Abstract: A frequency modulation MEMS triaxial gyroscope, having two mobile masses; a first and a second driving body coupled to the mobile masses through elastic elements rigid in a first direction and compliant in a second direction transverse to the first direction; and a third and a fourth driving body coupled to the mobile masses through elastic elements rigid in the second direction and compliant in the first direction. A first and a second driving element are coupled to the first and second driving bodies for causing the mobile masses to translate in the first direction in phase opposition. A third and a fourth driving element are coupled to the third and fourth driving bodies for causing the mobile masses to translate in the second direction and in phase opposition. An out-of-plane driving element is coupled to the first and second mobile masses for causing a translation in a third direction, in phase opposition.

Abstract: The Coaxial Angular Velocity Sensor System is an electronic sensor, which processes and supplies the output signal of the inertial angular velocity with high accuracy and great reliability. The device consists of the main components: angular velocity sensor, analog-digital converter, microcontroller, temperature sensor, power source, mechanical anti-noise-proof chassis. The device's microprocessor comes with a signal processing algorithm that helps increase the accuracy of the device's output. Because of its compact size, high precision, and low cost, the device is used in high precision devices such as UAV cameras, or in life applications such as self-balancing vehicles.

Abstract: The present invention relates to capacitive micromechanical accelerometers, and in particular to acceleration sensors with movable rotors which may rotate out of a substrate plane when the accelerometer undergoes movement with an acceleration component perpendicular to the substrate plane. The capacitive micromechanical accelerometer includes additional damping springs to reduce unwanted movement of the rotor in the substrate plane, thereby reducing the parasitic capacitance that results from motion of the rotor in the substrate plane. The damping springs are vertically recessed with respect to other components of the accelerometer in order to minimise the effect of the damping springs on movement of the rotor out of the substrate plane.

Abstract: The vibrator device includes: a base; a circuit element disposed on the base; a vibrating element disposed to at least partially overlap the circuit element in a plan view; and a support substrate that is disposed between the circuit element and the vibrating element and supports the vibrating element. In addition, the vibrating element has a frequency adjustment portion that performs frequency adjustment by removing at least a part of the vibrating element, and the support substrate includes a base portion that supports the vibrating element, a support portion that supports the base portion, a beam portion that couples the base portion the support portion, and a shielding portion that is connected to the beam portion, overlaps the frequency adjustment portion in a plan view, and has light shielding properties.

Abstract: A physical quantity detection circuit includes a detection signal generation circuit that generates a detection signal according to a physical quantity based on an output signal of a physical quantity detection element that detects the physical quantity, an analog/digital conversion circuit that converts the detection signal into a digital signal, a reference voltage generation circuit that generates a reference voltage supplied to the analog/digital conversion circuit, and a failure diagnosis circuit that performs a failure diagnosis of the reference voltage generation circuit by monitoring the reference voltage and outputs a failure diagnosis signal indicating a result of the failure diagnosis, in which the failure diagnosis circuit performs the failure diagnosis at a predetermined timing different from a timing when the reference voltage varies temporarily according to an operation of the analog/digital conversion circuit.

Abstract: A gyroscope includes drive portions, lever arms, and proof masses located in a device plane. The lever arms are caused to rotate about an anchoring point based on anti-phase movement of the drive portions along a first axis in the device plane, and are coupled to the proof masses to cause the proof masses to move in anti-phase along an axis perpendicular to the first axis in the device plane. In response to a Coriolis force applied to the proof masses, the lever arm rotates out of plane and the proof masses move relative to sense electrodes. The movement of the proof masses with respect to the sense electrodes is used to measure angular velocity.

Abstract: Single-axis teeter-totter accelerometers having a plurality of anchors are disclosed. The plurality of anchors may be arranged about a rotation axis of the teeter-totter proof mass. Each of the plurality of anchors may be coupled to the proof mass by two torsional springs each extending along the rotation axis. The plurality of anchors allows an increased number of torsional springs to be coupled to the proof mass and thus greater torsional stiffness for the proof mass may be achieved. Due to the higher torsional stiffness, the disclosed single-axis teeter-totter accelerometers may be deployed in high-frequency environments where such increased torsional stiffness is required, for example, around 20 kHz and above.

Abstract: The accelerometric sensor has a suspended region, mobile with respect to a supporting structure, and a sensing assembly coupled to the suspended region and configured to detect a movement of the suspended region with respect to the supporting structure. The suspended region has a geometry variable between at least two configurations associated with respective centroids, different from each other. The suspended region is formed by a first region rotatably anchored to the supporting structure and by a second region coupled to the first region through elastic connection elements configured to allow a relative movement of the second region with respect to the first region. A driving assembly is coupled to the second region so as to control the relative movement of the latter with respect to the first region.

