Length, Distance, Or Thickness Patents (Class 702/97)
  • Patent number: 8105269
    Abstract: An infusion pump uses sensors and a computer program to detect tubing in a tube-loading section of the pump. The pump and the computer program also measures one or more of the tubing outer diameter, outer circumference, inner diameter, inner circumference, and tubing wall thickness. The infusion pump utilizes proximity sensors, such as an ultrasonic sensor, a capacitive sensor, or even an air-in-line sensor to detect proximity between two infusion pump surfaces, such as the surfaces that clamp the tubing in the pump, to determine thickness. At least one of the clamping surfaces is equipped with sensors to indicate contact length of the tubing with the surface. Using these measurements, the tubing wall thickness and inner diameter can be determined. Knowing the actual tubing inner diameter, increased volumetric accuracy is possible, up to a three or four percent improvement over present measurements.
    Type: Grant
    Filed: October 24, 2008
    Date of Patent: January 31, 2012
    Assignees: Baxter International Inc., Baxter Healthcare S.A.
    Inventor: Yu Zhou
  • Patent number: 8090553
    Abstract: A cable length detection apparatus is provided to detect the length of a cable having at least three pairs of wires for transmitting video signals. The cable length detection apparatus has a signal compressing circuit, a signal converting circuit and a length calculating circuit. The signal compressing circuit compresses an electrical signal into one pair of wires. The signal converting circuit converts the electrical signal transmitted by the pair of wires into a value. The length calculating circuit then calculates the length of the cable according to the value.
    Type: Grant
    Filed: March 27, 2009
    Date of Patent: January 3, 2012
    Assignee: Aten International Co., Ltd.
    Inventor: Sun-Chung Chen
  • Publication number: 20110307206
    Abstract: A calibrating method of calibrating a measured distance of a measured object measured by a distance-measuring device according to an ambient temperature includes providing a temperature sensor for measuring the ambient temperature of the distance-measuring device, calculating a calibrated imaging location of the measured object according to the ambient temperature and an imaging location of the measured object, and calibrating the measured distance according to the calibrated imaging location. In this way, when the distance-measuring device measures the measured object, the error due to the variation of the ambient temperature is avoided according to the calibrating method.
    Type: Application
    Filed: March 11, 2011
    Publication date: December 15, 2011
    Inventors: En-Feng Hsu, Chi-Chieh Liao, Ming-Tsan Kao
  • Patent number: 8078419
    Abstract: A method monitors a change in film thickness during polishing using an eddy current sensor. This method includes acquiring an output signal of the eddy current sensor as a correction signal value during water-polishing of a substrate, during dressing of the polishing pad, or during replacement of the polishing pad, calculating a correcting amount from a difference between the correction signal value and a predetermined correction reference value, calculating an actual measurement signal value by subtracting the correction amount from the output signal of the eddy current sensor when polishing a substrate having a conductive film, and monitoring a change in thickness of the conductive film during polishing by monitoring a change in the actual measurement signal value.
    Type: Grant
    Filed: October 9, 2008
    Date of Patent: December 13, 2011
    Assignee: Ebara Corporation
    Inventors: Yoichi Kobayashi, Taro Takahashi, Yasumasa Hiroo, Akihiko Ogawa, Shinrou Ohta
  • Patent number: 8065105
    Abstract: A system including a platform having a receptacle adapted to a bottom of a shoe or foot; securing mechanism, associated therewith; a sole for contacting a ground surface; a mechanism associated with the sole and a platform bottom, including: motor and a thrusting element, activated by the motor, the thrusting element adapted to move between the sole and the platform to apply an upward force against the platform bottom, thereby changing a platform height with respect to the sole; a sensor device adapted to associate with a lower limb, and to produce a locomotion data signal, and a microprocessor, operatively connected to the sensor device and motor, adapted to: receive locomotion information based on the signal; process the locomotion information to determine a locomotion phase, and control a timing of the mechanism, based on the determination, to change the height during a locomotion swing phase.
    Type: Grant
    Filed: April 30, 2009
    Date of Patent: November 22, 2011
    Assignee: Step of Mind Ltd.
    Inventors: Simona Bar-Haim, Mark Belokopytov
  • Publication number: 20110282548
    Abstract: In order to more accurately determine wheel state variables of a wheel, physical variables of the wheels are continuously measured and evaluated on the vehicle side. In addition, physical variables of the wheel are intermittently measured on the wheel side. The variables measured on the wheel side or the evaluated measurement results thereof are used to correct the variables measured on the vehicle side and/or the determined wheel state variables.
    Type: Application
    Filed: January 18, 2010
    Publication date: November 17, 2011
    Applicant: CONTINENTAL AUTOMOTIVE GMBH
    Inventor: Thomas Haas
  • Publication number: 20110270563
    Abstract: The present invention provides an electro-optical distance measurement, wherein a light from a light source (6) is projected toward an object to be measured (2), a reflection light reflected by the object to be measured is received at a photodetection unit (8), the light from the light source is received by the photodetection unit as an inner light via an inner optical path (11), and a distance to the object to be measured is measured according to the result of photodetection of the reflection light and the inner light of the photodetection unit, and wherein a correction information is acquired based on the inner light, the acquired correction information is stored, a correction value is obtained from the correction information based on the reflection light and the inner light, and a distance is calculated from the correction value and the result of photodetection of the reflection light and the inner light.
