With Pressure And/or Temperature Compensation Patents (Class 73/708)
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Patent number: 7954994Abstract: A combined pressure and temperature sensor for recording the pressure and the temperature of a medium. The combined pressure and temperature sensor includes a sensor element in which at least one channel is developed for accommodating a temperature sensor and at least one channel is developed for recording a pressure. The at least one channel, for recording a pressure, opens out under a pressure sensor. The at least one channel for the temperature sensor runs centrically in the sensor element.Type: GrantFiled: November 9, 2006Date of Patent: June 7, 2011Assignee: Robert Bosch GmbHInventors: Stefan Warth, Oliver Stoll, Christian Roesser, Markus Ledermann, Joerg Engelhardt
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Publication number: 20110100130Abstract: The present invention is a measuring cell with a base body, a measurement membrane which is arranged on the base body, and a measurement device, where a clearance between the measurement membrane and the base body is filled with a fluid which presents an increased heat conductivity (?) compared to air.Type: ApplicationFiled: August 18, 2010Publication date: May 5, 2011Applicant: VEGA Grieshaber KGInventor: Holger Gruhler
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Publication number: 20110100129Abstract: The present invention is a measuring cell comprising a base body. Layered upon the base body is a measurement membrane having a first measuring element, a measurement device, and an intermediate membrane. The intermediate membrane is arranged between the measurement membrane and the base body, and a second measuring element is arranged thereon. When a pressure force is applied to the cell, the measurement membrane is directed outward and undergoes deformation with respect to the intermediate membrane as well as the base body. The deformation causes the measuring capacitance formed by the measuring electrodes to change according to the pressure applied.Type: ApplicationFiled: August 18, 2010Publication date: May 5, 2011Applicant: VEGA Grieshaber KGInventor: HOLGER GRUHLER
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Publication number: 20110094305Abstract: An air pressure sensor (100) for impact recognition is provided, having a chamber (R), and a sensor element (S) for generating a signal as a function of the air pressure being situated in the chamber (R). The chamber (R) is sealed off by a pressure compensation element (M, MV). The pressure compensation element (M, MV) is designed in such a way that penetration of interfering substances into the chamber (R) is prevented. However, transmission of pressure into the chamber (R) from the outside is possible.Type: ApplicationFiled: February 26, 2009Publication date: April 28, 2011Inventors: Boris Adam, Martin Schuerer
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Patent number: 7903907Abstract: A sensor for force is formed from an elastomeric cylinder having a region with apertures. The apertures have passageways formed between them, and an optical fiber is introduced into these passageways, where the optical fiber has a grating for measurement of tension positioned in the passageways between apertures. Optionally, a temperature measurement sensor is placed in or around the elastomer for temperature correction, and if required, a copper film may be deposited in the elastomer for reduced sensitivity to spot temperature variations in the elastomer near the sensors.Type: GrantFiled: April 10, 2008Date of Patent: March 8, 2011Assignee: Intelligent Fiber Optic Systems, Inc.Inventors: Yong-Lae Park, Behzad Moslehi, Richard James Black, Mark R. Cutkosky, Kelvin K Chau
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Publication number: 20110041594Abstract: A pressure-compensation unit, particularly for a tank-pressure sensor in a tank of a motor vehicle. The pressure-compensation unit includes a housing lid and a gas-permeable filter diaphragm, which covers an air hole. The pressure-compensation unit includes a cap-shaped cover element, which covers the filter diaphragm.Type: ApplicationFiled: December 1, 2008Publication date: February 24, 2011Inventors: Reza Eslami, Masoud Habibi, Marcell Ott, Thomas Fessele
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Patent number: 7878067Abstract: A temperature compensating pressure sensor arrangement includes a capacitive pressure sensor having a substrate carrying CMOS layers. A conductive membrane is arranged on the substrate and defines a reference chamber such that capacitance changes resulting from displacement of the conductive membrane can be converted to pressure change values. A cap covers the conductive membrane and has openings to permit pressure changes to be detected by the conductive membrane. A capacitive temperature sensor is operatively arranged with respect to the capacitive pressure sensor and has a conductive membrane arranged on the substrate and defines a reference chamber such that capacitance changes resulting from displacement of the conductive membrane can be converted to temperature change values. The conductive member defining openings and cap covers and seals the conductive membrane from an external environment.Type: GrantFiled: November 3, 2008Date of Patent: February 1, 2011Assignee: Silverbrook Research Pty LtdInventors: Kia Silverbrook, Samuel George Mallinson
