Abstract: A temperature sensor integrated type semiconductor pressure sensor apparatus includes a temperature detection device, a lead wire covered with a lead wire protection material, and a terminal, which are integrated together by a thermoplastic resin. This can prevent the lead wire from being deformed in the assembly process, thereby simplifying the assembly process. Furthermore, the temperature detection device is exposed from the opening at the tip of the protrusion, which can secure enough temperature response. Furthermore, the temperature detection device, the lead wire and the lead wire protection material are covered with the thermoplastic resin, so they are protected from combustion gas component, oil contaminant and corrosion product included in intake air.

Abstract: A production method for a detection apparatus includes: forming at least one sensitive region having at least one exposed sensing area on and/or in a semiconductor substrate, encapsulating at least one part of the semiconductor substrate so that the at least one sensing area is sealed in an air-, liquid- and/or particle-tight fashion from an external environment, and forming at least one opening so that at least one air, liquid and/or particle access from the external environment to the at least one sensing area is created, wherein before forming the at least one opening, at least one first test and/or calibration measurement is performed, for which at least one sensor signal of the at least one sensitive region having the at least one sensing area sealed in an air-, liquid- and/or particle-tight fashion is determined as at least one first test and/or calibration signal. Also described are related detection apparatuses.

Abstract: An amplifier circuit includes a converter configured to convert a predefined physical quantity to a resistance value, and the resistance value converted by the converter is converted to a voltage value and then amplified. The converter includes variable resistance sensors of piezoresistance elements. A bias unit is configured to determine a bias current of the converter, and includes bias resistances. An operation amplifier unit receives, as input signals, output signals from the bias unit and the converter, and includes feedback resistances respectively connected to input and output ends of a first operational amplifier. The first operational amplifier is a whole differential operational amplifier including a common-mode feedback circuit.

Abstract: A pyranometer, comprises a thermal sensor, and a diffusing member positioned so as to be opposed to a receiving surface of the thermal sensor.

Abstract: A physical quantity detector includes: a bridge circuit portion that includes a bridge circuit including a first, second, third, and fourth strain gauges each having a resistance value that changes in response to an application of a physical quantity and to temperature, the bridge circuit portion outputting, as a first detection signal, a first voltage, and outputting, as a second detection signal, a second voltage; a temperature characteristic adjustment portion that is connected in parallel to the bridge circuit portion, and outputs, as a third detection signal, a third voltage corresponding to the input voltage; a first signal processing circuit portion that receives the first and second detection signals, and outputs a first differential voltage; and a second signal processing circuit portion that receives the second and third detection signals, and outputs a second differential voltage.

Abstract: An impedance sensor and an electronic apparatus using the same are provided. The impedance sensor includes an impedance-bridge circuit, a compensation circuit, and a signal processing circuit. The impedance-bridge circuit has an input side and an output side, and configured to generate a first impedance variation in response to a physical pressure. The compensation circuit is coupled to the input side of the impedance-bridge circuit in parallel, and configured to generate a second impedance variation in response to an environment temperature. The signal processing circuit respectively detects the first and the second impedance variations, and accordingly generates a first sensing signal indicating the first impedance variation and a second sensing signal indicating the second impedance variation, so as to compensate a temperature shift part of the first sensing signal by the second sensing signal and accordingly generate a pressure detection signal.

Abstract: A protective tube device can protect a temperature sensor against contact with a fluid, and has a distal end containing the temperature sensor and has an outer wall provided for contact with the fluid, and a proximal end which is connected to the temperature sensor by electric lines and is intended for arrangement outside the fluid, wherein, on the outer wall of the distal end, an elastic membrane closes off a resultantly defined pressure transmission fluid reservoir in a fluid-impermeable manner, the pressure transmission fluid reservoir being connected fluidically by a fluid channel running within the protective tube device to a pressure sensor arranged in the proximal end.

