Abstract: A micro-electromechanical systems (MEMS) transducer (100, 700) is adapted to use lateral axis vibration to generate non-planar oscillations in a pair of teeter-totter sense mass structures (120/140, 720/730) in response to rotational movement of the transducer about the rotation axis (170, 770) with sense electrodes connected to add pickups (e.g., 102/107, 802/807) diagonally from the pair of sense mass structures to cancel out signals associated with rotation vibration.

Abstract: A functional element includes a driving portion, a first mass portion which is vibrated along the first direction, a first connection portion which is connected to the first mass portion and can perform a first movement in which the first connection portion contracts and extends along the first direction, a second connection portion which is connected to the first connection portion, extends in a second direction intersecting the first direction, and can perform a second movement in which the second connection portion rotates with the second direction as the axis, and a second mass portion which is connected to the second connection portion.

Abstract: A MEMS type inertial sensor comprising a support structure having at least a first seismic body and a second seismic body connected thereto by resilient means in order to be movable in a suspension plane, transducers for maintaining the seismic bodies in vibration and for determining movements of the seismic bodies in the suspension plane, and a control unit connected to the transducers by electrical conductor means. The transducers comprise at least one electrode secured to the first seismic body and at least one electrode secured to the second seismic body, the two electrodes being arranged to enable relative movements of the seismic bodies relative to each other in the suspension plane to be measured directly.

Abstract: A vibrating body of an angular velocity detection element includes detection beams extending in a cross shape from a central base and external connection beams and internal connection beams connected between adjacent detection beams. The detection beams each include a base end detection beam that is connected to the central base and a central detection beam, a left detection beam and a right detection beam that define three prongs. The central detection beam is connected to the external connection beams on both sides, the left detection beam is connected to the internal connection beam on the left side and the right detection beam is connected to the internal connection beam on the right side. The adjacent external connection beams undergo driven vibration so as to be displaced in directions so as to have mirror relationships with each other with the detection beams interposed between the external connection beams acting as boundaries therebetween.

Abstract: A micro-gyroscope for determining a rate of rotation about a Z-axis includes a substrate and two sensor devices each of which comprises at least one drive mass, at least one anchor, drive elements, at least one sensor mass and sensor elements. The drive mass is mounted linearly displaceably in the direction of an X-axis, and can be driven in an oscillatory manner with respect to the X-axis. The sensor mass is coupled to the drive mass by means of springs. The sensor mass is displaceable in the Y-direction, and sensor elements detects a deflection of the sensor mass in the Y-axis. The two sensor devices are disposed parallel to each other and one above the other in the direction of the Z-axis, and the drive mass in these two sensor devices are coupled to each other by means of a coupling spring.

Abstract: Provided herein is a Coriolis vibratory gyroscope (“CVG”). The CVG includes a first plurality of actuators electrically coupled to the vibratory member and arranged about a drive axis of the CVG and operable to obtain a control signal from the controller and provide a voltage sufficient to cause and maintain the vibratory member to vibrate in a first mode of oscillation; a second plurality of actuators electrically coupled to the vibratory member and arranged about a sense axis of the CVG and operable to detect a voltage based on a second mode of oscillation of the vibratory member caused by a rotation of the CVG about an axis of rotation and to provide a counter-balancing signal sufficient to null the voltage based on the second mode of oscillation, wherein the controller is operable to determine a rate of the rotation of the CVG based, in part, on the counter-balancing signal.

Abstract: An angular velocity sensor includes a fixing section to be fixed to an object, first and second connection beams each having one end connected to the fixing section, first and second double-end-supported beams, first and second driving electrodes to vibrate the supported beams, and first and second sensing electrodes to detect vibrations of the supported beams. The first supported beam has its ends connected to second ends of the first and second connection beams. The first supported beam, the first connection beam, and the second connection beam surround one side surface of the fixing section. The second supported beam has its ends connected to second ends of the first and second connection beams. The second double-end-supported beam, the first connection beam, and the second connection beam surround another side surface of the fixing section opposite the one side surface of the fixing section.

