Abstract: The present invention provides a method and apparatus for dynamic adjustment of sensor and/or metrology sensitivities. The method includes accessing measurement information provided by a first measurement device and modifying a sensitivity of a second measurement device based on the measurement information provided by the first measurement device.

Abstract: A method of calibrating once-around and harmonic errors of encoded nips is provided. An encoder with an index pulse is used to measure the velocity and rotation of the driven wheel or idler. The geometry of the drive train and wheel and idler is chosen so that their once around and harmonic frequencies are unique such that no other drive errors will generate these frequencies. The method includes running the idler or wheel at substantially constant velocity for N revolutions. Each index triggers the collection of velocity data, which is averaged for N revolutions. This process detects drive train motion errors that are periodic with respect to the timing of the index pulse (i.e., once per revolution of the wheel or idler). Once the velocity errors have been measured, corrections are made. This method may be incorporated in xerographic machines as part of a setup or calibration procedure.

Abstract: A method of increasing control precision of a path of a product in a leveling machine including: a fixed support cage; two leveling assemblies with parallel rollers, which are placed above and below the strip respectively; devices necessary to adjust the interlocking of the rollers; a mechanism for measuring leveling forces at least of two sides of the machine; and a theoretical pre-setting model. The method directly measures at least one value for the spacing of the leveling rollers, which is compared to reference values, and uses the members for adjusting the position of the leveling rollers to maintain the measured values equal to the reference values. The method is particularly suitable for machines used to level flat metal products.

Abstract: The present invention relates to a method and its system for calibrating measured data between different measuring tools. A method of calibrating measured data between different measuring tools includes the steps of: measuring the CD average dimension and roughness of an object to be measured using a CD-SEM tool; calculating the number of the cross section measurement points required for calibration by statistically processing the roughness; measuring the cross section of the object to be measured using the cross section measuring tool to satisfy the number of the cross section measurement points, thereby calculating the CD average dimension of the cross section measurement height specified in the obtained cross section measurement result; and calculating a calibration correction value being a difference between the CD average dimension of the object and the CD average dimension of the cross section measurement height of the object.

Abstract: A system and method of hierarchical monitoring for subordinate assessment is described. Generally, the system receives remotely sensed data about a user's physiology and contextual state, and extracts features that are related to the workload currently being experienced by a single subordinate and/or group of subordinates. The system builds workload indices based on levels of these features. The system uses statistical process control techniques in conjunction with the workload indices to identify suboptimal user states. Information regarding a particular subordinate or the group of subordinates may be presented in a variety of different ways. As a result, a superior can easily determine the condition of the one or more subordinates and make task adjustments to influence workload levels.

Abstract: A method for inspecting a feature of a part is provided. The method includes obtaining a profile corresponding to the feature using a sensor and projecting the profile onto a compensation plane normal to the feature for generating an updated profile. The method also includes using the updated profile for reducing a measurement error caused by an orientation of the sensor. An inspection system is also provided. The inspection system includes a sensor configured to capture a fringe image of a feature on a part. The inspection system further includes a processor configured to process the fringe image to obtain an initial profile of the feature and to project the initial profile onto a compensation plane normal to the feature.

Abstract: A system for analyzing lengths of branches of signal paths is disclosed. The system includes: a signal path naming module for naming all signal paths of a PCB; a signal path group selecting module for selecting a group of signal paths to be analyzed from the database; a signal path selecting module for selecting signal paths to be analyzed from the group of signal paths; a branch searching module for analyzing the selected signal paths, to search passive circuit components and external circuits connected to the selected signal paths for corresponding branches of the selected signal paths; a branch length calculating module for calculating a length of each branch; and a branch length comparing module for comparing each calculated branch length with a corresponding predefined maximal branch length to determine whether the calculated branch length is more than the predefined maximal branch length. A related method is also disclosed.

Abstract: A method for determining a distance between a first piece and a second piece includes measuring, at the first or second piece, a first signal at a first frequency, and measuring, at the first or second piece, a second signal at a second frequency. The second frequency is different from the first frequency. The distance is determined based on the measured first and second signals.