Abstract: Sensor signal detection device includes: a sensor element; a temperature detection element connected in series with the sensor element; a constant voltage power supply applying constant voltage to a series circuit of the temperature detection element and the sensor element; a short-circuit switch short-circuiting both terminals of the temperature detection element; and a controller controlling a changeover between a sensor detection state and a temperature detection state. In the sensor detection state, a sensor signal from the sensor element is obtained by turning on the short-circuit switch to apply the constant voltage across both terminals of the sensor element from the constant voltage power supply. In the temperature detection state, a temperature detection signal of the temperature detection element is obtained by turning off the short-circuit switch to connect the temperature detection element to the sensor element in series and applying constant voltage from the constant voltage power supply.

Abstract: A pressure compensator for a subsea device is provided. The pressure compensator provides pressure balancing between a chamber of the subsea device and the surrounding environment when the subsea device is installed at a subsea location. The pressure compensator includes an intermediate compensation chamber that is provided by a compensator enclosure. The compensator enclosure is sealed against the subsea environment. The compensator enclosure includes a bellows portion that is deformable to change the volume of the intermediate compensation chamber. The pressure compensator further includes a flexible hose disposed inside the intermediate compensation chamber. A volume inside the flexible hose provides a main compensation chamber.

Abstract: The invention relates to a capacitive pressure transducer for measuring the pressure of a medium adjacent to the pressure transducer, which has a resilient measuring diaphragm, of which the first side is at least partially in contact with the medium and of which the second side, which faces away from the medium, comprises a measuring electrode and, for measuring a temperature, a resistance element made of a material having a temperature dependent resistance. Furthermore, the pressure transducer has a base body, which is arranged to oppose the second side of the measuring diaphragm, with a counter electrode, which forms a measuring capacitance with the measuring electrode. According to the invention, the resistance element is formed as a resistive layer disposed between the second side of the measuring diaphragm and the measuring electrode.

Abstract: A semiconductor pressure sensor (720) includes a thin film piezoelectric element (701) which applies strain to a portion of a semiconductor substrate that corresponds to a thin region (402). The thin film piezoelectric element (701) is formed at a distance away from diffusion resistors (406, 408, 410, and 412) functioning as strain gauges and is extended to the proximity of a bonding pad (716A) connected to an upper electrode layer of the thin film piezoelectric element and a bonding pad (716F) connected to a lower electrode thereof. The diffusion resistors (406, 408, 410, and 412) constitute a bridge circuit by metal wiring (722) and diffusion wiring (724). During self-diagnosis, a prescribed voltage is applied to a thin film piezoelectric element (701). If the output difference of the bridge circuit between before and after the voltage application falls outside a prescribed range, it is determined that a breakage occurs in the semiconductor pressure sensor (720).

Abstract: A pressure sensor includes a sensor housing mounted on a vehicle, a first detector located in the housing and having a first diaphragm facing a sealed space of the vehicle, a second detector located in the housing and having a second diaphragm facing the sealed space, and a protector located in the housing and covering the first and second detectors. A first chamber is formed between the first diaphragm and the housing and isolated from the sealed space so that the first diaphragm can be deformed by a pressure in the sealed space. A second chamber is formed between the second diaphragm and the sensor housing and communicates with the sealed space. The first and second diaphragms produce the same signal when being deformed by the same amount in the same direction.

Abstract: A pressure sensor for use with a fluid delivery system having good sensitivity at low pressure, but also configured to remain in operating condition after being exposed to high pressures is disclosed herein. In one variation, the pressure sensor includes a fluid path set, a deformable element associated with the fluid path set and configured to deform in response to an external pressure, and a pressure transducer for monitoring deformation of the deformable element. In certain embodiments, the pressure sensor is configured to measure fluid pressure within the range of between about 0 mm Hg to about 300 mm Hg. However, the sensor pressure is also be configured to remain functional after being exposed to pressure in excess of about 60,000 mm Hg.

Abstract: Aspects of the present disclosure relate to a method that includes receiving, at first and second input terminals, first and second input voltages and maintaining the direction of the first and second input voltages and doubling the first and second input voltages. The method also includes measuring, by a Wheatstone bridge, an applied physical parameter; outputting, to a capacitor, and to first and second operational amplifiers, first and second signals substantially indicative of the physical parameter; reducing, by the capacitor, a DC component of the first and second signals; amplifying, by the first and second operational amplifiers, the first and second signals; and adjusting, by a gain resistor, a differential output between first and second output voltages that correspond to the first and second signals output from the Wheatstone bridge. Finally, the method includes outputting, by first and second output terminals, the first and second output voltages.