Abstract: One or more vibration plate layers of a diaphragm part are formed by a thin film forming technique. When a resonance frequency in a resonance vibration mode calculated from dimensions of a structure of an angular velocity sensor and an elastic parameter of a material thereof is defined as f kilohertz, a mass of a weight part is defined as M milligrams, a circumference of the diaphragm part is defined as r meters, a stress applied to a piezoelectric layer is defined as ?p pascals, a thickness thereof is defined as tp meters, a stress applied to an n-th layer from the weight part in a vibration plate portion constituted by a plurality of layers including a lower electrode and the vibration plate layers is defined as ?n pascals, and a thickness thereof is defined as tn meters (where n is a natural number), Teff expressed by Teff=r(?ptp+??ntn)/M satisfies {(?0.36f2+210)/33}?Teff?{(0.44f2+210)/33}.

Abstract: A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.

Abstract: A vibratory ring structure is described which comprises a ring body and at least one ring electrode secured thereto, the or each ring electrode extending over a first angular extent and: being attached to the ring body over second angular extent, wherein the first angular extent is greater than the second angular extent.

Abstract: Micro-electro-mechanical-systems (MEMS) sensors and methods for detecting rates of rotation thereof. The MEMS sensor has at least one driving mass that oscillates along the x-axis, and at least one sensing mass coupled to the driving mass so that the sensing and driving masses move relative to each other in the x direction and are coupled for rotation together about the y and/or z axes. At least one anchor spring couples the driving or sensing mass to an anchor secured to a substrate. Rotation of the MEMS sensor is sensed by sensing relative movement between the substrate and sensing mass. During its oscillation, the driving mass generates an imbalance of the driving and sensing masses with respect to the anchor, and Coriolis forces cause the sensing and driving masses to rotate together about the y or z axis when the MEMS sensor rotates about the y or z axis.

Abstract: To suppress variations of a vacuum pressure atmosphere in a physical sensor, a physical sensor in which a sensing part that measures a physical quantity is provided in a vacuum space, includes a sensor part in which a plurality of substrates are stacked, and a cavity substrate 9 having a space and provided on an upper surface side or a lower surface side of the sensor part by bonding, wherein the sensing part communicates with a space of the cavity substrate via a ventilation passage 11a provided in the sensor part.

Abstract: In one embodiment, an apparatus comprises a micromechanical gyroscope and a circuit. The micromechanical gyroscope is configured to be excited in a first mode by a drive signal, and configured to be excited in a second mode by a gyroscopic effect. The circuit is coupled to the micromechanical gyroscope and configured to detect the gyroscopic effect when the micromechanical gyroscope is in the second mode.

Abstract: A yaw rate sensor includes: a first sensor structure having a first oscillating mass and configured to detect a first yaw rate around a first axis of rotation; a second sensor structure having a second oscillating mass and configured to detect second and third yaw rates around second and third axes of rotation, respectively; and a drive structure coupled to the first and second oscillating masses. The first oscillating mass is drivable into a first drive oscillation along a first oscillation direction, and the second oscillating mass is drivable into a second drive oscillation along a second oscillation direction different from the first oscillation direction. The first axis of rotation is perpendicular to the first oscillation direction, and the second and third axes of rotation are perpendicular to the second oscillation direction.

Abstract: A drive loop circuit for a MEMS resonator. The circuit comprises a closed loop circuit to detect and amplify a signal of the MEMS resonator, a phase shifting circuit to phase shift the detected and amplified signal, and a feedback circuit to feed the detected, amplified and phase shifted signal as a feedback signal back to the MEMS resonator. The phase shifting circuit can include a low pass filter of at least 2nd order.

Abstract: An inertial sensor comprising a frame to which at least two seismic bodies are connected by resilient means so as to be movable in a suspension plane, and transducers to keep the seismic bodies vibrating and to determine a relative movement of the seismic bodies relative to one another, characterized in that the seismic bodies have a single shape and a single mass, and in that the seismic bodies comprise interlocking parts such that the seismic bodies are nested inside one another while being movable in the suspension plane relative to the other of the seismic bodies, with the seismic bodies having centers of gravity that coincide with one another. A method for manufacturing such a sensor.

Abstract: Systems and methods for aligning a transfer head assembly with a substrate are disclosed. In an embodiment a pivot mount is used for generating a feedback signal in a closed-loop motion control system. In an embodiment, the pivot mount includes a plurality of spring arms, with each spring arm including a switch-back along an axial length of the spring arm such that a pair of first and second lengths of the spring arm are immediately adjacent the switch-back and are parallel to each other. A first strain sensing element is located at the first length, and a second strain sensing element is located at the second length.