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Patent number: 7863907Abstract: Methods for making and systems employing pressure and temperature sensors are described. Embodiments include a capacitive element including a first conductor plate and a second conductor plate. Each plate includes a conductor layer formed on a substrate. In a pressure sensor embodiment, seal is positioned at or near the edges of the conductor plates, and a gas retained in a gap defined between the plates. In a temperature sensor embodiment, the gap defined between the plates is in fluid communication with the external environment.Type: GrantFiled: February 6, 2008Date of Patent: January 4, 2011Assignee: Chevron U.S.A. Inc.Inventor: Don M Coates
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Patent number: 7854171Abstract: The present invention relates to a temperature-compensated pressure sensor assembly for fitting within the valve stem of a vehicle tire. The assembly includes a substrate assembly defining a plurality of holes. A pressure sensor is mounted to the substrate assembly. The pressure sensor includes a first deflectable membrane defining a first chamber and a first cap mounted to the membrane to form a second chamber. A temperature compensation sensor is mounted to the substrate assembly. The temperature compensation sensor includes a second deflectable membrane mounted to the substrate assembly to define a third chamber and a second cap mounted to the other membrane to form a fourth chamber.Type: GrantFiled: September 21, 2008Date of Patent: December 21, 2010Assignee: Silverbrook Research Pty LtdInventors: Kia Silverbrook, Samuel George Mallinson
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Patent number: 7852191Abstract: A plate member 101 having flexible portions; plate members 102 to 104 having openings corresponding to the flexible portions of the plate member 101; a plate member 201 having flexible portions; and plate members 202 to 204 having openings corresponding to the flexible portions of the plate member 201 are formed by etching. The plate members 101 to 104 and 201 to 204 are bonded by diffusion bonding process to make first and second flanges 100 and 200. Interconnecting shafts are formed by cutting. The first and second flanges 100 and 200 and the interconnecting shafts are bonded by diffusion bonding process to make a strain generation unit 5. Strain gauges are attached to the lower face of the strain generation unit 5. A stain gauge type sensor 1 is thus made.Type: GrantFiled: November 13, 2007Date of Patent: December 14, 2010Assignee: Nitta CorporationInventor: Hideo Morimoto
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Patent number: 7841238Abstract: The invention provides for a pressure sensor with compensation for temperature variations. The sensor has CMOS layers deposited on a substrate, a conductive layer connected to the CMOS and a passivation layer deposited on the CMOS layers. The arrangement also includes a conductive active membrane spaced from the conductive layer to form an active chamber, and a conductive reference membrane spaced from the conductive layer to form a sealed reference chamber. Further included is a cap which covers the membranes, said cap exposing the active membrane to an outside fluid pressure. The active membrane further defines a foot which is located between the substrate and cap with a leg extending away from the substrate and terminating in a substantially planar deflectable portion, which deflects due to differential pressure stresses so that an active capacitance is developed between the active membrane and the conductive layer depending on the electrical permittivity e of the fluid.Type: GrantFiled: August 5, 2009Date of Patent: November 30, 2010Assignee: Silverbrook Research Pty LtdInventors: Kia Silverbrook, Samuel George Mallinson
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Patent number: 7836773Abstract: Optical fiber thermometer includes one optical fiber that relays light from the light source to a measuring unit, two parallel optical fibers that relay light from a mirror at the measuring unit to two light-receiving units, and an arithmetic processing circuit that calculates the temperature of the measuring unit from the ratio of electrical signals from the two light-receiving units; end surfaces of three optical fibers facing the reflecting face being fixed at an angle ? between the longitudinal direction of the optical fibers and the normal to the reflecting face that is not zero, the angle between the optical fibers for reception and projection being symmetrical based on the normal to the reflecting face. Each of the optical fibers is a single-mode fiber at the wavelength being used.Type: GrantFiled: April 17, 2009Date of Patent: November 23, 2010Assignee: Fujikura Ltd.Inventors: Akira Sakamoto, Keiichi Horimoto, Yoshikiyo Noguchi
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Patent number: 7832617Abstract: A method of welding an adapter fitting to a fitting on a measuring device system. The present disclosure also provides for a measuring device system having a first fitting that includes a stem, a second fitting that defines an opening sized to receive the first fitting, where the second fitting also defines an abutment face, wherein the second fitting is positioned around the first fitting with the abutment face abutting an outward end of the first fitting, and where at least one weld secures the first fitting to the second fitting.Type: GrantFiled: March 30, 2007Date of Patent: November 16, 2010Assignee: Ashcroft, Inc.Inventor: Tyler Jon Bessette
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Patent number: 7832277Abstract: A battery powered wireless fluid pressure sensor has a sealed chamber which can be vented to the outside atmosphere through a re-sealable reference port to allow a user to set the reference atmosphere inside the pressure sensor enabling the pressure sensor to provide absolute, gauge and true gauge pressure readings. The sensor calculates and transmits the fluid pressure taking into account the temperature of the pressure transducer, the temperature of the electronic devices and the barometric pressure inside the sealed chamber to provide accurate pressure measurements over a wide range of operating conditions.Type: GrantFiled: May 7, 2008Date of Patent: November 16, 2010Assignee: Electrochem Solutions, Inc.Inventor: Thomas A. Skwara
