Abstract: The present disclosure provides a structure. The structure comprises a cavity enclosed by a first substrate and a second substrate opposite to the first substrate. Further, the structure includes a feature in the cavity and the feature is protruded from a surface of the first substrate. In addition, the structure includes a dielectric layer over the feature, wherein the dielectric layer includes a first surface in contact with the feature and a second surface opposite to the first surface is positioned toward the cavity.

Abstract: Methods and systems for using a dual sided MEMS mirror for determining a direction of steered light are disclosed. In one example a MEMS package includes a substrate defining an aperture and a dual sided MEMS mirror is positioned over the aperture. A first surface of the MEMS mirror is used to steer a LiDAR beam that is used to perform LiDAR imaging of an area of interest. As the mirror is moved, a second surface of the mirror reflects a sensing beam onto a detector array. Data from the detector array is used to determine an orientation of the mirror which can then be used to determine a direction of the steered LiDAR beam. The MEMS package can form an enclosure for the MEMS mirror that includes a first and a second transparent window attached to two opposing surfaces of the substrate.

Abstract: A hand-held power tool device comprises an impact tool unit configured to generate a pulse on an insertion tool, and a sensor unit configured to detect at least one of at least one operating parameter, and at least one ambient parameter. The sensor unit includes at least one sensor element configured to detect a spatial position of the impact tool unit.

Abstract: According to one embodiment, a sensor includes a movable member, first, and second counter electrodes, first, and second resistances, and a control device. The movable member includes first and second electrodes and is capable of vibrating. The vibration of the movable member includes first and second components. The first component is along a first direction. The second component is along a second direction crossing the first direction. The first counter electrode opposes the first electrode. The second counter electrode opposes the second electrode. The first resistance includes first and first other end portions. The second resistance includes a second end portion and a second other end portion. The first other end portion is electrically connected to the first counter electrode. The second other end portion is electrically connected to the second counter electrode. The control device includes a controller configured to perform at least a first operation.

Abstract: A fixed frame (2) is fixed to an external member. An ultrasonic oscillator (3) is disposed inside the fixed frame (2) and includes a flexible first substrate and a first piezoelectric element deposited on the first substrate in the form of a thin film. The ultrasonic oscillator (3) is warped in response to expansion or contraction of the first piezoelectric element and generates ultrasonic waves. Actuator units (4) include a flexible second substrate coupling the first substrate to the fixed frame (2) and a second piezoelectric element deposited on the second substrate in the form of a thin film. The actuator units (4) are warped in response to expansion or contraction of the second piezoelectric element and cause the ultrasonic oscillator (3) to swing relative to the fixed frame (2). The fixed frame (2), the first substrate, and the second substrate are composed of the same substrate.

Abstract: A gimbal stabilizing system for an aircraft having an airframe is disclosed. The gimbal stabilizing system may comprise a gimbal apparatus having at least one gimbal actuator to adjust a position of the gimbal apparatus about an axis, wherein the gimbal apparatus is positioned on the airframe, an angular acceleration apparatus positioned on the airframe to generate an angular acceleration signal reflecting an angular acceleration of the airframe, and a gimbal controller operatively coupled to each of said angular acceleration apparatus and said gimbal apparatus. The gimbal controller may be configured to generate a gimbal control signal to compensate for the angular acceleration of the airframe based at least in part on a feedback control loop and a feedforward control loop, the feedforward control loop having the angular acceleration signal as an input thereto.

Abstract: A microelectromechanical inertial sensor to measure a rate of rotation and/or acceleration, the inertial sensor having a substrate, at least two deflectable masses coupled mechanically to the substrate, and at least one detector detecting movements of the masses along a first direction, the masses being mechanically coupled to one another by at least one first, second, and third coupling element, the coupling elements being configured so that when there is a deflection of the masses from the rest position a pivoting of a first main direction of extension of the first coupling element relative to a second main direction of extension of the second coupling element takes place and a pivoting of the second main direction of extension relative to the third main direction of extension of the third coupling element takes place, and the coupling elements being coupled mechanically to the substrate via at least one substrate connecting point.

