Abstract: A MEMS structure comprises an anchor, a spring, and a seismic mass that is suspended to the anchor via the spring to pivot around an axis of rotation. Errors from unwanted vibration modes are reduced by including in the MEMS structure a spring structure that extends from the seismic mass to the anchor. Said spring structure comprises a side arm that is connected to the seismic mass or the anchor. At least part of the spring structure is formed by a side arm that extends in the spring structure in a direction parallel to the axis of rotation of the seismic mass; and is attached to one end of the spring.

Abstract: A gyroscope includes a first drive mass driven in a first drive motion along a first axis, the first drive motion generating a first sense motion of a first sense mass in response to rotation of the gyroscope. The gyroscope further includes a second drive mass driven in a second drive motion along a second axis that is transverse to the first axis. The second drive motion generates a second sense motion of a second sense mass in response to rotation of the gyroscope. A drive spring system interconnects the two drive masses to couple the first and second drive motions so that a single drive mode can be implemented. The sense motion of each sense mass is along a third axis, where the third axis is transverse to the other axes. The sense motion is translational motion such the sense masses remain parallel to the surface of the substrate.

Abstract: A vibrating element includes first and second pairs of vibrating arms extending in opposite directions from a base. A pair of first suspension arms extends from the base via first connecting parts and are connected to a fixed portion attached to a container for the vibrating element so that the base, the pair of first suspension arms and the fixed portion surround the pair of first vibrating arms. A pair of second suspension arms extends from the base via second connecting parts and are connected to the fixed portion so that the pair of second suspension arms is located outside of the pair of first vibrating arms and the pair of first suspension arms.

Abstract: An example include microelectromechanical die for sensing motion that includes a fixed portion, an anchor coupled to the fixed portion, a first nonlinear suspension member coupled to anchor on a side of the anchor, a second nonlinear suspension member coupled to the anchor on the same side of the anchor, the second nonlinear suspension member having a shape and location mirroring the first nonlinear suspension member about an anchor bisecting plane and a proof-mass that is planar, the proof mass suspended at least in part by the first nonlinear suspension member and the second nonlinear suspension member such that the proof-mass is rotable about the anchor and is slideable in a plane parallel to the fixed portion.

Abstract: A vibrator element includes a pair of first and second drive vibrating arms that extend in opposite directions from a base portion; a first weight that is spaced from a tip of at least one of the first and second drive vibrating arms toward the base portion and is provided in a first region of the at least one of the drive vibrating arms; and a second weight that is provided in a second region that is a region between a tip of the first weight and the tip of the at least one of the drive vibrating arms. When an area of the first region is represented as A1, a mass of the first weight is represented as B1, an area of the second region is represented as A2, and a mass of the second weight is represented as B2, B1/A1>B2/A2 is established.

Abstract: An inertial sensor for measuring information relating to rotation in three orthogonal axes, comprising a support and a vibrating sensitive element secured to the support; the sensitive element having a deformable frame and at least two deformable projections which extend in a plane (X-Y); wherein the inertial sensor extends in the same plane; the deformable frame and the at least two deformable projections have a plane of symmetry parallel to the plane; the at least two projections are rectilinear beams which have an approximately square cross section, are not collinear and are preferably approximately orthogonal to one another; each of the deformable beams being connected by only one end to the deformable frame at a location at which the amplitude of the primary vibration mode is at a maximum; and in that the sensor has a device for detecting each of the secondary vibration modes.

Abstract: An inertial sensor comprising: a frame; a proof mass suspended from the frame; a pair of first resonant elements electrically coupled to the proof mass, or to an intermediate component mechanically coupled to the proof mass, each first resonant element coupled to an opposite side of the proof mass to the other, the first resonant elements being substantially identical to one another and having substantially identical electrostatic coupling with the proof mass when the sensor is not accelerating; wherein the first resonant elements and proof mass lie substantially in a plane, and wherein movement of the proof mass relative to the first resonant elements orthogonal to the plane alters the electrostatic coupling between the proof mass and the first resonant elements; drive means coupled to the first resonant elements for vibrating each of the first resonant elements; and a sensor assembly for detecting a shift in the resonant frequency of each of the first resonant elements; and processing means for summing the

