Abstract: On a back face of a semiconductor wafer, an annular convex portion is formed at an outer periphery so as to surround a flat concave portion formed by back grinding. The back face of the semiconductor wafer is pressed against an adhesive surface of a supporting adhesive tape joined to a ring frame. Thus, the annular convex portion is joined to the adhesive tape. Further, the adhesive tape is deformed while being pressed from a side of its non-adhesive surface. As a result, the adhesive tape is pushed into and joined to the flat concave portion of the back face of the semiconductor wafer.

Abstract: A silicon object formation target substrate is arranged in a first chamber, a silicon sputter target is arranged in a second chamber communicated with the first chamber, plasma for chemical sputtering is formed from a hydrogen gas in the second chamber, chemical sputtering is effected on the silicon sputter target with the plasma thus formed, producing particles contributing to formation of silicon object, whereby a silicon object is formed, on the substrate, from the particles moved from the second chamber to the first chamber.

Abstract: A pressure wave generator is provided, which has excellent output stability over time. This pressure wave generator comprises a substrate, a heat generating layer, and a heat insulating layer formed between the substrate and the heat generating layer. A pressure wave is generated in a surrounding medium (air) by a change in temperature of the heat generating layer, which is caused upon energization of the heat generating layer. The heat insulating layer comprises a porous layer and a barrier layer formed between the porous layer and the heat generating layer to prevent diffusion of reactive substances such as oxygen and moisture in the air and impurities into the porous layer. By the formation of the barrier layer, it is possible to prevent a reduction in output of the pressure wave generator caused by a change over time of the porous layer.

Abstract: Plasma producing method and apparatus wherein a plurality of high-frequency antennas are arranged in a plasma producing chamber, and a high-frequency power supplied from a high-frequency power supply device (including a power source, a phase controller and the like) is applied to a gas in the chamber from the antennas to produce inductively coupled plasma. At least some of the plurality of high-frequency antennas are arranged in a fashion of such parallel arrangement that the antennas successively neighbor to each other and each of the antennas is opposed to the neighboring antenna. The high-frequency power supply device controls a phase of a high-frequency voltage applied to each antenna, and thereby controls an electron temperature of the inductively coupled plasma.

Abstract: A classification apparatus for classifying and separating particles having particle sizes within a predetermined range is disclosed. In a preferred embodiment of the classification apparatus, a center electrode (3) and an outside electrode (4) generate an electric field for classifying charged fine particles according to electric mobility. In the upper part of a housing (1), a sheath gas supply portion (7) is provided. An aerosol supply portion (11) has an introduction port (11a) provided on the outside electrode (4) side in a classification region (5), and supplies a charged aerosol at a constant flow rate through the introduction port (11a). On the downstream side in the flow of a sheath gas in the classification region (5), a larger-size particle discharge portion (13) is provided.

Abstract: A spatial information detecting device is provided, which is capable of reducing the possibility that a saturation phenomenon is caused by the influence of an environmental light. This device includes a photoelectric converting portion for receiving a signal light from a target space to generate electric charges, a charge separating portion for separating electric charges corresponding to a constant amount of a bias component as undesired electric charges from the electric charges generated by the photoelectric converting portion, a charge accumulating portion for accumulating the remaining electric charges as effective electric charges reflecting a fluctuation component of the signal light, a barrier control electrode for forming a potential barrier between the charge separating portion and the charge accumulating portion, and a charge take-out portion for outputting the effective electric charges as an received-light output.

Abstract: A method of this invention involves: detecting a shape of an outer periphery of a semiconductor wafer with a first detecting device; determining a center position of the semiconductor wafer based on a detected result by the first detecting device; receiving a light beam reflected from a surface of the semiconductor wafer with a second detecting device; detecting an alignment part based on a detected result by the second detecting device to determine a position of the alignment part; and detecting a defect based on the detected result by the second detecting device to determine a position of the defect.

Abstract: An adhesive tape is supplied to a back face side of a ring frame, joined to the ring frame with a joining roller, and cut by pivoting a cutter blade along the ring frame. Subsequently, an inspection ring of an inspecting mechanism perform suction on the adhesive tape while contacting the adhesive tape adjacent an inner periphery of the ring frame. Separation of the adhesive tape from the ring frame is determined based on variations of the suction pressure. When the separation of the adhesive tape from the ring frame is detected, the adhesive tape is joined again with the joining roller provided in the cutter mechanism.

Abstract: This electromagnetic switching device comprises an electromagnetic device 1 in which a movable core 15 comes into contact with or separates from a fixed core 14 in response to energization of an excitation coil 11 wound around a coil bobbin 10 a contact device 2 with a fixed contact 21 and a movable contact which comes into contact with or separates from the fixed contact in conjunction with a movement of the movable core 15 of the electromagnetic device, and a boxy case 3 configured to house the electromagnetic device and the contact device.

Abstract: In a radiation detector according to this invention, a portion of a semiconductor, located in a connection of a common electrode to a lead wire, is dented in a recess form from other portions of a semiconductor, in a range short of a radiation detection effective area. An insulating seat is disposed to fill the portion located in the connection. The common electrode is formed to cover at least part of the seat. The lead wire is connected to a portion of the incidence surface of the common electrode located on the seat. Thus, the detector can avoid performance degradation resulting from connection of the lead wire to the common electrode, and avoid problems of heat deformation stress and radiation attenuation.