Abstract: A processing mark that is thinned or removed in a thickness direction of a vibration arm is formed at a weight provided at a drive vibration arm of a vibration element, and including a pair of weight ends aligned in an extending direction of the vibration arm. The processing mark includes a first processing end and a second processing end aligned in the extending direction of the vibration arm, the first processing end overlaps one weight end of the weight in plan view in the extending direction of the vibration arm, and a width of the first processing end is smaller than a width of the second processing end.

Abstract: A vibration gyroscope includes: a mass part supported to be displaceable in a first direction and a second direction; an exciter vibrating the mass part in the first direction; and a detector detecting a displacement amount of the mass part in the second direction. The first direction and the second direction are orthogonal to each other. A resonance frequency of the mass part in the first direction coincides with a resonance frequency of the mass part in the second direction. A Q-factor of vibration of the mass part in the second direction is smaller than a Q-factor of vibration of the mass part in the first direction.

Abstract: A stress isolating interposer includes: an outer pad; an inner pad configured to accommodate a positional sensor is mounted; and a stress isolating structure coupling the outer pad and the inner pad to each other. The outer pad, the stress isolating structure, and the inner pad are a monolithic structure.

Abstract: A device includes a substrate, a first electrode formed on the substrate and a structural layer formed on the substrate. The structural layer includes a movable mass and a fixed portion, the movable mass being suspended above the substrate and the first electrode being interposed between the substrate and the movable mass. A second electrode is spaced apart from an upper surface of the movable mass by a gap and an anchor couples the second electrode to the fixed portion of the structural layer. A method entails integrating formation of the second electrode into a wafer process flow in which the first electrode and the structural layer are formed.

Abstract: A vibration energy harvester includes: a fixed electrode unit having a plurality of comb-tooth electrodes; a movable electrode unit having a plurality of comb-tooth electrodes; a weight fixed to the movable electrode unit; and an adjusting weight mounting structure capable of mounting an adjusting weight for additionally adjusting a mass of the weight.

Abstract: The present invention provides a high-accuracy low-noise MEMS accelerometer by using a larger, single proof mass to measure acceleration along two orthogonal axes. A novel arrangement of electrodes passively prevents cross axis error in the acceleration measurements. Novel arrangements of springs and a novel proof mass layout provide further noise reduction.

Abstract: The MEMS gyroscope has a mobile mass carried by a supporting structure to move in a driving direction and in a first sensing direction, perpendicular to each other. A driving structure governs movement of the mobile mass in the driving direction at a driving frequency. A movement sensing structure is coupled to the mobile mass and detects the movement of the mobile mass in the sensing direction. A quadrature-injection structure is coupled to the mobile mass and causes a first and a second movement of the mobile mass in the sensing direction in a first calibration half-period and, respectively, a second calibration half-period. The movement-sensing structure supplies a sensing signal having an amplitude switching between a first and a second value that depend upon the movement of the mobile mass as a result of an external angular velocity and of the first and second quadrature movements.

Abstract: A gyroscope assembly includes a sense proof mass and a compensation proof mass. The sense proof mass has a sense frequency response in a sense dimension and is configured to move in a drive dimension in response to a drive signal, and to move in the sense dimension in response to experiencing an angular velocity about a sense input axis while moving in the drive dimension. And the compensation proof mass has, in the sense dimension, a compensation frequency response that is related to the sense frequency response.

Abstract: The present invention relates to a capacitive MEMS gyroscope with drive-signal induced offset cancelling features. In a MEMS gyroscope of the type including force feedback circuitry, the drive signal is modulated according to a known modulation scheme or frequency. The modulation scheme/frequency of the drive signal is used by offset cancelling circuitry to determine the offset in the rate signal caused by the drive signal. The determined offset is subsequently removed from the rate signal.

Abstract: An oscillator includes a resonator, sustaining circuit and detector circuit. The sustaining circuit receives a sense signal indicative of mechanically resonant motion of the resonator generates an amplified output signal in response. The detector circuit asserts, at a predetermined phase of the amplified output signal, one or more control signals that enable an offset-reducing operation with respect to the sustaining amplifier circuit.

