Abstract: A hit command processing system for an electronic instrument includes: an angular velocity sensor; an analog processing circuit which receives the analog signal output from the angular velocity sensor, converts the analog signal into a digital signal, and outputs the digital signal as a rotational angular velocity value; a hit input detection section which receives the rotational angular velocity value output from the analog processing circuit, and determines whether or not a hit input is performed to an electronic instrument based on a change in the rotational angular velocity value; and a hit command execution section which executes a command associated with the hit input when the hit input detection section has determined that the hit input has been performed.

Abstract: A device and method for use with a musical instrument are described. The invention allows wireless control of a digital-audio-workstation (“DAW”) from the musical instrument. The device and method of the invention may also allow for wireless transmission of the output audio signal from the instrument, thus negating the need to connect the musical instrument to the DAW using a cord or a cable. Wireless transmission may be accomplished via a networking protocol having sufficient bandwidth to accommodate transmission of digital audio signals.

Abstract: An activity monitor is provided that corrects for the effects of motion external to the entity being monitored. For example, the activity monitor can overcome the effects of vehicular travel.

Abstract: A piezoelectric resonator element, comprises: a base made of a piezoelectric material; at least a pair of resonating arms provided in a unified manner with the base and extending in parallel with each other from the base; a portion defining a long groove provided to each of the resonating arms along a longitudinal direction; and a driving electrode provided to the long groove. Each of the resonating arms includes a structure to adjust hardness balance between right and left structures with respect to a virtual central line extending in the longitudinal direction.

Abstract: A sensor system includes a sensor device (10) and an integrated circuit (20) for driving the device (10). The device (10) includes a sensor body (1) of a silicon-based material, an upper sealing member (2) of a silicon-based material and a lower sealing member (3) of a silicon-based material. The upper sealing member (2) and the lower sealing member (3) are joined together to cooperatively house the body (1) therewithin in an airtight manner. The device (10) and the circuit (20) are formed as a stacked body. The body (1) is electrically connected to a wiring pattern (12) of the circuit (20) through a conductive through-path (4) penetrating the upper sealing member (4) and a mounting electrode (5) provided on an outer surface of the upper sealing member (2). The device (10) is connected to an MID substrate (30) through the circuit (20).

Abstract: A system and method for determining acceleration along a motor axis of a MEMS gyroscope includes a processor. The processor includes a notch filter to remove a sinusoid from an instantaneous voltage from a motor pick up of the MEMS gyroscope. A memory bus allows random access to data stored in a processor readable memory. A processor-readable memory in operative engagement with the memory bus allows access to the processor-readable memory containing data. The data includes a model relating at least one instantaneous voltage in a remaining instantaneous voltage to an acceleration of a proof mass along the motor axis. Instructions to the processor include a routine to compare the at least one instantaneous voltage in the model to the remaining instantaneous voltage.

Abstract: Angular rate sensor for detecting rotation about first and second mutually perpendicular axes which has first and second masses coupled together for torsional drive mode oscillation of equal amplitude and opposite phase about third axes which are perpendicular to the first and second axes. The first mass is mounted for oscillation about the second axis in response to Coriolis forces produced by rotation about the first axis, and the second mass is mounted for oscillation about the first axis in response to Coriolis forces produced by rotation about the second axis. In some disclosed embodiments, the rate sensor also includes a pair of accelerometer masses which are connected together for torsional movement of equal amplitude and opposite phase about axes parallel to the third axes in response to acceleration along the second axis and for torsional movement of equal amplitude and opposite phase about axes parallel to the second axis in response to acceleration along the third axes.

Abstract: A gyro sensor configured to sense an angular rate about a rotational axis includes a drive mass configured to undergo oscillatory linear motion within a plane, and a sense mass configured to undergo an oscillatory motion out of the plane as a function of the angular rate. A link spring component connects the sense mass to the drive mass such that the sense mass is substantially decoupled from the drive mass with respect to the oscillatory linear motion of the drive mass, but is coupled to the drive mass with respect to the oscillatory motion out of the plane of the sense mass.

