Abstract: The disclosure generally relates to calculating gyroscope bias in a vehicle. Methods, apparatus and systems are disclosed. A method can include: assuming a maximum turning rate for a vehicle based at least in part on speed of the vehicle; and determining gyroscope bias information based at least in part on the assumed maximum turning rate.

Abstract: A microelectromechanical device includes: a body accommodating a microelectromechanical structure; and a cap bonded to the body and electrically coupled to the microelectromechanical structure through conductive bonding regions. The cap including a selection module, which has first selection terminals coupled to the microelectromechanical structure, second selection terminals, and at least one control terminal, and which can be controlled through the control terminal to couple the second selection terminals to respective first selection terminals according, selectively, to one of a plurality of coupling configurations corresponding to respective operating conditions.

Abstract: A device for controlling a device by using a rotation-rate sensor. In order to provide a device for determining a triggering signal for a safety device which allows a particularly compact implementation of the device, the device is set up to ascertain an acceleration variable on the basis of a first sensor signal for a first seismic mass of the rotation-rate sensor and the second sensor signal for a second seismic mass of the rotation-rate sensor and to control the device as a function of the acceleration variable.

Abstract: Vertical mount package assemblies and methods for making the same are disclosed. A method for manufacturing a vertical mount package assembly includes providing a base substrate having electrical connections for affixing to external circuitry, and providing a package having a mounting region configured to receive a device therein. Flexible electrical leads are formed between the base substrate and the package. The flexible leads can include a plurality of aligned grooves to guide bending. After forming the flexible electrical leads, the package is rotated relative to the base substrate. The aligned grooves can constrain the relative positions of the substrates during rotation, and the beveled edges of the base substrate and package can maintain a desired angular relationship (e.g., perpendicular) between the base substrate and the package after rotation.

Abstract: A micro gyroscope determine three-dimensional rotational movements is mounted on a substrate on which a plurality of masses tangentially oscillate about the z axis perpendicular to the substrate. The oscillating masses are fastened to the substrate by springs and bolts. Driving elements maintain oscillating tangential vibrations of the masses about the z axis. Upon rotation of the substrate about any spatial axis, the masses are subjected to deflections caused by Corolis forces that are detected by sensor elements. Certain masses oscillating about the z axis are tiltable about the x axis, while some others are tiltable about the y axis. At least one other mass is configured to deflect radially to the z axis in a x-y plane parallel to the plane of the substrate. This mass is assigned a sensor element that can deflect radially with respect to the axis but cannot oscillate about the z axis.

Abstract: Disclosed herein is a gain control device of a gyro sensor driving signal, including: a gyro sensor generating a gyro signal; a driving signal supply unit applying a driving signal to the gyro sensor; and a gain control unit detecting positive and negative driving signals of the gyro sensor so as to be output as a pulse waveform and changing the pulse waveform to a resistance value corresponding to the pulse waveform to compensate for a gain of the driving signal, whereby it is possible to simply implement the circuit and reduce costs, by controlling the gain of the gyro sensor

Abstract: A signal processing device includes: an amplifier, a bandwidth of which can be switched, and a controller which is configured to perform control to operate the amplifier in a wide bandwidth for a constant time after start of a signal input to the amplifier and then operate the amplifier in a narrow bandwidth thereafter.

Abstract: The present invention relates to an inertial measurement device secured to a structure of a vehicle for which it is desired to measure speeds and/or accelerations, the device comprising at least one piece of moving equipment in rotation about a stationary axis of rotation Y relative to the structure, said moving equipment including at least two measurement device having respective sensitivity axes X? and Z? that are mutually orthogonal and that lie in a plane perpendicular to the stationary axis of rotation Y, a motor for driving the moving equipment in rotation, device for determining the angular position of the moving equipment, device for responding to the angular position of the moving equipment to determine the projection of the measurements taken in the rotary frame of reference axes X? and Z? by the said at least two measurement device onto a vehicle frame of reference X and Z.

Abstract: An exemplary tuning-fork type piezoelectric vibrating piece has a rectangular base having upper and lower main surfaces and a pair of vibrating arms extending longitudinally from the base. The vibrating arms also have the upper and lower main surfaces. Each main surface of each vibrating arm defines a respective vibrating-arm groove extending longitudinally into the base. Each main surface of the base has at least one respective step-side surface situated outboard, in an X-axis direction, of each vibrating-arm groove. Each step-side surface is parallel with the respective vibrating-arm groove. A first electrode is situated on the vibrating-arm grooves of the first vibrating arm and on the at least one respective step-side surface on each main surface. A second electrode is situated on the vibrating-arm grooves of the second vibrating arm and on the at least one respective step-side surface on each main surface. The first and second electrodes are energized with different electrical polarities.