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Patent number: 7798005Abstract: The invention relates to a device and a method for detecting a fault in a measurement device comprising a resonator and means for measuring a resonant frequency of the resonator. According to the invention, the device further includes means delivering information (S3) representative of the quality factor of the resonator (3) at the resonant frequency.Type: GrantFiled: December 20, 2005Date of Patent: September 21, 2010Assignee: ThalesInventors: Bertrand Leverrier, Olivier Lefort
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Publication number: 20100218611Abstract: A semiconductor pressure sensor includes a silicon substrate, an active gauge resistance forming portion having a first diaphragm and a first gauge resistance formed on the silicon substrate, and a dummy gauge resistance forming portion for temperature compensation having a second diaphragm and a second gauge resistance, formed on the substrate. The first diaphragm of the active gauge resistance forming portion and the second diaphragm of the dummy gauge resistance forming portion for temperature compensation are formed of a common polysilicon film. The polysilicon film has an anchor portion to be connected to the substrate. The first and second diaphragms have mutually identical or symmetrical structures and the first and second gauges have mutually identical or symmetrical structures. Accordingly, a semiconductor pressure sensor capable of highly accurate temperature compensation and manufacturing method thereof can be provided.Type: ApplicationFiled: August 18, 2009Publication date: September 2, 2010Applicant: MITSUBISHI ELECTRIC CORPORATIONInventor: Kimitoshi SATO
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Patent number: 7784351Abstract: A field device with integrated temperature control comprises a housing, a temperature sensor, a controller and a terminal block. The housing encloses internal components of the field device. The temperature sensor and the controller are located inside the housing. The temperature sensor senses an internal temperature of the field device, and the controller controls the internal temperature by regulating heat supplied to the field device. The terminal block connects to the controller in order to regulate the heater power as a function of the internal temperature.Type: GrantFiled: October 16, 2008Date of Patent: August 31, 2010Assignee: Rosemount Inc.Inventor: Mark Stephen Schumacher
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Patent number: 7784350Abstract: An apparatus comprising a downhole measurement tool, a transducer coupled to the measurement tool, the transducer having a body with an outer surface, and a heater disposed adjacent the outer surface to conduct heat from the heater to the outer surface.Type: GrantFiled: February 7, 2007Date of Patent: August 31, 2010Assignee: Halliburton Energy Services, Inc.Inventor: Michael T. Pelletier
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Patent number: 7775116Abstract: This invention relates to a pressure measuring instrument, as well as a dedicated liner, especially for subsea use and adapted for coupling to a pressurized medium in a container or pipe through at leas tone opening therein and thus measure the pressure in the medium at this location, wherein the pressure measuring instrument is provided with at least one insertion part for positioning in said opening, the insertion part comprising a outward protruding liner, said liner being rotatably coupled to the insertion part and having an inner cylindrical or conical surface and an outer cylindrical or conical surface, said inner and outer surfaces having non-coinciding parallel or essentially parallel centre axis.Type: GrantFiled: April 20, 2006Date of Patent: August 17, 2010Assignee: Roxar Flow Measurement ASInventor: Per Hassel Sorensen
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Publication number: 20100199775Abstract: There is described a temperature compensation scheme for a pressure sensitive metal diaphragm transducer. The transducer employs a Wheatstone bridge fabricated from p-type piezoresistors. The Wheatstone bridge is glassed directly onto the metal diaphragm. As the temperature of operation increases, the diaphragm exhibits a temperature variation of the Modulus of Elasticity. The Modulus of the metal diaphragm decreases with increasing temperature. Because of this, the same pressure applied to the metal diaphragm causes it to deflect further, which in turns causes increased strain applied to the bridge. Because of this effect, the sensitivity of the transducer increases with increasing temperature. A resistor is now placed in series with the Wheatstone bridge. The resistor is in series with the biasing voltage and because the TCS of the diaphragm is of an opposite sign, the series resistor has an even higher TCR in series with the bridge.Type: ApplicationFiled: February 6, 2009Publication date: August 12, 2010Applicant: Kulite Semiconductor Products, Inc.Inventors: Anthony D. Kurtz, Joseph Van DeWeert, Boaz Kochman
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Publication number: 20100192694Abstract: A semiconductor device includes a diaphragm, a sensing element, and a circuit. The sensing element is configured to sense deflection of the diaphragm. The circuit is configured to heat the diaphragm to induce deflection of the diaphragm.Type: ApplicationFiled: February 3, 2009Publication date: August 5, 2010Applicant: Infineon Technologies AGInventor: Dirk Hammerschmidt