Abstract: A memory (43) of a control unit (4) stores correction data (81) indicating a relationship between a decrement in a measurement value of a film thickness by removal of organic contamination adsorbed onto a substrate and an amount of adsorbed organic contamination corresponding to a difference between a true film thickness and the measurement. The difference is caused by organic contamination adsorbed onto the substrate before removal of organic contamination. In a film-thickness measuring apparatus (1), a calculating/measuring part 41 obtains a first measurement value of a film thickness on a substrate (9) using an ellipsometer (23), and further obtains a second measurement value which is affected by remaining organic contamination after organic contamination adsorbed onto the substrate (9) is removed by an organic contamination remover (3).

Abstract: The invention can provide a method of processing a wafer using a Real-Time Parameter Tuning (RTPT) procedure to receive an input message that can include a pass-through message, a real-time feedforward message, or a real-time optimization message, or any combination thereof. The RTPT procedures can use real-time wafer thickness data to create, modify, and/or use measurement recipe data, measurement profile data, and/or measurement model data. In addition, RTPT procedures can use real-time wafer thickness data to create, modify, and/or use process recipe data, process profile data, and/or process model data.

Abstract: A laser interferometric apparatus for measuring a displacement of an object is disclosed, the apparatus comprising a laser source for producing a laser beam having a given intensity, a beam splitter for dividing the laser beam into a reference beam and an object beam to be directed to the object, thereby producing a scattered object beam being modulated according to the displacement of the object, interference means adapted to provide at least two electrical interference signals from the scattered object beam and the reference beam, the at least two electrical interference signals each comprising a wanted signal component indicative of the object displacement and an intensity noise component, and processing means for subtracting the at least two electrical interference signals, thereby generating an output signal, the output signal comprising substantially the wanted signal component alone, wherein the intensity noise is substantially rejected.

Abstract: An incremental encoding and decoding apparatus and method are provided. The incremental encoding and decoding apparatus comprises current converters, which respectively receive the pair of analog signals and convert the received analog signals into current signals each having a predetermined magnitude and phase; and frequency multipliers, which respectively convert the current signals into voltage signals each having an increased frequency compared to the frequencies of the current signals.

Abstract: Surface roughness measurements are made by illuminating a surface with coherent light to generate a speckle pattern and studying characteristics of the speckle pattern. The disclosed techniques may be applied to measuring the surface roughness of skin or other biological surfaces. Skin roughness information may be used in the diagnosis of conditions such as malignant melanoma. Methods and apparatus for measuring the coherence length of optical sources involve extracting information about speckle patterns resulting when light from the optical sources interacts with a surface having a known roughness.

Abstract: A method of determining sizes of micro and nano objects in a scanning electron microscope, comprising the steps of obtaining an experimental video signal of an object in a scanning electron microscope, determining a size of an object from the obtained experimental video signal, calculating a model video signal based on the size of an object obtained from the experimental video signal and other values of the object in the scanning electron microscope, determining a size of the object from the model video signal, determining a correction based on a difference between the size of the object obtained from the experimental video signal and the size of the object obtained from the model video signal, and using the correction to determine a corrective size of the object from the size of the object determined from the experimental video signal and the thusly determined correction.

Abstract: A re-calibration method and device for a three-dimensional visual sensor of a robot system, whereby the work load required for re-calibration is mitigated. While the visual sensor is normal, the visual sensor and a measurement target are arranged in one or more relative positional relations by a robot, and the target is measured to acquire position/orientation information of a dot pattern etc. by using calibration parameters then held. During re-calibration, each relative positional relation is approximately reproduced, and the target is again measured to acquire feature amount information or position/orientation of the dot pattern etc. on the image. Based on the feature amount data and the position information, the parameters relating to calibration of the visual sensor are updated. At least one of the visual sensor and the target, which are brought into the relative positional relation, is mounted on the robot arm.

Abstract: Calibration wafers and methods for calibrating a plasma process performed in a plasma processing apparatus, such as an ionized physical vapor deposition apparatus. The calibration wafer includes one or more selective-redeposition structures for calibrating a plasma process. The selective-redeposition structures receive a controllable and/or measurable amount of redeposited material during the plasma process.