    Type: Application
    Filed: December 25, 2009
    Publication date: November 3, 2011
    Applicant: KABUSHIKI KAISHA TOPCON
    Inventors: Mitsuru Kanokogi, Masahiro Ohishi
  • Publication number: 20110246116
    Abstract: A signal processing apparatus includes a differential processing unit to differentiate a reflection signal corresponding to a pulse measurement beam that is periodically scanned in a polarized manner; an arithmetic unit to obtain, with a rising time of a first-order-differential reflection signal as a reference, a barycentric position of the first order differential reflection signal as a detection time of a reflected beam, and to calculate a distance to a measured object based on a time difference between an output time of the measurement beam and the detection time of the reflected beam; and a waveform determining unit to determine whether the reflected beam includes a plurality of overlapping reflected beams from a plurality of measured objects, based on rising and falling characteristics of the first-order-differential reflection signal and based on a rising characteristic of a second-order-differential reflection signal obtained by the second order differential of the reflection signal.
    Type: Application
    Filed: March 30, 2011
    Publication date: October 6, 2011
    Applicant: HOKUYO AUTOMATIC CO., LTD.
    Inventors: Toshihiro Kamitani, Toshihiro Mori
  • Publication number: 20110243708
    Abstract: A method of calculating the tip clearance during operation of a combustion turbine engine that includes the steps of: measuring a cold tip clearance and a cold shell-to-shell distance; while the combustion turbine engine is operating, measuring an operating parameter and measuring a shell-to-shell distance with a proximity sensor; calculating the tip clearance based on the cold tip clearance measurement and the operating parameter measurement; calculating the shell-to-shell distance based on the cold shell-to-shell distance measurement and the operating parameter measurement; comparing the shell-to-shell distance measurement of the proximity sensor with the shell-to-shell distance calculation; and calibrating the calculated tip clearance calculation based on the comparison.
    Type: Application
    Filed: March 31, 2010
    Publication date: October 6, 2011
    Inventor: Matthew Troy Hafner
  • Patent number: 8027516
    Abstract: An image forming apparatus includes a movable member that moves cyclically in synchronization with an image forming process and a position detector. The position detector includes a scale, an image sensor, a signal processor, and a position computing unit. The scale is attached to the movable member and includes a plurality of optical marks formed in line at a substantially constant interval. The image sensor captures data relating to at least one optical mark at a time. The signal processor computes a coordinate of the optical mark with respect to a reference position. The position computing unit computes a distance traveled by the optical mark based on a number of the optical marks that pass the reference position and the coordinate of the optical mark with respect to the reference position.
    Type: Grant
    Filed: October 17, 2006
    Date of Patent: September 27, 2011
    Assignee: Ricoh Company, Ltd.
    Inventors: Koichi Kudo, Hideyuki Takayama
  • Patent number: 8010468
    Abstract: A method for wafer analysis with artificial neural network and the system thereof are disclosed. The method of the system of the present invention has several steps, including: first of all, providing a test unit for wafer test and generating a plurality of test data; next, transmitting the test data to a processing unit for transferring to output data; then, comparing the output data with predictive value and modifying bias and making the output data close to the predictive value, and repeating the steps mentioned above to train this system; finally, analyzing wafers by the trained system. Using this system to analyze wafers not only saves time, but also reduces manpower and the risk resulting from artificial analysis.
    Type: Grant
    Filed: October 15, 2007
    Date of Patent: August 30, 2011
    Assignee: King Yuan Electronics Co., Ltd.
    Inventor: Ming-Chin Tsai
  • Publication number: 20110161036
    Abstract: The invention relates to a method for determining the thickness of multi-layer films (13) comprising layers consisting of various non-conductive materials. According to said method, the thickness of the multi-layer film (13) is measured by a first sensor (17) and a second sensor (16) and optionally additional sensors. The first sensor (17) measures the profile of the total thickness in a short cycle with a duration of approximately 1-2 minutes, but with a large measuring error margin. The second sensor (16) measures the profile of the total thickness with a small measuring error margin but in a long cycle with a duration of approximately 10 to 30 minutes. A correction profile for the first sensor (17) can be calculated by comparing the two thickness profiles.
    Type: Application
    Filed: January 6, 2011
    Publication date: June 30, 2011
    Applicant: Hch. Kuendig & Cie. AG
    Inventors: Albert Keller, Markus Haenggli, Philipp Weber, Peter Stuker
  • Publication number: 20110125442
    Abstract: A method for calibrating a thickness gauge, wherein the thickness gauge measures the thickness of a measurement object in a predefinable measuring direction (Z), comprising at least one displacement sensor (1, 2) operating in a contactless or scanning manner, wherein a reference object (3) having a known thickness and shape is moved into at least a partial region of the measurement field of the at least one displacement sensor (1, 2), comprises the following steps with respect to particularly precise and simple calibration. First, at least two independent measurement values are recorded by the at least one displacement sensor (1, 2) in at least two predefinable sites on a first surface of the reference object (3) at predefinable times tj, or as a function of predefinable positions pj of the reference object (3) in the measurement field, where j=1, 2 . . . .