Abstract: A tuning fork type piezoelectric vibrator is provided with vibrating arms which can improve shock resistance while suppressing a CI value to a small value. A first groove (base end side) and a second groove (tip side) extend along a longitudinal direction from a base end of the vibrating arm and are formed on at least one of a front surface or a back surface of the vibrating arms. Then, a ratio L2/L1 which is the ratio of a length L2 of the first groove to a length L1 from the base end of the vibrating arm to the tip of the second groove, is set between 0.35 and 0.65, and a ratio d/L1 which is the ratio of a space d between the first groove and the second groove to the length L1 from the base end of the vibrating arm to the tip of the second groove, is set between 0.010 and 0.016.

Abstract: A sensor array, in particular a micromechanical sensor array, and methods for manufacturing the sensor array are provided, which sensor array includes a sensor section for supplying certain sensor signals, and a cover section provided on the sensor section to form a hermetically sealed sensor interior. An electronic analyzer device is at least partially integratable into cover section for analysis of the sensor signals, and electrically connectable to a corresponding circuit device of the sensor section.

Abstract: A sensor unit to detect a falling event that includes a gyroscope attached to a monitored person, a micro-controller communicatively coupled to the gyroscope, and a memory communicatively coupled to receive and to store angular velocity data with a correlated time. The gyroscope senses an angular velocity of the monitored person and outputs the angular velocity data based on the sensed angular velocity. The micro-controller receives the angular velocity data and recognizes falling-pattern data in the angular velocity data.

Abstract: A sensor unit to detect a stillness event, the sensor unit including a gyroscope attached to a monitored person, a micro-controller communicatively coupled to the gyroscope, and a memory communicatively coupled to receive and to store the angular velocity data with a correlated time. The gyroscope senses an angular velocity of the monitored person and outputs angular velocity data based on the sensed angular velocity. The micro-controller receives the angular velocity data and recognizes a quiescence-pattern data in the angular velocity data.

Abstract: The present invention provides the stress detection method for force sensor device with multiple axis sensor device and force sensor device employing this method, whose installation angle is arbitrary. The stress detection method includes, first and second force sensors whose detection axes are orthogonal to each other. When the detection axis of first force sensor forms angle ? with direction of detected stress Ax, and the stress component of direction perpendicular to direction of the detected stress Ax is Az, output Apx of the axis direction of first force sensor is found as Apx=?x (Ax×cos ?+Az×sin ?), and output Apz of the axis direction of the second force sensor is found as Apz=?z (Ax×sin ?+Az×cos ?), and, when ?x and ?z are detection sensitivity coefficients of first and second force sensors respectively, the detection sensitivity coefficient ?z of second force sensor is set as ?z=?x tan ?, and the detected stress Ax is found as Ax=(Apx?Apz)/?x(cos ??tan ?×sin ?).

Abstract: A gyroscope and temperature sensor are formed on a single chip using SOI-MEMS technology. The temperature sensor has an array of resistors to accurately detect the temperature of the gyroscope in temperatures and conditions that can range from extreme heat to extreme cold. The positioning of the gyroscope and temperature sensor on the same chip allow for extremely accurate real-time feedback of the gyroscope's temperature for utilization by a control system.

Abstract: A yaw-rate sensor having a resonant driving frequency and a resonant Coriolis frequency. In addition, the yaw-rate sensor has at least one operating voltage, of which the resonant Coriolis frequency is a function. The resonant Coriolis frequency is adjusted to the resonant driving frequency with the aid of an adjustment voltage. A change in the resonant Coriolis frequency as a result of a change in the operating voltage may be compensated for, in that a suitably changed adjusting voltage may be produced from a compensation circuit.