Abstract: A z-axis gyroscope design is presented with a 2-degree of freedom (DOF) sense mode allowing interchangeable operation in either precision (mode-matched) or robust (wide-bandwidth) modes. This is accomplished using a complete 2-DOF coupled system which allows for the specification of the sense mode resonant frequencies and coupling independent of frequency. By decoupling the frame connecting the sense system to a central anchor, x-y symmetry is preserved while enabling a fully coupled 2-DOF sense mode providing control over both the bandwidth and the amount of coupling independent of operational frequency. The robust mode corresponds to operation between the 2-DOF sense mode resonant frequencies providing a response gain and bandwidth controlled by frequency spacing. Precision mode of operation, however, relies on mode-matching the drive to the second, anti-phase sense mode resonant frequency which can be designed to provide a gain advantage over a similar 1-DOF system.

Abstract: A planar Coriolis gyroscope includes at least two counter oscillating masses attached to a common rigid frame by one or more elastic members defining an excitation axis. The frame is attached to a support region by one or more additional elastic members which together with the masses define a Coriolis resonator. The Coriolis resonator responds to inertial rotation of the gyroscope and in conjunction with a position pickoff provides a signal indicative on the gyroscope inertial rotation.

Abstract: A method for operating and/or measuring a micromechanical device. The device has a first and second seismic mass which are movable by oscillation relative to a substrate; a first drive device for deflecting the first seismic mass and a second drive device for deflecting the second seismic mass, parallel to a drive direction in a first orientation; a third drive device for deflecting the first seismic mass, and a fourth drive device for deflecting the second seismic mass in parallel to the drive direction and according to a second orientation opposite from the first orientation; a first detection device for detecting drive motion of the first seismic mass; and a second detection device for detecting drive motion of the second seismic mass. A first and a second detection signal are generated by the first and second detection devices, the first detection signal being evaluated separately from the second detection signal.

Abstract: An integrated microelectromechanical structure is provided with a driving mass, anchored to a substrate via elastic anchorage elements and designed to be actuated in a plane with a driving movement; and a first sensing mass and a second sensing mass, suspended within, and coupled to, the driving mass via respective elastic supporting elements so as to be fixed with respect thereto in said driving movement and to perform a respective detection movement in response to an angular velocity. In particular, the first and the second sensing masses are connected together via elastic coupling elements, configured to couple their modes of vibration.

Abstract: A micromechanical structure includes: a substrate which has a main plane of extension; and a mass which is movable relative to the substrate, the movable mass being elastically suspended via at least one coupling spring. A first subregion of the movable mass is situated, at least partially, between the substrate and the coupling spring along a vertical direction which is essentially perpendicular to the main plane of extension.

Abstract: A micromechanical Coriolis rate of rotation sensor for detecting a rate of rotation, comprising a substrate, a measurement axis (X-axis), a detection axis (Y-axis), and a drive axis (Z-axis), each disposed orthogonally to each other and a first and a second driving mass (2) disposed in an X-Y plane parallel to the substrate. Each driving mass (2) being rotatably connected to the substrate by means of a central suspension. The two central suspensions being disposed along the Y-axis. Drive means are used for generating a rotational oscillation of the driving masses (2) about the drive axis (Z) at each central suspension. At least one elastic connecting element (5) is disposed on each of the driving masses (2) on both sides of the Y-axis and spaced apart from the same for connecting and oscillating the two driving masses (2) in a mutually tuned manner.

Abstract: The device layer of a 6-degrees-of-freedom (6-DOF) inertial measurement system can include a single proof-mass 6-axis inertial sensor formed in an x-y plane, the inertial sensor including: a main proof-mass section suspended about a single, central anchor; a central suspension system configured to suspend the 6-axis inertial sensor from the single, central anchor; and a drive electrode including a moving portion and a stationary portion, the moving portion coupled to the radial portion. The drive electrode and the central suspension system are configured to oscillate the 6-axis inertial sensor about a z-axis normal to the x-y plane.

Abstract: The present invention provides a dynamic quantity device which reduces stress received by a sensor due to resin packaging and reduces variation in sensor characteristics due to stress. The dynamic quantity sensor includes a semiconductor substrate including a fixing part and a flexible part and a movable part positioned on an interior side of the fixing part, and a cap component configured to cover the flexible part and the movable part, wherein the fixing part includes an interior frame configured to enclose the flexible part and the movable part and an exterior part positioned on a periphery of the interior frame, a slit configured to divide the interior frame and the exterior frame, and a linking part configured to link the interior frame and the exterior frame.

