Abstract: In the present invention, a multi-person pose recognition system has been developed. This system includes a body pose detection module, a CC2420DBK board and a multi-person pose monitoring software module. The body pose detection module includes a triaxial accelerometer, a Zigbee chip and an 8-bit microcontroller. Several body pose detection modules and the CC2420DBK board form a Zigbee wireless sensor network (WSN). The CC2420DBK board functions as the receiver of the Zigbee WSN and communicates with a robot onboard computer or a host computer through a RS-232 port. The multi-person pose monitoring software monitors and records activities of multiple users simultaneously. The present invention provides a pose recognition algorithm by combining time-domain analysis and wavelet transform analysis. This algorithm has been implemented in the microcontroller of a body pose estimation module.

Abstract: Devices and methods are disclosed which relate to an LCD device responding to an AT command which solely activates the backlight of the LCD device. An LCD device is programmed to respond to two distinct backlight AT commands. One command turns the backlight on, and another command turns the backlight off. These backlight AT commands are programmed into LCD device testing equipment so that accurate photographs are taken of the LCD device, and results are improved. The backlight AT commands are also used as part of the programming for user-end applications.

Abstract: A security system with a processor that receives information from multiple sources. The system is illustrated by a network of inspection machines at multiple locations in an airport, such as at check-in desks. These machines provide data to the processor for threat detection processing. The processor provides a central control and data integration point. Centralized control may be used to readily adapt threat detection programs and data integration may allow more accurate or more thorough threat determinations to be made. Moreover, centralized processing of computation intensive operations, such as image reconstruction, may provide for more efficient processor utilization throughout the system, providing a lower total processing cost. Additionally, centralized processing allows for human decision makers to be readily integrated into the system.

Abstract: A disposal processing system is provided and includes: a disposal section that disposes of a document; a reading section that reads identification information of the document, the identification information being attached to an image on the document; a judging section that makes a judgment whether disposal of the document is permitted on the basis of the identification information; and a controller that controls the disposal section so that the disposal section disposes of the document at least one of: when the judging section makes a judgment that the disposal of the document is permitted; and when the controller acquires information indicating that the disposal of the document is permitted while the judging section makes a judgment that the disposal of the document is prohibited, and so that the disposal section does not dispose of the document when the judging section makes the judgment that the disposal of the document is prohibited.

Abstract: Provided is an apparatus for designing an optical metrology system for measuring structures on a workpiece wherein the optical metrology system is configured to meet one or more signal criteria. The design of the optical metrology system is optimized by using collected signal data in comparison to set one or more signal criteria. In one embodiment, the optical metrology system is used for stand alone systems. In another embodiment, the optical metrology system is integrated with a fabrication cluster in semiconductor manufacturing.

Abstract: A method and apparatus for in-line mechanical quality control of wafers, the method allows for fast detection of cracks including the determination of their size and position on a wafer. The method comprises steps of coupling the wafer and an actuator and exciting a superposition of ultrasonic vibrations in the wafer by sweeping the frequency of the actuator simultaneously around at least two predetermined resonance peaks, recording the resonance frequency, amplitude and bandwidth of resonant frequency curves and comparing that with the resonance frequency, amplitude and bandwidth of reference frequency curves recorded for a mechanically sound crack-free standard wafer. Based on the comparison a reject-accept command is generated using a statistical rejection algorithm.

Abstract: Provided is a method for determining one or more profile parameters of a structure using an optical metrology model, the optical metrology model comprising a profile model, an approximation diffraction model, and a fine diffraction model. A simulated approximation diffraction signal is generated based on an approximation diffraction model of the structure. A set of difference diffraction signals is obtained by subtracting the simulated approximation diffraction signal from each of simulated fine diffraction signals and paired with the corresponding profile parameters and used to generate a library of difference diffraction signals. A measured diffraction signal adjusted by the simulated approximation diffraction signal is matched against the library to determine at least one profile parameter of the structure.

Abstract: The present invention quickly resolves troubles in an analyzer and performs effective external quality control management. An analyzer (2) and a control device (1) are connected by a network (3). Error data and sample data taken from assay of a quality control substance are transmitted from the control device (1) to the analyzer (2). The analyzer (2) is made to be remotely operable from the control device (1) and when troubles arise repair from the control device (1) is possible. The control device (1) tallies sample data, and provides the tally results to a Web page. The analyzer (2) accesses the Web page using a WWW browser, and can perform external quality control in real time.