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Publication number: 20100190079Abstract: A method for performing a plausibility check of a fuel cell stack anode side pressure sensor to determine whether the pressure sensor is providing an accurate measurement. Prior to system start-up when a cathode side compressor is not providing cathode air to a fuel cell stack, and the cathode side of the stack is at ambient pressure, a pressure measurement from a differential pressure sensor between the anode side and the cathode side of the fuel cell stack is provided. The differential pressure sensor reading is added to a pressure measurement from an ambient pressure sensor, where the sum should be about the same as the pressure measurement from the anode side pressure sensor if the anode side pressure sensor is operating properly.Type: ApplicationFiled: January 29, 2009Publication date: July 29, 2010Applicant: GM GLOBAL TECHNOLOGY OPERATIONS, INC.Inventors: Loren Devries, Bruce J. Clingerman, Abdullah B. Alp, Aaron Rogahn
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Patent number: 7736312Abstract: An acoustic monitoring system that is able to verify the success or failure of the positional adjustment of a valve without the need for additional energy during non-invasive reprogramming is provided. The acoustic monitoring system includes a programmer for generating a sequence of commands to adjust the valve mechanism, and for receiving acoustic signals for analysis, a transmitter to implement the command and adjust the valve, and a sensor for detecting an acoustic signal generated from the valve during execution of the commands. A method for using the acoustic monitoring system is also provided.Type: GrantFiled: January 22, 2004Date of Patent: June 15, 2010Assignee: Codman & Shurtleff, Inc.Inventors: Terri K. Taylor, Meir Rosenberg, Rainuka Gupta, Stephen Ferrer Wilson, Pierre S. Ostiguy, Bertil Romner, Alan J. Dextradeur
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Publication number: 20100139407Abstract: The invention relates to a pressure measuring device (1) for measuring and/or monitoring pressure of a measured medium (14). The pressure measuring device (1) includes a sensor housing (9) and a measurement transmitter (3), wherein assigned to the sensor housing (9) is a pressure measuring cell (4) with a pressure sensitive measuring element (5), wherein assigned to the pressure measuring cell (4) is a temperature sensor (10; 11; 12; 13), and wherein assigned to the measurement transmitter (3) is a control/evaluation unit (16).Type: ApplicationFiled: October 9, 2007Publication date: June 10, 2010Inventors: Wolfgang Dannhauer, Michael Philipps
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Publication number: 20100125425Abstract: The invention is a method and system for detection and compensation of a rapid change in temperature on a pressure measurement cell, in which a measurement signal proportional to the deflection of a diaphragm is generated by means of a sensor. A reference signal proportional to the deflection of the diaphragm is generated by a second sensor; and, measured values are generated by a microprocessor from the measurement signal while the respective reference values are generated from the reference signal. The reference values are compared with the expected values from a tolerance band, and either a pressure-induced deflection of the diaphragm is detected when there is a correspondence, and the measured values are output as measured values for the measured pressure; or, if there is not a correspondence, a deflection of the diaphragm due to a rapid change in temperature is detected, the measured values are corrected and output.Type: ApplicationFiled: September 22, 2009Publication date: May 20, 2010Inventors: Joern JACOB, Holger GRUHLER
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Patent number: 7720628Abstract: Systems and methods for digitally controlling sensors. In one embodiment, a digital controller for a capacitance diaphragm gauge is embedded in a digital signal processor (DSP). The controller receives digitized input from a sensor AFE via a variable gain module, a zero offset module and an analog-to-digital converter. The controller automatically calibrates the received input by adjusting the variable gain and zero offset modules. The controller also monitors and adjusts a heater assembly to maintain an appropriate temperature at the sensor. The controller utilizes a kernel module that allocates processing resources to the various tasks of a gauge controller module. The kernel module repetitively executes iterations of a loop, wherein in each iteration, all of a set of high priority tasks are performed and one of a set of lower priority tasks are performed. The controller module thereby provides sensor measurement output at precisely periodic intervals, while performing ancillary functions as well.Type: GrantFiled: December 29, 2005Date of Patent: May 18, 2010Assignee: Brooks Instrument, LLCInventors: David M. Albert, Edwin K. Arrant, Marvin B. Edwards
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Publication number: 20100107769Abstract: A sensor module is provided having a sensor element, a housing and a substrate, the sensor element being situated on the substrate and the sensor element is provided to be at least partially embedded in the housing; and the sensor module further having a compensation element for compensating for thermal deformations of the housing; the housing being essentially situated between the substrate and the compensation element.Type: ApplicationFiled: November 2, 2009Publication date: May 6, 2010Inventors: Eric OCHS, Frieder Haag, Eckart Schellkes
