio collector to define rib structures, which are transferred from the collector to a surface of a substrate, and removing the curable medium from the rib structures on the substrate surface to generate pores in the rib structures. The substrate having rib structures is then dipped into a solution containing an opaque pigment which is absorbed into the rib structure.

Abstract: An object of the present invention is to provide a quartz glass body, especially a quartz glass jig for plasma reaction in producing semiconductors having excellent resistance against plasma corrosion, particularly, excellent corrosion resistance against F-based gaseous plasma; and a method for producing the same. A body made of quartz glass containing a metallic element and having an improved resistance against plasma corrosion is provided that contains bubbles and crystalline phase at an amount expressed by projected area of less than 100 mm2 per 100 cm3.

Abstract: An opaque silica glass article comprising a transparent portion and an opaque portion, wherein the opaque portion has an apparent density of 1.70-2.15 g/cm3 and contains 5×104-5×106 bubbles per cm3, said bubbles having an average diameter of 10-100 &mgr;m; and the transparent portion has an apparent density of 2.19-2.21 g/cm3 and the amount of bubbles having a diameter of at least 100 &mgr;m in the transparent portion is not more than 1×103 per cm. The opaque silica glass article is made by a process wherein a mold is charged with a raw material for forming the opaque portion, which is a mixture comprising a silica powder with a small amount of a silicon nitride powder, and a raw material for forming the transparent portion so that the two raw materials are located in the positions corresponding to the opaque and the transparent portions, respectively, of the silica glass article to be produced; and the raw materials are heated in vacuo to be thereby vitrified.

Abstract: Based on a known process for the manufacture of opaque quartz glass, by mixing SiO2 particles and an additive which is volatile at a melting temperature, forming a body and melting said body with an advancing melt front forming in the body, it is proposed according to the invention that in order to reduce the danger of contamination, a body (1) be formed with an inner bore (6) and be heated in such a manner that the melt front (10) advances from the inner bore (6) to the outside. The article of pure opaque quartz glass according to the invention has high resistance to temperature change, high mechanical strength and good chemical durability. It is distinguished by an opening (6) enclosed by an inner wall (9), with an inner SiO2 surface layer (15) having a layer thickness ranging from 30 mm to 500 mm and a density of at least 2.15 g/cm3.

Abstract: A method for manufacturing a decorated plate glass, including the steps of (a) attaching crystal ice to the top surface of a plate glass with an adhesive; (b) heating the plate glass containing the crystal ice at a high temperature for a short period of time causing the crystal ice to melt on the plate glass; and (c) quick cooling the plate glass.

Abstract: A process for producing an article having a finely uneven surface coated with a film, which has high heat resistance and which neither cracks nor peels off from a substrate, by forming a film of a sol material between a substrate and a mold in such a manner that the film is in close contact with them and applying heat to form a gelled film, which has a surface configuration that is the inversion of the surface configuration of the mold, on the surface of the substrate, wherein the sol material contains (A) R2SiX2 (R is an alkyl group and X is an alkoxyl group or halogen atom) and (B) R′SiX′3 (R′ is an aryl group or substituted aryl group and X′ is an alkoxyl group or halogen atom).

Abstract: A plasma display device of the type having a composite back plate including a metal substrate and a ceramic barrier rib structure, is formed using a green ceramic tape which is a combination of two glasses, a primary glass which flows back during firing and a secondary glass that has a relatively high thermal coefficient of expansion. These glasses are combined in proportion to match the thermal coefficient of expansion of the metal substrate. Channels are formed on the inner surface of the back panel by laminating a green ceramic tape to the metal substrate and then soaking the laminated tape in a solvent before embossing the green tape to form the ribs. This soaking step enhances the flow of the green ceramic tape during the embossing process. The ceramic components of the green tape are formulated with a particle size 15 &mgr;m or more to enhance particle flow when the green tape is embossed.

Abstract: The application discloses a number of unique sintered quartz glass products together with new silica compositions and processes for making and using such products. Nitrided clear and opaque nitrided quartz products are disclosed having incredible physical properties resulting from the incorporation of very small, but effective, amounts (e.g., 25 ppm or more) of chemically bound nitrogen. Opaque quartz glass heat shields with remarkable resistance to transmission of infrared radiation are disclosed which can have a high bubble population density, such as 80 to 120 per mm2. These heat shields make possible remarkable improvement in the performance of tube furnaces and other reactors used in processing silicon wafers and other electronic components.

Abstract: SiO2—TiO2 glasses having a low coefficient of thermal expansion are produced by a molding being produced that consists of SiO2 powder, SiO2—TiO2 powder or TiO2 powder and that contains by way of secondary component a titanium-containing component which is converted into amorphous TiO2.