Abstract: A multi-axis MEMS gyroscope includes a micromechanical detection structure having a substrate, a driving-mass arrangement, a driven-mass arrangement with a central window, and a sensing-mass arrangement which undergoes sensing movements in the presence of angular velocities about a first horizontal axis and a second horizontal axis. A sensing-electrode arrangement is fixed with respect to the substrate and is set underneath the sensing-mass arrangement. An anchorage assembly is set within the central window for constraining the driven-mass arrangement to the substrate at anchorage elements. The anchorage assembly includes a rigid structure suspended above the substrate that is elastically coupled to the driven mass by elastic connection elements at a central portion, and is coupled to the anchorage elements by elastic decoupling elements at end portions thereof.

Abstract: Provided is a vibrator device including a vibrator structure body. When the A axis, the B axis, and the C axis are three axes orthogonal to each other, the vibrator structure body includes a vibrator element and a support substrate that is aligned with the vibrator element along the C axis. The vibrator element includes vibrating arms configured to flexurally vibrate along a plane parallel to the A axis and the B axis and along the A axis. The support substrate includes a base that supports the vibrator element, a support that supports the base, and a beam that couples the base and the support. A relationship f0<f1 is satisfied in which f0 is a resonance frequency of a vibration of the vibrator structure body along the B axis and f1 is a drive frequency of the vibrator element.

Abstract: There is provided a dual-output microelectromechanical system (MEMS) resonator. The MEMS resonator can be operated selectively and concurrently in an in-plane mode of vibration and an out-of-plane mode of vibration to obtain respectively a first electrical signal having a first frequency, and a second electrical signal having a second frequency being less than the first frequency. The first and second electrical signals are mixed to obtain a third electrical signal having a third frequency, where the third frequency is proportional to a temperature of the MEMS resonator. The temperature is determined based on the third frequency. Values of the first and second frequencies can be adjusted based on the determined temperature to compensate for frequency deviations due to temperature deviations. There is also provided methods and systems for determining the temperature of the dual-output MEMS, for compensating the frequency, and a method of manufacturing the dual-output MEMS.

Abstract: A vibrator device includes a vibrator element, a base, and a support configured to support the vibrator element with respect to the base. The support includes a frame shaped like a frame, a base mount disposed outside the frame, and fixed to the base, an element holder which is disposed inside the frame, and on which the vibrator element is mounted, a pair of first beams which extend along a first direction from the element holder, and couple the element holder and the frame to each other, and a pair of second beams which extend along a second direction from the frame, and couple the frame and the base mount to each other, and W12/L1<30, in which a length in the first direction of the first beam is L1 (?m), and a width in a direction perpendicular to the first direction of the first beam is W1 (?m).

Abstract: An acceleration sensing structure includes a frame, a proof mass, a gimbal and at least two outer flexible arms. The proof mass is suspended from the frame and has a first thickness. The proof mass is surrounded by and connected to the gimbal. The gimbal has a second thickness. The at least two outer flexible arms are connected between the gimbal and the frame, and the at least two outer flexible arms are arranged symmetrically. The second thickness is larger than or equal to one-half of the first thickness and is smaller than or equal to the first thickness, and when the proof mass moves, the at least two outer flexible arms are deformed.

Abstract: A microelectromechanical gyroscope includes: a substrate; a stator sensing structure fixed to the substrate; a first mass elastically constrained to the substrate and movable with respect to the substrate in a first direction; a second mass elastically constrained to the first mass and movable with respect to the first mass in a second direction; and a third mass elastically constrained to the second mass and to the substrate and capacitively coupled to the stator sensing structure, the third mass being movable with respect to the substrate in the second direction and with respect to the second mass in the first direction.

Abstract: The disclosure describes a z-axis gyroscope where a proof mass is suspended from a peripheral suspender and a central suspender. The peripheral suspender forms a truncated triangle around the proof mass, and the central suspender extends through the truncated corner of the triangle formed by the peripheral suspender. The proof mass is driven into a primary oscillation mode by one or more piezoelectric drive transducers located on the peripheral suspender. One or more piezoelectric sense transducers located on the base of the peripheral suspender are configured to detect the secondary oscillation mode of the proof mass.

Abstract: The present invention relates to a circuit arrangement and a method for reading a capacitive vibratory gyroscope with an at least primary mass and at least one secondary mass that is connected to the primary mass, wherein the primary mass is excited to a primary vibration during operation, and wherein the secondary mass is deflected out of a resting position in a direction that is transversal to the primary vibration when the vibratory gyro-scope rotates around a sensitive axis.