Abstract: A yaw rate sensor includes a drive mass element which is situated above a surface of a substrate and is drivable to vibrate by a drive device along a first axis extending along the surface, having a detection mass element, which is deflectable under the influence of a Coriolis force along a second axis perpendicular to the surface, and having a detection device by which the deflection of the detection mass element along the second axis is detectable. Due to the arrangement of the second axis perpendicular to the surface, the yaw rate sensor may be integrated into a chip together with additional yaw rate sensors suitable for detection of rotations about axes of rotation in other directions.

Abstract: A microchip has a base die with a conductive interconnect and an isolation trench around at least a portion of the conductive interconnect, and a cap die secured to the base die. A seal, formed from a metal material, is positioned between the base die and the cap die to secure them together. The microchip also has a blocking apparatus, between the isolation trench and the metal seal, that at least in part prevents the metal material from contacting the interconnect.

Abstract: A gyro sensor includes: a vibrating body; a first fixed drive electrode that is disposed, in plan view, on a first direction side crossing a driving vibration direction of the vibrating body and vibrates the vibrating body; a second fixed drive electrode that is disposed, in plan view, on the side opposite to the first direction side and vibrates the vibrating body; a fixed detection electrode that detects a signal changing according to angular velocity of the vibrating body; a first drive wiring that is connected with the first fixed drive electrode and extends toward one side in the driving vibration direction; a second drive wiring that is connected with the second fixed drive electrode and extends toward the one side in the driving vibration direction; and a detection wiring that is connected with the fixed detection electrode and extends toward the side opposite to the one side.

Abstract: An acceleration sensor has a substrate, a seismic mass and a detection unit. The seismic mass is configured to be deflected based on an external acceleration acting on the acceleration sensor, the deflection being in the form of a deflection motion with respect to the substrate along a deflection direction. The detection unit is configured to be deflected for the detection of a deflection of the seismic mass, the detection being in the form of a detection motion with respect to the substrate along a detection direction. The detection unit is connected to the seismic mass in such a way that the amplitude of the deflection motion along the deflection direction is greater than the amplitude of the detection motion along the detection direction.

Abstract: A gyroscope includes a body, a driving mass, which is mobile according to a driving axis, and a sensing mass, which is driven by the driving mass and is mobile according to a sensing axis, in response to rotations of the body. A driving device forms a microelectromechanical control loop with the body and the driving mass and maintains the driving mass in oscillation with a driving frequency. The driving device comprises a frequency detector, which supplies a clock signal at the frequency of oscillation of the driving mass, and a synchronization stage, which applies a calibrated phase shift to the clock signal so as to compensate a phase shift caused by components of the loop that are set between the driving mass and the control node.

Abstract: A MEMS device wherein a die of semiconductor material has a first face and a second face. A diaphragm is formed in or on the die and faces the first surface. A cap is fixed to the first face of the die and has a hole forming a fluidic path connecting the diaphragm with the outside world. A closing region, for example a support, a second cap, or another die, is fixed to the second face of the die. The closing region forms, together with the die and the cap, a stop structure configured to limit movements of the suspended region in a direction perpendicular to the first face.

Abstract: In a piezoelectric element, a piezoelectric film, a first electrode film provided on one surface of the piezoelectric film, and a second electrode film provided on the other surface of the piezoelectric film form a layered structure, an outer contour of the first electrode film and an outer contour of the second electrode film are positioned outside an outer contour of the piezoelectric film as viewed in a layering direction, an organic resin film is in contact with the piezoelectric film, and generation of noise is suppressed.

Abstract: In order to provide an inertial sensor capable of suppressing a wrong diagnosis even in an adverse environment such that sudden noise occurs, an inertial sensor is provided with a movable part (105), a first detection unit (C1, C2) for detecting the amount of displacement of the movable part (105), a forced vibration means (503, C3, C4) for forcedly vibrating the movable part (105) by applying a diagnosis signal, a physical quantity calculation unit (502) for calculating the physical quantity from a detection signal from the first detection unit (C1, C2), and an abnormality determination unit (504) for determining the presence or absence of the abnormality for the physical quantity using the diagnosis signal obtained via the first detection unit (C1, C2), and is used within a vehicle, the inertial sensor further comprising a second sensor (510) mounted in the same vehicle and connected to the abnormality determination unit (504).

