Abstract: The invention relates to a pressure sensor device comprising a membrane body in the form of a membrane whose first side is exposed to a working medium whereas the second side thereof is arranged oppositely to the first side. The inventive device also comprises at least one pressure sensor element (16, 18) for detecting the extension or compressive strain of the membrane body produced by the working medium pressure. A temperature sensor element (22) for detecting the membrane body temperature is mounted thereon.

Abstract: A method for determining the maximum allowable working pressure of a microchannel device, particularly a diffusion-bonded, shim-based microchannel device operating at a temperature greater to or equal to a base material threshold temperature where significant creep may predominate, and when employing non-traditional materials of construction, when non-traditional fabrication or joining methods are used, or when spurious artifacts arise.

Abstract: The invention provides for a temperature compensating pressure sensing arrangement. The arrangement includes a substrate having sealed channels on which is deposited a CMOS layer, with a conductive layer and a passivation layer deposited on the CMOS layer. The arrangement also includes a conductive active membrane spaced from the conductive layer to form an active chamber, and a conductive reference membrane spaced from the conductive layer to form a sealed reference chamber. Further included is a cap which covers the membranes, said cap exposing the active membrane to an outside fluid pressure. The active membrane further defines a foot which is located between the substrate and cap with a leg extending away from the substrate and terminating in a substantially planar deflectable portion, which deflects due to differential pressure stresses so that an active capacitance is developed between the active membrane and the conductive layer depending on the electrical permittivity e of the fluid.

Abstract: This invention relates to a pressure measuring instrument, as well as a dedicated liner, especially for subsea use and adapted for coupling to a pressurized medium in a container or pipe through at leas tone opening therein and thus measure the pressure in the medium at this location, wherein the pressure measuring instrument is provided with at least one insertion part for positioning in said opening, the insertion part comprising a outward protruding liner, said liner being rotatably coupled to the insertion part and having an inner cylindrical or conical surface and an outer cylindrical or conical surface, said inner and outer surfaces having non-coinciding parallel or essentially parallel centre axis.

Abstract: A temperature compensating pressure sensor arrangement includes a capacitive pressure sensor having a substrate carrying CMOS layers. A conductive membrane is arranged on the substrate and defines a reference chamber such that capacitance changes resulting from displacement of the conductive membrane can be converted to pressure change values. A cap covers the conductive membrane and has openings to permit pressure changes to be detected by the conductive membrane. A capacitive temperature sensor is operatively arranged with respect to the capacitive pressure sensor and has a conductive membrane arranged on the substrate and defines a reference chamber such that capacitance changes resulting from displacement of the conductive membrane can be converted to temperature change values. The conductive member defining openings and cap covers and seals the conductive membrane from an external environment.

Abstract: A temperature compensating pressure sensor comprises a substrate having sealed channels on which is deposited a CMOS layer; a conductive layer and a passivation layer deposited on the CMOS layer; a conductive active membrane spaced from the conductive layer to form an active chamber, the conductive active membrane having a corrugated cross section; a conductive reference membrane spaced from the conductive layer to form a reference chamber; and a cap which covers the membranes, said cap exposing the active membrane to an outside fluid pressure. The active membrane deflects due to differential stresses so that an active capacitance is developed between the active membrane and the conductive layer depending on the electrical permittivity e of the fluid, with the reference membrane providing a temperature compensating reference capacitance.

Abstract: A pressure-measuring device has an initial pressure-measuring cell (1?) with a first thermal expansion coefficient (?1), a first housing (1), which is surrounded circumferentially by a second housing (1) having a second thermal expansion coefficient (?2) which is greater than the first thermal expansion coefficient (?1), and an O-ring, which is positioned between the pressure-measuring cell (1?) and the second housing (2), such that a third housing (3) is provided which circumferentially encloses both the pressure-measuring cell (1?) and the second housing, (2) and which has a third thermal expansion coefficient (?3) that is less than or equal to the first thermal expansion coefficient (?1).