Abstract: According to the invention, a climate-related, or to be precise, a temperature-related correction of the altitude reading is carried out on an altimeter. In doing this, the measurement of altitude is based on an average reference temperature value at sea level and on an average air pressure reference value at sea level according to the U.S. Standard Atmosphere 1976. The correction ensues by altering the reference temperature at sea level. A correction is then carried out when the temperature prevailing at a certain altitude above sea level differs from the temperature reference value for this altitude. This temperature reference value results at sea level based on the average temperature reference value.

Abstract: Methods and apparatus for automatically determining a feedback setpoint for use in operating an atomic force microscope (AFM) are provided. The setpoint may be determined by modulating a feedback setpoint while monitoring for a change in a detector signal. In an effort to avoid tip damage and remain in non-contact, attractive mode during use, a setpoint just above a setpoint corresponding to a detected change in a parameter of the detector signal, such as an abrupt change in phase, may be used to operate the AFM.

Abstract: A method and apparatus for controlling when a calibration cycle is started for a metrology tool. The method and apparatus exploits a correlation between a drift of a first parameter (e.g., film thickness measurement drift) and a drift of a second parameter (e.g., CD measurement drift). One embodiment of the method comprises measuring a film thickness on one or more reference substrates to determine when a drift component of these measurements exceeds a pre-determined range and thereafter calibrating the metrology tool when the drift component of the film thickness measurements exceeds the pre-determined range. Generally, the drift of the film thickness measurement will occur prior to substantial drift of the CD measurement occurring.

Abstract: A surface analysis apparatus and a method for compensating for mechanical vibrations and drifts in a surface analysis instrument are disclosed. A probe that is sensitive to the distance between the probe and a sample surface provides a probe signal. The probe signal contains information about the surface properties and noise due to changes in the probe-surface distance. A sensor measures a displacement between a probe and the sample surface. The sensor is substantially insensitive to the surface properties measured by the probe. The displacement measurement can be used to compensate for the noise in the probe signal.

Abstract: A system and a process are disclosed, that are automated and integrated with numerically controlled systems, for measuring, compensating and testing numerically controlled machine tool heads (1) and/or tables. The system comprises: at least one support base (11) equipped with a plurality of distance sensors (14); at least one device (16) of the gage tool type composed of an elongated cylinder (17) that is equipped at one of its ends with connection means (18) for the heads (1) and is equipped at another opposite end with a ball (20), wherein the ball (20) is placed next to the sensors (14) so that they are able, always and in any position, to measure the distance that separates them from the ball (20) and determine thereby the position in the Cartesian space.

Abstract: A mask design is generated for patterning a test wafer using a lithographic or etch process, the process is characterized based on the patterned test wafer, and a pattern-dependent model is used based on the characterization to predict characteristics of integrated circuits that are to be fabricated by the lithographic or etch process.

Abstract: A method for calibrating an impulse radio distance measuring system comprising an impulse radio transceiver by conducting a pulse through a transmit receive switch to an antenna, receiving return energy which has been discharged across the transmit receive switch, determining a time of arrival of the return energy. The return energy is comprised of two distinct pulses, one of which represents discharge of the transmit switch as the original pulse travels to the antenna, the second represents energy reflected from the antenna and again discharged across the transmit receive switch while the switch is in the transmit position. The timing of the un-reflected energy is determined then the timing of the reflected energy relative to the un-reflected energy is determined through auto-correlation of the time domain scan of the received composite waveforms.

Abstract: A data collection and management system is provided for monitoring the condition of fuel tanks and for determining for each tank a degradation profile which provides an estimate of useful tank life and a prediction of when the tank is likely to need replacement before failure. The system is especially useful for monitoring residential fuel tanks and is also applicable for commercial and other tanks which are in a location where a tank failure would be harmful and potentially hazardous. A primary benefit of the system is to allow fuel dealers to identify tanks that should be replaced before they actually fail. The system provides the dealer with information which is useful in monitoring and servicing the fuel tanks of the dealers' customers.

Abstract: A method for correcting errors in a coordinate measuring machine having a measuring head which is adapted to move in at least two different spatial directions. Measuring scales and measuring lines are assigned to each spatial direction. The measuring lines of different spatial directions intersect, and correction values are determined along the measuring lines at predetermined values of the scales in order to correct for elastic and/or geometric errors of the scales and/or of the guiding mechanism for moving the measuring head. According to one aspect of the invention, the correction values determined along a measuring line of a first spatial direction are modified such that the modified correction value of this measuring line assumes a predetermined value at the point of intersection with a first measuring line of a second spatial direction.