Abstract: Systems and methods for haptics in vibrating environments and devices are disclosed. For example, one described system includes: a haptic output device; a processor coupled to the haptic output device, the processor configured to: determine that a haptic effect should be generated; receive a signal associated with a parasitic vibration; determine a haptic effect based in part on the parasitic vibration; and output a haptic signal associated with the haptic effect to the haptic output device.

Abstract: An angular velocity sensor comprises a mass body part including a first mass body and a second mass body, an internal frame supporting the first mass body and the second mass body, one or more first flexible parts connecting the first mass body or the second mass body to the internal frame, one or more second flexible parts connecting the first mass body or the second mass body to the internal frame, an external frame supporting the internal frame, at least one third flexible part connecting the internal frame to the external frame, and at least one fourth flexible part connecting the internal frame to the external frame. At least one of the second flexible parts is connected to the first mass body in line with the center of gravity of the first mass body. At least one other of the second flexible parts is connected to an eccentric portion of the second mass body.

Abstract: This document discusses, among other things, apparatus and methods for digital automatic gain control for driving a MEMS device, such as a proof mass. In an example, an apparatus can include a driver configured to oscillate a proof mass of a MEMS device, a charge-to-voltage (C2V) converter configured to provide oscillation information of the proof mass, an analog-to-digital converter (ADC) configured to provide a digital representation of the oscillation information, and a digital, automatic gain control circuit to provide oscillation amplitude error information using a comparison of the oscillation information to target amplitude information, and to provide a digital drive command signal using an amplified representation of the oscillation amplitude error information.

Abstract: An embodiment of the invention introduces a method for controlling a touch panel, executed by a micro-controller of a portable computer, which contains at least the following steps. A control signal is outputted to direct a touch panel controller to disable the whole touch panel or a portion thereof before sleep mode is entered.

Abstract: A system can include a MEMS gyroscope having a MEMS resonator overlying a CMOS IC substrate. The CMOS IC substrate can include an AGC loop circuit coupled to the MEMS gyroscope. The AGC loop acts in a way such that generated desired signal amplitude out of the drive signal maintains MEMS resonator velocity at a desired frequency and amplitude. A benefit of the AGC loop is that the charge pump of the HV driver inherently includes a ‘time constant’ for charging up of its output voltage. The system incorporates the Low pass functionality in to the AGC loop without requiring additional circuitry.

Abstract: A MEMS device including a first proof mass, a first magnetized magnetic material disposed partially on a surface of the first proof mass, a first spring anchored to a substrate to support the first proof mass, and a first sensing element coupled to the first proof mass and operable to sense the motion of the first proof mass caused by an ambient acceleration. The MEMS device further includes a second sensing element coupled to the first proof mass and operable to sense the motion of the first proof mass caused by an ambient magnetic field.

Abstract: A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.

Abstract: A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.

Abstract: A MEMS acceleration sensor is provided.

Abstract: A sensor device includes a first sensor element which detects an angular velocity around z axis and a second sensor element which detects an angular velocity around x axis, the relationship fd1>fd2 and fm1<fm2 is satisfied, when the drive frequency of the first sensor element is set to fd1, the drive frequency of the second sensor element is set to fd2, the mistuned frequency of the first sensor element is set to fm1, and the mistuned frequency of the second sensor element is set to fm2.

Abstract: This invention provides a signal processing method of multiple micro-electro-mechanical system devices. The signal processing method includes: providing at least two MEMS devices; applying driving or modulating signals of different frequencies to the MEMS devices such that the MEMS devices generate respective MEMS signals with respective frequencies; and combining the MEMS signals with respective frequencies into one or more multi-frequency signals and outputting the multi-frequency signals, wherein a number of the multi-frequency signals is less than a number of the MEMS signals with respective frequencies. This invention also provides a combo MEMS device integrating two or more MEMS devices and two or more vibration sources.

Abstract: Systems and methods for improving MEMS gyroscope start time are provided. In one embodiment, a circuit board for a MEMS gyroscope system comprises: a proof mass assembly; a proof mass control loop coupled to the proof mass assembly by a first proof mass motion sensor pickup line and a second proof mass motion sensor pickup line, where the proof mass control loop generates a set of drive signals that operate the proof mass assembly using a first capacitive signal from the first proof mass motion sensor pickup line and a second capacitive signal from the second proof mass motion sensor pickup line; and a tunable capacitive coupler connected to at least one of the first or the second proof mass motion sensor pickup lines, where the tunable capacitive coupler varies at least one of the first and second charge signals as a function of the drive signals.