Abstract: A two-dimensional touch sensor comprising a plurality of electrodes arranged in a mesh pattern on a substrate. Each electrode is formed by interconnected metal traces, the metal being intrinsically opaque, but the metal traces being sufficiently narrow to be practically invisible. The metal traces have a width less than or equal to 10 ?m and occupy less than or equal to 5% of the area of each electrode. The electrodes can be deposited additively via a printing process, for example using copper as the metal. The narrow width of the tracks allows the film to be highly transparent, since the electric field used in capacitive touch screens can be made to propagate with very low metal densities.

Abstract: An information processing method, an information processing apparatus and a program can prevent errors from arising when associating point group data obtained by actually measuring an item such as a metal part and design data defining the item. The characteristic value representing the profile of a face of the design data defining the item and the characteristic value computationally determined from the point group data obtained by actually measuring the item are compared and associated with each other.

Abstract: A method is disclosed for providing quality assurance in an industrial process. The method includes obtaining a manufacturing material from the industrial process, allowing the manufacturing material to contact with a nano-scale surface, which allows the harmful substance to adsorb to the nano-scale surface. The method also includes obtaining a Raman spectrum from the manufacturing material and the nano-scale surface using a spectrometer, searching for, using a spectral analyzer, a spectral signature of a harmful substance in a predetermined spectral region in the Raman spectrum to determine the existence of the harmful substance in the manufacturing material, determining the concentration of the manufacturing material if the spectral signature is found in the Raman spectrum, and rejecting the manufacturing material from the industrial process if the concentration of the manufacturing material is determined to be above a predetermined tolerance level.

Abstract: A photomask quality estimation system comprises a measuring unit, a latitude computation unit and an estimation unit. The measuring unit measures the mask characteristic of each of a plurality of chip patterns formed on a mask substrate. The latitude computation unit computes the exposure latitude of each chip pattern based on the mask characteristic. The estimation unit estimates the quality of each chip pattern based on the exposure latitude.

Abstract: The invention relates to a method for evaluating pressure containers made of a composite material by acoustic emission testing. The method comprises the steps: (a) determining a sufficient number of internal pressure-dependent acoustic emission characteristics (AE characteristics) of pressure containers from identical production that have been classified as being without defects in predetermined phases of a time-controlled pressure acting upon the pressure container (AE test procedure) with one or more acoustic emission channels (AE channels) using acoustic emission sensors (AE sensors) of a predetermined position (one AE characteristic per AE sensor or AE channel.

Abstract: Provided is a test apparatus 10, which includes: a plurality of test modules 150, each of which is connected to any of the plurality of devices under test 100 to supply a test signal to the connected device under test 100; a plurality of site controllers 130 that control the plurality of test modules 150 to test the respective plurality of devices under test 100 simultaneously; a connection setting device 140 that sets a connection mode between the plurality of site controllers 130 and the plurality of test modules 150 so that each of the test modules 150 is connected to any of the plurality of site controllers 130; and a plurality of system controllers 110, each of which controls any of the plurality of site controllers 130, in which a predetermined system controller of the plurality of system controllers 110 assigns, in response to a request from another system controller of the system controllers, a site controller of the site controllers, which is to be controlled by the another system controller.

Abstract: An apparatus for evaluating a system. The apparatus can include a storage element for receiving at least one time-varying output characteristic of the system, the time-varying output characteristic comprising a plurality of raw data points representing a plurality of measurements at a plurality of times; and a processing element communicatively coupled to the storage element. The processing element can be configured for partitioning the plurality of raw data points into a plurality of segments, calculating a plurality of estimated data points based on a plurality of mathematical expressions, and characterizing the system based on at least one figure of merit (FOM) computed from the plurality of estimated data points. In the apparatus, at least one of the plurality of mathematical expressions is associated with each of the plurality of segments.

Abstract: A method for monitoring the manufacture of molded ophthalmic lenses is disclosed. The method monitors the occurrence of predetermined events and records such events in a device history record and a shadow table.

Abstract: Equipment extracts components of spatial frequency that need to be evaluated in manufacturing a device or in analyzing a material or process out of edge roughness on fine line patterns and displays them as indexes. The equipment acquires data of edge roughness over a sufficiently long area, integrates components corresponding to a spatial frequency region being set on a power spectrum by the operator, and displays them on a length measuring SEM. Alternatively, the equipment divides the edge roughness data of the sufficiently long area, computes long-period roughness and short-period roughness that correspond to an arbitrary inspection area by performing statistical processing and fitting based on theoretical calculation, and displays them on the length measuring SEM.