Abstract: Provided is a near-field microscope using a dielectric resonator, which makes it possible to minimize influences by external environments, and to enhance its sensitivity, resolution and function by adjusting the distance between a sample and an apex of a probe. The near-field microscope includes a wave source, a dielectric resonator, a probe, a distance adjusting unit, and a detector. The wave source generates a wave, and a frequency of the wave is adjustable by the wave source. The dielectric resonator propagates the wave from the wave source, and a resonance frequency, impedance, a Q factor and an electromagnetic wave mode of the wave is freely adjustable. The probe scans the wave output from the dielectric resonator on a sample. The distance adjusting unit measures a distance between the probe and the sample and maintains the distance to a predetermined value.

Abstract: An acoustic flowmeter calibration method and sampling system address a variation in acoustic transducer delay time with increasing temperature. In one aspect, calibration of the path length between the sending and receiving transducers and calibration of the transducer delay time over a wide temperature range are optimized. In another aspect, the flowmeter output is temperature compensated based on the exhaust flowmeter gas temperature. These two aspects may be embodied in an ultrasonic flowmeter for exhaust gas measurement individually or in combination in accordance with the invention.

Abstract: A device for detecting and compensating field distortion in underground line locators by means of mapping the field-strength of the field generated by electrical currents within the buried line. Signals from the underground structure can be mapped with respect to the position of the device. From the map, distortions from the expected signals can be determined, indicating interference from other structures or errors in detected location of the structure.

Abstract: A method of calibrating a gauge in particular for the measurement of film thickness, uses a calibration variable to compensate for short term changes in probe tip condition, instead of a constant value. A calibration constant is based only on the dielectric constant for a coating such as lacquer, and is independent of the probe tip variable.

Abstract: A computer program for correlating coatings' material usage and cost impact with coatings ranges evaluated against an industry Cpk standard. Optimum range values are selected from the process and/or coatings applicators' manufacturer guidelines.

Abstract: Improved endpoint detection and/or thickness measurements may be obtained by correcting sensor data using calibration parameters and/or drift compensation parameters. Calibration parameters may include an offset and a slope, or other parameters. Drift compensation parameters may include off-wafer measurements.

Abstract: The location of a termination in a properly terminated LAN can be remotely detected. The cable's skin effect produces a detectable signature at the sending-end when a step function, for example, reaches the termination. Accordingly, a network analysis device is connected to the network to inject the step function onto the network cabling. The voltage response of the cabling to this is first digitally sampled and then analyzed in a system controller. The system controller reviews the sampled data for an inflection point and then locates the termination by reference to the delay between when the signal was placed on the cable and the detection of the inflection point.

Abstract: A method and apparatus for communicating estimated vehicular speed and length using data obtained from a single wire-loop. The detector card connected to a single wire-loop produces a first bivalent output based on the actual measurement of a vehicle at the wire-loop sensor and synthesizes a second bivalent output to mimic the output of a two wire-loop speed trap. By simulating a second bivalent output at the detector card level, a conventional field controller is capable of estimating the vehicular speed from a single wire-loop sensor.

Abstract: A method of displaying a measurement result in an inspection process using network, the method includes a first step that a host, which intensively controls and manages a device for inspecting a lot to be processed in one or a plurality of steps, transmits to the device a condition of measuring a lot determined to be put in, a second step that the device measures the lot based on the measurement condition received via the network and then obtains measured data, a third step that the host determines whether the measured data received via the network is abnormal or normal based on a predetermined assessment standard and then produces a result of assessing a measured value so as to transmit the result to the device and a fourth step that the device provides a display corresponding to the result of assessing the measured value in accordance with the received result of assessing the measured value as well as a previously registered display standard.

Abstract: A low cost, fully automatic, thickness detection system, readily integrated into an existing paper path sheet transport, in which a regular and known small displacement signal is generated, compared, combined and/or superimposed on the signals from the small displacement of a sheet transport element with differences in sheet thickness. Even sub-millimeter sheet thicknesses can be measured of sheets moving through a regular sheet feeding nip with nip idler roller displacement using a low-cost sensor, where that sensor is additionally repetitively actuated by known small movements to provide calibration signals, such as those provided by plural small radius differences of a rotating idler roller shaft area which will enable existing idler and idler shaft run-out movement error noise signals to be overcome.