Abstract: A hearing assistance system and method are described herein. The system includes a first ear-worn device, a second ear-worn device, and a case. The system is configured to detect a vibration sequence at an IMU and decide whether to pair wireless communication devices of the first and second ear-worn devices based on the vibration sequence detected at the IMU.

Abstract: A micromechanical device that includes a silicon substrate with an overlying oxide layer and with a micromechanical functional layer lying above same, which extend in parallel to a main extension plane, a cavity being formed at least in the micromechanical functional layer and in the oxide layer. An access channel is formed in the oxide layer and/or in the micromechanical functional layer which, starting from the cavity, extends in parallel to the main extension plane and in the process extends in a projection direction, as viewed perpendicularly to the main extension plane, all the way into an access area outside the cavity. A method for manufacturing a micromechanical device is also described.

Abstract: Disclosed is an integrated physiological signal detection sensor, comprising a movable housing member, a fixed housing member, and a sensing unit circuit board. The movable housing member and the fixed housing member are connected to form an internal space therebetween. The sensing unit circuit board is fixedly installed on the fixed housing member within the space. A piezoelectric film is attached to the sensing unit circuit board. A hollowed-out region surrounds the periphery of the piezoelectric film. A protrusion is provided on the movable housing member at a position corresponding to the piezoelectric film. The sensor of the present invention has advantages of simplified sensor installation, improved signal integrity, and simplified wire routing of an electromagnetic shield layer, thereby eliminating errors caused by sensor installation and improving the accuracy of data detection.

Abstract: A signal processing circuit for a gyroscope apparatus is disclosed. The signal processing circuit includes a first electrode and a second electrode pairing with the first electrode. The signal processing circuit, being a negative feedback loop circuit, is configured to be connected with the first electrode and the second electrode and comprises a demodulator configured to convert a current from the first electrode into a voltage and demodulate the converted voltage to output a demodulated signal, an analog-to-digital converter configured to convert the demodulated signal from the demodulator into a digital signal, a proportional-integral-derivative controller that is connected to the analog-to-digital converter, a digital-to-analog converter configured to convert an output signal from the proportional-integral-derivative controller to an analog signal, and a modulator configured to be electrically connected with the second electrode and to be electrically connected with the digital-to-analog converter.

Abstract: A controller for a MEMS gyroscope includes a first portion for generating a drive signal in response to an output from drive capacitors of the MEMS gyroscope, wherein the output signal has a resonant frequency and a phase, a second portion for determining a sampling signal in response to the output, wherein the sampling signal has a frequency that is a multiple of the resonant frequency, and has the phase, a multiplexer for outputting a multiplexed data comprising first data signals from first capacitors and second capacitors of the MEMS gyroscope multiplexed in response to the sampling signal, and a processing portion for reducing the resonant frequency from the multiplexed data.

Abstract: A force sensor includes a frame and an oscillation structure which has arms and can oscillate freely in the frame. The arms are fixed to suspension frame regions and run transverse to one another at least in sections. At least one conductor extends along at least two arms. An AC voltage can be applied to the at least one conductor to excite at least one oscillation mode of the oscillation structure with a resonant frequency using Lorentz force. The force sensor is designed such that the suspension regions are at least partially spatially displaced relative to one another when a force is applied to the frame, that the magnitude of the spatial displacement of the suspension regions depends on the magnitude of the force, and that the spatial displacement of the suspension regions causes detuning of the resonant frequency, the magnitude of which depends on the spatial displacement magnitude.

Abstract: A vibrating structure angular rate sensor comprises a MEMS structure includes a mount, a plurality of supporting structures fixed to the mount, and a vibrating planar ring structure flexibly supported by the plurality of supporting structures to move elastically relative to the mount. At least one primary drive transducer is arranged to cause the ring structure to oscillate in a primary mode at the resonant frequency of the primary mode. At least one primary pick-off transducer arranged to detect oscillation of the ring structure in the primary mode. At least three secondary pick-off transducers are arranged to detect oscillation of the ring structure in a secondary mode induced by Coriolis force when an angular rate is applied around an axis substantially perpendicular to the ring structure. At least one secondary drive transducer is arranged to null the induced oscillation in the secondary mode.

Abstract: A high-temperature miniaturized resonant gyroscope, which comprises a resonator, a circuit board, a piezoelectric element, a supporting base, a shell and a binding post, wherein the resonator is arranged in the shell and connected with the supporting base, the piezoelectric element is connected with the binding post through a metal conductor, and key process points of internal elements of the gyroscope are fixedly connected by high-temperature materials and high-temperature processes. The gyroscope is a small-sized gyroscope capable of working at a high temperature; the present disclosure also provides an inertial navigation system, which comprises a triaxial gyroscope, a triaxial accelerometer and a damper, wherein the gyroscope is fixedly connected with the damper, and the gyroscope adopts the high-temperature resonant gyroscope. A drilling measurement system and a measurement method.