Abstract: An apparatus which measures a size and a shape of a transparent sheet includes a conveyor, a lighting apparatus, an imaging device and a process controller. The conveyor moves the transparent sheet. The lighting apparatus projects light onto the transparent sheet. The imaging device receives reflected light reflected from the transparent sheet. A thickness is input into the process controller. A sheet temperature from a sheet temperature sensor and/or a structure temperature from a structure temperature sensor are output to the process controller. An image is output from the imaging device to the process controller. The process controller outputs the size and the shape of the transparent sheet. The outputs from the process controller are used to adjust machine tools used to fabricate the transparent sheet.

Abstract: Activities within various environments (e.g., industrial control environment) can be automated through a number of interchangeable modules configured to perform an action or series of actions. Each interchangeable module can be dedicated to a specific function or task (e.g., quality control, performance) and can take into consideration various business aspects. A sequence in which the actions should be performed can be assigned and the appropriate module automatically initiated based on the sequence. A user can manually select a module in order to have a particular function automatically implemented, such as inserting a quality control module into a rack so that functions relating to quality control are automatically implemented. When a different task is desired, the quality control module can be removed and replaced with a different module.

Abstract: In a semiconductor integrated circuit, a counter counts the number of high-speed clock signals that have been generated in a predetermined number of clock cycles of a low-speed clock signal. In synchronization with the low-speed clock signal, the semiconductor integrated circuit compares the counter value and a predetermined value, and judges whether the frequency of the high-speed clock signal has reaches a predetermined frequency. Since variations in the frequency become smaller as the oscillation of a high-speed oscillator stabilizes, the semiconductor integrated circuit detects that the oscillation is stable when the semiconductor integrated circuit has judged affirmatively a plurality of times.

Abstract: First and second complementary voltage signals are operatively coupled across a series circuit comprising first and second sense resistors and a circuit element therebetween. An output signal responsive to the self-impedance of the circuit element is generated responsive at least one of a voltage across the first sense resistor and a voltage across the second sense resistor, and at least one of the first and second complementary voltage signals is controlled responsive to the output signal so as to provide for attenuating at least one noise signal having a frequency that is substantially different from a frequency of the first and second complementary voltage signals.

Abstract: Data harvesting can be carried out relative to performance or reliability information associated with one or more groups of electrical units. Ambient condition detectors associated with a variety of industrial or commercial installations and subject to a variety of different conditions can be returned for performance and reliability testing after predetermined usage intervals. Analysis of test results can be maintained in a database. Customers can be provided multilevel access to the information in the database. Reliability and test results for a class of detectors can be provided to a number of customers that have provided samples for evaluation. Application specific information can be limited to a particular customer or customers.

Abstract: A method of inspecting defect of a mask is provided. In this method, a database for storing a plurality of virtual simulation models is created. The virtual simulation models are determined by a plurality of factors including an optical effect and a chemical effect during the transferring the pattern of a mask to the photoresist layer on a wafer. A mask defect image is acquired. A simulation contour of the mask defect image is generated from at least one virtual simulation model in the database. Next, the acceptability of the mask is determined.

Abstract: Samples subject to ion implantation are measured using a modulated optical reflectance system and the results of the measurements are compared to specification ranges for acceptable samples and a plurality of parametric ranges. Each parametric range is associated with a different known type of implantation fault. Measurement results outside of the specification range may be characterized by fault type by comparing the measurement results to a plurality of parametric ranges. In this way, a fault type may be quickly identified and the corresponding source of the fault may be corrected.

Abstract: An appearance inspection method and system of a core of a heat exchanger provided with fins and tubes including identifying a region in which an image of a single tube is captured, performing averaging and dynamic binarization of the image data in this region to extract only the image of the tube, dividing this region into a plurality of blocks, finding the smallest rectangle surrounding a tube at each divided block to find a width dimension of the tube, comparing the tube width dimension at each block found with a predetermined threshold value, and judging a part as good when all of the tube width dimensions at the blocks are the predetermined threshold value or less.

Abstract: A glass sheet defect detection device includes a light source and a light reception device which are placed at opposed positions so as to sandwich a glass sheet. The glass sheet has light-transparent surfaces opposed to each other in a thickness direction. The glass sheet is placed between the light source and the light reception device so that the light-transparent surfaces are inclined with respect to a light axis of an optical system of the glass sheet defect detection device at a predetermined angle. Moreover, the light reception device and the glass sheet are placed in such a positional, relationship that a focal length of a lens system of the light reception device is smaller than a distance from a light reception element of the light reception device and the glass sheet.