Abstract: Capacitive bulk acoustic wave x, y and z-axes gyroscopes implemented on (100) and (111) silicon substrates are disclosed. Exemplary gyroscopes comprise a handle substrate, a bulk acoustic wave resonator element supported by the handle substrate, and a plurality of electrodes surrounding and separated from the resonator element by very small capacitive gaps. The electrodes can excite and detect at least two degenerate bulk acoustic wave resonant modes in the resonator. Advantages include reduced size; higher Q, which improves noise and bias stability; larger bandwidth, and improved shock resistance. In addition, the high Q is maintained in atmospheric or near-atmospheric pressure which reduces the cost and complexity of the wafer-scale packaging of the gyroscope.

Abstract: A method for making an angular velocity sensor having two masses which are laterally disposed in an X-Y plane and indirectly connected to a frame is provided. The two masses are linked together by a linkage such that they necessarily move in opposite directions along Z. Angular velocity of the sensor about the Y axis can be sensed by driving the two masses into Z-directed antiphase oscillation and measuring the angular oscillation amplitude thereby imparted to the frame.

Abstract: In a method for determining the zero-point error of a Coriolis gyro, the resonator of the Coriolis gyro has a disturbance force applied to it such that a change in the stimulation oscillation of the resonator is brought about. A change in the read oscillation of the resonator, caused by a partial component of the disturbance force, is extracted from a read signal which represents the read oscillation of the resonator as a measure of the zero-point error.

Abstract: A method for determination of the zero error of a Coriolis gyro. Appropriate disturbance forces are applied to the resonator of the Coriolis gyro such that at least one natural oscillation of the resonator is stimulated that differs from the stimulating and read oscillations. A change in a read signal which represents the read oscillation and results from the stimulation of the at least one natural oscillation is determined as a measure of the zero error.

Abstract: Method for fabricating a gyroscope including: fabricating a SMS wafer where a first wafer, a metal film, and a second wafer are sequentially stacked; forming a cantilever or a bridge shaped-structure on the relevant portion of the first wafer through the photolithography process; attaching to the surface of the first wafer, a first cap made of glass and having a predetermined space for sealing the movable structure in a vacuum state; separating and removing the metal film and the second wafer from the first wafer; and attaching to the backside of the first wafer, the second cap which is structurally and materially symmetric to the first cap. The SMS wafer is fabricated by depositing the metal film on the second wafer and bonding the first wafer on the metal film using metal paste or material of polymer series. With lower material costs, improvements in performance and characteristics can be achieved.

Abstract: Inertial measurement system and method in which a base is rotated about an input axis in accordance with a rotation to be measured, rotation about the input axis is sensed with one or more angular rate sensors, fixed bias offset is cancelled by dithering the sensors about an axis perpendicular to their sensing axes to vary the orientation of the sensing axes relative to the base in an oscillatory manner, and signals from the sensors are demodulated at the dithering frequency.

Abstract: A micro-gyroscope (10) having closed loop output operation by a control voltage (Vty), that is demodulated by a drive axis (x-axis) signal Vthx of the sense electrodes (S1, S2), providing Coriolis torque rebalance to prevent displacement of the micro-gyroscope (10) on the output axis (y-axis) Vthy˜0. Closed loop drive axis torque, Vtx maintains a constant drive axis amplitude signal, Vthx. The present invention provides independent alignment and tuning of the micro-gyroscope by using separate electrodes and electrostatic bias voltages to adjust alignment and tuning. A quadrature amplitude signal, or cross-axis transfer function peak amplitude is used to detect misalignment that is corrected to zero by an electrostatic bias voltage adjustment. The cross-axis transfer function is either Vthy/Vty or Vtnx/Vtx.

Abstract: Methods and apparatus are provided forming a plurality of semiconductor devices on a single substrate, and sealing two or more of the devices at different pressures. First and second semiconductor devices, each having a cavity formed therein, are formed on the same substrate. The cavity in the first device is sealed at a first pressure, and the cavity in the second device is sealed at a second pressure.