Abstract: Microelectromechanical systems (MEMS) devices (such as gyroscopes) configured to reject quadrature motion are described. Quadrature motion arises for example when the drive motion of a gyroscope couples to the sense motion of a gyroscope even in the absence of an angular motion. In some circumstances, quadrature motion may result from the fact that the springs used in a gyroscope have slanted sidewall, which can impart torque in the mechanics of the gyroscope. MEMS gyroscope of the type described herein may be configured to reject quadrature motion by using only springs oriented substantially parallel to the drive direction. One such spring includes only beams parallel the drive directions, and optionally. These MEMS gyroscopes may be used to sense, among others, roll and pitch angular rates.

Abstract: Provided is an acceleration sensor having a large mass in a movable portion, and realizing high impact resistance. An acceleration sensor element 10a includes an upper substrate 20, a lower substrate 21 spaced apart from the upper substrate 20, and an intermediate substrate 19 provided between the upper substrate 20 and the lower substrate 21. Each of a first movable portion 16, a second movable portion 17, a frame portion 12, a fixed portion 13, and a spring portion 14 constituting the intermediate substrate 19 is configured with two layers of an upper layer and a lower layer, and a stopper portion 18 is provided at one end of the frame portion 12. A distance 31 between an end portion of the first movable portion 16 or the second movable portion 17 and an end portion of the stopper portion 18 in the upper layer and a distance 32 between an end portion of the first movable portion 16 or the second movable portion 17 and an end portion of the stopper portion 18 in the lower layer are different from each other.

Abstract: The present disclosure relates to a gyroscope that makes use of a shuttle having a first plurality of fingers, a stator having a second plurality of fingers, at least one fixed support structure, and a plurality of flexors for supporting the shuttle for vibratory motion relative to the stator. The fingers of the shuttle are able to move in a vibratory motion adjacent the fingers of the stator without contacting the fingers of the stator. Portions of the fingers of at least one of the shuttle and the stator also make use of a grounded metal material layer to reduce parasitic capacitive coupling between the fingers of the shuttle and the fingers of the stator.

Abstract: This disclosure reveals a resonator where at least one suspended inertial mass is driven into rotational oscillation by a piezoelectric drive transducer, or where the rotational motion of at least one suspended inertial mass is sensed by a piezoelectric sense transducer. The disclosure is based on the idea of attaching suspenders to the inertial mass with at least one flexure, which allows the end of the suspender which is attached to the inertial mass to rotate in relation to the inertial mass at this attachment point when the inertial mass is in motion. The resonator may be employed in a resonator system, a clock oscillator or a gyroscope.

Abstract: A MEMS device includes, in part, first and second conductive semiconductor substrates, an insulating material disposed between the semiconductor substrates, a cavity formed in the second semiconductor substrate, and at least first and second drive masses each of which includes a multitude of beams etched from the first semiconductor substrate and is adapted to move in the cavity in response to an applied force. At least a first portion of the first substrate is adapted to move in response to the applied force and causes the at least first and second drive mass to be in electrical communication with the first substrate. The device may further include, in part, a coupling spring disposed between and in electrical communication with the first and second drive masses. The coupling spring is adapted to provide electrical communication between a second portion of the first substrate and the first and second drive masses.

Abstract: A rotation rate sensor including a substrate having a principal plane of extension, and a structure movable with respect to the substrate; the structure being excitable from a neutral position into an oscillation having a movement component substantially parallel to a driving direction, which is substantially parallel to the principal plane of extension. To induce the oscillation, the rotation rate sensor includes a comb electrode moved along with the structure and a comb electrode fixed in position relative to the substrate. The excitation is produced by applying a voltage to the moving comb electrode and/or to the stationary comb electrode. Due to a rotation rate of the rotation rate sensor about an axis running substantially perpendicularly to the driving direction and substantially perpendicularly to the detection direction, a force applied to the structure with a force component along a detection direction substantially perpendicular to the driving direction is detectable.