Abstract: Disclosed is a method for adjusting a sensor signal and a corresponding sensor system comprising a sensor for providing a sensor signal representative of a measure other than temperature, dynamic components of the sensor signal being dependent on temperature. In addition there is provided a temperature sensor for measuring the temperature. Dynamic components in the sensor signal are adjusted subject to the temperature sensed, and a compensated sensor signal is supplied. Such sensor system helps compensating for long response times of sensors.

Abstract: A method for monitoring the operation of a pressure measuring cell (10) of a capacitive pressure sensor (1), wherein the pressure measuring cell (10) has a measuring capacitor (CM) and a reference capacitor (CR) and the pressure measuring value (p) is obtained from the capacity values of the measuring capacitor (CM) and the reference capacitor (CR), characterized in that a control pressure measuring value (p?) is obtained with an auxiliary capacitor (CZ) arranged outside the pressure measuring cell (10) and the operability of the pressure measuring cell (10) is inferred by comparing the pressure measuring value (p) to the control pressure measuring value (p?) is provided.

Abstract: Cannula assemblies with pressure sensors made of stacked coplanar layers and ambulatory infusion systems comprising the same are disclosed. The cannula assemblies include a hub and an infusion cannula. The hub includes a pressure sensor and a fluid channel fluidly coupled to the infusion cannula. The pressure sensor is formed from a stack of coplanar layers including a top layer, a base layer an electrode layer and a counter electrode layer. The fluid channel is positioned between the top layer and the base layer. The electrode layer is positioned between the top layer and the base layer and coupled to the fluid channel. The counter-electrode layer is positioned between the top layer and the electrode layer. A spacer layer having a through cut-out defining an electrode cavity is disposed between the top layer and the base layer such that the electrode layer extends across the electrode cavity.

Abstract: The invention relates to a measuring apparatus for measuring a measurement variable of a fluid, particularly a sensor, such as a pressure sensor or a displacement sensor. The measuring apparatus comprises a housing, a diaphragm arranged in and/or on the housing, and a resilient element formed in the manner of a leaf spring for restoring the diaphragm. A signal transmitter is operatively connected to the diaphragm and/or the resilient element, and a signal receiver cooperates with the signal transmitter. The resilient element is fastened on the housing at the edge of the resilient element, more specifically in particular only at parts of the edge.

Abstract: The present application is directed to a gas-generating apparatus (10). Hydrogen is generated within the gas-generating apparatus and is transported to a fuel cell. The generation of hydrogen is regulated automatically by the selective exposure of a catalyst (48) to the fuel mixture depending on the pressure inside the reaction chamber (28) of the gas-generating apparatus. Catalyst sealing mechanisms (40, 42) are provided at least partially within the reaction chamber to regulate the hydrogen pressure and to minimize the fluctuations in pressure of the hydrogen received by the fuel cell.

Abstract: In an existing disconnection detection circuit for a bridge circuit, consideration is not taken into the fact that an offset voltage or temperature characteristic of a bridge output is degraded. Provided is a disconnection detection circuit for a bridge circuit capable of suppressing a change in a characteristic of a sensor to a minimal extent. A disconnection detection circuit 8a for a bridge circuit in accordance with the present invention comprises conducting means 9 and 10 each of which causes a current to flow from an output terminal of the bridge circuit to a predetermined potential, potential difference detecting means 12 and 13 each of which detects a potential difference between the potential at the output terminal of the bridge circuit and the predetermined potential, and a disconnection detecting means 14 that detects a disconnection on the basis of the outputs of the potential difference detecting means.