Abstract: A system is provided for controlling the amplitude of a vibrating resonant sensor through a drive signal applied to the resonator. The system comprises a controller that provides the drive signal to a forcer coupled to the resonator to excite the resonator into vibration at its resonant frequency. The system further comprises a buffer having an input node that receives charge of a pickoff capacitor of the resonator that is a measure of the resonator vibration and a current reference waveform. The buffer provides an output that is a difference signal that represents an error of the resonator vibration that corresponds to a difference between the measured resonator vibration and the current reference waveform, wherein the controller adjusts the drive signal in order to null the difference signal.

Abstract: The subject matter disclosed herein relates to the control and utilization of multiple sensors within a device. For an example, motion of a device may be detected in response to receipt of a signal from a first sensor disposed in the device, and a power state of a second sensor also disposed in the device may be changed in response to detected motion.

Abstract: A gyroscope and a method of detecting rotation are provided. The gyroscope includes a structure configured to be driven to move about a drive axis. The structure is further configured to move about a sense axis in response to a Coriolis force generated by rotation of the structure about a rotational axis while moving about the drive axis. The structure further includes at least one first torsional spring extending generally along the drive axis and at least one second torsional spring extending generally along the sense axis. The gyroscope further includes an optical sensor system configured to optically measure movement of the structure about the sense axis.

Abstract: An inertial sensor includes oscillating-type angular velocity sensing element (32), IC (34) for processing signals supplied from angular velocity sensing element (32), capacitor (36) for processing signals, and package (38) for accommodating angular velocity sensing element (32), IC (34), capacitor (36). Element (32) and IC (34) are housed in package (38) via a vibration isolator, which is formed of TAB tape (46), plate (40) on which IC (34) is placed, where angular velocity sensing element (32) is layered on IC (34), and outer frame (44) placed outside and separately from plate (40) and yet coupled to plate (40) via wiring pattern (42).

Abstract: A terminal device is described that includes a housing configured to accommodate various components of the terminal device; a first sensing unit configured to collect first status information of the terminal device; a second sensing unit configured to collect second status information of the terminal device; and a processing unit configured to determine a manner that a user holds the terminal device based on the first status information and the second status information.

Abstract: A high-performance angular rate detecting device is provided. A driving part including a drive frame and a Coriolis frame is levitated by at least two fixing beams which share a fixed end and are extending in a direction orthogonal to a driving direction, thereby vibrating the driving part. Even when a substrate is deformed by mounting or heat fluctuation, internal stress generated to the fixed beam and a supporting beam is small, thereby maintaining a vibrating state such as resonance frequency and vibration amplitude constant. Therefore, a high-performance angular rate detecting device which is robust to changes in mounting environment can be obtained.

Abstract: A sensor unit includes sensors. Each of the sensors provides a measurement axis. A connector is electrically connected with the sensors. The position of the connector is fixed relative to the sensors. A memory unit stores calibration information which specifies the respective directions of the measurement axes with respect to a reference plane established for the connector.

Abstract: Disclosed herein are an apparatus and a method for detecting a gyro sensor signal. The apparatus includes: a preamplifier unit outputting sensing voltage and inverse phase sensing voltage; a sample and hold unit holding the sensing voltage and the inverse phase sensing voltage for a predetermined period at a predetermined point in time; an averaging unit removing offset; a current passing unit providing a current path of output voltage of the averaging unit; a comparing unit comparing a signal output from the averaging unit and reference voltage with each other to output a comparison signal; and a pulse counter unit generating and outputting a count signal that is in proportion to a width of the comparison signal.

Abstract: An exemplary device for determining a position of a component moved by operation of a motor includes a rotating member that rotates responsive to operation of the motor. At least one accelerometer is supported on the rotating member. The accelerometer provides at least one of an indication of a tangential force that is tangential to a direction of rotation of the rotating member and a radial force that is perpendicular to the tangential force. A controller determines the position of the component based upon the force indication from the accelerometer.

Abstract: A sensor device includes a first sensor element which detects an angular velocity around z axis and a second sensor element which detects an angular velocity around x axis, the relationship fd1>fd2 and fm1<fm2 is satisfied, when the drive frequency of the first sensor element is set to fd1, the drive frequency of the second sensor element is set to fd2, the mistuned frequency of the first sensor element is set to fm1, and the mistuned frequency of the second sensor element is set to fm2.

