Patents Represented by Attorney Allston L. Jones
  • Patent number: 7671966
    Abstract: Parallel data bus architecture, lithography system and method for substrate patterning with a high-resolution image by data generation transferring, display or printing high edge placement accuracy images from multiple exposures of plurality of predefined patterns with lower edge placement accuracy. Data bus architecture includes n predetermined patterns in n memory arrays each storing a low resolution pattern to be formed onto microelement array with a data bus connecting memory arrays to an image transducer memory array. Data bus includes switches allowing data transfer from any one memory array to the image transducer array with a memory control unit connected to memory arrays and one or more data bus switches so 2m?1 columns of pattern data stored in the mth memory array are sequentially transferred to 2m?1 memory cell columns of the image transducer memory array, m an integer begging at 1 incremented by 1 to n.
    Type: Grant
    Filed: October 22, 2004
    Date of Patent: March 2, 2010
    Assignee: Ultratech, Inc.
    Inventor: David A. Markle
  • Patent number: 7612372
    Abstract: Methods and systems for performing laser thermal processing (LTP) of semiconductor devices are disclosed. The method includes forming a dielectric cap atop a temperature-sensitive element, and then forming an absorber layer atop the dielectric layer. A switch layer may optionally be formed atop the absorber layer. The dielectric cap thermally isolates the temperature-sensitive element from the absorber layer. This allows less-temperature-sensitive regions such as unactivated source and drain regions to be heated sufficiently to activate these regions during LTP via melting and recrystallization of the regions, while simultaneously preventing melting of the temperature-sensitive element, such as a poly-gate.
    Type: Grant
    Filed: December 2, 2004
    Date of Patent: November 3, 2009
    Assignee: Ultratech, Inc.
    Inventors: Yun Wang, Shaoyin Chen
  • Patent number: 7577403
    Abstract: In one-tuner smart antennas, a representation of the antenna element wideband signal is correlated with a representation of the smart antenna output signal to give a measure of the selected channel bandpass power and desired signal power. Since only signals in the selected channel bandpass of the wideband antenna signals can be correlated with signals in the selected channel, the correlator allows only the selected channel bandpass components of the wideband antenna input signal to contribute to the correlator output. This eliminates the influence of adjacent channels/bands signals and prevents capture by strong adjacent signals. As the smart antenna adapts and reduces the selected channel bandpass interference, the measure becomes that of the desired signal power. The present invention reduces the distortion and capture of the antenna branch amplitude limiter for the weight calculation, power detection of the input power and AGC of an antenna element.
    Type: Grant
    Filed: October 5, 2004
    Date of Patent: August 18, 2009
    Inventor: Kenneth F. Rilling
  • Patent number: 7528937
    Abstract: An apparatus for measuring the relative positions of frontside and backside alignment marks located on opposite sides of a substrate is disclosed. The apparatus includes upper and lower optical systems that allow for simultaneous imaging of frontside and backside alignment marks. The frontside and backside alignment mark images are processed to determine the relative position of the marks, as a measurement of the alignment and/or overlay performance of the tool that formed the marks on the substrate.
    Type: Grant
    Filed: August 5, 2002
    Date of Patent: May 5, 2009
    Assignee: Ultratech, Inc.
    Inventors: Albert J. Crespin, Jim Woodruff, Ray Ellis, Scott Kulas, Joe Jamello, Emily True
  • Patent number: 7519346
    Abstract: The present invention reduces the degradation in performance of one or more radio signals that are co-transmitted with a first radio signal from the same transmitting antenna in the same frequency channel and received by the same antenna due to multipath or other shared interference, where the one or more radio signals can be separated from the first radio signal.
    Type: Grant
    Filed: June 15, 2006
    Date of Patent: April 14, 2009
    Inventor: Kenneth F. Rilling
  • Patent number: 7514305
    Abstract: Methods and apparatuses are provided for improving the intensity profile of a beam image used to process a semiconductor substrate. At least one photonic beam may be generated and manipulated to form an image having an intensity profile with an extended uniform region useful for thermally processing the surface of the substrate. The image may be scanned across the surface to heat at least a portion of the substrate surface to achieve a desired temperature within a predetermined dwell time. Such processing may achieve a high efficiency due to the large proportion of energy contained in the uniform portion of the beam.
    Type: Grant
    Filed: June 28, 2006
    Date of Patent: April 7, 2009
    Assignee: Ultratech, Inc.
    Inventors: Andrew M. Hawryluk, Boris Grek, David A. Markle
  • Patent number: 7494942
    Abstract: A method for performing laser thermal annealing (LTA) of a substrate using an annealing radiation beam that is not substantially absorbed in the substrate at room temperature. The method takes advantage of the fact that the absorption of long wavelength radiation (1 micron or greater) in some substrates, such as undoped silicon substrates, is a strong function of temperature. The method includes preheating a portion of the substrate to a critical temperature where the absorption of long-wavelength annealing radiation is substantial, and then irradiating the portion of the substrate with the annealing radiation to generate a temperature capable of annealing the portion of the substrate.