Abstract: A built-in self-test structure for a pressure tester and a method thereof are provided. The built-in self-test structure includes a substrate, a plurality of membrane layers, a fixing portion, an electrical heating unit and a sensing circuit unit. The membrane layers are formed on the substrate. The fixing portion is configured on the membrane layers and includes a notch. The notch and the membrane layers define a cavity. The electrical heating unit is configured on one membrane layer, and the sensing circuit unit is configured on another membrane layer. The electrical heating unit heats up to increase the pressure in the cavity according to an input voltage, so that the membrane layers have a small deformation. The sensing circuit unit outputs a test signal according to the small deformation.

Abstract: Provided is an electromechanical transducer which is capable of correcting or compensating a fluctuation in the transmission/reception characteristics of an elastic wave transmitting/receiving unit due to applied pressure. The electromechanical transducer (102) which transmits/receives elastic waves such as ultrasound includes the elastic wave transmitting/receiving unit (201) for transmitting/receiving elastic waves, a pressure detecting unit (203) for detecting pressure that is applied to the elastic wave transmitting/receiving unit, and a correcting unit (204). Based on pressure information which is detected by the pressure detecting unit, the correcting unit performs at least one of a correction of elastic wave transmitted/received signals relevant to the elastic wave transmitting/receiving unit and a correction of the transmission/reception characteristics of the elastic wave transmitting/receiving unit.

Abstract: A monitoring system including a reading device electrically connected to a probe via a wired interface. The probe has a physiological sensor/transducer configured as a Wheatstone resistive bridge balancing circuit. Integrated within the housing of the probe to prohibit separation during use by a user is a memory device arranged in parallel with the sensor. Communication between the reading device and the probe occurs via a wired interface utilizing a same number of electrical wires between the reading device and the Wheatstone as would be required without the memory device. Control circuitry selects between one of two modes for accessing either data detected by the sensor or the memory device.

Abstract: A ratio meter includes a converter circuit, a first counter, a delay circuit, and a second counter. The converter circuit is configured to receive a temperature-independent signal, to convert the received temperature-independent signal into a first frequency signal during a first phase, to receive a temperature-dependent signal, and to convert the temperature-dependent signal into a second frequency signal during a second phase. The first counter is configured to receive the first frequency signal and to generate a control signal by counting a predetermined number of pulses of the first frequency signal count. The delay circuit is configured to delay the control signal for a predetermined time delay. The second counter is configured to receive the second frequency signal and to generate a count value by counting the second frequency signal.

Abstract: Systems, methods, and apparatus for compensation of a sensor are presented. A method is provided that includes determining a response of a sensor. For example, a temperature response of a pressure sensor may be characterized. In an example implementation, the sensor may be coupled to one or more input terminals, for example, that are configured for connecting to an input voltage source. The sensor may also be coupled to one or more configurable resistor networks. The sensor may further be coupled to one or more output terminals configured for providing an output signal. The method further includes determining one or more compensation resistance values for compensating the determined response of the sensor. The method includes selectively configuring, based at least in part on determining the one or more compensation resistance values, the one or more configurable resistor networks for compensating the response of the sensor.

Abstract: A system and method compensate for effects of gravity on the diaphragm of a capacitance diaphragm gauge (CDG). The CDG generates a measured absolute pressure value in response to an applied absolute pressure on an input of the CDG. The CDG is subjected to a variable orientation of the CDG with respect to the earth's surface that can cause inaccurate pressure measurements. A pressure measuring circuit generates a measured value of an applied absolute pressure provided to an input of the CDG. A tilt sensor generates at least one tilt sensor output value that is responsive to an orientation of the CDG with respect to the earth's surface. A processing system adjusts the measured absolute pressure value by a calibration factor to generate a calibrated absolute pressure value representing the applied absolute pressure, wherein the calibration factor is selected in response to the at least one tilt sensor output value.

Abstract: A fluidic chip device configured for processing a fluid, wherein the fluidic chip device comprises a plurality of layers laminated to one another, wherein at least a part of the layers comprises a patterned section of an alternating sequence of bars and fluidic channels for conducting the fluid under pressure, the patterned section being configured for being displaceable in response to the pressure, and a pressure detector responding to the displacement of the patterned section by generating a detector signal being indicative of a value of the pressure.