Abstract: Angular rate sensor and method in which the parameters of a circuit which provides drive signals and processes signals from a sensing element are configured electronically by a programmable memory. Being configured in this manner, the circuit is extremely versatile and can be used with different types of sensing elements.

Abstract: The present invention discloses a resonator gyroscope comprising a resonator including two bodies, each with a center of mass and transverse inertia symmetry about an axis that are substantially coincident and each supported by one or more elastic elements and wherein the bodies together forming two differential rocking modes of vibration transverse to the axis with substantially equal frequencies and wherein the two bodies transfer substantially no net momentum to the baseplate when the resonator is excited. The gyroscope further includes a baseplate affixed to the resonator by the one or more elastic elements.

Abstract: A flexible substrate (110) having flexibility and a fixed substrate (120) disposed so as to oppose it are supported at their peripheral portions by a sensor casing (140). An oscillator (130) is fixed on the lower surface of the flexible substrate. Five lower electrode layers (F1 to F5: F1 and F2 are disposed at front and back of F5) are formed on the upper surface of the flexible substrate. Five upper electrode layers (E1 to E5) are formed on the lower surface of the fixed substrate so as to oppose the lower electrodes. In the case of detecting an angular velocity ?x about the X-axis, an a.c. voltage is applied across a predetermined pair of opposite electrode layers (E5, F5) to allow the oscillator to undergo oscillation Uz in the Z-axis direction. Thus, a Coriolis force Fy proportional to the angular velocity ?x is applied to the oscillator in the Y-axis. By this Coriolis force Fy, the oscillator is caused to undergo displacement in the Y-axis direction.

Abstract: A sensor is fabricated with micron feature sizes capable of simultaneously measuring absolute angles of rotation and angular rotational rates. The measurements are made directly from the position and velocity of the device without the need for electronic integration or differentiation. The device measures angle directly, avoiding the integration of electronic errors and allowing for higher performance in attitude measurement. These performance improvements and flexibility in usage allow for long term attitude sensing applications such as implantable prosthetics, micro-vehicle navigation, structural health monitoring, and long range smart munitions. Through the fabrication of the device using lithographic methods, the device can be made small and in large qualities, resulting in low costs and low power consumption.

Abstract: Devices and methods for reducing rate bias errors and scale factor errors in a MEMS gyroscope are disclosed. A MEMS actuator device in accordance with an illustrative embodiment of the present invention can include at least one substrate including one or more horizontal drive electrodes, and a movable electrode spaced vertically from and adjacent to the one or more horizontal drive electrodes. The horizontal drive electrodes and/or movable electrode can be configured to eliminate or reduce rate bias and scale factor errors resulting from the displacement of the movable electrode in the direction of a sense axis of the device.

Abstract: The present invention discloses a resonator gyroscope comprising a vibrationally isolated resonator including a proof mass, a counterbalancing plate having an extensive planar region, and one or more flexures interconnecting the proof mass and counterbalancing plate. A baseplate is affixed to the resonator by the one or more flexures and sense and drive electrodes are affixed to the baseplate proximate to the extensive planar region of the counterbalancing plate for exciting the resonator and sensing movement of the gyroscope. The isolated resonator transfers substantially no net momentum to the baseplate when the resonator is excited.

Abstract: An inertial sensor has an interior filled with a relatively low viscosity fill gas. To that end, the inertial sensor has a housing forming the noted interior, and a movable component within the interior. The inertial sensor also has the noted fill gas within the interior. The fill gas has a viscosity that is less than the viscosity of nitrogen under like conditions. For example, when subjected to the same temperatures and pressures, the fill gas has a viscosity that is less than the viscosity of nitrogen.