Abstract: A gyro sensor includes a base, a first connection arm and a second connection arm that extend from the base in opposite directions along an X axis, a first drive oscillation arm that extends from the first connection arm along a Y axis, a second drive oscillation arm that extends from the second connection arm along the Y axis, and a first detection oscillation arm and a second detection oscillation arm that extend from the base in opposite directions along the Y axis, and each of the first drive oscillation arm and the second drive oscillation arm has an oscillation component along the X axis and an oscillation component along a Z axis.

Abstract: A vibrator element includes a base section, a driving vibrating arm extending from one end of the base section, a detecting vibrating arm extending from another end of the base section opposite to the one end, an adjusting vibrating arm extending from the base section on an opposite side to the driving vibrating arm, and a support section extending from the base section and to be fixed to a substrate, and an output signal of the adjusting vibrating arm has a reverse phase with respect to an output signal of a leakage vibration of the detecting vibrating arm.

Abstract: An angular velocity sensor for detecting an angular velocity includes a substrate having the stationary portion, two pair of driver weights, two detector weights, and a detector electrode. The angular velocity is detected by using a differential signal output indicating a variation in capacitances. When the absolute value of a de-coupling ratio (=(fanti?fin)/fanti) is greater than or equal to 0.07, the occurrence of the anti-phase mode movement can be prevented so as to prevent the occurrence of the output error of the gyro sensor and detect the angular velocity more precisely.

Abstract: A MEMS resonator includes two resonating masses having an anti-phase and in-phase resonance mode, each mode having a resonance frequency, and an anti-phase resonance levering system coupled to the two resonating masses to stiffen and/or dampen the in-phase resonance mode while leaving the anti-phase resonance mode compliant. This effectively raises the in-phase resonance frequency above the anti-phase resonance frequency, and potentially creates a large frequency separation between the two resonance modes. This reduces the energy transfer between the two modes, allowing for robustness to external acceleration, because the in-phase mode is of a higher frequency. The anti-phase resonance levering system is disposed between the two resonating masses as an internal levering mechanism, or is disposed around the two resonating masses as an external levering mechanism.

Abstract: A microelectromechanical gyroscope that includes a first mass oscillatable according to a first axis; an inertial sensor, including a second mass, drawn along by the first mass and constrained so as to oscillate according to a second axis, in response to a rotation of the gyroscope; a driving device coupled to the first mass so as to form a feedback control loop and configured to maintain the first mass in oscillation at a resonance frequency; and an open-loop reading device coupled to the inertial sensor for detecting displacements of the second mass according to the second axis. The driving device includes a read signal generator for supplying to the inertial sensor at least one read signal having the form of a square-wave signal of amplitude that sinusoidally varies with the resonance frequency.

Abstract: An angular rate sensor (20) includes a single drive mass (24) and distributed sense masses (36, 38, 40, 42) located within a central opening (30) of the drive mass (24). The drive mass (24) is enabled to rotate around the Z-axis (64) under electrostatic stimulus. The sense masses (36, 38, 40, 42) are coupled to the drive mass by spring elements (44, 46, 48, 50) such that oscillatory rotary motion (90) of the drive mass imparts a linear drive motion (92, 94) on the sense masses. The distributed sense masses form two pairs of sense masses, where one pair senses X- and Z-axis angular rate and the other pair senses Y- and Z-axis angular rate. The sense masses are coupled to one another via a centrally located coupler element (34) to ensure that the sense masses of each pair are moving in anti-phase.

Abstract: This invention is directed to provision of high-performance inertial sensor that can sustain SNR even in an environment where vibration disturbance exists. A vibration type inertial sensor comprises: two deadweights (2, 3); means (C1, C2, C3, C4, +vd, ?vd) for displacing the two dead weights in the anti-phase; two sets of electrodes (C5, C6, C7, C8) for detecting, as capacitance changes, the displacements of the two dead weights; and a C/V converting unit (53) for converting the capacitance changes of the electrodes to electric signals. In the vibration type inertial sensor, a set of electrodes (e.g., C5 and C8), which exhibit an increased electrostatic capacitance therebetween in the case where the two dead weights (2, 3) are displaced in the anti-phase, are electrically connected to each other, and a set of electrodes (e.g.