Abstract: A flexure stage with modularized flexure units for convenient manufacturing, assembly and repair is provided. The flexure stage comprises a base, a platform separated from the base, and a plurality of flexure units disposed between the base and the platform. Each flexure unit comprises a first section, a second section, and a third section. The first section is located on the base. The second section is connected with the platform and separated from the first section. The third section is coupled with the first section and the second section through the first bending part and the second bending part respectively wherein the first bending part and the second bending part comprises flexibility in different axial directions.

Abstract: A microelectromechanical system (MEMS) gyroscope includes a driving mass and a driving circuit that operates to drive the driving mass in a mechanical oscillation at a resonant drive frequency. An oscillator generates a system clock that is independent of and asynchronous to the resonant drive frequency. A clock generator circuit outputs a first clock and a second clock that are derived from the system clock. The drive loop of the driving circuit including an analog-to-digital converter (ADC) circuit that is clocked by the first clock and a digital signal processing (DSP) circuit that is clocked by the second clock.

Abstract: A MEMS gyroscope is provided. The MEMS gyroscope includes a weight provided with elastic assemblies at four corners thereof. The elastic assemblies are arranged in one of diagonal directions of the weight. An electronic device is also provided applying the gyroscope of the present invention.

Abstract: This disclosure describes a microelectromechanical multiaxis gyroscope comprising a proof mass quartet, a central suspension arrangement for suspending the proof mass quartet from the central anchor point. The gyroscope also comprises a synchronization frame and a detection mass quartet. One or more lateral corner springs extends to each detection mass from the laterally adjacent proof mass, and one or more transversal corner springs extends to each detection mass from the transversally adjacent proof mass.

Abstract: The subject disclosure provides exemplary 3-axis (e.g., GX, GY, and GZ) linear and angular momentum balanced vibratory rate gyroscope architectures with fully-coupled sense modes. Embodiments can employ balanced drive and/or balanced sense components to reduce induced vibrations and/or part to part coupling. Embodiments can comprise two inner frame gyroscopes for GY sense mode and an outer frame or saddle gyroscope for GX sense mode and drive system coupling, drive shuttles coupled to the two inner frame gyroscopes or outer frame gyroscope, and four GZ proof masses coupled to the inner frame gyroscopes for GZ sense mode. Components can be removed from an exemplary overall architecture to fabricate a single axis or two axis gyroscope and/or can be configured such that a number of proof-masses can be reduced in half from an exemplary overall architecture to fabricate a half-gyroscope. Other embodiments can employ a stress isolation frame to reduce package induced stress.

Abstract: A MEMS vibration element includes: a base unit; a fixed unit fixed to the base unit; a movable unit that is movable relative to the fixed unit; and an elastic support unit that elastically supports the movable unit at the base unit. The elastic support unit is made of a material different from a material of the fixed unit and the movable unit.

Abstract: A magnetic type azimuth/position measurement device is disclosed, comprising: a plurality of coils driven by circuitry, the circuitry and coils configured to selectively generate a uniform magnetic field and an inclined magnetic field in a three-dimensional space; a uniaxial magnetic field sensor configured to measure a strength of a magnetic field formed by the plurality of coils driven by circuitry; and arithmetic operation circuitry configured to receive signals representative of the strength of the magnetic field from the uniaxial magnetic field sensor and calculate a position and an azimuth of the uniaxial magnetic field sensor in the three-dimensional space.

Abstract: An angular velocity sensor includes a piezoelectric body, a drive circuit, and a detection circuit. The piezoelectric body includes a pair of frames, a pair of drive arms, and a pair of detection arms. The pair of frames face each other in a y-axis direction in an orthogonal coordinate system xyz. The pair of drive arms are respectively laid bridging the pair of frames and face each other in an x-axis direction. The pair of detection arms extend from the pair of frames in the y-axis direction at positions between the pair of drive arms in the x-axis direction. The drive circuit applies voltages of mutually reverse phases to the pair of drive arms so that the drive arms vibrate bending to mutually reverse sides in the x-axis direction. The detection circuit detects signals generated due to the bending deformations of the pair of detection arms in a z-axis direction.