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Publication number: 20100095776Abstract: A field device with integrated temperature control comprises a housing, a temperature sensor, a controller and a terminal block. The housing encloses internal components of the field device. The temperature sensor and the controller are located inside the housing. The temperature sensor senses an internal temperature of the field device, and the controller controls the internal temperature by regulating heat supplied to the field device. The terminal block connects to the controller in order to regulate the heater power as a function of the internal temperature.Type: ApplicationFiled: October 16, 2008Publication date: April 22, 2010Applicant: Rosemount Inc.Inventor: Mark Stephen Schumacher
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Patent number: 7698950Abstract: An absolute pressure transducer for outputting a signal indicative of an absolute pressure of a process to be measured is provided. The pressure transducer consists of a pressure-tight pressure port, which is connectable to the process, a housing accommodating pressure sensors and a common circuit board, a first pressure sensor, which analogically detects a difference between the process pressure and an ambient pressure inside the housing, a second pressure sensor, which detects the ambient pressure inside the housing as an absolute pressure, and the common circuit board, which is connected to both the first pressure sensor and the second pressure sensor and furthermore has a data processing unit. Here, the second pressure sensor is adapted to issue an electronic signal indicative of the ambient pressure.Type: GrantFiled: April 4, 2008Date of Patent: April 20, 2010Assignee: WIKA Alexander Wiegand GmbH & Co. KGInventor: Alexander Kraatz
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Patent number: 7697798Abstract: A catheter with many fiber optic pressure sensors. The sensor diaphragm is formed from a wafer with a thin silicon layer and a silicon substrate layer separated by a silicon dioxide layer. A method includes masking and etching channels through the silicon substrate layer in a pattern of concentric circles to form a concentric circular etched channels and cylindrical unetched portions of the silicon substrate layer between the channels, exposing the silicon dioxide in the etched regions, and dissolving the exposed silicon dioxide to expose the crystalline silicon layer in the etched regions. The unetched cylindrical portion of the silicon substrate forms the diaphragm support element and the thin silicon layer forms the diaphragm. After applying a reflective coating to the exposed thin silicon layer, the support element face is adhered to the end face of a tubular housing, and a fiber optic probe is inserted in the tubular housing.Type: GrantFiled: January 21, 2009Date of Patent: April 13, 2010Assignee: The United States of America as represented by the Secretary of the NavyInventors: Nicholas Lagakos, Joseph A Bucaro
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Patent number: 7694572Abstract: A pressure-measuring device has an initial pressure-measuring cell (1?) with a first thermal expansion coefficient (?1), a first housing (1), which is surrounded circumferentially by a second housing (1) having a second thermal expansion coefficient (?2) which is greater than the first thermal expansion coefficient (?1), and an O-ring, which is positioned between the pressure-measuring cell (1?) and the second housing (2), such that a third housing (3) is provided which circumferentially encloses both the pressure-measuring cell (1?) and the second housing, (2) and which has a third thermal expansion coefficient (?3) that is less than or equal to the first thermal expansion coefficient (?1).Type: GrantFiled: August 19, 2008Date of Patent: April 13, 2010Assignee: Vega Grieshaber KGInventor: Thomas Kopp
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Patent number: 7690262Abstract: A pressure sensor device includes a temperature sensor mounted on a common housing composed of a resin head and a resin pipe both hermetically connected to each other. The pressure sensor device is mounted on, for example, on an intake manifold of an internal combustion engine to measure an amount of air supplied to the engine based on detected pressure and temperature of the air. A pressure sensor is mounted on the resin head, and a temperature sensor element is supported in the resin pipe. A lead wire of the temperature sensor element such as a thermistor is electrically connected to a conductor bar embedded in the resin pipe. The temperature sensor is directly exposed to the air in the intake manifold, and a size of the temperature sensor and the lead wire is made small to make a response speed of the temperature sensor element high.Type: GrantFiled: February 29, 2008Date of Patent: April 6, 2010Assignee: DENSO CORPORATIONInventor: Hideki Nakabayashi
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Patent number: 7677105Abstract: To provide a double-ended tuning fork type piezoelectric resonator that includes: a piezoelectric element having two arm portions disposed in parallel, a first supporting portion that support one ends of each of the arm portions, a second supporting portion that support the other ends of each of the arm portions; and an exciting electrode formed on a surface of each of the arm portions, and has a structure suitable for being built into a pressure sensor as a pressure sensitive element. A double-ended tuning fork type piezoelectric resonator includes: a piezoelectric element 3 having two arm portions 4 disposed in parallel and apart from each other, and a first supporting portion 5 and a second supporting portion 6 that respectively support one ends and the other ends of each of the arm portions; and an exciting electrode 7 formed on a surface of each arm portion.Type: GrantFiled: September 25, 2006Date of Patent: March 16, 2010Assignee: Epson Toyocom CorporationInventor: Osamu Ishii
