Abstract: Recovering helium from a gaseous stream includes contacting an acid gas removal membrane with a gaseous stream to yield a permeate stream and a residual stream, removing a majority of the acid gas from the residual stream to yield a first acid gas stream and a helium depleted clean gas stream, removing a majority of the acid gas from the permeate stream to yield a second acid gas stream and a helium rich stream, and removing helium from the helium rich stream to yield a helium product stream and a helium depleted stream. A helium removal system for removing helium from a gaseous stream including hydrocarbon gas, acid gas, and helium includes a first processing zone including a first acid gas removal unit, a second processing zone including a second acid gas removal unit, a third processing zone, and a helium purification unit.

Abstract: A system for enhancing adsorption of contaminated vapors to increase treatment capacity of a regenerable, synthetic adsorptive media. The system includes an inlet configured to receive a flow of contaminated vapors. One or more vessels are coupled to the inlet, the one or more vessels each including a regenerable, synthetic adsorptive media therein, are configured to remove contaminants from the vapors by adsorption. A vapor cooling subsystem is coupled to the inlet, and configured to cool the flow of contaminated vapors, thereby increasing the treatment capacity of the regenerable synthetic adsorptive media.

Abstract: A system and process for the recovery of at least one halogenated hydrocarbon from a gas stream. The recovery includes adsorption by exposing the gas stream to an adsorbent with a lattice structure having pore diameters with an average pore opening of between about 5 and about 50 angstroms. The adsorbent is then regenerated by exposing the adsorbent to a purge gas under conditions which efficiently desorb the at least one adsorbed halogenated hydrocarbon from the adsorbent. The at least one halogenated hydrocarbon (and impurities or reaction products) can be condensed from the purge gas and subjected to fractional distillation to provide a recovered halogenated hydrocarbon.

Abstract: A method for removing volatile organic substances from the contained air of closed habitats includes a) conducting contained air through an adsorber bed formed by a hydrophobic zeolite bed, b) closing the adsorber bed, c) extracting the air from the adsorber bed and feeding the air into the closed habitat, d) desorbing the volatile organic substances, in particular freons such as R134a and VOCs, from the adsorber bed by heating the adsorber, e) leading the desorbed substances to an environment outside the closed habitat, wherein water vapor, water, or CO2 is fed to the adsorber bed through a flushing line. The device includes a housing for accommodating an adsorber, a contained-air supply line, a contained-air return line, a flushing line, and least one outlet-air line for returning air from the adsorber bed into the closed habitat and for conducting the desorbate to an environment outside the closed habitat.

Abstract: Cavitand compositions that comprise void spaces are disclosed. The void spaces may be empty, which means that voids are free of guest molecules or atoms, or the void spaces may comprise guest molecules or atoms that are normally in their gas phase at standard temperature and pressure. These cavitands may be useful for industrial applications, such as the separation or storage of gasses. Novel cavitand compounds are also disclosed.

Abstract: An off gas extraction system cleans common sources of off gas, such as storage tanks and polluted soils. Off gas is extracted, followed by compression and condensation. Compression and condensation produce an off gas that can be reintroduced as a treated gas into the off gas source. Alternatively, a regenerative absorber cleans the treated gas by adsorbing residual chemical vapor and concentrates the removed chemical vapors and reprocesses them. If the treated gas is not reintroduced into the off gas source, conventional scrubbers may used on the back end of the system to produce a final exhaust as prescribed by environmental regulation. Methods of accomplishing the same are similarly provided, including novel methods for degassing storage tanks and treating polluted soils to meet current environmental regulations, as well as green technology and sustainability initiatives.

Abstract: A promoted carbon and/or non-carbon base sorbent are described that are highly effective for the removal of mercury from flue gas streams. The promoted sorbent comprises a carbon and/or non-carbon base sorbent that has reacted with and contains forms of halogen and halides. Optional components may be added to increase and/or preserve reactivity and mercury capacity. These may be added directly with the base sorbent, or in-flight within a gas stream (air, flue gas, etc.), to enhance base sorbent performance and/or mercury capture. Mercury removal efficiencies obtained exceed conventional methods. The promoted sorbent can be regenerated and reused. Base sorbent treatment and preparation methods are also described. Methods for in-flight preparation, introduction, and control of the active base sorbent into the mercury contaminated gas stream are described.