Abstract: A data logger analyzes temperature data associated with a product passing through a conveyor oven and provides a visual indication indicating whether the product's temperature profile is within acceptable limits. Thus, an operator need not download captured temperature data to a computer in order to determine whether the oven settings produce a product profile that is within acceptable limits. In one embodiment, the data logger stores criteria for an acceptable product profile, and collects the temperature data and analyzes whether the temperature profile data is within the acceptable limits of the criteria. In another embodiment, a button and a pass/fail indicator are located externally on data logger. An operator depresses the button in order to request whether the product profile passed or failed the criteria. In response to depressing the button, the pass/fail indicator provides visual indication of whether the current oven settings produce an acceptable product profile.

Abstract: A method and a device are provided for inspection of liquid articles to determine the presence of drugs concealed in the liquid articles without opening the outer packages. The method includes emitting radiation beams having a single energy to transmit through the liquid article; receiving the radiation beams transmitted through the liquid article to get multi-angle projection data; inversely operating the multi-angle projection data based on the uniformity of the liquid article to obtain an attribute value of the inspected liquid article; retrieving a reference attribute value in a pre-created database by using the identification information of the liquid article as an index, and calculating a difference between the calculated attribute value and the reference attribute value; and determining whether the difference is larger than a predefined threshold value.

Abstract: A method, apparatus and computer program product for authenticating a pharmaceutical product is provided. The method includes receiving an identifier and a quantity for the pharmaceutical product and receiving a photonic signal from the pharmaceutical product, wherein the photonic signal includes a frequency and amplitude. The method can further include searching for the identifier and quantity that was received in a predefined list comprising identifier-quantity pairs, wherein a frequency and amplitude corresponds to each identifier-quantity pair. The method can further include matching the identifier and quantity that was received to a first identifier-quantity pair in the list. The method can further include storing a record indicating that the pharmaceutical product is counterfeit if the frequency and amplitude of the photonic signal does not match the frequency and amplitude corresponding to the first identifier-quantity pair.

Abstract: An electrode material for a lithium secondary battery which includes particles each having a central portion and a surface portion covering the surface of the central portion. The central portion occupies 80 to 99% of a distance from a center to an outermost surface of the particle and the surface portion occupies 20 to 1% of the distance. The central portion includes LiM1-aDaO2 (M represents Co or Ni, D represents a transition metal element or Al replacing a part of Co or Ni as M, and M is not the same as D) having an ?-NaFeO2 structure. The surface portion includes LiM1-bEbO2 (M represents Co or Ni, E represents a metal element replacing a part of Co or Ni as M, and M is not the same as E) having an ?-NaFeO2 structure. The content of element E in the central portion satisfies the relation of E/(M+D+E)<0.05 in terms of an atomic ratio, and the content of element D in the surface portion satisfies the relation of D/(M+D+E)<0.05 in terms of an atomic ratio.

Abstract: A film forming apparatus which forms a film on a substrate by utilizing a chemical solution, including: a correlation data creating unit which creates a correlation data that is related to the quality of a chemical solution, from data that is related to the properties of the chemical solution including at least one of data on storage temperature for the chemical solution to be loaded and data on pressure applied to the chemical solution to be loaded; and a determining unit which determines whether or not the chemical solution holds expected quality thereof on the bases of the correlation data.

Abstract: Provided is a method of designing an optical metrology system for measuring structures on a workpiece where the optical metrology system is configured to meet two or more design goals. The design of the optical metrology system is optimized by using collected design goal data in comparison to the set two or more design goals. In one embodiment, the optical metrology system is used for stand alone metrology systems. In another embodiment, the optical metrology system is integrated with a fabrication cluster in semiconductor manufacturing.

Abstract: Method and system that test device sensitivity according to whether the device passes or fails when subjected to a test signal. The device may be repeatedly subjected to test signal at varying operating parameters in order to assess pass-fail threshold at which the device transitions from operating properly/improperly to operating improperly/properly.

Abstract: The present disclosure relates to specification, optimization and matching of optical systems by use of orientation Zernike polynomials. In some embodiments, a method for assessing the suitability of an optical system of a microlithographic projection exposure apparatus is provided. The method can include determining a Jones pupil of the optical system, at least approximately describing the Jones pupil using an expansion into orientation Zernike polynomials, and assessing the suitability of the optical system on the basis of the expansion coefficient of at least one of the orientation Zernike polynomials in the expansion.