Abstract: The accelerometric sensor has a suspended region, mobile with respect to a supporting structure, and a sensing assembly coupled to the suspended region and configured to detect a movement of the suspended region with respect to the supporting structure. The suspended region has a geometry variable between at least two configurations associated with respective centroids, different from each other. The suspended region is formed by a first region rotatably anchored to the supporting structure and by a second region coupled to the first region through elastic connection elements configured to allow a relative movement of the second region with respect to the first region. A driving assembly is coupled to the second region so as to control the relative movement of the latter with respect to the first region.

Abstract: A rotation rate sensor including a substrate having a main plane of extension, a first rotation rate sensor structure for detecting a first rotation rate about an axis that is in parallel to a first axis extending in parallel to the main plane of extension, and a second rotation rate sensor structure for detecting a second rotation rate about an axis that is parallel to a second axis extending perpendicularly with respect to the main plane of extension. Also included is drive device for deflecting a first structure of the first rotation rate sensor structure, and a second structure of the first rotation rate sensor structure, and also for deflecting a third structure of the second rotation rate sensor structure, and a fourth structure of the second rotation rate sensor structure, in such a way that the first, second, third, and fourth structures are excitable into a mechanically coupled oscillation.

Abstract: A gyroscope includes: a mass, which is movable with respect to a supporting body; a driving loop for keeping the mass in oscillation according to a driving axis; a reading device, which supplying an output signal indicating an angular speed of the body; and a compensation device, for attenuating spurious signal components in quadrature with respect to a velocity of oscillation of the mass. The reading device includes an amplifier, which supplies a transduction signal indicating a position of the mass according to a sensing axis. The compensation device forms a control loop with the amplifier, extracts from the transduction signal an error signal representing quadrature components in the transduction signal, and supplies to the amplifier a compensation signal such as to attenuate the error signal.

Abstract: An angular sensor, comprising a Coriolis vibratory gyroscope (CVG) resonator, capable of oscillating along a first pair of normal n=1 modes comprising a first normal mode and a second normal mode; and a second pair of normal n=2 modes comprising a third normal mode and a fourth normal mode; the sensor further comprising one drive electrode and one sense electrode aligned along an anti-nodal axis of each mode; and a pair of bias tune electrodes aligned with an anti-nodal axis of each mode if no drive and sense electrode pair is aligned with said anti-nodal axis.

Abstract: A voltage sensor includes a vibrator configured to be supported by a mechanical supporting portion and to be given a floating potential, a drive electrode configured to be disposed adjacent to the vibrator and to resonate the vibrator with applied AC voltage, a driver configured to apply an AC voltage that crosses 0 V to the drive electrode, a fixed electrode configured to be disposed adjacent to the vibrator with a gap formed between the fixed electrode and the vibrator, and a calculator configured to detect a magnitude of a measurement target voltage based on a change of a resonant frequency of the vibrator when the measurement target voltage is applied to the fixed electrode.

Abstract: An electronic circuit for amplifying signals with two components in phase quadrature, which includes: a feedback amplifier with a feedback capacitor; a switch that drives charging and discharging of the feedback capacitor; an additional capacitor; and a coupling circuit, which alternatively connects the additional capacitor in parallel to the feedback capacitor or else decouples the additional capacitor from the feedback capacitor. The switch opens at a first instant, where a first one of the two components assumes a first zero value; the coupling circuit decouples the additional capacitor from the feedback capacitor in a way synchronous with a second instant, where the first component assumes a second zero value.

Abstract: A method of making a MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism on a magnetic sensor wafer and a magnetic source on a MEMS wafer that further comprises a proof-mass.

Abstract: An angular velocity detection device vibrates a vibration body and detects vibrations generated by angular velocity. The vibration body includes a center base portion, first detection beam sections extending from the center base section in a T shape and connected to each other at four corners, second detection-cum-drive beam sections extending from the first detection beam sections toward the center base portion side along diagonal lines of the vibration body, and mass bodies connected to both ends of each of the second detection-cum-drive beam portions. The second detection-cum-drive beam sections each perform flexural vibration within a plate surface in a direction perpendicular or substantially perpendicular to the diagonal line of the vibration body.