Abstract: An angular velocity sensor is described with improved ageing and hysteresis properties. The sensor may be of a ring type driven by a driver circuit, the sensor further comprising primary and secondary portions having corresponding signal pickoffs. The gain of the primary pickoff signal and the capacitance of the primary portions of the sensor are controlled relative to the gain of the secondary pickoff and the capacitance of the secondary portions of the sensor. Control electronics is provided that enables matching of the relative signals from the respective channels. In this way, temperature hysteresis and ageing effects of materials used in forming the sensor are overcome.

Abstract: A multi-axis gyroscope includes a microelectromechanical structure configured to rotate with respective angular velocities about respective reference axes, and including detection elements, which are sensitive in respective detection directions and generate respective detection quantities as a function of projections of the angular velocities in the detection directions. The gyroscope including a reading circuit that generates electrical output signals, each correlated to a respective one of the angular velocities, as a function of the detection quantities. The reading circuit includes a combination stage that combines electrically with respect to one another electrical quantities correlated to detection quantities generated by detection elements sensitive to detection directions different from one another, so as to take into account a non-zero angle of inclination of the detection directions with respect to the reference axes.

Abstract: A laser gyro includes a cylindrical solid amplifier bar having an axis of revolution. The laser gyro also includes: an annular piezoelectric element for exciting said solid amplifier element at a predetermined frequency f, along said axis of revolution, said annular piezoelectric element being mounted fixed on one of the two end cross sections of the cylindrical solid amplifier bar so that its axis of revolution coincides with said axis of revolution of said cylindrical solid amplifier bar; and an annular dynamic counterweight mounted fixed on the free end cross section of said annular piezoelectric element so that its axis of revolution coincides with said axis of revolution of said cylindrical solid amplifier bar; said cylindrical solid amplifier bar being dimensioned so as to be considered nondeformable at said excitation frequency f.

Abstract: An accelerometer with improved calibration features, an electronic device having an accelerometer with improved calibration features, and a method of calibrating an accelerometer of an electronic device are provided. In accordance with one embodiment, there is method of calibrating an accelerometer of an electronic device, the accelerometer having at least a primary sensing axis and a secondary sensing axis, the second sensing axis being oriented parallel to the primary sensing axis and in the opposite direction of the primary sensing axis, the method comprising: measuring acceleration calibration data using the primary sensing axis and the secondary sensing axis of the accelerometer; determining calibration parameters in accordance with measured calibration data from the accelerometer; and storing the calibration parameters in a memory of the electronic device.

Abstract: A down hole surveying tool (10) is for directional surveying of boreholes. The tool (10) includes a body (11) which accommodates a composite sensor device (17). The sensor device (17) is supported for rotation about an indexing axis (4) in a rotary mount (31) which provides an indexing platform (33). The sensor device (17) can be indexed about the indexing axis between two indexing positions which are 180 degrees apart. An indexing mechanism (70) is provided for selectively indexing the sensor device (17) about the indexing axis (4). The sensor device (17) includes a two-axis gyroscope (13) and a two-axis accelerometer (15) connected together and rotatable in unison. The indexing axis (4) is perpendicular to the two sensitive axes of the gyroscope (13) and the two sensitive axes of the accelerometer (15). The gyroscope (13) and accelerometer (15) are rigidly fixed with respect to each other to provide a sensor package which constitutes the composite sensor device (17).

Abstract: An angular velocity detection device includes an outer frame including fixed portions, outer beam portions connected to the fixed portions, a sensing part surrounded by the outer frame with first slit therebetween, and a joint connecting the outer frame and the sensing part. The sensing part includes an inner beam portion, a flexible portion, and a detector. The inner beam portion has a hollow region inside and is square-shaped when viewed from above. The flexible portion is formed in the hollow region of the inner beam portion, and is connected to the inner edge of the inner beam portion. The detector is disposed in the flexible portion. The first slit is formed to surround the sensing part excluding the joint.

Abstract: An apparatus for analyzing movement of equipment includes an inertial measurement unit continuously measuring six rigid body degrees of freedom of the equipment and outputting data representative thereof, wherein the inertial measurement unit includes a planar substrate defining a single common plane (either rigid or flexible). The inertial measurement unit further includes at least one angular rate gyro and at least one accelerometer sufficient to measure the six rigid body degrees of freedom and each being mounted on the single common plane. The apparatus further includes a communication device transmitting the data.