Abstract: The multiaxial inertial sensor of movements is a micro/nano sensor that makes it possible to couple at least one accelerometer with other structures, either accelerometers or gyroscopes, by an oscillating disk structure. The oscillating disk also forms an inertial sensor such as a gyrometer. This single-chip structure associating both gyroscopes and accelerometers makes it possible to achieve detections and measurements in up to 6 axes, in other words 3 accelerometer axes and 3 gyroscope axes, and to exert control by a single and unique electronic unit, thus permitting a single automatic control loop in excitation and a single electronic reading chip. Application to technologies known as MEMS.

Abstract: Disclosed herein is an inertial sensor, including: a membrane; a mass body disposed under the membrane; a sensing unit formed on the membrane and including a piezoelectric body; and a spring constant control unit formed to be spaced apart from the sensing unit and including a piezoelectric body. According to the preferred embodiment of the present invention, the DC acceleration (in particular, gravity acceleration) can be measured by using the change in the spring constant without changing the structure of the inertial sensor including the piezoelectric material of the prior art.

Abstract: The invention concerns a MEMS sensor and a method for detecting accelerations along, and rotation rates about, at least one, preferably two of three mutually perpendicular spatial axes x, y and z by means of a MEMS sensor (1), wherein at least one driving mass (6; 6.1, 6.2) and at least one sensor mass (5) are moveably arranged on a substrate (2) and the at least one driving mass (6; 6.1, 6.2) is moved relative to the at least one sensor mass (5) in oscillation at a driving frequency and when an external acceleration of the sensor occurs, driving mass/es (6; 6.1, 6.2) and sensor mass/es (5) are deflected at an acceleration frequency and, when an external rotation rate of the sensor (1) occurs, are deflected at a rotation rate frequency, and the acceleration frequency and rotation rate frequency are different. At the MEMS-sensor the driving mass/es (6; 6.1, 6.2) and sensor mass/es (5) are arranged on the substrate (2), and are balanced in the resting state by means of at least one of the anchors (3).

Abstract: A MEMS resonator system comprises a MEMS resonator, kick start circuitry, feedback circuitry, an oscillator, and a switch. The MEMS resonator system is configured to provide a pulsed kick-start signal having a frequency and period such that energy delivered to the MEMS resonator is optimized in a short period of time, resulting is reduced oscillator startup time. The MEMS resonator system is configured to switch out the kick-start signal when the MEMS resonator oscillation has been achieved, and switch in feedback circuitry to maintain the MEMS resonator in a state of oscillation.

Abstract: Disclosed herein are an apparatus and a method for detecting a gyro sensor signal. The apparatus includes: a preamplifier unit outputting sensing voltage and inverse phase sensing voltage; a sample and hold unit holding the sensing voltage and the inverse phase sensing voltage for a predetermined period at a predetermined point in time; an averaging unit removing offset; a current passing unit providing a current path of output voltage of the averaging unit; a comparing unit comparing a signal output from the averaging unit and reference voltage with each other to output a comparison signal; and a pulse counter unit generating and outputting a count signal that is in proportion to a width of the comparison signal.

Abstract: Systems and methods are provided for monitoring operation of MEMS gyroscopes (110). A test signal generator (124) is configured to generate and apply a test signal to the rate feedback loop (112) of a MEMS gyroscope (110). A test signal detector (126) is coupled to the quadrature feedback loop (114) of the MEMS gyroscope (110) and is configured to receive a quadrature output signal from the quadrature feedback loop (114). The test signal detector (126) demodulates the quadrature output signal to detect effects of the test signal. Finally, the test signal detector (126) is configured to generate a monitor output indicative of the operation of the sensing device based at least in part on the detected effects of the test signal in the quadrature output signal. Thus, the system is able to provide for the continuous monitoring of the operation of the MEMS gyroscope (110).