Abstract: The invention relates to a MEMS gyroscope for detecting rotational motions about an x-, y-, and/or z-axis, in particular a 3-D sensor, containing a substrate, several, at least two, preferably four, drive masses (2) that are movable radially with respect to a center and drive elements (7) for the oscillating vibration of the drive masses (2) in order to generate Coriolis forces on the drive masses (2) in the event of rotation of the substrate about the x-, y-, and/or z-axis. The oscillating drive masses (2) are connected to at least one further non-oscillating sensor mass (3) that however can be rotated about the x-, y-, and/or z-axis together with the oscillating drive masses (2) on the substrate. Sensor elements (9, 10) are used to detect deflections of the sensor mass (3) and/or drive masses (2) in relation to the substrate due to the generated Coriolis forces. At least two, preferably four anchors (5) are used to rotatably fasten the sensor mass (3) to the substrate by means of springs (4).

Abstract: A microelectromechanical sensor device that comprises a seismic mass, and a spring structure that defines for the seismic mass a drive direction, and a sense direction that is perpendicular to the drive direction. A capacitive transducer structure includes a stator to be anchored to a static support structure, and a rotor mechanically connected to the seismic mass. The capacitive transducer structure is arranged into a slanted orientation where a non-zero angle is formed between the drive direction and a tangent of the stator surface. The slated capacitive transducer structure creates an electrostatic force to decrease quadrature error of the linear oscillation.

Abstract: An inertial angular sensor of MEMS type has a support of at least two masses which are mounted movably with respect to the support, at least one electrostatic actuator and at least one electrostatic detector. The masses are suspended in a frame itself connected by suspension means to the support. The actuator and the detector are designed to respectively produce and detect a vibration of the masses, and a method for balancing such a sensor provided with at least one load detector mounted between the frame and the support and with at least one electrostatic spring placed between the frame and one of the masses and slaved so as to ensure dynamic balancing of the sensor as a function of a measurement signal of the load sensor.

Abstract: A method for operating a rotation rate sensor is provided, the rotation rate sensor including a seismic mass, in a first operating step a drive signal and a test signal being provided, in a second operating step a modulation signal being generated by modulating the drive signal with the test signal, in a third operating step the seismic mass being driven to carry out a drive movement as a function of the modulation signal, a detection signal being detected as a function of a step a demodulation signal being provided, a sensor signal being generated by demodulating the detection signal with the demodulation signal, in the fourth operating step a demodulation phase of the demodulation signal being adapted in such a way that a rotation rate offset of the detection signal is compensated for.

Abstract: A physical quantity sensor includes a substrate, a fixation section and a wiring line provided to the substrate, a contact section adapted to electrically connect the fixation section and the wiring line to each other, and a movable electrode electrically connected to the wiring line via the fixation section. The contact section is disposed in the fixation section in a second area outside a first area obtained by imaginarily extending a fixed support area in a displacement direction of the movable electrode in a plan view. The fixed support area is sandwiched by edge portions of an area where the movable electrode and the fixation section are connected to each other.

Abstract: A self-test method by rotating the proof mass at a high frequency enables testing the functionality of both the drive and sense systems at the same time. In this method, the proof mass is rotated at a drive frequency. An input force which is substantially two times the drive frequency is applied to the actuation structures to rotate the proof mass of the gyroscope around the sensitive axis orthogonal to the drive axis. An output response of the gyroscope at the drive frequency is detected by a circuitry and a self-test response is obtained.

Abstract: A device is disclosed that is capable of determining its location using high-power with high accuracy, and using low-power with lower accuracy. By coordinating usage between the high power method and the low power, overall power consumption of the device can be significantly reduced without a significant reduction in accuracy. Such high accuracy may be achieved through the use of a GNSS unit, such a GPS receiver. In addition, the low-power alternative may be achieved using an accelerometer, together with software, hardware or firmware for extrapolating a speed based on the force measurements by the accelerometer. In this manner, the GPS receiver can be operated for only a fraction of overall use, primarily to provide adjustment data necessary to calibrate usage of the accelerometer.

Abstract: A microelectromechanical gyroscope structure that comprises a seismic mass, a body element, and a spring structure suspending the seismic mass to the body element. In primary oscillation at least part of the seismic mass oscillates in out-of-plane direction. A first conductor is arranged to move with the seismic mass, and a second conductor is attached to the body element. The conductors include adjacent surfaces that extend in the first direction and the third direction. A voltage element is arranged to create between the first surface and the second surface a potential difference and thereby induce an electrostatic force in the second direction and modulated by the primary oscillation of the seismic mass.