    Type: Grant
    Filed: July 6, 2006
    Date of Patent: February 24, 2009
    Assignee: Ultratech, Inc.
    Inventors: Somit Talwar, David A. Markle
  • Patent number: 7494070
    Abstract: The present invention includes a unique irrigation sprinkler system with a unique sprinkler head design; a unique method of defining the planted area to be served by the sprinkler head; a unique method for determining when that planted area needs to be watered; a unique way of providing even coverage throughout the planted area when being watered; the ability to use one sprinkler head to individually water multiple, non-overlapping planted areas; a unique way of addressing multiple sprinkler heads in the same sprinkler system; and a unique method for remotely determining the integrity of the sprinkler system.
    Type: Grant
    Filed: December 22, 2003
    Date of Patent: February 24, 2009
    Inventor: Galen Collins
  • Patent number: 7490728
    Abstract: A crane, in particular to an offshore crane, having a hoist rope winch, a hydraulic hoist winch drive and an overload protection which is connected to the hoist winch drive and which, when a predetermined permitted limit load is reached, permits a drawing off of the hoist rope from the hoist rope winch under a predetermined variable restoring force dependent on the radius and/or the permitted working load of the crane. A decoupling of the hoist winch drive and thus a mechanical separation of the powertrain between the hoist rope winch and the hoist winch drive is therefore dispensed with and instead the retention force varying in dependence on the radius and/or the respectively permitted working load of the crane is provided by the hoist rope winch drive motor.
    Type: Grant
    Filed: July 14, 2006
    Date of Patent: February 17, 2009
    Assignee: Liebherr-Werk Nenzing GmbH
    Inventor: Eugen Schobesberger
  • Patent number: 7482254
    Abstract: Apparatus for and methods of thermally processing undoped or lightly doped semiconductor wafers (30) that typically are not very absorptive of an annealing radiation beam (14) are disclosed. The apparatus (10) uses a relatively low power activating radiation beam (240) with a photon energy greater than the bandgap energy of the semiconductor substrate in order to generate free carriers (315) at and near the substrate surface (32). The free carriers so generated enhance the absorption by the substrate surface of the longer wavelength annealing radiation beam. The annealing radiation beam is thus able to rapidly heat the substrate surface and permit subsequent rapid cooling to obtain, for example, a high level of electrical activity (activation) of dopants (310) formed therein. The invention obviates the need to pre-heat the substrate in order to increase absorption of the annealing radiation beam when performing thermal processing.
    Type: Grant
    Filed: September 26, 2005
    Date of Patent: January 27, 2009
    Assignee: Ultratech, Inc.
    Inventor: Paul E. Bakeman, Jr.
  • Patent number: 7449803
    Abstract: Electromagnetic motor with a slider that moves linearly with respect to the stator in either direction. Embodiments include slider internal or external the stator. Slider includes one magnetic flux producing element in all embodiments. Internal slider embodiments stator includes a minimum of three magnetic flux producing elements and a maximum of four such elements. External slider embodiments stator includes two magnetic flux producing elements. All embodiments provide positive slider return to center at rest position. In internal slider embodiments the slider is centered within the stator resulting from either: a combination of a repelling force from a single magnetic flux producing element in opposition to gravitational pull on the slider due to its weight; or equal and opposite repelling forces on opposite sides of the stator from a magnetic flux producing element on opposite sides of the stator all three elements in longitudinal alignment with each other.
    Type: Grant
    Filed: March 21, 2005
    Date of Patent: November 11, 2008
    Inventor: Joseph Y. Sahyoun
  • Patent number: 7442909
    Abstract: Apparatus and methods are described for of measuring amplitude and phase variations in a spatially coherent beam of light. A beam of coherent light is made incident upon a spatial array of phase modulating elements displaying a pixellated first phase distribution. In a measuring region of said spatial array, the phase distribution is changed to a new value while retaining the first phase distribution outside the measuring region, for example by flashing a single pixel. The change in intensity resulting from the change in phase distribution is then determined.
    Type: Grant
    Filed: December 9, 2004
    Date of Patent: October 28, 2008
    Assignee: Thomas Swan & Co. Ltd
    Inventor: Melanie Holmes
  • Patent number: 7433051
    Abstract: Provided are methods to be carried out prior to, while, and/or after performing a photolithographic process to a wafer that involve wafer misalignment assessment. The method involves obtaining curvature and/or deformation information of a surface of the wafer over a plurality of locations so as to obtain a curvature map of the wafer. The curvature map is processed to obtain a stress map of the wafer. The stress map is used to determine displacement of a layer of the wafer. The displacement information is used to determine a degree of misalignment in the photolithographic process.
    Type: Grant
    Filed: March 9, 2007
    Date of Patent: October 7, 2008
    Assignee: Ultratech, Inc.