    Type: Application
    Filed: April 21, 2009
    Publication date: May 26, 2011
    Inventors: Günter Schallmoser, Karl Wisspeintner, Robert Wagner
  • Patent number: 7949139
    Abstract: The present invention automatically corrects for subwoofer or other speaker crossover settings or other parameters by providing an adjustable factor passed upon not only pulse location, but on pulse width. In FIG. 2, as the low-pass frequency of the subwoofer is decreased, either by the crossover setting or the physical design of the subwoofer, the impulse response is shifted to the right and the width of the impulse increases. By relating the adjustment factor to the width of the impulse, the accuracy of the computed distance is greatly increased. The relation may be found doing a simple polynomial curve fitting to empirical data from several subwoofers at various crossover settings and distances, storing that data, and then measuring pulse location and width of the actual subwoofer during the setup routine, and adjusting the distance (delay) calculations accordingly.
    Type: Grant
    Filed: December 3, 2004
    Date of Patent: May 24, 2011
    Assignee: Cirrus Logic, Inc.
    Inventor: Joel C. McKee Cooper
  • Publication number: 20110058828
    Abstract: A length measurement apparatus including: a measurement portion that measures a sheet length based on a rotational amount of a length measurement roll for a first detection period in which first and third sensors detect the sheet, and a sheet length based on a rotational amount of the length measurement roll for a second detection period in which the second sensor and any one of the first and third sensors detect the sheet, the any one of the first and third sensors being disposed at a position opposite to the second sensor via the length measurement roll; and a whole length calculation portion that selects the sheet length nearer to integral multiples of the circumference length of the length measurement roll from the sheet lengths measured for the first and second detection periods, and calculates the whole length of the sheet by using the selected sheet length.
    Type: Application
    Filed: May 6, 2010
    Publication date: March 10, 2011
    Applicant: FUJI XEROX CO., LTD.
    Inventors: Kazuyuki TSUKAMOTO, Takao FURUYA, Minoru OHSHIMA, Yoshinari IWAKI
  • Patent number: 7895015
    Abstract: Methods are disclosed wherein the structural health of a civil structure, such as, but not limited to, a bridge or the like is measured by electronic distance measurement from a plurality of stable locations to a plurality of cardinal points on the structure in a methodical manner. By measuring the coordinates of the cardinal points, the dynamic and long-term static behavior of the structure provide an indication of the health of the structure. Analysis includes; comparison to a Finite Element Model (FEM), comparison to historical data, linearity, hysteresis, symmetry, creep, damping coefficient, and harmonic terms.
    Type: Grant
    Filed: December 4, 2008
    Date of Patent: February 22, 2011
    Inventors: David H. Parker, John M. Payne
  • Patent number: 7881902
    Abstract: A method for monitoring human activity using an inertial sensor includes continuously determining an orientation of the inertial sensor, assigning a dominant axis, updating the dominant axis as the orientation of the inertial sensor changes, and counting periodic human motions by monitoring accelerations relative to the dominant axis.
    Type: Grant
    Filed: January 26, 2010
    Date of Patent: February 1, 2011
    Assignee: DP Technologies, Inc.
    Inventors: Philippe Kahn, Arthur Kinsolving, Mark Andrew Christensen, Brian Y. Lee, David Vogel
  • Patent number: 7873488
    Abstract: A chromatic point sensor (CPS) calibration object and characterizing data are provided. The calibration object comprises a flat base plane with steps extending from it. Step measurement points provided by the steps and base plane measurement points provided by portions of the base plane are intermingled along a measurement track. The characterizing data characterizes known heights of the measurement points. A calibration method acquires measurement data such that some base plane measurement points should be at nearly the same measurement distance and therefore have the same common mode errors relative to known base plane measurement point heights. If such base plane measurement points exhibit minimal error variations, then measurements for those and proximate measurement points may provide reliable calibration data. In contrast, error variations outside an expected range indicate unreliable measurements that should be screened or replaced by new calibration measurements.
    Type: Grant
    Filed: December 8, 2008
    Date of Patent: January 18, 2011
    Assignee: Mitutoyo Corporation
    Inventors: Michael Nahum, David William Sesko, Kim W. Atherton
  • Patent number: 7856334
    Abstract: A method is disclosed whereby a laser-based spherical coordinate measurement system is dynamically calibrated. A mechanical oscillator, such as, but not limited to, a Foucault pendulum is used to generate periodic motions which can be fitted to Fourier series models. The residuals between the experimental measurements and the model can provide information which can be used to calibrate the instrument. The calibration information is used to augment the ASME B89.4.19-2006 standard to improve sensitivity to cyclic errors and include the servo systems.