Abstract: By applying a first value of voltage to a first side of a MEMS gyroscope and applying a second value of voltage to a second side of the MEMS gyroscope, the start time of the MEMS gyroscope may be improved. The first and second value of voltage may be provided by a bias power source, such as a battery or a super capacitor. The first value of voltage may be substantially equal in magnitude to and opposite in polarity to the second value of voltage. The bias power source may also be applied to drive electronics connected to the MEMS gyroscope. The bias power source may prevent amplifiers within the drive electronics from saturating during the start time.

Abstract: A vertical MEMS gyroscope by horizontal driving includes a substrate, a support layer fixed on an upper surface of an area of the substrate, a driving structure floating above the substrate and having a portion fixed to an upper surface of the support layer and another portion in parallel with the fixed portion, the driving structure having a predetermined area capable of vibrating in a predetermined direction parallel to the substrate, a detecting structure fixed to the driving structure on a same plane as the driving structure, and having a predetermined area capable of vibrating in a vertical direction with respect to the substrate, a cap wafer bonded with the substrate positioned above the driving structure and the detecting structure, and a fixed vertical displacement detection electrode formed at a predetermined location of an underside of the cap wafer, for detecting displacement of the detecting structure in the vertical direction.

Abstract: An angular velocity sensor for detecting an angular velocity component includes an oscillator having mass, a sensor casing for accommodating the oscillator therewithin, a flexible member for connecting the oscillator to the sensor casing so that the oscillator can be moved with respect to the sensor casing, and capacitance elements including a first electrode provided on a surface of the oscillator and a second electrode provided on a surface of a fixed member fixed to the sensor casing.

Abstract: A method for making an angular velocity sensor having two masses which are laterally disposed in an X-Y plane and indirectly connected to a frame provided. The two masses are linked together by a linkage such that they necessarily move in opposite directions along Z. Angular velocity of the sensor about the Y axis can be sensed by driving the two masses into Z-directed antiphase oscillation and measuring the angular oscillation amplitude thereby imparted to the frame. In a preferred embodiment, the angular velocity sensor is fabricated from a bulk MEMS gyroscope wafer, a cap wafer and a reference wafer. In a further preferred embodiment, this assembly wafers provides a hermetic barrier between the masses and an ambient environment.

Abstract: Due to restrictive tolerancing, structural imperfections that reduce performance of fabricated micro gyroscopes are typical. While feedback control is normally used to compensate for these imperfections, there are limitations to how large of errors for which this strategy can compensate without interfering with the performance of the sensor. A multi stage control architecture comprising in situ self-diagnostic capabilities, electronic “trimming” of errors, and feedback control allows for the compensation of all magnitudes of errors without interfering with the performance of the device. The self-diagnostic capabilities include an algorithm for determining structural imperfections based on the dynamic response of the system. The feedforward portion of the control is used to “trim” large imperfections, while the feedback portion compensates for the remaining non-idealities and small perturbations. A control architecture is shown in a gyroscope using nonlinear electrostatic parallel plate actuation.

Abstract: A method for extracting components from signals in an electronic sensor (50) having a sensing element (52). The sensing element (52) generates a first signal (60) and a second signal (62). The method comprises the steps of: receiving the first signal (60) from the sensing element (52), the first signal (60) having a frequency at an event; sampling the second signal (62) from the sensing element (52) based on the frequency of the event, the second signal (62) having a plurality of components, one of the plurality of components being a first component of interest (112, 114); generating a synchronized second signal (100) in a time domain, the second signal (62) having the plurality of components; generating complex data (110) in a frequency domain from the synchronized second signal (100) in the time domain; determining the first component of interest (112, 114) from the complex data (110); and normalizing the first component of interest (112, 114) using amplitude information from the first signal (60).

Abstract: An inertial sensor includes a single sense element disposed upon a silicon wafer. The sense element is electrically connected to a plurality of signal conditioning circuits that generate output signals in different ranges. Each signal conditioning circuit has an output that is electrically connected to an associated control device.