Abstract: The present invention relates to a temperature-compensated pressure sensor assembly for fitting within the valve stem of a vehicle tire. The assembly includes a substrate assembly defining a plurality of holes. A pressure sensor is mounted to the substrate assembly. The pressure sensor includes a first deflectable membrane defining a first chamber and a first cap mounted to the membrane to form a second chamber. A temperature compensation sensor is mounted to the substrate assembly. The temperature compensation sensor includes a second deflectable membrane mounted to the substrate assembly to define a third chamber and a second cap mounted to the other membrane to form a fourth chamber.

Abstract: Systems and methods for digitally controlling sensors. In one embodiment, a digital controller for a capacitance diaphragm gauge is embedded in a digital signal processor (DSP). The controller receives digitized input from a sensor AFE via a variable gain module, a zero offset module and an analog-to-digital converter. The controller automatically calibrates the received input by adjusting the variable gain and zero offset modules. The controller also monitors and adjusts a heater assembly to maintain an appropriate temperature at the sensor. The controller utilizes a kernel module that allocates processing resources to the various tasks of a gauge controller module. The kernel module repetitively executes iterations of a loop, wherein in each iteration, all of a set of high priority tasks are performed and one of a set of lower priority tasks are performed. The controller module thereby provides sensor measurement output at precisely periodic intervals, while performing ancillary functions as well.

Abstract: A sensor apparatus includes pressure and temperature sensors for measuring the pressure and temperature of high-pressure fluid media within a vessel. The pressure sensor is disposed in a sensor cavity that is coupled to a measurement port, and the leads of a temperature sensor that is disposed in the measurement port pass through the body of the sensor apparatus to a termination cavity that is physically isolated from the sensor cavity.

Abstract: Provided is a temperature compensating pressure sensor. The sensor includes a silicon substrate having sealed channels on which is deposited a CMOS layer, and a conductive layer and a passivation layer deposited on the CMOS layer, the conductive layer representing a first electrode. The sensor also includes a conductive active membrane spaced from the conductive layer to form an active chamber, and a conductive reference membrane spaced from the conductive layer to form a sealed reference chamber. Also included is a cap which covers the membranes, said cap having a channel to expose the active membrane to an outside fluid pressure, with the membranes representing a second electrode. The active membrane deflects due to differential stresses so that the first and second electrodes develop a capacitance C between them depending on the electrical permittivity of the fluid, with the reference membrane providing a temperature compensating reference capacitance.

Abstract: The invention provides for a method of sensing pressure with a pressure sensor having a sensor membrane and a compensation membrane. The pressure sensor also includes a power supply, a controller; and a charge amplifier, a charge injector and two switches arranged in signal communication with the controller. The method includes the step of connecting the charge amplifier to the switches via a sensor capacitor Cs in parallel with a reference capacitor Cr in parallel with a parasitic capacitance Cp to ground, the charge injector and charge amplifier arranged in parallel connection between the capacitors and the controller. The method also includes the step of operating the switches, via the controller, to determine a charge imbalance indicative of a pressure difference between the sensor and compensation membranes.

Abstract: A combined pressure and temperature sensor for recording the pressure and the temperature of a medium. A sensor element of the combined pressure and temperature sensor includes a through-hole to a diaphragm and a bore for accommodating a temperature sensor. The diaphragm cooperates with a pressure sensor. At an end face of the sensor element, on the side of the medium, a cover is fastened, in which a hollow space is developed to accommodate the temperature sensor.

Abstract: The present invention is a kit for making an automotive gauge with personalized gauge faces that may be interchanged via an in situ removable front cover plate. The kit provides a gauge having a dust proof sealing front cover plate that may be unscrewed from the gauge body and a keyed removable indicating needle that allows a personally stylized gauge face to be installed. The face of the gauge is constructed through the use of a personal computer and printer in conjunction with a software program, provided with the kit, that allows the user to personally design the gauge face.