    Type: Grant
    Filed: December 6, 2008
    Date of Patent: December 21, 2010
    Inventor: David H. Parker
  • Patent number: 7848844
    Abstract: A grinding method wherein the correlation between the amount of inertial grinding occurring in performing spark-out by a grinding unit and the maximum load current in a motor of the grinding unit is grasped, and a correction value for the amount of inertial grinding corresponding to the maximum load current is preliminarily obtained. When the wafer thickness measured by a thickness measuring gauge has reached the sum of a desired value and the correction value (=the amount of inertial grinding) corresponding to the maximum load current, the spark-out is started. Accordingly, the wafer thickness becomes the desired value after the inertial grinding in performing the spark-out.
    Type: Grant
    Filed: April 8, 2008
    Date of Patent: December 7, 2010
    Assignee: Disco Corporation
    Inventor: Seiji Nemoto
  • Publication number: 20100256940
    Abstract: According to the present invention, a laser scanner measuring system, which has a laser scanner and a calibration target, wherein the laser scanner comprises a light emitting element for emitting a pulsed laser beam, a rotary projecting unit for projecting the pulsed laser beam for scanning, a distance measuring unit, which has a distance measuring light receiving unit, for measuring a distance by receiving a reflection light from an object to be measured, and a control unit for driving and controlling the light emitting element and the distance measuring unit, and wherein the calibration target has a reflection sector with a known shape and with high reflectance and is installed at a known position, comprising a step for judging a reflected pulsed laser beam from the reflection sector as received by the distance measuring light receiving unit by detecting a level of light quantity, a step for determining a center position of the reflection sector based on the result of the judgment, and a step for calibratin
    Type: Application
    Filed: December 11, 2009
    Publication date: October 7, 2010
    Applicant: Kabushiki Kaisha TOPCON
    Inventors: Kazuhiro Ogawa, Hiroto Shibuya, Shigeyuki Yamaguchi, Ryousuke Miyoshi, You Sasaki, Hiroyuki Konno, Jeffrey Robert DeBoer
  • Publication number: 20100245798
    Abstract: A method is provided for positioning at least one target portion of a substrate with respect to a focal plane of a projection system. The method comprises performing height measurements of at least part of the substrate to generate height data, using predetermined correction heights to compute corrected height data for the height data. The method further comprises positioning the target portion of the substrate with respect to the focal plane of the projection system at least partially based on the corrected height data.
    Type: Application
    Filed: June 7, 2010
    Publication date: September 30, 2010
    Applicant: ASML Netherlands B.V.
    Inventors: Cornelis Henricus VAN DE VIN, Ralph Brinkhof, Arthur Winfried, Eduardus Minnaert, Alex Van Zon
  • Publication number: 20100245845
    Abstract: A system and method for measuring the physical characteristics of an object is provided, wherein the method includes disposing the object within the sensor optical path of an inspection system, causing a source collimated light beam to propagate along the source optical path to be at least partially incident upon the reflecting device, reflecting the source collimated light beam to create a reflected collimated light beam that propagates along the sensor optical path such that the reflected collimated light beam is at least partially incident upon the object to produce a silhouette, wherein at least a portion of the silhouette is incident upon the sensing device to generate initial image data responsive to the silhouette and processing the initial image data responsive to at least one predetermined algorithm to generate resultant image data responsive to at least one of a plurality of physical characteristics of the object.
    Type: Application
    Filed: March 13, 2010
    Publication date: September 30, 2010
    Inventors: Stanley P. Johnson, Lawrence J. Zagorsky
  • Publication number: 20100235129
    Abstract: A method for preprocessing sensor data applicable to sensor fusion for one or more sensors mounted on a vehicle is presented. The method comprises obtaining sensor data relating to common obstacles between the vision sensors and a lidar sensor, calculating range and azimuth values for the common obstacles from the lidar sensor data, and calculating range and azimuth values for the common obstacles from the vision sensor data. Then the method correlates the lidar sensor data pertaining to the common obstacles with the vision sensors pixels, formulates translations between the range values of the common obstacles and the one or more sensor tilt parameters, and performs recursive least squares to estimate an estimated sensor tilt for the vision sensors that can reduce range errors in the vision sensors.
    Type: Application
    Filed: March 10, 2009
    Publication date: September 16, 2010
    Applicant: HONEYWELL INTERNATIONAL INC.
    Inventors: Manuj Sharma, Shrikant Rao, Lalitha Eswara
  • Publication number: 20100235128
    Abstract: The invention is based on a measuring device, in particular a distance measuring device, having a transmission unit (18) for transmitting a measurement signal (22) and a processing unit (30) which is intended to process the measurement signal (22) and has a frequency response (70) having a first resonant frequency range (76) in which the measurement signal (22) is arranged. The invention proposes that the frequency response (70) has at least one second resonant frequency range (78) in which the measurement signal (22) is arranged during a measurement.
    Type: Application
    Filed: January 11, 2007
    Publication date: September 16, 2010
    Inventors: Peter Wolf, Uwe Skultety-Betz, Joerg Stierle, Bjoern Haase, Kai Renz
  • Patent number: 7792655
    Abstract: A computer-implemented method for scanning and obtaining points of an object is provided. The method includes defining a measuring distance between two points of an object and scanning the measuring distance according to an optimal measuring position. If coordinate values of each of the scanned points are valid, then the method send the obtained coordinate values to an electronic device if the obtained coordinate values are valid.