Abstract: The present invention predicts Critical Dimension (CD) before processing a wafer lot and alters the etch by adjusting recipe inputs to control the current lots bias to target critical dimensions. Also, the process incorporates the use of etch chamber selection by an automated system, disallowing processing of a lot if critical dimensions are predicted to be out of control. Line caper, the angle of sidewall on the metal line, and oxide loss, the amount of oxide removed by the over etch portion of the process, are also used to monitor current tool performance and make adjustments to recipe inputs.

Abstract: A device for position indication and the detection of guidance errors that includes a scale that has a position measuring graduation arranged in a position measurement direction. A first guidance error measuring graduation which is arranged perpendicularly with respect to the position measurement graduation and a second guidance error measuring graduation which is arranged perpendicularly with respect to the position measurement graduation, wherein the first guidance error measuring graduation and the second guidance error measuring graduation are arranged on both sides of and adjacent to the position measuring graduation. A position indication scanning unit movable with respect to the scale, wherein the position indication scanning unit scans the position measuring graduation for generating position measurement signals.

Abstract: A method and an apparatus for sorting between actual and perceived errors related to processing of semiconductor wafers. A plurality of semiconductor wafers are processed. Fault data relating to the processed semiconductor wafers is acquired. A trend associated with the fault data is determined. A determination is made whether the fault data relates to an actual fault associated with the semiconductor wafers or to a calibration error, based upon the trend. A component is notified of the calibration error in response to the determination that the fault data relates to the calibration error.

Abstract: A system and method for performing a curve fit on a plurality of data points. In an initial phase, a subset Pmax of the plurality of points which represents an optimal curve is determined. This phase is based on a statistical model which dictates that after trying at most Nmin random curves, each connecting a randomly selected two or more points from the input set, one of the curves will pass within a specified radius of the subset Pmax of the input points. The subset Pmax may then be used in the second phase of the method, where a refined curve fit is made by iteratively culling outliers from the subset Pmax with respect to a succession of optimal curves fit to the modified subset Pmax at each iteration. The refined curve fit generates a refined curve, which may be output along with a final culled subset Kfinal of Pmax.

Abstract: The invention relates to a device for measuring distances having a distance measurer (1) and a stop element (3; 3?; 3?) enabling precise and mechanically stabile fixed installation on any form of top surfaces. Interchangeable stop elements (3; 3?; 3?) are disposed on a distance measurer (1), and embodied on the side thereof which is orientated towards the object to be measured in such a way that exact installation can take place on the surface of the object. Another use of the stop element is that it can inc;lude a receiving element for securing a distance measurer (1), whereby the distance measurer is pivotally mounted about at least one horizontal rotational axis (12) whilst the distance measurer (1) is in use. The stop element (3?) is formed in such a way that it is possible to adjust the device and subsequently measure different measuring points (C,D) without having to take geometric changes into account as a result of said adjustment.

Abstract: A method for calibrating a linewidth measurement tool and a system for calibrating the linewidth measurement tool each employ a correction of a series of periodic actual measurements of at least one single measurement location of a topographic feature within a linewidth standard with an exponentially weighted moving average of a series of deviations of the series of periodic actual measurements from a corresponding series of regressed data points derived from mathematical regression of the series of periodic actual measurements. Such a correction provides for a more accurate calibration of the linewidth measurement tool and a more accurate measurement of linewidths within microelectronic products while employing the calibrated linewidth measurement tool.

Abstract: In a method and a device for carrying frequency synthesis, in particular in a distance measuring device based on the principle of evaluating the change over time in the phase of an electromagnetic radiation emitted by a radiation source and remitted by an object aimed at, a frequency, which is preferably furnished by a quartz oscillator, is regulated in a ring oscillator with N delay elements (V1, V2, V3, . . . , VN) to a desired first high frequency (F), which is used as a mixer frequency or as a modulation frequency. The signals at the N delay elements (V1, V2, V3, . . . , VN) are delivered to a multiplexer, which is switched over with a cadence that is equivalent to 2*N times the frequency of the low-frequency measurement signal to be evaluated to produce a modulation frequency or mixer frequency.