Abstract: A promoted activated carbon sorbent is described that is highly effective for the removal of mercury from flue gas streams. The sorbent comprises a new modified carbon form containing reactive forms of halogen and halides. Optional components may be added to increase reactivity and mercury capacity. These may be added directly with the sorbent, or to the flue gas to enhance sorbent performance and/or mercury capture. Mercury removal efficiencies obtained exceed conventional methods. The sorbent can be regenerated and reused. Sorbent treatment and preparation methods are also described. New methods for in-flight preparation, introduction, and control of the active sorbent into the mercury contaminated gas stream are described.

Abstract: A method is described for recycling hydrogen (H2) supplied to a chamber (10) in a gas stream comprising hydrogen and at least one other gas, such as silane. A gas comprising at least hydrogen is drawn from the chamber (10) using a first vacuum pump (32) that exhausts gas therefrom at a sub-atmospheric pressure. A portion of the gas exhausted from the first vacuum pump (32), for example between 70 and 95% of this gas, is diverted away from a second vacuum pump (34) backing the first vacuum pump (32). In one embodiment, the diverted portion of the sub-atmospheric pressure gas is treated to produce a purified gas comprising hydrogen, which is stored in a storage vessel (14). The composition of the purified gas is analysed, and, depending on the results of the analysis, at least one of hydrogen and silane is added to the stored gas so that the composition of the stored gas is similar to that of the gas initially supplied to the chamber (10). Gas is then supplied to the chamber (10) from the storage vessel (14).

Abstract: A method for removing volatile organic substances from the contained air of closed habitats includes a) conducting contained air through an adsorber bed formed by a hydrophobic zeolite bed, b) closing the adsorber bed, c) extracting the air from the adsorber bed and feeding the air into the closed habitat, d) desorbing the volatile organic substances, in particular freons such as R134a and VOCs, from the adsorber bed by heating the adsorber, e) leading the desorbed substances to an environment outside the closed habitat, wherein water vapor, water, or CO2 is fed to the adsorber bed through a flushing line. The device includes a housing for accommodating an adsorber, a contained-air supply line, a contained-air return line, a flushing line, and least one outlet-air line for returning air from the adsorber bed into the closed habitat and for conducting the desorbate to an environment outside the closed habitat.

Abstract: The invention concerns a process for the production of chlorine dioxide comprising formation of chlorine dioxide in a reaction medium in at least one reaction vessel and withdrawing chlorine dioxide from said at least one reaction vessel, the process further comprising a step of treating reaction medium or at least one process stream originating directly or indirectly from said at least one reaction vessel with an adsorbent efficient for removing chlorinated organic compounds from said at least one process stream.

Abstract: Disclosed is a process for removing impurities from a product stream comprising trans HFO-1234ze and an HFO-1234 impurity that uses one or more adsorbents that are selective for the HFO-1234 impurity, such that the HFO-1234 impurity is removed from the product stream. One such impurity is HFO-1234zc, which is removed from its mixture with trans HFO-1234ze by action of an adsorbent having pores in the range of from about 5 angstroms to about 10 angstroms.

Abstract: A system and process for the recovery of at least one halogenated hydrocarbon from a gas stream. The recovery includes adsorption by exposing the gas stream to an adsorbent with a lattice structure having pore diameters with an average pore opening of between about 5 and about 50 angstroms. The adsorbent is then regenerated by exposing the adsorbent to a purge gas under conditions which efficiently desorb the at least one adsorbed halogenated hydrocarbon from the adsorbent. The at least one halogenated hydrocarbon (and impurities or reaction products) can be condensed from the purge gas and subjected to fractional distillation to provide a recovered halogenated hydrocarbon.

Abstract: Chemically combined chlorides are removed from intermediate and product streams of a hydrocarbon reforming process by contacting the streams with zeolite 13X, having a Si/Al ratio of less than 1.25.

Abstract: Systems and processes are provided that relate to the recovery of sorbates in processes utilizing temperature controlled adsorption. Sorbate recovery can include providing a temperature controlled adsorber that is undergoing a regeneration cycle after undergoing an adsorption cycle. The temperature controlled adsorber can have one or more adsorption flow passages and one or more heat transfer flow passages. The one or more adsorption flow passages can contain an adsorptive material coating with a sorbate adsorbed thereto. A heating fluid can be provided to the one or more heat transfer flow passages of the temperature controlled adsorber. A regeneration stream can be provided to the one or more adsorption flow passages of the temperature controlled adsorber. The adsorptive material coating can be regenerated by removing the sorbate from the temperature controlled adsorber to produce a regeneration effluent stream.