Abstract: A temperature-compensated pressure sensor system includes a pressure sensing element, a temperature sensing device, and a temperature compensation network. The pressure sensing element provides a first voltage output representative of a sensed pressure value. The temperature sensing device provides a second voltage output representative of a sensed temperature value. The temperature compensation network is connected to receive the first voltage output provided by the pressure sensing element and the second voltage output provided by the temperature sensing device. The temperature compensation network provides a temperature compensated voltage representative of sensed pressure, wherein the second voltage output passively biases the temperature compensation network.

Abstract: A pressure sensor has a sensor body at least partly formed with an electrically insulating material, particularly a ceramic material, defining a cavity facing on which is a diaphragm provided with an electric detector element, configured for detecting a bending of the diaphragm. The sensor body supports a circuit arrangement, including, a plurality of circuit components, among which is an integrated circuit, for treating a signal generated by the detection element. The circuit arrangement includes tracks made of electrically conductive material directly deposited on a surface of the sensor body made of electrically insulating material. The integrated circuit is made up of a die made of semiconductor material directly bonded onto the surface of the sensor body and the die is connected to respective tracks by means of wire bonding, i.e. by means of thin connecting wires made of electrically conductive material.

Abstract: The present invention relates to a modular system for sensing pressure and/or temperature. The system uses a piezoresistive transducer that contacts a fluid, a transducer housing for the piezoresistive transducer, a conductor tube, a transition housing, a cable, an adapter housing, a flex conductor, an electronic housing, wherein the transducer housing, the conductor tube, the transition housing, the cable, the adapter housing, the flex conductor, and the electronic housing protect a conductive path for electrical signal(s) from the piezoresistive transducer to the electronic housing. The system may use cable to couple the transition housing to the adapter housing sufficient in length to keep the transducer at the site of interest and the more sensitive electronic circuits away from high pressure, temperature, and/or RF/EMI environments such as that associated with down-hole drilling. In another embodiment, some or all the conductive path is multilayered wire.

Abstract: A pressure detector detecting a pressure of cold or hot water; a temperature detector detecting a temperature of a pressure sensor; correcting equation storage storing, cold water correcting equation information applied when the temperature detected by the temperature detector is included in a cold water temperature range, and hot water correcting equation information applied when the temperature detected by the temperature detector is included in a hot water temperature range; a temperature range determiner determining the temperature range that includes the temperature detected by the temperature detector as either a cold water temperature range or a hot water temperature range; and a correction calculating portion using the correcting equation corresponding to the temperature range determined by the temperature range determiner correcting the detection signal by the pressure detector, and outputting the post-correction signal as a measurement signal.

Abstract: A pressure sensing element may include a diaphragm and a stepped cavity. The pressure sensing element may include a plurality of piezoresistors, which are operable to generate an electrical signal based on an amount of deflection of the diaphragm in response to a sensed pressure of the fluid. The pressure sensing element may be mounted onto a housing substrate using an adhesive so that a portion of the adhesive is attached to walls of a first cavity and to a step surface of the stepped cavity to redistribute thermally induced stresses on the pressure sensing element. The stepped cavity may be included in a MEMS pressure sensing element to reduce or eliminate thermal noise, such as temperature coefficient of offset voltage output (TCO).

Abstract: Pressure sensors having components with reduced variations due to stresses caused by various layers and components that are included in the manufacturing process. In one example, a first stress in a first direction causes a variation in a component. A second stress in a second direction is applied, thereby reducing the variation in the component. The first and second stresses may be caused by a polysilicon layer, while the component may be a resistor in a Wheatstone bridge.

Abstract: A system and method compensate for effects of gravity on the diaphragm of a capacitance diaphragm gauge (CDG). The CDG generates a measured absolute pressure value in response to an applied absolute pressure on an input of the CDG. The CDG is subjected to a variable orientation of the CDG with respect to the earth's surface that can cause inaccurate pressure measurements. A pressure measuring circuit generates a measured value of an applied absolute pressure provided to an input of the CDG. A tilt sensor generates at least one tilt sensor output value that is responsive to an orientation of the CDG with respect to the earth's surface. A processing system adjusts the measured absolute pressure value by a calibration factor to generate a calibrated absolute pressure value representing the applied absolute pressure, wherein the calibration factor is selected in response to the at least one tilt sensor output value.