Abstract: A gel adhesive composition of the invention contains a crosslinked water-soluble polymer, water, a moisturizer, an amphipathic polymer, a water-insoluble polymer having adhesiveness, and an electrolytic salt and the composition contains the water-insoluble polymer in an amount of 3 to 20% by weight and the amphipathic polymer in an amount of 0.05 to 7.0% by weight with respect to the total amount of the composition except water.

Abstract: A physical activity measuring system analyzes analyzing body motions of a user to accurately determine the exercise intensity. The system includes a portable device which is adapted to be carried by the user and is equipped with a body sensor and an indicator for indication of the exercise intensity. The body sensor senses the user's body motions to give corresponding motion strength. The portable device has a processor which constitutes an exercise calculator which has a predetermined relationship between a default standard deviation of the motion strength and an exercise intensity scale. The exercise intensity calculator collects a time series data of the motion strengths within a predetermined first time frame, obtains a standard deviation of thus collected motion strengths, and converting the standard deviation into an instant exercise intensity within the intensity scale in accordance with the predetermined relationship.

Abstract: An annular convex portion is formed along an outer periphery of a back face of a wafer so as to surround a ground area in the back face. The wafer is placed on a holding table with its front face directed upward. A locking member of the holding table supports and contacts the outer periphery of the annular convex portion, thereby securing the wafer. In this state, a separating adhesive tape is supplied toward a surface of a protective tape joined to the front face of the wafer. Then, a joining member presses the adhesive tape against the wafer, thereby joining the adhesive tape to the surface of the protective tape. Further, a guide member guides the adhesive tape joined to the protective tape in a reverse direction, Thus, the adhesive tape and the protective tape are simultaneously separated from the front face of the wafer.

Abstract: An electrostatically atomizing device includes a housing and an electrostatically atomizing unit disposed within the housing. The atomizing unit includes an emitter electrode and an heat exchanger. The heat exchanger cools the emitter electrode to develop condensed water. A high voltage is applied to the emitter electrode in order to electrostatically atomizing the condensed water and generate a mist of charged minute water particles. The housing accommodates a fan generating an air flow accelerating a heat radiation of the heat exchanger, and a high voltage source generating the high voltage applied to the emitter electrode. The heat exchanger has its heat radiator section exposed to a flow passage of the air flow. The atomizing unit is formed with an air inlet for introducing the air flow which carries the mist of the charged minute water particles and release the mist. The atomizing unit and the high voltage source are arranged on opposite sides of the flow passage.

Abstract: During relative and horizontal movement of a mount frame, in which a semiconductor wafer with a protective tape is supported on a ring frame through a supporting adhesive tape, and a joining member, a position of an end edge of the protective tape is detected in a non-contact manner. Based on the detection result, a joining member is stopped in the position of the end edge of the protective tape and is moved close to the semiconductor wafer to press and bring a separation tape against and into contact with an end of the protective tape. In this state, the mount frame and the joining member are relatively and horizontally moved to join the separation tape onto the protective tape. Then, the mount frame and the joining member are relatively and horizontally moved to separate the separation tape together with the protective tape from a surface of the semiconductor wafer.

Abstract: A plasma generating device provided with a plasma generating chamber (10) and a high-frequency antenna (1) arranged in the chamber (10) for generating inductively coupled plasma by applying a high-frequency power to a gas in the chamber (10) from the antenna (1). The antenna (1) is a low-inductance antenna formed of a first portion (11) extending from the outside of the chamber (10) into the chamber (10), and a plurality of second portions (12) diverging from an inner end (11e) of the first portion (11) in an electrically parallel fashion, and having a termination (12e) directly connected to the inner wall of the grounded chamber (10). The surface of the antenna (1) is coated with an electrically insulating material. Frequency of the high-frequency power applied to the antenna may be in a range from 40 MHz to hundreds of megahertz.

Abstract: An illuminator emits light obliquely to an end of an adhesive film. A CCD camera is provided in a direction perpendicular to the adhesive film to capture an image of the light reflected irregularly from the end of the adhesive film. A black plate is provided on a back side of the adhesive film. In the image obtained by the CCD camera, therefore, only the end of the adhesive film is displayed whitely in a line shape. A position of the adhesive film is determined based on a line corresponding to the end of the adhesive film. Since the light reflected from the end of the adhesive film is utilized, the position of the adhesive film can be determined accurately irrespective of a color of the adhesive film, a color of a base film to which the adhesive film is joined, and a depth of each color.

Abstract: There are provided a scribing step of performing scribing in a state in which a protective material is applied on at least one surface of a brittle material substrate, and a first scribing device that performs this scribing step. Accordingly, it is possible to form a vertical crack that reaches deep inside of the substrate, while effectively removing cullets produced at the time of severing the substrate, thus performing precise severing along a scribe line.

Abstract: In association with movement of an affixation roller, a movement position of the affixation roller is detected by a rotation sensor based on a rotation amount of a motor. A control device changes and controls an amount of an adhesive tape to be fed forcibly based on a result of the detection, and keeps a tensile force applied to the adhesive tape in the affixation of the adhesive tape to the semiconductor wafer within a preset range.