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Publication number: 20100050775Abstract: The invention relates to a pressure sensor for measurements in hot, dynamic processes. The pressure sensor comprises a cylindrical housing in which a measuring element is located, and a round or annular membrane having at least one outer support. The outer support is arranged on the housing, offset behind a housing extension. The measuring element is adapted to acquire measurement data as a result of an axial displacement of the membrane. The housing extension is provided with a heat shield which is arranged, except on its edges, interspaced behind a gap.Type: ApplicationFiled: November 12, 2007Publication date: March 4, 2010Applicant: Kistler Holding AGInventor: Josef Glaser
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Publication number: 20100043564Abstract: A pressure sensor assembly for fitting within the valve stem of a vehicle tire comprises a substrate assembly defining a plurality of holes; a pressure sensor and a temperature compensation sensor mounted to the substrate assembly, each sensor including a corrugated deflectable membrane defining a first chamber and a cap mounted to the membrane to form a second chamber; and a cover configured to engage with the pressure sensor and the temperature compensation sensor to define an active chamber and a reference chamber respectively, the active chamber being exposed to tire pressure when the pressure sensor assembly is fitted within the valve stem whereas the reference chamber is sealed from tire pressure.Type: ApplicationFiled: October 29, 2009Publication date: February 25, 2010Inventors: Kia Silverbrook, Samuel George Mallinson
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Publication number: 20100032438Abstract: A pressure compensation member suitable to be placed in a fluid dispensing channel, a valve unit comprising this pressure drop compensation member and a container comprising this pressure compensation member or this valve unit are disclosed. The pressure compensation member is adapted to maintain a substantially constant flow of fluid through the fluid dispensing channel.Type: ApplicationFiled: April 13, 2009Publication date: February 11, 2010Inventors: Steven Michael Bourque, M. Scott Curry, Michael Thomas DeMellia, Andrew James Ford, Maurice Paul Matte, Timothy Collin Wheatley
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Publication number: 20090293626Abstract: The invention provides for a pressure sensor with compensation for temperature variations. The sensor has CMOS layers deposited on a substrate, a conductive layer connected to the CMOS and a passivation layer deposited on the CMOS layers. The arrangement also includes a conductive active membrane spaced from the conductive layer to form an active chamber, and a conductive reference membrane spaced from the conductive layer to form a sealed reference chamber. Further included is a cap which covers the membranes, said cap exposing the active membrane to an outside fluid pressure. The active membrane further defines a foot which is located between the substrate and cap with a leg extending away from the substrate and terminating in a substantially planar deflectable portion, which deflects due to differential pressure stresses so that an active capacitance is developed between the active membrane and the conductive layer depending on the electrical permittivity e of the fluid.Type: ApplicationFiled: August 5, 2009Publication date: December 3, 2009Inventors: Kia Silverbrook, Samuel George Mallinson
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Publication number: 20090293625Abstract: A multivariable process fluid pressure transmitter includes an electronics module and a sensor module. The sensor module is coupled to the electronics module. A process fluid temperature sensor is coupled to the process fluid pressure transmitter. A differential pressure sensor is disposed within the sensor module and is operably coupled to a plurality of process fluid pressure inlets. A static pressure sensor is also disposed within the sensor module and is operably coupled to at least one of the process fluid pressure inlets. A first temperature sensor is disposed within the sensor module and is configured to provide an indication of a temperature of the differential pressure sensor. A second temperature sensor is disposed within the sensor module and is configured to provide an indication of a temperature of the static pressure sensor. Measurement circuitry is operably coupled to the differential pressure sensor, the static pressure sensor, and the first and second temperature sensors.Type: ApplicationFiled: May 27, 2009Publication date: December 3, 2009Inventors: Paul C. Sundet, Mark C. Fandrey
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Publication number: 20090293624Abstract: The present invention is a device that allows the pressure inside an aircraft landing gear shock strut to be measured. A charging valve is modified by integrating a small pressure sensing device into the stem of the part such that the active diaphragm is subjected to the pressure within the charged vessel. The wires from the pressure sensing device are connected to a receptacle or connector in the bore of the stem such that a corresponding electrical receptacle may be mated for the purposes of making a measurement. The internal receptacle is designed such that the flow of air or oil is not excessively impeded and normal servicing tools do not interfere with the receptacle.Type: ApplicationFiled: August 24, 2007Publication date: December 3, 2009Applicant: MESSIER-DOWTY INC.Inventors: R. Kyle SCHMIDT, Simon Hou