Abstract: A secondary sense loop for a MEMS gyroscope comprises a secondary element comprising at least one mechanical resonator, an analog front end circuitry, a digital secondary loop circuitry and an analog back end circuitry. The digital secondary loop circuitry comprises a signal path receiving at its input an analog secondary input signal representing a detection motion of a mechanical resonator and providing at its output an output signal indicating an angular velocity said MEMS gyroscope is subject to, said signal path comprising an analog-to-digital converter configured to digitize the analog secondary input signal into a digitized secondary signal, and a digital force feedback circuitry controlling operation of a closed force feedback loop configured to adjust response function of the secondary sense loop.

Abstract: The power generation efficiency is to be enhanced by converting vibration energy including various direction components into electric energy without waste. A cantilever structure is adopted, in which a first plate-like bridge portion (120) and a second plate-like bridge portion (130) extend in a shape of a letter U from a fixing-portion (110) fixed to the device housing (200) and a weight body (150) is connected to the end. On the upper surface of the cantilever structure, a common lower layer electrode (E00), a layered piezoelectric element (300) and discrete upper layer electrodes (Ex1 to Ez4) are formed. The upper layer electrodes (Ez1 to Ez4) disposed on a center line (Lx, Ly) of each plate-like bridge portion take out charge generated in the piezoelectric element (300) due to deflection caused by the Z-axis direction vibration of the weight body (150).

Abstract: A frequency adjustment method of a vibration element includes adjusting a resonance frequency of the vibration element by irradiating the vibration element, which includes a vibrating arm having a first principal surface and a second principal surface that are in a front and back relationship with each other with an energy ray, to remove a part of the vibrating arm on the first principal surface, and in which an activation amount by the energy ray on the second principal surface of the vibrating arm is smaller than an activation amount by the energy ray on the first principal surface of the vibrating arm.

Abstract: A gyroscope includes a substrate, a first structure, a second structure and a third structure elastically coupled to the substrate and movable along a first axis. The first and second structure are arranged at opposite sides of the third structure with respect to the first axis A driving system is configured to oscillate the first and second structure along the first axis in phase with one another and in phase opposition with the third structure. The first, second and third structure are provided with respective sets of sensing electrodes, configured to be displaced along a second axis perpendicular to the first axis in response to rotations of the substrate about a third axis perpendicular to the first axis and to the second axis.

Abstract: A microelectromechanical z-axis gyroscope which comprises a proof mass system centred around a gyroscope center point. The oscillation of first and second proof mass pairs is synchronized by a substantially circular synchronization element which is centred at the gyroscope center point and comprises four first attachment points. Each proof mass is attached to the nearest first attachment point on the substantially circular synchronization element. The substantially circular synchronization element also comprises two or more second attachment points, and a substantially linear suspender extends tangentially from each second attachment point to an anchor point.

Abstract: A three-axis micro electro mechanical system (MEMS) gyroscope includes a central anchor, a first subsidiary proof mass, a first decoupling structure, a second subsidiary proof mass and a third subsidiary proof mass arranged in order from the inside out. When the first subsidiary proof mass resonates in a driving mode around a third direction, the first subsidiary proof mass approximately moves along the first direction. When the first subsidiary proof mass is subjected to an angular velocity around a second direction, a Coriolis force is generated along the third direction, and the first subsidiary proof mass produces a displacement around the first direction under the effect of the Coriolis force. The axis of the first decoupling structure is also in the first direction.

Abstract: A physical quantity sensor includes: a supporting member; and a sensor element supported by the supporting member, in which the sensor element includes a vibrator element, a drive signal wiring disposed on the vibrator element, and a first detection signal terminal and a second detection signal terminal disposed on the vibrator element, the supporting member includes a substrate on which the sensor element is joined, and a first detection signal wiring and a second detection signal wiring disposed on the substrate, and the first detection signal wiring and the second detection signal wiring respectively include areas that extend along a second axis intersecting with the first axis and that intersect with the drive signal wiring in a plan view as seen in a direction in which the sensor element and the substrate overlap with each other.

Abstract: According to one embodiment, a detector is disclosed. The detector has a mechanism with first and second vibrators which vibrate in first and second directions. Circuits detect output first and second signals conforming to the detected positions of the vibrators. A detection circuit detects second signal using the first signal as a reference of synchronous detection and outputs a detection signal. A filter continues a moving average process on the detection signal for a period set based on the first signal. A controller circuitry controls the mechanism to causes the first vibrator to start vibrating in the first direction in synchronization with a clock signal.