Abstract: A MEMS anti-phase vibratory gyroscope includes two measurement masses with a top cap and a bottom cap each coupled with a respective measurement mass. The measurement masses are oppositely coupled with each other in the vertical direction. Each measurement mass includes an outer frame, an inner frame located within the outer frame, and a mass located within the inner frame. The two measurement masses are coupled with each other through the outer frame. The inner frame is coupled with the outer frame by a plurality of first elastic beams. The mass is coupled with the inner frame by a plurality of second elastic beams. A comb coupling structure is provided along opposite sides of the outer frame and the inner frame. The two masses vibrate toward the opposite direction, and the comb coupling structure measures the angular velocity of rotation.

Abstract: A method of fabricating a gyroscope may involve depositing conductive material on a substrate, forming an anchor on the substrate, forming a drive frame on the anchor and forming pairs of drive beams on opposing sides of the anchor. The drive beams may be configured to constrain the drive frame to rotate substantially in the plane of the drive beams. The method may involve forming a proof mass around the drive frame and forming a plurality of sense beams that connect the drive frame to the proof mass. The sense beams may be tapered sense beams having a width that decreases with increasing distance from the anchor. The tapered sense beams may be configured to allow sense motions of the proof mass in a sense plane substantially perpendicular to the plane of the drive beams in response to an applied angular rotation. Some components may be formed from plated metal.

Abstract: A gyroscope includes a cylindrical shell having a first end and a second end, a base on the second end of the shell, a substrate, an anchor coupling the base to the substrate, and electrodes for driving and sensing mechanically separated from the cylindrical shell.

Abstract: An optical scanner includes: a movable body that is able to oscillate around a first axis; a first shaft member that is connected to the movable body along the first axis; and a drive unit that includes a permanent magnet, a coil that generates a magnetic field by application of voltage, and a voltage applying section that applies a voltage to the coil and oscillates the movable body around the first axis, wherein the movable body includes a light reflecting plate provided with a light reflecting section having light reflectivity, a support frame that surrounds the light reflecting plate and has a thickness that is, ten times or less, larger than the thickness of the light reflecting plate, and a plurality of connecting sections that connects the light reflecting plate and the support frame at a plurality of locations.

Abstract: A microelectromechanical systems (MEMS) die includes a substrate having a first substrate layer, a second substrate layer, and an insulator layer interposed between the first and second substrate layers. A structure is formed in the first substrate layer and includes a platform upon which a MEMS device resides. Fabrication methodology entails forming the MEMS device on a front side of the first substrate layer of the substrate, forming openings extending through the second substrate layer from a back side of the second substrate layer to the insulator layer, and forming a trench in the first substrate layer extending from the front side to the insulator layer. The trench is laterally offset from the openings. The trench surrounds the MEMS device to produce the structure in the first substrate layer on which the MEMS device resides. The insulator layer is removed underlying the structure to suspend the structure.

Abstract: Gyrometer including a substrate and an inertial mass suspended above the substrate, the inertial mass including an excitation part and a detection part, means of moving the excitation part is movable in at least one direction contained in the plane of the inertial mass, and capacitive detection device detecting movement of the detection part outside the plane of the mass. The capacitive detection device includes comprising at least one suspended electrode, located above the detection part located facing the substrate so as to form a variable capacitor with the detection part, the electrode being held above the detection part by at least one pillar passing through the inertial mass.

Abstract: An optical deflector includes a mirror structure having a symmetrical axis on a plane of the mirror structure, an outer frame surrounding the mirror structure, and at least one meander-type piezoelectric actuator coupled between the mirror structure and the outer frame and having a plurality of piezoelectric cantilevers in parallel with the symmetrical axis folded at folded portions. The mirror structure is divided into a first half portion and a second half portion along the symmetrical axis. The first half portion is close to a closest one of the folded portions, and the second half portion is far from the closest one of the folded portions. A mass of the second half portion is larger than a mass of the first half portion.