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Patent number: 7617734Abstract: A pressure sensor assembly is provided for fitting within the valve stem of a vehicle tire. The assembly comprises a substrate assembly defining a plurality of holes. A pressure sensor and a temperature compensation sensor are mounted to the substrate assembly. Each sensor includes a deflectable membrane defining a first chamber and a cap mounted to the membrane to form a second chamber. A cover is provided for engaging with the pressure sensor and the temperature compensation sensor to define an active chamber and reference chamber respectively. The active chamber is exposed to tire pressure when the pressure sensor assembly is fitted within the valve stem whereas the reference chamber is sealed from tire pressure.Type: GrantFiled: October 7, 2008Date of Patent: November 17, 2009Assignee: Silverbrook Research Pty LtdInventors: Kia Silverbrook, Samuel George Mallinson
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Patent number: 7607353Abstract: The invention relates particularly to a sealing device (8) for sealing a pressure measuring cell housing (3), wherein the sealing device (8) comprises a pressure compensation opening (23; 23?) for a pressure compensation line (21; 21?; 21?, 20) of a pressure measuring cell (4) received in the pressure measuring cell housing (3), wherein the sealing device (8) is made of a dimensionally stable hard part (18; 18*; 18?) having at least one elastic soft part (19; 19°; 19*; 19?), which is disposed in the region of the pressure compensation opening (23; 23?) on the hard part (18; 18*; 18?).Type: GrantFiled: January 2, 2008Date of Patent: October 27, 2009Assignee: Vega Grieshaber KGInventor: Thomas Kopp
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Publication number: 20090249882Abstract: An absolute pressure transducer for outputting a signal indicative of an absolute pressure of a process to be measured is provided. The pressure transducer consists of a pressure-tight pressure port, which is connectable to the process, a housing accommodating pressure sensors and a common circuit board, a first pressure sensor, which analogically detects a difference between the process pressure and an ambient pressure inside the housing, a second pressure sensor, which detects the ambient pressure inside the housing as an absolute pressure, and the common circuit board, which is connected to both the first pressure sensor and the second pressure sensor and furthermore has a data processing unit. Here, the second pressure sensor is adapted to issue an electronic signal indicative of the ambient pressure.Type: ApplicationFiled: April 4, 2008Publication date: October 8, 2009Inventor: Alexander KRAATZ
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Patent number: 7587944Abstract: The present invention relates to a method of determining both pressures and temperatures in a high temperature environment. The present invention also relates to a method of determining temperatures about a pressure-sensing element using a bi-functional heater. In addition, the present invention preferably relates to a pressure sensor with the pressure-sensing element and a heating element both integrated into the sensor's packaging, preferably onto the diaphragm of the pressure sensor, and particularly to such a pressure sensor capable of operating at high or elevated temperatures, and even more particularly to such a pressure sensor wherein the heating element is capable of both heating, at least in part, the pressure-sensing element and monitoring the temperature of the application area. Preferably, the pressure-sensing element is formed from shape memory alloy (SMA) materials that can be used at high or elevated temperatures as a pressure sensor with high sensitivity.Type: GrantFiled: July 21, 2008Date of Patent: September 15, 2009Assignee: Orbital Research Inc.Inventors: Greg Shaw, Troy Prince, Joseph Snyder, Mike Willett, Frederick Lisy
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Patent number: 7581447Abstract: The invention provides for a temperature compensating pressure sensing arrangement. The arrangement includes a substrate having sealed channels on which is deposited a CMOS layer, with a conductive layer and a passivation layer deposited on the CMOS layer. The arrangement also includes a conductive active membrane spaced from the conductive layer to form an active chamber, and a conductive reference membrane spaced from the conductive layer to form a sealed reference chamber. Further included is a cap which covers the membranes, said cap exposing the active membrane to an outside fluid pressure. The active membrane further defines a foot which is located between the substrate and cap with a leg extending away from the substrate and terminating in a substantially planar deflectable portion, which deflects due to differential pressure stresses so that an active capacitance is developed between the active membrane and the conductive layer depending on the electrical permittivity e of the fluid.Type: GrantFiled: November 18, 2008Date of Patent: September 1, 2009Assignee: Silverbrook Research Pty LtdInventors: Kia Silverbrook, Samuel George Mallinson