Abstract: A vibrator element includes a pair of first and second drive vibrating arms that extend in opposite directions from a base portion; a first weight that is spaced from a tip of at least one of the first and second drive vibrating arms toward the base portion and is provided in a first region of the at least one of the drive vibrating arms; and a second weight that is provided in a second region that is a region between a tip of the first weight and the tip of the at least one of the drive vibrating arms. When an area of the first region is represented as A1, a mass of the first weight is represented as B1, an area of the second region is represented as A2, and a mass of the second weight is represented as B2, B1/A1>B2/A2 is established.

Abstract: A gyroscope includes a first mass, a second mass, and a drive structure configured to drive each of the first mass and the second mass in a drive mode. The drive structure includes a first portion and a second portion, with the first portion being configured to drive the first mass in a direction along a drive axis and the second portion being configured to drive the second mass in a direction opposite to the first mass along the drive axis. The gyroscope further includes a sense structure configured to sense motion of each of the first mass and the second mass in a sense mode along a direction substantially perpendicular to the drive axis, and a plurality of flexures configured to couple the first portion to the second portion and further configured to decouple the drive mode and the sense mode.

Abstract: A system comprising an integrated multi-axis MEMS inertial sensor architecture. The system can include a MEMS gyroscope having a MEMS resonator and a MEMS accelerometer overlying a CMOS IC substrate. The CMOS IC substrate can include low noise Charge Sense amplifiers to process the sensed signals, programmable gain amplifiers, a demodulator, mixer, an AGC loop circuit coupled to the MEMS gyroscope to drive MEMS resonator. The CMOS IC also includes programmable Quadrature cancellation, Analog and digital phase shifters are implemented in the architecture to ensure quadrature cancellation and demodulation to achieve optimal performance. The AGC loop acts in a way such that generated desired signal amplitude out of the drive signal maintains MEMS resonator velocity at a desired frequency and amplitude while consuming low power. The MEMS gyroscope and accelerometer can be coupled to an input multiplexer configured to operate in a time-multiplexed manner.

Abstract: Embodiments of the subject application provide a method for operating a micro-electro-mechanical system (MEMS) tuning fork gyroscope. The method includes oscillating a voltage on a first sense electrode out-of-plane from and proximate a first side of a first proof mass between a first voltage and a second voltage at a first frequency. The method also includes oscillating a voltage on a second sense electrode out-of-plane from and proximate a second side of the first proof mass between the first voltage and the second voltage at the first frequency and 180 degrees out-of-phase with the voltage on the first sense electrode. The method also includes generating a rate signal corresponding to a rotation rate of the first proof mass by first demodulating an out-of-plane signal from the first proof mass at the first frequency and second demodulating the out-of-plane signal in phase with in-plane motion of the first proof mass.

Abstract: A vibrating gyroscope includes a piezoelectric strip having length and width dimensions. The piezoelectric strip includes a piezoelectric material and carbon nanotubes (CNTs) substantially aligned and polled along the strip's length dimension. A spindle having an axis of rotation is coupled to the piezoelectric strip. The axis of rotation is parallel to the strip's width dimension. A first capacitance sensor is mechanically coupled to the spindle for rotation therewith. The first capacitance sensor is positioned at one of the strip's opposing ends and is spaced apart from one of the strip's opposing faces. A second capacitance sensor is mechanically coupled to the spindle for rotation therewith. The second capacitance sensor is positioned at another of the strip's opposing ends and is spaced apart from another of the strip's opposing faces. A voltage source applies an AC voltage to the piezoelectric strip.

Abstract: The embodiments described herein relate to chemically and mechanically durable glass compositions and glass articles formed from the same. In another embodiment, a glass composition may include from about 70 mol. % to about 80 mol. % SiO2; from about 3 mol. % to about 13 mol. % alkaline earth oxide; X mol. % Al2O3; and Y mol. % alkali oxide. The alkali oxide may include Na2O in an amount greater than about 8 mol. %. A ratio of Y:X may be greater than 1 and the glass composition may be free of boron and compounds of boron. In some embodiments, the glass composition may also be free of phosphorous and compounds of phosphorous. Glass articles formed from the glass composition may have at least a class S3 acid resistance according to DIN 12116, at least a class A2 base resistance according to ISO 695, and a type HGA1 hydrolytic resistance according to ISO 720.