    Type: Grant
    Filed: July 9, 2008
    Date of Patent: September 7, 2010
    Assignees: Hong Fu Jin Precision Industry (ShenZhen) Co., Ltd., Hon Hai Precision Industry Co., Ltd.
    Inventors: Chih-Kuang Chang, Yi-Rong Hong, Li Jiang, Zhong-Kui Yuan
  • Patent number: 7778788
    Abstract: A method for measuring dimensions between selected points on a side of interest in objects selected for measurement by an optical measuring system comprising a flatbed scanner and a connected computer system through acquiring a reference image to provide corresponding image distance errors; and also acquiring a measurement object image. Deviation curves are provided as the basis for determining deviation errors in the measurement object image. Corrected measurement object image distances are formed through combining the deviation errors in the measurement object image distances with the corresponding measurement object image. These corrected measurement object image distances are used to determine distances between chosen pairs of those selected locations.
    Type: Grant
    Filed: May 29, 2008
    Date of Patent: August 17, 2010
    Assignee: United Technologies Corporation
    Inventors: Randall W. Joyner, Jesse R. Boyer
  • Patent number: 7756662
    Abstract: In a capacitance type of non-contact sensor for detecting the position of an object to be detected, such as dielectric material, a detection gain is changed in a first case where the object to be detected is placed in a first position and also in a second case where the object to be detected is placed in a second position, and an offset value is adjusted for each gain to bring an output value to a predetermined value. The adjusted offset values are stored in order to define a gain and an offset value at a point, where the offset values in the first and second cases are closest, as adjustment values.
    Type: Grant
    Filed: September 10, 2008
    Date of Patent: July 13, 2010
    Assignee: Oki Electric Industry Co., Ltd.
    Inventor: Mamoru Tokita
  • Patent number: 7756661
    Abstract: A method for measuring a dimension of a pattern formed on a semiconductor light-exposure mask includes performing a preparation arranged to form a first relationship between measured values of dimensions of opaque patterns and misalignments of detected edge positions, and a second relationship between measured values of dimensions of clear patterns and misalignments of detected edge positions, performing detection/measurement arranged to detect opposite two edge positions of a measurement target pattern, and to measure a dimension of the measurement target pattern bounded by the two edge positions and dimensions of adjacent patterns respectively adjacent to the two edge positions, and performing correction arranged to respectively correct two detected edge positions of the measurement target pattern, with reference to one or both of the first and second relationships formed in the preparation, and measured values of the dimensions obtained in the detection/measurement.
    Type: Grant
    Filed: February 1, 2007
    Date of Patent: July 13, 2010
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Takeshi Yamane
  • Publication number: 20100145650
    Abstract: A chromatic point sensor (CPS) calibration object and characterizing data are provided. The calibration object comprises a flat base plane with steps extending from it. Step measurement points provided by the steps and base plane measurement points provided by portions of the base plane are intermingled along a measurement track. The characterizing data characterizes known heights of the measurement points. A calibration method acquires measurement data such that some base plane measurement points should be at nearly the same measurement distance and therefore have the same common mode errors relative to known base plane measurement point heights. If such base plane measurement points exhibit minimal error variations, then measurements for those and proximate measurement points may provide reliable calibration data. In contrast, error variations outside an expected range indicate unreliable measurements that should be screened or replaced by new calibration measurements.
    Type: Application
    Filed: December 8, 2008
    Publication date: June 10, 2010
    Applicant: MITUTOYO CORPORATION
    Inventors: Michael Nahum, David William Sesko, Kim W. Atherton
  • Patent number: 7706921
    Abstract: Disclosed are a moving distance sensing apparatus for a robot cleaner and a method therefor capable of determining a precise moving distance with respect to the robot cleaner by setting a long distance sensor and a short distance sensor having respectively different sensing method from each other on the same sensing line in the robot cleaner to sense the long distance and the short distance for the same direction, and then by determining coherency to each moving distance on the basis of information provided by the two different sensors, the moving distance sensing apparatus comprising: a long distance sensor for sensing a moving distance with respect to a long distance; a short distance sensor mounted on the same sensing line in one-to-one correspondence with the long distance sensor, for sensing a moving distance with respect to a short distance; and a micro computer for determining a moving distance error on the basis of moving distance information with respect to the same direction provided by the long dis
    Type: Grant
    Filed: March 23, 2005
    Date of Patent: April 27, 2010
    Assignee: LG Electronics Inc.
    Inventor: Il-Kyun Jung
  • Publication number: 20100076710
    Abstract: A sensor calibration system for a mobile machine is disclosed. The sensor calibration system may have a first machine mounted sensor configured to sense a characteristic of an offboard object and to generate a corresponding signal, and a second machine mounted sensor configured to sense the characteristic of the offboard object and to generate a corresponding signal. The sensor calibration system may also have a controller in communication with the first and second machine mounted sensors. The controller may be configured to compare the characteristic of the offboard object as sensed by the first machine mounted sensor to the characteristic of the offboard object as sensed by the second machine mounted sensor, and to correct subsequent signals received from the first machine mounted sensor based on the comparison.