    Inventor: David Owen
  • Patent number: 7417706
    Abstract: A beam steering device uses a liquid crystal with an array of back electrodes. Voltages are applied to the array to cause a desired phase distribution across the array, the distribution being selected to steer a beam incident upon the array into a desired direction. Reflective elements are disposed to reflect light incident in the spaces between the electrodes to reduce losses and to smooth the transitions in phase between adjacent electrodes.
    Type: Grant
    Filed: May 22, 2006
    Date of Patent: August 26, 2008
    Assignee: Thomas Swan and Co. Ltd.
    Inventor: Melanie Holmes
  • Patent number: 7399945
    Abstract: Apparatus and methods for thermally processing a substrate with scanned laser radiation are disclosed. The apparatus includes a continuous radiation source and an optical system that forms an image on a substrate. The image is scanned relative to the substrate surface so that each point in the process region receives a pulse of radiation sufficient to thermally process the region.
    Type: Grant
    Filed: November 3, 2006
    Date of Patent: July 15, 2008
    Assignee: Ultratech, Inc.
    Inventors: Somit Talwar, David A. Markle
  • Patent number: 7391630
    Abstract: A Power Factor Correction (PFC) system providing near unity power factor for an AC power source (VAC) connected to a complex load. The system includes a bridge rectifier, boost or buck-boost converter, complex load, and pulse width modulation (PWM) controller to provide pulses with variable duty cycle to a power switch. The invention is a constant pulse proportional current (CPPC) PWM controller that generates trains of pulses constant in frequency and duty cycle for one semi-cycle of the VAC. The duty cycle of the driving signal is modified by applying open-loop correction signals to summing nodes of PWM circuits. Since the PWM provides a constant train of driving pulses with constant duty cycle for one semi-cycle of the VAC, the current absorbed by the converter is contingent and linearly proportional to the voltage. Thus, the output current follows the voltage resulting in a power factor of near unity.
    Type: Grant
    Filed: October 25, 2004
    Date of Patent: June 24, 2008
    Assignee: PF1, Inc.
    Inventor: Benjamin Acatrinei
  • Patent number: 7376994
    Abstract: An inflatable bed includes an inflatable bed body having a top layer, a bottom layer, and an annular surrounding layer interconnecting the top and bottom layers and cooperating with the top and bottom layers to define an inflatable space. The surrounding layer is formed with an accommodating groove unit. An air valve is disposed on the inflatable bed body.
    Type: Grant
    Filed: July 19, 2006
    Date of Patent: May 27, 2008
    Inventor: Hsin-Tsai Wu
  • Patent number: 7369251
    Abstract: Techniques and systems for using optical interferometers to obtain full-field optical measurements of surfaces, such as surfaces of flat panels, patterned surfaces of wafers and substrates. Applications of various shearing interferometers for measuring surfaces are described.
    Type: Grant
    Filed: January 28, 2004
    Date of Patent: May 6, 2008
    Assignee: Ultratech, Inc.
    Inventors: Ares J. Rosakis, David Owen, Stephen Gledden, Sean Olson
  • Patent number: 7360626
    Abstract: A speaker that is designed to substantially eliminate wobble of the voice coil during operation, and thus remove that source of distortion and early failure of the speaker. This is accomplished with the creation of triangular ring that extends upward from the top edge of the voice coil bobbin with that ring mating with a flat diaphragm at a right angle directly above the top edge of the bobbin. The outer edge of the diaphragm connects to the inner edge of the surround at the point where a sloping side of the “triangle” is also connected and slopes down to the top edge of the bobbin where the opposite end is connected. The outer portion of the diaphragm provides the third side of the triangle.
    Type: Grant
    Filed: August 24, 2006
    Date of Patent: April 22, 2008
    Inventor: Joseph Yaacoub Sahyoun
  • Patent number: 7326877
    Abstract: Chuck methods and apparatus for supporting a semiconductor substrate and maintaining it at a substantially constant background temperature even when subject to a spatially and temporally varying thermal load. Chuck includes a thermal compensating heater module having a sealed chamber containing heater elements, a wick, and an alkali metal liquid/vapor. The chamber employs heat pipe principles to equalize temperature differences in the module. The spatially varying thermal load is quickly made uniform by thermal conductivity of the heater module. Heatsinking a constant amount of heat from the bottom of the heater module accommodates large temporal variations in the thermal heat load. Constant heat loss is preferably made to be at least as large as the maximum variation in the input heat load, less heat lost through radiation and convection, thus requiring a heat input through electrical heating elements. This allows for temperature control of the chuck, and hence the substrate.
    Type: Grant
    Filed: December 1, 2004
    Date of Patent: February 5, 2008
    Assignee: Ultratech, Inc.
    Inventors: Iqbal A. Shareef, Igor Landau, David A. Markle, Somit Talwar, Michael O. Thompson, Ivelin A. Angelov, Senquan Zhou