Abstract: A tuning-fork type piezoelectric resonator plate includes: at least a plurality of leg portions serving as vibrating portions; a bonding portion bonded to the outside, and a base portion from which the leg portions and the bonding portion protrude. The plurality of leg portions protrude from a first end face of the base portion and are provided side-by-side on the first end face. The bonding portion protrude from a second end face located opposite the first end face of the base portion at a position located opposite a center position of the plurality of leg portions in a width direction of the first end face of the base portion. And, at least a base end portion of the bonding portion is used as a bond region that is bonded to the outside.

Abstract: A method for determining a future rotational speed of a rotating drive shaft of an internal combustion engine is described, in particular while the internal combustion engine coasts after being turned off, the future rotational speed being calculated from a course of measured rotational speeds. To predict a future rotational speed of the drive shaft of the internal combustion engine as accurately as possible, instantaneous rotational speeds measured at different rotational positions of drive shaft are evaluated.

Abstract: Disclosed herein is a method of setting valid output sections of a 3-axis acceleration sensor mounted within a tire of a vehicle, including setting an output signal of the 3-axis acceleration sensor in the z-axis direction as a reference signal, setting a specific section of the output signal in the z-axis direction as a valid section where a part of the tire where the 3-axis acceleration sensor is mounted contacts a road surface, and setting sections of output signals of the 3-axis acceleration sensor in the x-axis and y-axis directions corresponding to the valid section in the z-axis direction as valid sections in the x-axis and y-axis directions. The method sets precise valid sections applied to detect information between the tire and a ground surface so as to minimize a component of a noise section by connecting output signals in the x-axis, y-axis and z-axis directions.

Abstract: Disclosed herein are an inertial sensor and a method of manufacturing the same. The inertial sensor 100 according to a preferred embodiment of the present invention is configured to include a plate-shaped membrane 110, a mass body 120 disposed under a central portion 113 of the membrane 110, a post 130 disposed under an edge 115 of the membrane 110 so as to support the membrane 110, and a bottom cap 150 of which the edge 153 is provided with the first cavity 155 into which an adhesive 140 is introduced, wherein the adhesive 140 bonds an edge 153 to a bottom surface of the post, whereby the edge 153 of the bottom cap 150 is provided with the first cavity 155 to introduce the adhesive 140 into the first cavity 155, thereby preventing the adhesive 140 from being permeated into the post 130.

Abstract: An integrated MEMS structure includes a driving assembly anchored to a substrate and actuated with a driving movement. A pair of sensing masses suspended above the substrate and coupled to the driving assembly via elastic elements is fixed in the driving movement and performs a movement along a first direction of detection, in response to an external stress. A coupling assembly couples the pair of sensing masses mechanically to couple the vibration modes. The coupling assembly is formed by a rigid element, which connects the sensing masses and has a point of constraint in an intermediate position between the sensing masses, and elastic coupling elements for coupling the rigid element to the sensing masses to present a first stiffness to a movement in phase-opposition and a second stiffness, greater than the first, to a movement in phase, of the sensing masses along the direction of detection.

Abstract: Methods and systems are provided for reducing angular velocity of a vehicle using a gyroscope array. A method comprises dithering a gyroscope of the gyroscope array, obtaining current through a gimbal motor of the gyroscope while dithering the gyroscope, determining a gimbal rate command to reduce angular velocity of the vehicle based on the current through the gimbal motor obtained while dithering the gyroscope, and operating the gimbal motor of the gyroscope based on the gimbal rate command.

Abstract: A high-performance angular rate detecting device is provided. A driving part including a drive frame and a Coriolis frame is levitated by at least two fixing beams which share a fixed end and are extending in a direction orthogonal to a driving direction, thereby vibrating the driving part. Even when a substrate is deformed by mounting or heat fluctuation, internal stress generated to the fixed beam and a supporting beam is small, thereby maintaining a vibrating state such as resonance frequency and vibration amplitude constant. Therefore, a high-performance angular rate detecting device which is robust to changes in mounting environment can be obtained.

Abstract: An innovative configuration of Miniaturized Smart Self-calibration EPD for mortar applications, as the azimuth/heading and elevation measurement device. This innovative EPD configuration uses only two FOGs or DTG and accelerometers and it is self-contained. This leads to a new EPD implementation that produces a small and light device with lower cost and adequate accuracy for the small dismounted mortar applications.