Abstract: A microelectromechanical sensor includes a supporting structure and a sensing mass, which is elastically coupled to the supporting structure, is movable with respect thereto with one degree of freedom in response to movements according to an axis and is coupled to the supporting structure through a capacitive coupling. A sensing device senses, on terminals of the capacitive coupling, transduction signals indicative of displacements of the first sensing mass according to the degree of freedom. The sensing device includes at least one first reading chain, having first operative parameters, one second reading chain, having second operative parameters different from the first operative parameters, and one selective electrical connection structure that couples the first reading chain and the second reading chain to the first terminals.

Abstract: A micro-electro-mechanical sensing device including a substrate, a semiconductor layer, a supporting pillar, a first suspended arm, a connecting member, a second suspended arm, and a proof mass is provided. The semiconductor layer is disposed on or above the substrate. The supporting pillar is disposed on or above the semiconductor layer. The first suspended arm is disposed on the supporting pillar. The supporting connects a portion of the first suspended arm. The connecting member directly or indirectly connects another portion of the first suspended arm. The second suspended arm has a first surface and a second surface opposite to the first surface. The connecting member connects a portion of the first surface. The proof mass connects the second suspended arm and it includes a portion of the second suspended arm as a portion of the proof mass. A method for manufacturing the device is also provided.

Abstract: A measurement device (10) mounting arrangement includes a support member (30) and a sensing device (12) in a circuit housing (22). The circuit housing (22) is electrically and mechanically connected to the support member (30) through a mounting structure (32). The circuit housing (22) has a resonance frequency and the sensing device (12) has an operational resonance frequency. The sensing device (12) measures a physical parameter and provides a signal indicative thereof. An under-fill material (40) is located between the support member (30) and the circuit housing (22) for shifting the resonance frequency of the circuit housing (22) away from the operational resonance frequency of the sensing device (12).

Abstract: The present invention relates to a method for operating a rotation sensor for detecting a plurality of rates of rotation about orthogonal axes (x,y,z). The rotation sensor comprises a substrate, driving masses, X-Y sensor masses, and Z sensor masses. The driving masses are driven by drive elements to oscillate in the X-direction. The X-Y sensor masses are coupled to the driving masses, and driven to oscillate in the X-Y direction radially to a center. When a rate of rotation of the substrate occurs about the X-axis or the Y-axis, the X-Y sensor masses are jointly deflected about the Y-axis or X-axis. When a rate of rotation of the substrate occurs about the Z-axis, the X-Y sensor masses are rotated about the Z-axis, and the Z sensor masses are deflected substantially in the X-direction.

Abstract: This disclosure relates to systems and methods for sending and receiving messages between two user devices using vibration generation and detection techniques. The devices may be placed in proximity to each other and initiate a solicitation protocol and a communication protocol routine to establish a vibration communication link. The devices may exchange information using information that is encoded into the vibrations that are transferred from one user device to another user device.

Abstract: The present invention relates to an inertial micro-sensor of angular displacements comprising at least one inertial mass (112, 1210) movable in space (x, y, z); an exciter (131) configured to generate a first vibratory movement of the inertial mass along a first direction (X) included in the plane (x, y), so as to generate a first Coriolis force induced by an angular displacement of the inertial mass (112, 1210) around a second direction (Y) included in the plane (x, y) and perpendicular to the first direction (X); an exciter (131) configured to generate a second vibratory movement of the inertial mass along the second direction (Y), so as to generate a second Coriolis force induced by an angular displacement of the inertial mass (112, 1210) around the first direction (X), and means for detecting the first Coriolis force and the second Coriolis force, characterized by the fact that the detection means comprise a common detector for the first Coriolis force and the second Coriolis force and configured to produ

Abstract: A system for gyroscope dynamic motor amplitude compensation during startup comprises various program modules, including an a-priori motor amplitude module configured to generate an a-priori motor amplitude signal based on a model of gyroscope motor amplitude growth during startup; a steady state scale factor module configured to generate a steady state scale factor signal; and a dynamic motor amplitude compensation module configured to receive the a-priori motor amplitude signal, and the steady state scale factor signal. During startup, rate motion is sensed by the gyroscope and a sensed rate signal is output by the gyroscope. The dynamic motor amplitude compensation module receives a measured motor amplitude signal from the gyroscope, the a-priori motor amplitude signal, or a combination thereof, and outputs a time varying scale factor that is applied to the sensed rate signal to produce an accurate sensed rate from the gyroscope during the startup phase.