Abstract: A sensor module is provided having a sensor element, a housing and a substrate, the sensor element being situated on the substrate and the sensor element is provided to be at least partially embedded in the housing; and the sensor module further having a compensation element for compensating for thermal deformations of the housing; the housing being essentially situated between the substrate and the compensation element.

Abstract: A pressure sensor device has a sensor detecting pressure of a gas that is introduced from the outside, a heater for heating the sensor, a package containing the sensor and the heater, a circuit portion producing an output signal that represents the pressure of the gas based on the detection output detected by the sensor, and a circuit containing portion containing the circuit portion. The package and the circuit containing portion are structured from separate cases and are disposed separately with a connecting structural member interposed therebetween. The connecting structural member 90 includes electrode lead pins connecting between the sensor within the package and the circuit portion within the circuit containing portion, insulated pipes for covering the outer peripheries of the electrode lead pins, and coil springs covering the outer peripheries of the insulated pipes.

Abstract: A method for the compensating temperature gradient influences on a pressure measuring transducer, comprising the steps of: registering a pressure signal Sp(t); registering a temperature signal T(t); ascertaining a pressure measured value ps(Sp(t), T(t)); determining the time derivative of the temperature signal dT/dt; correcting the pressure measured value with a correction function, which depends on the time derivative, wherein, as a function of the sign of the time derivative, another correction function is selected, or other coefficients in a function of equal type are selected.

Abstract: A temperature-compensated pressure sensor system includes a pressure sensing element, a temperature sensing device, and a temperature compensation network. The pressure sensing element provides a first voltage output representative of a sensed pressure value. The temperature sensing device provides a second voltage output representative of a sensed temperature value. The temperature compensation network is connected to receive the first voltage output provided by the pressure sensing element and the second voltage output provided by the temperature sensing device. The temperature compensation network provides a temperature compensated voltage representative of sensed pressure, wherein the second voltage output passively biases the temperature compensation network.

Abstract: The invention relates to a measuring cell with a casing for housing a sensor, in particular a pressure transducer, in which the casing has a pressure compensation vent for the sensor; and is provided with a sealing element with an axisymmetrical circumferential surface arranged proximate an internal surface of a casing bore formed operably and complementary hereto, and that the pressure compensation vent is formed as at least one gap resistant to ignition flashovers by interaction of a strip-shaped and plane surface section extending along the casing bore on the circumferential surface of the sealing element with the internal surface of the casing bore.

Abstract: A sensor may include a sensor membrane, wherein one side of the sensor membrane at least partly has a glob top and wherein the glob top furthermore has structurings.

Abstract: An automatic operation method for setting temperature compensation coefficients of a digital pressure gauge is revealed. Primarily, a microcontroller unit (MCU) in the pressure gauge is equipped with built-in calibration procedures. The gauge is placed into a temperature-controlled chamber in order to obtain the temperature coefficient of offset (Tco) and temperature coefficient of span (Tcs). This method is the automatic measuring outputs of zero pressure/full scale at two temperatures to calculate the temperature coefficients Tco/Tcs. The two temperature compensation coefficients are stored in the MCU inside the pressure gauge. As the pressure gauge operates in any working temperature environments, the gauge based on a certain algorithm formula with the two stored temperature coefficients shows an accurate pressure reading.

Abstract: Temperature compensation is performed using a computation program for temperature compensation, a computation processing, and a sensor. Deformation in a diaphragm caused by a pressure change due to the temperature of the gas in a cavity is cancelled out, and deformation of the diaphragm is minimized within the target temperature range, thereby allowing an optimum temperature compensation to be performed. The temperature compensation in a capacitance-type sensor executes calculation steps which include including a calculation step (S17) of acquiring the amount of change ?C? in capacitance. A parameter ?C? is obtained, through which it is possible to determine the degree of compensation for the deformation in the diaphragm section caused by a pressure change due to the temperature changes of the gas in the hermetically sealed space.