Abstract: A method comprising (i) providing a metal organic framework formed by AlIII ions to which fumarate ions are coordinated to produce a porous framework structure, (ii) bringing a substance into contact with the metal organic framework such that the substance is uptaken by the porous metal organic framework to provide storage of or controlled release of, the substance.

Abstract: There is provided a gas separation apparatus for separating a specified gas from a gas to be treated containing a plurality of gases. The gas separation apparatus includes a plurality of serially-connected separation units that separate the specified gas from other gases by using a column, and a suction unit that controls an inside of the column to a reduced pressure. At least two of the plurality of separation units differ from each other in at least one separation condition.

Abstract: An apparatus and a method for separating a specified gas from a gas to be treated containing the specified gas comprising at least one ingredient, which comprises allowing the gas to be treated to flow through a column without the use of another gas for transferring the gas to be treated, while keeping the inside of the column packed with a packing material at a reduced pressure. The above apparatus and method can be suitably used for separating a specified gas having a high purity at a low cost.

Abstract: Processes comprising: providing a crude gas stream having a temperature not exceeding 40° C., the crude gas stream comprising hydrogen chloride and at least one organic impurity; condensing at least a portion of the at least one organic impurity from the crude gas stream at a temperature not exceeding 0° C. to form a prepurified gas stream and a condensate comprising condensed organic impurity; subjecting at least a portion of the prepurified gas stream to adsorption on an adsorption medium to provide a purified gas stream; and separating the condensate into at least a head gas stream comprising residual hydrogen chloride and a sump stream comprising at least a portion of the condensed organic impurity.

Abstract: (Chloro)hydrocarbon-free hydrogen chloride and phosgene-free (chloro)hydrocarbons are recovered from a hydrogen chloride stream having (chloro)hydrocarbons and phosgene.

Abstract: A method of desorbing a volatile component from a spent adsorbent is disclosed, which includes flowing a stream of supercritical carbon dioxide through a rotating packed bed of the spent adsorbent; and collecting an effluent from the rotating packed bed, which contains supercritical carbon dioxide and the volatile component entrained therein. In one embodiment of the present invention a spent activated carbon from a process for recovering 2,2,3,3-tetrafluro-1-propanol from a gas stream containing 2,2,3,3-tetrafluro-1-propanol is regenerated by flowing a stream of supercritical carbon dioxide through a rotating packed bed of the spent activated carbon.

Abstract: Process for providing a purified gas stream, comprising: providing a crude gas stream comprising an organic impurity; condensing at least a portion of the impurity from the gas stream to form a prepurified gas stream; and subjecting the prepurified stream to adsorption on a first adsorption medium; wherein the first medium is subjected to a regeneration comprising: providing a circulating inert gas stream having a temperature of at least 100° C.; passing the circulating inert gas stream over the first medium to form an organic impurity-loaded inert gas stream; cooling the loaded stream; condensing at least a portion of the organic impurity from the cooled stream to provide a prepurified circulating inert gas stream; subjecting the prepurified gas stream to adsorption on a second adsorption medium to provide a purified circulating inert gas stream; and recycling the purified gas stream to the circulating inert gas stream.

Abstract: A process for recovery of n-propyl bromide solvent includes mixing a solvent laden vapor stream with an additive and reclaiming the solvent using a carbon adsorption system. A carbon adsorption system and an additive dispensing system form a system for the recovery of n-propyl bromide. These processes and systems use an additive that includes an acid scavenger and a carrier.

Abstract: Use of molecular sieves to reduce the amount of trifluoromethane (HFC-23) present in a mixture of HFC-23 with other materials, particularly from mixtures containing HFC-23 and trifluoroiodomethane (CF3I).