Abstract: Gyrometer comprising a substrate and an inertial mass suspended above the substrate, the inertial mass comprising an excitation part and a detection part, means of moving the excitation part in at least one direction contained in the plane of said inertial mass, and capacitive detection means detecting movement of said detection part outside the plane of said mass, said capacitive detection means comprising at least one suspended electrode, located above the detection part located facing the substrate so as to form a variable capacitor with said detection part, said electrode being held above said detection part by at least one pillar passing through the inertial mass.

Abstract: A gyroscope and a method of detecting rotation are provided. The gyroscope includes a structure configured to be driven to move about a drive axis. The structure is further configured to move about a sense axis in response to a Coriolis force generated by rotation of the structure about a rotational axis while moving about the drive axis. The gyroscope further includes an optical sensor system configured to optically measure movement of the structure about the sense axis. In certain embodiments, the gyroscope is a microelectromechanical system (MEMS) gyroscope.

Abstract: Angular rate sensor for detecting rotation about first, second and third mutually perpendicular input axes having a plurality of generally planar proof masses coupled together for linear drive-mode oscillation along multi-directional drive axes in a plane formed by the first and second input axes. The masses are mounted on a generally planar sense frame for linear movements relative to the sense frame in drive-mode and for rotation together with the sense frame in sense modes. The sense frame is mounted for rotation with the masses in sense modes about the first, second, and third input axes independent of each other, in response to Coriolis forces produced by rotation of the masses about the first, second, and third input axes respectively. And capacitance sensors responsive to the rotational movements of the masses and the sense frame in sense modes are employed for monitoring rate of rotation.

Abstract: A system and method for separating bias instability of MEMS inertial instruments such as gyroscopes or accelerometers from the instrument signal, in which the inertial measurement instrument has an input axis and an output signal, and the bias instability has a frequency. The instrument is rotated about a rotation axis that is orthogonal to the input axis, at a frequency that is greater than the bias instability frequency. The instrument output signal is detected, and demodulated with a phase-sensitive detection method referenced to the instrument rotation.

Abstract: A rotation rate sensor for sensing a rotation ? by which the sensor is rotated has a substrate and a driving and sensing arrangement located substantially flat in an X-Y plane above a substrate surface of the substrate and having a center. The driving and sensing arrangement has a drive mass and a sense mass that are arranged at different spacings from the center of the driving and sensing arrangement symmetrically about the center. The oscillation modes of the drive mass and the sense mass are partially transmittable onto one another and are partially decoupled. The rotation ? is sensed in that a tilting of the sense mass out of a surface plane of the driving and sensing arrangement is sensed.

Abstract: Measuring device, in particular for in-process measurement of test pieces during a machining operation on a machine tool, in particular a grinding machine, has a measuring head which is movable relative to a base body of the measuring device between a neutral position and a measuring position in which the measuring head is in measuring contact with the test piece. At least one angle sensor is associated with the measuring head for detecting the angular position of the measuring head, in particular changes in the angular position of the measuring head relative to the test piece, during a measuring operation.

Abstract: An oscillator is oscillated at a predetermined oscillation frequency. A detecting unit exerts Coriolis force on the oscillator. A repetitive control system applies an external force to the oscillator so as to cancel out the Coriolis force to achieve an angular velocity measuring operation at a high sensitivity and a high S/N ratio.

Abstract: A yaw-rate sensor for determining a Coriolis force includes a semiconductor substrate, a mass body mounted so it is movable over the semiconductor substrate, a drive unit for setting the mass body into an oscillating movement, and a detection unit for determining a deflection of the mass body which is caused by the Coriolis force. The detection unit includes a piezoresistive element, whose electrical resistance is a function of the deformation of the piezoresistive element.

Abstract: A micro gyroscope for determining rotational movements about three spatial axes x, y and z, which are perpendicular to one another has a substrate (1) on which a plurality of masses (2, 3) oscillating tangentially about the z axis, which is perpendicular to the substrate (1), are arranged. The oscillating masses (2, 3) are fastened on the substrate (1) by means of springs (5, 6, 8) and the bolts (7, 9). Driving elements (11) serve to maintain oscillating tangential vibrations of the masses (2, 3) about the z axis as a result of which, upon rotation of the substrate (1) about any spatial axis, the masses (2, 3) are subjected to Corolis forces and deflections caused as a result. Sensor elements detect the deflections of the masses (2, 3) on the basis of the Corolis forces generated. Some of the masses (2, 3) oscillating about the z axis are mounted in a tiltable manner substantially about the x axis which runs parallel to the substrate (1).