Abstract: A micro-gyroscope for determining a rate of rotation about a Z-axis includes a substrate and two sensor devices each of which comprises at least one drive mass, at least one anchor, drive elements, at least one sensor mass and sensor elements. The drive mass is mounted linearly displaceably in the direction of an X-axis, and can be driven in an oscillatory manner with respect to the X-axis. The sensor mass is coupled to the drive mass by means of springs. The sensor mass is displaceable in the Y-direction, and sensor elements detects a deflection of the sensor mass in the Y-axis. The two sensor devices are disposed parallel to each other and one above the other in the direction of the Z-axis, and the drive mass in these two sensor devices are coupled to each other by means of a coupling spring.

Abstract: Gyroscopic measurements are provided, by a system comprising a vibrating gyroscope, in the form of an output signal. The vibrating gyroscope provides an original measurement signal. A periodic control signal (CP) is applied to it over a time period, which signal is suitable: for rotating the geometric position of vibration in a first direction, during a part of the time period; and for rotating the geometric position of vibration in a second direction opposite to the first direction, during the other part of the time period; said control signal having a zero mean over said time period and exhibiting portions of signal at high frequency relative to the output signal; said output signal being based on a corrected signal emanating from the original measurement signal; in which the corrected signal is based on an identification of errors made during the signal portions at high frequency.

Abstract: A device for quantifying the degassing of a piece of equipment placed in a vacuum chamber includes a metal blade made from a ferromagnetic material including a fixed end and a free end, the blade being provided with a cooling device and a device for measuring an intrinsic temperature of the blade; an electromagnet for exciting the blade; and a measurement sensor for measuring the excitation of the free end of the blade connected to a device for acquiring measurements and for calculating at least one oscillation frequency of the free end of the blade, the acquisition and calculation device being connected to a device for calculating a surface density of a mass deposited on the blade.

Abstract: A micromechanical sensor comprising a substrate (5) and at least one mass (6) which is situated on the substrate (5) and which moves relative to the substrate (5) is used to detect motions of the sensor based on an acceleration force and/or Coriolis force which occur(s). The mass (6) and the substrate (5) and/or two masses which move toward one another are connected by at least one bending spring device (1) for a relative rotational motion. The bending spring device (1) has multiple, in particular two, spring bars (2) extending essentially parallel to one another for improving the linear spring characteristic of the bending spring device during the rotational motion, and at least one meander (3) on at least one, preferably on all, of the spring bars (2).

Abstract: A sensor element includes a base part 21, drive vibration arms 221 and 222, adjustment vibration arms 241-244 that vibrate in response to drive vibration of the drive vibration arms 221 and 222, detection electrodes that output a charge according to a physical quantity applied to the drive vibration arms 221 and 222, first adjustment electrodes provided on the adjustment vibration arms 241 and 242 and electrically connected to the detection electrodes for outputting a charge in response to vibration of the adjustment vibration arms 241 and 242, and second adjustment electrodes provided on the adjustment vibration arms 243 and 244 and electrically connected to the detection electrodes for outputting a charge in a reverse polarity with respect to the first adjustment electrodes in response to vibration of the adjustment vibration arms 243 and 244.

Abstract: A placing member is configured to be supported from an outside by a terminal electrically connected to a terminal electrode, and an X-axis-direction extended portion, a Y-axis-direction extended portion, and a Z-axis-direction extended portion are provided in the terminal. This configuration provides an angular velocity sensor, in which a problem such that Y-axis-direction and Z-axis-direction vibrations applied from the outside cannot be damped is eliminated, and all the vibrations in three axis directions can be damped.

Abstract: A control circuit of a power supply that generates an output voltage from an input voltage includes a gain adjustment circuit that adjusts a gain of an alternating-current component of the output voltage. An addition circuit adds an output signal of the gain adjustment circuit to a first feedback voltage, which is in accordance with the output voltage, to generate a second feedback voltage. A voltage generation circuit generates a comparison reference voltage that changes at a given rate with respect to a first reference voltage that is set according to a target value of the output voltage. A switch control circuit controls the output voltage by switching a switch circuit, to which the input voltage is supplied, at a timing according to a result of a comparison of the second feedback voltage with the comparison reference voltage.