Abstract: Provided is a temperature compensating pressure sensor. The sensor includes a silicon substrate having sealed channels on which is deposited a CMOS layer, and a conductive layer and a passivation layer deposited on the CMOS layer, the conductive layer representing a first electrode. The sensor also includes a conductive active membrane spaced from the conductive layer to form an active chamber, and a conductive reference membrane spaced from the conductive layer to form a sealed reference chamber. Also included is a cap which covers the membranes, said cap having a channel to expose the active membrane to an outside fluid pressure, with the membranes representing a second electrode. The active membrane deflects due to differential stresses so that the first and second electrodes develop a capacitance C between them depending on the electrical permittivity of the fluid, with the reference membrane providing a temperature compensating reference capacitance.

Abstract: The present invention relates to a method of determining both pressures and temperatures in a high temperature environment. The present invention also relates to a method of determining temperatures about a pressure-sensing element using a bi-functional heater. In addition, the present invention preferably relates to a pressure sensor with the pressure-sensing element and a heating element both integrated into the sensor's packaging, preferably onto the diaphragm of the pressure sensor, and particularly to such a pressure sensor capable of operating at high or elevated temperatures, and even more particularly to such a pressure sensor wherein the heating element is capable of both heating, at least in part, the pressure-sensing element and monitoring the temperature of the application area. Preferably, the pressure-sensing element is formed from shape memory alloy (SMA) materials that can be used at high or elevated temperatures as a pressure sensor with high sensitivity.

Abstract: A device for measuring the pressure in a gas, wherein the device comprises: a framework, a channel extending through the framework, the channel comprising in the axial direction a introductory section including an opening for receiving the gas, a measuring section having a wall, and a final section, the end of which is closed during measuring, measuring units for measuring radial forces acting on the wall of the measuring section, the measuring unit comprising a measuring body standing in mechanical contact with a first portion of the wall of the measuring section, a cooling body for transporting heat from the walls of the measuring section to the framework, wherein the cooling body is standing in thermal contact with a second portion of the wall of the measuring section and with the framework.

Abstract: A redundant pressure transmitter for redundantly measuring pressure of a process fluid comprises a transmitter housing, transmitter circuitry, a remote seal assembly including a first pressure sensor, and a second pressure sensor positioned in the transmitter housing. The remote seal assembly also comprises a remote seal flange, a communication system and a capillary tube. The remote seal flange communicates with the process fluid and the first pressure sensor senses the process fluid pressure at the remote seal flange. The communication system relays output of the first pressure sensor to the transmitter circuitry, and the capillary tube communicates the process fluid pressure to the transmitter housing via a fill fluid, where the second pressure sensor senses the pressure of the process fluid through the fill fluid.

Abstract: A micro-electromechanical (MEMS) device functioning as a pressure sensor-that includes plurality of metal oxide semiconductor (MOS) transistors supporting on a membrane formed by an MEMS process for measuring a resistance change induced by a pressure change on the MOS transistors through the membrane for sensing the pressure change.

Abstract: The invention provides for a method of sensing pressure with a pressure sensor having a sensor membrane and a compensation membrane. The pressure sensor also includes a power supply, a controller; and a charge amplifier, a charge injector and two switches arranged in signal communication with the controller. The method includes the step of connecting the charge amplifier to the switches via a sensor capacitor Cs in parallel with a reference capacitor Cr in parallel with a parasitic capacitance Cp to ground, the charge injector and charge amplifier arranged in parallel connection between the capacitors and the controller. The method also includes the step of operating the switches, via the controller, to determine a charge imbalance indicative of a pressure difference between the sensor and compensation membranes.

Abstract: A piezoresistive pressure sensor test sample is first provided, and a zero offset of the piezoresistive pressure sensor test sample is measured. Subsequently, a stress deviation corresponding to the zero offset is calculated. Thereafter, at least a piezoresistive pressure sensor under the same process condition as the piezoresistive pressure sensor test sample is formed. When forming the piezoresistive pressure sensor, at least a stress-adjusting thin film is formed on at least a surface of the piezoresistive pressure sensor to calibrate the zero offset of the piezoresistive pressure sensor.