Abstract: A mileage tracking system including an input device mounted in the vehicle for receiving one of a first and second door unlock signals, and a tripmeter. The tripmeter is coupled to the input device and to a vehicle odometer sensor for accumulating a first accumulated travel distance during vehicle travel following receipt by the input device of the first door unlock signal, and for accumulating a second accumulated travel distance during vehicle travel following receipt by the input device of the second door unlock signal. The tripmeter does not accumulate the first accumulated travel distance during vehicle travel following receipt by the input device of the second door unlock signal. The mileage tracking system also preferably includes a display coupled to the tripmeter for selectively displaying the first and second accumulated travel distance. The input device is preferably a receiver for receiving a signal from a remote transmitter.

Abstract: A method and apparatus for calibrating a metrology tool are disclosed. The method includes measuring a parameter of a contrast enhanced feature on an artifact using a metrology tool, where the contrast enhanced feature reduces random errors in the metrology tool during the measuring process. The measured parameter is compared with an initial parameter associated with the artifact and the metrology tool is adjusted until the measured parameter matches the initial parameter.

Abstract: A method for verifying the accuracy of a CNC machine or a CMM. The methodology segregates the measured error into an assignable cause portion and a common cause (or random error) portion. The methodology may be employed to affect the calibration of the machine tool to factor out the mean value of the assignable cause portion. Inherent in this methodology is the ability to diagnose mechanical problems with the CNC machine or CMM that affects the repeatability and accuracy of such machine tools; identify degradation in the performance of such machine tools that is indicative of mechanical failure; and improve the accuracy and repeatability of such machine tools in certain situations.

Abstract: A vertical calibration method for a wire cut electric discharge machine includes selecting a known altitude for a reference point, marking down four different positions of the upper wire guide of the wire cut electric discharge machine at three different altitudes and reptitively moving the wire of the wire cut electric discharge machine being in contact with the reference point, measuring four different displacements of the upper wire guide when being in contact with the reference point, establishing an equation by using a principle of trianglation, and completing calculation of positions of the upper wire guide and the lower wire guide to finish calibration.

Abstract: A system and method for outputting measurement data on an object to a graphic file thereof. The system comprises a data obtaining module (510) for gathering the measurement data and the graphic file of the object, a data processing module (520) for outputting the measurement data to the graphic file, and a graphic file management module (530) for storing the graphic file incorporating the measurement data. The data processing module further comprises an information gathering sub-module (521), a program invoking sub-module (522), a port capturing sub-module (523), an attribute changing sub-module (524), an attribute retrieving sub-module (525), an analyzing and calculating sub-module (526), and a dimension data outputting sub-module (527). A method for outputting measurement data on an object to a graphic file thereof is also disclosed.

Abstract: A method of synthesizing nondestructive examination data of a component including the steps of generating nondestructive examination data of the component in the field and separately generating nondestructive examination data of a specimen machined to simulate selected flaws in the component and combining portions of the specimen data with the field data in a combined data stream.

Abstract: A network of localizers determines relative locations in three-dimensional space to within 1 cm by cooperatively measuring propagation times of pseudorandom sequences of electromagnetic impulses. Ranging transmissions may include encoded digital information to increase accuracy. The propagation time is determined from a correlator circuit which provides an analog pseudo-autocorrelation function sampled at discrete time bins. The correlator has a number of integrators, each integrator providing a signal proportional to the time integral of the product of the expected pulse sequence delayed by one of the discrete time bins, and the non-delayed received antenna signal. With the impulses organized as doublets the sampled correlator output can vary considerably in shape depending on where the autocorrelation function peak falls in relation to the nearest bin. Using pattern recognition the time of arrival of the received signal can be determined to within a time much smaller than the separation between bins.

Abstract: A source table showing a standard relation between a detection object and a detection distance is stored in a memory (4). A CPU (3) receives inputs regarding distances to three measurement points from an input portion (5) and recognizes an amplitude voltage corresponding to the input, as a measured value at the measurement point. Furthermore, the CPU (3) extracts a range which corresponds to a difference between the farthest distance and the shortest distance, in which a ratio between voltages corresponding to measurement points closely resembles a ratio between the actually measured values, from the source table as a usage range, and creates a conversion table by correcting voltages in this extracted range.