Abstract: Methods are provided for predicting warp of a wood product given its differential characteristics, such as, for example, curvature. The methods may involve measuring at least one original warp profile for each of one or more first wood products; measuring one or more inputs on the one or more first wood products; converting the warp profile, for each of the one or more first wood products, into a differential characteristic profile; developing a prediction algorithm based on the one or more inputs and the differential characteristic profile; measuring one or more inputs of the given wood product; inputting the one or more inputs of the given wood product into the prediction algorithm; and determining a differential characteristic profile for the given wood product based on the prediction algorithm.

Abstract: Methods, systems, and computer-readable media provide for facility integrity testing. According to embodiments, a method for populating a watch list with circuits of a communications network to be monitored for repeat failures is provided. According to the method, a trouble ticket associated with one of the circuits and a trouble code and analysis code (TC/AC) combination associated with the trouble ticket is retrieved. Whether the trouble ticket meets a watch list criterion is determined. In response to determining that the trouble ticket meets the watch list criterion, the trouble ticket and the TC/AC combination are added to the watch list.

Abstract: An improved system and method for automatically inspecting the quality of newly-manufactured containers is disclosed that detects containers that are out-of-round by more than a predetermined amount so that they may be rejected to ensure that containers that are passed are of acceptable quality. One or more ultrasonic sensors are located at fixed positions with reference to a container that is rotated. If any sensor detects that the distance between the sensor and the container falls outside of an acceptable range, the container is rejected.

Abstract: Systems and methods for detecting defects on a wafer and generating inspection results for the wafer are provided. One method includes detecting defects on a wafer by comparing output generated by scanning of the wafer performed by an inspection system to one or more defect detection thresholds. The method also includes sampling outliers in the output by selecting the output having the highest values from bins defined based on one or more predetermined criteria. In addition, the method includes selecting a portion of the sampled outliers based on wafer-level analysis of the sampled outliers. The method further includes generating inspection results for the wafer by combining information about the selected portion of the sampled outliers with information about the defects detected using the one or more defect detection thresholds.

Abstract: Disclosed is a test method an apparatus in which an area for test and an area for analysis are specified based on the design information of the display device having a non-rectangular display area. To carry out testing, parasitic capacitances are found using the design information, and operations for weighting are performed on test data or threshold values based on which a decision on pass/fail is to be made (FIG. 4).

Abstract: A method of multi-site testing a batch of semiconductor units using a multi-site automated tester (100). The tester (300) includes a handler (320) coupled to a contactor (330) including a first plurality of contact sites. The method includes the step of loading the first plurality of units into the first plurality of contact sites (201). The first plurality of units are simultaneously tested (202) using a test program to determine bin information for each of the first plurality of units, wherein the bin information defines each of the first plurality units as being a passed unit or a reject unit. The passed units are offloaded from respective contact sites of the first plurality of contact sites to create vacant contact sites (203), while keeping the reject unit(s) at respective contact sites of the first plurality of contact sites. Untested units from the batch are then loaded to fill the vacant contact sites (204).

Abstract: A method for inspecting a settling time of a deflection amplifier includes setting a settling time, performing shooting a plurality of times alternately to project two patterns of different types which are shaped by making a charged particle beam pass through a first and a second apertures while deflecting the charged particle beam by a deflector controlled by an output of a deflection amplifier which is driven based on the settling time having been set, measuring beam currents of the shooting, calculating an integral current of the beam currents measured, and calculating a difference between the integral current calculated and a reference integral current to output the difference.

Abstract: A system for preferentially marking defects on a web is described. The system includes a web of material to be converted into individual sheets of a plurality of different grade levels, a database storing anomaly data of anomalies on the web, wherein an anomaly is a potential defect in at least one of the plurality of different grade levels, a marker that associates a unique mark with at least one of the grade levels, and a controller to retrieve the anomaly data from the database and to signal the marker as to where to make a mark, wherein the marker applies the mark associated with at least one of the grade levels for which the anomaly may cause a defect. The system may provide advantages, such as that a converter of various products from a single web roll may determine which regions of the web satisfy each grade level.

Abstract: An optical receiving apparatus that receives an optical signal and outputs a data value of digital data transmitted by the optical signal is provided, including a light receiving element that receives the optical signal and outputs a photocurrent according to a strength of the optical signal, a present cycle integrator that integrates the photocurrent corresponding to a present cycle of the digital data over a prescribed period within the cycle, a previous cycle integrator that integrates the photocurrent corresponding to a cycle prior to the present cycle over a period that is substantially equal to the prescribed period in the cycle, and a data value identifying circuit that outputs a data value of the present cycle of the digital data based on a difference between a charge amount obtained through integration by the present cycle integrator and a charge amount obtained through integration by the previous cycle integrator.