Abstract: An air data system is described that includes a cone-shaped probe, a plurality of pressure transducers, and a processing device. The cone-shaped probe includes a first pressure port formed in a substantial tip of the probe and extending therethrough, and a plurality of pressure ports formed in a substantially evenly spaced circular pattern about a sloped surface of the probe and extending through the probe. The plurality of pressure transducers are each configured to receive at least one pressure transferred through at least one of the pressure ports and output one or more signals related to the pressures sensed. The processing device is configured to receive signals originating from the transducers. The processing device is further configured to calculate a static pressure, an angle of attack, and an angle of sideslip based on the received signals.

Abstract: A battery powered wireless fluid pressure sensor has a sealed chamber which can be vented to the outside atmosphere through a re-sealable reference port to allow a user to set the reference atmosphere inside the pressure sensor enabling the pressure sensor to provide absolute, gauge and true gauge pressure readings. The sensor calculates and transmits the fluid pressure taking into account the temperature of the pressure transducer, the temperature of the electronic devices and the barometric pressure inside the sealed chamber to provide accurate pressure measurements over a wide range of operating conditions.

Abstract: A velocity transducer or Velomitor® that can output electrical signals relating to vibration, despite the transducer being exposed to low levels of gamma-radiation, is disclosed. A DC feedback circuit, which sets up the input stage bias point, keeps the output bias voltage within a usable voltage range as the transducer is exposed to the gamma-radiation. An additional JFET transistor, configured as a current source, helps the DC feedback circuit compensate for increases in the offset voltage of the JFET amplifier. The value of a resistor controlling the gate current of the JFET amplifier is also reduced, such that when the leakage current increases, the offset voltage is reduced.

Abstract: An integrated sensor includes a pressure sensor integrated with a temperature sensor. When the sensor is attached to an object of attachment at a mounting position at an angle of ?rq degrees with respect to an ideal attachment position, in which a central axis of at sensor body element of the temperature sensor element is disposed perpendicular to a direction in which a gas to be measured passes through the object of attachment, an inclination angle ?pos at which the central axis of the sensor body element is inclined at the mounting position with respect to a position of the central axis of the main body element at the ideal attachment position is set according to the following equation: (?rq??allow)??pos?(?rq+?allow) wherein ?allow represents an allowable angle at which an allowable response speed of the temperature sensor element is obtained.

Abstract: Calibration of a sensor circuit that includes a sensor, a temperature measurement circuit and a signal processing path. The sensor senses a physical parameter to be measured and generates an electrical sensor output signal representing the physical parameter. The temperature measurement circuit outputs a measured temperature. The signal processing path is coupled to the sensor so as to receive the electrical sensor output signal and use the measured temperature to compensate for temperature variations in the electrical sensor output signal. During calibration, the output voltage of the signal processing path is measured at multiple temperatures, and at multiple values of the physical parameter being measured at each temperature while the signal processing path is disconnected from using the measured temperature of the temperature measurement circuit.

Abstract: A pressure sensor, which is to be used in an environment involving vibrations, includes a case and a sensor chip. The case has an inner surface that is to be disposed perpendicular to a direction of the vibrations. The sensor chip is to sense a pressure in the environment and generate a sensing signal representative of the sensed pressure. The sensor chip has a pressure-receiving surface and is secured in the case with the pressure-receiving surface perpendicular to the inner surface of the case. With such an arrangement, since the pressure-receiving surface of the sensor chip is accordingly to be parallel to the direction of the vibrations, the influence of the vibrations on the pressure-receiving surface can be minimized. Consequently, high accuracy of the pressure sensor can be ensured.

Abstract: The invention relates to a pressure transmitter for an overload-proof pressure gauge, comprising a base body, a separating membrane disposed on a pressure-sensitive side of the pressure transmitter and subjectable to a pressure to be measured, a communicating chamber located inside said base body, which receives a pressure transmission medium, said chamber being closed on the pressure-sensitive side by the separating membrane, wherein the coefficient of thermal expansion of the pressure transmission medium is established in such a way that a temperature-induced change in the volume of the communicating chamber equals a temperature-induced change in the volume of the pressure transmission medium.