Abstract: A control device comprises a sensor unit, which outputs a measurement signal, which reflects a deviation of an oscillator along a direction of excitation. A controller main unit derives a control signal for an actuator unit from the measurement signal and a harmonic set point signal such that the actuator unit counteracts a deviation of the deflection of the oscillator from a set amplitude of a harmonic resonance oscillation. A controller extension unit estimates actual-phase and actual-amplitude of a residual oscillation of the oscillator and synchronizes the harmonic set point signal with the residual oscillation at a deactivated actuator unit. The residual energy contained in the residual oscillation is used, in order to arrive faster at a defined operation state of the oscillator.

Abstract: An integrated MEMS inertial sensing device can include a MEMS inertial sensor with a drive loop configuration overlying a CMOS IC substrate. The CMOS IC substrate can include an AGC loop circuit coupled to the MEMS inertial sensor. The AGC loop acts in a way such that generated desired signal amplitude out of the drive signal maintains MEMS resonator velocity at a desired frequency and amplitude. A benefit of the AGC loop is that the charge pump of the HV driver inherently includes a ‘time constant’ for charging up of its output voltage. This incorporates the Low pass functionality in to the AGC loop without requiring additional circuitry.

Abstract: A method for operating a Coriolis mass flowmeter that has at least one measuring tube, at least one oscillation generator, at least two oscillation sensors and at least one evaluation unit, wherein the oscillation sensors and/or oscillation generator has at least one coil, wherein the oscillation generator excites the measuring tube to oscillation, wherein the oscillation sensors detect the oscillations of the measuring tube, wherein the temperature of the measuring tube is determined and wherein the evaluation unit processes the detected oscillation signals and determines state variables of the Coriolis mass flowmeter. The electric impedance of the coil of the oscillation generator and/or the electric impedance of at least one coil of the oscillation sensors is determined and the evaluation unit calculates at least one temperature-dependent state variable which is based on the temperature of the measuring tube and which is corrected based upon the determined impedance of the coil.

Abstract: In order to provide a technology capable of suppressing degradation of measurement accuracy due to fluctuation of detection sensitivity of an MEMS by suppressing fluctuation in natural frequency of the MEMS caused by a stress, first, fixed portions 3a to 3d are displaced outward in a y-direction of a semiconductor substrate 2 by deformation of the semiconductor substrate 2. Since a movable body 5 is disposed in a state of floating above the semiconductor substrate 2, it is not affected and displaced by the deformation of the semiconductor substrate 2. Therefore, a tensile stress (+?1) occurs in the beam 4a and a compressive stress (??2) occurs in the beam 4b. At this time, in terms of a spring system made by combining the beam 4a and the beam 4b, increase in spring constant due to the tensile stress acting on the beam 4a and decrease in spring constant due to the compressive stress acting on the beam 4b are offset against each other.

Abstract: A physical quantity sensor has a resonance frequency f1 in same-phase mode and a resonance frequency f3 in same-phase absorptive mode greater than the resonance frequency f1. An absolute value ?f3 is a difference between the resonance frequency f3 in the same-phase absorptive mode and a value that is the product of the resonance frequency f1 in the same-phase mode multiplied by n; an avoidance difference D indicates a degree of deviation of the absolute value ?f3 from the resonance frequency f1 in the same-phase mode. A relation (?f3>n·f1·D) is satisfied, and, simultaneously, the avoidance difference D is provided to be greater than 0%. This can avoid the vibrational excitation by resonance interference from becoming the maximum displacement.

Abstract: An integrated microelectromechanical structure is provided with: a die, having a substrate and a frame, defining inside it a detection region and having a first side extending along a first axis; a driving mass, anchored to the substrate, set in the detection region, and designed to be rotated in a plane with a movement of actuation about a vertical axis; and a first pair and a second pair of first sensing masses, suspended inside the driving mass via elastic supporting elements so as to be fixed with respect thereto in the movement of actuation and so as to perform a detection movement of rotation out of the plane in response to a first angular velocity; wherein the first sensing masses of the first pair and the first sensing masses of the second pair are aligned in respective directions, having non-zero inclinations of opposite sign with respect to the first axis.