Abstract: In order to be able to perform redundant measurements of rotation rates particularly economically, disclosed herein is a sensor device which includes a dual-axis, first rotation rate sensor element with which rotation rates of rotating motions of the sensor device about a first and a second rotation rate measurement axis can be detected, wherein the first and the second rotation rate measurement axes are oriented orthogonally in relation to one another. The sensor device is defined by the fact that the sensor device includes at least one other rotation rate sensor element with which a rotation rate of a rotating motion of the sensor device about a rotation rate measurement axis, which lies in a plane together with the first and the second rotation rate measurement axes, can be deselected.

Abstract: A yaw rate sensor is described which includes a drive device, at least one Coriolis element, and a detection device having at least two detection elements which are coupled to one another with the aid of a coupling device, the drive device being connected to the Coriolis element for driving a vibration of the Coriolis element, and an additional coupling device which is connected to the detection device and to the Coriolis element for coupling a deflection in the plane of vibration of the Coriolis element to the detection device in a direction orthogonal to the vibration.

Abstract: A device (110) includes a sensing element (26) having drive nodes (34, 36) and sense nodes (42, 44). Parasitic capacitance (22) is present between drive node (34) and sense node (42). Likewise, parasitic capacitance (24) is present between drive node (36) and sense node (44). When a drive signal (56) is applied between drive nodes (34, 36), a parasitic current (70) between drive and sense nodes (34, 42) and a parasitic current (72) between drive and sense nodes (36,44) is created due to the parasitic capacitances (22, 24). A capacitive network (112) is coupled between the drive node (36) and the sense node (42) to create a correction current (134) through capacitive network (112) that cancels parasitic current (70). Likewise, a capacitive network (114) is coupled between the drive node (34) and the sense node (44) to create a correction current (138) through capacitive network (112) that cancels parasitic current (72).

Abstract: The present invention relates to an inertial rotary movement microsensor for detecting a rotational movement around what is referred to as an axis of rotation (X), provided with a part that is movable relative to a fixed part, the movable part comprising an excitation mass configured to undergo an oscillating movement in an excitation direction (Z) by an exciter so as to generate a Coriolis force induced by the rotational movement, a detection mass kinematically connected to the excitation mass by a linkage configured to transmit the Coriolis force at least partly without transmitting the oscillating movement around the excitation axis at least partly, a detector configured to measure the Coriolis force transmitted to the detection mass, characterized in that the detector is provided with at least one strain gauge suspended between the detection mass and an anchoring part integral with the fixed part. Application to the technologies known as MEMS.

Abstract: A method and apparatus of a portable terminal estimate a step length of a pedestrian. An accelerometer detects acceleration caused by a movement of the portable terminal as a pedestrian carrying the portable terminal walks. A gyroscope detects angular velocity caused by the movement of the portable terminal as the pedestrian walks. A controller determines a magnitude of a swinging motion of the portable terminal by using at least one of the detected acceleration and angular velocity, determines that the portable terminal makes the swinging motion when the magnitude of the swinging motion is equal to or greater than a predetermined value, determines a carrying position of the portable terminal in the pedestrian's body by using at least one of the detected acceleration and angular velocity, and estimates a step length of the pedestrian according to the determined carrying position of the portable terminal.

Abstract: A method of determining at least one rotation parameter of a wind turbine rotor rotating with a rotation speed and a phase is provided. The method comprises the steps of: measuring an effective centrifugal force acting in a first pre-determined direction, which is defined in a co-ordinate system rotating synchronously with the rotor, on at least one reference object located in or at the rotor, establishing a first angular frequency representing the rotation speed of the rotor on the basis of variations in the measured effective centrifugal force due to gravitational force, establishing a second angular frequency representing the rotation speed of the rotor by use of at least one yaw rate gyro, and establishing the value of the rotation speed as the rotational parameter by correcting the second angular frequency by comparing it to the first angular frequency.

Abstract: The invention relates to an electromechanic microsensor (MEMS) (1) comprising drive elements (2, 3, 4) which are moved linearly in an x-y plane and disposed on a substrate for determining at least two, preferably three, components of the yaw rate vector of the substrate, wherein two groups of drive elements (2, 3; 4) exist, which are driven essentially in directions running essentially at right angles to each other. The electromechanic microsensor (MEMS) (1) according to the invention is characterized in that the drive elements (2, 4; 3, 4) which are moved at right angles to each other are connected to one another for synchronizing the movements by means of a coupling device (6, 7) that is rotatably mounted on the substrate.