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Patent number: 7574919Abstract: An integrated sensor includes a pressure sensor integrated with a temperature sensor. When the sensor is attached to an object of attachment at a mounting position at an angle of ?rq degrees with respect to an ideal attachment position, in which a central axis of at sensor body element of the temperature sensor element is disposed perpendicular to a direction in which a gas to be measured passes through the object of attachment, an inclination angle ?pos at which the central axis of the sensor body element is inclined at the mounting position with respect to a position of the central axis of the main body element at the ideal attachment position is set according to the following equation: (?rq??allow)??pos?(?rq+?allow) wherein ?allow represents an allowable angle at which an allowable response speed of the temperature sensor element is obtained.Type: GrantFiled: November 9, 2007Date of Patent: August 18, 2009Assignee: Fuji Electric Device Technology Co., Ltd.Inventors: Kazunori Saito, Kimihiro Ashino, Katsumichi Ueyanagi
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Patent number: 7577543Abstract: A digital signal representative of a difference in pressure is received from a differential pressure transmitter. A noise signal is obtained by processing the signal through a band pass filter or otherwise to provide a filtered noise signal. Absolute values of the filtered noise signal are calculated and compared to one or more predetermined threshold values to determine if one or more impulse lines are plugged. A training mode is used to determine the thresholds, which may be a function of flow rate and other flow conditions.Type: GrantFiled: February 6, 2006Date of Patent: August 18, 2009Assignee: Honeywell International Inc.Inventors: Jagadeesh Brahmajosyula, Yogananda A. Prabhakara, Lokesh T. Siddaramanna
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Publication number: 20090199646Abstract: This optical fiber thermometer includes one optical fiber for projection that relays light from the light source to a measuring unit, two optical fibers for light-reception that relay light reflected from a reflecting face of a mirror provided at the measuring unit to two light-receiving units, and an arithmetic processing circuit that calculates the pressure of the measuring unit from the ratio of electrical signals from the two light-receiving units; end surfaces of three optical fibers arranged to face the reflecting face being fixed such that an angle ? between the longitudinal direction of the optical fibers and the normal to the reflecting face is not zero, the two optical fibers for light-reception being parallel, fixing angles between each of them and the optical fiber for projection being symmetrical based on the normal to the reflecting face as a reference, and each of the optical fibers being a single-mode fiber at the wavelength being used, According to this invention, it is possible to provide anType: ApplicationFiled: April 17, 2009Publication date: August 13, 2009Applicant: Fujikura Ltd.Inventors: Akira SAKAMOTO, Keiichi Horimoto, Yoshikiyo Noguchi
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Patent number: 7571652Abstract: A pressure sensor apparatus and a pressure sensor housing are provided that are capable of preventing the occurrence of frozen moisture, swelling of a gel-like coating member and damage of a pressure sensor element without accumulating moisture, oil, gasoline or the like on a protective wall even when the pressure sensor apparatus is disposed obliquely. The protective wall prevents entry of foreign matter into the pressure detection chamber, or a pressure sensor housing of the pressure sensor apparatus. The protective wall has an inclined surface that is provided with an angle ?8a in which a second angle ?2 is acquired between a horizontal line HL and the inclined surface that slopes downward when the pressure sensor apparatus is disposed obliquely by a first angle ?1 with respect to the horizontal line HL.Type: GrantFiled: November 13, 2007Date of Patent: August 11, 2009Assignee: Fuji Electric Device Technology Co., Ltd.Inventors: Kazunori Saito, Kimihiro Ashino, Katsumichi Ueyanagi
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Publication number: 20090193902Abstract: A pressure sensor for sensing a fluid pressure comprising: a first chamber including a first conductive membrane, wherein a fluid is sealed within the first chamber at a reference pressure such that the first conductive membrane deflects from pressure differences between the reference and the fluid pressure; a second chamber including a second conductive membrane sealed from the fluid pressure, wherein the second membrane deflects in response to a change in temperature which the pressure sensor is exposed thereto; and a circuit in electrical communication with the first and second conductive membrane, the circuit being configured to obtain a first and second signal from the first and second conductive membranes respectively, the first and second signals being indicative of the deflection of the first and second conductive membranes, wherein the circuit adjusts the first signal by the second signal to generate an output signal indicative of the fluid pressure.Type: ApplicationFiled: April 14, 2009Publication date: August 6, 2009Inventors: Kia Silverbrook, Samuel George Mallinson
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Patent number: 7552642Abstract: A method for determining the maximum allowable working pressure of a microchannel device, particularly a diffusion-bonded, shim-based microchannel device operating at a temperature greater to or equal to a base material threshold temperature where significant creep may predominate, and when employing non-traditional materials of construction, when non-traditional fabrication or joining methods are used, or when spurious artifacts arise.Type: GrantFiled: September 14, 2007Date of Patent: June 30, 2009Assignee: Velocys, Inc.Inventors: Paul W. Neagle, Laura J. Silva, Eric A. Daymo, David J Kuhlmann, Marc Wagner