Abstract: A sensor for use in an interactive electronic device. The sensor comprises a base member having at least one recess formed therein which is partially defined by a peripheral wall thereof. Disposed within the peripheral wall of the base member is at least one switch. Also disposed within the recess is a trigger ball which is freely movable about the peripheral wall of the base member. The sensor is operative to generate at least two different states corresponding to respective positions of the sensor relative to a reference plane. The movement of the sensor relative to the reference plane facilitates the movement of the trigger ball within the recess, with one state being generated when the trigger ball is in contact with the switch and another state being generated when the trigger ball is not in contact with the switch.

Abstract: A micro-mirror element includes a micro-mirror substrate, a wiring substrate and an electroconductive spacer disposed between the two substrates. The micro-mirror substrate is formed integral with a frame, a moving portion having a mirror portion, and a torsion bar connecting the frame to the moving portion. The wiring substrate is provided with a wiring pattern. The electroconductive spacer separates the micro-mirror substrate from the wiring substrate and also electrically connects the frame to the wiring pattern. The wiring substrate has a surface that faces the micro-mirror substrate. A detector is provided on this surface for detecting the pivot angle of the mirror portion.

Abstract: The invention is to provide a vibratory double-axially sensing micro-gyroscope, which includes a base, on center of which a supporting hub is arranged, and plural suspending arms are extended outwardly with equal altitude and in radial direction from the supporting hub and, at the outside end of the suspending arm, a platform is formed, and a capacitance sensing electrode or a static-electricity driving electrode is plated respectively at each side of the platform top, below which a static-electricity driving electrode or a capacitance sensing electrode is arranged; take a preferred embodiment of the present invention for example, if the capacitance sensing electrode is arranged at top of the platform and the static-electricity driving electrode is arranged below the platform, then the suspending arm and the platform will vibrate vertically by the attraction of the static-electricity when applying driving voltage, and the vibratory phase difference between two adjacent suspending arms and the platform is 180

Abstract: System and method for measuring force-dependent gyroscopic sensitivity. A force-effect model of the effects of acceleration on the output of a gyro triad is determined. Rotation sequences are then devised to permit excitation and observation of force-effect model parameters in order to provide calibration information for these parameters. A state diagram containing the gyro triad force-effect model parameters is derived from the force-effect model, where moving from one position in the state diagram to another position indicates the gyro triad error which would occur in rotating the gyro triad according to a corresponding motion. Searching for all possible closed loop paths achievable through the state diagram, by a multiple-axes rate table with a specified number of rotations, to separate gyro triad error calibration from the accelerometer calibration.

Abstract: An accelerometer system includes a rigid plate system coupled to an inertial platform. A first flexure plate defines a first flex axis and is adjacent to the rigid plate system a first distance from the spin axis. The first flexure plate generates a first frequency signal in response to acceleration of the first flexure plate. A second flexure plate defines a second flex axis and is adjacent to the rigid plate system a second distance from the spin axis. The second flexure plate generates a second frequency signal in response to acceleration of the second flexure plate. A controller including receives the first frequency signal and the second frequency signal and generates an angular acceleration signal from a difference of the first frequency signal and the second frequency signal. The controller also generates a linear acceleration signal in response to an average of the first frequency signal and the second frequency signal.

Abstract: Disclosed is an apparatus for counting the rotation frequency of a numeral wheel of a meter to be used for a remote metering system. A light reflection tape is coated on one of low placed numeral wheels. A light sensor unit has an opaque case formed with first and second holes in which an infrared ray emitter and an infrared ray sensor are located, respectively. The light sensor unit is fixedly mounted on the ceiling of a rectangular shaped housing which is detachably coupled with a meter to cover the front of the meter. A portion of the housing over numeral wheels and a front plate of the meter is transparent. The transparent portion of the housing has an infrared ray rejection function to prevent infrared rays from entering into the housing. In place of employing such housing, a light shield may be used to shield a space between the light sensor unit and the light reflection tape coated numeral wheel from outer light.