Abstract: Methods and systems for thermal compensation of pressure measurements by a pressure gauge. Errors in pressure values are reduced by utilizing a predetermined correlation between the error in pressure measurements, due to temperature gradient in a pressure gauge, and the temperature gradient caused by temperature at a surface of the pressure gauge and temperature at an inner portion of the pressure gauge. Thermally corrected pressure values are derived based on the correlation between the pressure errors and the temperature gradients in conditions such as due to fast and large pressure variations in oil wells.

Abstract: A pressure sensor that has a sensor membrane for exposure to fluid at a pressure to be sensed, and a compensation membrane sealed from the fluid at the pressure to be sensed. Associated circuitry connected to the sensor membrane converts deflection into an output signal indicative of the fluid pressure. The circuitry also connects to the compensation membrane to convert deflection into an adjustment to the output signal that compensates for membrane deflection due to thermal expansion.

Abstract: A method and apparatus are provided for achieving nearly perfect temperature compensation of a heat-loss vacuum gauge over its full pressure range. A voltage is measured across a sensor leg, a sensor leg and a temperature compensating leg connected together in series, or a sensor leg and a fixed resistive leg coupled together in series. A voltage is also measured across a subleg of the temperature compensating leg. The temperature compensating leg may include a temperature sensitive subleg and a temperature stable subleg connected together in series. The sublegs may include one or more temperature sensitive and/or temperature stable elements. The measured voltages are combined to produce temperature independent pressure indications over a pressure range. Three-dimensional curve-fitting or similar techniques may be used to combine the measured voltages.

Abstract: A sensor assembly includes a housing and a tube. The housing has a first leading edge portion which is capable of being located in a compressor/fan inlet flow path and which includes an interior wall section. The tube has a proximal portion including an air inlet which is adapted to receive a compressor bleed air flow and a distal portion which is located in the housing and which includes at least one air outlet hole. The hole is spaced apart from the interior wall section and is aligned to direct at least some compressor bleed air flow to impinge against the interior wall section. The housing includes an opening which receives air from the flow path when the housing is located in the flow path, wherein the opening is adapted for fluid communication with a sensor, and wherein the sensor measures at least one of air temperature and air pressure.

Abstract: A high temperature pressure transducer is fabricated from silicon carbide. A wafer of silicon carbide has reduced or active areas which act as deflecting diaphragms. Positioned on the reduced or active area is a silicon carbide sensor. The sensor is secured to the silicon carbide wafer by a glass bond. The pressure transducer is fabricated by first epitaxially growing a layer of highly N-doped 3C silicon carbide on a first silicon wafer or substrate. A second wafer of silicon carbide is selected to be a carrier wafer. The carrier wafer is etched preferentially to produce the deflecting members or reduced areas which serve as diaphragms. The 3C material on the silicon slice is patterned appropriately to provide a series of individual piezoresistors which then may be interconnected to form a Wheatstone bridge.

Abstract: A method and apparatus for measuring gas pressure by combining an ionization gauge with at least one other vacuum sensor. Nonvolatile memory coupled to the vacuum gauge contains calibration parameters unique to each individual sensor based on factory calibration. The nonvolatile memory may contain calibration parameters for a heat-sensitive vacuum sensor to compensate for the temperature gradients generated by the ionization gauge. The calibration parameters are a function of calibration data determined when the ionization gauge is both on and off. The nonvolatile memory may store a window of measurement data of the vacuum gauge that is updated at predetermined time intervals and in response to an event, such as an error event, to aid in investigating the cause of vacuum gauge malfunction or failure.

Abstract: Pressure measurement may be achieved by using a pressure-conveyance media that responds to externally applied pressure to convey pressure to a pressure sensor. With the conveyance of pressure, the pressure measurement may be accomplished by determining a pressure of the pressure-conveyance media, determining a temperature of the pressure-conveyance media, and determining pressure externally exerted on the pressure-conveyance media based one the pressure of the pressure-conveyance media and the temperature of the pressure-conveyance media.