Abstract: Process for recovering (chloro)hydrocarbon-free hydrogen chloride and phosgene-free (chloro)hydrocarbons from a hydrogen chloride stream comprising (chloro)hydrocarbons and phosgene, which comprises i) in a first step, connecting a first adsorber and a second adsorber in series and passing the fresh hydrogen chloride stream comprising phosgene and (chloro)hydrocarbons firstly through the first adsorber and subsequently through the second adsorber until essentially no more (chloro)hydrocarbon is adsorbed by the first adsorber, ii) in a second step, passing the fresh hydrogen chloride stream through the second adsorber while the first adsorber is regenerated, with essentially phosgene-free (chloro)hydrocarbon being obtained in the regeneration, iii) in a third step, passing the fresh hydrogen chloride steam firstly through the second adsorber and subsequently through the regenerated first adsorber until essentially no more (chloro)hydrocarbon is adsorbed by the second adsorber, iv) in a fourth step, passing

Abstract: A promoted activated carbon sorbent is described that is highly effective for the removal of mercury from flue gas streams. The sorbent comprises a new modified carbon form containing reactive forms of halogen and halides. Optional components may be added to increase reactivity and mercury capacity. These may be added directly with the sorbent, or to the flue gas to enhance sorbent performance and/or mercury capture. Mercury removal efficiencies obtained exceed conventional methods. The sorbent can be regenerated and reused. Sorbent treatment and preparation methods are also described. New methods for in-flight preparation, introduction, and control of the active sorbent into the mercury contaminated gas stream are described.

Abstract: A large amount of a medium containing a volatile chlorinated organic compound (VOC) with a low concentration is passed through an adsorber filled with an adsorbent which adsorb and desorb the VOC to collect the VOC in the medium in the adsorber; a gas containing water vapor is then brought into contact with the adsorbent to desorb and discharge the VOC from the adsorber; the desorbed gas is cooled to condense the VOC and water; a small amount of the VOC with a high concentration vaporized from the condensate is further irradiated with light in the presence of chlorine to decompose the VOC; and the decomposed product is subsequently treated. This constitution can allow a large amount of the VOC with a low concentration to be irradiated with light in the presence of chlorine to efficiently treat the VOC.

Abstract: Gas supplying method and system in which effective component gas in exhaust gas can be separated and purified efficiently to be resupplied regardless of variation in the flow rate or composition of the exhaust gas and consumed gas can be replenished efficiently. In a method for collecting exhaust gas discharged from a gas using facility, separating/purifying effective component gas contained in the exhaust gas and supplying the effective component gas thus obtained to the gas using facility, the exhaust gas discharged from the gas using facility is added with a replenishing gas of the same components as the effective component gas before the effective component gas is separated and purified.

Abstract: It is the object of the invention to provide a material for retaining polyhalogenated compounds, the material avoiding the drawbacks of activated carbon and polyolefins. The object is accomplished by the use of a material for retaining polyhalogenated compounds, having a filler, which is suitable for adsorbing polyhalogenated compounds, and a polyolefin matrix, into which the material is completely incorporated and enclosed.

Abstract: The present invention relates to a method of purifying gaseous nitrogen trifluoride from CF4 as impurity. The method comprises selective adsorption of nitrogen trifluoride by dehydrated erionite at a temperature of from ?30 to 30° C., displacement of carbon tetrafluoride by an inert gas, desorption and condensation of the purified nitrogen trifluoride. The purification yields 99.99% pure NF3 with CF4 content not over 10 ppm. The proposed method of NF3 sorption purification makes it possible to carry out the process at an ambient temperature and with long operating life of the sorbent. The method is practically feasible, economically expedient, and easy to implement under industrial conditions.

Abstract: A collector 3 capable of collecting and sampling simultaneously various types of chlorinated organic compounds in both particulate and gaseous forms contained in a fluid and easy to extract the sampled chlorinated organic compounds therefrom includes a sampling filter 7 installed in a holder 6 having a discharge route 12a. The sampling filter 7 contains fibers and an inorganic binder for binding the fibers to one another and has a fluid-permeability. Various types of the chlorinated organic compounds such as dioxins and coplanar PCBs in both particulate and gaseous forms contained in a sample gas flowing into the holder 6 from a flue duct 25 through a sampling pipe 2 and an introduction pipe 8 are collected and sampled while the sample gas being passed through the sampling filter 7 and the resulting sample gas from which the chlorinated organic compounds are removed is then discharged out to the outside through the discharge route 12a.

Abstract: A process for removing a chlorinated methane impurity from a stream comprising a halogenated compound other than the chlorinated methane impurity, the process comprising contacting the stream with a polymer adsorbent to produce a purified product stream, the polymer adsorbent having a pore size distribution characterized by a higher cumulative porosity as a function of the log of pore diameter than that of activated carbon.