    Type: Application
    Filed: September 19, 2008
    Publication date: March 25, 2010
    Inventors: Ramadev Burigsay Hukkeri, Thandava Krishna Edara
  • Patent number: 7679055
    Abstract: An evaluation method and apparatus is provided for evaluating a displacement between patterns of a pattern image by using design data representative of a plurality of patterns superimposed ideally. A first distance is measured for an upper layer pattern between a line segment of the design data and an edge of the charged particle radiation image, a second distance is measured for a lower layer pattern between a line segment of the design data and an edge of the charged particle radiation image; and an superimposition displacement is detected between the upper layer pattern and lower layer pattern in accordance with the first distance and second distance.
    Type: Grant
    Filed: August 24, 2007
    Date of Patent: March 16, 2010
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Takumichi Sutani, Ryoichi Matsuoka, Hidetoshi Morokuma, Akiyuki Sugiyama, Hiroyuki Shindo
  • Patent number: 7643955
    Abstract: Distances to targets (2a, 2b) are simultaneously determined in a method for measuring distance according to the phase measuring principle with a time discrete emission of periodic signals (7) and a sampling of received signals for generating and optionally storing sampled values, whereby the signals have signal portions that are reflected by the targets (2a, 2b) and superimposed. A statistical parameter estimation problem based on a mathematical signal model is solved in such a manner that the number of the targets (2a, 2b) for more than one target (2a, 2b) is preset or fundamentally, the number of targets is determined by the method, and the inequalities D??Dk<D+ and l?k?K are valid. The preset distances D??IR and D+?IR with D?<D+ set the measuring range of the distance measuring device.
    Type: Grant
    Filed: August 18, 2006
    Date of Patent: January 5, 2010
    Assignee: Leica Geosystems AG
    Inventor: Jurg Weilenmann
  • Publication number: 20090306923
    Abstract: The invention relates to a method for determining the thickness of multi-layer films (13) comprising layers consisting of various non-conductive materials. According to said method, the thickness of the multi-layer film (13) is measured by a first sensor (17) and a second sensor (16) and optionally additional sensors. The first sensor (17) measures the profile of the total thickness in a short cycle with a duration of approximately 1-2 minutes, but with a large measuring error margin. The second sensor (16) measures the profile of the total thickness with a small measuring error margin but in a long cycle with a duration of approximately 10 to 30 minutes. A correction profile for the first sensor (17) can be calculated by comparing the two thickness profiles.
    Type: Application
    Filed: October 2, 2006
    Publication date: December 10, 2009
    Inventors: Albert Keller, Markus Haenggli, Philipp Weber, Peter Stuker
  • Patent number: 7617061
    Abstract: Disclosed is a method and apparatus for processing signals in a satellite/laser positioning system capable of generating location coordinates from received satellite signals and a received laser signal. A height coordinate bias value is maintained by a filter processor during periods when the laser signal is available. The height coordinate bias value represents an estimated difference between a satellite signal derived height coordinate and a laser signal derived height coordinate. During periods when the laser signal is available, the laser signal derived height coordinate is output. During periods when the laser signal is not available, a corrected height coordinate value is generated by applying the height coordinate bias value to the satellite signal derived height coordinate.
    Type: Grant
    Filed: June 20, 2007
    Date of Patent: November 10, 2009
    Assignee: Topcon Positioning Systems, Inc.
    Inventor: Vernon Joseph Brabec
  • Patent number: 7610128
    Abstract: Aspects of the present invention are directed at securely calculating and storing odometer data associated with a vehicle. In accordance with one embodiment, a method is provided that checks the integrity of odometer data being received from a vehicle's engine. More specifically, the method includes receiving a first and second engine odometer values for an engine. Then, these odometer values are compared to determine whether data indicative of tampering was received. In this regard, if data indicative of tampering was received, aspects of the present invention adjust the official vehicle odometer value to account for the tampering.
    Type: Grant
    Filed: May 23, 2007
    Date of Patent: October 27, 2009
    Assignee: PACCAR Inc
    Inventors: Ian David O'Connor, Martin Jay Caspe-Detzer, Ted Joseph Scherzinger, William Michael Creel, Wayne Michael Winch
  • Publication number: 20090263918
    Abstract: Methods and apparatuses are provided for calibrating eddy current sensors. A calibration curve is formed relating thickness of a conductive layer in a magnetic field to a value measured by the eddy current sensors or a value derived from such measurement, such as argument of impedance. The calibration curve may be an analytic function having infinite number terms, such as trigonometric, hyperbolic, and logarithmic, or a continuous plurality of functions, such as lines. Such curves can reduce the number of wafers used in the calibration of the sensors while providing higher accuracy over a larger thickness range. High accuracy allows the omission of optical sensors, and use of eddy current sensors for endpoint detection, transition call detection, and closed loop control in which a process parameter is changed based on the measured magnetic flux density change in one or more processing zones.