Abstract: The present invention provides a self-heated pressure sensor assembly and method of utilizing the same. The self-heated pressure sensor assembly regulates and maintains the temperature of the pressure sensor, regardless of the external temperature environment, without an external heater as in prior art embodiments. Exemplary embodiments of the pressure sensor assembly incorporate a resistance heater that is built into the sensing chip of the pressure sensor assembly. The pressure sensor assembly also utilizes the resistance of the pressure sensing elements to monitor the temperature of the assembly, which works alongside the resistance heater to maintain a stable temperature within the pressure sensor assembly.

Abstract: In various embodiments, a sensor device is provided. The sensor includes a sensor receiving portion, a sensor arranged in the sensor receiving portion and a cap covering the sensor and the sensor receiving portion. The cap includes a plurality of recesses in the inner side wall of the cap for reducing the pressure measured by the sensor.

Abstract: High temperature pressure sensing devices and methods are disclosed. In some embodiments, a high temperature pressure sensor including intrinsic zero output and span correction versus temperature is disclosed. In addition, ways in which to improve high temperature performance through the use of intermediate circuits located towards the distal end of the high temperature pressure sensor as well as configurations to reduce thermally induced stresses within the pressure sensor are disclosed. The disclosed embodiments also detail ways in which to reduce signal loss due to various stray capacitances within the pressure sensor to improve signal fidelity and sensitivity.

Abstract: Filling-level measurement device with a housing and a measurement cell arranged inside the housing, wherein the measurement cell comprises an essentially cylindrical measurement cell body, which comprises a membrane arranged crosswise relative to a longitudinal axis of the measurement cell body, wherein the measurement cell is mounted in the housing by a circumferential sealing element, which is arranged between the measurement cell body and the housing, wherein the sealing element is arranged in axial direction of the measurement cell in such a way that a measurement signal emitted by the measurement cell is independent from a compression of the sealing element.

Abstract: The present invention, in one embodiment, provides a method of measuring pressure or temperature using a sensor including a sensor element composed of a plurality of carbon nanotubes. In one example, the resistance of the plurality of carbon nanotubes is measured in response to the application of temperature or pressure. The changes in resistance are then recorded and correlated to temperature or pressure. In one embodiment, the present invention provides for independent measurement of pressure or temperature using the sensors disclosed herein.

Abstract: A method for manufacturing a Micro-Electro-Mechanical System pressure sensor, including forming a gauge wafer including a diaphragm and a pedestal region. The method includes forming an electrical insulation layer disposed on a second surface of the diaphragm region and forming a plurality of sensing elements patterned on the electrical insulation layer disposed on the second surface in the diaphragm region, forming a cap wafer with a central recess in an inner surface and a plurality of through-wafer embedded vias made of an electrically conductive material in the cap wafer, creating a sealed cavity by coupling the inner recessed surface of the cap wafer to the gauge wafer, such that electrical connections from the sensing elements come out to an outer surface of the cap wafer through the vias, and attaching a spacer wafer with a central aperture to the pedestal region with the central aperture aligned to the diaphragm region.

Abstract: A pressure measuring device includes a pressure sensor element and an analog-digital converter. An output signal voltage of the pressure sensor element is a function of a temperature and is applied as an input voltage to an input of the analog-digital converter. The analog-digital converter is adapted to convert any input voltage from input voltage ranges which vary with a temperature into a digital value representing the input voltage.

Abstract: A pressure sensing element may include a diaphragm and a stepped cavity. The pressure sensing element may include a plurality of piezoresistors, which are operable to generate an electrical signal based on an amount of deflection of the diaphragm in response to a sensed pressure of the fluid. The pressure sensing element may be mounted onto a housing substrate using an adhesive so that a portion of the adhesive is attached to walls of a first cavity and to a step surface of the stepped cavity to redistribute thermally induced stresses on the pressure sensing element. The stepped cavity may be included in a MEMS pressure sensing element to reduce or eliminate thermal noise, such as temperature coefficient of offset voltage output (TCO).