Abstract: It is the object of the invention to provide a material for retaining polyhalogenated compounds, the material avoiding the drawbacks of activated carbon and polyolefins. The object is accomplished by the use of a material for retaining polyhalogenated compounds, having a filler, which is suitable for adsorbing polyhalogenated compounds, and a polyolefin matrix, into which the material is completely incorporated and enclosed.

Abstract: Using a distillation separator, a gas to be treated is separated into a plurality of gas groups having different boiling points. Then, the specific gases included in each of the plurality of gas groups separated at the first separator and having similar boiling points are separated using a chromatographic separator. In this manner, specific gases can be separated from the gas to be treated containing a plurality of specific gases.

Abstract: This invention relates to an improvement in a process for removing C2F6 as an impurity from a CF4 containing gas, preferably CF4 produced by the reaction of F2 with carbon. The improvement in the process comprises the steps: contacting the CF4 containing gas, containing C2F6 impurity, with an activated carbon having a CCl4 activity from 43 to 55 in an adsorption bed to effect adsorption of the C2F6 impurity; and, recovering purified CF4 product in the effluent from the adsorbent bed.

Abstract: Compositions and methods for destroying chemical and biological agents such as toxins and bacteria are provided wherein the substance to be destroyed is contacted with finely divided metal oxide nanoparticles. The metal oxide nanoparticles are coated with a material selected from the group consisting of surfactants, waxes, oils, silyls, synthetic and natural polymers, resins, and mixtures thereof. The coatings are selected for their tendency to exclude water while not excluding the target compound or adsorbates. The desired metal oxide nanoparticles can be pressed into pellets for use when a powder is not feasible. Preferred metal oxides for the methods include MgO, SrO, BaO, CaO, TiO2, ZrO2, FeO, V2O3, V2O5, Mn2O3, Fe2O3, NiO, CuO, Al2O3, SiO2, ZnO, Ag2O, the corresponding hydroxides of the foregoing, and mixtures thereof.

Abstract: The present invention relates to a method of purifying gaseous nitrogen trifluoride from CF4 as impurity.

Abstract: An adsorbent and process for producing an absorbent capable of decomposing an organic halogen compound, is provided. The adsorbent can adsorb organic halogen compounds contained in waste gases and can assuredly decompose them without synthesizing them. A salt of Pt and/or Pd, an organic titanium compound and an organic binder are reacted in a solvent, to thereby synthesize a dispersion of an organic metal compound precursor containing Pt and/or Pd and Ti in molecules thereof, a sol of TiO2 is added to the dispersion to prepare a catalyst-coating solution, an activated carbon is impregnated with the catalyst-coating solution, and the resulting mixture is heated, thereby allowing the activated carbon to carry thereon an organic halogen compound-decomposing catalyst comprising TiO2 and, dispersed therein, fine particles of Pt and/or Pd. In a low temperature range of 130 to 150° C.

Abstract: A new method for removing HF and related organic fluorides from fluid streams in which the fluoride species exist as impurities and, in particular, from hydrocarbon fluid streams containing no more than about 1.0% by weight total combined fluorides. The method consists of contacting the fluid stream with an adsorbent consisting essentially of activated alumina that has been treated with a promoter material selected from the oxides and phosphates of alkali metals and alkaline earth metals, and mixtures thereof. This is preferably accomplished by providing a suitable absorber vessel charged with the adsorbent to form a fixed bed, and then conducting the fluoride-contaminated fluid through the fixed bed, either in a downflow or an upflow manner.

Abstract: A method and apparatus for controlling or removing mercury, mercury compounds and high molecular weight organics, if present, from a resource recovery exhaust stream by separately adding a carbonaceous char to the flue gas while it is still within the unit. The char can be produced in situ by adding a carbonaceous material and allowing it to thermally decompose.

Abstract: A method and adsorption powder useful for the removal of mercury and other metals, as well as furans, dioxins and other organic compounds from high temperature and high moisture gaseous streams. The method utilizes an adsorption powder characterized as containing a carbon-based powder and an effective amount of cupric chloride suitable to remove metals and organic compounds. The powder may contain calcium hydroxide, sulfur, potassium permanganate, potassium iodide, and combinations thereof.

Abstract: Formation of dioxins in flue gases is inhibited by contacting the flue gas with at least one of sodium phosphite, calcium phosphate, sodium hypophosphite, and calcium as reducing agents preferably at a temperature in the range of from 150° C. to 850° C. Hydrogen chlorides are also rendered harmless by the contact with the reducing agent. Also, metal ions contained in the fly ash of the flue gas are reduced to metals to reduce the occurrence of dissolution of the metals in subsequent treatment of the fly ash.