Abstract: This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using gyroscopes. Such gyroscopes may include a sense frame, a proof mass disposed outside the sense frame, a pair of anchors and a plurality of drive beams. The plurality of drive beams may be disposed on opposing sides of the sense frame and between the pair of anchors. The drive beams may connect the sense frame to the proof mass. The drive beams may be configured to cause torsional oscillations of the proof mass substantially in a first plane of the drive beams. The sense frame may be substantially decoupled from the drive motions of the proof mass. Such devices may be included in a mobile device, such as a mobile display device.

Abstract: A gyroscopic sensor includes a vibratory gyroscopic sensor element, first and second drive electrodes positioned proximate to the vibratory gyroscopic sensor element, and a drive circuit operatively connected to the first and second drive electrodes. The drive circuit is configured to generate a stepped sinusoidal waveform having a plurality of steps, each step having a predetermined duration and each step having an output level in a plurality of predetermined output levels for the stepped sinusoidal waveform including at least three positive output levels and at least three negative output levels to generate oscillation of the vibratory gyroscopic sensor element at a predetermined frequency.

Abstract: A microelectromechanical device includes: a body; a movable mass, elastically coupled to the body and oscillatable with respect to the body according to a degree of freedom; a frequency detector, configured to detect a current oscillation frequency of the movable mass; and a forcing stage, capacitively coupled to the movable mass and configured to provide energy to the movable mass through forcing signals having a forcing frequency equal to the current oscillation frequency detected by the frequency detector, at least in a first transient operating condition.

Abstract: A microelectromechanical structure, comprises a first element that includes a first element surface, and a second element that includes a second element surface, and an element gap between the first element surface and the second element surface. At least one of the first element and the second element is mobile. One of the first and second element surfaces includes a convex contact surface and the other one of the first and second element surfaces includes a concave contact surface.

Abstract: This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using gyroscopes. Such gyroscopes may include a central anchor, a sense frame disposed around the central anchor, a plurality of sense beams configured for connecting the sense frame to the central anchor and a drive frame disposed around and coupled to the sense frame. The gyroscope may include pairs of drive beams disposed on opposing sides of the sense frame. The gyroscope may include a drive frame suspension for substantially restricting a drive motion of the drive frame to that of a substantially linear displacement along the first axis. The sense frame may be substantially decoupled from drive motions of the drive frame. Such devices may be included in a mobile device, such as a mobile display device.

Abstract: A detection element has: first and second fixed parts; first and second vertical beams each connected at first and second ends to the first and second fixed parts, respectively; a horizontal beam connected at first and second ends to centers of the first and second vertical beams, respectively; and four arms each connected at a first end to the horizontal beam and having a weight formed on a second end. The first vertical beam has a first slit formed nearer the first fixed part with respect to its center, a second slit formed nearer the second fixed part with respect to its center, and a coupling portion between these slits. The second vertical beam has a third slit formed nearer the first fixed part with respect to its center, a fourth slit formed nearer the second fixed part with respect to its center, and a coupling portion between these slits.

Abstract: A gyro element as a vibrator element fulfills the relationship: |fd?fy1|>|fd?fy2|, where fd is a drive vibrational frequency of first through fourth drive vibration arms, fy1 is a y1-mode vibrational frequency of a y1 mode, in which a base section and the first through fourth drive vibration arms vibrate in the same direction along a first direction (a y-axis direction) in which the first drive vibration arm extends, and fy2 is a y2-mode vibrational frequency of a y2 mode in which the base section vibrates along the first direction and the first through fourth drive vibration arms vibrate along the first direction in an opposite direction to a direction in which the base section vibrates.

Abstract: Provided is a sensor device including: a sensor unit converting a voltage of a periodically switched capacitor into a pulse signal by referring to a clock signal to provide the pulse signal as a first sensing signal; and a high-resolution analog to digital converter (ADC) amplifying a period of the first sensing signal 2n times (n is an integer), amplifying a period of the clock signal 2n?1 times, and generating a second sensing signal where a switching time of the capacitor is removed by removing the amplified clock signal from the amplified first sensing signal.

Abstract: A high-performance angular rate detecting device is provided. A driving part including a drive frame and a Coriolis frame is leviated by at least two fixing beams which share a fixed end and are extending in a direction orthogonal to a driving direction, thereby vibrating the driving part. Even when a substrate is deformed by mounting or heat fluctuation, internal stress generated to the fixed beam and a supporting beam is small, thereby maintaining a vibrating state such as resonance frequency and vibration amplitude constant. Therefore, a high-performance angular rate detecting device which is robust to changes in mounting environment can be obtained.