Abstract: One or more heating elements comprise a heating element. One or more elongated beams comprise an elongated beam. The heating element is coupled with the elongated beam and induces a time-varying thermal gradient in the elongated beam to cause one or more oscillations of one or more of the one or more elongated beams.

Abstract: The present invention relates to a method of determining both pressures and temperatures in a high temperature environment. The present invention also relates to a method of determining temperatures about a pressure-sensing element using a bi-functional heater. In addition, the present invention preferably relates to a pressure sensor with the pressure-sensing element and a heating element both integrated into the sensor's packaging, preferably onto the diaphragm of the pressure sensor, and particularly to such a pressure sensor capable of operating at high or elevated temperatures, and even more particularly to such a pressure sensor wherein the heating element is capable of both heating, at least in part, the pressure-sensing element and monitoring the temperature of the application area. Preferably, the pressure-sensing element is formed from shape memory alloy (SMA) materials that can be used at high or elevated temperatures as a pressure sensor with high sensitivity.

Abstract: A pressure sensing system and method includes a pressure sensor configured to include a pressure sensing diaphragm and a pressure port. A memory circuit incorporated can be incorporated into the pressure port. A high order polynomial component can also be provided. One or more excitation signals are then applicable to the pressure sensor such that a voltage output thereof is measured and recorded at a plurality of predefined temperatures and pressures in order to generate pressure sensor output data. Such output data is then automatically input to the high order polynomial component in order to generate a set of correction coefficients usable for improving the accuracy of the pressure sensor. The pressure sensing diaphragm is preferably based on an Advanced Thick Film (ATF) configuration.

Abstract: A pressure measurement system includes a pressure transmitter and a remote seal assembly, and a capillary tube that connects a housing of the remote seal with a housing of the pressure transmitter utilizing at least one negligible-leakage quick connect coupling.

Abstract: A pressure detector for detecting a high side pressure from a high pressure side impulse line and a low side pressure from a low pressure side impulse line includes a high side pressure variance calculating section for calculating a high side pressure variance from a high side pressure fluctuation calculated from a high side pressure signal, a low side pressure variance calculating section for calculating a low side pressure variance from a low side pressure fluctuation calculated from a low side pressure signal, a rate calculating section for calculating a variable according to a ratio of the high side pressure variance to the low side pressure variance, and a determining section for determining blockage of the high pressure side impulse line or blockage of the low pressure side impulse line based on a value of the variable.

Abstract: For minimizing the span error of a pressure sensor having an essentially cylindrical platform and a measuring membrane joined to an end face of the platform, with the pressure measuring cell being axially clamped between an elastic sealing ring, which bears against the membrane-bearing end face of the pressure measuring cell, and a support ring, which bears against the rear face of the pressure measuring cell, the dimensions of the support ring are coordinated with the dimensions of the sealing ring and pressure measuring cell such that a radial deformation of the membrane-bearing end face caused by the axial clamping of the pressure measuring cell is sufficiently small that the span error of the pressure sensor arising from a reduction of the axial clamping force by at least 10% amounts to not more than about 0.02%. Additionally, arranged between the support ring and a clamping ring is a stiff decoupling element, which minimizes the temperature hysteresis of the span.

Abstract: A pressure sensor includes a case, terminals, a pressure sensing element, a port, and a temperature sensing element. The terminals are assembled to the case by insert molding and connectable to an external device. The pressure sensing element is electrically connected with the terminals and housed in the case. The port having a pressure receiving hole through which a pressure transmitting medium is led to the pressure sensing element is connected with the case. The temperature sensing element is electrically connected with the terminals and arranged in the pressure receiving hole. A part of each terminal is passed through the pressure receiving hole and extended to the temperature sensing element. The extended part is electrically connected to the temperature sensing element. The extending portion is formed as an insert molding portion of the case and held with a material forming the case.