Abstract: A micro-electromechanical system (MEMS) structure for an angular rate sensor includes seismic masses arranged to have a first degree of rotational freedom about an axis that is substantially perpendicular to the plane of a silicon substrate, and a second degree of rotational freedom about an axis substantially coincident with the longitudinal axis of driving beams to which the seismic masses are attached. A sensing system is arranged such that, when the structure is subjected to an angular velocity around a third axis that is substantially in the plane of the silicon substrate and perpendicular to the longitudinal axis of the beams, a Coriolis force arises which causes the secondary oscillation of the seismic masses.

Abstract: An integrated MEMS inertial sensor device. The device includes a MEMS inertial sensor overlying a CMOS substrate. The MEMS inertial sensor includes a drive frame coupled to the surface region via at least one drive spring, a sense mass coupled to the drive frame via at least a sense spring, and a sense electrode disposed underlying the sense mass. The device also includes at least one pair of quadrature cancellation electrodes disposed within a vicinity of the sense electrode, wherein each pair includes an N-electrode and a P-electrode.

Abstract: A sensor array for viscosity measurement includes the following: a carrier substrate formed with an opening; a metal plate-shaped oscillating element disposed on a surface of the carrier substrate and parallel to the surface over the opening; at least two metal contact electrodes disposed on the carrier substrate; at least two metal spring elements, wherein each of the contact electrodes is connected to the oscillating element by way of a spring element such that the element is mounted on the carrier substrate by way of the spring elements; and a magnet, which is disposed in the vicinity of the carrier substrate such that the magnetic field lines penetrate the plate-shaped oscillating element.

Abstract: Systems and methods for two degree of freedom dithering for micro-electromechanical system (MEMS) sensor calibration are provided. In one embodiment, a method for a device comprises forming a MEMS sensor layer, the MEMS sensor layer comprising a MEMS sensor and an in-plane rotator to rotate the MEMS sensor in the plane of the MEMS sensor layer. Further, the method comprises forming a first and second rotor layer and bonding the first rotor layer to a top surface and the second rotor layer to the bottom surface of the MEMS sensor layer, such that a first and second rotor portion of the first and second rotor layers connect to the MEMS sensor. Also, the method comprises separating the first and second rotor portions from the first and second rotor layers, wherein the first and second rotor portions and the MEMS sensor rotate about an in-plane axis of the MEMS sensor layer.

Abstract: Disclosed are a MEMS sensor and methods to compensate a quadrature error on the sensor. The sensor detects movements of a substrate, especially accelerations and rotation rates. At least one mass arranged on the substrate and mounted to move relative to it is driven by drive electrodes. The mass executes a movement deviating from the prescribed movement due to a quadrature error. A deflection of the mass occurring due to Coriolis force and quadrature error is detected with detection electrodes. A capacitance change is detected as a function of drive movement of the mass by using compensation electrodes. A compensation charge dependent on the quadrature error of the MEMS sensor is generated on the compensation electrodes. For compensation, the distorted or incorrect charge generated by the quadrature error in the detection electrodes is compensated with the compensation charge.

Abstract: A Coriolis gyroscope comprises a mass system that can be excited to perform vibrations parallel to a first axis, whereby a deflection of the mass system due to a Coriolis force along a second axis perpendicular to the first axis is detectable. At least one first correction unit and at least one second correction unit, which each comprise a plurality of stationary correction electrodes and moving correction electrodes whereby the stationary correction electrodes extend in the direction of the first axis and are firmly connected to the substrate by corresponding anchor structures, and the moving correction electrodes are provided as a part of the mass system. A method for reducing the quadrature bias of a Coriolis gyroscope of this type comprises applying at least temporarily constant corrective voltages to the correction units.

Abstract: A driving mass of an integrated microelectromechanical structure is moved with a rotary motion about an axis of rotation, and a sensing mass is connected to the driving mass via elastic supporting elements so as to perform a detection movement in the presence of an external stress. The driving mass is anchored to a first anchorage arranged along the axis of rotation by first elastic anchorage elements. The driving mass is also coupled to a pair of further anchorages positioned externally thereof and coupled to opposite sides with respect to the first anchorage by further elastic anchorage elements; the elastic supporting elements and the first and further elastic anchorage elements render the driving mass fixed to the first sensing mass in the rotary motion, and substantially decoupled from the sensing mass in the detection movement, the detection movement being a rotation about an axis lying in a plane.