Abstract: An angular velocity sensor for detecting an angular velocity component includes an oscillator having mass, a sensor casing for accommodating the oscillator therewithin, a flexible member for connecting the oscillator to the sensor casing so that the oscillator can be moved with respect to the sensor casing, and capacitance elements including a first electrode provided on a surface of the oscillator and a second electrode provided on a surface of a fixed member fixed to the sensor casing.

Abstract: A tuning fork gyroscope typically including at least one proof mass with an upper sense plate disposed above the proof mass and a lower sense plate disposed below the proof mass and means for sensing changes in the nominal gaps between the sense plate and the proof mass and for outputting a signal indicative of the gyroscope angular rate.

Abstract: A gyroscope that may include various sources of error, with those sources of error each being dependent upon a different parameter, is associated with a simulation or “model” of the gyroscope which is typically a computer simulation. The computer simulation is provided with errors which can be adjusted to be identical with the errors present in the real gyroscope. An arrangement is provided to adjust the errors in the model of the gyroscope to be identical with the errors in the real gyroscope, that arrangement including Kalman filters which receive signals generated by subtracting the outputs of the real gyroscope and the model gyroscope, while simultaneously varying the various inputs to the real gyroscope. The Kalman filters also generate a signal which is an estimate of the angular rotation being sensed by the real gyroscope.

Abstract: An angular velocity sensor is disclosed having a sensing element and a pair of driven mass drive elements. The driven mass drive elements have a support structure which defines at least one vibrational node. the driven mass drive element drive elements are coupled to the sensing element at the node so as to allow the driven mass drive elements to oscillate about an axis to generate Coriolis forces, which are measured by the sensing element.

Abstract: A vertical MEMS gyroscope by horizontal driving includes a substrate, a support layer fixed on an upper surface of an area of the substrate, a driving structure floating above the substrate and having a portion fixed to the upper surface of the support layer and another portion in parallel with the fixed portion, the driving structure having a predetermined area capable of vibrating in a predetermined direction parallel to the substrate, a detection structure fixed to the driving structure on a same plane as the driving structure, and having a predetermined area capable of vibrating in a vertical direction with respect to the substrate, a cap wafer bonded with the substrate positioned above the driving structure and the detection structure, and a fixed vertical displacement detection electrode formed at a predetermined location of an underside of the cap wafer, for detecting displacement of the detection structure in the vertical direction.

Abstract: An angular rate sensing system suitable for a micromechanical flying insect (MFI) device. The system includes a rod, or haltere, that is moved in a plane by a piezoelectric actuator. Bending of the haltere due to angular movement of a body onto which the haltere is coupled is sensed with a resistive strain gage. In a first embodiment the haltere is actuated (i.e., made to beat or sweep) by simple coupling to an actuator. In a second embodiment, a four-bar structure is used to amplify the motion of a piezoelectric bender to cause haltere beating. Another embodiment achieves haltere beating by parasitic transmission of vibrations of the MFI body to the base of the haltere.

Abstract: A resonant element including: a vibrating body vibratable in orthogonal X- and Z-directions; exciting means for causing the vibrating body to be subjected to an excitation vibration in the X-direction; excitation deflection detecting means for detecting the deflection of the vibrating body in the Z-direction during the excitation vibration thereof in the X-direction; and excitation deflection inhibiting means for inhibiting the deflection of the vibrating body in the Z-direction.

Abstract: A specifically-reactive sample-collecting and testing device possessing a cavity or cavities each having a dimension small enough to enable sample liquid to be drawn into the cavity by capillary action, wherein a surface of the cavity carries an immobilized reagent appropriate to the test to be carried out in the device, and wherein said surface is a surface of a transparent solid plate to act as a light-transmissive waveguide and forming a wall of the cavity, said plate having an edge which is substantially optically smooth and transverse to the plane of the plate.