Abstract: A pressure-sensing device and method for making and using such device having a temperature differential between two portions of the device is disclosed. A solid-state heat pump, such as a thermo-electric cooler (TEC), is used to pump heat from a cold portion to a hot portion of the device. A pressure sensor sensing the pressure of a hot fluid is disposed in the hot portion of the device, and sensor electronics are disposed in the cold portion of the device.

Abstract: A method and pressure-sensor system provide a digital-frequency output linearly proportional to a sensed pressure. The system comprises a MEMS pressure-sensing element to provide a pressure-sensing output and voltage-to-frequency converter provide the digital-frequency output. The pressure-sensor system may also comprise an amplifier to provide an output voltage linearly proportional to the pressure. A temperature sensor and temperature-compensation circuitry provide a temperature-compensation signal to the amplifier to at least partially offset the effects of temperature on the system. Some embodiments of the present invention comprise a microcontroller system comprising a microcontroller and an RF transmitter. The microcontroller may receive the digital-frequency output and may generate a notification signal when the sensed pressure is inside or outside a predetermined pressure range.

Abstract: A pressure sensor 11 is provided with a connecter housing 30 having a pressure sensing element 20 arranged on an end surface thereof, a sensor housing 40 constructed to have the connecter housing 30 inserted thereinto, a pressure chamber 452 defined between the end surface of the connecter housing 30 and the sensor housing 40, and a compensation circuit 21 for performing the processing and operation of a measured signal of the pressure sensing element 20 to output the measured signal.

Abstract: A thermal conductivity type pressure gauge comprises a gauge head (2) being rotatably mountable in a vessel whose environmental pressure is to be measured and an elongate electrical filament (6) mounted in the gauge head, the gauge head (2) having an inlet where through the electrical filament is exposed to the environmental pressure within the vessel and the filament (6) having directional component lengths in two orthogonal axes, one of the orthogonal axes X—X being parallel to the axis of rotation of the gauge head (2).

Abstract: A digital pressure meter is equipped with an operational (OP) amplifier circuit, and a thermistor circuit is connected with the OP amplifier circuit for causing change of an amplification ratio of the OP amplifier circuit with such that a temperature compensation for output signals is effected; the thermistor circuit includes thermistors with positive temperature coefficient or ones with negative temperature coefficient; with the help of the thermistor circuit, the digital pressure meter can perform a measurement with an accuracy of ±1% FSO (full scale output) within the working temperature range.

Abstract: An ultra high temperature hermetically protected transducer includes a sensor chip having an active area upon which is deposited piezoresistive sensing elements. The elements are located on the top surface of the silicon wafer chip and have leads and terminals extending from the active area of the chip. The active area is surrounded with an extending rim or frame. The active area is coated with an oxide layer which passivates the piezoresistive sensing network. The chip is then attached to a glass pedestal, which is larger in size than the sensor chip. The glass pedestal has a through hole or aperture at each corner. The entire composite structure is then mounted onto a high temperature header with the metallized regions of the header being exposed to the holes in the glass pedestal; a high temperature lead is then bonded directly to the metallized contact area of the sensor chip at one end. The leads are of sufficient length to extend into the through holes in the glass pedestal.

Abstract: A pressure sensor for detecting an effective pressure comprises a first pressure detection means for providing a first pressure measurement signal and a second pressure detection means for providing a second pressure measurement signal, wherein the first pressure measurement signal differs from the second pressure measurement signal, as well as an evaluation means for determining the effective pressure based on the first and the second pressure measurement signal. Thereby it is achieved that in a pressure measurement the measurement errors are reduced.

Abstract: The invention relates to a device for measuring pressure, temperature and/or flow velocity. It includes a sensor (6) with a sensor support body (13) provided with a diaphragm (15) covering a cavity (14) formed in the support body (13). A pressure sensitive element (41) is mounted on the diaphragm, for recording pressure. Furthermore, a temperature sensitive resistor (42) is mounted in the vicinity of the pressure sensitive resistor and has a known temperature dependence, for recording temperature. It also includes an electrical circuit (43, 44, 45, 46) selectively outputting signals from either of the pressure sensitive element and the temperature sensitive resistor.