Abstract: A thermal management device for use with a photolithographic apparatus or tool substantially reducing thermal distortion in a reticle. Planar cooling elements are placed adjacent a reticle being illuminated with extreme ultraviolet, EUV, electromagnetic radiation. A heating element provides heat prior to exposure of the reticle by the EUV electromagnetic radiation and the system is in thermal equilibrium. Upon exposure of the EUV electromagnetic radiation, absorption by the reticle causes heat. The heating element is controlled to reduce the heat provided so the extra heat load generated in the reticle during exposure due to absorption of the EUW electromagnetic radiation is compensated for. The reticle therefore experiences no net heat or thermal energy change, and therefore eliminates or substantially reduces both expansion and thermal gradients in the reticle.

Abstract: A reticle or mask for use in projecting a circuit pattern on a photosensitive resist covered wafer having a transparent substrate with a reflective or dielectric layer thereon. An opaque or blocking layer, for example chrome or chromium, is placed over the reflective layer. The opaque layer then has a predetermined circuit pattern etched therein. In one embodiment, the opaque layer and the reflective layer are the same size. In another embodiment, the opaque layer has a size larger than the reflective layer. This permits the opaque layer to be adjacent the substrate which is advantageous when projection optics having a high numerical aperture are used. The reticle of the present invention has particular advantage when high throughput photolithographic tools are used having an illumination source of high energy flux with a wavelength of between 157 nanometers and 365 nanometers. Illumination in this wavelength range has considerable absorption in chrome, a common opaque material used in reticles.

Abstract: A rotary engine having end plates attached to a rotor and moving therewith. A rotor has a plurality of blades reciprocally mounted therein and placed within a housing. A chamber is formed between the blades, the rotor, the end plates, and a cylindrical stator. The end plates move with the rotor, thereby improving sealing. The structure permits easy assembly and manufacture and substantially reduces sealing problems associated with rotary engines. The rotary engine may be applied to many applications where rotational motion is needed.

Abstract: A film cut into a screen is correctly and easily fitted onto a slide mount. For this purpose, the slide mount is formed by joining a mount and a cover together, and windows are opened in the central portions of the mount and the cover, respectively. A film-placing portion is provided surrounding the window of the mount, and positioning pins are studded at four corners of the film-placing portion so as to be corresponded to engaging holes at both side portions of the film. Positioning holes are perforated in the periphery of the window of the cover at positions opposed to the positioning pins. The film is placed on the film-placing portion, and the positioning holes of the cover are brought into engagement with the positioning pins of the mount while the cover is being depressed onto the film. Then, the engaging holes of the film engage with the positioning pins, and the film is correctly fitted onto the slide mount.

Abstract: A sliding and articulating roof rack adapted to be attached to a rack bar of a conventional roof rack that permits easy loading of an article holder attached thereto. A track attached to the rack bar has a sliding member therein permitting an arm to be moved co-axially along the track until extending out over the vehicle. The arm then pivots downward. The arm has an article holder attached thereto. By pivoting the arm downward, an article holder can be easily loaded with articles to be carried on the roof of a vehicle, such as skis or other items. In one embodiment of the present invention, an angularly fixed slide is slid co-axially with a track attached to a rack bar. A movable slide guide or track is then pivoted downward. A slide contained within the movable slide guide or track is then further extended further while in the downward pivoted position. This embodiment greatly facilitates the loading when vehicles are parked close to each other.

Abstract: A power gripper for a machine or robotic tool having a housing provided with a cylinder and piston for actuating a pair of finger carriers slidably mounted on the housing to reciprocate between open and closed positions wherein the range of opening is enhanced for a gripper of a given size. This is attained by the piston rod having a rack portion meshing with an idler pinion that is in meshing relationship with a rack formed on one of the finger carriers whereby the latter is synchronized relative to the movement of the piston. The other finger carrier is pinned to the piston to move therewith. In one form of the invention, a fluid pressure acting on the opposed ends of the piston effects the drive of the piston in either direction. In another form of the invention, a fluid pressure is imparted on one end of the piston only and which piston is spring biased to effect the drive of the piston in the opposite direction.

Abstract: A distance between the optical axes of the photographing lenses of a stereo camera is set to be smaller than the conventional distance between the optical axes so that when the films are mounted on a stereo slide mount being brought closest to each other, the distance Pi∞ between the centers of the subject images at an infinity of the right and left films becomes larger by from 0.7 to 1.2 mm than the distance Pw between the centers of the right and left windows of the stereo slide mount. The films shooting a picture at infinity down to a distance of 2 meters may be mounted on the positions of the smallest distance to obtain a suitable three-dimensional effect, and the distance between the films can be adjusted over a range of from the positions of the smallest distance up to the positions of the largest distance. The range for adjusting the distance is expanded compared to that of the conventional stereo cameras, enabling a subject in a closer range to be shot.

Abstract: The invention provides a process for purifying gallium alkoxides by decreasing the amount of impurity chlorine contained therein, gallium alkoxides which are useful as raw materials for the formation of dielectrics containing gallium oxide and as raw materials for the syntheses of compounds for photoelectronics. Gallium isopropoxide containing 0.98 weight percent of chlorine and potassium isopropoxide of 1.4 equivalents to the impurity chlorine are refluxed in toluene as a solvent for 5 hours, the solvent is distilled away, and the residue is simply distilled under vacuum to obtain gallium isopropoxide containing 0.022 weight percent of the chlorine in a 89% yield.

Abstract: A dental capsule or cartridge for packing, storing and dispensing a dental filling material and the like having a body portion for containing a predetermined amount of dental material having a discharge nozzle connected at one end of the body portion and having the other end opened and sealable by a displaceable piston. A sealing cap is integrally formed at the discharge end of the discharge nozzle and is connected thereto by a frangible or weakened portion whereby upon the application of a breaking force, the sealing cap is readily separated from the discharge end of the nozzle to expose or form the discharge orifice. The sealing cap may also be provided on one end thereof with a cavity or sealing spike by which the discharge orifice may be resealed, if desired. A vent is also provided adjacent the open end of the capsule to facilitate the filling of the capsule, and which is sealed by the seating of the displaceable piston in the open end.

Abstract: The apparatus includes a housing having a shredding station, a blending or mixing station, a receiving chamber for receiving boxes and/or crates in a shredded state, and a decomposition chamber for receiving a mixture of the shredded organic waste and the shredded carton material. A conveyor selectively directs either the crate waste in the shredded state from the shredding station to the receiving chamber or directs a mixture of shredded organic waste and the shredded crate material to the decomposition chamber.

Abstract: A gripper having a housing containing a piston and cylinder assembly and a pair of pinion gears rotatably journalled therein to oscillate in opposite directions. The housing is provided with a cruciform shaped guide way for accommodating a pair of finger carriers having a complementary cruciform shaped cross section slidably disposed within the guide way. A toggle arrangement including a cross-link connected to the piston and opposed connecting links interconnects the piston rod to the corresponding pinion gears so that, as the connecting links distend and extend upon the actuating of the piston, it results in reciprocation of the finger carriers to impart an enhanced closing force on the finger carriers in moving toward the closed position. Guide pins connected to the cross link and riding in slots on a cover plate enhance repeatability.

Abstract: In a hydraulic shovel which operates in a high-speed operation mode and a low-speed operation mode, an object of the present invention is to satisfy both low fuel consumption operation speed.