    Type: Application
    Filed: April 17, 2008
    Publication date: October 22, 2009
    Applicant: Novellus Systems, Inc.
    Inventors: Sudeep Kumar Lahiri, Paul Franzen
  • Publication number: 20090222229
    Abstract: A calibration device for calibrating a range image sensor, detecting a distance of each direction within a detection range and generating a range image data, in a state where the range image sensor is attached at a mobile body, the calibration device includes a data receiving portion for receiving a calibration-subject data including a calibration target, which is set within the detection range and includes a first plane surface and a second plane surface, from the range image sensor, a plane surface specifying portion for specifying each of the first and second plane surfaces in a three-dimensional reference coordinate system, a normal vector calculating portion for three-dimensionally calculating a normal vector of each of the first and second plane surfaces, and a rotation calculating portion for three-dimensionally calculating a rotation of the range image sensor on the basis of an already-recognized posture information and the normal vector.
    Type: Application
    Filed: February 19, 2009
    Publication date: September 3, 2009
    Applicant: AISIN SEIKI KABUSHIKI KAISHA
    Inventor: Toshiaki KAKINAMI
  • Publication number: 20090198468
    Abstract: A system and method of calibrating optical line shortening measurements, and lithography mask for same. The lithography mask comprises a plurality of gratings, with a calibration marker disposed within each grating. The mask is used to pattern resist on a semiconductor wafer for purposes of measuring and calibrating line shortening. The pattern on the wafer is measured and compared to measurements made of the pattern on the mask. The difference gives the amount of line shortening due to flare, and may be used to calibrate line shortening measurements made using optical measurement tools.
    Type: Application
    Filed: April 15, 2009
    Publication date: August 6, 2009
    Inventor: David Ziger
  • Publication number: 20090198467
    Abstract: The invention provides a technique of correcting time data based on a clock signal affected by jitter. The error due to jitter in a time measurement of an event in the clock signal (17) is determined at the time of the event or as an average over a number of events. A measurement is made of a time dependent reference variable associated with a long-time constant device (19), such as a capacitor, which is relatively immune to localised jitter. The measurement may be a reading of the voltage across a charging capacitor. The measured value is compared to an expected value and the time error is based on the result. The expected value may be known from look-up tables (18) in the memory (6) of the device (1) comprising the capacitor (19) or calculated from known charging rates of the capacitor. The error due to jitter of a time measurement is approximately linearly proportional to the difference in voltage between the measured and the expected values of the capacitor.
    Type: Application
    Filed: June 2, 2005
    Publication date: August 6, 2009
    Applicant: KONINKLIJKE PHILIPS ELECTRONICS, N.V.
    Inventor: Adam S. Leitch
  • Publication number: 20090171582
    Abstract: A vehicle navigation system may include an antenna, e.g. a GPS antenna, an output for providing guide advice to the vehicle driver and including a display, a memory encompassing a navigation database with electronic maps stored within, and an electronic controller. The system is capable of detecting the global position of the vehicle on the basis of the electromagnetic waves received by the antenna, associating the global position to the exact road position of the vehicle by comparison with the electronic maps and providing pictorial guide advice to the vehicle driver according to the road position via the display. The system may include a digital camera installed on the vehicle and able to record digital pictures of the outside and to provide the digital pictures to the electronic controller. The pictures are displayed via the display, and pictorial guide advice, e.g. directional arrows, are overprinted to the displayed pictures.
    Type: Application
    Filed: December 23, 2008
    Publication date: July 2, 2009
    Applicants: STMicroelectronics Design and Application GmbH, STMicroelectronics GmbH
    Inventors: Josef Stockinger, Michael Blohm
  • Patent number: 7552021
    Abstract: It is provided a system for improving locomotion of a human user, by changing an inclination or height of a stance surface of a device for donning on a leg during walking. The system includes a device, a sensor and a microprocessor. The device includes a platform which securely receives the shoe or foot of the user, a sole and mechanisms between the platform and the sole. Each mechanism has a motor and a thrusting element which changes the height of the platform relative to the sole. The sensor is associated with the lower limb, it senses the locomotion of the user and issues a corresponding data signal to the microprocessor. The microprocessor processes the locomotion information, determines the locomotion phase, and controls the mechanisms to effect changing of the inclination and/or the height of the stance surface during a swing phase. Also, the microprocessor introduces random changes thereof.
    Type: Grant
    Filed: September 26, 2007
    Date of Patent: June 23, 2009
    Assignee: Step of Mind Ltd.
    Inventors: Simona Bar-Haim, Mark Belokopytov
  • Publication number: 20090157343
    Abstract: A method for correcting systematic errors in an optical measurement tool in which a first diffraction spectrum is measured from a standard substrate including a layer having a known refractive index and a known extinction coefficient by exposing the standard substrate to a spectrum of electromagnetic energy. A tool-perfect diffraction spectrum is calculated for the standard substrate. A hardware systematic error is calculated by comparing the measured diffraction spectrum to the calculated tool-perfect diffraction spectrum. A second diffraction spectrum from a workpiece is measured by exposing the workpiece to the spectrum of electromagnetic energy, and the measured second diffraction spectrum is corrected based on the calculated hardware systematic error to obtain a corrected diffraction spectrum.