Abstract: A method and apparatus for controlling or removing mercury, mercury compounds and high molecular weight organics, if present, from a waste incineration apparatus exhaust stream by separately adding a carbonaceous char to the flue gas while the flue gas is still within the unit. The char can be produced in situ by adding a carbonaceous material and allowing the carbonaceous material to thermally decompose.

Abstract: A process, especially a PSA or TSA process, for purifying a gas containing at least carbon dioxide (CO2) as impurity, in which the carbon dioxide is adsorbed on an adsorbent comprising particles of activated alumina. According to this process, the activated alumina has a specific surface area of between 200 m2/g and 299 m2/g and contains at least 80% aluminum oxide (Al2O3), silicon oxide (SiO2), iron oxide (Fe2O3) and from 0.001% to 7.25% of at least one oxide of at least one alkali or alkaline-earth metal, such as sodium and potassium oxides. According to the invention, the gas stream to be purified is air or a synthesis gas.

Abstract: Filter medium includes at least two kinds of filter media particles. A first plurality of filter media particles includes an extended surface area substrate comprising at least one transition metal impregnant. A second plurality of filter media particles includes an extended surface area substrate comprising a tertiary amine impregnant. In preferred embodiments, at least one and preferably both of the kinds of filter media particles is/are substantially free of chromium, and more preferably contain no detectable chromium. The filtering medium has very broad filtering capabilities. The filtering medium successfully achieves performance levels mandated both by applicable industrial filter approval specifications and by international military filter performance specifications.

Abstract: A cleaning agent and a cleaning process for efficiently removing noxious halogen-based gases such as fluorine, chlorine, boron trifluoride, boron trichloride and tungsten hexafluoride from exhaust gases from semiconductor fabrication processes. The cleaning agent is produced by adherently adding alkali metal formate and/or alkaline earth metal formate to activated carbon, or adherently adding alkali metal hydroxide and/or alkaline earth metal hydroxide together with alkali metal formate and/or alkaline earth metal formate to activated carbon. By exposing exhaust gases to the cleaning agent, noxious halogen-based gases in the exhaust gases are efficiently removed with little desorption of halogen-based gases adsorbed on the cleaning agent. Also, the cleaning treatment is further improved in safety and efficiency by a pre-treatment cleaning agent comprising a metal oxide or a metal hydroxide and a post-treatment cleaning agent prepared by adherently adding sodium formate to a metal oxide.

Abstract: A method of removing dioxins from an exhaust gas, including the steps of introducing gamma-alumina into a stream of the dioxin-containing exhaust gas, and sorbing dioxins on the gamma-alumina.

Abstract: The present invention relates to a process for preparing mono-disperse adsorber resin gels by polymerizing monomer droplets to give monodisperse polymers, followed by haloalkylating and crosslinking the resultant polymers, and also relates to the use of these resins.

Abstract: A CVD device A is provided which is equipped with a gas introduction part A3 having an inert gas supply part G1 for supplying a diluting inert gas and a cleaning gas supply path G2 for supplying a cleaning gas, each connected therewith, and equipped with an exhaust gas discharge part A4 for releasing an exhaust gas; an exhaust gas circulation part D1 for circulating an exhaust gas from the CVD device, a cooling part D4 for cooling down and liquefying the cleaning gas in the exhaust gas, and a recovery part 4 for recovering the cleaning gas liquefied in said cooling part D4; the diluting inert gas is composed of a gas having a boiling point lower than that of the cleaning gas; a supply part 6 for supplying a cooling inert gas having the same composition as the diluting inert gas in a liquid state, an inert gas circulation part D3 which is cooled down by heat of evaporation of the cooling inert gas, and an inert gas discharge part 7 for discharging the cooling inert gas evaporated in the inert gas circulation p

Abstract: A process for removing sulfur-containing compounds and halocarbons such as fluorocarbons and chlorocarbons from gases to provide gas streams which contain these compounds at unprecedentedly low levels using an adsorption train of four beds has been developed. The first bed serves to remove water, the second and third beds remove sulfur-containing compounds generally, and the fourth adsorbent bed removes sulfur-containing compounds and halocarbons such as chlorocarbons and fluorocarbons to very low levels.