Abstract: A manufacturing method for a cap, for a hybrid vertically integrated component having a MEMS component a relatively large cavern volume having a low cavern internal pressure, and a reliable overload protection for the micromechanical structure of the MEMS component. A cap structure is produced in a flat cap substrate in a multistep anisotropic etching, and includes at least one mounting frame having at least one mounting surface and a stop structure, on the cap inner side, having at least one stop surface, the surface of the cap substrate being masked for the multistep anisotropic etching with at least two masking layers made of different materials, and the layouts of the masking layers and the number and duration of the etching steps being selected so that the mounting surface, the stop surface, and the cap inner side are situated at different surface levels of the cap structure.

Abstract: A IC for sensor includes a detector which detects an angular velocity signal based on a signal from a sensor element, an AD converter which converts an analog signal from the detector into a digital signal, and a DC component detector which detects a DC component from the digital signal output from the AD converter within a predetermined period of time.

Abstract: Biometric monitoring devices, including various technologies that may be implemented in such devices, are discussed herein. Additionally, techniques for utilizing altimeters in biometric monitoring devices are provided. Such techniques may, in some implementations, involve recalibrating a biometric monitoring device altimeter based on location data; using altimeter data as an aid to gesture recognition; and/or using altimeter data to manage an airplane mode of a biometric monitoring device.

Abstract: Disclosed herein are an apparatus and a method for driving an inertial sensor. The apparatus for driving an inertial sensor includes a detection unit that detects first acceleration detection voltage and detects angular velocity detection voltage when a wake up signal is input; a wake up signal generation unit that generates the wake up signal when the total of acceleration detection voltage is larger than predetermined voltage; a phase conversion unit that generates driving voltage and inversion driving voltage of the corresponding axis; a driving unit that vibrates the inertial sensor; and a control unit that performs a control to wake up the detection unit, the phase conversion unit, and the driving unit or convert them into a sleep mode according to a control signal, whereby power consumption can be minimized in an apparatus requiring low power like mobile environment.

Abstract: A mechanism by which a MEMS gyroscope sensor can be calibrated using data gathered from other sensors in a system incorporating the MEMS gyroscope sensor is provided. Data gathered from an accelerometer and a magnetometer in fixed orientation relative to the gyroscope is used to calculate changes in orientation of a system. A constant acceleration vector measured by the accelerometer and a constant magnetic vector measured by the magnetometer are used as reference vectors in a solution to Wahba's problem to calculate a rotation matrix providing the system's orientation with respect to those two constant vectors. By comparing changes in orientation from one time to a next time, measured rates of angular change can be calculated. The measured rates of angular change can be used along with observed gyroscope rates of angular change as input to a linear regression algorithm, which can be used to compute gyroscope trim parameters.

Abstract: An inertial sensor includes oscillating-type angular velocity sensing element (32), IC (34) for processing signals supplied from angular velocity sensing element (32), capacitor (36) for processing signals, and package (38) for accommodating angular velocity sensing element (32), IC (34), capacitor (36). Element (32) and IC (34) are housed in package (38) via a vibration isolator, which is formed of TAB tape (46), plate (40) on which IC (34) is placed, where angular velocity sensing element (32) is layered on IC (34), and outer frame (44) placed outside and separately from plate (40) and yet coupled to plate (40) via wiring pattern (42).

Abstract: A gyroscope and a method of detecting rotation are provided. The gyroscope includes a structure configured to be driven to move about a drive axis. The structure is further configured to move about a sense axis in response to a Coriolis force generated by rotation of the structure about a rotational axis while moving about the drive axis. The structure further includes at least one first torsional spring extending generally along the drive axis and at least one second torsional spring extending generally along the sense axis. The gyroscope further includes an optical sensor system configured to optically measure movement of the structure about the sense axis.