    Type: Application
    Filed: December 14, 2007
    Publication date: June 18, 2009
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Sanjeev Kaushal, Sairam Sankaranarayanan, Kenji Sugishima
  • Publication number: 20090150109
    Abstract: A method, apparatus, and computer usable program product for calibrating rivet height gages. In one embodiment, the process calculates a size of sphere required to create a sphere-based ring gage to simulate a contact point between a rivet height gage and a sharp edge of a specified sharp-edged ring gage. The process identifies an expected protrusion height from a top of the rivet height gage to a reference surface formed by tops of a set of spheres of the size of sphere required to simulate the contact point.
    Type: Application
    Filed: December 6, 2007
    Publication date: June 11, 2009
    Inventors: Curtis M. Ashford, Robert A. Bost, William J. Klunk
  • Publication number: 20090138234
    Abstract: This disclosure provides for an impression scanner system having improved calibration having a housing and a calibration plate of known geometry. The calibration plate has a plurality of different shapes thereon. The system also has a radiation source for emitting radiation towards the shapes on the plate and a surface for reflecting images created by the radiation on the shapes. A sensor for receiving the images of the shapes as the plate moves relative to the housing is also provided.
    Type: Application
    Filed: November 7, 2008
    Publication date: May 28, 2009
    Inventors: Arjen Sundman, Jeffery L. Davis
  • Publication number: 20090093982
    Abstract: The invention relates to an external optical modulator comprising a Mach-Zehnder having a signal electrode including at least four sections of unequal length to one another positioned over an alternating domain structure in an electrooptic substrate, and including a center section, or center pair of sections disposed asymmetrically between pairs surrounding sections. The surrounding pairs, comprise the two sections adjacent the center section or pair of sections, and each two sections adjacent the previous pair of sections, moving outwardly from the center to the final outermost pair, L1 and LN at the RF input 2 and RF output 4. In each pair, the section lengths are equal, or the section closer to the RF output 4 has a longer length than the section closer to the RF input 2. The surrounding pairs have lengths that decrease from the innermost pair to the outermost pair. For a zero chirp structure, the section lengths are selected to maintain an equivalent length for the inverted and uninverted domain sections.
    Type: Application
    Filed: September 30, 2008
    Publication date: April 9, 2009
    Applicant: JDS Uniphase Corporation
    Inventors: Karl Kissa, Gregory J. McBrien
  • Publication number: 20090076758
    Abstract: A system and method of imaging an object. An array of detectors is mounted in an image plane. Each detector in the array of detectors is connected to a timing circuit having an interpolator, wherein the interpolator includes a first circuit which charges a first capacitor at a different rate than it discharges. An optical pulse is transmitted toward an object so that a portion of the optical pulse is reflected from the object as a reflected pulse and a first value representative of when the optical pulse was transmitted toward the object is recorded. The reflected pulse is detected at one or more detectors and a pulse characteristic of the pulse and a second value representative of when the reflected pulse arrived at the detector are recorded. Range to the object is then calculated as a function of the first and second values and the reflected pulse characteristic.
    Type: Application
    Filed: November 17, 2008
    Publication date: March 19, 2009
    Inventor: Jerry Dimsdale
  • Publication number: 20090076757
    Abstract: A measuring device is provided with a laser source, a beam redirection member, a beam receptor, and a system controller. The measuring device is calibrated by providing a set-up piece having at least one known dimension and positioning the beam redirection member in beam transmitting relationship to the known dimension of the set-up piece. A beam is transmitted from the laser source to the set-up piece via the beam redirection member, which beam is reflected back to the beam receptor via the beam redirection member. The return beam is converted into data, which is transmitted to the system controller. The data is used to calculate a measured dimension, and a compensation factor based on the measured dimension and the known dimension of the set-up piece is then calculated.
    Type: Application
    Filed: October 7, 2008
    Publication date: March 19, 2009
    Inventor: Noel S. Parlour
  • Patent number: 7505853
    Abstract: Since ultrasonic velocities in anisotropic media can change by a factor of 3 or more depending on the direction of propagation, accounting for these changes is extremely important. Also many anisotropic materials are made up of multiple layers of varying orientation, hence the need to account for refraction at ply boundaries. In the present invention, an algorithm is used to calculate these velocities and travel times and properly account for refraction phenomena. Specifically a multilayer SAFT algorithm has been developed that will calculate the time shift, shift and sum A-scan waveforms in layered anisotropic media at any given depth, ply orientation, and number of plies. The algorithm showed an improvement in signal to noise ratio with synthetic data as was expected. This algorithm can be used as a replacement for homogenizing material properties in layered media and will calculate time shifts with increased accuracy since exact material properties are used.
    Type: Grant
    Filed: July 27, 2006
    Date of Patent: March 17, 2009
    Assignee: San Diego State University Research Foundation
    Inventors: Cody Royce Engstrand, Ronald Alan Kline