Abstract: A method for testing a plurality of fire hoses having respective service test pressures and the test apparatus therefor wherein each hose is required to maintain a test pressure for a specified duration to pass the test. The test pressure is proportional to the service test pressure. Each hose is coupled to a respective hose fitting of a respective branch test conduit. Each branch test conduit includes an isolation valve, a pressure transducer, and a hose fitting downstream of the isolation valve. A variable frequency-variable speed controls a motor which drives a positive displacement water pump supplying water to and pressurizing a water header conduit and a plurality of branch test conduits interconnected therewith. An algorithm applied to the error signal for a respective hose line generates a pump speed command limited by the controller to regulate the rate of increase of pump output pressure.

Abstract: Systems and methods for monitoring a sample or a sample flow associated with a process or an environment. The systems and methods detect one or more chemical or biological agents present in a sample or for detecting changes in the chemical/biological composition of a sample flow. The systems and methods transmit light at the sample, receive a resulting spectral response, perform a spectral analysis, and display a result or choose a course of action. The analysis compares the sample's response to known spectrums to determine composition or to determine if the composition of the sample flow has deviated from “normal”. In one embodiment, the systems and methods uses deep ultraviolet light to produce both a Raman and a fluorescence response, separated in frequency, which are simultaneously discerned and analyzed. In this embodiment the analysis is used to determine sample composition. In other embodiments, the analysis is used to discern or warn of changes, or to choose a course of action.

Abstract: Provided is an apparatus for designing an optical metrology system for measuring structures on a workpiece wherein the optical metrology system is configured to meet one or more signal criteria. The design of the optical metrology system is optimized by using collected signal data in comparison to set one or more signal criteria. In one embodiment, the optical metrology system is used for stand alone systems. In another embodiment, the optical metrology system is integrated with a fabrication cluster in semiconductor manufacturing.

Abstract: Provided is a method of designing an optical metrology system for measuring structures on a workpiece wherein the optical metrology system is configured to meet one or more signal criteria. The design of the optical metrology system is optimized by using collected signal data in comparison to the one or more signal criteria. In one embodiment, the optical metrology system is used for stand alone systems. In another embodiment, the optical metrology system is integrated with a fabrication cluster in semiconductor manufacturing.

Abstract: Disclosed is a method for design validity verification of an electronic circuit board with regard to power supply noise, wherein with regard to an i-th LSI (i=1 to n) on the electronic circuit board, an input voltage Vin[i] to the LSI from the printed circuit board is given by Vin[i]=VDD?Zlsi[i]×VDD/(Zlsi[i]+Zl1[i]),where Zlsi[i] is an input impedance characteristic and Zl1[i] is a reflected impedance characteristic viewed from a position at which the i-th LSI is mounted, being a characteristic with the i-th LSI omitted from the whole of the electronic circuit board and a judgment is made as to whether or not a reflected voltage Vr[i]=Vin[i]×(Zlsi[i]+Zl1[i])/(Zlsi[i]?Zl1[i]) satisfies |Vr[i]|??V (power supply variation tolerance range).

Abstract: Provided is system and method for controlling a fabrication cluster using at least one parameter of a structure measured with an optical metrology system designed and configured to meet one or more signal criteria. The design of the optical metrology system is optimized by using collected signal data in comparison to set one or more signal criteria. In one embodiment, the optical metrology system is used for standalone systems. In another embodiment, the optical metrology system is integrated with a fabrication cluster in semiconductor manufacturing. At least one parameter determined from a signal measured using the optical metrology system is transmitted to a fabrication cluster. The at least one parameter is used to modify at least one process variable or equipment setting of the fabrication cluster.

Abstract: A system and methods for the evaluation of the integrity of a wafer cassette and the disposition thereof are based upon evaluation of wafer measurement data obtained using a wafer sorter cassette mapping system utilized in-line during wafer sorting operations. In one embodiment, wafers are placed into slots in the wafer cassette. A wafer sorter cassette mapping sensor is scanned over the wafers in the wafer cassette. The positions of the wafers are measured while scanning the sensor over the wafers. The wafer position measurements are evaluated using a modeling system to determine slot positions, and a determination of the integrity of the cassette is generated. If the integrity determination indicates that the cassette is deformed beyond a predetermined value, the cassette is replaced. The measurement data may be stored in a data base for further trend analysis or for replacement forecasting.